WO2010125928A1

WO2010125928A1 - Processing head holding mechanism

Info

Publication number: WO2010125928A1
Application number: PCT/JP2010/056768
Authority: WO
Inventors: 裕司木野; 弘晃山奥; 圭二高橋; 浩嘉大村
Original assignee: 三菱電機株式会社
Priority date: 2009-04-28
Filing date: 2010-04-15
Publication date: 2010-11-04
Also published as: JP2012139691A; TW201102202A

Abstract

A processing head holding mechanism provided with a processing head (1) which emits a laser beam and also with a processing head holding section (2) to which the processing head (1) is removably attached, the processing head holding mechanism being configured in such a manner that the processing head (1) attached to the processing head holding section (2) moves on a workpiece relative thereto. The processing head holding section (2) is provided with electromagnets (22A, 22B) which magnetically adhere to the processing head (1), and the processing head (1) is provided with a magnetically adhering plate (12) which magnetically adheres to the electromagnets (22A, 22B). The processing head holding section (2) is configured in such a manner that the magnetic force of the electromagnets (22A, 22B) is adjusted by controlling an electric current applied to the electromagnets (22A, 22B), and by this, the magnetic adhesion force between the electromagnets (22A, 22B) and the magnetically adhering plate (12) is adjusted.

Description

Processing head holding mechanism

The present invention relates to a machining head holding mechanism that holds a machining head of a laser machining apparatus.

The laser processing apparatus is configured to include a processing head, and performs laser processing of the workpiece by irradiating laser light from the processing head. The processing head is joined to a processing head holding device that moves in the Z-axis direction (laser beam irradiation direction), and moves together with the processing head holding device. In such a laser processing apparatus, when the processing head collides with a workpiece or the like, the processing head, the processing head holding device, or the like is damaged. For this reason, the laser processing apparatus includes a damage reduction mechanism. For example, there is a damage reduction mechanism in which a machining head and a machining head holding device are fastened by a resin bolt. This damage mitigation mechanism reduces the impact on the machining head, machining head holding device, etc. by damaging the resin bolt when the machining head collides with a workpiece or the like. Since such a damage reduction mechanism has a long time to recover the machining head, damage to the machining head and the machining head holding device can be reduced without damaging the fastening portion between the machining head and the machining head holding device. desired.

For example, in the laser processing apparatus described in Patent Document 1, the processing head holding device in the laser processing machine has a collision protection device for releasing the holding device when the processing head collides. The collision protection member is provided with a collision force adjusting device serving as a trigger.

JP 2006-123163 A

However, the above-described conventional technique has a problem that the collision force cannot be finely adjusted, and the accurate collision force cannot be adjusted. In addition, there is a problem that it takes time to restore the collision protection device after the machining head collides.

The present invention has been made in view of the above, and an object of the present invention is to obtain a machining head holding mechanism capable of easily mounting a machining head while holding the machining head with an appropriate force.

In order to solve the above-described problems and achieve the object, the present invention includes a processing head for irradiating a laser beam, and a processing head holding portion to which the processing head is detachably attached. In the processing head holding mechanism in which the mounted processing head moves relative to the workpiece, the processing head holding portion includes an electromagnet that is magnetically attached to the processing head, and the processing head is a magnetically attached portion that is magnetically attached to the electromagnet. And the machining head holding part adjusts the magnetic force of the electromagnet by controlling the current applied to the electromagnet, and thereby adjusts the magnetizing force between the electromagnet and the magnetized part. It is characterized by.

According to the present invention, the magnetic force of the electromagnet is adjusted by the current applied to the electromagnet, and the magnetic adhesion force between the electromagnet and the magnetized portion is adjusted, so that the machining head can be easily held while holding the machining head with an appropriate force. There is an effect that it can be attached to.

FIG. 1 is a perspective view showing a structure when the processing head holding mechanism according to the embodiment is viewed from the front. FIG. 2 is a perspective view showing a structure when the processing head holding mechanism according to the embodiment is viewed from the back side. FIG. 3 is a left side view showing the structure of the machining head holding mechanism. FIG. 4 is a right side view showing the structure of the machining head holding mechanism. FIG. 5 is a front view showing the structure of the machining head holding mechanism. FIG. 6 is a diagram illustrating a configuration of the magnetic force control device. FIG. 7 is a diagram illustrating an example of moving speed-magnetic force information. FIG. 8 is a diagram illustrating an example of movement acceleration-magnetic force information.

Hereinafter, a machining head holding mechanism according to an embodiment of the present invention will be described in detail with reference to the drawings. Note that the present invention is not limited to the embodiments.

Embodiment FIG. 1 is a perspective view showing a structure when a machining head holding mechanism according to an embodiment of the present invention is viewed from the front right side, and FIG. 2 is a machining head holding according to an embodiment of the invention. It is a perspective view which shows the structure at the time of seeing a mechanism from the back left side. FIG. 3 is a left side view showing the structure of the machining head holding mechanism, and FIG. 4 is a right side view showing the structure of the machining head holding mechanism. FIG. 5 is a front view showing the structure of the machining head holding mechanism, and shows a state in which the machining head is attached to the machining head holding part.

The machining head holding mechanism has a machining head 1 and a machining head holding unit 2, and the machining head holding unit 2 is configured so that the machining head 1 can be attached and detached. The processing head holding unit 2 is attached to a laser processing apparatus, and moves in the Z-axis direction (vertical direction) that is the irradiation direction of laser light. The machining head holding unit 2 of the present embodiment is configured to magnetically attach (attach) the machining head 1 with a magnetic force, and to remove the machining head 1 when a force greater than a predetermined value is applied. The processing head 1 has a function of irradiating a workpiece (not shown) with laser light, and is attached to the processing head holding unit 2 by a magnetic force.

The processing head holding unit 2 and the processing head 1 are attached so that the front side of the processing head holding unit 2 and the back side of the processing head 1 are magnetically attached. The processing head holding unit 2 includes a flat plate extending in the Z-axis direction. One main surface of the flat plate faces the front of the processing head holding mechanism, and the other main surface faces the back of the processing head holding mechanism. It is attached to the laser processing device so that it faces. The processing head 1 has a substantially rectangular parallelepiped casing extending in the Z-axis direction, and the back side of the casing is attached to the processing head holding unit 2.

On the front side of the processing head holding unit 2, the permanent electromagnet 21, the electromagnets 22 A and 22 B, the left / right guide unit 24 for positioning in the left / right direction when attaching the processing head 1, and the up / down direction when attaching the processing head 1 The upper and lower guide grooves 23 for positioning are arranged.

A magnetized plate 12 that can be magnetized to the permanent electromagnet 21 and the

electromagnets

22A and 22B is disposed on the back side of the machining head 1. The magnetized plate 12 is composed of a ferromagnetic member (such as iron) that is magnetically attached to the permanent electromagnet 21 and the

electromagnets

22A and 22B. Further, on the back side of the processing head 1, an upper and lower guide portion 13 that performs positioning in the vertical direction when attached to the processing head holding portion 2 is disposed. Further, the machining head 1 has a laser beam emitting portion 11 that becomes a laser beam emitting port on the bottom surface side.

The permanent electromagnet 21 is magnetically attached to the magnetized plate 12 by applying a current to the permanent electromagnet 21 after coming into contact with the magnetized plate 12, and is magnetized to the magnetized plate 12 even if the current is interrupted after magnetizing. It is a magnet that can maintain the state.

The

electromagnets

22A and 22B are magnetically attached to the magnetized plate 12 when current is passed through the

electromagnets

22A and 22B after contacting the magnetized plate 12, and the magnetized plate is only while current is passed through the electromagnets 22A and 22B. 12 is a magnet that is magnetically attached to 12.

The left and right guide portion 24 is disposed so as to extend from the left side surface of the processing head holding portion 2 to the front side of the processing head holding portion 2, and is configured by a plate-like member, for example. When the processing head 1 and the processing head holding unit 2 are magnetically attached, the left and right guide portions 24 have a main surface (inner main surface) of the plate-like member of the left and right guide portions 24, a left side surface of the processing head 1, and Are joined to the left side surface of the machining head holding portion 2 so as to be in contact with each other.

The upper and lower guide portions 13 are extended in the direction from the front surface side to the back surface side of the processing head 1. The upper and lower guide portions 13 have, for example, a cylindrical shape, and are configured such that the column axis of the column faces a direction perpendicular to the back surface of the machining head 1.

The upper and lower guide grooves 23 place the upper and lower guide portions 13 and guide the upper and lower guide portions 13 along the groove wall surfaces of the upper and lower guide grooves 23. The vertical guide groove 23 has a valley-like groove formed in a direction from the front side to the back side of the machining head holding part 2, and the vertical guide part 13 is fed along the valley-like groove. come.

When attaching the machining head 1 to the machining head holding part 2, the back side of the machining head 1 is brought closer to the front side of the machining head holding part 2. Then, the processing head 1 is brought close to the processing head holding unit 2 while the inner main surface of the left and right guide unit 24 is brought into contact with the left side surface of the processing head 1. At this time, the machining head 1 is brought close to the machining head holding unit 2 while bringing the vertical guide portion 13 into contact with the vertical guide groove 23. The back surface side of the processing head 1 and the front side of the processing head holding part 2 come into contact with each other when the magnetized plate 12 and the permanent electromagnet 21 are in contact with each other and the magnetized plate 12 and the

electromagnets

22A and 22B are in contact with each other.

In the state where the magnetized plate 12 and the

electromagnets

22A and 22B are in contact with each other, a current is passed through the

electromagnets

22A and 22B. Thereby, the

electromagnets

22A and 22B and the magnetized plate 12 are magnetized by the magnetic force of the

electromagnets

22A and 22B. In addition, a current is passed between the permanent electromagnet 21 and the magnetized plate 12 in a state where the permanent electromagnet 21 and the magnetized plate 12 are in contact with each other. Thereby, the permanent electromagnet 21 and the magnetized plate 12 are magnetized by the magnetic force of the permanent electromagnet 21. After the permanent electromagnet 21 and the magnetized plate 12 are magnetized by the magnetic force of the permanent electromagnet 21, the current to the permanent electromagnet 21 is interrupted. Thereby, the processing head 1 and the processing head holding part 2 are magnetically attached by the magnetic force of the

electromagnets

22A and 22B and the magnetic force of the permanent electromagnet 21.

The magnetizing force of the

electromagnets

22A and 22B and the magnetized plate 12 varies depending on the magnitude of the current flowing through the

electromagnets

22A and 22B. In other words, since the magnetic force generated from the

electromagnets

22A and 22B changes according to the magnitude of the current flowing through the

electromagnets

22A and 22B, the magnetizing force between the

electromagnets

22A and 22B and the magnetized plate 12 also changes. Therefore, in the present embodiment, the current flowing through the

electromagnets

22A and 22B is adjusted so that the machining head 1 and the machining head holding unit 2 are magnetized with a desired magnetizing force. As a result, the machining head 1 is separated from the machining head holding unit 2 when an impact of a predetermined value or more is applied to the machining head holding mechanism. For example, when the machining head 1 collides with the workpiece at a speed larger than a predetermined speed, the machining head 1 is detached from the machining head holding unit 2.

The magnitude of the current flowing through the

electromagnets

22A and 22B is controlled by the magnetic force control device (control unit) 3. Further, the magnitude of the current passed through the

electromagnets

22A and 22B may be changed according to the moving speed of the machining head 1 (speed in the Z-axis direction). Here, the configuration of the magnetic force control device will be described. FIG. 6 is a diagram illustrating a configuration of the magnetic force control device 3. The magnetic force control device 3 is a device included in the laser processing device, and is connected to the electromagnets 22 A and 22 B of the processing head holding unit 2.

The magnetic force control device 3 is a device that controls the magnitude of the current flowing through the

electromagnets

22A and 22B. The magnetic force control device 3 controls the magnitude of the current flowing through the electromagnets 22 A and 22 B in consideration of the magnetizing force between the permanent electromagnet 21 and the magnetized plate 12. The magnetic force control device 3 includes a speed detector 31, a magnetic force calculator 32, and a magnetic force controller 33. Note that the machining head holding mechanism may be configured such that the magnetic force control device 3 becomes a part of the machining head holding mechanism.

The speed detection unit 31 includes a speed sensor that detects the movement speed of the machining head 1 in the Z-axis direction, and sends the detected movement speed to the magnetic force calculation unit 32. The moving speed here is a relative speed (relative moving speed) of the machining head 1 to the workpiece. The magnetic force calculator 32 calculates a magnetic force according to the moving speed detected by the speed detector 31. The magnetic force calculated by the magnetic force calculator 32 is a magnetic force generated in the

electromagnets

22A and 22B, and is calculated based on, for example, the moving speed-magnetic force information 101 shown in FIG. The moving speed / magnetic force information 101 is information indicating the correspondence between the moving speed of the machining head 1 and the magnetic force applied to the

electromagnets

22A and 22B. The moving speed-magnetic force information 101 may be an expression indicating the correspondence between the moving speed of the machining head 1 and the magnetic force applied to the

electromagnets

22A and 22B, or may be an information table indicating the correspondence.

As shown in FIG. 7, even when the moving speed is 0, the

electromagnets

22A and 22B are set to be given a predetermined magnetic force. The magnetic force is set to increase as the moving speed increases.

The magnetic force control unit 33 controls the

electromagnets

22A and 22B so as to generate the magnetic force calculated by the magnetic force calculation unit 32. Specifically, the magnetic force control unit 33 supplies a current for generating the magnetic force calculated by the magnetic force calculation unit 32 to the

electromagnets

22A and 22B.

Thereby, when the moving speed of the machining head 1 is increased and the machining head 1 is easily detached from the machining head holding part 2, the machining head 1 and the machining head holding part 2 can be strongly fixed. In addition, when the moving speed of the machining head 1 is reduced and the machining head 1 is difficult to disengage from the machining head holding unit 2, the machining head 1 and the machining head holding unit 2 can be fixed weakly. By performing such control, it is possible to magnetize the machining head 1 and the machining head holding unit 2 with a force corresponding to the ease of disengagement between the machining head 1 and the machining head holding unit 2. Thus, since the machining head 1 and the machining head holding part 2 are magnetically attached with a magnetic force corresponding to the moving speed, the machining head 1 and the machining head holding part 2 are hard to be separated from each other while being magnetically attached. Even when 1 collides with a workpiece, damage to the laser machining apparatus (such as the machining head 1 or the machining head holding unit 2) or the workpiece can be reduced. In addition, it is possible to adjust the ease with which the machining head 1 is detached, the magnitude of damage to the laser machining apparatus caused by the collision of the machining head 1 with the workpiece, and the like by the magnetic force of the

electromagnets

22A and 22B.

In the present embodiment, the case where the magnetic force applied to the

electromagnets

22A and 22B is changed according to the moving speed of the machining head 1 has been described. However, the electromagnet according to the movement acceleration (acceleration in the Z-axis direction) of the machining head 1 You may change the magnetic force given to 22A, 22B. In this case, the speed detection unit 31 calculates the acceleration of the machining head 1 using the detected speed. The acceleration of the machining head 1 here is a relative acceleration (relative movement acceleration) of the machining head 1 with respect to the workpiece. The magnetic force calculation unit 32 calculates a magnetic force according to the movement acceleration detected by the speed detection unit 31, and the magnetic force control unit 33 generates a current for generating the magnetic force calculated by the magnetic force calculation unit 32 as

electromagnets

22A and 22B. Shed.

The magnetic force calculator 32 calculates the magnetic force based on, for example, the moving acceleration-magnetic force information 102 shown in FIG. The moving acceleration / magnetic force information 102 is information indicating the correspondence between the moving acceleration of the machining head 1 and the magnetic force applied to the

electromagnets

22A and 22B. The movement acceleration-magnetic force information 102 may be an expression indicating the correspondence between the movement acceleration of the machining head 1 and the magnetic force applied to the

electromagnets

22A and 22B, or may be an information table indicating the correspondence.

As shown in FIG. 8, even when the movement acceleration is zero, the

electromagnets

22A and 22B are set to be given a predetermined magnetic force. The magnetic force is set to increase as the absolute value of the movement acceleration increases.

The magnetic force control device 3 may change the magnetic force applied to the

electromagnets

22A and 22B according to processing conditions such as the material (hardness) of the workpiece. Further, a permanent magnet may be arranged in the machining head holding part 2 instead of the permanent electromagnet 21. In this case, the magnetic force control device 3 controls the magnitude of the current flowing through the electromagnets 22 A and 22 B in consideration of the magnetizing force between the permanent magnet and the magnetized plate 12. Further, permanent magnets may be arranged in the machining head holding portion 2 together with the electromagnets 22 A and 22 B and the permanent electromagnet 21. In this case, the magnetic force control device 3 controls the magnitude of the current passed through the electromagnets 22 A and 22 B in consideration of the magnetizing force between the permanent electromagnet 21 and the magnetized plate 12 and the magnetizing force between the permanent magnet and the magnetized plate 12. . Further, the processing head holding unit 2 and the processing head 1 may be bonded with resin bolts while being magnetized by the

electromagnets

22A and 22B and the magnetized plate 12.

In the present embodiment, the case where the magnetic force of the

electromagnets

22A and 22B is changed based on the moving speed of the machining head 1 in the Z-axis direction has been described. However, the magnetic force control device 3 operates in the XY plane of the machining head 1. The magnetic force of the

electromagnets

22A and 22B may be changed based on the moving speed at. Also in this case, the moving speed in the XY plane is a relative speed of the machining head 1 with respect to the workpiece. Therefore, when the machining head 1 does not move in the XY plane and the XY table on which the workpiece is placed moves in the XY plane, the movement speed of the XY table is the movement speed of the machining head 1 in the XY plane. It becomes.

Further, the magnetic force control device 3 may change the magnetic force of the

electromagnets

22A and 22B based on both the moving speed of the machining head 1 in the Z-axis direction and the moving speed in the XY plane. Further, the magnetic force control device 3 weights the speed in the Z-axis direction and the speed in the XY plane, and then determines the magnetic force of the

electromagnets

22A and 22B based on the speed in the Z-axis direction and the speed in the XY plane. It may be changed.

Moreover, the magnetic force control device 3 may change the magnetic force of the

electromagnets

22A and 22B based on the movement acceleration of the machining head 1 in the XY plane. Also in this case, the movement acceleration in the XY plane is a relative acceleration of the machining head 1 with respect to the workpiece. Further, the magnetic force control device 3 may change the magnetic force of the

electromagnets

22A and 22B based on both the movement acceleration in the Z-axis direction of the machining head 1 and the movement acceleration in the XY plane. Further, the magnetic force control device 3 weights the acceleration in the Z-axis direction and the acceleration in the XY plane, and then determines the magnetic force of the

electromagnets

22A and 22B based on the acceleration in the Z-axis direction and the acceleration in the XY plane. It may be changed.

Further, in the present embodiment, the case where the magnetic force of the

electromagnets

22A and 22B is changed based on the moving speed and the moving acceleration of the processing head 1 has been described. However, the magnetic force control device 3 operates in the Z-axis direction of the processing head 1. The magnetic force of the

electromagnets

22A and 22B may be changed based on both the moving speed and the moving acceleration.

In the present embodiment, since the permanent electromagnet 21 and the magnetized plate 12 are magnetized, the magnetic force of the

electromagnets

22A and 22B may be set to 0 when the moving speed is 0. Further, the current flowing through the

electromagnets

22A and 22B may be variable, and may be a constant value after the start of processing. In this case, the magnetic force control device 3 may not include the speed detection unit 31 and the magnetic force calculation unit 32. Regardless of the moving speed of the machining head 1, the magnetic force control device 3 allows a predetermined current value set in advance to flow between the electromagnets 22 A and 22 B and the magnetized plate 12. Further, the magnetic force control device 3 may cause the electromagnets 22 A and 22 B to pass a current value for generating a magnetic force according to an instruction from a user input from the outside. Also in this case, the magnetic force control device 3 may not include the speed detection unit 31 and the magnetic force calculation unit 32.

In the present embodiment, the case where the machining head holding unit 2 has one permanent electromagnet 21 and two

electromagnets

22A and 22B has been described. However, the permanent electromagnet 21 and the electromagnet 22A that the machining head holding unit 2 has. , 22B may be any number.

Thus, since the machining head holding mechanism magnetizes the machining head 1 and the machining head holding part 2 using the

electromagnets

22A and 22B, when the machining head 1 collides with the workpiece, the machining head 1 and The separation of the processing head holding unit 2 can reduce the impact on the laser processing apparatus and the workpiece. Further, the machining head 1 and the machining head holding portion 2 separated by the collision can be easily positioned and can be quickly fixed by the magnetic force of the

electromagnets

22A and 22B. As a result, it is possible to quickly restore the processing head holding mechanism by magnetic magnetic adhesion.

If the magnetic forces of the

electromagnets

22A and 22B are constant, the machining head 1 can easily fall off the machining head holding portion 2 even if the machining head 1 does not collide with the workpiece when the machining head 1 is moving at high speed. Become. Further, if the magnetic forces of the

electromagnets

22A and 22B are constant, the machining head 1 is unlikely to fall off the machining head holding portion 2 even when the machining head 1 collides with the workpiece when the machining head 1 moves at a low speed. Become. In the present embodiment, the magnitude of the magnetic force of the

electromagnets

22A and 22B is controlled in accordance with the moving speed of the machining head 1, so that the machining head 1 is dropped during high-speed movement that occurs when the magnitude of the magnetic force is constant. It is possible to prevent the machining head 1 from falling off during low-speed movement. In other words, the machining head 1 can be prevented from dropping without colliding with the workpiece during high-speed movement, and the machining head 1 can be dropped when colliding with the workpiece during low-speed movement.

Further, the processing head holding mechanism may attract the processing head 1 and the processing head holding unit 2 by vacuum suction (adsorption force) using air pressure or hydraulic pressure instead of magnetic force. Also in this case, the suction force between the processing head 1 and the processing head holding unit 2 is configured to be variable. Furthermore, the suction force between the processing head 1 and the processing head holding unit 2 may be changed according to the moving speed or moving acceleration of the processing head 1.

Further, a force sensor is attached to the machining head 1 or the machining head holding unit 2 so that the electromagnet 22A, the machining head 1 does not fall off until a predetermined force is applied between the machining head 1 and the machining head holding unit 2. The magnetic force of 22B may be controlled.

Further, the laser processing apparatus (for example, the processing head holding mechanism) may output an alarm when the processing head 1 is detached from the processing head holding unit 2. In this case, a proximity sensor is arranged in the processing head holding mechanism. When the proximity sensor detects the removal of the processing head 1 from the processing head holding unit 2, an alarm is output.

As described above, according to the embodiment, it is possible to easily attach the machining head 1 to the machining head holding portion 2 while holding the machining head 1 with an appropriate magnetic force. Further, the machining head holding mechanism can be configured using the machining head 1 and the machining head holding unit 2 having a simple configuration.

Further, since the magnitude of the current flowing through the

electromagnets

22A and 22B is changed according to the moving speed and moving acceleration of the processing head 1, a force corresponding to the ease with which the processing head 1 and the processing head holding portion 2 are disengaged. Thus, the machining head 1 and the machining head holding portion 2 can be magnetically attached. Further, since the machining head 1 and the machining head holding unit 2 are magnetically attached using the permanent electromagnet 21 or the permanent magnet, the machining head 1 can be mounted on the machining head holding unit 2 with low power.

As described above, the machining head holding mechanism according to the present invention is suitable for mounting and holding the machining head and dropping the machining head.

DESCRIPTION OF SYMBOLS 1 Processing head 2 Processing head holding | maintenance part 3 Magnetic force control apparatus 11 Laser beam emitting part 12 Magnetic attachment board 13 Upper and lower guide part 21

Permanent electromagnet

22A, 22B Electromagnet 23 Upper and lower guide groove 24 Left and right guide part 31 Speed detection part 32 Magnetic force calculation part 33 Magnetic force Control unit 101 Movement speed-magnetic information 102 Movement acceleration-magnetic information

Claims

In a processing head holding mechanism that has a processing head that irradiates a laser beam and a processing head holding portion that detachably attaches the processing head, and the processing head attached to the processing head holding portion relatively moves on a workpiece.
The processing head holding part is
An electromagnet magnetically attached to the processing head;
The processing head is
A magnetized portion magnetized to the electromagnet;
The machining head holding unit is configured to adjust a magnetic force of the electromagnet by controlling an electric current applied to the electromagnet, and thereby adjust a magnetizing force between the electromagnet and the magnetized unit. A processing head holding mechanism.
A control unit for controlling a current applied to the electromagnet;
The processing head holding mechanism according to claim 1, wherein the control unit applies a current corresponding to a relative moving speed of the processing head to the workpiece to the electromagnet.
A control unit for controlling a current applied to the electromagnet;
The processing head holding mechanism according to claim 1, wherein the control unit applies a current corresponding to a relative movement acceleration of the processing head with respect to the workpiece to the electromagnet.
The processing head holding portion further includes a permanent electromagnet that is magnetically attached to the processing head,
The machining head holding mechanism according to any one of claims 1 to 3, wherein the magnetized portion of the machining head is magnetized to the electromagnet and the permanent electromagnet.
The processing head holding unit further includes a permanent magnet that is magnetically attached to the processing head,
The machining head holding mechanism according to any one of claims 1 to 3, wherein the magnetized portion of the machining head is magnetized to the electromagnet and the permanent magnet.