WO2010040119A4 - Tunable evanescent-mode cavity filter - Google Patents

Tunable evanescent-mode cavity filter Download PDF

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Publication number
WO2010040119A4
WO2010040119A4 PCT/US2009/059466 US2009059466W WO2010040119A4 WO 2010040119 A4 WO2010040119 A4 WO 2010040119A4 US 2009059466 W US2009059466 W US 2009059466W WO 2010040119 A4 WO2010040119 A4 WO 2010040119A4
Authority
WO
WIPO (PCT)
Prior art keywords
diaphragm
filter
new
post
cavity resonator
Prior art date
Application number
PCT/US2009/059466
Other languages
French (fr)
Other versions
WO2010040119A1 (en
Inventor
Xiaoguang Liu
Himanshu Joshi
Hjalti Hreinn Sigmarsson
Dimitrios Peroulis
William J. Chappell
Original Assignee
Purdue Research Foundation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Purdue Research Foundation filed Critical Purdue Research Foundation
Priority to US13/122,370 priority Critical patent/US9024709B2/en
Publication of WO2010040119A1 publication Critical patent/WO2010040119A1/en
Publication of WO2010040119A4 publication Critical patent/WO2010040119A4/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/20—Frequency-selective devices, e.g. filters
    • H01P1/219—Evanescent mode filters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P11/00—Apparatus or processes specially adapted for manufacturing waveguides or resonators, lines, or other devices of the waveguide type
    • H01P11/007—Manufacturing frequency-selective devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P7/00—Resonators of the waveguide type
    • H01P7/06—Cavity resonators

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)

Abstract

A tunable filter having an electronically tunable center frequency and dynamic bandwidth control over a large tuning range. High-Q continuously tunable evanescent-mode cavity resonators and filters using reliable RF MEMS actuators. One embodiment is a 3.4-6.2 GHz (1.8: 1 tuning ratio) continuously tunable electrostatic MEMS resonator with quality factor of 460-530, with a volume of 18x30x4 mm including the actuation scheme and biasing lines. A tunable resonators is also disclosed with a 2.8: 1 (5.0-1.9 GHz) tuning ratio, and Q of 300-650.

Claims

AMENDED CLAIMS received by the International Bureau on 10 May 2010 (10.05.10)
We claim:
1. A tunable cavity filter with bandwidth compensation to reduce variations in bandwidth during tuning of the center frequency of the filter, comprising; first and second evanescent-mode cavities each having a flexible diaphragm over a capacitive post, and an actuator configured to vary the gap between said post and diaphragm and thereby vary the center frequency of said filter; a coupling iris between said cavities; and a bandwidth compensation network in parallel with said coupling iris.
2. (Cancelled)
3. (Cancelled)
4. The filter of claim 1 , wherein said actuator is an integrated piezoelectric actuator. 5-7. (Cancelled)
8. (New) The filter of claim 1, wherein said bandwidth compensation network comprises a transmission-line section.
9. (New) The filter of claim 8, wherein said bandwidth compensation network includes surface mount var actors.
10. (New) The filter of claim 9, wherein said transmission- line section is on a bottom side of said filter spaced from said flexible diaphragm.
11. (New) An electrostatically tunable evanescent-mode cavity resonator capable of tuning from a first frequency in the range of 1-3 GHz to a second frequency in the range of 4-8 GHz with a quality factor above 200, said cavity resonator comprising: an evanescent-mode cavity having a flexible diaphragm over a capacitive post, said diaphragm formed of single-crystal silicon coated with a relatively thin gold layer; and an electrostatic actuator configured to vary the gap between said post and diaphragm.
12. (New) The cavity resonator of claim 11 , wherein said diaphragm is formed from a silicon-on-insulator wafer.
13. (New) The cavity resonator of claim 12, wherein said electrostatic actuator includes a bias electrode disposed above said diaphragm, and wherein said cavity resonator is tuned by pulling said diaphragm upwardly by application of a DC voltage between said bias electrode and said diaphragm.
14. (New) The cavity resonator of claim 13, wherein said cavity has a depth on the order of 5 mm and a diameter approximately twice its depth, said post has a diameter on the order of 1 mm, and the gap between said post and diaphragm is nominally less than 10 μm and variable up to at least 30 μm.
15. (New) The cavity resonator of claim 14, wherein the tuning range of said resonator is approximately 2-6 GHz and said resonator has a quality factor in the range of 300-600 throughout its tuning range
24
PCT/US2009/059466 2008-10-03 2009-10-03 Tunable evanescent-mode cavity filter WO2010040119A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US13/122,370 US9024709B2 (en) 2008-10-03 2009-10-03 Tunable evanescent-mode cavity filter

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10271708P 2008-10-03 2008-10-03
US61/102,717 2008-10-03

Publications (2)

Publication Number Publication Date
WO2010040119A1 WO2010040119A1 (en) 2010-04-08
WO2010040119A4 true WO2010040119A4 (en) 2010-06-24

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2009/059466 WO2010040119A1 (en) 2008-10-03 2009-10-03 Tunable evanescent-mode cavity filter

Country Status (2)

Country Link
US (1) US9024709B2 (en)
WO (1) WO2010040119A1 (en)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8362853B2 (en) * 2009-06-19 2013-01-29 Qualcomm Incorporated Tunable MEMS resonators
US9564672B2 (en) * 2011-03-22 2017-02-07 Intel Corporation Lightweight cavity filter structure
US8598969B1 (en) * 2011-04-15 2013-12-03 Rockwell Collins, Inc. PCB-based tuners for RF cavity filters
US8575819B1 (en) * 2011-07-18 2013-11-05 Integrated Device Technology, Inc. Microelectromechanical resonators with passive frequency tuning using built-in piezoelectric-based varactors
US8941443B1 (en) * 2012-03-01 2015-01-27 Rockwell Collins, Inc. Electronically tuned cavity filter
US8884725B2 (en) 2012-04-19 2014-11-11 Qualcomm Mems Technologies, Inc. In-plane resonator structures for evanescent-mode electromagnetic-wave cavity resonators
US9178256B2 (en) * 2012-04-19 2015-11-03 Qualcomm Mems Technologies, Inc. Isotropically-etched cavities for evanescent-mode electromagnetic-wave cavity resonators
US20130278610A1 (en) * 2012-04-19 2013-10-24 Qualcomm Mems Technologies, Inc. Topped-post designs for evanescent-mode electromagnetic-wave cavity resonators
US9438197B2 (en) 2012-04-26 2016-09-06 Microsoft Technology Licensing, Llc Reconfigurable multi-band filter
US9166268B2 (en) 2012-05-01 2015-10-20 Nanoton, Inc. Radio frequency (RF) conductive medium
JP6180211B2 (en) * 2013-07-12 2017-08-16 富士フイルム株式会社 Diaphragm type resonant MEMS device substrate, diaphragm type resonant MEMS device and manufacturing method thereof
WO2015040037A1 (en) * 2013-09-18 2015-03-26 Imec Vzw A sensor for dielectric spectroscopy of a sample
US9979372B2 (en) 2014-04-25 2018-05-22 Indiana Microelectronics, Llc Reconfigurable microwave filters
CN104124499B (en) * 2014-08-01 2017-01-25 南京理工大学 LTCC (low temperature co-fired ceramic) based E-band high-suppression band-pass filter
US9935349B2 (en) * 2014-12-18 2018-04-03 Bae Systems Information And Electronic Systems Integration Inc. Tunable evanescent-mode cavity filter with closed loop control
US10122478B2 (en) * 2015-02-27 2018-11-06 Purdue Research Foundation Methods and devices for real-time monitoring of tunable filters
US9917344B2 (en) * 2015-04-14 2018-03-13 Purdue Research Foundation Nonuniform corrugated diaphragm for MEMS tuners and actuators
SG11201804302XA (en) 2015-11-23 2018-06-28 Anlotek Ltd Variable filter
FR3059838A1 (en) * 2016-12-05 2018-06-08 Chelton Telecom & Microwave MICROWAVE COMPONENT AND ASSOCIATED ADJUSTMENT METHOD
US11290084B2 (en) 2017-05-24 2022-03-29 Anlotek Limited Apparatus and method for controlling a resonator
CN108297731B (en) * 2018-03-20 2023-10-13 广东工业大学华立学院 Wireless charging system of electric automobile
US11277110B2 (en) 2019-09-03 2022-03-15 Anlotek Limited Fast frequency switching in a resonant high-Q analog filter
JP2023504732A (en) 2019-12-05 2023-02-06 アンロテック リミテッド Using Stable, Adjustable Active-Feedback Analog Filters in Frequency Synthesis
CN111244587B (en) * 2020-01-19 2021-06-15 西安电子科技大学 Double-frequency third-order band-pass filter based on microstrip ridge gap waveguide
US11258412B2 (en) 2020-05-28 2022-02-22 Eagle Technology, Llc Radio frequency (RF) device having tunable RF power amplifier and associated methods
US11876499B2 (en) 2020-06-15 2024-01-16 Anlotek Limited Tunable bandpass filter with high stability and orthogonal tuning
WO2022096181A1 (en) * 2020-11-06 2022-05-12 Nokia Technologies Oy Tunable resonator apparatus and method
EP4054076A1 (en) 2021-02-27 2022-09-07 Anlotek Limited Active multi-pole filter
US20220283121A1 (en) * 2021-03-04 2022-09-08 Lingyun Miao Capacitive micromachined ultrasonic transducers (cmuts) having non-uniform pedestals

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5136267A (en) * 1990-12-26 1992-08-04 Audio Precision, Inc. Tunable bandpass filter system and filtering method
US5959512A (en) 1997-09-19 1999-09-28 Raytheon Company Electronically tuned voltage controlled evanescent mode waveguide filter
US6347237B1 (en) * 1999-03-16 2002-02-12 Superconductor Technologies, Inc. High temperature superconductor tunable filter
FR2806212B1 (en) 2000-03-09 2002-05-31 Tekelec Temex FILTER OR MULTIPLE COUPLER ARRANGEMENT WITH ELECTRONICALLY TUNABLE RESONATOR
US6683513B2 (en) 2000-10-26 2004-01-27 Paratek Microwave, Inc. Electronically tunable RF diplexers tuned by tunable capacitors
US6686817B2 (en) 2000-12-12 2004-02-03 Paratek Microwave, Inc. Electronic tunable filters with dielectric varactors
US7224248B2 (en) 2004-06-25 2007-05-29 D Ostilio James P Ceramic loaded temperature compensating tunable cavity filter
EP1638202A1 (en) 2004-09-21 2006-03-22 Dialog Semiconductor GmbH Oscillator with controlled current source
US7280001B2 (en) * 2005-09-14 2007-10-09 Silicon Laboratories Inc. Capacitor array segmentation
US20080252401A1 (en) * 2007-04-13 2008-10-16 Emag Technologies, Inc. Evanescent Mode Resonator Including Tunable Capacitive Post
US8362853B2 (en) * 2009-06-19 2013-01-29 Qualcomm Incorporated Tunable MEMS resonators

Also Published As

Publication number Publication date
US20110241802A1 (en) 2011-10-06
WO2010040119A1 (en) 2010-04-08
US9024709B2 (en) 2015-05-05

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