WO2010068108A1 - Dispositif de fractionnement de gouttelettes - Google Patents

Dispositif de fractionnement de gouttelettes Download PDF

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Publication number
WO2010068108A1
WO2010068108A1 PCT/NL2009/050761 NL2009050761W WO2010068108A1 WO 2010068108 A1 WO2010068108 A1 WO 2010068108A1 NL 2009050761 W NL2009050761 W NL 2009050761W WO 2010068108 A1 WO2010068108 A1 WO 2010068108A1
Authority
WO
WIPO (PCT)
Prior art keywords
nozzle
break
droplet
fluid jet
chamber
Prior art date
Application number
PCT/NL2009/050761
Other languages
English (en)
Inventor
Guido Petrus Herman Gubbels
René Jos Houben
Original Assignee
Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno filed Critical Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno
Publication of WO2010068108A1 publication Critical patent/WO2010068108A1/fr

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C5/00—Devices or accessories for generating abrasive blasts
    • B24C5/08—Devices for generating abrasive blasts non-mechanically, e.g. of metallic abrasives by means of a magnetic field or by detonating cords
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
    • B24C1/08—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for polishing surfaces, e.g. smoothing a surface by making use of liquid-borne abrasives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C5/00—Devices or accessories for generating abrasive blasts
    • B24C5/005—Vibratory devices, e.g. for generating abrasive blasts by ultrasonic vibrations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C5/00—Devices or accessories for generating abrasive blasts
    • B24C5/02—Blast guns, e.g. for generating high velocity abrasive fluid jets for cutting materials

Definitions

  • the invention relates to a droplet break up device.
  • WO9926764 discloses a technique wherein an abrasive liquid is sprayed onto the workpiece, via a nozzle.
  • “Abrasive liquid” is in this context intended to mean a liquid which can be used to grind a surface to a relatively high roughness or to polish it to a lower roughness.
  • WO992674 further discloses that the abrasive liquid provides controlled working of the surface of the workpiece, in particular, at relatively low pressures, such as 50 bar or lower.
  • the abrasive liquid which preferably contains abrasive particles, has a relatively low velocity at these low pressures, so that material is removed in a controlled manner.
  • abrasive liquid used is water containing 10 vol% silicon carbide particles with a size of approx. 20 micrometer as the abrasive, to polish a surface of BK7
  • abrasive liquid used is water containing 10 vol% silicon carbide particles with a size of approx. 20 micrometer as the abrasive, to polish a surface of BK7
  • Fluid jet polishing results in nice polishing properties since the machining area can be very small, and a beam profile of the jet, due to the randomness of the polishing process, provides smooth transitions outside machining areas.
  • a "machining area" is the part of a surface of an object where the fluid jet actively impacts the object.
  • the technique is suitable to follow substantial inclinations of the surface to be machined, such as sharp corners and steep slopes.
  • the invention provides a method for machining a workpiece surface, in which a machining area of the workpiece surface is machined under the influence of a polishing operation; the method comprising providing a fluid jet of abrasive liquid for impacting the machining area, wherein the fluid jet is arranged to break up in droplets prior to impacting the machining area.
  • a non limiting explanation why this may provide improved polishing results is, that in a constitution with a fluid jet that is broken up in droplets prior to impacting the machining area, the abrasive particles are better surrounded by the fluid in the droplets, due to the surface tension properties of the droplets, than in a constitution with the fluid jet in a continuous jet form, which is a jet of fluid moving as a continuous elongate fluid volume, which is not broken up in smaller droplets prior to impacting the machining area.
  • the abrasive particles impact the surface with too high force and may affect the polishing result.
  • Figure 1 shows a schematic perspective view of a machining apparatus according to the invention
  • Figure 2 shows a schematic side view of the tooling setup of Fig. 1
  • Figure 3 shows a schematic impression of a chamber wall of Figure 2.
  • Figure 4 shows another schematic impression of the chamber wall of Figure 2.
  • a machining apparatus 1 having a polishing tool designed as a fluid jet-polishing device 2, in this example, rotatably mounted.
  • the axis of rotation is transversal, preferably perpendicular to the machining surface 7, i.e. preferably parallel to a normal direction of the surface.
  • the machining apparatus 1 further comprises a workpiece table 4 on which a workpiece 5 of e.g. BK7 is clamped which can be machined with the aid of a jet of polishing liquid 6 leaving a nozzle 3 of the fluid jet polishing device 2.
  • the polishing fluid comprises, for instance, a slurry of 90 volume percent water and 10 volume percent of silicon carbide particles, each with a diameter of approximately 5 ⁇ m, which, via a spout nozzle with a cylindrical diameter of approximately 1.5 millimetre and a length of approximately 15 to 22 millimetres is spouted, at a pressure of approximately 5 bar, from a distance of approximately 3 cm at an acute angle onto the work piece 5, so that a substantially round area to be machined 7 is formed in the work piece surface 8.
  • the workpiece table 4 and the fluid jet device 2 are disposed so as to be movable relative to each other with the aid of a table and/or nozzle control mechanism (not shown) which is numerically controlled by a central processing unit 9, so that the area to be machined 7 can be displaced over the workpiece surface 8. Further, the central processing unit 9 may be coupled to a measurement device (not shown) for measuring polishing progress.
  • start up effects of creating the stream of droplets 9 may produce an unstable stream with impacting abrasive particles. This may affect the surface roughness and can be circumvented by a receptacle 11 arranged to receive a fluid jet or a stream of droplets 9 to prevent the jet and/or droplets from impacting the surface area 8.
  • the receptacle may be mechanically movable by a receptacle actuator 12 to move the receptacle into the jet trajectory.
  • a deflection mechanism 13 may be provided to deflect the droplet trajectory, for example, by electrostatic deflection or a Coanda deflector, to selectively pass a droplet 9 to the machining interface.
  • the receptacle 12 may be further provided with a recirculation system to recirculate the abrasive fluid to the pressure pump (not shown).
  • a nozzle 3 is moved to a distance above a workpiece 5.
  • the distance between nozzle 3 and machining area 7 is a several millimetres, such as for example 30 mm.
  • the abrasive liquid 3 is sprayed onto the workpiece 5 at a pressure of, for example, 5 bar.
  • the nozzle may be of circular cross section with a diameter of between 0.2 and 3.5 mm directed towards an optical surface.
  • Operating pressures may be between 0.5 and 10 bar but may suitably be varied to higher pressures, such as 100 or even 600 bar depending on the specific abrasive fluid, machining area and nozzle diameter.
  • the break up mechanism is formed by a revolving nozzle holder 20 and a stationary chamber wall side 21 opposite the nozzle holder 20.
  • the stationary chamber wall side 21 may be formed on a stationary block 22 that cooperates with the rotatable nozzle holder 20.
  • the wall side 21 comprises a plurality of surface deformations 23 arranged in annular fashion, shown in plenary view in Figure 3 (the chamber wall 21 showing upward).
  • a distance between the wall deformations and the nozzle channel may be in the order of the interval of 0.01-5 millimeter, depending on fluid pressure and fluid viscosity, so as to be able to impart a pressure pulse to the fluid jet 6 to actively break up the fluid jet 6 into droplets 9.
  • the pulse frequency may be determined by the rotor frequency and number of deformations on the wall.
  • the frequency is in the range of a natural break up frequency of the jet 6 determined by Rayleigh dynamics.
  • Stationary block 22 and rotating nozzle holder are preferably shaped to provide a pressurized chamber 24 formed and suitably sealed between opposite walls 21 of block 22 and nozzle holder 20.
  • the stationary block 22 comprises a fluid inlet 25 connectible with a pressure pump (not shown).
  • the fluid inlet is preferably kept central to the stationary block, or at least arranged symmetrically relative to a centre point. This enhances uniform pressure build up in the chamber 24.
  • a rotation shaft (not shown) may be provided extending through the chamber 24; coupled to a drive motor arranged opposite the stationary block and suitably sealed.
  • the abrasive fluid 6 used may be water containing H800 SiC abrasive particles.
  • the jet diameter is, for example, 2 mm.
  • the angle alpha between the nozzle 3 and the workpiece surface 7 is 20, and the nozzle 2 is advanced with respect to the surface 8 of the workpiece 5.
  • the flow of the abrasive liquid 3 will be laminar.
  • the rate and level of fineness of the working can be adjusted by varying diameter of the nozzle, the pressure of the abrasive liquid 3, the angle alpha with respect to the workpiece 5 and the distance between the nozzle 3 and the workpiece 5.
  • Figure 4 shows another view of said chamber wall, wherein the deformations are formed by rotor shaped depressions.
  • Other deformations in particular, axisymmetric forms such as round, inclined, tapered or undulated rotor shaped forms may be used depending on a desired effect.
  • the deformations in particular, suitably formed depressions, protrusions, through holes and/or notches are shaped to provide a pressure pulse near the nozzle so as to break up the fluid jet ejected from the nozzle into droplets 9.
  • abrasive liquid may comprise a number of liquids, such as water or an organic liquid, such as octanol.
  • abrasive particles or polishing particles are added to an abrasive liquid, such as for example #800 silicon carbide or particles which have similar properties.
  • suitable abrasive particles comprise diamond or aluminium oxide, while #1500 diamond, silicon carbide or cerium oxide can be used for polishing.
  • the rate at which material is removed from the surface of the workpiece depends on the concentration, dimensions and hardness of the abrasive particles and on the type of abrasive liquid, the velocity of the abrasive liquid when it leaves the nozzle, the contact time, the geometry, the relative dimensions and orientation of the nozzle with respect to the workpiece surface, and the like.
  • the diameter of the nozzle is relatively small compared to the dimensions of the workpiece, preferably between 1 cm and 0.05 mm, and particularly preferably between 5 mm and 0.2 mm.
  • the process according to the invention can be used on a multiplicity of materials, the method is particularly suitable for optical materials, such as for example BK7, ULE (a trademark of Corning and recognized in the industry), silicon, glass, sapphire, quartz, optical plastics, but also for metal or ceramic materials.
  • optical materials such as for example BK7, ULE (a trademark of Corning and recognized in the industry)
  • silicon, glass, sapphire, quartz, optical plastics but also for metal or ceramic materials.
  • one nozzle may be moved with respect to the workpiece, for example in a raster pattern. It is also possible to employ a series of nozzles and to rotate the workpiece about its axis of rotation at the same time.
  • the cross section of the nozzle may be circular, elliptical, triangular or rectangular, or may be in the form of a series specifically shaped openings in order to form a plurality of slots.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)

Abstract

L'invention concerne un dispositif de fractionnement de gouttelettes, comprenant: une chambre agencée pour recevoir un liquide abrasif sous pression; une buse, en communication fluidique avec la chambre et destinée à éjecter un jet de liquide; un mécanisme de fractionnement destiné à fractionner le jet de fluide éjecté de la buse; et un porte-buse rotatif destiné à supporter la buse, de sorte que ladite buse tourne autour d'un axe perpendiculaire à la zone d'usinage. Le mécanisme de fractionnement est formé d'une paroi latérale de chambre fixe opposée au porte-buse, ladite paroi latérale de chambre fixe comprenant une pluralité de déformations de surface mises en forme pour obtenir une impulsion de pression à proximité de la buse afin de fractionner le jet de fluide éjecté de la buse en gouttelettes.
PCT/NL2009/050761 2008-12-11 2009-12-11 Dispositif de fractionnement de gouttelettes WO2010068108A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP08171346A EP2196285A1 (fr) 2008-12-11 2008-12-11 Procédé et appareil pour le polissage de la surface d'une pièce de travail
EP08171346.3 2008-12-11

Publications (1)

Publication Number Publication Date
WO2010068108A1 true WO2010068108A1 (fr) 2010-06-17

Family

ID=40640212

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/NL2009/050761 WO2010068108A1 (fr) 2008-12-11 2009-12-11 Dispositif de fractionnement de gouttelettes

Country Status (2)

Country Link
EP (1) EP2196285A1 (fr)
WO (1) WO2010068108A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014089224A1 (fr) * 2012-12-04 2014-06-12 Ikonics Corporation Appareil et procédés pour coupe, perçage et formation par abrasion
JP2015174162A (ja) * 2014-03-13 2015-10-05 株式会社大林組 エアーブラスト切削装置

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103659614A (zh) * 2013-12-19 2014-03-26 北京理工大学 一种基于复合粒子的喷射抛光方法
CN107671746B (zh) * 2017-10-09 2020-05-15 安徽理工大学 一种复合式前混合电磁磨料射流发生装置
CN107553351B (zh) * 2017-10-09 2019-04-09 安徽理工大学 一种反式新型前混合电磁磨料射流发生装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3343611A1 (de) * 1983-12-02 1985-06-13 Woma-Apparatebau Wolfgang Maasberg & Co Gmbh, 4100 Duisburg Verfahren und vorrichtung zur materialbehandlung mit einem hochdruckmittelstrahl
EP0335503A2 (fr) * 1988-03-02 1989-10-04 Cleaning Technology Limited Nettoyage ou coupage par projection de particules abrasives
US5759086A (en) * 1994-11-04 1998-06-02 Trumpf Gmbh & Co. Method and machine tool for cutting workpieces
WO1999002674A1 (fr) 1997-07-08 1999-01-21 University Of Dundee Peptides contenant le motif igd et leur utilisation comme modulateurs de migration cellulaire
WO1999026764A2 (fr) 1997-11-20 1999-06-03 Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno Procede et dispositif d'usinage d'une piece

Family Cites Families (6)

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SU1098775A1 (ru) * 1981-10-10 1984-06-23 Starobinets Gennadij G Устройство дл абразивной обработки деталей
JPH0435874A (ja) * 1990-05-31 1992-02-06 Sony Corp パウダービーム発生装置
CA2035702C (fr) * 1991-02-05 1996-10-01 Mohan Vijay Jet cavitant ou pulse genere par ultrasons
US5512318A (en) * 1995-03-29 1996-04-30 Flow International Corporation Method for preparing surfaces with an ultrahigh-pressure fan jet
KR20010014577A (ko) * 1999-03-18 2001-02-26 시부야 히로토시 클린싱 및 스크레이핑 방법과 그 장치 그리고 클린싱 및스크레이핑 매질유체 형성방법과 그 장치
US7297286B2 (en) * 2002-07-29 2007-11-20 Nanoclean Technologies, Inc. Methods for resist stripping and other processes for cleaning surfaces substantially free of contaminants

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3343611A1 (de) * 1983-12-02 1985-06-13 Woma-Apparatebau Wolfgang Maasberg & Co Gmbh, 4100 Duisburg Verfahren und vorrichtung zur materialbehandlung mit einem hochdruckmittelstrahl
EP0335503A2 (fr) * 1988-03-02 1989-10-04 Cleaning Technology Limited Nettoyage ou coupage par projection de particules abrasives
US5759086A (en) * 1994-11-04 1998-06-02 Trumpf Gmbh & Co. Method and machine tool for cutting workpieces
WO1999002674A1 (fr) 1997-07-08 1999-01-21 University Of Dundee Peptides contenant le motif igd et leur utilisation comme modulateurs de migration cellulaire
WO1999026764A2 (fr) 1997-11-20 1999-06-03 Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno Procede et dispositif d'usinage d'une piece

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014089224A1 (fr) * 2012-12-04 2014-06-12 Ikonics Corporation Appareil et procédés pour coupe, perçage et formation par abrasion
JP2015174162A (ja) * 2014-03-13 2015-10-05 株式会社大林組 エアーブラスト切削装置

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Publication number Publication date
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