WO2010056037A3 - 홀 효과 측정장치 - Google Patents

홀 효과 측정장치 Download PDF

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Publication number
WO2010056037A3
WO2010056037A3 PCT/KR2009/006616 KR2009006616W WO2010056037A3 WO 2010056037 A3 WO2010056037 A3 WO 2010056037A3 KR 2009006616 W KR2009006616 W KR 2009006616W WO 2010056037 A3 WO2010056037 A3 WO 2010056037A3
Authority
WO
WIPO (PCT)
Prior art keywords
sample
hall effect
measuring apparatus
present
measuring
Prior art date
Application number
PCT/KR2009/006616
Other languages
English (en)
French (fr)
Other versions
WO2010056037A2 (ko
WO2010056037A9 (ko
Inventor
정석환
이근택
박영규
이안수
Original Assignee
에코피아 주식회사
이진호
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 에코피아 주식회사, 이진호 filed Critical 에코피아 주식회사
Priority to US13/128,899 priority Critical patent/US20120200288A1/en
Publication of WO2010056037A2 publication Critical patent/WO2010056037A2/ko
Publication of WO2010056037A3 publication Critical patent/WO2010056037A3/ko
Publication of WO2010056037A9 publication Critical patent/WO2010056037A9/ko

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/07—Hall effect devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/36—Embedding or analogous mounting of samples
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
    • G01N2035/00346—Heating or cooling arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
    • G01N35/0098—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor involving analyte bound to insoluble magnetic carrier, e.g. using magnetic separation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Hall/Mr Elements (AREA)
  • Measuring Magnetic Variables (AREA)

Abstract

본 발명은 홀 효과를 이용하여 반도체의 특성값을 측정하는 홀 효과 측정장치에 관한 것으로, 본 발명의 일실시예는 홀 효과를 이용하여 반도체 샘플의 특성값을 측정하는 홀 효과 측정장치에 있어서, 샘플이 셋팅된 샘플홀더가 내부에 삽입되고 일측에 설치되는 전동모터에 의해 영구자석을 이동시켜 샘플에 소정의 자기장을 형성하는 자속밀도 인가장치와, 샘플홀더의 온도를 조절하여 샘플의 온도를 설정하는 샘플온도 조절수단을 포함하고, 샘플에 전류를 인가하여 그 샘플에서 출력되는 홀 전압을 측정하는 홀 효과 측정장치를 제공한다.
PCT/KR2009/006616 2008-11-12 2009-11-11 홀 효과 측정장치 WO2010056037A2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US13/128,899 US20120200288A1 (en) 2008-11-12 2009-11-11 Apparatus for Measuring Hall Effect

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2008-0112090 2008-11-12
KR1020080112090A KR100937504B1 (ko) 2008-11-12 2008-11-12 홀 효과 측정장치

Publications (3)

Publication Number Publication Date
WO2010056037A2 WO2010056037A2 (ko) 2010-05-20
WO2010056037A3 true WO2010056037A3 (ko) 2010-08-05
WO2010056037A9 WO2010056037A9 (ko) 2010-09-23

Family

ID=41809967

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2009/006616 WO2010056037A2 (ko) 2008-11-12 2009-11-11 홀 효과 측정장치

Country Status (3)

Country Link
US (1) US20120200288A1 (ko)
KR (1) KR100937504B1 (ko)
WO (1) WO2010056037A2 (ko)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101253504B1 (ko) 2012-03-02 2013-04-11 에코피아 주식회사 초고온 홀 효과 측정장치
KR101381916B1 (ko) * 2012-05-22 2014-04-08 에코피아 주식회사 포토닉 홀 효과 측정장치
US9797965B2 (en) * 2016-01-15 2017-10-24 Lake Shore Cryotronics, Inc. Fast hall effect measurement system
KR101769094B1 (ko) 2016-10-19 2017-08-17 에코피아 주식회사 제백 계수 및 홀 효과 측정 장치
KR101868267B1 (ko) 2017-01-26 2018-06-15 고려대학교 산학협력단 고조파 홀 전압 분석 방법
KR102042669B1 (ko) * 2018-07-05 2019-11-08 한국기초과학지원연구원 전자기적 성질 검측 장비용 샘플 마운트 어셈블리

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11258301A (ja) * 1998-03-09 1999-09-24 Hitachi Electron Eng Co Ltd Ｉｃデバイスの試験装置
JP2000252331A (ja) * 1999-03-04 2000-09-14 Mitsubishi Heavy Ind Ltd 電気特性評価装置
KR100419005B1 (ko) * 2000-12-04 2004-02-14 상록코리아 (주) 홀 효과 측정장치 및 측정방법

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4931732A (en) * 1988-07-25 1990-06-05 Cornell Research Foundation, Inc. Magnetic flexure system for determining superconductive properties of a sample
US20020175679A1 (en) * 2000-12-04 2002-11-28 Hoon Kim Apparatus and method for measuring Hall effect
US7331186B2 (en) * 2002-06-27 2008-02-19 I.M.T. Interface Multigrad Technology Ltd Changing the temperature of a liquid sample and a receptacle useful therefor
US7145340B2 (en) * 2004-11-04 2006-12-05 Broker Biospin Corporation NMR spectrometer with flowthrough sample container
US7814850B2 (en) * 2006-12-06 2010-10-19 Partner's Royalties, Llc Tufting machine for producing athletic turf having a graphic design

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11258301A (ja) * 1998-03-09 1999-09-24 Hitachi Electron Eng Co Ltd Ｉｃデバイスの試験装置
JP2000252331A (ja) * 1999-03-04 2000-09-14 Mitsubishi Heavy Ind Ltd 電気特性評価装置
KR100419005B1 (ko) * 2000-12-04 2004-02-14 상록코리아 (주) 홀 효과 측정장치 및 측정방법

Also Published As

Publication number Publication date
WO2010056037A2 (ko) 2010-05-20
WO2010056037A9 (ko) 2010-09-23
US20120200288A1 (en) 2012-08-09
KR100937504B1 (ko) 2010-01-19

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