WO2011009397A1 - 采用三维永磁阵列的平面电机 - Google Patents

采用三维永磁阵列的平面电机 Download PDF

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WO2011009397A1
WO2011009397A1 PCT/CN2010/075304 CN2010075304W WO2011009397A1 WO 2011009397 A1 WO2011009397 A1 WO 2011009397A1 CN 2010075304 W CN2010075304 W CN 2010075304W WO 2011009397 A1 WO2011009397 A1 WO 2011009397A1
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permanent magnet
type
array
dimensional
pole
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French (fr)
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朱煜
张鸣
汪劲松
闵伟
胡金春
尹文生
杨开明
徐登峰
段广洪
蔡田
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Tsinghua University
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Tsinghua University
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom

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  • the invention relates to a planar motor, in particular to a planar motor using a three-dimensional permanent magnet array, which is mainly used in the field of manufacturing equipment and robots.
  • the conventional planar positioning device is formed by vertically stacking two or more linear driving units, each linear driving unit consisting of a rotating motor, a linear motion conversion mechanism and a linear guide, or a linear motor and A set of linear guides.
  • the linear drive unit at the bottom layer not only bears the drive of the end support table, but also the mass of the top linear drive unit, thus causing the planar positioning device to be in multiple directions (such as the X direction of the conventional XY table and In the Y direction, the motion inertia is seriously unbalanced, which affects the improvement of performance indexes such as motion stroke, response speed, and motion accuracy.
  • a planar motor that directly drives a single mover with electromagnetic force to directly realize multi-degree-of-freedom motion emerges at the historic moment. It avoids the idea of the conventional multi-degree-of-freedom work platform stack drive, and the precise planar positioning device It has broad application prospects and has received extensive attention.
  • the planar motor can be divided into an air floating plane motor and a magnetic floating plane motor, which adopt the air floating and magnetic floating modes to realize the non-motion freedom (such as yaw, Constraints of vertical and horizontal.
  • the magnetic floating method has the advantages of simple structure, no need for precision machining on the surface of the pedestal, active restraint of non-motional freedom, and easy application in a vacuum environment.
  • the current permanent magnet arrays all use 2D planar permanent magnet arrays.
  • the main structures are shown in Figure 1.
  • the array form shown in Figure 1(a) is first published by Asakawa in the patent "Two". Dimensional positioning devices" (U.S. Patent 4626 749, Dec. Presented in 1986.);
  • Figure 1(b) shows the array form by Chitayat in the patent "Two-axis motor with high density magnetic Presented in platen (U.S. Patent 5777 402, July 1998); Trumper et al. in the patent "Magnetic arrays" ( U.S. Patent 5,631, 618, May 1997) proposes an array of Halbach structures as shown in Figure 1(c); Cho et al.
  • the schach permanent magnet arrays commonly found in the literature are shown in Figure 1(e).
  • the above-mentioned permanent magnet arrays are all 2D planar permanent magnet arrays, and the spatial distribution of the permanent magnets inside the array does not change with the change of Z. Therefore, we can construct a 3D planar permanent magnet array to further improve the ratio of the field strength of the working space of the permanent magnet array to its own mass.
  • a planar motor using a three-dimensional permanent magnet array The utility model comprises a mover 5 and a stator 6 , wherein the planar motor comprises a moving iron structure using a permanent magnet array as a stator or a permanent magnet array as a moving iron structure, wherein the permanent magnet array adopts three-dimensional a permanent magnet array consisting of an S-type regular quadrangular large permanent magnet having an S-pole on the upper bottom surface, an N-type regular quadrangular large permanent magnet 2 having an upper surface and an N-pole, and a small permanent magnet 3, the S-type And the N-type positive quadrangular large permanent magnets are magnetized along the center line of the respective upper and lower bottom surfaces, and the small permanent magnet 3 is obtained by symmetrically cutting a quadrangular pyramid at the upper and lower bottom surfaces by a straight triangular prism whose bottom surface is an isosceles triangle.
  • the two sides of the small permanent magnet 3 are made into an isosceles trapezoid with one side of the N-type regular quadrangular large permanent magnet, and the magnetization direction is parallel to the bottom direction of the isosceles triangle of the bottom surface, and the S-type regular quadrangular large permanent magnets 1 and N
  • the positive quadrilateral large permanent magnet 2 has a lower bottom surface facing downward and is staggered in a plane array along the X direction and the Y direction; the small permanent magnet 3 is arranged between two adjacent S-type and N-type large permanent magnets, so that the small permanent magnet 3 sides are respectively associated with N-type and S-type positive four A side surface of the permanent magnet coincides NTU, and the magnetization direction of the small permanent magnet 3 is composed of N-type regular quadrangular NTU N pole of the permanent magnet 2 is directed to the adjacent S-shaped regular quadrangular NTU S pole of the permanent magnet 1.
  • the technical feature of the present invention is also that, for a moving iron structure using a permanent magnet array as a mover, the stator 6 is composed of a plurality of mutually perpendicular coil arrays, each coil array being linearly composed of a plurality of rectangular coreless coils 4 Arranged; for a moving coil type structure using a permanent magnet array as a stator, the mover is composed of a plurality of coil arrays, and adjacent coil arrays are perpendicular to each other, and each coil array is composed of a plurality of rectangular coreless coils 4 linearly arranged.
  • the technical feature of the present invention is also that the arrangement direction of the coil array is 45° with the arrangement direction of the permanent magnet array.
  • the planar motor adopting the three-dimensional permanent magnet array according to the present invention has the following advantages and outstanding effects: a three-dimensional permanent magnet array is adopted, which further improves the ratio of the field strength of the permanent air array working air gap to its own mass, thereby driving current The constant thrust and suspension capability of the planar motor is improved under constant conditions, which greatly improves the acceleration and load capacity of the planar motor.
  • Figure 1 shows several permanent magnet arrays disclosed in the prior art.
  • FIG. 2 is a three-dimensional view of a planar motor employing a three-dimensional permanent magnet array in accordance with the present invention.
  • FIG. 3 is a three-dimensional view of a positive quadrilateral large permanent magnet of a planar motor using a three-dimensional permanent magnet array according to the present invention.
  • FIG. 4 is a three-dimensional view of a small permanent magnet of a planar motor using a three-dimensional permanent magnet array according to the present invention.
  • FIG. 5 is an assembled three-dimensional view of two positive quadrangular large permanent magnets and one small permanent magnet of a planar motor using a three-dimensional permanent magnet array according to the present invention.
  • Fig. 6 is a view showing the relationship of the vertical component of the air gap magnetic induction intensity of the permanent magnet array according to the present invention with respect to the XY coordinates.
  • Figure 2 is a three-dimensional view of a planar motor using a three-dimensional permanent magnet array according to the present invention.
  • the planar motor using the three-dimensional permanent magnet array of the present invention includes a mover 5 and a stator 4, and the mover adopts a three-dimensional permanent magnet array.
  • the permanent magnet array adopts a three-dimensional permanent magnet array, which is composed of an S-type regular quadrangular large permanent magnet with an S-pole on the upper bottom surface, an N-type regular quadrangular large permanent magnet 2 with an upper surface and an N-pole, and a small permanent magnet.
  • the S-type and N-type regular quadrangular large permanent magnets are magnetized along the center line of the respective upper and lower bottom surfaces, and the small permanent magnet 3 is symmetrical at the upper and lower bottom surfaces by a straight triangular prism whose bottom surface is an isosceles triangle A quadrangular pyramid is cut off, so that the two sides of the small permanent magnet 3 become an isosceles trapezoid with one side of the N-type regular quadrangular large permanent magnet, and the magnetization direction is parallel to the bottom direction of the isosceles triangle of the bottom surface, S-type positive four
  • the ribbed large permanent magnet 1 and the N-type regular quadrangular large permanent magnet 2 have a lower bottom surface facing downward, and are staggered in a plane array along the X direction and the Y direction; the small permanent magnet 3 is arranged in two adjacent S-type and N-type large permanent magnets.
  • Fig. 5 is a three-dimensional view showing the arrangement of small permanent magnets between S-type regular quadrangular large permanent magnets and N-type regular quadrangular large permanent magnets.
  • the "S" and “N” in the figure indicate that the upper and lower faces of the large square permanent magnet are S pole and N pole, respectively.
  • the arrows indicate the direction of magnetization of the small permanent magnets.
  • the two sides of the small permanent magnet respectively coincide with the sides of the two positive quadrangular large permanent magnets.
  • the planar motor adopts a magnetic floating manner to achieve a constraint on non-movement degrees of freedom;
  • the stator 6 is composed of a plurality of mutually perpendicular coil arrays, each of which is linearly arranged by a plurality of rectangular coreless coils 4
  • the alignment direction of the coil array is 45° with the arrangement direction of the permanent magnet array.
  • FIG. 6 is a schematic diagram showing the relationship of the vertical component Bz of the air gap magnetic induction intensity of the planar permanent magnet array shown in FIG. 2 with respect to the XY coordinates by finite element simulation analysis.
  • ⁇ is the polar distance The distance between the centers of the upper and lower surfaces of the two adjacent positive quadrangular permanent magnets in 2 The distance between two adjacent peaks of the air gap magnetic induction of the 2 mid-plane permanent magnet array.
  • the three-dimensional permanent magnet array has the same magnetic induction intensity of the working air gap than the existing several permanent magnet arrays under the same mass, thus improving the thrust of the planar motor under the condition of constant driving current. And the ability to suspend, greatly improve the acceleration and load capacity of the planar motor.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Linear Motors (AREA)

Description

采用三维永磁阵列的平面电机
本发明涉及一种平面电机，特别是一种采用三维永磁阵列的平面电机，主要应用于制造设备与机器人领域。
在许多工业设备中，我们需要驱动工件或工作台做平面运动并在平面上对其进行精确定位，例如显微镜的载物台，光刻机中的硅片台等设备。传统的平面定位装置由两套或多套直线驱动单元垂直叠加而成，每套直线驱动单元由一台旋转电动机、一套直线运动转换机构和一套直线导轨组成，或者由一台直线电机和一套直线导轨组成。位于底层的直线驱动单元不仅承担末端承件台的驱动，而且还承载着顶层直线驱动单元的质量，于是造成了平面定位装置在多个方向上（如传统XY工作台的X方向和 Y方向）运动惯量的严重不均衡，从而影响了运动行程、响应速度、运动精度等性能指标的提高。在这种背景下，采用电磁力直接驱动单一动子直接实现多自由度运动的平面电机则应运而生,它避开了传统多自由度工作台叠层驱动的思路，在精密的平面定位装置中具有广阔的应用前景，受到广泛的关注。
根据平面电机非运动自由度的约束方式和涉及的技术领域，可将平面电机划分为气浮平面电机和磁浮平面电机，它们分别采用气浮和磁浮方式实现对非运动自由度（如偏摆、纵顷和横顷）的约束。相比于气浮方式，磁浮方式具有结构简单、基座表面无需精密加工、可实现非运动自由度的主动约束、易在真空环境中应用等优点。
目前的磁浮平面电机一般由通电线圈在永磁阵列气隙磁场中产生的洛伦兹力提供驱动力和悬浮支承。随着对平面电机加速度和负载性能指标的要求不断提高，我们需要不断提高永磁阵列气隙磁场强度。特别是对于采用永磁阵列作为动子的动铁式磁浮平面电机，具有无线缆干扰，适应真空的工作环境等突出优点，但是永磁阵列本身的重力已经负载的重力需要电磁力来支承。这就要求我们不断提高永磁阵列工作气隙的场强与自身质量的比值，及在质量不变的前提下不断提高气隙的磁感应强度。
目前的永磁阵列都采用2D平面永磁阵列，主要的几种结构如图1所示，图1（a）所示阵列形式由Asakawa首先在专利《Two dimensional positioning devices》（U.S. Patent 4626 749, Dec. 1986.）中提出；图1（b）所示阵列形式由Chitayat在专利《Two-axis motor with high density magnetic platen》（ U.S. Patent 5777 402, July 1998）中提出； Trumper等人在专利《Magnetic arrays》（ U.S. Patent 5631 618, May 1997）中提出了一种Halbach结构的阵列形式如图1（c）所示；Cho等人在文章《Magnetic field analysis of 2-D permanent magnet array for planar motor 》 （ IEEETransactions on Magnetics, 2001, 37(5):3762 ~ 3766.）中提出了图1（d）所示阵列形式,并对以上几种结构做了比较，认为图a所示阵列形式的磁组装密度只及直线永磁电动机磁组装密度的一半；图1（b）和图1（c）所示阵列形式的磁组装密度也低于直线永磁电动机的磁组装密度，给出了四种阵列形式表面气隙磁通密度分布的解析解，并计算了这几种结构的表面气隙磁通密度分布，证明与其他三种阵列形式相比，图d所示阵列形式具有更高的表面气隙磁通密度。另外一种，文献中常见的halbach永磁阵列如图1（e）所示。上述这几种永磁阵列都是2D平面永磁阵列，阵列内部永磁体的空间分布不随Z的变化而变化。因此我们可以构造出3D平面永磁阵列，进一步提高永磁阵列工作气隙的场强与自身质量的比值。
 技术问题
本发明的目的是提供一种采用三维永磁阵列的平面电机。
技术解决方案
本发明的技术方案如下：
一种采用三维永磁阵列的平面电机, 包含有动子5和定子6，所述平面电机包括采用永磁阵列作为定子的动圈式结构或永磁阵列作为动子的动铁式结构，其特征在于：所述的永磁阵列采用三维永磁阵列，该三维永磁阵列由上底面为S极的S型正四棱台大永磁体1、上底面为N极的N型正四棱台大永磁体2和小永磁体3组成，所述S型和N型正四棱台大永磁体都沿各自的上下两底面中心连线方向充磁，所述小永磁体3由底面为等腰三角形的直三棱柱在上下底面处对称截去一个四棱锥得到，使得小永磁体3两个侧面成为与N型正四棱台大永磁体一个侧面全等的等腰梯形，充磁方向平行于底面等腰三角形的底边方向，S型正四棱台大永磁体1和N型正四棱台大永磁体2下底面朝下，且沿X方向和Y方向交错排列成平面阵列；小永磁体3布置在相邻两个S型和N型大永磁体之间，使得小永磁体3两个侧面分别与N型和S型正四棱台大永磁体的一个侧面重合，且小永磁体3充磁方向由N型正四棱台大永磁体2的N极指向相邻的S型正四棱台大永磁体1的S极。
本发明的技术特征还在于：对于采用永磁阵列作为动子的动铁式结构，所述定子6由多个互相垂直的线圈阵列组成，每个线圈阵列由多个矩形无铁芯线圈4线性排列而成；对于用永磁阵列作为定子的动圈式结构，所述的动子由多个线圈阵列组成，相邻线圈阵列之间相互垂直，每个线圈阵列由多个矩形无铁芯线圈4线性排列而成。
本发明的技术特征还在于：所述线圈阵列的排列方向与所述永磁阵列的排列方向成45°。
 有益效果
本发明所述的采用三维永磁阵列的平面电机具有以下优点及突出性效果：采用了三维永磁阵列，进一步提高了永磁阵列工作气隙的场强与自身质量的比值，从而在驱动电流不变的情况下提高了平面电机的推力和悬浮能力，大大提高了平面电机的加速度和带负载能力。
附图说明
图1现有技术中公开的几种永磁阵列。
图2是本发明所述采用三维永磁阵列的平面电机的三维视图。
图3是本发明所述采用三维永磁阵列的平面电机的正四棱台大永磁体三维视图。
图4是本发明所述采用三维永磁阵列的平面电机的小永磁体三维视图。
图5是本发明所述采用三维永磁阵列的平面电机的两个正四棱台大永磁体和一个小永磁体的装配三维视图。
图6本发明所述永磁阵列气隙磁感应强度竖直分量关于 XY坐标的变化关系示意图。
图中： 1-S型正四棱台大永磁体；2-N型正四棱台大永磁体；3－小永磁体；4－线圈；5－动子；6－定子；
 本发明的实施方式
下面结合附图对本发明的具体结构、机理和工作过程作进一步的说明。
图 2是本发明所述采用三维永磁阵列的平面电机的三维视图，由图可知本发明所述采用三维永磁阵列的平面电机包括动子5和定子4，动子采用三维永磁阵列，所述的永磁阵列采用三维永磁阵列，该三维永磁阵列由上底面为S极的S型正四棱台大永磁体1、上底面为N极的N型正四棱台大永磁体2和小永磁体3组成，所述S型和N型正四棱台大永磁体都沿各自的上下两底面中心连线方向充磁，所述小永磁体3由底面为等腰三角形的直三棱柱在上下底面处对称截去一个四棱锥得到，使得小永磁体3两个侧面成为与N型正四棱台大永磁体一个侧面全等的等腰梯形，充磁方向平行于底面等腰三角形的底边方向，S型正四棱台大永磁体1和N型正四棱台大永磁体2下底面朝下，且沿X方向和Y方向交错排列成平面阵列；小永磁体3布置在相邻两个S型和N型大永磁体之间，使得小永磁体3两个侧面分别与N型和S型正四棱台大永磁体的一个侧面重合，且小永磁体3充磁方向由N型正四棱台大永磁体2的N极指向相邻的S型正四棱台大永磁体1的S极。
图5给出了在S型正四棱台大永磁体和N型正四棱台大永磁体中间布置小永磁体的三维示意图。图中的“S”和“N”表示正四棱台大永磁体的上底面分别为S极和N极。箭头表示小永磁体的充磁方向。小永磁体的两个侧面分别与两个正四棱台大永磁体的侧面重合。
如图2所示，平面电机采用磁浮方式实现对非运动自由度的约束；所述定子6由多个互相垂直的线圈阵列组成，每个线圈阵列由多个矩形无铁芯线圈4线性排列而成；线圈阵列的排列方向与所述永磁阵列的排列方向成45°。
三维永磁阵列在动子和定子之间的气隙中或接触面上产生气隙磁场。图 6是通过有限元仿真分析得到的图2所示平面永磁阵列的气隙磁感应强度竖直分量 Bz关于 XY坐标的变化关系示意图。τ为极距即图 2中两个相邻正四棱台大永磁体上底面中心的距离，也是图 2中平面永磁阵列的气隙磁感应强度两相邻峰值之间的距离。通过仿真分析，我们发现三维永磁阵列，在质量相同的情况下，工作气隙的磁感应强度高于现有的几种永磁阵列，从而在驱动电流不变的情况下提高了平面电机的推力和悬浮能力，大大提高了平面电机的加速度和带负载能力。

Claims (1)

1．一种采用三维永磁阵列的平面电机, 包含有动子（5）和定子（6），所述平面电机包括采用永磁阵列作为定子的动圈式结构或永磁阵列作为动子的动铁式结构，其特征在于：所述的永磁阵列采用三维永磁阵列，该三维永磁阵列由上底面为S极的S型正四棱台大永磁体（1）、上底面为N极的N型正四棱台大永磁体（2）和小永磁体（3）组成，所述S型和N型正四棱台大永磁体都沿各自的上下两底面中心连线方向充磁，所述小永磁体（3）由底面为等腰三角形的直三棱柱在上下底面处对称截去一个四棱锥得到，使得小永磁体（3）两个侧面成为与N型正四棱台大永磁体一个侧面全等的等腰梯形，充磁方向平行于底面等腰三角形的底边方向，S型正四棱台大永磁体（1）和N型正四棱台大永磁体（2）下底面朝下，且沿X方向和Y方向交错排列成平面阵列；小永磁体（3）布置在相邻两个S型和N型大永磁体之间，使得小永磁体（3）两个侧面分别与N型和S型正四棱台大永磁体的一个侧面重合，且小永磁体（3）充磁方向由N型正四棱台大永磁体（2）的N极指向相邻的S型正四棱台大永磁体（1）的S极。
2．按照权利要求1所述的采用三维永磁阵列的平面电机，其特征在于：对于采用永磁阵列作为动子的动铁式结构，所述定子（6）由多个互相垂直的线圈阵列组成，每个线圈阵列由多个矩形无铁芯线圈（4）线性排列而成；对于用永磁阵列作为定子的动圈式结构，所述的动子由多个线圈阵列组成，相邻线圈阵列之间相互垂直，每个线圈阵列由多个矩形无铁芯线圈（4）线性排列而成。
3. 按照权利要求2所述的采用三维永磁阵列的平面电机，其特征在于：所述线圈阵列的排列方向与所述永磁阵列的排列方向成45°。
PCT/CN2010/075304 2009-07-21 2010-07-20 采用三维永磁阵列的平面电机 Ceased WO2011009397A1 (zh)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017502646A (ja) * 2013-12-31 2017-01-19 シャンハイ マイクロ エレクトロニクス イクイプメント カンパニー リミティド 磁石アレイ及び磁気浮上平面モータ
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Families Citing this family (19)

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Publication number Priority date Publication date Assignee Title
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US12476527B2 (en) * 2019-11-27 2025-11-18 B&R Industrial Automation GmbH Transport device
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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6285097B1 (en) * 1999-05-11 2001-09-04 Nikon Corporation Planar electric motor and positioning device having transverse magnets
CN1758512A (zh) * 2005-10-27 2006-04-12 西安交通大学 动磁型同步表面电机
CN101214617A (zh) * 2007-12-28 2008-07-09 清华大学 动圈式大范围移动磁浮六自由度工作台
CN101610054A (zh) * 2009-07-21 2009-12-23 清华大学 采用三维永磁阵列的平面电机

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6285097B1 (en) * 1999-05-11 2001-09-04 Nikon Corporation Planar electric motor and positioning device having transverse magnets
CN1758512A (zh) * 2005-10-27 2006-04-12 西安交通大学 动磁型同步表面电机
CN101214617A (zh) * 2007-12-28 2008-07-09 清华大学 动圈式大范围移动磁浮六自由度工作台
CN101610054A (zh) * 2009-07-21 2009-12-23 清华大学 采用三维永磁阵列的平面电机

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017502646A (ja) * 2013-12-31 2017-01-19 シャンハイ マイクロ エレクトロニクス イクイプメント カンパニー リミティド 磁石アレイ及び磁気浮上平面モータ
KR101810202B1 (ko) 2013-12-31 2017-12-18 상하이 마이크로 일렉트로닉스 이큅먼트(그룹) 컴퍼니 리미티드 자석 배열 및 자기 서스팬션 평면 모터
CN111416496A (zh) * 2020-04-26 2020-07-14 山东理工大学 一种基于复合式Halbach阵列的动圈式电磁直线作动器
CN111416496B (zh) * 2020-04-26 2024-04-05 山东理工大学 一种基于复合式Halbach阵列的动圈式电磁直线作动器

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