WO2010050679A3 - Imprinting apparatus - Google Patents

Imprinting apparatus Download PDF

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Publication number
WO2010050679A3
WO2010050679A3 PCT/KR2009/005687 KR2009005687W WO2010050679A3 WO 2010050679 A3 WO2010050679 A3 WO 2010050679A3 KR 2009005687 W KR2009005687 W KR 2009005687W WO 2010050679 A3 WO2010050679 A3 WO 2010050679A3
Authority
WO
WIPO (PCT)
Prior art keywords
press
substrate
stamp
press plate
elastic
Prior art date
Application number
PCT/KR2009/005687
Other languages
French (fr)
Korean (ko)
Other versions
WO2010050679A2 (en
Inventor
곽신웅
Original Assignee
에이피시스템 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 에이피시스템 주식회사 filed Critical 에이피시스템 주식회사
Publication of WO2010050679A2 publication Critical patent/WO2010050679A2/en
Publication of WO2010050679A3 publication Critical patent/WO2010050679A3/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/003—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor characterised by the choice of material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
    • B29C43/021—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32—Component parts, details or accessories; Auxiliary operations
    • B29C43/36—Moulds for making articles of definite length, i.e. discrete articles
    • B29C43/3642—Bags, bleeder sheets or cauls for isostatic pressing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67092—Apparatus for mechanical treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
    • B29C43/021—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface
    • B29C2043/023—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface having a plurality of grooves
    • B29C2043/025—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface having a plurality of grooves forming a microstructure, i.e. fine patterning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32—Component parts, details or accessories; Auxiliary operations
    • B29C2043/3205—Particular pressure exerting means for making definite articles
    • B29C2043/3222—Particular pressure exerting means for making definite articles pressurized gas, e.g. air
    • B29C2043/3233—Particular pressure exerting means for making definite articles pressurized gas, e.g. air exerting pressure on mould parts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32—Component parts, details or accessories; Auxiliary operations
    • B29C43/36—Moulds for making articles of definite length, i.e. discrete articles
    • B29C43/3642—Bags, bleeder sheets or cauls for isostatic pressing
    • B29C2043/3647—Membranes, diaphragms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32—Component parts, details or accessories; Auxiliary operations
    • B29C43/36—Moulds for making articles of definite length, i.e. discrete articles
    • B29C43/3642—Bags, bleeder sheets or cauls for isostatic pressing
    • B29C2043/3652—Elastic moulds or mould parts, e.g. cores or inserts

Abstract

The present invention relates to an imprinting apparatus for imprinting a pattern on a substrate using a stamp. More particularly, the present invention relates to an imprinting apparatus which prevents slippage and enables pressure to be uniformly applied when the stamp and the substrate are stacked into a layer and pressed, thereby improving the characteristics of the pattern imprinted on the substrate. To this end, the imprinting apparatus according to the present invention comprises a press housing having a bottom surface with an opening, an elastic press plate arranged to seal the opening, and made of an elastic material, an assistant press plate which is fixed onto an upper surface of the elastic press plate, and which has an upper surface on which the stamp and the substrate are stacked, and which is made of a hard material, and a press chamber which includes an exhaust pipe arranged at a side surface of the press housing, and an exhaust pump connected to the exhaust pipe, to discharge air from the inside of the press housing to the outside. The elastic press plate moves upward when air is discharged from the inside of the press housing to the outside, to thereby enable the stamp and the substrate to be tightly pressed against each other by the assistant press plate and an upper surface of the press housing.
PCT/KR2009/005687 2008-10-29 2009-10-06 Imprinting apparatus WO2010050679A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020080106293A KR101023440B1 (en) 2008-10-29 2008-10-29 Imprinting apparatus
KR10-2008-0106293 2008-10-29

Publications (2)

Publication Number Publication Date
WO2010050679A2 WO2010050679A2 (en) 2010-05-06
WO2010050679A3 true WO2010050679A3 (en) 2010-07-22

Family

ID=42129411

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2009/005687 WO2010050679A2 (en) 2008-10-29 2009-10-06 Imprinting apparatus

Country Status (2)

Country Link
KR (1) KR101023440B1 (en)
WO (1) WO2010050679A2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102441988B (en) * 2010-10-14 2015-09-09 晟铭电子科技股份有限公司 Multiple field isostactic pressing mould and isostactic pressing method thereof
CN106094429B (en) * 2016-08-19 2019-11-05 京东方科技集团股份有限公司 Imprinting apparatus and its working method
CA3174021A1 (en) * 2020-04-03 2021-10-07 Nicolas JAMOND Molding apparatus and method for embossing a raw material
JP6932291B1 (en) * 2020-10-01 2021-09-08 信越エンジニアリング株式会社 Microstructure manufacturing equipment and microstructure manufacturing method

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20050049302A (en) * 2003-11-19 2005-05-25 엔엔디 주식회사 Imprinting device and substrate holding device thereof
KR20080046474A (en) * 2006-11-22 2008-05-27 주식회사 에이디피엔지니어링 Apparatus for forming a nano-pattern and method using the same
KR20080088238A (en) * 2007-03-29 2008-10-02 삼성전자주식회사 Mold and apparatus for forming a pattern, and method for forming the pattern

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100544603B1 (en) 2003-07-24 2006-01-23 엔엔디 주식회사 imprinting substrate holding device and imprinting device
US7695667B2 (en) * 2006-03-01 2010-04-13 Hitachi Global Storage Technologies Netherlands B.V. Method and apparatus for separating a stamper from a patterned substrate

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20050049302A (en) * 2003-11-19 2005-05-25 엔엔디 주식회사 Imprinting device and substrate holding device thereof
KR20080046474A (en) * 2006-11-22 2008-05-27 주식회사 에이디피엔지니어링 Apparatus for forming a nano-pattern and method using the same
KR20080088238A (en) * 2007-03-29 2008-10-02 삼성전자주식회사 Mold and apparatus for forming a pattern, and method for forming the pattern

Also Published As

Publication number Publication date
KR101023440B1 (en) 2011-03-24
WO2010050679A2 (en) 2010-05-06
KR20100047416A (en) 2010-05-10

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