WO2011076503A1 - Interféromètre et dispositif capteur de pression doté d'un tel interféromètre - Google Patents

Interféromètre et dispositif capteur de pression doté d'un tel interféromètre Download PDF

Info

Publication number
WO2011076503A1
WO2011076503A1 PCT/EP2010/067935 EP2010067935W WO2011076503A1 WO 2011076503 A1 WO2011076503 A1 WO 2011076503A1 EP 2010067935 W EP2010067935 W EP 2010067935W WO 2011076503 A1 WO2011076503 A1 WO 2011076503A1
Authority
WO
WIPO (PCT)
Prior art keywords
reflector body
interferometer
light
reflection
reflection surface
Prior art date
Application number
PCT/EP2010/067935
Other languages
German (de)
English (en)
Inventor
Dietmar FRÜHAUF
Udo Grittke
Eberhard Manske
Original Assignee
Endress+Hauser Gmbh+Co.Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Endress+Hauser Gmbh+Co.Kg filed Critical Endress+Hauser Gmbh+Co.Kg
Publication of WO2011076503A1 publication Critical patent/WO2011076503A1/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02027—Two or more interferometric channels or interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02023—Indirect probing of object, e.g. via influence on cavity or fibre
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
    • G01K11/32—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in transmittance, scattering or luminescence in optical fibres
    • G01K11/3206—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in transmittance, scattering or luminescence in optical fibres at discrete locations in the fibre, e.g. using Bragg scattering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K5/00—Measuring temperature based on the expansion or contraction of a material
    • G01K5/48—Measuring temperature based on the expansion or contraction of a material the material being a solid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/25—Fabry-Perot in interferometer, e.g. etalon, cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals

Definitions

  • the present invention relates to an interferometer, in particular a white light interferometer, and a pressure sensor arrangement with such an interferometer.
  • a pressure sensor arrangement with a white light interferometer comprises a light source, at least one pressure sensor with a
  • Sensor interferometer which has a pressure-dependent path difference over a range of value of gear differences
  • evaluation interferometer which the path difference of
  • Sensor interferometer over the range of values of the sensor interferometer simulates, wherein the light source, the sensor interferometer and the Ausenseinterferometer are coupled together via optical fibers.
  • the sensor interferometers are usually Fabry-Perot interferometers, while the evaluation interferometers may comprise, for example, Michelson interferometers, Fabry-Perot interferometers or Fizeau interferometers.
  • Evaluation interferometer are to evaluate, so it is possible to
  • An evaluation interferometer for such a measurement arrangement must cover the entire value range of the possible path differences of all
  • irradiated, collimated white light comprises a first
  • Reflector body with at least two juxtaposed, parallel reflection surfaces, which are used to produce a
  • the stroke for example, at least one basic course difference, preferably at least the 1, 5 times, and more preferably at least twice, a path difference due to the offset between the first and second
  • Reflection surface of the first reflector body is.
  • the interferometer comprises at least two light-sensitive detectors, wherein the detectors are respectively assigned to exactly one of the reflection surfaces.
  • the movement of the first reflector body and / or the second reflector body comprises an oscillation around a rest position.
  • a determination of the position of the oscillating reflector body to determine the current takes place
  • the interferometer further comprises a capacitive transducer with a first, fixed electrode and a second electrode whose position relative to the first electrode depends on the position of the moving reflector body, wherein the
  • Capacitance of the capacitive transducer takes place.
  • the interferometer comprises a Michelson interferometer.
  • the interferometer comprises a drive for moving at least one reflector body.
  • the drive may in particular be a piezo drive, an electrostatic drive or a magnetic drive.
  • the interferometer further comprises a control unit for controlling the path differences between the light reflected at the reflection surfaces of the first reflector body and the light reflected at the reflection surface of the second reflector body by controlling the movement of at least one reflector body, the control unit being designed at least in one
  • Reflection on a first reflection surface of the first reflector body with to be able to compare a determined corresponding retardation due to a reflection on a second reflection surface of the first reflector body.
  • Gap difference is greater than the baseline difference due to the offset between two reflective surfaces, then the interferometer can a retardation by reflections at different
  • control unit is designed to set the stroke of the continuous change in the path differences to no more than one basic course difference in a measuring mode.
  • the sensor arrangement according to the invention comprises a light source, in particular coherent white light; at least two
  • an evaluation interferometer comprising an interferometer according to any one of the preceding claims, an optical fiber array comprising the light source, the sensor interferometer and the Ausreteinterferometer coupled together, and a
  • Collimator arrangement for collimating the light from the light guide assembly into the Ausenseinterferometer.
  • the sensory interferometers have pressure-dependent path differences or temperature-dependent
  • FIG. 1 shows a schematic illustration of an exemplary embodiment of a sensor arrangement according to the invention.
  • the sensor arrangement in Figure 1 is in particular a
  • Pressure sensor arrangement with a light source, in particular coherent white light, via an optical fiber assembly 4 to four
  • the evaluation interferometer comprises a first reflector body 16 with four reflection surfaces 16a, 16b, 16c, 16d offset from one another by the fundamental differences of the sensor interferometers 6a, 6b, 6c, 6d and a second reflector body having a reference reflection surface 14.
  • a beam splitter 12 which is at an angle of 45 ° ° to the incident light and the reflection surfaces 14, 16a, 16b, 16c, 16d, this leads Light the reflector bodies 14, 16 and allows the interfering superposition of the reflected light.
  • the interferometer further comprises a detector arrangement 18, with four detectors 18a, 18b, 18c, 18d, each one of the reflection surfaces 16a, 16b, 16c, 16d of the first
  • Reflector body 16 are assigned to receive light from this reflection surface.
  • the interferometer 1 further comprises a control and evaluation unit 20 which controls, for example, an electrostatic drive 22 for the second reflector body and receives position signals from the drive, wherein via the drive 22, the path differences between the at the reflection surfaces 16 a, 16 b, 16 c, 16 d of the first
  • Reflector body reflected light and the at the
  • Reference reflection surface 14 of the second reflector body reflected light can be varied continuously.
  • the detected signals of the detector arrangement 18 are supplied to the control and evaluation unit 20.
  • the path difference of the sensor interferometer and therefrom the respective pressure can be determined.
  • the stroke for continuously varying the path differences by moving the second reflector body can be checked by determining the same path difference by reflection after determining a reference path difference based on the reflection at a first reflection surface and after adding or subtracting a fundamental difference in movement of the second reflector body must be reproducible at a reflection surface offset by the Referenzgangunter Kunststoff. Deviations may give rise to a readjustment of the stroke and / or to an error message.

Abstract

L'invention concerne un interféromètre pour générer des différences de chemin dans de la lumière blanche injectée et collimatée, qui comprend un premier corps réflecteur (16) doté d'au moins deux surfaces de réflexion (16a, 16b, 16c, 16d) juxtaposées et parallèles, lesquelles sont décalées l'une par rapport à l'autre en direction de la normale des surfaces de réflexion afin de générer une différence de chemin de base, un second corps réflecteur (14) doté d'au moins une surface de réflexion de référence, la lumière réfléchie sur les surfaces de réflexion (16a, 16b, 16c, 16d) du premier corps réflecteur (16) étant superposée au moins en partie par interférence à la lumière réfléchie sur le second corps réflecteur (14), la différence de chemin respective entre la lumière réfléchie sur les surfaces de réflexion (16a, 16b, 16c, 16d) du premier corps réflecteur (16) et la lumière réfléchie sur la surface de réflexion du second corps réflecteur pouvant être modifiée de façon continue par le déplacement du premier corps réflecteur dans le sens de la normale des surfaces de réflexion et/ou par le déplacement du second corps réflecteur dans le sens de la normale de la surface de réflexion de référence.
PCT/EP2010/067935 2009-12-23 2010-11-22 Interféromètre et dispositif capteur de pression doté d'un tel interféromètre WO2011076503A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102009055230.8 2009-12-23
DE102009055230 2009-12-23

Publications (1)

Publication Number Publication Date
WO2011076503A1 true WO2011076503A1 (fr) 2011-06-30

Family

ID=43567511

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2010/067935 WO2011076503A1 (fr) 2009-12-23 2010-11-22 Interféromètre et dispositif capteur de pression doté d'un tel interféromètre

Country Status (1)

Country Link
WO (1) WO2011076503A1 (fr)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1937355A1 (de) * 1968-07-26 1970-01-29 Abramson Nils Hugo Leopold Laengenmessung mit einem Laser-Interferometer
WO1990009557A1 (fr) * 1989-02-18 1990-08-23 Cambridge Consultants Limited Interferometrie
US5202939A (en) 1992-07-21 1993-04-13 Institut National D'optique Fabry-perot optical sensing device for measuring a physical parameter
US6057911A (en) * 1997-11-17 2000-05-02 Northrop Grumman Corporation Fiber optic fabry-perot sensor for measuring absolute strain
US20020163643A1 (en) * 2001-05-04 2002-11-07 Li Chian Chiu Optical interference apparatus and method

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1937355A1 (de) * 1968-07-26 1970-01-29 Abramson Nils Hugo Leopold Laengenmessung mit einem Laser-Interferometer
WO1990009557A1 (fr) * 1989-02-18 1990-08-23 Cambridge Consultants Limited Interferometrie
US5202939A (en) 1992-07-21 1993-04-13 Institut National D'optique Fabry-perot optical sensing device for measuring a physical parameter
US6057911A (en) * 1997-11-17 2000-05-02 Northrop Grumman Corporation Fiber optic fabry-perot sensor for measuring absolute strain
US20020163643A1 (en) * 2001-05-04 2002-11-07 Li Chian Chiu Optical interference apparatus and method

Similar Documents

Publication Publication Date Title
DE2348272C3 (de) Interferometrische Vorrichtung zum Erfassen von Längenänderungen
DE60103482T2 (de) Lichtinterferenz
EP0561015A1 (fr) Mesure de phase interferométrique
EP0877913B1 (fr) Dispositif pour la mesure d'epaisseur d'objets transparents
EP1476716A1 (fr) Appareil interferometrique a basse coherence destine au balayage optique d'un objet
DE2814006A1 (de) Abtastinterferometer
DE102012104874B4 (de) Optisches Messsystem mit Polarisationskompensation, sowie entsprechendes Verfahren
DE102013009175A1 (de) Profilmessinstrument
DE19520305C2 (de) Verfahren und Meßvorrichtung zur interferometrischen Abstandsmessung
WO2006081998A1 (fr) Dispositif permettant de determiner la position de zones espacees d'objets transparents et/ou diffus
DE102010037207B3 (de) Rauheits-Messvorrichtung und -Messverfahren
WO2020035332A1 (fr) Système d'usinage au laser et procédé d'usinage d'une pièce au moyen d'un faisceau laser
EP1468244A2 (fr) Systeme optique interferometrique
WO2019063403A1 (fr) Procédé et dispositif de mesure sans contact d'une distance à une surface ou d'une distance entre deux surfaces
WO2008128829A1 (fr) Procédé et dispositif de mesure de pression
DE2650422B1 (de) Abstandsmessgeraet
WO2011076503A1 (fr) Interféromètre et dispositif capteur de pression doté d'un tel interféromètre
DE102013217216B4 (de) Verfahren und Vorrichtung zur Fehlerermittlung und Fehlerkompensation eines inkrementellen Sensors
DE4011724C2 (fr)
DE102010001338B3 (de) Verfahren zum Überwachen der Stabilität einer Justageeinstellung einer interferometrischen Messvorrichtung
DE10337894A1 (de) Optisches Messsystem zum Erfassen von Geometriedaten von Oberflächen
DE102009027266A1 (de) Interferometrische Weg- und/oder Drehmessvorrichtung
DE102015209567B3 (de) Optischer Mehrwellenlängen-Sensor zur Messung von Abständen zu einer Oberfläche und entsprechendes Messgerät
DE102021121568B3 (de) Vorrichtung und Verfahren zur Bestimmung der Wellenlängen des Laserlichts im Bereich der Messstrecke eines Mehrwellenlängeninterferometers
DE102011087978A1 (de) Verfahren und Anordnung zur Bestimmung des Brechzahlgradienten eines Materials

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 10781504

Country of ref document: EP

Kind code of ref document: A1

122 Ep: pct application non-entry in european phase

Ref document number: 10781504

Country of ref document: EP

Kind code of ref document: A1