WO2010043433A1 - Vorrichtung zur messung von richtung und/oder stärke eines magnetfeldes - Google Patents
Vorrichtung zur messung von richtung und/oder stärke eines magnetfeldes Download PDFInfo
- Publication number
- WO2010043433A1 WO2010043433A1 PCT/EP2009/060490 EP2009060490W WO2010043433A1 WO 2010043433 A1 WO2010043433 A1 WO 2010043433A1 EP 2009060490 W EP2009060490 W EP 2009060490W WO 2010043433 A1 WO2010043433 A1 WO 2010043433A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- sensor
- magnetic field
- fluxgate
- substrate
- component
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/07—Hall effect devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/0206—Three-component magnetometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/04—Measuring direction or magnitude of magnetic fields or magnetic flux using the flux-gate principle
Definitions
- the invention relates to a device for measuring the direction and / or strength of a magnetic field, comprising a first sensor for detecting a first component of the magnetic field in a first spatial direction, a second sensor for detecting a second component of the magnetic field in a second spatial direction and a third sensor for detecting a third component of the magnetic field in a third spatial direction.
- Devices of the type mentioned above can be used, for example, to measure the direction and strength of the earth magnetic field.
- the measured direction of the earth magnetic field can be visualized, for example, to the user in the form of a digital compass.
- the measured values can be used by a navigation system or an autopilot for controlling a vehicle, an aircraft or a boat.
- the present invention seeks to provide a device for three-dimensional measurement of the direction and / or strength of a magnetic field, which has a small size and is easy and inexpensive to produce.
- a device for measuring the direction and / or strength of a magnetic field comprising a first sensor for detecting a first component of the magnetic field in a first spatial direction, a second sensor for detecting a second component of the magnetic field in a second spatial direction and a third sensor for detecting a third component of the magnetic field in a third spatial direction, wherein the first sensor contains at least one salient sensor and the second and / or the third at least one fluxgate sensor included.
- At least one Hall sensor detects a magnetic field component perpendicular to the sensor surface with maximum sensitivity.
- a fluxgate sensor is set up to detect a magnetic field component within the sensor plane.
- at least one Hall sensor and at least one fluxgate sensor can be arranged in a space-saving manner in one plane, for example, on a single semiconductor substrate. If at least two fluxgate sensors are provided, which include approximately a right angle, a magnetic field in all three spatial directions can be detected without a second semiconductor substrate being arranged at right angles to the first semiconductor device. Substrate is needed. The inventively proposed sensor thus saves height and is easier to manufacture.
- the semiconductor substrate which contains the Hall sensor and the fluxgate sensors, comprise at least one further component.
- additional components for example, a power supply of the sensors or a measured value detection can take place.
- the components can be used to subject the output values of the sensors to plausibility, amplification, discrimination or digitization.
- a further preferred embodiment of the invention can provide several sensors for each spatial direction in order to increase the reliability of the device in this way by redundant measurement.
- the fluxgate sensor may e.g. be arranged in one or two metallic planes. In this way, the fluxgate sensor can be generated together with the Hall sensor and other electronic components in one operation on the semiconductor substrate.
- the inventively proposed device can in particular for measuring the direction and / or strength of the
- the device is suitable for consumer electronics such as mobile phones, PDAs or navigation devices.
- Figure 1 shows the arrangement of the components on a substrate.
- the device according to FIG. 1 is arranged on a substrate 10.
- the substrate 10 comprises, for example, a semiconductor substrate, in particular a silicon substrate.
- the semiconductor substrate 10 may be provided with a dopant.
- the surface of the substrate 10 may be coated with an insulator.
- the insulator may in particular contain silicon nitride, silicon oxide or silicon oxynitride.
- the Hall sensor 12 comprises a spatially delimited area which contains a semiconductor material with high charge carrier mobility. Along one direction of the Hall sensor 12, an electric field is applied during operation of the sensor, which causes an electrical current flow through the sensor. In the presence of a magnetic field which acts in a direction perpendicular to the surface of the substrate 10, an electrical voltage can be measured at the Hall sensor 12 in a direction orthogonal to the electric current flow, which voltage increases with the field strength of the magnetic field. The Hall sensor 12 thus serves to measure the field component of the magnetic field, which is perpendicular to the surface of the semiconductor substrate 10.
- the Hall sensor 12 can also be produced in a manner known per se by structuring the semiconductor substrate 10.
- the material of the Hall sensor 12 can be deposited on the surface of the semiconductor substrate from the gas phase and subsequently structured and provided with metallic connection contacts.
- the Hall sensor 12 is provided to detect a magnetic field, or a magnetic field component z, which in Substantially perpendicular to the surface of the substrate 10 acts, two fluxgate sensors 13 and 14 are provided to detect a magnetic field or a magnetic field component in the xy plane of the substrate 10.
- the first fluxgate sensor 13 and the second fluxgate sensor 14 are arranged approximately orthogonal to one another. Together with the Hall sensor 12 thus three components of a magnetic field in all three spatial directions can be determined. This makes it possible to determine the orientation of the magnetic field in space.
- Each fluxgate sensor 13 and 14 includes at least one
- Coil core which preferably consists of a soft magnetic material.
- excitation and detection coils are arranged around the coil core.
- Detection coil can thus be determined by means of the fluxgate 13, a magnetic field or a magnetic field component in the direction x.
- the fluxgate sensor 14 serves to determine a magnetic field or a magnetic field component in the direction y.
- the fluxgate sensors 13 and 14 can be produced, for example, as micromechanical components and subsequently attached to the surface of the substrate 10 by gluing, welding or bonding.
- the substrate may be formed, for example, of ceramic or of a printed circuit board.
- the coil windings and the coil cores of the fluxgate sensors 13 and 14 can be deposited from the gas phase onto the surface of the semiconductor substrate 10 and subsequently patterned.
- the deposition can be carried out, for example, by vapor deposition, sputtering, chemical vapor deposition or physical vapor deposition.
- the structuring may comprise, for example, an etching step, subregions of the substrate surface being provided by photoresists or hard masks the etching attack are protected. Insulating layers may occasionally be arranged between the coil cores and the coil windings. These layers are also preferably deposited in a gas phase process and subsequently structured. In this way, the device for
- Measurement of direction and / or strength of a magnetic field with the known CMOS process steps can be made in a simple manner.
- the surface of the semiconductor substrate 10 comprises a region 15, which electronic components for
- the region 15 includes, for example, a current regulation with which a predeterminable longitudinal flow through the Hall sensor 12 can be generated.
- the region 15 may comprise alternating voltage sources which provide a coil current for generating an alternating magnetic field in the cores of the fluxgate sensors 13 and 14.
- the region 15 may include evaluation circuits 16 as electrical components which read the Hall voltage of the Hall sensor 12 and the signal voltages induced in the measuring coils fluxgate sensors 13 and 14.
- the area 15 can also comprise further circuits, for example for the digitization of the signals, for amplification, for discrimination or for
- the region 15 of the semiconductor substrate 10 comprises bond pads, by means of which an operating voltage can be applied to the sensor elements, as well as further bond pads, via which the measured values can be read out.
- the invention shows a magnetic field sensor for three spatial directions, in which all sensors for all spatial directions are arranged in one plane on the surface of a substrate 10.
- the invention according to the proposed sensor to a lower height.
- the proposed sensor can be produced more easily, since it is no longer necessary to arrange a plurality of semiconductor sensors 12 on a plurality of substrates in different, orthogonal directions for measuring magnetic fields in a plurality of mutually orthogonal directions.
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Measuring Magnetic Variables (AREA)
Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011531414A JP2012505420A (ja) | 2008-10-13 | 2009-08-13 | 磁界方向および/または磁界強度の測定装置 |
CN2009801407614A CN102187240A (zh) | 2008-10-13 | 2009-08-13 | 用于测量磁场的方向和/或强度的装置 |
US13/123,843 US20110316531A1 (en) | 2008-10-13 | 2009-08-13 | Device for measuring the direction and/or strength of a magnetic field |
EP09781798A EP2384444A1 (de) | 2008-10-13 | 2009-08-13 | Vorrichtung zur messung von richtung und/oder stärke eines magnetfeldes |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102008042800A DE102008042800A1 (de) | 2008-10-13 | 2008-10-13 | Vorrichtung zur Messung von Richtung und/oder Stärke eines Magnetfeldes |
DE102008042800.0 | 2008-10-13 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2010043433A1 true WO2010043433A1 (de) | 2010-04-22 |
Family
ID=41226684
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2009/060490 WO2010043433A1 (de) | 2008-10-13 | 2009-08-13 | Vorrichtung zur messung von richtung und/oder stärke eines magnetfeldes |
Country Status (8)
Country | Link |
---|---|
US (1) | US20110316531A1 (de) |
EP (1) | EP2384444A1 (de) |
JP (1) | JP2012505420A (de) |
KR (1) | KR20110076923A (de) |
CN (1) | CN102187240A (de) |
DE (1) | DE102008042800A1 (de) |
TW (1) | TW201015097A (de) |
WO (1) | WO2010043433A1 (de) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8475347B2 (en) | 2010-06-04 | 2013-07-02 | Stowe Woodward Licensco, Llc | Industrial roll with multiple sensor arrays |
US9650744B2 (en) | 2014-09-12 | 2017-05-16 | Stowe Woodward Licensco Llc | Suction roll with sensors for detecting operational parameters |
US10221525B2 (en) | 2016-04-26 | 2019-03-05 | Stowe Woodward Licensco, Llc | Suction roll with pattern of through holes and blind drilled holes that improves land distance |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8793085B2 (en) * | 2011-08-19 | 2014-07-29 | Allegro Microsystems, Llc | Circuits and methods for automatically adjusting a magnetic field sensor in accordance with a speed of rotation sensed by the magnetic field sensor |
DE102012209232A1 (de) | 2012-05-31 | 2013-12-05 | Robert Bosch Gmbh | Magnetfeldsensor |
DE102012218609A1 (de) | 2012-10-12 | 2014-04-17 | Robert Bosch Gmbh | Magnetfeld-Erfassungsvorrichtung und Magnetfeld-Erfassungsverfahren |
DE102013212830A1 (de) | 2013-07-02 | 2015-01-08 | Robert Bosch Gmbh | Mikrotechnisches Bauteil für eine magnetische Sensorvorrichtung oder einen magnetischen Aktor und Herstellungsverfahren für ein mikrotechnisches Bauteil für eine magnetische Sensorvorrichtung oder einen magnetischen Aktor |
DE102013222538A1 (de) * | 2013-11-06 | 2015-05-07 | Robert Bosch Gmbh | Magnetische Sensoreinrichtung und Herstellungsverfahren für eine magnetische Sensoreinrichtung |
DE102014211311A1 (de) | 2014-06-13 | 2015-12-17 | Robert Bosch Gmbh | Magnetfeldsensoranordnung, entsprechendes Herstellungsverfahren und Betriebsverfahren |
CN104035135B (zh) * | 2014-06-27 | 2015-12-09 | 中国地质大学(武汉) | 一种地球天然脉冲电磁场甚低频接收传感器 |
CN104614690B (zh) * | 2014-12-18 | 2018-03-02 | 哈尔滨理工大学 | 一种微型阵列式磁通门传感器 |
CN104391337B (zh) * | 2014-12-22 | 2016-02-10 | 中国地质大学(武汉) | 用于接收地球天然脉冲电磁场信号的监测仪器 |
CN108717169B (zh) * | 2018-06-22 | 2020-10-09 | 钱正洪 | 一种二维磁场传感器 |
DE102021201489A1 (de) * | 2021-02-17 | 2022-09-01 | Robert Bosch Gesellschaft mit beschränkter Haftung | Magnetokoppler zur magnetischen Kopplung von Signalleitungen |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020056202A1 (en) * | 2000-10-16 | 2002-05-16 | Yasuhiro Tamura | Three-axis magnetic sensor, an omnidirectional magnetic sensor and an azimuth measureing method using the same |
US6404192B1 (en) * | 1999-05-12 | 2002-06-11 | Asulab S.A. | Integrated planar fluxgate sensor |
US20070164736A1 (en) * | 2003-10-06 | 2007-07-19 | Commissariat A L'energie Atomique | Magnetometer with open magnetic circuit and production method thereof |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006023318A (ja) * | 2000-10-16 | 2006-01-26 | Dentsu Kiko Kk | 3軸磁気センサ、全方位磁気センサおよびそれらを用いた方位測定方法 |
JP4177032B2 (ja) * | 2002-06-04 | 2008-11-05 | 株式会社ワコー | 三次元磁気センサおよびその製造方法 |
JP2004271481A (ja) * | 2003-03-12 | 2004-09-30 | Citizen Watch Co Ltd | 3軸磁気センサー |
JP4293922B2 (ja) * | 2004-02-17 | 2009-07-08 | シチズン電子株式会社 | 磁気方位検出装置 |
WO2007126164A1 (en) * | 2006-04-28 | 2007-11-08 | Microgate, Inc. | Thin film 3 axis fluxgate and the implementation method thereof |
FR2903812B1 (fr) * | 2006-07-13 | 2008-10-31 | Commissariat Energie Atomique | Circuit integre reparti sur au moins deux plans non paralleles et son procede de realisation |
-
2008
- 2008-10-13 DE DE102008042800A patent/DE102008042800A1/de not_active Withdrawn
-
2009
- 2009-08-13 KR KR1020117008358A patent/KR20110076923A/ko not_active Application Discontinuation
- 2009-08-13 JP JP2011531414A patent/JP2012505420A/ja active Pending
- 2009-08-13 WO PCT/EP2009/060490 patent/WO2010043433A1/de active Application Filing
- 2009-08-13 EP EP09781798A patent/EP2384444A1/de not_active Withdrawn
- 2009-08-13 US US13/123,843 patent/US20110316531A1/en not_active Abandoned
- 2009-08-13 CN CN2009801407614A patent/CN102187240A/zh active Pending
- 2009-10-12 TW TW098134441A patent/TW201015097A/zh unknown
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6404192B1 (en) * | 1999-05-12 | 2002-06-11 | Asulab S.A. | Integrated planar fluxgate sensor |
US20020056202A1 (en) * | 2000-10-16 | 2002-05-16 | Yasuhiro Tamura | Three-axis magnetic sensor, an omnidirectional magnetic sensor and an azimuth measureing method using the same |
US20070164736A1 (en) * | 2003-10-06 | 2007-07-19 | Commissariat A L'energie Atomique | Magnetometer with open magnetic circuit and production method thereof |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8475347B2 (en) | 2010-06-04 | 2013-07-02 | Stowe Woodward Licensco, Llc | Industrial roll with multiple sensor arrays |
US9080287B2 (en) | 2010-06-04 | 2015-07-14 | Stowe Woodward Licensco, Llc | Industrial roll with multiple sensor arrays |
US9650744B2 (en) | 2014-09-12 | 2017-05-16 | Stowe Woodward Licensco Llc | Suction roll with sensors for detecting operational parameters |
US10221525B2 (en) | 2016-04-26 | 2019-03-05 | Stowe Woodward Licensco, Llc | Suction roll with pattern of through holes and blind drilled holes that improves land distance |
Also Published As
Publication number | Publication date |
---|---|
KR20110076923A (ko) | 2011-07-06 |
CN102187240A (zh) | 2011-09-14 |
EP2384444A1 (de) | 2011-11-09 |
JP2012505420A (ja) | 2012-03-01 |
US20110316531A1 (en) | 2011-12-29 |
TW201015097A (en) | 2010-04-16 |
DE102008042800A1 (de) | 2010-04-15 |
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