WO2010134760A2 - Concentrateur de source de chaleur et dispositif de traitement de déchets et procédé multi-plasma - Google Patents

Concentrateur de source de chaleur et dispositif de traitement de déchets et procédé multi-plasma Download PDF

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Publication number
WO2010134760A2
WO2010134760A2 PCT/KR2010/003176 KR2010003176W WO2010134760A2 WO 2010134760 A2 WO2010134760 A2 WO 2010134760A2 KR 2010003176 W KR2010003176 W KR 2010003176W WO 2010134760 A2 WO2010134760 A2 WO 2010134760A2
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WO
WIPO (PCT)
Prior art keywords
plasma
waste
process chamber
gas
present
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PCT/KR2010/003176
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English (en)
Korean (ko)
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WO2010134760A3 (fr
Inventor
김익년
장홍기
지영연
Original Assignee
트리플코어스코리아
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Publication of WO2010134760A2 publication Critical patent/WO2010134760A2/fr
Publication of WO2010134760A3 publication Critical patent/WO2010134760A3/fr

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G5/00—Incineration of waste; Incinerator constructions; Details, accessories or control therefor
    • F23G5/08—Incineration of waste; Incinerator constructions; Details, accessories or control therefor having supplementary heating
    • F23G5/085—High-temperature heating means, e.g. plasma, for partly melting the waste
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2202/00—Combustion
    • F23G2202/70—Combustion with application of specific energy

Definitions

  • the present invention relates to a heat source concentrator, a waste treatment apparatus, and a method using multi-plasma, and more particularly, a plasma torch that can be stably generated and maintained as a heat source, and a plurality of heat sources in the process chamber are installed in the process chamber.
  • the present invention relates to a heat source concentrator, a waste treatment apparatus, and a method using a multi-plasma capable of maintaining a high temperature and allowing stable operation and effective heat source application.
  • plasma Various application devices using the plasma have been continuously developed and applied.
  • One such plasma application is the treatment of waste, which occurs essentially in semiconductors, chemical processes and the like.
  • the waste disposal method according to the prior art (herein, the waste includes all of gaseous, liquid, and solid phases, and refers to all target materials for thermal decomposition by plasma) is a gas that initially generates plasma (hereinafter, referred to as a first gas).
  • a gas that initially generates plasma hereinafter, referred to as a first gas.
  • inert gas such as helium and argon and air
  • process gas waste
  • the prior art has an advantage of effectively pyrolyzing a gas to be treated, such as CF4, in a plasma generation region.
  • the conventional technology does not maintain a constant plasma state due to changes in process conditions, such as an increase in processing capacity, a change in gas type and a gas supply amount, and in severe cases, plasma generation is stopped.
  • the capacity of the gas to be increased increases the outer wall temperature of the plasma chamber in which the process gas is pyrolyzed, the process gas passing through the portion is not processed and is discharged to the atmosphere as it is.
  • Prior Art 1 Korean Patent Laid-Open Publication No. 10-2009-0014687 (hereinafter referred to as Prior Art 1) discloses a scrubber technique using a plasma arc torch.
  • 1 is a configuration diagram of the prior art 1.
  • the prior art 1 is a technique of directly injecting waste into a torch flame generated in a plasma arc, and includes a structure for dispersing an arc flame and a cooling unit to prevent overheating.
  • the prior art 1 discloses a configuration in which the plasma arc flame is partially sacrificed through the dispersion of the flame, the separate provision of the cooling unit, and the like, and when the flame is moved to the rear end of the reactor, a sudden temperature decrease occurs to increase the overall temperature in the chamber. There is a problem that cannot be maintained uniformly. Therefore, there is a problem that the prior art 1 is not suitable for the process gas to be treated at a high temperature. Further, when the dispersion radius of the flame decreases as the capacity increases, the temperature drop in the outer wall is inevitably inevitable, and there is a problem that the process gas treatment efficiency is not uniform throughout the chamber.
  • the present invention has been made to solve the above problems, and to provide a heat source concentrating device capable of achieving stable and effective high temperature conditions in a more stable and efficient manner.
  • the present invention also provides an effective waste treatment method and apparatus using the heat source concentrator.
  • the present invention is a process chamber; And a plurality of plasma units connected to the process chamber and introducing a plurality of plasma torches into the process chamber, wherein the plasma unit comprises a microwave generator; A first gas inlet plasmalated by the generated microwaves; And a torch discharge part for introducing the plasma torch generated by the plasma first gas into the process chamber.
  • the plurality of plasma addition is configured such that each plasma torch is introduced in the same point direction of the process chamber.
  • the present invention comprises a process chamber into which waste is introduced; And a plurality of plasma units connected to the process chamber and introducing a plurality of plasma torches into the process chamber.
  • the plasma torch is generated by plasmaization of a first gas of a kind other than the waste material
  • the plasma unit comprises: a microwave generator; A first gas inlet plasmalated by the generated microwaves; And a torch discharge part for introducing the plasma torch generated by the plasma first gas into the process chamber.
  • the plurality of plasma units are configured to allow each plasma torch to flow in the same point direction of the process chamber.
  • the plurality of plasma units may have a multi-stage structure facing each other. And the waste is introduced between the plurality of plasma units.
  • the present invention comprises the steps of introducing waste into the process chamber; And decomposing the waste by the combined heat of the plurality of plasma torches simultaneously introduced into the process chamber.
  • the plasma torch is generated by plasmaization of a first gas of a kind other than the waste, and the plasmaation of the first gas is performed by microwaves.
  • the plurality of plasma torch is introduced by orientating the same point in the process chamber, in another embodiment of the present invention the plurality of plasma torch has a multi-stage structure facing each other Waste is introduced between the opposing plasma torch, so that the waste can flow continuously between the plurality of plasma torch.
  • the heat source concentrator according to the present invention concentrates the heat sources generated from the plurality of plasma torches in one process chamber, thereby improving the process efficiency of the entire chamber. Furthermore, according to the configuration of the plasma torch, it is also possible to easily change and apply the heat source profile of the entire chamber. Furthermore, when the heat source concentrator is applied to waste treatment, it is possible to effectively overcome the disadvantages of the existing plasma apparatus, namely, plasma instability and low removal efficiency of waste due to capacity increase and capacity change. Furthermore, depending on the configuration of the plasma torch, the process gas can be decomposed and removed with a homogeneous efficiency as a whole, and by focusing the plasma torch, high-temperature conditions at specific points or areas can be formed very economically. It can be directly applied to a large capacity scrubber, a high temperature melting furnace, and the like.
  • FIG. 1 is a block diagram of a plasma processing apparatus according to the prior art.
  • FIG. 2 is a block diagram of a heat source concentrating device according to an embodiment of the present invention.
  • FIG. 3 is a configuration diagram of a plasma unit according to an embodiment of the present invention.
  • FIG. 4 is a schematic view of a waste treatment apparatus according to an embodiment of the present invention.
  • FIG. 5 is a schematic view of a waste treatment apparatus according to another embodiment of the present invention.
  • the present invention discloses a heat source concentrating device having a structure in which a hot plasma torch (flame) generated by plasma of a gas other than a process gas, for example, a swirl gas, is concentrated in one chamber in a plasma generation region.
  • a heat source concentrator refers to an apparatus for concentrating a plurality of heat sources into one region.
  • FIG. 2 is a schematic diagram showing a heat source concentrating device according to an embodiment of the present invention.
  • a process chamber in the present specification, a chamber or a process chamber constitutes a system in which the interior is closed and separated from the outside, and means any configuration in which the interior is thermally blocked from the outside by the chamber).
  • a plurality of plasma units are provided in the plasma torch, and the plasma torch generated from each of the plasma units is introduced into the chamber.
  • the plurality of plasma torches may be arranged in a direction in which the plurality of plasma torches are concentrated and merged at one or more points, or may be arranged to have a predetermined interval in the entire chamber area.
  • the plurality of plasma torches introduced into the plasma chamber may form a uniform temperature region in the entire region of the process chamber.
  • the inventors of the present invention concentrate the orientation of the plurality of plasma torches at a specific point or region in the chamber, where each heat generated from the plasma torch is a point or region in which the orientation directions of the plasma torch are merged (orientation direction).
  • the merging of means merging and concentrating in each direction of the plasma torch to form a high temperature, especially in a point or region where the high temperature is formed by a plurality of plasma torch (decomposition of waste,
  • the present invention has been made by focusing on the possibility of melting and the like).
  • the waste treatment apparatus according to the present invention generates a plasma by using an inert gas such as argon or helium and a gas other than the process gas to be treated to generate the plasma torch.
  • the process gas is prevented from being discharged by being untreated by the non-uniform plasma formation of the process gas resulting from the plasma generation step, and a uniform high temperature is formed at an early stage, thereby allowing process gas treatment without the unprocessed process gas.
  • An apparatus configuration for generating such plasma is referred to as a plasma unit, and in one embodiment of the present invention, a plasma generation apparatus using microwaves as shown in FIG. 3 is used as a plasma unit.
  • the plasma unit 200 of the heat source concentrator in particular, the waste treatment apparatus using the heat source concentrator includes a microwave generator 210 and the microwave generator 210.
  • Waveguide 220 is applied to the microwave generated by the).
  • the plasma unit is provided at the rear end of the waveguide 220 and the inlet portion (1, where the first gas is different from the waste 280 when the waste is decomposed) is introduced into the plasma (particularly, when the waste is decomposed).
  • the plasma torch 250 generated in the plasma chamber 240 is discharged through the discharge unit 260 discharged in a desired direction.
  • the process chamber (not shown).
  • the waste 280 flows directly into the plasma torch or to a point spaced apart from the plasma torch at a predetermined interval so that the process gas is processed in the heat source region concentrated by the plasma torch, not in the plasma generation region. .
  • the present invention provides a device (system) that includes a plurality of plasma units illustrated in FIG. 3 and concentrates and merges heat sources generated from a plasma torch, which will be described in more detail with reference to the accompanying drawings.
  • FIG. 4 is a configuration diagram illustrating a gas processing apparatus according to an embodiment of the present invention.
  • a waste treatment apparatus is configured and disposed with a plasma torch such that the plasma torch faces the same point (center point in FIG. 3) of the process chamber.
  • the plasma torch generated from the plasma unit merges the generated heat source to the same point or the same region in the process chamber, and as a result, the temperature in the region rises to a very high temperature. Therefore, in the above embodiment of the present invention, a process gas flows into the region and is decomposed.
  • the plasma torches may overlap each other or may be spaced at appropriate intervals.
  • An advantage of this arrangement is that it can first form a uniform temperature gradient in the process chamber.
  • the prior art has a problem in that the overall temperature is partially sacrificed and decreased with increasing capacity (for example, when increasing the radius of the torch flame of the prior art 1).
  • increasing capacity for example, when increasing the radius of the torch flame of the prior art 1.
  • Another advantage of the above configuration is that economic process gas treatment is possible. That is, in the prior art, when the processing capacity is increased, the amount of the plasma generating device and the gas supplied thereto must be increased.
  • the present invention makes it possible to manufacture a waste treatment apparatus that generates a considerably high heat source by simply configuring a plurality of household microwave generators, for example.
  • process gas having a desired capacity can be efficiently processed by changing the configuration (for example, changing the number of plasma torches).
  • FIG. 5 is a schematic view of a waste treatment apparatus according to another embodiment of the present invention.
  • the plurality of plasma units 200 face each other and have a multi-stage structure with respect to a waste 280 inflow direction.
  • the multi-stage structure is a structure in which the introduced waste passes between a plurality of plasma torches which are continuously opposed to each other, and the multi-stage means a structure arranged sequentially with respect to the flow direction of the waste. That is, in the above embodiment, the waste introduced initially passes through the first stage plasma unit 280a and then passes continuously between the next stage plasma unit 280b.
  • the plasma torch generated from the plasma unit is also concentrated and merged in mutually opposite directions, and the waste 280 is introduced between the opposing plasma units (particularly, the plasma torch).
  • the advantage of the above configuration is that the continuous high temperature treatment of the waste is possible.
  • the solid suspended solids will accumulate in the chamber or cover the plasma generating part when the waste gas treatment apparatus such as a conventional gas scrubber is processed. Problems such as failure and incomplete waste disposal arise.
  • the waste does not pass into the plasma generating unit, it is possible to prevent a problem occurring when the plasma apparatus and the plasma are formed by the suspended solids such as powder, and also by using a plurality of plasma torches to keep the suspended solids such as powder continuously at a high temperature.
  • the treatment has the advantage of being able to continuously remove the solid suspended solids.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Processing Of Solid Wastes (AREA)
  • Gasification And Melting Of Waste (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)

Abstract

L'invention concerne un concentrateur de source de chaleur multi-plasma ainsi qu'un dispositif de traitement de déchets et son procédé d'utilisation. Le concentrateur considéré comprend: une chambre de traitement; et plusieurs unités plasma connectées à cette chambre et faisant intervenir plusieurs torches à plasma dans ladite chambre, ce concentrateur pouvant surmonter efficacement les problèmes inhérents à des dispositifs de traitement du type épurateurs existants, à savoir l'instabilité du plasma et le faible rendement d'élimination dû à des augmentations et des modifications de volume. En outre, la configuration de ces torches permet la désintégration du gaz de traitement et son élimination selon une efficacité globale homogène. Enfin, ledit concentrateur permet de créer des conditions de haute température de façon très économique grâce à une concentration des torches à plasma, et on peut donc l'utiliser directement pour le traitement des déchets, dans des épurateurs à grand volume, des fours de fusion haute température, etc.
PCT/KR2010/003176 2009-05-22 2010-05-20 Concentrateur de source de chaleur et dispositif de traitement de déchets et procédé multi-plasma WO2010134760A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2009-0044758 2009-05-22
KR1020090044758A KR20100125842A (ko) 2009-05-22 2009-05-22 멀티 플라즈마를 이용한 열원 집중 장치, 폐기물 처리 장치 및 방법

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WO2010134760A2 true WO2010134760A2 (fr) 2010-11-25
WO2010134760A3 WO2010134760A3 (fr) 2011-03-17

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112074071A (zh) * 2020-10-05 2020-12-11 四川大学 一种多路微波源的大功率等离子体发生装置
CN112371687A (zh) * 2020-10-05 2021-02-19 四川大学 一种大功率微波等离子体危险固废处理装置
CN112383997A (zh) * 2020-10-05 2021-02-19 四川大学 一种大功率微波等离子体煤粉裂解装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101437440B1 (ko) * 2012-12-27 2014-09-11 한국기초과학지원연구원 전자파 플라즈마 토치
KR102353693B1 (ko) * 2019-11-01 2022-01-20 성신양회(주) 플라즈마 연소시스템을 포함하는 대체연료 가스화 및 연소 장치

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Publication number Priority date Publication date Assignee Title
US5548611A (en) * 1993-05-19 1996-08-20 Schuller International, Inc. Method for the melting, combustion or incineration of materials and apparatus therefor
JP3281152B2 (ja) * 1993-11-05 2002-05-13 株式会社荏原製作所 プラズマ溶融装置
JPH09178152A (ja) * 1995-12-28 1997-07-11 Hitachi Zosen Corp 電気式灰溶融炉の排ガス燃焼部構造
JPH10169962A (ja) * 1996-12-06 1998-06-26 Tsukishima Kikai Co Ltd プラズマ溶融炉による焼却灰の溶融方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112074071A (zh) * 2020-10-05 2020-12-11 四川大学 一种多路微波源的大功率等离子体发生装置
CN112371687A (zh) * 2020-10-05 2021-02-19 四川大学 一种大功率微波等离子体危险固废处理装置
CN112383997A (zh) * 2020-10-05 2021-02-19 四川大学 一种大功率微波等离子体煤粉裂解装置

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KR20100125842A (ko) 2010-12-01
WO2010134760A3 (fr) 2011-03-17
TW201103654A (en) 2011-02-01

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