WO2010150411A1 - Hard coating film and tool coated with hard coating film - Google Patents

Hard coating film and tool coated with hard coating film Download PDF

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Publication number
WO2010150411A1
WO2010150411A1 PCT/JP2009/061785 JP2009061785W WO2010150411A1 WO 2010150411 A1 WO2010150411 A1 WO 2010150411A1 JP 2009061785 W JP2009061785 W JP 2009061785W WO 2010150411 A1 WO2010150411 A1 WO 2010150411A1
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Prior art keywords
layer
hard coating
group
film thickness
iii
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PCT/JP2009/061785
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French (fr)
Japanese (ja)
Inventor
博昭 杉田
孝臣 戸井原
崇雅 鈴木
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オーエスジー株式会社
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Priority to JP2011519462A priority Critical patent/JP5422651B2/en
Priority to PCT/JP2009/061785 priority patent/WO2010150411A1/en
Publication of WO2010150411A1 publication Critical patent/WO2010150411A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23C—MILLING
    • B23C5/00—Milling-cutters
    • B23C5/02—Milling-cutters characterised by the shape of the cutter
    • B23C5/10—Shank-type cutters, i.e. with an integral shaft
    • B23C5/1009—Ball nose end mills
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23C—MILLING
    • B23C2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
    • B23C2228/10—Coating

Definitions

  • the present invention relates to a hard coating, and more particularly to an improvement of a hard coating excellent in wear resistance and welding resistance.
  • Patent Document 1 proposes that a B layer having excellent welding resistance is provided on an A layer having excellent wear resistance, and the A layer includes nitrides such as Ti, Cr, Al, and Si,
  • the B layer is made of an oxide such as Ti, Cr, Al, Si, or a boride.
  • the present invention has been made against the background of the above circumstances.
  • the purpose of the present invention is that a hard coating having excellent wear resistance and welding resistance is provided on a tool base material with high adhesion strength, and is used at high temperatures. It is to ensure that excellent wear resistance and welding resistance can be obtained stably over a long period of time.
  • the first invention is a hard coating having excellent wear resistance and welding resistance provided on the surface of a predetermined member, and (a) is provided in contact with the surface of the member.
  • a multilayer structure having a third layer, a second layer provided on the third layer, and an first layer constituting the surface provided on the second layer, and (b) the first layer (B-1) AlCrN or AlCr ⁇ N [wherein the atomic ratio of Cr and Al is 0.25 ⁇ Cr / Al ⁇ 0.67, ⁇ is the IVa group, Va group, VIa group (Cr except), Y and Ia layer made of, and any one among SiC], (b-2) (Cr 1-ab B a X b) (C c O d N 1-cd) [However, a, b, c, and d are atomic ratios, and 0 ⁇ a ⁇ 0.2, 0 ⁇ b ⁇ 0.5, 0 ⁇ c ⁇ 0.5, 0 ⁇ d
  • a mixed layer of both of the Ia layer and the Ib layer is provided at the boundary between the I layer and (b) the I layer.
  • a mixed layer of both is provided at a boundary portion with the second layer, and
  • a mixed layer of both is provided at a boundary portion between the second layer and the third layer III.
  • the third invention is the hard coating of the first invention or the second invention, wherein (a) the total film thickness Ttotal ⁇ of the I layer, the II layer, and the III layer is in the range of 0.1 to 15 ⁇ m. (B) The thickness T1 of the I layer is in the range of 1 to 50% of the total thickness Ttotal, and (c) ⁇ The thickness T3 of the III layer is 1 to 25% of the total thickness Ttotal. Within the range of (d), the film thickness T2 of the II layer is (Ttotal ⁇ T1-T3).
  • the fourth invention relates to a hard coating coated tool, characterized in that the surface of the tool base material is coated with the hard coating of any of the first to third inventions.
  • the hard coating of the first invention is AlCrN or AlCrDN [wherein the atomic ratio of Cr to Al is 0.25 ⁇ Cr / Al ⁇ 0.67, D is IVa group, Va group, VIa group in the periodic table of elements ( (Excluding Cr), any one of Y, and SiC] can provide excellent wear resistance, and can form a hard coating such as a tool base material.
  • a metal nitride or carbonitriding composed of one or more elements selected from B, Al, Ti, Y, Zr, Hf, V, Nb, Ta, Cr, and W High adhesion strength can be obtained because the third layer composed of a material or carbide is interposed.
  • the I layer provided on the II layer is composed of one cycle with a laminating cycle of 10 nm or more (total thickness of the Ia layer and the Ib layer) so that the Ia layer becomes the outermost layer. or alternately formed by laminating, the Ib layer, (Cr 1-ab B a X b) (C c O d N 1-cd) [where, a, b, c, d are each an atomic ratio, 0 ⁇ A ⁇ 0.2, 0 ⁇ b ⁇ 0.5, 0 ⁇ c ⁇ 0.5, 0 ⁇ d ⁇ 0.3, where X is group IVa, group Va, group VIa ( (Excluding Cr), Y, and SiC], the friction coefficient is reduced and excellent welding resistance is obtained.
  • the Ia layer is AlCrN or AlCr ⁇ N (wherein the atomic ratio of Cr and Al is 0.25 ⁇ Cr / Al ⁇ 0.67, ⁇ is IVa group, Va group, VIa group (except for Cr) in the periodic table of elements) , Y, and SiC], the heat resistance is improved, and the welding is performed at high temperatures such as high speed cutting while maintaining the welding resistance by the Ib layer. Even in this case, excellent wear resistance can be obtained.
  • the hard coating of the first invention excellent wear resistance and welding resistance can be stably obtained over a long period of time even when used under high temperature processing conditions.
  • a hard film coated tool as in the fourth invention even when cutting on stainless steel or cutting on a work material that is easily welded at 50 HRC or less, etc., under high processing conditions, peeling or chipping is performed. Abrasion is suppressed, a good machining surface is obtained, and predetermined machining performance is stably obtained, thereby improving the tool life.
  • a mixed layer of both is provided at the boundary between the Ia layer and the Ib layer of the I layer, and a mixed layer of both is provided at the boundary between the I and II layers. Since the mixed layer of both layers is also provided at the boundary portion between the first layer III and the third layer III, the adhesion strength between these layers also increases, and peeling and chipping wear are more effectively suppressed.
  • the Ia layer to the VIII layer are formed by the PVD method such as the arc ion plating method or the sputtering method, the switching timing of the target and the reactive gas is appropriately set so that the mixed layer is formed. As a result, the layers III to Ia including the mixed layer can be formed continuously and efficiently.
  • the total film thickness TtotalT of the I-th layer to the III-layer is in the range of 0.1 to 15 ⁇ m
  • the film thickness T1 of the I-layer is in the range of 1 to 50% of the total film thickness Ttotal
  • the film thickness T3 of the third layer III is in the range of 1 to 25% of the total film thickness Ttotal
  • the film thickness T2 of the second layer is (Ttotal ⁇ T1-T3).
  • FIG. 2 It is a diagram showing a ball end mill to which the present invention is applied, (a) is a front view seen from the direction perpendicular to the axis, (b) is an enlarged bottom view seen from the tip side, (c) is provided with a hard coating It is an expanded sectional view of the surface vicinity of the blade part. It is a figure explaining the film structure of the hard film of several test goods containing this invention goods and a comparative product. The figure which shows the film thickness of each layer of the hard film of the test product of FIG. 2 and explains the result of examining the flank wear width (wear resistance) by cutting the test product under predetermined processing conditions It is.
  • FIG. 3 is a conceptual diagram illustrating a pin-on-disk friction test apparatus when performing a friction coefficient test using a test piece provided with the same hard coating as the predetermined test product of FIG. 2. It is a figure which shows the oxide layer thickness measured by the oxidation test together with the friction coefficient investigated using the apparatus of FIG.
  • the present invention is suitably applied to hard coatings provided on the surfaces of various processing tools such as end mills, taps, and rotary cutting tools such as drills, non-rotating cutting tools such as cutting tools, and rolling tools.
  • the present invention can also be applied to a hard coating provided on the surface of a member other than a processing tool such as a surface protective film of a semiconductor device or the like.
  • a processing tool such as a surface protective film of a semiconductor device or the like.
  • the tool base material of the hard coating coated tool cemented carbide, high speed tool steel, cermet, ceramics, polycrystalline diamond (PCD), single crystal diamond, polycrystalline CBN, single crystal CBN are preferably used. It is also possible to adopt the following tool material.
  • an arc ion plating method, a sputtering method, a PVD method (physical vapor deposition method) such as a PLD (Puls LASER Deposition) method is preferably used.
  • a metal target having the same composition may be prepared.
  • the carbide, carbonitride, and nitride of the third layer III layer, nitrogen, carbon, or oxygen may be supplied as a reaction gas.
  • SiC as an option of ⁇ , X, and D means that an alloy of AlCr ⁇ , CrBX, and AlCrD is formed in the form of a compound called silicon carbide.
  • X is one of IVa group, Va group, VIa group (excluding Cr), Y, and SiC of the periodic table of elements
  • X of the Ib layer consisting of two or more types may be one kind of element or compound (SiC), but may contain two or more kinds of elements or compounds, and consists of two or more kinds of elements or compounds
  • the total of these atomic ratios may be within the range of the atomic ratio b, that is, 0.5 or less.
  • AlCrN or AlCr ⁇ N (wherein the atomic ratio of Cr to Al is 0.25 ⁇ Cr / Al ⁇ 0.67, ⁇ is IVa group, Va group, VIa group (excluding Cr), Y in the periodic table of elements, and Y ⁇ of the Ia layer made of any one of SiC] is appropriately determined separately from X of the Ib layer, but may be the same as X of the Ib layer.
  • AlCrN or AlCrDN (wherein the atomic ratio of Cr to Al is 0.25 ⁇ Cr / Al ⁇ 0.67, D is IVa group, Va group, VIa group (excluding Cr), Y in the periodic table of elements, and Y
  • the D of the II layer composed of any one of SiC] is also determined separately from the ⁇ of the Ia layer and the X of the Ib layer, but the ⁇ of the Ia layer or the X of the Ib layer It may be the same. ⁇ in the Ia layer, X in the Ib layer, and D in the II layer may be the same.
  • a mixed layer of both is provided at the boundary between the Ia layer and the Ib layer of the I layer, and a mixed layer of both is provided at the boundary between the I and II layers.
  • a mixed layer of the two is provided at the boundary between the first layer III and the second layer III.
  • the second layer is formed directly on the third layer III.
  • the I layer may be formed directly on the top.
  • the Ia layer and Ib layer of the I layer may also be directly stacked without interposing a mixed layer.
  • the mixed layer may be provided only for a part of the boundary portion.
  • the total film thickness Ttotal is within the range of 0.1 to 15 ⁇ m, but if it is less than 0.1 ⁇ m, sufficient performance as a hard film cannot be obtained, and if it exceeds 15 ⁇ m, the cutting edge of the cutting tool is Tool performance may be impaired by rounding.
  • the film thickness T1 of the I layer is in the range of 1 to 50% of the total film thickness Ttotal, but if it is less than 1%, the effect of improving the welding resistance (decrease in friction coefficient) by the I layer cannot be obtained sufficiently. If it exceeds 50%, the effect of improving wear resistance by the II layer may be impaired.
  • the film thickness T3 of the III layer is in the range of 1 to 25% of the total film thickness Ttotal, but if it is less than 1%, the effect of improving the adhesion strength by the VIIIIII layer cannot be sufficiently obtained and exceeds 25%. And there is a possibility that the effect of improving the wear resistance by the II layer is impaired.
  • the I layer may be formed by alternately providing Ia layers and Ib layers for one cycle or more so that at least the Ia layer is the outermost layer.
  • the Ib layer and the Ia layer may be provided one layer at a time on the II layer. good. It is also possible to provide an Ia layer on the second layer and to alternately stack one or more periods of the Ib layer and the Ia layer thereon. In short, when an even number of Ia and Ib layers are provided on the second layer, it is formed from the Ib layer, and when an odd number of three or more layers is provided, it is formed from the Ia layer.
  • the Ia layer and the Ib layer are stacked with a stacking period of 10 nm or more (total thickness of the Ia layer and the Ib layer).
  • the layers are stacked with the same thickness of 5 nm or more.
  • the stacking period may be changed continuously or stepwise, and the ratio of the thicknesses of the Ia layer and the Ib layer may be changed continuously or stepwise.
  • the Ia layer and the Ib layer are desirably provided with a film thickness within a range of about 5 nm to 500 nm per layer, respectively, in order to appropriately obtain the effect of improving heat resistance and welding resistance.
  • FIG. 1A and 1B are views for explaining a ball end mill 10 which is an example of a hard film coated tool to which the present invention is applied.
  • FIG. 1A is a front view seen from a direction perpendicular to the axis, and FIG. It is the enlarged bottom view seen from the figure of a) of the figure, and the shank and the blade part 14 are integrally provided in the tool base material 12 comprised with the cemented carbide.
  • the blade portion 14 is provided with a pair of outer peripheral blades 16 and a ball blade 18 symmetrically with respect to the shaft center as cutting blades, and these outer peripheral blades 16 and balls are rotated around the shaft center.
  • FIG. 1 (a) represents the hard coating 20
  • FIG. 1 (c) is a cross-sectional view of the vicinity of the surface of the blade portion 14 coated with the hard coating 20.
  • the ball end mill 10 is a rotary cutting tool, and the tool base material 12 corresponds to a predetermined member provided with a hard coating 20.
  • the hard coating 20 is composed of an I layer 22, a II layer 24, and a heel III layer 26, and the first layer 22 includes an Ia layer 22a and an Ib layer 22b.
  • the multi-layer structure is laminated at least one period or more, and is continuously formed by switching the target and the reactive gas using an arc ion plating apparatus.
  • the first heel III layer 26 provided in contact with the surface of the tool base 12 is made of a metal composed of one or more elements selected from B, Al, Ti, Y, Zr, Hf, V, Nb, Ta, Cr, and W. It is made of nitride, carbonitride, or carbide.
  • TiAlN, ZrAlN, TiTaN, TiN, CrN, CrBVN, TiAlSiCN, CrBN, ZrN, TiAlZrN, CrBSiCN as exemplified in the column “Layer III” of “Coating Structure” in FIG. TiCrN, TiAlCrN, TiCrNbN, TiVSiCN, TiAlNbN, TiAlSiCN, TiAlCN, TiAlHfN, and the like.
  • the decimal number described after each element of the column of the film structure of FIG. 2 is an atomic ratio.
  • test products No. 1 to No. 38 in FIG. 2 are the products of the present invention
  • test products No. 39 to No. 48 are the comparative products (including conventional products).
  • the second layer 24 provided on the second III layer 26 is made of AlCrN or AlCrDN (where the atomic ratio of Cr and Al is 0.25 ⁇ Cr / Al ⁇ 0.67, D is IVa in the periodic table of elements) Group, Va group, VIa group (excluding Cr), Y, and SiC].
  • a mixed layer in which the compositions of both are mixed is provided with a slight thickness (for example, 10% or less of the film thickness T2 of the second layer 24). Is omitted in the figure.
  • This mixed layer shifts the timing for switching from the target and reaction gas for forming the second IV layer 26 to the target and reaction gas for forming the second layer 24, and the target and reaction for forming the first III layer 26.
  • the gas By using the gas, the target for forming the second layer 24, and the reaction gas in duplicate for a predetermined time, the gas can be continuously formed in the first layer III layer 26.
  • the mixed layer can be continuously switched to the second layer 24. If the reaction gas is common, only the energization of the target may be switched.
  • the I layer 22 provided on the II layer 24 is formed by alternately laminating the Ia layer 22a and the Ib layer 22b with a laminating period of 10 nm or more so that the Ia layer 22a becomes the outermost layer. In this embodiment, even layers are provided from the Ib layer 22b.
  • Ib layer 22b provided on the first II layer 24, (Cr 1-ab B a X b) (C c O d N 1-cd) [where, a, b, c, d are respectively atomic ratios, 0 ⁇ a ⁇ 0.2, 0 ⁇ b ⁇ 0.5, 0 ⁇ c ⁇ 0.5, 0 ⁇ d ⁇ 0.3, X is group IVa, Va, VIa of the periodic table of elements (Excluding Cr), Y, and one or more of SiC]. Specifically, for example, as illustrated in the column of “Ib layer” of “Coating structure” in FIG. It is.
  • a mixed layer in which the compositions of both are mixed is provided with a slight thickness (for example, 10% or less of the film thickness of the Ib layer 22b). Is omitted.
  • This mixed layer can also be formed continuously in the same manner as the mixed layer at the boundary between the II layer 24 and the III layer 26.
  • the Ia layer 22a provided on the Ib layer 22b is AlCrN or AlCr ⁇ N (wherein the atomic ratio of Cr and Al is 0.25 ⁇ Cr / Al ⁇ 0.67, ⁇ is the group IVa in the periodic table of elements, Any one of Va group, VIa group (excluding Cr), Y, and SiC].
  • AlCrN, AlCrYN, AlCrSiCN, AlCrTiN, AlCrMoN, AlCrWN, AlCrNbN, AlCrTaN, AlCrZrN, etc. as exemplified in the “Ia layer” column of “Coating structure” in FIG.
  • a mixed layer in which both compositions are mixed is provided with a slight thickness (for example, 10% or less of the film thickness of the Ia layer 22a). It is omitted.
  • This mixed layer can also be formed continuously in the same manner as the mixed layer at the boundary between the second layer 24 and the third layer III layer 26.
  • the Ia layer 22a and the Ib layer 22b are alternately stacked with a period of 10 nm or more so that the Ia layer 22a becomes the outermost layer.
  • the stacking cycle is 12 nm, which is the thinnest of these. Since the number of layers of the test product No. 22 is two, that is, one cycle, and the film thickness is 1 ⁇ m, the stacking cycle is 1 ⁇ m.
  • the film thicknesses of the Ia layer 22a and the Ib layer 22b are individually set as appropriate, for example, with a thickness of 5 nm or more, but in the present embodiment, they are formed with the same film thickness. In the case of 6 nm and test product No. 22, it is 500 nm. This film thickness includes the mixed layer.
  • the total thickness Ttotal of the hard coating 20 including the I-layer 22, the II-layer 24, and the III-layer 26 is in the range of 0.1 to 15 ⁇ m, and the thickness T1 of the I-layer 22 is
  • the film thickness T3 of the first layer III layer 26 is within the range of 1 to 25% of the total film thickness Ttotal ⁇ , and the film thickness T2 of the second layer 24 is (Ttotal ⁇ T1-T3). ).
  • the percentages shown in parentheses in the column of film thickness in FIG. 3 are ratios to the total film thickness Ttotal, respectively.
  • the second layer 24 composed of AlCrN or AlCrDN, and the tool base material 12 and the second II are formed.
  • a metal nitride, carbonitride, or carbide composed of one or more elements of B, Al, Ti, Y, Zr, Hf, V, Nb, Ta, Cr, and W
  • High adhesion strength can be obtained because the third layer 26 constituted by is interposed.
  • the I layer 22 provided on the II layer 24 is formed by alternately laminating Ia layers 22a and Ib layers 22b with a laminating cycle of 10 nm or more so that the Ia layer 22a becomes the outermost layer.
  • a mixed layer of both is provided at the boundary between the Ia layer 22a and the Ib layer 22b of the I layer 22, and the mixed layer of both is provided at the boundary between the I layer 22 and the II layer 24.
  • a mixed layer of the two layers is also provided at the boundary between the II layer 24 and the heel III layer 26, so that the adhesion strength between these layers also increases, and peeling and chipping wear further occur. Effectively suppressed.
  • the switching timing of the target and the reactive gas is appropriately set so that the mixed layer is formed.
  • the first to third III layers 26 to Ia layer 22a including the mixed layer can be formed continuously and efficiently.
  • the total film thickness Ttotal of the I-th layer 22 to the III layer 26 is in the range of 0.1 to 15 ⁇ m, and the film thickness T1 of the I-layer 22 is 1 to 50% of the total film thickness Ttotal.
  • the film thickness T3 of the second layer III layer 26 is in the range of 1 to 25% of the total film thickness Ttotal and the film thickness T2 of the second layer 24 is (Ttotal ⁇ T1-T3).
  • Comparison products (including conventional products) that do not satisfy the requirements were prepared, and the results of examining the flank wear width (mm) of the ball blade 18 after cutting 280 m by cutting under the following processing conditions explain.
  • the test products No. 1 to No. 38 in FIG. 2 and FIG. 3 are products of the present invention, the test products No. 39 to No.
  • flank wear width is an average value of the two ball blades 18, and the pass / fail judgment is made with an allowable range of 0.1 mm or less.
  • film hardness HV 0.025
  • the test products No1 to No38 of the present invention all have a flank wear width within an allowable range (0.1 mm or less).
  • the comparative products No. 39 to No. 48 all have a flank wear width exceeding the allowable range (0.1 mm), or chipping occurs during machining, making machining impossible, and sufficient durability ( Tool life) could not be obtained.
  • the coating hardness HV is 2790 to 2950 for the test products of No. 1 to No. 38 of the present invention, whereas it is 2790 to 2900 for the comparative product.
  • test products No. 7 and No. 20 of the present invention were capable of cutting about 200 m, whereas the test products No. 45 and No. 47 (conventional product) were 110 m or less. According to the results, approximately twice the durability can be obtained.
  • the test products No. 5, No. 7, No. 20 and No. 26 are all 0.41 or less, while the test products No. 45 and No. 47 are comparative products (conventional products).
  • Product) is as large as 0.69 and 0.68, and according to the product of the present invention, the friction coefficient becomes 2/3 or less and excellent welding resistance can be obtained.
  • the test product No39 of the 3 layer structure which is not equipped with the Ia layer 22a it was a friction coefficient (0.39) comparable as this invention product.
  • test products No. 5, No. 7, No. 20 and No. 26 are all 0.90 ⁇ m or less, but do not have the Ia layer 22a.
  • Test product No. 39 was as thick as 2.8 ⁇ m, and it was tattered and had no gloss. That is, the test product No39 not provided with the Ia layer 22a has poor heat resistance, and when used under high-temperature processing conditions such as high-speed cutting, the predetermined wear resistance cannot be obtained, but the Ia layer 22a is provided.
  • the hard coating 20 is well maintained even when used under high-temperature processing conditions, and a predetermined wear resistance is obtained.
  • the test products No. 45 and No. 47 have substantially the same oxide layer thickness as the product of the present invention and the same heat resistance. However, as described above, the friction coefficient is large and sufficient welding resistance cannot be obtained.

Abstract

A hard coating film (20) formed on the cutting part (14) of a ball end mill (10) is provided which includes: a second layer (24) which is constituted of AlCrN or AlCrDN and imparts excellent wearing resistance; and a third layer (26) which is constituted of a nitride, carbonitride, or carbide of one or more metallic elements selected from B, Al, Ti, Y, Zr, Hf, V, Nb, Ta, Cr, and W and imparts high adhesion strength.  The coating film (20) further includes a first layer (22), which is a layer obtained by alternately superposing a layer Ia (22a) and a layer Ib (22b) to form one or more cycles so that the outermost layer is a layer Ia (22a).  The layer Ib (22b) is constituted of (Cr1-a-bBaXb)(CcOdN1-c-d) and hence has a reduced coefficient of friction to impart excellent unsusceptibility to deposition.  The layer Ia (22a) is constituted of AlCrN or AlCrαN and, hence, improves heat resistance.  Even when the mill (1) is used under such processing conditions that the coating film (20) heats up to a high temperature as in high-speed cutting or the like, excellent wearing resistance is obtained while maintaining the unsusceptibility to deposition brought about by the layer Ib (22b).

Description

硬質被膜、および硬質被膜被覆工具Hard coating and hard coating tool
　本発明は硬質被膜に係り、特に、耐摩耗性および耐溶着性に優れた硬質被膜の改良に関するものである。 The present invention relates to a hard coating, and more particularly to an improvement of a hard coating excellent in wear resistance and welding resistance.
　高速度工具鋼や超硬合金等の工具母材などの所定の部材の表面に硬質被膜を設けることが広く行われている。例えば特許文献１には、耐摩耗性に優れたＡ層の上に耐溶着性に優れたＢ層を設けることが提案されており、Ａ層はＴｉ、Ｃｒ、Ａｌ、Ｓｉ等の窒化物、炭窒化物などで、Ｂ層はＴｉ、Ｃｒ、Ａｌ、Ｓｉ等の酸化物、硼化物などである。 It is widely practiced to provide a hard coating on the surface of a predetermined member such as a tool base material such as high-speed tool steel or cemented carbide. For example, Patent Document 1 proposes that a B layer having excellent welding resistance is provided on an A layer having excellent wear resistance, and the A layer includes nitrides such as Ti, Cr, Al, and Si, The B layer is made of an oxide such as Ti, Cr, Al, Si, or a boride.
特開２００７－１５１０６号公報JP 2007-15106 A
　しかしながら、このような従来の硬質被膜においては、工具母材等に対して必ずしも十分な付着強度が得られず、例えばステンレス鋼に対する切削加工や５０ＨＲＣ以下で溶着し易い被削材に対する切削加工などでは、早期に剥離やチッピング摩耗が発生して加工面が悪化したり切削性能がばらついたりする問題があった。 However, in such a conventional hard coating, sufficient adhesion strength is not necessarily obtained for a tool base material or the like. For example, in cutting processing on stainless steel or cutting work material easily welded at 50 HRC or less, etc. There are problems that peeling and chipping wear occur at an early stage and the machined surface deteriorates or the cutting performance varies.
　これに対し、例えば最表層に低摩擦係数の被膜を設けることで耐溶着性を改善することが考えられるが、耐熱性が損なわれ、高速切削等の高温になる加工条件で使用すると十分な耐摩耗性が得られない場合があった。 On the other hand, for example, it is conceivable to improve the welding resistance by providing a coating with a low coefficient of friction on the outermost layer, but the heat resistance is impaired and sufficient resistance is obtained when used under high-temperature processing conditions such as high-speed cutting. There was a case where abrasion was not obtained.
　本発明は以上の事情を背景として為されたもので、その目的とするところは、耐摩耗性および耐溶着性に優れた硬質被膜が高い付着強度で工具母材等に設けられ、高温の使用条件においても優れた耐摩耗性、耐溶着性が長期間に亘って安定して得られるようにすることにある。 The present invention has been made against the background of the above circumstances. The purpose of the present invention is that a hard coating having excellent wear resistance and welding resistance is provided on a tool base material with high adhesion strength, and is used at high temperatures. It is to ensure that excellent wear resistance and welding resistance can be obtained stably over a long period of time.
　かかる目的を達成するために、第１発明は、所定の部材の表面上に設けられる耐摩耗性および耐溶着性に優れた硬質被膜であって、(a) 前記部材の表面に接して設けられる第 III層と、その第 III層の上に設けられる第II層と、その第II層の上に設けられて表面を構成する第Ｉ層とを有する多層構造で、(b) 前記第Ｉ層は、(b-1) ＡｌＣｒＮまたはＡｌＣｒαＮ〔但し、ＣｒとＡｌとの原子比は０．２５≦Ｃｒ／Ａｌ≦０．６７、αは元素の周期表のIVａ族、Ｖａ族、VIａ族（Ｃｒを除く）、Ｙ、およびＳｉＣの中の何れか１種類〕から成るＩａ層と、(b-2) （Ｃｒ1-a-b Ｂa Ｘb ）（Ｃc Ｏd Ｎ1-c-d ）〔但し、ａ、ｂ、ｃ、ｄはそれぞれ原子比で、０＜ａ≦０．２、０≦ｂ≦０．５、０≦ｃ≦０．５、０≦ｄ≦０．３の範囲内、Ｘは元素の周期表のIVａ族、Ｖａ族、VIａ族（Ｃｒを除く）、Ｙ、およびＳｉＣの中の１種類以上〕から成るＩｂ層と、から構成され、(b-3) そのＩａ層が最表層となるように１０ｎｍ以上の積層周期で１周期以上交互に積層されたもので、(c) 前記第II層は、ＡｌＣｒＮまたはＡｌＣｒＤＮ〔但し、ＣｒとＡｌとの原子比は０．２５≦Ｃｒ／Ａｌ≦０．６７、Ｄは元素の周期表のIVａ族、Ｖａ族、VIａ族（Ｃｒを除く）、Ｙ、およびＳｉＣの中の何れか１種類〕にて構成され、(d) 前記第 III層は、Ｂ、Ａｌ、Ｔｉ、Ｙ、Ｚｒ、Ｈｆ、Ｖ、Ｎｂ、Ｔａ、Ｃｒ、Ｗの中の１種類以上の元素から成る金属の窒化物、炭窒化物、または炭化物にて構成されていることを特徴とする。 In order to achieve such an object, the first invention is a hard coating having excellent wear resistance and welding resistance provided on the surface of a predetermined member, and (a) is provided in contact with the surface of the member. A multilayer structure having a third layer, a second layer provided on the third layer, and an first layer constituting the surface provided on the second layer, and (b) the first layer (B-1) AlCrN or AlCrαN [wherein the atomic ratio of Cr and Al is 0.25 ≦ Cr / Al ≦ 0.67, α is the IVa group, Va group, VIa group (Cr except), Y and Ia layer made of, and any one among SiC], (b-2) (Cr 1-ab B a X b) (C c O d N 1-cd) [However, a, b, c, and d are atomic ratios, and 0 <a ≦ 0.2, 0 ≦ b ≦ 0.5, 0 ≦ c ≦ 0.5, 0 ≦ d ≦ 0.3, and X is Group IVa of the periodic table of elements, an Ib layer composed of a group a, a group VIa (excluding Cr), Y, and SiC], and (b-3) 10 nm or more so that the Ia layer becomes the outermost layer (C) The II layer is made of AlCrN or AlCrDN (provided that the atomic ratio of Cr to Al is 0.25 ≦ Cr / Al ≦ 0.67, D Is composed of IVa group, Va group, VIa group (excluding Cr), Y, and SiC in the periodic table of elements], (d) the III layer is formed of B, Al, It is characterized by being composed of a metal nitride, carbonitride, or carbide composed of one or more elements of Ti, Y, Zr, Hf, V, Nb, Ta, Cr, and W.
　第２発明は、第１発明の硬質被膜において、(a) 前記第Ｉ層の前記Ｉａ層と前記Ｉｂ層との境界部分には両者の混合層が設けられ、(b) その第Ｉ層と前記第II層との境界部分には両者の混合層が設けられ、(c) その第II層と前記第 III層との境界部分には両者の混合層が設けられていることを特徴とする。 According to a second invention, in the hard coating of the first invention, (a) a mixed layer of both of the Ia layer and the Ib layer is provided at the boundary between the I layer and (b) the I layer. A mixed layer of both is provided at a boundary portion with the second layer, and (c) a mixed layer of both is provided at a boundary portion between the second layer and the third layer III. .
　第３発明は、第１発明または第２発明の硬質被膜において、(a) 前記第Ｉ層、前記第II層、および前記第 III層の総膜厚Ｔtotal は０．１～１５μｍの範囲内で、(b) 前記第Ｉ層の膜厚Ｔ１は、総膜厚Ｔtotal の１～５０％の範囲内で、(c) 前記第 III層の膜厚Ｔ３は、総膜厚Ｔtotal の１～２５％の範囲内で、(d) 前記第II層の膜厚Ｔ２は、（Ｔtotal －Ｔ１－Ｔ３）であることを特徴とする。 The third invention is the hard coating of the first invention or the second invention, wherein (a) the total film thickness Ttotal の of the I layer, the II layer, and the III layer is in the range of 0.1 to 15 μm. (B) The thickness T1 of the I layer is in the range of 1 to 50% of the total thickness Ttotal, and (c) 膜厚 The thickness T3 of the III layer is 1 to 25% of the total thickness Ttotal. Within the range of (d), the film thickness T2 of the II layer is (Ttotal −T1-T3).
　第４発明は硬質被膜被覆工具に関するもので、第１発明～第３発明の何れかの硬質被膜で工具母材の表面が被覆されていることを特徴とする。 The fourth invention relates to a hard coating coated tool, characterized in that the surface of the tool base material is coated with the hard coating of any of the first to third inventions.
　第１発明の硬質被膜は、ＡｌＣｒＮまたはＡｌＣｒＤＮ〔但し、ＣｒとＡｌとの原子比は０．２５≦Ｃｒ／Ａｌ≦０．６７、Ｄは元素の周期表のIVａ族、Ｖａ族、VIａ族（Ｃｒを除く）、Ｙ、およびＳｉＣの中の何れか１種類〕にて構成されている第II層により優れた耐摩耗性が得られるとともに、工具母材等の硬質被膜を形成すべき所定の部材と上記第II層との間には、Ｂ、Ａｌ、Ｔｉ、Ｙ、Ｚｒ、Ｈｆ、Ｖ、Ｎｂ、Ｔａ、Ｃｒ、Ｗの中の１種類以上の元素から成る金属の窒化物、炭窒化物、または炭化物にて構成されている第 III層が介在させられているため、高い付着強度が得られる。また、上記第II層の上に設けられる第Ｉ層は、Ｉａ層が最表層となるようにＩａ層およびＩｂ層を１０ｎｍ以上の積層周期（Ｉａ層およびＩｂ層の合計厚さ）で１周期以上交互に積層したもので、そのＩｂ層は、（Ｃｒ1-a-b Ｂa Ｘb ）（Ｃc Ｏd Ｎ1-c-d ）〔但し、ａ、ｂ、ｃ、ｄはそれぞれ原子比で、０＜ａ≦０．２、０≦ｂ≦０．５、０≦ｃ≦０．５、０≦ｄ≦０．３の範囲内、Ｘは元素の周期表のIVａ族、Ｖａ族、VIａ族（Ｃｒを除く）、Ｙ、およびＳｉＣの中の１種類以上〕にて構成されているため、摩擦係数が小さくなって優れた耐溶着性が得られる。Ｉａ層は、ＡｌＣｒＮまたはＡｌＣｒαＮ〔但し、ＣｒとＡｌとの原子比は０．２５≦Ｃｒ／Ａｌ≦０．６７、αは元素の周期表のIVａ族、Ｖａ族、VIａ族（Ｃｒを除く）、Ｙ、およびＳｉＣの中の何れか１種類〕にて構成されているため、耐熱性が向上し、上記Ｉｂ層による耐溶着性を維持しつつ高速切削等の高温になる加工条件で使用する場合でも優れた耐摩耗性が得られるようになる。 The hard coating of the first invention is AlCrN or AlCrDN [wherein the atomic ratio of Cr to Al is 0.25 ≦ Cr / Al ≦ 0.67, D is IVa group, Va group, VIa group in the periodic table of elements ( (Excluding Cr), any one of Y, and SiC] can provide excellent wear resistance, and can form a hard coating such as a tool base material. Between the member and the second layer II, a metal nitride or carbonitriding composed of one or more elements selected from B, Al, Ti, Y, Zr, Hf, V, Nb, Ta, Cr, and W High adhesion strength can be obtained because the third layer composed of a material or carbide is interposed. In addition, the I layer provided on the II layer is composed of one cycle with a laminating cycle of 10 nm or more (total thickness of the Ia layer and the Ib layer) so that the Ia layer becomes the outermost layer. or alternately formed by laminating, the Ib layer, (Cr 1-ab B a X b) (C c O d N 1-cd) [where, a, b, c, d are each an atomic ratio, 0 <A ≦ 0.2, 0 ≦ b ≦ 0.5, 0 ≦ c ≦ 0.5, 0 ≦ d ≦ 0.3, where X is group IVa, group Va, group VIa ( (Excluding Cr), Y, and SiC], the friction coefficient is reduced and excellent welding resistance is obtained. The Ia layer is AlCrN or AlCrαN (wherein the atomic ratio of Cr and Al is 0.25 ≦ Cr / Al ≦ 0.67, α is IVa group, Va group, VIa group (except for Cr) in the periodic table of elements) , Y, and SiC], the heat resistance is improved, and the welding is performed at high temperatures such as high speed cutting while maintaining the welding resistance by the Ib layer. Even in this case, excellent wear resistance can be obtained.
　このように、第１発明の硬質被膜によれば、高温となる加工条件下での使用においても優れた耐摩耗性、耐溶着性が長期間に亘って安定して得られるようになる。これにより、例えば第４発明のような硬質被膜被覆工具の場合、ステンレス鋼に対する切削加工や５０ＨＲＣ以下で溶着し易い被削材に対する切削加工などを高温となる加工条件で行なう場合でも、剥離やチッピング摩耗が抑制され、良好な加工面が得られるとともに、所定の加工性能が安定して得られるようになって工具寿命が向上する。 Thus, according to the hard coating of the first invention, excellent wear resistance and welding resistance can be stably obtained over a long period of time even when used under high temperature processing conditions. As a result, for example, in the case of a hard film coated tool as in the fourth invention, even when cutting on stainless steel or cutting on a work material that is easily welded at 50 HRC or less, etc., under high processing conditions, peeling or chipping is performed. Abrasion is suppressed, a good machining surface is obtained, and predetermined machining performance is stably obtained, thereby improving the tool life.
　第２発明では、第Ｉ層のＩａ層とＩｂ層との境界部分に両者の混合層が設けられ、第Ｉ層と第II層との境界部分に両者の混合層が設けられ、第II層と第 III層との境界部分にも両者の混合層が設けられているため、それ等の各層間の相互の付着強度も高くなり、剥離やチッピング摩耗が一層効果的に抑制される。また、それ等のＩａ層～第 III層をアークイオンプレーティング法やスパッタリング法等のＰＶＤ法で形成する場合、上記混合層が形成されるようにターゲットや反応ガスの切換タイミングを適当に設定することにより、その混合層を含めて第 III層～Ｉａ層を連続的に効率良く形成することができる。 In the second invention, a mixed layer of both is provided at the boundary between the Ia layer and the Ib layer of the I layer, and a mixed layer of both is provided at the boundary between the I and II layers. Since the mixed layer of both layers is also provided at the boundary portion between the first layer III and the third layer III, the adhesion strength between these layers also increases, and peeling and chipping wear are more effectively suppressed. In addition, when the Ia layer to the VIII layer are formed by the PVD method such as the arc ion plating method or the sputtering method, the switching timing of the target and the reactive gas is appropriately set so that the mixed layer is formed. As a result, the layers III to Ia including the mixed layer can be formed continuously and efficiently.
　第３発明では、第Ｉ層～第 III層の総膜厚Ｔtotal が０．１～１５μｍの範囲内で、第Ｉ層の膜厚Ｔ１が総膜厚Ｔtotal の１～５０％の範囲内で、第 III層の膜厚Ｔ３が総膜厚Ｔtotal の１～２５％の範囲内で、第II層の膜厚Ｔ２が（Ｔtotal －Ｔ１－Ｔ３）であるため、第Ｉ層による耐溶着性および耐熱性の向上、第II層による耐摩耗性向上、および第 III層による付着強度向上の各効果が適切に得られる。 In the third invention, the total film thickness TtotalＴ of the I-th layer to the III-layer is in the range of 0.1 to 15 μm, the film thickness T1 of the I-layer is in the range of 1 to 50% of the total film thickness Ttotal, The film thickness T3 of the third layer III is in the range of 1 to 25% of the total film thickness Ttotal and the film thickness T2 of the second layer is (Ttotal−T1-T3). Each effect of improving the wear resistance, improving the abrasion resistance by the second layer, and improving the adhesion strength by the third layer III can be obtained appropriately.
本発明が適用されたボールエンドミルを示す図で、(a) は軸心と直角方向から見た正面図、(b) は先端側から見た拡大底面図、(c) は硬質被膜が設けられた刃部の表面近傍の拡大断面図である。It is a diagram showing a ball end mill to which the present invention is applied, (a) is a front view seen from the direction perpendicular to the axis, (b) is an enlarged bottom view seen from the tip side, (c) is provided with a hard coating It is an expanded sectional view of the surface vicinity of the blade part. 本発明品および比較品を含む複数の試験品の硬質被膜の被膜構造を説明する図である。It is a figure explaining the film structure of the hard film of several test goods containing this invention goods and a comparative product. 図２の試験品の硬質被膜の各層の膜厚を示すとともに、その試験品を用いて所定の加工条件で切削加工を行なって逃げ面摩耗幅（耐摩耗性）を調べた結果を説明する図である。The figure which shows the film thickness of each layer of the hard film of the test product of FIG. 2 and explains the result of examining the flank wear width (wear resistance) by cutting the test product under predetermined processing conditions It is. 図２の試験品No７、No２０、No４５、No４７をそれぞれ２本ずつ用いて、所定の加工条件で耐久性試験を行なった結果を示す図である。It is a figure which shows the result of having performed the durability test on predetermined | prescribed process conditions, using two each of the test articles No7, No20, No45, and No47 of FIG. 図２の所定の試験品と同じ硬質被膜を設けたテストピースを用いて摩擦係数試験を行う際のピンオンディスク式摩擦試験装置を説明する概念図である。FIG. 3 is a conceptual diagram illustrating a pin-on-disk friction test apparatus when performing a friction coefficient test using a test piece provided with the same hard coating as the predetermined test product of FIG. 2. 図４の装置を用いて調べた摩擦係数と併せて酸化試験で測定した酸化層厚さを示す図である。It is a figure which shows the oxide layer thickness measured by the oxidation test together with the friction coefficient investigated using the apparatus of FIG.
　本発明は、エンドミルやタップ、ドリルなどの回転切削工具の他、バイト等の非回転式の切削工具、或いは転造工具など、種々の加工工具の表面に設けられる硬質被膜に好適に適用されるが、半導体装置等の表面保護膜など加工工具以外の部材の表面に設けられる硬質被膜にも適用できる。硬質被膜被覆工具の工具母材としては、超硬合金や高速度工具鋼、サーメット、セラミックス、多結晶ダイヤモンド（ＰＣＤ）、単結晶ダイヤモンド、多結晶ＣＢＮ、単結晶ＣＢＮが好適に用いられるが、他の工具材料を採用することもできる。 INDUSTRIAL APPLICABILITY The present invention is suitably applied to hard coatings provided on the surfaces of various processing tools such as end mills, taps, and rotary cutting tools such as drills, non-rotating cutting tools such as cutting tools, and rolling tools. However, the present invention can also be applied to a hard coating provided on the surface of a member other than a processing tool such as a surface protective film of a semiconductor device or the like. As the tool base material of the hard coating coated tool, cemented carbide, high speed tool steel, cermet, ceramics, polycrystalline diamond (PCD), single crystal diamond, polycrystalline CBN, single crystal CBN are preferably used. It is also possible to adopt the following tool material.
　硬質被膜の形成手段としては、アークイオンプレーティング法やスパッタリング法、ＰＬＤ（Puls LASER Deposition ）法等のＰＶＤ法（物理蒸着法）が好適に用いられる。硬質被膜を構成するＡｌＣｒ、ＡｌＣｒα、ＣｒＢＸ、ＡｌＣｒＤ等の合金や金属元素については、例えば同じ組成の金属ターゲットを用意すれば良く、Ｉａ層および第II層のＮや、Ｉｂ層のＣ、Ｏ、Ｎ、第 III層の炭化物、炭窒化物、窒化物については、窒素や炭素、酸素を反応ガスとして供給すれば良い。なお、α、Ｘ、およびＤの選択肢である「ＳｉＣ」は、炭化珪素という化合物の形でＡｌＣｒα、ＣｒＢＸ、ＡｌＣｒＤの合金を構成していることを意味する。 As the means for forming the hard film, an arc ion plating method, a sputtering method, a PVD method (physical vapor deposition method) such as a PLD (Puls LASER Deposition) method is preferably used. For alloys and metal elements such as AlCr, AlCrα, CrBX, and AlCrD constituting the hard coating, for example, a metal target having the same composition may be prepared. N in the Ia layer and the II layer, C, O in the Ib layer, For N, the carbide, carbonitride, and nitride of the third layer III layer, nitrogen, carbon, or oxygen may be supplied as a reaction gas. Note that “SiC” as an option of α, X, and D means that an alloy of AlCrα, CrBX, and AlCrD is formed in the form of a compound called silicon carbide.
　（Ｃｒ1-a-b Ｂa Ｘb ）（Ｃc Ｏd Ｎ1-c-d ）〔但し、ａ、ｂ、ｃ、ｄはそれぞれ原子比で、０＜ａ≦０．２、０≦ｂ≦０．５、０≦ｃ≦０．５、０≦ｄ≦０．３の範囲内、Ｘは元素の周期表のIVａ族、Ｖａ族、VIａ族（Ｃｒを除く）、Ｙ、およびＳｉＣの中の１種類以上〕から成るＩｂ層のＸは、１種類の元素または化合物（ＳｉＣ）であっても良いが２種類以上の元素または化合物を含んでいても良く、２種類以上の元素または化合物から成る場合は、それ等の原子比の合計が原子比ｂの範囲内、すなわち０．５以下であれば良い。 (Cr 1-ab B a X b ) (C c O d N 1-cd ) [where a, b, c, d are atomic ratios, 0 <a ≦ 0.2, 0 ≦ b ≦ 0. 5, in the range of 0 ≦ c ≦ 0.5, 0 ≦ d ≦ 0.3, X is one of IVa group, Va group, VIa group (excluding Cr), Y, and SiC of the periodic table of elements X of the Ib layer consisting of two or more types may be one kind of element or compound (SiC), but may contain two or more kinds of elements or compounds, and consists of two or more kinds of elements or compounds The total of these atomic ratios may be within the range of the atomic ratio b, that is, 0.5 or less.
　ＡｌＣｒＮまたはＡｌＣｒαＮ〔但し、ＣｒとＡｌとの原子比は０．２５≦Ｃｒ／Ａｌ≦０．６７、αは元素の周期表のIVａ族、Ｖａ族、VIａ族（Ｃｒを除く）、Ｙ、およびＳｉＣの中の何れか１種類〕から成るＩａ層のαは、前記Ｉｂ層のＸとは別個に適宜定められるが、Ｉｂ層のＸと同じであっても良い。ＡｌＣｒＮまたはＡｌＣｒＤＮ〔但し、ＣｒとＡｌとの原子比は０．２５≦Ｃｒ／Ａｌ≦０．６７、Ｄは元素の周期表のIVａ族、Ｖａ族、VIａ族（Ｃｒを除く）、Ｙ、およびＳｉＣの中の何れか１種類〕から成る第II層のＤも、上記Ｉａ層のαや前記Ｉｂ層のＸとは別個に適宜定められるが、それ等のＩａ層のα或いはＩｂ層のＸと同じであっても良い。Ｉａ層のα、Ｉｂ層のＸ、および第II層のＤが同じであっても良い。 AlCrN or AlCrαN (wherein the atomic ratio of Cr to Al is 0.25 ≦ Cr / Al ≦ 0.67, α is IVa group, Va group, VIa group (excluding Cr), Y in the periodic table of elements, and Y Α of the Ia layer made of any one of SiC] is appropriately determined separately from X of the Ib layer, but may be the same as X of the Ib layer. AlCrN or AlCrDN (wherein the atomic ratio of Cr to Al is 0.25 ≦ Cr / Al ≦ 0.67, D is IVa group, Va group, VIa group (excluding Cr), Y in the periodic table of elements, and Y The D of the II layer composed of any one of SiC] is also determined separately from the α of the Ia layer and the X of the Ib layer, but the α of the Ia layer or the X of the Ib layer It may be the same. Α in the Ia layer, X in the Ib layer, and D in the II layer may be the same.
　第２発明では、第Ｉ層のＩａ層とＩｂ層との境界部分に両者の混合層が設けられ、第Ｉ層と第II層との境界部分に両者の混合層が設けられ、第II層と第 III層との境界部分に両者の混合層が設けられているが、それ等の混合層は必ずしも必要なく、第 III層の上に直接第II層を形成するとともに、その第II層の上に直接第Ｉ層を形成するようにしても良い。第Ｉ層のＩａ層およびＩｂ層についても、混合層を介在することなく直接積層しても良い。また、上記境界部分の一部についてのみ混合層が設けられても良い。 In the second invention, a mixed layer of both is provided at the boundary between the Ia layer and the Ib layer of the I layer, and a mixed layer of both is provided at the boundary between the I and II layers. A mixed layer of the two is provided at the boundary between the first layer III and the second layer III. However, such a mixed layer is not always necessary, and the second layer is formed directly on the third layer III. The I layer may be formed directly on the top. The Ia layer and Ib layer of the I layer may also be directly stacked without interposing a mixed layer. Moreover, the mixed layer may be provided only for a part of the boundary portion.
　第３発明では、総膜厚Ｔtotal が０．１～１５μｍの範囲内であるが、０．１μｍ未満の場合は硬質被膜としての性能が十分に得られず、１５μｍを超えると切削工具の刃先が丸くなるなどして工具性能が損なわれる可能性がある。第Ｉ層の膜厚Ｔ１は総膜厚Ｔtotal の１～５０％の範囲内であるが、１％未満では第Ｉ層による耐溶着性（摩擦係数低下）の向上効果が十分に得られず、５０％を超えると、第II層による耐摩耗性の向上効果が損なわれる可能性がある。また、第 III層の膜厚Ｔ３は総膜厚Ｔtotal の１～２５％の範囲内であるが、１％未満では第 III層による付着強度の向上効果が十分に得られず、２５％を超えると、第II層による耐摩耗性の向上効果が損なわれる可能性がある。 In the third invention, the total film thickness Ttotal is within the range of 0.1 to 15 μm, but if it is less than 0.1 μm, sufficient performance as a hard film cannot be obtained, and if it exceeds 15 μm, the cutting edge of the cutting tool is Tool performance may be impaired by rounding. The film thickness T1 of the I layer is in the range of 1 to 50% of the total film thickness Ttotal, but if it is less than 1%, the effect of improving the welding resistance (decrease in friction coefficient) by the I layer cannot be obtained sufficiently. If it exceeds 50%, the effect of improving wear resistance by the II layer may be impaired. In addition, the film thickness T3 of the III layer is in the range of 1 to 25% of the total film thickness Ttotal, but if it is less than 1%, the effect of improving the adhesion strength by the VIIIIII layer cannot be sufficiently obtained and exceeds 25%. And there is a possibility that the effect of improving the wear resistance by the II layer is impaired.
　第Ｉ層は、少なくともＩａ層が最表層となるようにＩａ層およびＩｂ層が１周期以上交互に設けられれば良く、例えば第II層の上にＩｂ層、Ｉａ層を１層ずつ設けるだけでも良い。第II層の上にＩａ層を設け、その上にＩｂ層、Ｉａ層を交互に１周期以上積層することもできる。要するに、第II層の上にＩａ層およびＩｂ層を偶数層設ける場合はＩｂ層から形成し、Ｉａ層およびＩｂ層を３層以上の奇数層設ける場合はＩａ層から形成すれば良い。 The I layer may be formed by alternately providing Ia layers and Ib layers for one cycle or more so that at least the Ia layer is the outermost layer. For example, the Ib layer and the Ia layer may be provided one layer at a time on the II layer. good. It is also possible to provide an Ia layer on the second layer and to alternately stack one or more periods of the Ib layer and the Ia layer thereon. In short, when an even number of Ia and Ib layers are provided on the second layer, it is formed from the Ib layer, and when an odd number of three or more layers is provided, it is formed from the Ia layer.
　Ｉａ層およびＩｂ層は、１０ｎｍ以上の積層周期（Ｉａ層およびＩｂ層の合計厚さ）で積層され、例えばそれぞれ５ｎｍ以上の同じ厚さで積層されるが、必ずしも両者が同じ厚さである必要はなく、少なくとも積層周期が１０ｎｍ以上になるように互いに相違する膜厚で積層することも可能である。積層周期が連続的或いは段階的に変化していても良いし、Ｉａ層とＩｂ層の厚さの比が連続的或いは段階的に変化していても良い。Ｉａ層およびＩｂ層は、耐熱性および耐溶着性の向上効果を適切に得る上で、それぞれ１層当り５ｎｍ～５００ｎｍ程度の範囲内の膜厚で設けることが望ましい。 The Ia layer and the Ib layer are stacked with a stacking period of 10 nm or more (total thickness of the Ia layer and the Ib layer). For example, the layers are stacked with the same thickness of 5 nm or more. However, it is also possible to stack with different film thicknesses so that at least the stacking period is 10 nm or more. The stacking period may be changed continuously or stepwise, and the ratio of the thicknesses of the Ia layer and the Ib layer may be changed continuously or stepwise. The Ia layer and the Ib layer are desirably provided with a film thickness within a range of about 5 nm to 500 nm per layer, respectively, in order to appropriately obtain the effect of improving heat resistance and welding resistance.
　以下、本発明の実施例を、図面を参照しつつ詳細に説明する。
　図１は、本発明が適用された硬質被膜被覆工具の一例であるボールエンドミル１０を説明する図で、(a) は軸心と直角方向から見た正面図、(b) は先端側（(a) の図の右方向）から見た拡大底面図であり、超硬合金にて構成されている工具母材１２にはシャンクおよび刃部１４が一体に設けられている。刃部１４には、切れ刃として一対の外周刃１６およびボール刃１８が軸心に対して対称的に設けられており、軸心まわりに回転駆動されることによりそれ等の外周刃１６およびボール刃１８によって切削加工が行われるとともに、その刃部１４の表面には硬質被膜２０がコーティングされている。図１(a) の斜線部は硬質被膜２０を表しており、図１の(c) は、硬質被膜２０がコーティングされた刃部１４の表面近傍の断面図である。ボールエンドミル１０は回転切削工具で、工具母材１２は硬質被膜２０が設けられる所定の部材に相当する。 Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
1A and 1B are views for explaining a ball end mill 10 which is an example of a hard film coated tool to which the present invention is applied. FIG. 1A is a front view seen from a direction perpendicular to the axis, and FIG. It is the enlarged bottom view seen from the figure of a) of the figure, and the shank and the blade part 14 are integrally provided in the tool base material 12 comprised with the cemented carbide. The blade portion 14 is provided with a pair of outer peripheral blades 16 and a ball blade 18 symmetrically with respect to the shaft center as cutting blades, and these outer peripheral blades 16 and balls are rotated around the shaft center. Cutting is performed by the blade 18, and a hard coating 20 is coated on the surface of the blade portion 14. The shaded area in FIG. 1 (a) represents the hard coating 20, and FIG. 1 (c) is a cross-sectional view of the vicinity of the surface of the blade portion 14 coated with the hard coating 20. The ball end mill 10 is a rotary cutting tool, and the tool base material 12 corresponds to a predetermined member provided with a hard coating 20.
　図１(c) から明らかなように、硬質被膜２０は第Ｉ層２２、第II層２４、および第 III層２６から構成されているとともに、第１層２２はＩａ層２２ａおよびＩｂ層２２ｂが少なくとも１周期以上積層されている多層構造で、本実施例ではアークイオンプレーティング装置を用いて、ターゲットや反応ガスを切り換えることにより連続的に形成されている。工具母材１２の表面に接して設けられる第 III層２６は、Ｂ、Ａｌ、Ｔｉ、Ｙ、Ｚｒ、Ｈｆ、Ｖ、Ｎｂ、Ｔａ、Ｃｒ、Ｗの中の１種類以上の元素から成る金属の窒化物、炭窒化物、または炭化物にて構成されている。具体的には、例えば図２の「被膜構造」の「第 III層」の欄に例示されているように、ＴｉＡｌＮ、ＺｒＡｌＮ、ＴｉＴａＮ、ＴｉＮ、ＣｒＮ、ＣｒＢＶＮ、ＴｉＡｌＳｉＣＮ、ＣｒＢＮ、ＺｒＮ、ＴｉＡｌＺｒＮ、ＣｒＢＳｉＣＮ、ＴｉＣｒＮ、ＴｉＡｌＣｒＮ、ＴｉＣｒＮｂＮ、ＴｉＶＳｉＣＮ、ＴｉＡｌＮｂＮ、ＴｉＡｌＳｉＣＮ、ＴｉＡｌＣＮ、ＴｉＡｌＨｆＮなどである。なお、図２の被膜構造の欄の各元素の後に記載されている小数は原子比である。また、図２の試験品No１～No３８は本発明品で、試験品No３９～No４８は比較品（従来品を含む）であり、図３は、同じ試験品に関する各層の膜厚および耐摩耗性試験等の結果を示した図である。 As is clear from FIG. 1 (c), the hard coating 20 is composed of an I layer 22, a II layer 24, and a heel III layer 26, and the first layer 22 includes an Ia layer 22a and an Ib layer 22b. In this embodiment, the multi-layer structure is laminated at least one period or more, and is continuously formed by switching the target and the reactive gas using an arc ion plating apparatus. The first heel III layer 26 provided in contact with the surface of the tool base 12 is made of a metal composed of one or more elements selected from B, Al, Ti, Y, Zr, Hf, V, Nb, Ta, Cr, and W. It is made of nitride, carbonitride, or carbide. Specifically, for example, TiAlN, ZrAlN, TiTaN, TiN, CrN, CrBVN, TiAlSiCN, CrBN, ZrN, TiAlZrN, CrBSiCN, as exemplified in the column “Layer III” of “Coating Structure” in FIG. TiCrN, TiAlCrN, TiCrNbN, TiVSiCN, TiAlNbN, TiAlSiCN, TiAlCN, TiAlHfN, and the like. In addition, the decimal number described after each element of the column of the film structure of FIG. 2 is an atomic ratio. In addition, test products No. 1 to No. 38 in FIG. 2 are the products of the present invention, and test products No. 39 to No. 48 are the comparative products (including conventional products). FIG. It is the figure which showed the result of these.
　上記第 III層２６の上に設けられる第II層２４は、ＡｌＣｒＮまたはＡｌＣｒＤＮ〔但し、ＣｒとＡｌとの原子比は０．２５≦Ｃｒ／Ａｌ≦０．６７、Ｄは元素の周期表のIVａ族、Ｖａ族、VIａ族（Ｃｒを除く）、Ｙ、およびＳｉＣの中の何れか１種類〕にて構成されている。具体的には、例えば図２の「被膜構造」の「第II層」の欄に例示されているように、ＡｌＣｒＨｆＮ、ＡｌＣｒＹＮ、ＡｌＣｒＮ、ＡｌＣｒＳｉＣＮ、ＡｌＣｒＴｉＮ、ＡｌＣｒＨｆＮ、ＡｌＣｒＷＮ、ＡｌＣｒＭｏＮ、ＡｌＣｒＶＮ、ＡｌＣｒＮｂＮなどである。この第II層２４と第 III層２６との境界部分には、両者の組成が混ざった混合層が僅かな厚さ（例えば第II層２４の膜厚Ｔ２の１０％以下）で設けられているが、図では省略されている。この混合層は、第 III層２６を形成するためのターゲットおよび反応ガスから第II層２４を形成するためのターゲットおよび反応ガスに切り換えるタイミングをずらし、第 III層２６を形成するためのターゲットおよび反応ガスと、第II層２４を形成するためのターゲットおよび反応ガスとを、所定時間だけ重複して用いることにより、第 III層２６に連続して形成することができる。また、その状態で第 III層２６を形成するためのターゲットへの通電（アーク放電）および反応ガスの供給を停止すれば、混合層から連続して第II層２４に切り換えることができる。なお、反応ガスが共通であれば、ターゲットへの通電のみを切り換えれば良い。 The second layer 24 provided on the second III layer 26 is made of AlCrN or AlCrDN (where the atomic ratio of Cr and Al is 0.25 ≦ Cr / Al ≦ 0.67, D is IVa in the periodic table of elements) Group, Va group, VIa group (excluding Cr), Y, and SiC]. Specifically, for example, as illustrated in the column “II layer” of “Coating structure” in FIG. is there. At the boundary portion between the second layer 24 and the second layer III layer 26, a mixed layer in which the compositions of both are mixed is provided with a slight thickness (for example, 10% or less of the film thickness T2 of the second layer 24). Is omitted in the figure. This mixed layer shifts the timing for switching from the target and reaction gas for forming the second IV layer 26 to the target and reaction gas for forming the second layer 24, and the target and reaction for forming the first III layer 26. By using the gas, the target for forming the second layer 24, and the reaction gas in duplicate for a predetermined time, the gas can be continuously formed in the first layer III layer 26. In addition, if the energization (arc discharge) to the target and the supply of the reaction gas for forming the second cage III layer 26 are stopped in this state, the mixed layer can be continuously switched to the second layer 24. If the reaction gas is common, only the energization of the target may be switched.
　上記第II層２４の上に設けられる第Ｉ層２２は、Ｉａ層２２ａが最表層となるようにそのＩａ層２２ａおよびＩｂ層２２ｂを１０ｎｍ以上の積層周期で１周期以上交互に積層したもので、本実施例ではＩｂ層２２ｂから偶数層設けられている。第II層２４の上に設けられるＩｂ層２２ｂは、（Ｃｒ1-a-b Ｂa Ｘb ）（Ｃc Ｏd Ｎ1-c-d ）〔但し、ａ、ｂ、ｃ、ｄはそれぞれ原子比で、０＜ａ≦０．２、０≦ｂ≦０．５、０≦ｃ≦０．５、０≦ｄ≦０．３の範囲内、Ｘは元素の周期表のIVａ族、Ｖａ族、VIａ族（Ｃｒを除く）、Ｙ、およびＳｉＣの中の１種類以上〕にて構成されている。具体的には、例えば図２の「被膜構造」の「Ｉｂ層」の欄に例示されているように、ＣｒＢＶＮ、ＣｒＢＳｉＣＨｆＮ、ＣｒＢＮｂＮ、ＣｒＢＳｉＣＮ、ＣｒＢＴｉＯＮ、ＣｒＢＴａＮ、ＣｒＢＴｉＮ、ＣｒＢＷＮ、ＣｒＢＹＮ、ＣｒＢＶＣＮ、ＣｒＢＭｏＮなどである。このＩｂ層２２ｂと第II層２４との境界部分にも、両者の組成が混ざった混合層が僅かな厚さ（例えばＩｂ層２２ｂの膜厚の１０％以下）で設けられているが、図では省略されている。この混合層も、前記第II層２４と第 III層２６との境界部分の混合層と同様に連続して形成することができる。 The I layer 22 provided on the II layer 24 is formed by alternately laminating the Ia layer 22a and the Ib layer 22b with a laminating period of 10 nm or more so that the Ia layer 22a becomes the outermost layer. In this embodiment, even layers are provided from the Ib layer 22b. Ib layer 22b provided on the first II layer 24, (Cr 1-ab B a X b) (C c O d N 1-cd) [where, a, b, c, d are respectively atomic ratios, 0 <a ≦ 0.2, 0 ≦ b ≦ 0.5, 0 ≦ c ≦ 0.5, 0 ≦ d ≦ 0.3, X is group IVa, Va, VIa of the periodic table of elements (Excluding Cr), Y, and one or more of SiC]. Specifically, for example, as illustrated in the column of “Ib layer” of “Coating structure” in FIG. It is. At the boundary between the Ib layer 22b and the II layer 24, a mixed layer in which the compositions of both are mixed is provided with a slight thickness (for example, 10% or less of the film thickness of the Ib layer 22b). Is omitted. This mixed layer can also be formed continuously in the same manner as the mixed layer at the boundary between the II layer 24 and the III layer 26.
　上記Ｉｂ層２２ｂの上に設けられるＩａ層２２ａは、ＡｌＣｒＮまたはＡｌＣｒαＮ〔但し、ＣｒとＡｌとの原子比は０．２５≦Ｃｒ／Ａｌ≦０．６７、αは元素の周期表のIVａ族、Ｖａ族、VIａ族（Ｃｒを除く）、Ｙ、およびＳｉＣの中の何れか１種類〕にて構成されている。具体的には、例えば図２の「被膜構造」の「Ｉａ層」の欄に例示されているように、ＡｌＣｒＮ、ＡｌＣｒＹＮ、ＡｌＣｒＳｉＣＮ、ＡｌＣｒＴｉＮ、ＡｌＣｒＭｏＮ、ＡｌＣｒＷＮ、ＡｌＣｒＮｂＮ、ＡｌＣｒＴａＮ、ＡｌＣｒＺｒＮなどである。このＩａ層２２ａとＩｂ層２２ｂとの境界部分にも、両者の組成が混ざった混合層が僅かな厚さ（例えばＩａ層２２ａの膜厚の１０％以下）で設けられているが、図では省略されている。この混合層も、前記第II層２４と第 III層２６との境界部分の混合層と同様に連続して形成することができる。 The Ia layer 22a provided on the Ib layer 22b is AlCrN or AlCrαN (wherein the atomic ratio of Cr and Al is 0.25 ≦ Cr / Al ≦ 0.67, α is the group IVa in the periodic table of elements, Any one of Va group, VIa group (excluding Cr), Y, and SiC]. Specifically, for example, AlCrN, AlCrYN, AlCrSiCN, AlCrTiN, AlCrMoN, AlCrWN, AlCrNbN, AlCrTaN, AlCrZrN, etc., as exemplified in the “Ia layer” column of “Coating structure” in FIG. In the boundary portion between the Ia layer 22a and the Ib layer 22b, a mixed layer in which both compositions are mixed is provided with a slight thickness (for example, 10% or less of the film thickness of the Ia layer 22a). It is omitted. This mixed layer can also be formed continuously in the same manner as the mixed layer at the boundary between the second layer 24 and the third layer III layer 26.
　上記Ｉａ層２２ａおよびＩｂ層２２ｂは、Ｉａ層２２ａが最表層となるように１０ｎｍ以上の積層周期で１周期以上交互に積層されている。図２および図３の具体例では、試験品No５の積層数が５０で、膜厚が０．３μｍであることから、積層周期は１２ｎｍとなり、この中では最も薄い場合である。試験品No２２の積層数は２すなわち１周期で、膜厚が１μｍであることから、積層周期は１μｍであり、この中では最も厚い場合である。また、Ｉａ層２２ａおよびＩｂ層２２ｂの各膜厚は、例えば５ｎｍ以上の厚さで個別に適宜設定されるが、本実施例では同じ膜厚で形成されており、試験品No５の場合はそれぞれ６ｎｍ、試験品No２２の場合はそれぞれ５００ｎｍである。この膜厚は、前記混合層を含めた厚さである。 The Ia layer 22a and the Ib layer 22b are alternately stacked with a period of 10 nm or more so that the Ia layer 22a becomes the outermost layer. In the specific examples of FIGS. 2 and 3, since the number of layers of the test product No5 is 50 and the film thickness is 0.3 μm, the stacking cycle is 12 nm, which is the thinnest of these. Since the number of layers of the test product No. 22 is two, that is, one cycle, and the film thickness is 1 μm, the stacking cycle is 1 μm. Further, the film thicknesses of the Ia layer 22a and the Ib layer 22b are individually set as appropriate, for example, with a thickness of 5 nm or more, but in the present embodiment, they are formed with the same film thickness. In the case of 6 nm and test product No. 22, it is 500 nm. This film thickness includes the mixed layer.
　また、前記第Ｉ層２２、第II層２４、および第 III層２６を合わせた硬質被膜２０全体の総膜厚Ｔtotal は０．１～１５μｍの範囲内で、第Ｉ層２２の膜厚Ｔ１は総膜厚Ｔtotal の１～５０％の範囲内、第 III層２６の膜厚Ｔ３は総膜厚Ｔtotal の１～２５％の範囲内、第II層２４の膜厚Ｔ２は（Ｔtotal －Ｔ１－Ｔ３）である。図３の膜厚の欄に括弧書きで示されている％は、それぞれ総膜厚Ｔtotal に対する比率である。 The total thickness Ttotal of the hard coating 20 including the I-layer 22, the II-layer 24, and the III-layer 26 is in the range of 0.1 to 15 μm, and the thickness T1 of the I-layer 22 is The film thickness T3 of the first layer III layer 26 is within the range of 1 to 25% of the total film thickness Ttotal 、, and the film thickness T2 of the second layer 24 is (Ttotal −T1-T3). ). The percentages shown in parentheses in the column of film thickness in FIG. 3 are ratios to the total film thickness Ttotal, respectively.
　このような本実施例のボールエンドミル１０の硬質被膜２０によれば、ＡｌＣｒＮまたはＡｌＣｒＤＮにて構成されている第II層２４により優れた耐摩耗性が得られるとともに、工具母材１２と上記第II層２４との間には、Ｂ、Ａｌ、Ｔｉ、Ｙ、Ｚｒ、Ｈｆ、Ｖ、Ｎｂ、Ｔａ、Ｃｒ、Ｗの中の１種類以上の元素から成る金属の窒化物、炭窒化物、または炭化物にて構成されている第 III層２６が介在させられているため、高い付着強度が得られる。また、上記第II層２４の上に設けられる第Ｉ層２２は、Ｉａ層２２ａが最表層となるようにＩａ層２２ａおよびＩｂ層２２ｂを１０ｎｍ以上の積層周期で１周期以上交互に積層したもので、そのＩｂ層２２ｂは、（Ｃｒ1-a-b Ｂa Ｘb ）（Ｃc Ｏd Ｎ1-c-d ）にて構成されているため、摩擦係数が小さくなって優れた耐溶着性が得られる。Ｉａ層２２ａは、ＡｌＣｒＮまたはＡｌＣｒαＮにて構成されているため、耐熱性が向上し、上記Ｉｂ層２２ｂによる耐溶着性を維持しつつ高速切削等の高温になる加工条件で使用する場合でも優れた耐摩耗性が得られるようになる。 According to the hard coating 20 of the ball end mill 10 of this embodiment, excellent wear resistance is obtained by the second layer 24 composed of AlCrN or AlCrDN, and the tool base material 12 and the second II are formed. Between the layer 24, a metal nitride, carbonitride, or carbide composed of one or more elements of B, Al, Ti, Y, Zr, Hf, V, Nb, Ta, Cr, and W High adhesion strength can be obtained because the third layer 26 constituted by is interposed. The I layer 22 provided on the II layer 24 is formed by alternately laminating Ia layers 22a and Ib layers 22b with a laminating cycle of 10 nm or more so that the Ia layer 22a becomes the outermost layer. in its Ib layer 22b is because it is composed, superior welding resistance and friction coefficient is reduced can be obtained by (Cr 1-ab B a X b) (C c O d N 1-cd) . Since the Ia layer 22a is composed of AlCrN or AlCrαN, the heat resistance is improved, and the Ia layer 22a is excellent even when used under high-temperature cutting conditions such as high-speed cutting while maintaining the welding resistance by the Ib layer 22b. Abrasion resistance can be obtained.
　したがって、高温となる加工条件下での使用においても優れた耐摩耗性、耐溶着性が長期間に亘って安定して得られるようになり、ステンレス鋼に対する切削加工や５０ＨＲＣ以下で溶着し易い被削材に対する切削加工などを高温となる加工条件で行なう場合でも、剥離やチッピング摩耗が抑制され、良好な加工面が得られるとともに、所定の加工性能が安定して得られるようになって工具寿命が向上する。 Accordingly, excellent wear resistance and welding resistance can be stably obtained over a long period of time even when used under high-temperature processing conditions, and it is easy to cut stainless steel or to be easily welded at 50 HRC or less. Even when cutting work on cutting materials under high-temperature processing conditions, peeling and chipping wear are suppressed, a good machined surface can be obtained, and the specified machining performance can be stably obtained, resulting in tool life Will improve.
　また、本実施例では、第Ｉ層２２のＩａ層２２ａとＩｂ層２２ｂとの境界部分に両者の混合層が設けられ、第Ｉ層２２と第II層２４との境界部分に両者の混合層が設けられ、第II層２４と第 III層２６との境界部分にも両者の混合層が設けられているため、それ等の各層間の相互の付着強度も高くなり、剥離やチッピング摩耗が一層効果的に抑制される。本実施例では、それ等のＩａ層２２ａ～第 III層２６がアークイオンプレーティング法によって形成されるため、上記混合層が形成されるようにターゲットや反応ガスの切換タイミングを適当に設定することにより、その混合層を含めて第 III層２６～Ｉａ層２２ａを連続的に効率良く形成することができる。 Further, in this embodiment, a mixed layer of both is provided at the boundary between the Ia layer 22a and the Ib layer 22b of the I layer 22, and the mixed layer of both is provided at the boundary between the I layer 22 and the II layer 24. And a mixed layer of the two layers is also provided at the boundary between the II layer 24 and the heel III layer 26, so that the adhesion strength between these layers also increases, and peeling and chipping wear further occur. Effectively suppressed. In this embodiment, since the Ia layer 22a to the second layer III layer 26 are formed by the arc ion plating method, the switching timing of the target and the reactive gas is appropriately set so that the mixed layer is formed. Thus, the first to third III layers 26 to Ia layer 22a including the mixed layer can be formed continuously and efficiently.
　また、本実施例では、第Ｉ層２２～第 III層２６の総膜厚Ｔtotal が０．１～１５μｍの範囲内で、第Ｉ層２２の膜厚Ｔ１が総膜厚Ｔtotal の１～５０％の範囲内で、第 III層２６の膜厚Ｔ３が総膜厚Ｔtotal の１～２５％の範囲内で、第II層２４の膜厚Ｔ２が（Ｔtotal －Ｔ１－Ｔ３）であるため、第Ｉ層２２による耐溶着性および耐熱性の向上、第II層２４による耐摩耗性向上、および第 III層２６による付着強度向上の各効果が適切に得られる。 In this embodiment, the total film thickness Ttotal of the I-th layer 22 to the III layer 26 is in the range of 0.1 to 15 µm, and the film thickness T1 of the I-layer 22 is 1 to 50% of the total film thickness Ttotal. In this range, the film thickness T3 of the second layer III layer 26 is in the range of 1 to 25% of the total film thickness Ttotal and the film thickness T2 of the second layer 24 is (Ttotal−T1-T3). Each of the effects of improving the welding resistance and heat resistance by the layer 22, improving the abrasion resistance by the second layer 24, and improving the adhesion strength by the first III layer 26 can be appropriately obtained.
　次に、工具母材１２が超硬合金製で直径が６ｍｍ（先端Ｒ＝３）、２枚刃の本実施例のボールエンドミル１０（請求の範囲第１項～第３項の要件を満たす本発明品）と、硬質被膜２０を構成している第Ｉ層２２、第II層２４、第 III層２６の有無や被膜組成、原子比、膜厚が請求の範囲第１項または第３項の要件を満たしていない比較品（従来品を含む）とを用意し、以下の加工条件で切削加工を行って２８０ｍ切削加工した後のボール刃１８の逃げ面摩耗幅（ｍｍ）を調べた結果を説明する。図２および図３の試験品No１～No３８は本発明品で、試験品No３９～No４８は比較品であり、網掛けを付した欄は本発明の要件から外れている項目である。また、逃げ面摩耗幅（ｍｍ）は２枚のボール刃１８の平均値で、許容範囲を０．１ｍｍ以下として合否判定を行った。なお、被膜硬さ（ＨＶ０．０２５）については測定が容易でないため、一部の試験品についてのみ調べ、記載の無いものは測定を省略した。
《加工条件》
　・被削材種：ＳＵＳ３０４（ＪＩＳの規定によるステンレス鋼）
　・切削方法：ピック加工
　・切削速度：２３８ｍ／ｍｉｎ
　・送り速度：０．１２ｍｍ／ｔ
　・切り込み：ａａ＝０．３ｍｍ、Ｐｆ＝０．６ｍｍ
　・切削油剤：エアブロー
Next, the tool base material 12 is made of cemented carbide and has a diameter of 6 mm (tip R = 3) and a two-blade ball end mill 10 of the present embodiment (a book that satisfies the requirements of claims 1 to 3) Invention) and the presence / absence, coating composition, atomic ratio, and film thickness of the I-layer 22, II-layer 24, and III-layer 26 constituting the hard coating 20 according to claim 1 or 3. Comparison products (including conventional products) that do not satisfy the requirements were prepared, and the results of examining the flank wear width (mm) of the ball blade 18 after cutting 280 m by cutting under the following processing conditions explain. The test products No. 1 to No. 38 in FIG. 2 and FIG. 3 are products of the present invention, the test products No. 39 to No. 48 are comparative products, and the shaded columns are items that are out of the requirements of the present invention. Further, the flank wear width (mm) is an average value of the two ball blades 18, and the pass / fail judgment is made with an allowable range of 0.1 mm or less. In addition, since it is not easy to measure the film hardness (HV 0.025), only a part of the test products was examined, and the measurement was omitted for those not described.
"Processing conditions"
-Work material type: SUS304 (stainless steel according to JIS regulations)
・ Cutting method: Pick processing ・ Cutting speed: 238 m / min
・ Feeding speed: 0.12mm / t
・ Incision: aa = 0.3 mm, Pf = 0.6 mm
・ Cutting fluid: Air blow
　試験品No１～No３８の本発明品は、何れも逃げ面摩耗幅が許容範囲内（０．１ｍｍ以下）である。これに対し、試験品No３９～No４８の比較品は、何れも逃げ面摩耗幅が許容範囲（０．１ｍｍ）を超えているか、加工途中で欠けが発生して加工不可となり、十分な耐久性（工具寿命）が得られなかった。被膜硬さＨＶは、試験品No１～No３８の本発明品では２７９０～２９５０であるのに対し、比較品では２７９０～２９００であるが、測定誤差や個体差を考慮すると殆ど差がないものと考えられ、耐溶着性や付着強度が耐久性（逃げ面摩耗幅）に大きく影響しているものと考えられる。 The test products No1 to No38 of the present invention all have a flank wear width within an allowable range (0.1 mm or less). On the other hand, the comparative products No. 39 to No. 48 all have a flank wear width exceeding the allowable range (0.1 mm), or chipping occurs during machining, making machining impossible, and sufficient durability ( Tool life) could not be obtained. The coating hardness HV is 2790 to 2950 for the test products of No. 1 to No. 38 of the present invention, whereas it is 2790 to 2900 for the comparative product. However, it is considered that there is almost no difference in consideration of measurement errors and individual differences. Therefore, it is considered that the welding resistance and adhesion strength greatly influence the durability (flank wear width).
　また、上記試験品No７、No２０、No４５、およびNo４７のボールエンドミルを２本ずつ用意し、以下の加工条件で切削加工を行って工具寿命に達するまでの切削距離を調べたところ、図４に示す結果が得られた。工具寿命は、２枚のボール刃１８の何れか一方の逃げ面摩耗幅（ｍｍ）が０．１ｍｍに達したことで判定した。
《加工条件》
　・被削材種：ダイカスト金型鋼（ＪＩＳの規定によるＳＫＤ６１相当）（４３ＨＲＣ）
　・切削方法：ピック加工
　・切削速度：２１６ｍ／ｍｉｎ
　・送り速度：０．１２ｍｍ／ｔ
　・切り込み：ａａ＝０．３ｍｍ、Ｐｆ＝０．６ｍｍ
　・切削油剤：水溶性
In addition, two ball end mills of the above test products No. 7, No. 20, No. 45, and No. 47 were prepared, and the cutting distance until the tool life was reached by cutting under the following machining conditions was shown in FIG. Results were obtained. The tool life was determined by the fact that the flank wear width (mm) of either one of the two ball blades 18 reached 0.1 mm.
"Processing conditions"
-Work material type: Die-cast die steel (equivalent to SKD61 according to JIS regulations) (43HRC)
・ Cutting method: Pick processing ・ Cutting speed: 216 m / min
・ Feeding speed: 0.12mm / t
・ Incision: aa = 0.3 mm, Pf = 0.6 mm
・ Cutting fluid: Water-soluble
　図４の結果から、試験品No７およびNo２０の本発明品は約２００ｍの切削加工が可能であったのに対し、試験品No４５およびNo４７の比較品（従来品）では１１０ｍ以下で、本発明品によれば約２倍の耐久性が得られるようになった。 From the results shown in FIG. 4, the test products No. 7 and No. 20 of the present invention were capable of cutting about 200 m, whereas the test products No. 45 and No. 47 (conventional product) were 110 m or less. According to the results, approximately twice the durability can be obtained.
　また、直径が６ｍｍの円柱形状で、先端ラップ面がＲ５の球面とされた超硬テストピースにおいて、そのラップ面に前記試験品No５、No７、No２０、No２６、No３９、No４５、No４７と同じ硬質被膜をコーティングしたものを用意し、図５に示すピンオンディスク式摩擦試験装置を用いて以下の試験条件で摩擦係数を調べたところ、図６に示す結果が得られた。
《試験条件》
　・相手材：ＳＵＳ３０４（ＪＩＳの規定によるステンレス鋼）
　・荷重：０．５Ｎ
　・線速度：１００ｍｍ／ｓ
　・時間：６００秒
　・試験雰囲気：大気
Further, in a carbide test piece having a cylindrical shape with a diameter of 6 mm and a spherical surface with a tip wrap surface of R5, the same hard coating as that of the test products No. 5, No. 7, No. 20, No. 26, No. 39, No. 45, and No. 47 on the lap surface. Was prepared, and the coefficient of friction was examined using the pin-on-disk friction test apparatus shown in FIG. 5 under the following test conditions. The result shown in FIG. 6 was obtained.
"Test conditions"
-Partner material: SUS304 (stainless steel according to JIS regulations)
・ Load: 0.5N
・ Linear speed: 100mm / s
・ Time: 600 seconds ・ Test atmosphere: Air
　図６の「摩擦係数」の欄に示すように、試験品No５、No７、No２０、No２６の本発明品は何れも０．４１以下であるのに対し、試験品No４５、No４７の比較品（従来品）は０．６９、０．６８と大きく、本発明品によれば摩擦係数が２／３以下になって優れた耐溶着性が得られるようになる。なお、Ｉａ層２２ａを備えていない３層構造の試験品No３９については、本発明品と同程度の摩擦係数（０．３９）であった。 As shown in the column of “Friction coefficient” in FIG. 6, the test products No. 5, No. 7, No. 20 and No. 26 are all 0.41 or less, while the test products No. 45 and No. 47 are comparative products (conventional products). Product) is as large as 0.69 and 0.68, and according to the product of the present invention, the friction coefficient becomes 2/3 or less and excellent welding resistance can be obtained. In addition, about the test product No39 of the 3 layer structure which is not equipped with the Ia layer 22a, it was a friction coefficient (0.39) comparable as this invention product.
　上記摩擦係数試験を行った試験品No５、No７、No２０、No２６、No３９、No４５、No４７の７種類の硬質被膜について、同じく直径が６ｍｍの円柱形状で先端がＲ５の球面とされた超硬テストピースにそれ等の硬質被膜をコーティングしたものを用意し、耐酸化性（耐熱性）試験を行なって酸化層厚さを測定した。結果を、前記摩擦係数試験の結果と併せて前記図６に示す。
《試験条件》
　・加熱温度：１０００℃（昇温時間：４０分　保持時間：１０分）
　・装置：電気炉
　・試験雰囲気：大気
7 types of hard coatings of test products No5, No7, No20, No26, No39, No45, and No47 that have been subjected to the above friction coefficient test. In addition, a material coated with such a hard film was prepared, and an oxidation resistance (heat resistance) test was performed to measure the thickness of the oxide layer. The results are shown in FIG. 6 together with the results of the friction coefficient test.
"Test conditions"
・ Heating temperature: 1000 ° C. (temperature rising time: 40 minutes holding time: 10 minutes)
・ Equipment: Electric furnace ・ Test atmosphere: Air
　図６の「酸化層厚さ」の欄に示すように、試験品No５、No７、No２０、No２６の本発明品は何れも０．９０μｍ以下であるのに対し、前記Ｉａ層２２ａを備えていない試験品No３９は２．８μｍと厚く、見た目にもボロボロしていて光沢が無くなっていた。すなわち、Ｉａ層２２ａを備えていない試験品No３９は耐熱性が悪く、例えば高速切削等の高温になる加工条件で使用すると、所定の耐摩耗性が得られなくなるのに対し、Ｉａ層２２ａを有する本発明品によれば、高温になる加工条件で使用する場合でも硬質被膜２０が良好に維持され、所定の耐摩耗性が得られる。なお、試験品No４５、No４７は、本発明品と略同じ酸化層厚さで、同等の耐熱性を有するが、前述したように摩擦係数が大きくて十分な耐溶着性が得られない。 As shown in the column of “Oxide Layer Thickness” in FIG. 6, the test products No. 5, No. 7, No. 20 and No. 26 are all 0.90 μm or less, but do not have the Ia layer 22a. Test product No. 39 was as thick as 2.8 μm, and it was tattered and had no gloss. That is, the test product No39 not provided with the Ia layer 22a has poor heat resistance, and when used under high-temperature processing conditions such as high-speed cutting, the predetermined wear resistance cannot be obtained, but the Ia layer 22a is provided. According to the product of the present invention, the hard coating 20 is well maintained even when used under high-temperature processing conditions, and a predetermined wear resistance is obtained. The test products No. 45 and No. 47 have substantially the same oxide layer thickness as the product of the present invention and the same heat resistance. However, as described above, the friction coefficient is large and sufficient welding resistance cannot be obtained.
　以上、本発明の実施例を図面に基づいて詳細に説明したが、これ等はあくまでも一実施形態であり、本発明は当業者の知識に基づいて種々の変更，改良を加えた態様で実施することができる。 As mentioned above, although the Example of this invention was described in detail based on drawing, these are one embodiment to the last, and this invention is implemented in the aspect which added the various change and improvement based on the knowledge of those skilled in the art. be able to.
　１０：ボールエンドミル（硬質被膜被覆工具）　　１２：工具母材（所定の部材）　　２０：硬質被膜　　２２：第Ｉ層　　２２ａ：Ｉａ層　　２２ｂ：Ｉｂ層　　２４：第II層　　２６：第 III層 10: Ball end mill (hard coating coated tool) 12: Tool base material (predetermined member) 20: Hard coating 22: Layer I 22a: Ia layer 22b: Ib layer 24: Layer II 26: Layer II III

Claims (4)

  1. 　所定の部材の表面上に設けられる耐摩耗性および耐溶着性に優れた硬質被膜であって、
    　前記部材の表面に接して設けられる第 III層と、該第 III層の上に設けられる第II層と、該第II層の上に設けられて表面を構成する第Ｉ層とを有する多層構造で、
    　前記第Ｉ層は、
    　ＡｌＣｒＮまたはＡｌＣｒαＮ〔但し、ＣｒとＡｌとの原子比は０．２５≦Ｃｒ／Ａｌ≦０．６７、αは元素の周期表のIVａ族、Ｖａ族、VIａ族（Ｃｒを除く）、Ｙ、およびＳｉＣの中の何れか１種類〕から成るＩａ層と、
    　（Ｃｒ1-a-b Ｂa Ｘb ）（Ｃc Ｏd Ｎ1-c-d ）〔但し、ａ、ｂ、ｃ、ｄはそれぞれ原子比で、０＜ａ≦０．２、０≦ｂ≦０．５、０≦ｃ≦０．５、０≦ｄ≦０．３の範囲内、Ｘは元素の周期表のIVａ族、Ｖａ族、VIａ族（Ｃｒを除く）、Ｙ、およびＳｉＣの中の１種類以上〕から成るＩｂ層と、
    　から構成され、該Ｉａ層が最表層となるように１０ｎｍ以上の積層周期で１周期以上交互に積層されたもので、
    　前記第II層は、ＡｌＣｒＮまたはＡｌＣｒＤＮ〔但し、ＣｒとＡｌとの原子比は０．２５≦Ｃｒ／Ａｌ≦０．６７、Ｄは元素の周期表のIVａ族、Ｖａ族、VIａ族（Ｃｒを除く）、Ｙ、およびＳｉＣの中の何れか１種類〕にて構成され、
    　前記第 III層は、Ｂ、Ａｌ、Ｔｉ、Ｙ、Ｚｒ、Ｈｆ、Ｖ、Ｎｂ、Ｔａ、Ｃｒ、Ｗの中の１種類以上の元素から成る金属の窒化物、炭窒化物、または炭化物にて構成されている
    　ことを特徴とする硬質被膜。     A hard coating having excellent wear resistance and welding resistance provided on the surface of a predetermined member,
    A multilayer structure including a third layer provided in contact with the surface of the member, a second layer provided on the third layer, and a first layer constituting the surface provided on the second layer so,
    The layer I is
    AlCrN or AlCrαN (wherein the atomic ratio of Cr to Al is 0.25 ≦ Cr / Al ≦ 0.67, α is IVa group, Va group, VIa group (excluding Cr), Y in the periodic table of elements, and Y An Ia layer comprising any one of SiC],
    (Cr 1-ab B a X b ) (C c O d N 1-cd ) [where a, b, c, d are atomic ratios, 0 <a ≦ 0.2, 0 ≦ b ≦ 0. 5, in the range of 0 ≦ c ≦ 0.5, 0 ≦ d ≦ 0.3, X is one of IVa group, Va group, VIa group (excluding Cr), Y, and SiC of the periodic table of elements Ib layer consisting of
    In which the Ia layer is the outermost layer and is alternately stacked with a period of 10 nm or more and a period of 1 cycle or more,
    The second layer is made of AlCrN or AlCrDN (wherein the atomic ratio of Cr and Al is 0.25 ≦ Cr / Al ≦ 0.67, D is IVa group, Va group, VIa group (Cr is Except), any one of Y and SiC]
    The third layer is made of a metal nitride, carbonitride, or carbide composed of one or more elements selected from B, Al, Ti, Y, Zr, Hf, V, Nb, Ta, Cr, and W. Hard film characterized by being composed.
  2. 　前記第Ｉ層の前記Ｉａ層と前記Ｉｂ層との境界部分には両者の混合層が設けられ、
    　該第Ｉ層と前記第II層との境界部分には両者の混合層が設けられ、
    　該第II層と前記第 III層との境界部分には両者の混合層が設けられている
    　ことを特徴とする請求の範囲第１項に記載の硬質被膜。     In the boundary portion between the Ia layer and the Ib layer of the I layer, a mixed layer of both is provided,
    A mixed layer of both is provided at the boundary between the I layer and the II layer,
    The hard coating film according to claim 1, wherein a mixed layer of both is provided at a boundary portion between the II layer and the III layer.
  3. 　前記第Ｉ層、前記第II層、および前記第 III層の総膜厚Ｔtotal は０．１～１５μｍの範囲内で、
    　前記第Ｉ層の膜厚Ｔ１は、総膜厚Ｔtotal の１～５０％の範囲内で、
    　前記第 III層の膜厚Ｔ３は、総膜厚Ｔtotal の１～２５％の範囲内で、
    　前記第II層の膜厚Ｔ２は、（Ｔtotal －Ｔ１－Ｔ３）である
    　ことを特徴とする請求の範囲第１項または第２項に記載の硬質被膜。     The total thickness Ttotal of the I layer, the II layer, and the III layer is in the range of 0.1 to 15 μm.
    The film thickness T1 of the I layer is in the range of 1 to 50% of the total film thickness Ttotal,
    The film thickness T3 of the III layer is within the range of 1 to 25% of the total film thickness Ttotal.
    The hard film according to claim 1 or 2, wherein the film thickness T2 of the II layer is (Ttotal -T1-T3).
  4. 　請求の範囲第１項～第３項の何れか１項に記載の硬質被膜で工具母材の表面が被覆されていることを特徴とする硬質被膜被覆工具。 A hard coating coated tool, wherein the surface of the tool base material is coated with the hard coating according to any one of claims 1 to 3.
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