WO2010124781A3 - Furnace for producing photovoltaic thin-film cells - Google Patents

Furnace for producing photovoltaic thin-film cells Download PDF

Info

Publication number
WO2010124781A3
WO2010124781A3 PCT/EP2010/002141 EP2010002141W WO2010124781A3 WO 2010124781 A3 WO2010124781 A3 WO 2010124781A3 EP 2010002141 W EP2010002141 W EP 2010002141W WO 2010124781 A3 WO2010124781 A3 WO 2010124781A3
Authority
WO
WIPO (PCT)
Prior art keywords
furnace
furnace housing
gas
bearing device
film cells
Prior art date
Application number
PCT/EP2010/002141
Other languages
German (de)
French (fr)
Other versions
WO2010124781A2 (en
Inventor
Karl Berner
Jürgen Schäfer
Jürgen Hanf
Original Assignee
Eisenmann Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eisenmann Ag filed Critical Eisenmann Ag
Publication of WO2010124781A2 publication Critical patent/WO2010124781A2/en
Publication of WO2010124781A3 publication Critical patent/WO2010124781A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67109—Apparatus for thermal treatment mainly by convection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/6776—Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Furnace Details (AREA)
  • Tunnel Furnaces (AREA)

Abstract

The invention relates to a furnace (1) for producing photovoltaic thin-film cells, comprising a conventional furnace housing (2), a gas-tight case (4) with a controlled atmosphere surrounding the furnace housing (2), a conveyor system (8) which has a plurality of idlers (10) and by means of which substrate plates can be conveyed through the furnace housing (2), and at least one heating device bringing the controlled atmosphere in the interior of the furnace housing (2) to working temperature. The drive device (29) for the conveyor system (8) is located outside the gas-tight case (4) in a standard atmosphere. The bearing device (17) has sealing devices (20) which seal drive shafts (16) connected to the idlers (10) from the bearing device (17). The bearing device (17) itself is integrated into the gas-tight case (4) in such a manner that the sealing devices (20) contained therein represent the interfaces between the controlled atmosphere in the interior of the case (4) and the outer atmosphere.
PCT/EP2010/002141 2009-04-29 2010-04-03 Furnace for producing photovoltaic thin-film cells WO2010124781A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200910019127 DE102009019127A1 (en) 2009-04-29 2009-04-29 Furnace for producing thin-film photovoltaic cells
DE102009019127.5 2009-04-29

Publications (2)

Publication Number Publication Date
WO2010124781A2 WO2010124781A2 (en) 2010-11-04
WO2010124781A3 true WO2010124781A3 (en) 2011-08-11

Family

ID=43032609

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2010/002141 WO2010124781A2 (en) 2009-04-29 2010-04-03 Furnace for producing photovoltaic thin-film cells

Country Status (2)

Country Link
DE (1) DE102009019127A1 (en)
WO (1) WO2010124781A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011116136B4 (en) 2011-10-15 2021-05-12 Onejoon Gmbh Plant for the treatment of workpieces
DE102014017451A1 (en) 2014-11-26 2016-06-02 Eisenmann Se Plant for treating a property

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1992466A (en) * 1933-01-26 1935-02-26 Driver Harris Co Heat-treating furnace
US2175233A (en) * 1938-09-16 1939-10-10 Electric Furnace Co Bearing construction for roller hearth furnaces
US2205242A (en) * 1939-03-23 1940-06-18 Westinghouse Electric & Mfg Co Roller-hearth type electric furnace
DE1130835B (en) * 1955-11-05 1962-06-07 Nassheuer Industrieofenbau J Roller hearth furnace with insertable and removable conveyor rollers
DE4228006A1 (en) * 1992-08-24 1994-03-03 Ngk Insulators Ltd Continuous roller hearth furnace
EP0965808A1 (en) * 1998-06-18 1999-12-22 Tecnochimica Sassolese S.r.l. Device for supporting and driving transfer rollers with a seal in a kiln
WO2003054975A2 (en) * 2001-12-13 2003-07-03 Enitecnologie S.P.A. Baking oven for photovoltaic devices
DE202005006587U1 (en) * 2005-04-20 2005-08-25 Rollmod Hochtemperatur-Transportsysteme Gmbh Drive device for rolls of roller hearth furnaces and roller hearth furnace
JP2008105044A (en) * 2006-10-24 2008-05-08 Kanto Yakin Kogyo Co Ltd Continuous furnace for brazing of aluminum product
JP2009030848A (en) * 2007-07-25 2009-02-12 Noritake Co Ltd Transporting roller supporting device for heating furnace

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5248349A (en) 1992-05-12 1993-09-28 Solar Cells, Inc. Process for making photovoltaic devices and resultant product
DE102007050932A1 (en) * 2007-10-23 2009-05-07 Lenzen Att Gmbh Radial slip bearing for conveyer furnace or conveyer belt oven

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1992466A (en) * 1933-01-26 1935-02-26 Driver Harris Co Heat-treating furnace
US2175233A (en) * 1938-09-16 1939-10-10 Electric Furnace Co Bearing construction for roller hearth furnaces
US2205242A (en) * 1939-03-23 1940-06-18 Westinghouse Electric & Mfg Co Roller-hearth type electric furnace
DE1130835B (en) * 1955-11-05 1962-06-07 Nassheuer Industrieofenbau J Roller hearth furnace with insertable and removable conveyor rollers
DE4228006A1 (en) * 1992-08-24 1994-03-03 Ngk Insulators Ltd Continuous roller hearth furnace
EP0965808A1 (en) * 1998-06-18 1999-12-22 Tecnochimica Sassolese S.r.l. Device for supporting and driving transfer rollers with a seal in a kiln
WO2003054975A2 (en) * 2001-12-13 2003-07-03 Enitecnologie S.P.A. Baking oven for photovoltaic devices
DE202005006587U1 (en) * 2005-04-20 2005-08-25 Rollmod Hochtemperatur-Transportsysteme Gmbh Drive device for rolls of roller hearth furnaces and roller hearth furnace
JP2008105044A (en) * 2006-10-24 2008-05-08 Kanto Yakin Kogyo Co Ltd Continuous furnace for brazing of aluminum product
JP2009030848A (en) * 2007-07-25 2009-02-12 Noritake Co Ltd Transporting roller supporting device for heating furnace

Also Published As

Publication number Publication date
WO2010124781A2 (en) 2010-11-04
DE102009019127A1 (en) 2011-05-05

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