WO2010135321A3 - Method and apparatus for solar cell production line control and process analysis - Google Patents

Method and apparatus for solar cell production line control and process analysis Download PDF

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Publication number
WO2010135321A3
WO2010135321A3 PCT/US2010/035247 US2010035247W WO2010135321A3 WO 2010135321 A3 WO2010135321 A3 WO 2010135321A3 US 2010035247 W US2010035247 W US 2010035247W WO 2010135321 A3 WO2010135321 A3 WO 2010135321A3
Authority
WO
WIPO (PCT)
Prior art keywords
solar cell
cell devices
production line
processes
formation
Prior art date
Application number
PCT/US2010/035247
Other languages
French (fr)
Other versions
WO2010135321A2 (en
Inventor
Vicky Svidenko
Mathew Abraham
Serkan Kincal
Asaf Schlezinger
Michel Frei
Dapeng Wang
Tzay-Fa Su
Original Assignee
Applied Materials, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials, Inc. filed Critical Applied Materials, Inc.
Publication of WO2010135321A2 publication Critical patent/WO2010135321A2/en
Publication of WO2010135321A3 publication Critical patent/WO2010135321A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1876—Particular processes or apparatus for batch treatment of the devices
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31449—Monitor workflow, to optimize business, industrial processes
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31459—Library with metrology plan for different type of workpieces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/036—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
    • H01L31/0376—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including amorphous semiconductors
    • H01L31/03762—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including amorphous semiconductors including only elements of Group IV of the Periodic Table
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
    • H01L31/075—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PIN type, e.g. amorphous silicon PIN solar cells
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02S—GENERATION OF ELECTRIC POWER BY CONVERSION OF INFRARED RADIATION, VISIBLE LIGHT OR ULTRAVIOLET LIGHT, e.g. USING PHOTOVOLTAIC [PV] MODULES
    • H02S50/00—Monitoring or testing of PV systems, e.g. load balancing or fault identification
    • H02S50/10—Testing of PV devices, e.g. of PV modules or single PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P80/00—Climate change mitigation technologies for sector-wide applications
    • Y02P80/10—Efficient use of energy, e.g. using compressed air or pressurized fluid as energy carrier
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/80—Management or planning

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Photovoltaic Devices (AREA)

Abstract

Embodiments of the present invention generally relate to a system used to form solar cell devices using processing modules adapted to perform one or more processes in the formation of the solar cell devices. In one embodiment, the system is adapted to form thin film solar cell devices by accepting a large unprocessed substrate and performing multiple deposition, material removal, cleaning, sectioning, bonding, and various inspection and testing processes to form multiple complete, functional, and tested solar cell devices that can then be shipped to an end user for installation in a desired location to generate electricity. In one embodiment, the system provides inspection of solar cell devices at various levels of formation, while collecting and using metrology data to diagnose, tune, or improve production line processes during the manufacture of solar cell devices.
PCT/US2010/035247 2009-05-19 2010-05-18 Method and apparatus for solar cell production line control and process analysis WO2010135321A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US17971509P 2009-05-19 2009-05-19
US61/179,715 2009-05-19

Publications (2)

Publication Number Publication Date
WO2010135321A2 WO2010135321A2 (en) 2010-11-25
WO2010135321A3 true WO2010135321A3 (en) 2011-02-03

Family

ID=43126729

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2010/035247 WO2010135321A2 (en) 2009-05-19 2010-05-18 Method and apparatus for solar cell production line control and process analysis

Country Status (2)

Country Link
TW (1) TW201044629A (en)
WO (1) WO2010135321A2 (en)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI417559B (en) * 2011-07-08 2013-12-01 Inventec Solar Energy Corp Method for analyzing electrical properties of solar cell
EP2755274A4 (en) 2011-09-05 2015-06-03 Nihon Micronics Kk Apparatus and method for evaluating sheet-like battery
CN103943728B (en) * 2014-04-30 2017-06-06 普乐（合肥）光技术有限公司 High performance solar batteries component machining production line
US10243514B2 (en) 2015-06-04 2019-03-26 Ryan Bower Jones Photovoltaic soil monitoring system with automated clean referencing system
WO2016197082A1 (en) * 2015-06-04 2016-12-08 Jones Ryan B Soil monitoring system
TWI579572B (en) * 2015-07-09 2017-04-21 英穩達科技股份有限公司 Method for manufacturing solar cell
CN107046083B (en) * 2017-03-13 2018-08-31 南京日托光伏科技股份有限公司 A kind of MWT photovoltaic modulies partial short-circuit repair method
TWI644190B (en) * 2017-06-29 2018-12-11 台灣積體電路製造股份有限公司 Processing system and processing method
NL2019558B1 (en) * 2017-09-15 2019-03-28 Tno Method for producing modules of thin film photovoltaic cells in a roll-to-roll process and apparatus configured for using such a method.
CN111223958B (en) 2018-11-23 2022-10-14 成都晔凡科技有限公司 Method and system for manufacturing laminated cell and laminated photovoltaic module
EP3686940A4 (en) * 2018-11-23 2020-07-29 Chengdu Yefan Science And Technology Co., Ltd. Method and system for manufacturing shingled solar cell sheet and shingled photovoltaic assembly
DE102019003333A1 (en) * 2019-05-10 2020-11-12 Mühlbauer Gmbh & Co. Kg Manufacturing system for thin-film solar cell arrangements
DE102019209110A1 (en) * 2019-06-24 2020-12-24 Sms Group Gmbh Industrial plant, in particular plant in the metal-producing industry or the aluminum or steel industry, and method for operating an industrial plant, in particular a plant in the metal-producing industry or the aluminum or steel industry
US20230067088A1 (en) * 2021-08-30 2023-03-02 Taiwan Semiconductor Manufacturing Co., Ltd. Temperature controllable bonder equipment for substrate bonding
CN114843369A (en) * 2022-04-28 2022-08-02 晶科能源(海宁)有限公司 Monitoring method of solar cell preparation process

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5953591A (en) * 1995-12-28 1999-09-14 Nippon Sanso Corporation Process for laser detection of gas and contaminants in a wafer transport gas tunnel
WO2008112597A1 (en) * 2007-03-10 2008-09-18 Sergei Ostapenko A method and apparatus for in-line quality control of wafers
US20080254203A1 (en) * 2007-03-01 2008-10-16 Lisong Zhou Silicon nitride passivation for a solar cell

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5953591A (en) * 1995-12-28 1999-09-14 Nippon Sanso Corporation Process for laser detection of gas and contaminants in a wafer transport gas tunnel
US20080254203A1 (en) * 2007-03-01 2008-10-16 Lisong Zhou Silicon nitride passivation for a solar cell
WO2008112597A1 (en) * 2007-03-10 2008-09-18 Sergei Ostapenko A method and apparatus for in-line quality control of wafers

Also Published As

Publication number Publication date
WO2010135321A2 (en) 2010-11-25
TW201044629A (en) 2010-12-16

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