WO2010120145A2 - 태양전지 교류 전계발광 화상검사 장치 - Google Patents

태양전지 교류 전계발광 화상검사 장치 Download PDF

Info

Publication number
WO2010120145A2
WO2010120145A2 PCT/KR2010/002377 KR2010002377W WO2010120145A2 WO 2010120145 A2 WO2010120145 A2 WO 2010120145A2 KR 2010002377 W KR2010002377 W KR 2010002377W WO 2010120145 A2 WO2010120145 A2 WO 2010120145A2
Authority
WO
WIPO (PCT)
Prior art keywords
solar cell
electroluminescence
inspecting
electroluminescence image
solar
Prior art date
Application number
PCT/KR2010/002377
Other languages
English (en)
French (fr)
Other versions
WO2010120145A3 (ko
Inventor
윤철오
공응걸
이성호
Original Assignee
주식회사 맥사이언스
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 맥사이언스 filed Critical 주식회사 맥사이언스
Priority to EP10764684A priority Critical patent/EP2421052A2/en
Publication of WO2010120145A2 publication Critical patent/WO2010120145A2/ko
Publication of WO2010120145A3 publication Critical patent/WO2010120145A3/ko

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/66Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02SGENERATION OF ELECTRIC POWER BY CONVERSION OF INFRARED RADIATION, VISIBLE LIGHT OR ULTRAVIOLET LIGHT, e.g. USING PHOTOVOLTAIC [PV] MODULES
    • H02S50/00Monitoring or testing of PV systems, e.g. load balancing or fault identification
    • H02S50/10Testing of PV devices, e.g. of PV modules or single PV cells
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501Semiconductor wafers
    • G01N21/9505Wafer internal defects, e.g. microcracks
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26Testing of individual semiconductor devices
    • G01R31/265Contactless testing
    • G01R31/2656Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • Photovoltaic Devices (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)

Abstract

본 발명은 태양전지의 전계발광 화상을 검사하여 태양전지 내부의 결함을 판정하는 방법 및 장치에 관한 것으로, 더욱 상세하게는 태양전지 셀 또는 모듈 양단에 소정의 주기를 갖는 교류 전력을 인가하고 태양전지에서 발생되는 전계발광 화상을 카메라로 검출하여 태양전지 내부의 결함 정보를 추출하고 품질을 판정하는 것을 특징으로 하는 태양전지 교류 전계발광 화상 방법 및 검사 장치에 관한 것이다. 본 발명은 태양전지의 내부결함을 판정하기 위한 전계발광 화상검사를 실현함에 있어서, 태양전지 셀 및 모듈의 미세균열, 접촉저항 및 내부저항, 열점 등 다양한 태양전지 내부결함 정보를 동시에 추출하고, 측정 시료의 가열 손상을 방지하여, 보다 안전하고 신속하며 정밀하게 검사할 수 있는 태양전지 교류 전계발광 화상검사 방법 및 장치를 제공하고자 하는 것이다.
PCT/KR2010/002377 2009-04-17 2010-04-16 태양전지 교류 전계발광 화상검사 장치 WO2010120145A2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP10764684A EP2421052A2 (en) 2009-04-17 2010-04-16 Solar cell ac electroluminescence image inspecting apparatus

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2009-0033746 2009-04-17
KR1020090033746A KR101055790B1 (ko) 2009-04-17 2009-04-17 태양전지 교류 전계발광 화상검사 장치

Publications (2)

Publication Number Publication Date
WO2010120145A2 true WO2010120145A2 (ko) 2010-10-21
WO2010120145A3 WO2010120145A3 (ko) 2011-01-20

Family

ID=42983021

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2010/002377 WO2010120145A2 (ko) 2009-04-17 2010-04-16 태양전지 교류 전계발광 화상검사 장치

Country Status (3)

Country Link
EP (1) EP2421052A2 (ko)
KR (1) KR101055790B1 (ko)
WO (1) WO2010120145A2 (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109004061A (zh) * 2018-06-28 2018-12-14 华南理工大学 晶硅光伏太阳能电池电注入退火测试装置及方法
CN115219480A (zh) * 2022-09-01 2022-10-21 合肥锁相光学科技有限公司 一种锁相微光显微成像方法及装置

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012107316B4 (de) 2012-08-09 2019-08-14 Solarzentrum Stuttgart GmbH Verfahren und Vorrichtung zum Prüfen von Photovoltaikmodulen
DE102013205042A1 (de) * 2013-03-21 2014-09-25 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zur Bestimmung von Materialparametern, insbesondere der Ladungsträgerlebensdauer eines Halbleitersubstrates durch Messung von Lumineszenzstrahlung
JP6327896B2 (ja) * 2014-03-18 2018-05-23 シャープ株式会社 化合物半導体太陽電池セルおよび化合物半導体太陽電池セルの製造方法
FR3038165B1 (fr) * 2015-06-29 2017-07-28 Commissariat Energie Atomique Procede de controle de la qualite d'un dispositif photovoltaique, et dispositif de controle associe
CN106004137B (zh) * 2016-05-31 2018-05-15 宁夏银星能源光伏发电设备制造有限公司 基于el检测控制丝网印刷质量和生产过程的方法
KR101876628B1 (ko) * 2016-09-08 2018-08-02 주식회사 맥사이언스 야외 태양전지모듈 위상잠금 발광 화상 검사 장치 및 방법
JP6208843B1 (ja) * 2016-12-26 2017-10-04 株式会社アイテス 太陽電池パネルの検査装置、及び太陽電池パネルの検査方法
US20190089301A1 (en) * 2017-09-18 2019-03-21 X Development Llc System and method for solar cell defect detection
KR20220145055A (ko) * 2021-04-21 2022-10-28 주식회사 엘지에너지솔루션 열화상 카메라를 포함하는 용접 검사 장치
CN113314433B (zh) * 2021-05-27 2022-12-06 深圳市泰晶太阳能科技有限公司 一种单晶硅太阳能电池片可靠性筛选方式

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007129585A1 (ja) 2006-05-02 2007-11-15 National University Corporation NARA Institute of Science and Technology 太陽電池の評価方法及び評価装置並びにその利用
WO2008095467A1 (de) 2007-02-09 2008-08-14 Astrium Gmbh Verfahren und anordnung zur detektion mechanischer defekte eines halbleiter-bauelements, insbesondere einer solarzelle oder solarzellen-anordnung

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1840541A4 (en) * 2004-11-30 2010-04-07 Nat Univ Corp Nara Inst METHOD AND APPARATUS FOR EVALUATION OF A SOLAR CELL AND USE THEREOF
JP2006319303A (ja) * 2005-04-11 2006-11-24 Sumitomo Kinzoku Technol Kk 太陽電池素子のクラック検出方法及び装置
US20100034455A1 (en) * 2006-04-28 2010-02-11 Takashi Harada Solar battery module evaluation apparatus, solar battery module evaluating method, and solar battery module manufacturing method
JP4915991B2 (ja) * 2006-07-20 2012-04-11 独立行政法人 宇宙航空研究開発機構 太陽電池の欠陥検査装置及びその方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007129585A1 (ja) 2006-05-02 2007-11-15 National University Corporation NARA Institute of Science and Technology 太陽電池の評価方法及び評価装置並びにその利用
WO2008095467A1 (de) 2007-02-09 2008-08-14 Astrium Gmbh Verfahren und anordnung zur detektion mechanischer defekte eines halbleiter-bauelements, insbesondere einer solarzelle oder solarzellen-anordnung

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
OTWIN BREITENSTEI, PROG. PHOTOVOLT. RES. APPL., vol. 16, 2008, pages 325
T. TRUPKE, PROCEEDING OF 22ND EUROPEAN PHOTOVOLTAIC SOLAR ENERGY CONFERENCE, MILANO, ITALY, 2007, pages 22 - 31
TAKASHI FUYUKI, APPL. PHYS. LETT., vol. 86, 2005, pages 262108

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109004061A (zh) * 2018-06-28 2018-12-14 华南理工大学 晶硅光伏太阳能电池电注入退火测试装置及方法
CN109004061B (zh) * 2018-06-28 2023-07-18 华南理工大学 晶硅光伏太阳能电池电注入退火测试装置及方法
CN115219480A (zh) * 2022-09-01 2022-10-21 合肥锁相光学科技有限公司 一种锁相微光显微成像方法及装置
CN115219480B (zh) * 2022-09-01 2022-12-16 合肥锁相光学科技有限公司 一种锁相微光显微成像方法及装置

Also Published As

Publication number Publication date
EP2421052A2 (en) 2012-02-22
KR20100115153A (ko) 2010-10-27
WO2010120145A3 (ko) 2011-01-20
KR101055790B1 (ko) 2011-08-09

Similar Documents

Publication Publication Date Title
WO2010120145A2 (ko) 태양전지 교류 전계발광 화상검사 장치
WO2006124977A3 (en) Transient defect detection algorithm
MX2012002026A (es) Inspeccion del cristal de una ventana trasera calentable.
HK1155805A1 (en) Method for inspecting defects, and defect inspecting apparatus
BRPI1006595A2 (pt) tira de teste e método para detectar a presença de um análito em uma amostra
IL173864A0 (en) Method and apparatus for detecting defects in wafers including alignment of the wafer images so as to induce the same smear in all images
WO2012091494A3 (ko) 기판 검사방법
EP3889590A3 (en) Apparatus for inspecting a substrate for a foreign substance
EP2257214A4 (en) METHOD AND APPARATUS FOR TEST TIME OF MEASURING SUBSTANCE TO BE ANALYZED
EP2257219A4 (en) METHOD AND APPARATUS FOR TEST TIME OF MEASURING SUBSTANCE TO BE ANALYZED
WO2012154320A8 (en) System and method for detecting and repairing defects in an electrochromic device using thermal imaging
WO2010077865A3 (en) Defect detection and response
EP1997134A4 (en) DEVICE AND METHOD FOR DETECTING DEFECTS IN A WAFER USING A LENS SENSOR CAMERA
IL218799A0 (en) Method, inspection apparatus and substrate for determining an approximate structure of an object on the substrate
TR201820176T4 (tr) Yüzey kusurlarının tespit edilmesine yönelik bir denetleme sisteminin kontrol edilmesine yönelik cihaz ve yöntem.
EP2265324A4 (en) METHOD AND APPARATUS FOR ANALYTE DETECTION DEVICE
WO2009120623A3 (en) Method and apparatus for detecting defects using structured light
PT2137519T (pt) Método e aparelho para detetar defeitos em componentes óticos
BRPI0921367A2 (pt) método de teste de corrente parasita e aparelho de teste de corrente parasita
IL211518A0 (en) Method and apparatus for defect detection
WO2010011578A3 (en) Computer-implemented methods for inspecting and/or classifying a wafer
ZA200903197B (en) Flaw detection testing method
EP2333526A4 (en) FLUORESCENCE DETECTION DEVICE USING INTENSITY MODULATED LASER LIGHT AND FLUORESCENCE DETECTION METHOD
EP2333525A4 (en) FLUORESCENCE DETECTION DEVICE USING INTENSITY MODULATED LASER LIGHT AND FLUORESCENCE DETECTION METHOD
WO2012051245A3 (en) Focus offset contamination inspection

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 10764684

Country of ref document: EP

Kind code of ref document: A2

NENP Non-entry into the national phase

Ref country code: DE

WWE Wipo information: entry into national phase

Ref document number: 2010764684

Country of ref document: EP