WO2010031559A1

WO2010031559A1 - Microfluidic valve, microfluidic pump, microfluidic system, and a production method

Info

Publication number: WO2010031559A1
Application number: PCT/EP2009/006728
Authority: WO
Inventors: Gerhard Jobst; Matthias Hartmann
Original assignee: Jobst Technologies Gmbh
Priority date: 2008-09-19
Filing date: 2009-09-17
Publication date: 2010-03-25
Also published as: DE102008048064A1

Abstract

The invention relates to a microfluidic valve, to a microfluidic pump, to a microfluidic system, and to a method for the production thereof. A microfluidic valve comprises: an actuation element having at least one actuator, a flow element having at least one flow channel, a membrane holder having a membrane holder top side connected to the actuation element, a membrane holder bottom side connected to the flow element, at least one membrane holder opening, and at least one membrane which can be actuated, is resilient, and in particular can be elastically deformed, and which is arranged in the at least one membrane holder opening, wherein the at least one membrane having a membrane bottom side having the diameter D_u is arranged at least in areas on the at least one flow channel, wherein the at least one membrane having a membrane top side having the diameter D_o is arranged at least in areas on the at least one actuator, wherein the diameter D_o is greater than the diameter D_u and wherein the wall of the at least one flow channel can be mechanically contacted in a valve seat by the at least one membrane which can be actuated, so that the at least one flow channel can be closed substantially completely by the membrane.

Description

description

The invention relates to a microfluidic valve, a microfluidic pump, a microfluidic system and a method for the production thereof.

A microfluidic components in the sense of this application are, for example, a microfluidic valve (microvalve) or a microfluidic one

Pump (micropump). The controlled by the micro valve or regulated

Fluid conduits or flow channels are designed for fluid transport at flow rates of about 1 μl / min to about 10 ml / min. Accordingly, the

Flow channels diameter in the range of about 100 microns to about 1 mm. Accordingly, micropumps are designed to produce the above flow rates in the flow channels.

For the production of a microfluidic component, therefore, a production method is necessary which forms the flow channels and the further elements of the microfluidic component with sufficient precision. In many cases, therefore, the microfluidic components are produced by methods derived from the field of silicon technology. It is necessary to structure and connect two to three silicon wafers in order to form the necessary structures of a microvalve or a micropump. Due to the hardness of the silicon, microfluidic components produced therefrom are not particle-tolerant, so that, for example, particles stuck in the valve region can prevent the microvalve from closing.

Therefore, the object is to produce and provide a microfluidic component which can be operated more reliably and is easier and less expensive to produce.

The object is solved by the independent claims. Preferred embodiments are subject of the dependent claims. The manufacturing method according to one aspect

One aspect of the present invention relates to a method for producing a microfluidic component, comprising the steps:

- Providing a membrane holder with a membrane holder top, which is designed to be connected to an actuator, a

Membranhalterunterseite, which is designed to be connected to a flow element and at least one membrane holder opening, which has on the membrane holder top each have a diameter D ₀ and on the membrane holder bottom each having a diameter D _u ; - Forming at least one resilient, in particular elastically deformable, membrane in the membrane holder opening; Providing an actuator element with at least one actuator;

- Connecting the at least one Aktuationselementes with the membrane holder top of the membrane holder, so that the membrane is at least partially disposed on at least one actuator, so that the membrane can be actuated by the actuator;

- Providing a flow element with at least one flow channel;

Connecting the flow element with the membrane holder bottom side of the membrane holder so that the at least one membrane is at least partially disposed on at least one flow channel, so that the wall of the flow channel through the actuatable membrane in a valve seat is mechanically contacted.

Advantageously, the microvalve is simple and inexpensive to manufacture without consuming steps or using expensive materials. The formation of the resilient membrane in the membrane holder results in a particularly reliable and durable attachment of the membrane. Furthermore, different materials can advantageously be used for the membrane and the membrane holder, which can be selected according to their function. In particular, the membrane holder may be in one piece. Furthermore, the membrane holder may be made of metal, in particular stainless steel, or of a polymer, in particular of polymethylmethacrylic or acrylic glass or polyimide. Further advantageously, the shape of the membrane is complementary to the Membrane holder opening of the membrane holder. In other words, it is easy to form a diaphragm having the diameter D ₀ on the diaphragm holder upper side and the diameter D _u on the diaphragm holder lower side. By forming the membrane in the membrane holder opening further advantageously creates an intimate connection between the formed membrane and the membrane holder.

The diameter D _u is in particular approximately equal to the Durchflußkanaldurchmesser. In the case of microfluidic components in the context of this application, the diameter D _{u is} in a range from about 100 μm to about 1000 μm.

The region of the flow channel at which the membrane is arranged and the wall of the flow channel mechanically contacted in the actuation position is referred to as a valve seat.

definitions

For ease of understanding the invention, a variety of terms are defined by way of example below.

The membrane holder has a substantially flat shape. For the unambiguous description of directions and geometric relationships, it will be assumed in the following description that the substantially planar membrane holder is defined by the two orthogonal direction vectors of the x and y direction of a Cartesian coordinate system. Perpendicular to this, the z-direction extends upwards, i. against the direction of gravity. Accordingly, the relative positional terms are defined such that an upper position is spaced from the lower position substantially in the z direction as viewed from the lower position.

Extension, force and / or displacement direction (s) can be specified with respect to a coordinate system. In the following description, when used in conjunction with a directional indication, the term "substantially" means that the direction to be indicated is less than about ± 20 degrees, preferably less than about ± 15 degrees, of said reference direction less than about ± 10 degrees, and most preferably deviates by less than about ± 5 degrees, in particular by less than about ± 2 degrees. The term "substantially" may in particular describe a slight deviation from a desired value, in particular a deviation within the manufacturing accuracy and / or in the context of the necessary accuracy, so that an effect is maintained as it is present at the desired value. The term "substantially" may therefore include a deviation of less than about ± 30%, less than about ± 20%, less than about ± 10%, less than about ± 5%, less than about ± 2%, preferably less than about ± 1% of a setpoint or setpoint position, etc. The term "substantially" includes the term "identical", ie without deviation from a setpoint, a desired position, etc.

When the term "about" is used in the following description in connection with an indication in a unit of degree, this means, in particular, that the value to be indicated falls by less than ± 10%, and preferably by less than ± 5%, from the specified value. more preferably by less than ± 2%, more preferably by less than ± 1%, in particular by less than ± 0.5%.

The term "diameter" is, as far as it is not to be understood in the sense of a circle diameter, to be understood as the maximum extent along a direction.

For example, a 1 mm square opening according to this definition has a diameter of V 2 mm.

The aforementioned positions and directions are exemplary and, in particular, serve as a reference for describing e.g. from the side of the membrane holder and / or for the determination of directions, for example to indicate clearly definable or determinable coordinates. If necessary, other positions or a different coordinate system can also be used.

Preferred embodiments of the manufacturing process

Preferably, the diameter D _{0 is} greater than the diameter D ₁₁ . In particular, the membrane holder opening may be conical, for example by a conical cutting of the membrane holder opening the membrane holder or by drilling or lowering a conical membrane holder opening by means of a conical drilling or countersinking tool in the, in particular plate-shaped, membrane holder. Particularly preferably, the ratio of the diameter D _o / D _{u is} preferably greater than 1, 1, more preferably greater than 1, 2, greater than 1, 4, greater than 2, greater than 2.8 and in particular greater than 4.

Advantageously, the membrane held therein is prevented by an example conical design of the membrane holder opening, downwards

that is, against the z direction, when the diaphragm is actuated by applying a force to the diaphragm against the z direction, i. e. deformed or displaced against the z-direction is.

Further advantageously, the contact area between the membrane holder and the membrane is increased, so that the binding force between the two is also increased when the specific binding force per unit area between the membrane holder and membrane remains constant.

Preferably, the method further comprises the steps of: providing a lower membrane support layer;

Providing an upper membrane carrier layer;

- Forming at least one lower membrane carrier opening in the lower membrane carrier layer, each having a central axis M _u and one each

Diameter D _u ;

Forming at least one upper membrane carrier opening in the upper membrane carrier layer, each having a central axis M ₀ and each having a diameter D ₀ ; - Connecting the upper membrane carrier layer with the lower

Membrane carrier layer to form the membrane holder, so that the central axes M _u and M ₀ substantially coincide, so that the lower membrane carrier opening and the upper membrane carrier opening form the membrane holder opening.

A membrane carrier layer is essentially a flat, flat or plate-shaped workpiece, in particular a foil, which extends substantially parallel to the xy plane. The layer thickness or strength of Membrane carrier layer along the z-direction is more preferably less than about 1000 microns, more preferably less than about 500 microns, more preferably less than about 300 microns, more preferably less than about 100 microns, and in particular less than about 30 microns. Particularly preferably, the lower and upper membrane carrier layer consist of a polymer, in particular a polyimide.

In two membrane carrier layers, in particular circular, openings with different diameters D _u and D _{0 are} formed, wherein D _{u is formed} as a smaller diameter. The membrane carrier layer with the smaller opening having the diameter Du becomes the lower membrane carrier layer, the remaining membrane carrier layer thus becomes the upper membrane carrier layer. The membrane carrier layers are superimposed and connected to one another such that the central axes M _u and M _{0 of} the openings, in the case of circular openings, these are the cylinder axes of the openings, substantially coincide. That is, the offset between the center axes M _u and M _{o is} less than about 20% of the diameter D _u , more preferably less than about 10% or about 5% of the diameter D _u .

For non-circular or cylindrical openings, the central axis of the opening is defined by the fact that the central axis is parallel to the z-direction and through the geometric center of the opening.

Advantageously, a membrane holder opening can be produced particularly simply by, in particular rectangular, cutting two openings into the membrane carrier layers by means of a blade or a laser beam, in particular by machine. By connecting the two membrane carrier layers, the membrane holder is then formed, wherein the connection can be made in particular by gluing, laminating, welding or vulcanization.

The membrane advantageously has an enlarged bearing surface on the lower membrane carrier layer. In order to keep the membrane safe under high pressure load of about 10O kPa to about 50O kPa, the ratio of

Diameter DQ / D _U preferably greater than 1, 1, more preferably greater than 1, 2, greater than 1, 4, greater than 2, greater than 2.8, greater than 4, in particular greater than 5.

Preferably, the lower membrane support layer and / or the upper membrane support layer is coated on at least one side with an adhesive, and the bonding of the upper membrane support layer to the lower membrane support layer is effected by the bonding.

Particularly preferably, the adhesive may be a hot melt adhesive, in particular an acrylic monomer, which is thermally crosslinked. In particular, the temperature is in connecting the membrane support layers in a range of about 100 ⁰ C to about 200 ° C. The compound is preferably performed using Walzenlamination or by pressing.

Advantageously, the connection between the membrane carrier layers by the adhesive is particularly easy and reliable to produce.

Preferably, the method further comprises the steps of: - placing a cover on the membrane holder in order to close the membrane holder opening on one side; Arranging a template on the unlocked side of the membrane holder opening, wherein the template has a substantially parallel to the at least one membrane holder opening template opening, so that the membrane holder outside the membrane holder opening is substantially completely covered.

By the, in particular flush, closure of the membrane holder opening on one side, a substance can be introduced into the membrane holder opening via the still accessible side of the membrane opening, which subsequently forms the membrane. This substance is prevented by the cover at an exit from the membrane holder opening. The cover is expediently arranged on the membrane holder underside.

In order to protect the membrane holder during filling of the substance and the subsequent Aufrakeln from contamination by the substance, the template is placed on the uncovered side of the membrane holder opening. Advantageously, the formation of the membrane from a still liquid, further solidifying substance allows the formation of a connection between the membrane and the membrane holder. An additional adhesive is not necessary as opposed to inserting a prefabricated membrane into the membrane holder opening.

Particularly preferably, the template consists of metal. The opening of the template with the diameter D ₀ can be formed in particular by a (photo) lithographic method. In particular, the opening in a metal foil can be formed by an etching bath.

Preferably, the method further comprises the step of: lolling an elastically solidifying substance to form the membrane. Advantageously, the doctoring of the substance is particularly simple and to carry out with little effort.

Preferably, the method further comprises the steps of: - placing a mold on the membrane holder, the mold to each membrane holder opening on the membrane holder top each have a substantially congruent to this recess and in each case at least one inlet and outlet, which the recess with the exterior of the mold connect; Feeding a liquid elastically solidifying substance into the cavity formed by the membrane holder, the cover and the mold; - Solidifying the liquid substance to form the membrane.

In particular, the mold is arranged on the membrane holder top such that each congruent recess of the mold coincides with the associated membrane holder opening. In this position, the mold is pressed or glued to the membrane holder, so that a substantially fluid-tight, releasable mechanical contact between the mold and the membrane holder is formed.

The mold has at least one supply line and at least one discharge, which in each case establish a connection between the exterior and the

Cavity formed by the mold, the membrane holder and the cover becomes. In particular, the mold consists of polymethyl methacrylate (PMMA) or acrylic glass. Particularly preferably, the recess of the mold is formed substantially frusto-conical.

Preferably, via the feed line, a liquid, elastically solidifying substance is introduced into the cavity, wherein the air in the cavity can escape via the discharge line. The supply of the liquid substance is stopped as soon as the substance emerges from the discharge. In particular, however, both the supply line and the discharge can serve to supply the liquid substance or to remove the air.

Particularly preferably, the supply of the liquid elastically solidifying substance takes place in the following two steps. In the first step, the liquid substance is supplied by means of the dispensing tip, which is introduced into the mold through one of the supply lines or through one of the discharge lines. In this case, the dispensing tip is preferably brought close to the cover, whereby the cavity between the mold and the membrane holder can be filled with the liquid substance from its lowest point. Advantageously, this prevents the inclusion of air bubbles.

Before the supplied amount of the liquid substance reaches a mouth hole of an inlet or outlet, the dispensing tip is removed from the mold, so that in a second step the supply of the liquid substance via one of the supply lines, wherein the dispensing tip preferably does not protrude into the cavity, but only partially introduced into the supply line.

Advantageously, the selection of possible liquid elastically solidifying substance in this method for producing the membrane is particularly extensive.

Preferably, the cover is soluble by a solvent and / or substantially force-free detachable by a solvent. Conveniently, the formed membrane or the membrane holder is not, even partially, dissolved by the solvent. Most preferably, the solvent is water.

The cover is particularly preferably a film, in particular a polyester film, which is coated with polyvinyl alcohol and / or polyvinylpyrrolidone is. The coating is water-soluble, so that the cover detachable without force from the membrane holder, that is detachable by water, is.

Advantageously, the cover can be detached from the membrane holder and from the formed membrane without the action of force, so that damage to the membrane is prevented.

Preferably, the method comprises dispensing a liquid elastically solidifying substance from the edge of the membrane holder opening towards the center, in particular helically, so that the membrane holder opening is closed. Particularly preferably, the edge of the membrane holder opening is substantially completely covered by the elastically solidifying substance and in particular the membrane holder opening is substantially completely filled by this substance.

This alternative type of membrane training advantageously requires neither a cover nor a template. However, the choice of membrane-forming substances is additionally limited by viscosity, since the membrane-forming substance must be flowable on one hand to form a smooth membrane surface, but on the other hand must be strong enough to stay in the predetermined position in the membrane holder opening until the curing process is complete is. Furthermore, the membrane holder must not rest on a work surface.

Advantageously, by accurately metering the amount of substance, a substantially flat membrane can be formed which has substantially no surface structure. Furthermore, contamination of the membrane holder can be avoided by the membrane-forming substance.

Preferably, the method comprises forming a drop of a liquid elastically solidifying substance at a dispensing tip, the droplet having a diameter greater than or equal to the diameter D _{u of} the membrane holder opening at the membrane holder bottom (21), and disposing the drop at the membrane holder opening so that the membrane holder opening is closed. In this case, the dispensing tip is positioned at a sufficient distance from the membrane holder opening to be closed when a sufficient amount of the liquid elastically solidifying substance is expelled from the dispensing tip to form the drop, so that the substance initially does not come into contact with the membrane holder. After a predetermined amount of the liquid elastically solidifying substance emerges from the dispensing tip and the drop is formed, the dispensing tip is displaced toward the membrane holder opening to locate the drop at the membrane holder opening so that it is closed. After curing of the liquid substance, the elastic membrane is formed.

This alternative type of membrane training advantageously also requires neither a cover nor a template. Further advantageously, there is a larger selection of membrane-forming substances compared to the method described above, since the restriction with respect to the viscosity is less engraved.

Preferably, the elastically solidifying substance for forming the membrane is a polymer.

Preferably, the elastically solidifying substance for forming the membrane is silicone. In particular, the membranes can be formed of a technical silicone, which is used as a sealant and adhesive material.

Advantageously, this material has particularly good adhesion to surfaces, so that a secure connection with the membrane holder can be formed. Further advantageously, the elongation at break is about 500%. Since silicone is generally transparent, advantageously the quality of the membrane formed in the membrane holder can be easily assessed.

Further preferably, the solidification or structural cross-linking of the silicone takes place at an elevated temperature of preferably about 60 ° C to about 120 ° C, more preferably from about 75 ° C to about 105 ° C, especially about 90 ° C.

Preferably, the method comprises the steps: Providing a base;

Providing a flow channel layer having at least one recess; - Connecting the flow channel layer to the base, whereby the flow element is formed with the flow channel.

The base is essentially a flat planar or plate-shaped workpiece, which can be both rigid and flexible. In particular, the base may be a polymer plate, a metal plate or a (polymer or metal) foil with the base extending substantially parallel to the x-y plane.

The term rigid in relation to flexible in the context of the invention is understood to mean that the modulus of elasticity E and / or the shear modulus G of the rigid body by at least a factor of 2, preferably at least a factor of 5, factor 10 or factor 100, and particularly preferred at least a factor of 1000 greater than the modulus of elasticity E and / or the shear modulus G of the flexible body in comparison. In particular, a body is considered as rigid in itself, if its modulus of elasticity E and / or the shear modulus G greater than 1x10 ⁸ Nm ^"2, greater than 5x10 ⁸ Nm ^'2, greater than Ixio ⁹ ^{Nm' 2,} greater than 5x10 ⁹ ^{Nm" 2} ^"2. in particular, a body as per se is considered flexible if its modulus of elasticity e and / or the modulus of rigidity G is less than IxI O ⁷ ^Nm" and in particular greater than 1x10 ¹⁰ Nm ^2, less than 5x10 ⁶ Nm ^"2, less than IxI O ⁶ Nm ^"2 and in particular less than 5x10 ⁵ Nm ^{" 2} is.

Parallel to the base, the Durchflußkanalschicht is arranged, which is also a substantially flat planar or plate-shaped workpiece, in particular a film. The layer thickness of the flow channel layer along the z-direction is particularly preferably less than about 1000 μm, more preferably less than about 500 μm or less than about 250 μm or less than about 150 μm, more preferably less than about 100 or less than about 50 microns or less than about 25 microns or less than about 10 microns, and more preferably less than about 5 microns. Particularly preferably, the flow channel layer consists of a polymer, in particular a polyimide.

In the Durchflußkanalschicht at least one recess is formed, which later forms at least partially a flow channel. The Recess can be particularly easily generated by, in particular rectangular, cutting by means of a blade or a laser beam. Preferably, the recess extends substantially, in particular in a straight line, along a longitudinal direction Li.

By connecting the base with the Durchflußkanalschicht then the flow element is formed, wherein the compound can be done in particular by gluing, laminating, welding or vulcanization.

Particularly preferably, the base and / or the flow channel layer is coated on at least one side with an adhesive and the bonding base with the Durchflußkanalschicht by gluing. In particular, the adhesive may be a hot melt adhesive as described above. Advantageously, the connection by the adhesive is particularly simple and reliable to manufacture.

Preferably, the method of forming the flow element comprises providing a flow channel layer and forming at least one flow channel by material removal processing.

As an alternative to the above-described embodiment of the flow-through element by connecting a base to a flow-through layer, the flow-through element can be formed in one piece. The at least one flow channel can then be formed by a material-removing machining, for example by machining, shaving and / or eroding machining or by etching, depending on the material of the flow element. Advantageously, eliminates in this alternative, the step of bonding.

Preferably, the method comprises applying a wetting filler to the valve seat so that the free surface of the wetting filler assumes a continuously curved shape due to surface tension and then curing the wetting filler.

In particular, the flow element can be formed with at least one flow channel, wherein the flow channel has a substantially rectangular cross section, so that the flow channel through a

Membrane essentially can not be fully closed, as a Fluid in the corner regions of the flow channel can find a flow path. Preferably, the flow channel can be formed with a trapezoidal cross-section.

Advantageously, a liquid filler dispensed into the flow passage rounds off the corners due to the surface tension of the filler. The membrane is therefore better at the wall of the flow channel and therefore closes the flow channel better.

Preferably, the wetting filler is a UV-curing adhesive, and curing is accomplished by exposure to ultraviolet light.

Preferably, the actuation element is formed by the following steps:

- Providing a Aktuationskanalschicht, with at least one Aktuationskanal as an actuator;

- Connecting the Aktuationskanalschicht with the membrane holder top of the membrane holder, so that the membrane is at least partially disposed on at least one Aktuationskanal.

Further preferably, the step additionally takes place:

- Connecting a cover layer with the Aktuationskanalschicht.

The cover layer is essentially a flat, flat or plate-shaped workpiece, which can be both rigid and flexible. In particular, the base may be a polymer plate or foil, with the base extending substantially parallel to the x-y plane.

Parallel to the cover layer, the Aktuationskanalschicht is arranged, which is also a substantially flat planar or plate-shaped workpiece, in particular a film. The layer thickness or strength of the Aktuationskanalschicht along the z-direction is particularly preferably less than about 1000 microns, more preferably less than about 500 microns or less than about 250 microns or less than about 150 microns, more preferably less than about 100 or less than about 50 microns or less than about 25 microns or less than about 10 microns, and more preferably less than about 5 microns. Particularly preferably, the Aktuationskanalschicht of a polymer, in particular a polyimide. In the Aktuationskanalschicht at least one recess is formed, which later forms at least partially an actuation channel. The recess can be particularly easily generated by, in particular rectangular, cutting by means of a blade or a laser beam. Preferably, the recess extends substantially, in particular in a straight line, along a longitudinal direction L ₂ .

By connecting the cover layer with the Aktuationskanalschicht then the Aktuationselement is formed, the connection can be made in particular by gluing, laminating, welding or vulcanization.

Particularly preferably, the cover layer and / or the Aktuationskanalschicht is coated at least on one side with an adhesive and the bonding cover layer with the Aktuationskanalschicht by gluing. In particular, the adhesive may be a hot melt adhesive as described above. Advantageously, the connection by the adhesive is particularly simple and reliable to manufacture.

Alternatively, the actuation element can be formed in one piece, the at least one actuation channel being formed by a material-removing or material-displacing method, for example milling, planing or hot stamping. Alternatively, the actuation element can also be formed in one piece by injection molding.

Preferably, the at least one flow channel is arranged to extend substantially along a first longitudinal direction L ₁ and the at least one actuation channel is arranged to extend substantially along a second longitudinal direction L ₂ . In this case, the angle θ enclosed between the longitudinal directions L1 and L2 is preferably different from zero.

More preferably, the included angle θ is between about 15 degrees and about 90 degrees. In particular, the included angle θ is about 90 degrees, about 60 degrees, or about 45 degrees.

Advantageously, a displacement or deformation of the flow channel and thus a reduction of Durchflußkanalquerschnitts occurs only in the region of Membrane on. A pressure difference between the Aktuationskanal and the flow channel leads due to the large distance in the case of a non-zero angle only to a small deformation of the flow channel.

The microfluidic valve according to one aspect

One aspect of the present invention relates to a microfluidic valve for flow control of fluids comprising:

an actuation element with at least one actuator, a flow element with at least one flow channel,

a membrane holder having a membrane holder top connected to the actuator, a membrane holder bottom connected to the flow member, at least one membrane holder opening and at least one actuatable resettable, particularly elastically deformable membrane disposed in the at least one membrane holder opening the at least one membrane with a diaphragm underside with the diameter D _{u is arranged} at least partially on the at least one flow channel, wherein the at least one membrane with a membrane top with the diameter D ₀ at least partially disposed on the at least one actuator, wherein the diameter D ₀ is greater than the diameter D _u and wherein the wall of the at least one flow channel through the at least one actuatable membrane in a valve seat is mechanically contacted, so that the at least one flow channel substantially completely by di e membrane is closable.

Advantageously, in the membrane of the microvalve is formed resilient. That is, the membrane can be transferred by applying a force K by the, in particular one-piece, actuator along an actuating direction B from a rest position to an actuated position, the membrane returns to the rest position when the force K is no longer applied. In particular, the membrane is substantially elastic and only to a small extent plastically deformable, so that the membrane is deformed substantially elastically in the Betätigungspositon and due to their inherent elastic restoring force returns substantially to the original rest position when the deforming force K no longer at the Membrane is created. Therefore, the microvalve is advantageously particle-tolerant, since a foreign body in the region of the valve seat can not prevent the transition of the membrane from the rest position into the actuated position. Rather, the membrane is deformed by the foreign body in the operating position accordingly. The flow channel can be substantially completely closed despite the foreign body in the region of the valve seat.

The term "actuating direction" in the sense of this invention describes a direction along which a force can be applied and a body, in particular the membrane, displaced or deformed, for example, the actuating direction B substantially perpendicular to the cover layer or the membrane holder of the microvalve It is also possible that the direction of actuation B with the reference plane, for example the membrane holder, includes an angle between about 85 ° and about 60 °.

The membrane is tapered along the direction of actuation, so that the membrane is advantageously kept particularly reliable when the membrane is acted upon by a force K along the direction of actuation B in order to be transferred to the actuation position.

The term "rest position", as used in the context of the present invention, describes, for example, the state or the position of one or more parts or elements of the microvalve, in particular the membrane In particular, this invention describes the position of the diaphragm when the microvalve is in an unused condition (as-prepared condition) or in an opened condition. In other words, in the rest position, the membrane does not protrude into the flow channel, so that a fluid can pass through the microvalve substantially unhindered.

The term "actuation position" as used in the context of the present invention describes a state or position of the aforementioned parts or elements, in particular the membrane, different from the aforementioned state or the aforementioned position. In contrast to the rest position, a force K is exerted on one or more parts or elements of the microvalve in the actuation position. In particular, the membrane is in the actuating position at least partially deformed or displaced along the direction of actuation B and projects at least partially into the flow channel. In this case, the regions of the membrane which are arranged close to the central axis of the membrane holder opening are displaced or deformed more than the regions of the membrane which contact the membrane holder.

The flow channel is in the actuation position substantially, in particular completely, closed by the membrane. In other words, a fluid in the actuation position can not flow along the flow direction F through the flow channel, i. the microvalve substantially completely blocks the flow channel. In this case, the actuating direction B and the flow direction F are preferably substantially perpendicular to each other.

The term "actuation position" as used in the context of the present invention thus describes in particular a position according to which the membrane mechanically contacts the wall of the flow channel, in particular in the region of the valve seat, in particular a direct mechanical contact between the membrane and the membrane Valve seat produced.

Particularly preferably, the membrane holder is integrally formed. Further preferably, the membrane holder of the microvalve comprises a lower membrane carrier layer, in which at least one lower membrane carrier opening, each having a central axis M _α and a diameter D _{u is} formed and an upper membrane carrier layer in which at least one upper membrane carrier opening, each having a central axis M ₀ and each a diameter D _{0 is} formed, wherein the upper membrane support layer is connected to the lower membrane support layer so that the central axes M _u and M ₀ substantially coincide, so that the lower membrane support opening and the upper membrane support opening form the membrane holder opening.

The lower membrane carrier layer and / or the upper membrane carrier layer is preferably coated with an adhesive on at least one side, and the upper membrane carrier layer is adhesively bonded to the lower membrane carrier layer by means of the adhesive.

Preferably, the adhesive is a hot melt adhesive. Preferably, the membrane is made of a polymer and in particular of an elastomer.

Preferably, the membrane consists of a silicone or silicone mixture.

Preferably, the microvalve comprises a base and a flow channel layer having at least one recess, the flow channel layer being connected to the base.

Preferably, the flow element is integrally formed with the at least one flow channel.

Preferably, the at least one flow channel is at least partially formed with a continuously curved, in particular a conical or trapezoidal or semicircular, cross-section.

Preferably, the valve seat is formed by a cured filler at least partially continuously curved.

Preferably, the cured filler is a UV-curing adhesive.

The actuation of the membrane can be effected in particular pneumatically, hydraulically, mechanically, electro-magnetically, thermoelectrically and / or piezoelectrically. The mechanical actuation can be done, for example, by plungers, which are controlled via cams. Alternatively, the plunger may also be controlled electromagnetically, e.g. through a surrounding coil. A thermoelectric actuation can be carried out by electrically heating up a fluid or solid volume, which actuates the membrane as a result of the thermal expansion or the increase in volume when the state of matter (evaporation) changes. Alternatively, the expansion of a solid and the resulting actuation can also take place by means of the piezoelectric effect. In particular, the actuation of the membrane may also be effected by pressurization by means of a fluid, i. of a gas or a liquid.

Preferably, the actuation element comprises an actuation channel layer with at least one actuation channel and a cover layer, wherein the actuation channel layer with the membrane holder top of the membrane holder and wherein the cover layer is connected to the Aktuationskanalschicht.

Further preferably, the cover layer and / or the Aktuationskanalschicht rigid or relative to the flexible membrane are rigid, so that the cover layer and / or the Aktuationskanalschicht not deform substantially when the pressure in Aktuationskanal is increased. Advantageously, such an actuation element allows an improved actuation of the membrane, since only small pressure losses occur by deformation of the actuator.

Particularly preferably, the actuation element can be formed in one piece.

Preferably, the cover layer and / or the Aktuationskanalschicht is coated at least on one side with an adhesive and the cover layer bonded to the Aktuationskanalschicht means of the adhesive.

Preferably, the at least one flow channel extends substantially along a first longitudinal direction Li and the at least one actuation channel substantially along a second longitudinal direction L ₂ , the angle θ included between the longitudinal directions L1 and L2 being different from zero.

Advantageously, a displacement or deformation of the flow channel wall occurs only in the region of the membrane. A pressure difference between the Aktuationskanal and the flow channel leads due to the large distance between the two in the case of a non-zero angle to a small deformation of the membrane holder and thus the flow channel.

Preferably, the actuation element of the microvalve for each membrane comprises a plunger associated with the respective membrane as the preferred actuator. Advantageously, the actuation in this case is particularly simple to perform mechanically by the use of cams or electromechanically by coil-magnet systems.

The microfluidic pump according to one aspect One aspect of the present invention relates to a microfluidic pump or micropump for moving fluids (ie, gases and / or liquids), wherein the micropump has at least three microvalves according to the invention. In particular, the at least three microvalves are operatively connected in series along the flow channel. The pumping of the fluid is carried out according to the principle of peristalsis by cyclically opening and closing the microvalves. Advantageously, the pumping direction can be reversed by reversing the opening and closing cycle.

Preferably, the micropump is in one piece. Particularly preferably, the micropump is formed from polymer films which are glued or laminated together and thereby form a part.

The microfluidic system according to one aspect

One aspect of the present invention relates to a microfluidic system comprising at least one microfluidic component according to the invention (ie at least one microvalve according to the invention and / or at least one microfluidic pump according to the invention), at least one flow channel for a fluid and at least one functional component associated with the fluid in the flow channel is contactable includes.

"Contacted" in the sense of the invention is understood to mean that there is a mechanical and / or electrical and / or thermal contact between the fluid in the flow channel and the functional component.

Preferably, the functional component is a sensor for determining physical, chemical and / or biological properties of the fluid.

In particular, the fluid can be supplied to the sensor by means of the flow channel, so that the sensor can, for example, measure the temperature, the pressure, the density, the electrical conductivity, the viscosity, the coloring, the chemical composition, the type and amount of substances dissolved in the fluid and / or or gases and / or particles present in the fluid and / or colloids and the number of microbiological organisms present in the fluid.

Preferably, the functional component is an electronic component, wherein by means of the flow channel (47), a fluid for cooling the electronic component is provided.

Further preferably, a cooling fluid is supplied to the electronic component at least during its operation in order to dissipate the heat-converted electrical power loss of the electronic component thereof. The cooling fluid is preferably a fluid having a high heat capacity. More preferably, the cooling fluid may also be a liquid having a boiling point of less than or equal to 100 ⁰ C, more preferably less than or equal to 80 ⁰ C, in particular less than or equal to 40 ⁰ C. Further preferred is a cooling fluid with a high enthalpy of enthalpy or energy. Preferably, the evaporation energy is greater than 350 kJ / kg, more preferably the evaporation energy is greater than 450 kJ / kg, greater than 800 kJ / kg, in particular greater than 2200 kJ / kg. In particular, the cooling fluid may be water or ethanol. The cooling of the electronic component can preferably be carried out by merely heating the cooling fluid or by evaporating or evaporating the cooling fluid.

The present invention is not limited to the above embodiments described by way of example. Rather, individual elements and / or features of each described aspect and / or each described embodiment may be combined with individual elements and / or features of the further aspects and / or further embodiments in any manner and thus further aspects and / or embodiments may be formed ,

Fiαurenbeschreibunq

Hereinafter, preferred embodiments of the present invention will be described by way of example with reference to the accompanying drawings. Show it:

Figures 1a-i: cross sections through the elements, semi-finished products and the microvalve in the rest position according to an embodiment in the individual steps of the production;

Figure 1j: a cross section through the microvalve in the

Operating position; Figures 1 k - I: a cross section through individual elements of the microvalve in an alternative method of forming the membrane;

Figures 2a-g: cross sections through the elements, semi-finished products and the microvalve in the rest position according to an embodiment in the individual steps of the production;

Figure 2h: a cross section through the microvalve in the

Operating position;

Figures 3a-d: cross-sections through the elements, semi-finished and the microvalve in the rest position according to an embodiment in the individual steps of the production;

FIG. 4 shows a cross section through a micropump;

Figure 5: an embodiment of a microfluidic system.

1a-i show the individual steps of a preferred production method of a microvalve 1. As shown in FIG. 1a, in a first step, a lower membrane support layer 3 is provided which extends substantially parallel to the xy plane and in which at least one lower membrane support opening 5 is formed. Each lower membrane carrier opening 5 has a central axis M _u , which extends substantially parallel to the z-direction, and a diameter D _u . Furthermore, an upper membrane carrier layer 7 is provided, in which at least one upper membrane carrier opening 9 is formed. Each upper membrane support opening 9 has a central axis M ₀ , which extends substantially parallel to the z-direction, and a diameter D ₀ . In particular, the diameter D _{0 of} the upper membrane carrier layer opening 9 is greater than the diameter D _u , preferably by a factor greater than 1.5.

The upper and lower membrane carrier layers 3, 7 are preferably polyimide substrates having a thickness of about 25 μm to about 50 μm. The surfaces of the membrane carrier layers 3, 7 may be smooth, profiled, rough and / or differently structured. In particular, the upper membrane support layer 7 is coated with an adhesive 11 on the side facing the lower membrane support layer 3. The membrane carrier layers are arranged prior to the mutual connection such that the central axes M _u and M ₀ substantially coincide and then temporarily fixed in this arrangement. The temporary fixing can be done for example by registration pins, clamps or adhesive strips, so that mutual displacement is prevented.

In order to form the membrane holder 13, the upper membrane carrier layer 7 is bonded to the lower membrane carrier layer 3 by gluing or laminating. The bonding process may include heating and compressing the membrane support layers. If a hotmelt adhesive is used as the adhesive 11, the membrane carrier layers and the intermediate melt adhesive must be heated to temperatures of about 100 ° C to about 200 ° C to liquefy the hot melt adhesive and perform the bonding by the subsequent crosslinking of the hot melt adhesive. After the formation of the membrane holder 13, the lower membrane carrier opening 5 and the upper membrane carrier opening 9 together form the membrane holder opening 15.

The membrane holder 13 has a membrane holder top 17 which is adapted to be connected to an actuator element 19 and a membrane holder bottom 21 which is adapted to be connected to a flow element 23.

As shown in Figure 1 b, a cover 25 is disposed on the membrane holder bottom 21 to the membrane holder 13 to close the membrane holder opening 15. The cover 25 is preferably a polyvinyl alcohol-coated polyester film. The cover 25 is due to the water-soluble coating 27 in a later step in a water bath from the membrane holder 13 detachable force-free.

At the membrane holder top 17, a template 29, in particular a metal template, is arranged on the membrane holder 13 in order to cover the edge of the membrane holder opening 15. Therefore, the template 29 has, for each membrane holder opening 15, in each case a substantially congruent template opening 31. Subsequently, a liquid silicone mixture 33 is applied to the template 29 and introduced by means of a doctor blade 34 in the sealed membrane holder opening 15 or scrape. The membrane holder top 17 is protected by the template 29 during the doctoring against contamination by the silicone mixture 33.

As shown in FIG. 1 c, the membrane 37 is formed by the hardened silicone mixture 33 in the membrane holder opening 15. The curing takes place at an elevated temperature of about 90 ° C in order to promote the cross-linking of the individual silicone molecules and to improve the mechanical strength of the membrane 37. The membrane 37 is more flexible or more elastic than the membrane holder. That by acting in each case the same magnitude, the same direction of force K, the membrane 37 is spatially displaced or deformed more than the membrane holder 13. In other words, the membrane holder 13 is substantially rigid relative to the membrane 37.

The template 29 and the cover 25 are again removed from the membrane holder 13 after the formation of the membrane 37, as shown in Figure 1d.

In the next step, as shown in FIGS. 1e and 1f, an actuation element 19 with an actuator 39 is arranged and fastened to the membrane holder 13. The actuation element 41 used in the embodiment shown comprises an actuation channel 41. The actuation channel 41 is formed by walls which are formed at least in regions by the membrane holder 13, an actuation channel layer 43 and a cover layer 45.

In the Aktuationskanalschicht 43 an actuation channel 41 is formed as a preferred actuator 39. The Aktuationskanalschicht 43 is connected to the

Membranhalteroberoberseite 17 of the membrane holder 13 glued, so that the

Membrane 37 is at least partially disposed on at least one Aktuationskanal 41. In other words, the membrane 13 partially forms the

Wall of the Aktuationskanals 41. Subsequently, the cover layer 45 is connected to the Aktuationskanalschicht 43 to close the Aktuationskanal 41 substantially fluid-tight, with the exception of at least one

Fluid connection in the cover layer 45 and the Aktuationskanalschicht 43, the is designed to supply the Aktuationskanal 41 with a fluid, ie a liquid or a gas. In other words, a fluid pressure can be built up via the fluid connection by means of the fluid in the actuation channel 41.

The combination of cover layer 45, Aktuationskanalschicht 43 and membrane holder 13 is preferably carried out by gluing. The covering layer 45 and Aktuationskanalschicht 43 shown are preferably coated on one side with a hot melt adhesive, so that the connection can be carried out by lamination at elevated temperature and elevated contact pressure.

As shown in FIG. 1g, in the next step, a flow element 23 with at least one flow channel 47 is provided. The flow element 23 is formed by a base 49 and a Durchflußkanalschicht 51 with a recess 53.

The Durchflußkanalschicht 51 is a flat layer, wherein the recess 53 forming cut surfaces through the Durchflußkanalschicht 51 are preferably at a right angle to the layer plane. Alternatively, the cut surfaces may also be at an angle greater than 0 degrees and less than 90 degrees to the layer plane.

The flow channel layer 51 is connected to the base 49, for example by gluing, and then forms the flow element 23. Alternatively, the base 49, with a suitable choice of material (eg dry resist Pyralux PC-1015 from DuPont for the base 49 and polyimide film LF-1030 also from DuPont for the flow channel layer 51, by rolling on the non-melt-coated side of the flow channel layer 51.

The adhesive coated side of the flow channel layer 51 is designed to be connected to the membrane holder bottom 21. The walls of the base 49, the Durchflußkanalschicht 51 and the membrane holder bottom 21 form at least partially the flow channel 47 after the connection. The region of the flow channel 47 on which the membrane 37 is arranged is referred to as valve seat 55.

As shown in Figure 1g, the flow channel 47 made by the described process has a rectangular or trapezoidal shape Cross-section. A butt edge 57 between the base 49 and the flow channel layer 51 is configured substantially square. This embodiment may result in that the flow channel 47 can not be completely closed and remains in the region of the abutting edge a flow path with a small cross-section. Preferably, the abutting edge 57 is therefore rounded.

To round this corner at the abutting edge 57, as shown in Figure 1 h, a wall wetting, liquid filler 59 can be applied. Due to the surface tension of the filler 59, the free surface forms a continuously curved shape. After curing of the filler 59, the corner of the abutting edge 57 and thus the wall of the flow channel 47 is rounded. The flow channel 47 facing surface of the cured filler is considered below as part of the wall of the flow channel 47. The rounding can take place along the entire abutting edge 57 or only in certain regions, in particular in the region of the later valve seat 55, i. in particular the region of the flow channel 47 which will mechanically contact the diaphragm in the operating position of the microvalve.

The filler 59 may be a solid substance at room temperature and molten before application, which hardens by cooling or solidification. Alternatively, the filler 59 could be a substance dissolved in a solvent that cures by evaporation of the solvent. Preferably, the filler 59 could be a UV-curing adhesive, with curing being accomplished by exposure to ultraviolet light.

As shown in Figure 1 i, after the curing of the filler 59, the flow element 23 is connected to the membrane holder bottom 21 of the membrane holder 13, so that the membrane 37 at least partially on the

Flow channel 47 is arranged. The wall of the flow channel 47 is then mechanically contacted by the actuatable membrane 37 in the valve seat 55.

The connecting of the flow channel 47 is effected by gluing, in particular by means of an adhesive with which the Durchflußkanalschicht 51 is coated.

Preferably, the Durchflußkanalschicht 51 is coated with a hot melt adhesive, so that the Durchflußelementes 23 with the membrane holder 13 through Laminating can be connected.

FIG. 1 i shows the microvalve 1 in the rest position, in which the membrane in particular does not protrude into the flow channel 47. The membrane 37 is deflectable by a force K along the direction of actuation B, wherein the actuating direction B is substantially parallel to the z-direction. This force K is generated by the fact that the Aktuationskanal 41 is acted upon by a pressure P. The pressure P acts omnidirectionally and thus exerts a force K in the direction of actuation B, the magnitude of the force K being proportional to the area of the diaphragm 37 which is acted upon by the pressure P. Since the membrane holder 13 and the actuation element 19 are rigid relative to the membrane 37, the omnidirectional pressure P essentially results in a deformation of the membrane 37 along the actuation direction B.

As shown in Figure 1 i, the flow channel 47 extends substantially along a first longitudinal direction L ₁ , which is in particular substantially parallel to the y-direction. Substantially perpendicular thereto, the actuation channel 41 extends along a second longitudinal direction L ₂ , which is in particular substantially parallel to the x-direction. That is, the angle θ included between the longitudinal directions L1 and L2 is about 90 degrees. This minimizes the area outside the membrane 37, in which the actuation channel 41 and the flow channel 47 are spatially separated only by the (small) layer thickness of the membrane holder 13. Thereby, a deformation of the membrane holder and thus the cross section of the Aktuationskanals 41 and the flow channel 47 is minimized, which arises due to a pressure difference between the Aktuationskanal 41 and the flow channel 47. By this preferred embodiment, the membrane holder 13 and thus the membrane 37 can be made thinner, since the membrane holder 13 must absorb lower mechanical loads.

Alternatively, the first and second longitudinal directions Li and L _{2 may} also include an arbitrary angle θ when the diaphragm holder 13 is appropriately designed to deform sufficiently little under the compressive loads involved.

FIG. 1j shows the microvalve 1 in the actuated position. The membrane 37 is deflected by a force K along the direction of actuation B against the z-direction, which acts on the membrane 37 due to the prevailing pressure in the actuation channel 41 P.

The membrane 37 is partially deformed or displaced in the actuation position along the direction of actuation B and protrudes partially into the flow channel 47. In this case, the regions of the membrane 37 which are arranged close to the central axis M _{0 of} the membrane holder opening 15 are displaced or deformed more strongly than the regions of the membrane 37 which contact the membrane holder 13.

The membrane is thereby deformed so that it contacts the wall of the flow channel 47 in the region of the valve seat 55 substantially completely mechanically. As a result, the flow channel 47 is substantially completely closed. As shown in Figure 1j, the continuously curved surface or surface of the membrane 37, which projects into the flow channel 47, nestles substantially conforming to the shape of the wall of the flow channel 47 at. Since the resilient diaphragm 37 is substantially elastically deformed in the transition from the rest position to the operating position, this deformation is reversible. This means that the membrane returns to the rest position when in the Aktuationskanal 47 no more pressure P is applied.

Since the membrane holder 13 and the actuator 19 are rigid relative to the membrane 37, the membrane holder 13 and the actuator 19 are substantially not displaced or deformed as compared to the rest position.

FIG. 1 k shows, analogously to FIG. 1 b, a cross section through the membrane holder during the formation of the membrane by means of an alternative method. As already shown in FIG. 1 b, the detachable cover 25 is arranged on the membrane holder 13 in order to close the membrane holder opening 15 on one side.

At the membrane holder top 17, a mold 65 is arranged on the membrane holder 13. The mold 65 faces each membrane holder opening 15 at the

Membranhalteroberseite 17 each a substantially congruent to this Recess 67 on. The mold 65 is disposed on the membrane holder top 17 such that the recess 67 of the mold 65 coincides with the membrane holder opening 15. In this position, the mold 65 is pressed against the membrane holder 13, so that there is a substantially fluid-tight, releasable mechanical contact between the mold 65 and the membrane holder 13. As an alternative to applying a sufficient contact pressure, an adhesive, in particular an adhesive tape, may be applied between the membrane holder top side 17 and the underside of the mold 65 in order to prevent penetration of silicone mixture 33 between the membrane holder top 17 and the underside of the mold 65 ,

The mold 65 is preferably made of polymethyl methacrylate (PMMA) or acrylic glass. The recess 67 of the mold 65 is preferably substantially frusto-conical. Further, the mold 65 has at least a lead 69 and a lead 71 which connect the recess 67 to the outside of the mold 65, respectively, so that a silicone compound 33 is supplied from the outside and the air trapped between the mold 65 and the membrane holder 13 is exhausted can. Preferably, the mouth hole of the lead 69 is disposed in the recess 67 near the contact surface between the mold 65 and the membrane holder 13. Further preferably, the mouth hole of the drain 71 is disposed in the recess 67 in a region remote from the contact surface between the mold 65 and the membrane holder 13, in particular the apex of the conical recess 67.

To form the membrane, a silicone mixture 33 can be introduced through the feed line 69 into the mold 65, the air trapped in the mold 65 escaping through the discharge line 71. The supply of the silicone mixture 33 is terminated as soon as silicone mixture 33 leaves the discharge line 71.

Preferably, the supply of the silicone mixture takes place in two steps. In the first step, the supply of the silicone mixture 33 takes place by means of a dispensing tip 35, which is introduced through the outlet 71 opening into the apex of the recess 67. The dispensing tip ^* 35 is preferably zoomed close to the cover 25, whereby the cavity between the mold 65 and the membrane holder 13 is filled from its lowest point with the silicone mixture. Advantageously, thereby the inclusion of air bubbles prevented.

Before the supplied amount of the silicone compound 33 reaches the mouth hole of the supply line 69, the dispensing tip 35 is removed from the cavity. During extraction of the dispensing tip 35, it is preferably dispensed continuously, which advantageously prevents the formation of a local underpressure which could cause the inclusion of air bubbles.

In a second step, the supply of the silicone mixture 33 via the supply line 69, wherein the dispensing tip 35 preferably does not protrude into the cavity, but is only partially introduced into the supply line 69. Preferably, the supply line 69 has a smaller diameter than the discharge line 71. Preferably, the silicone compound flow rate, i. the amount of silicone compound 33 supplied per unit time, the viscosity of the silicone mixture 33 adapted so that a substantially horizontal air-silicone mixture interface is formed in the cavity. This interface increases during the silicone compound supply to the upper edge of the recess 67 in the mold 65 and further into the discharge line 71. As soon as the silicone mixture 33 exits the discharge line 71, the supply of silicone mixture 33 is terminated.

FIG. 11 shows the membrane holder 13 provided with the cover 25 after the hardening of the silicone mixture and the removal of the mold 65

Hardening of the silicone mixture 33 to form the membrane 37 is preferably carried out at a temperature of about 90 ⁰ C. The preferred by this

Process formed membrane 37 is raised above the membrane holder top 17. The further design of the microvalve can then be carried out as described for FIGS. 1d-j.

FIGS. 2a-g show the individual steps of an alternative preferred production method of a microvalve 1. As shown in FIG. 2a, in a first step, a membrane holder 13 is provided, in which at least one membrane holder opening 15 is formed. Without limiting the generality, only the case of a membrane holder opening 15 will be considered below. The membrane holder opening 15 has a diameter D _u on the membrane holder bottom 21 and has a diameter on the membrane holder top 17 D ₀ . In particular, the diameter D _{0 is} greater than the diameter D _u , preferably by a factor greater than 1, 5. In other words, the membrane holder opening 15 is conical.

The membrane holder top 17 is adapted to be connected to an actuator element 19, and the membrane holder bottom 21 is adapted to be connected to a flow element 23.

As shown in Figure 2b, the membrane holder 13 is arranged on spacers, so that the membrane holder 13 does not rest with one side on a work surface. A liquid silicone mixture 33 is dispensed from the edge into the membrane holder opening 15. During the application of material, the dispenser tip 35 is moved at a suitable distance from the membrane holder 13 in a suitable way, so that the membrane holder opening 15 is filled with the silicone mixture 33 from the edge and, as shown in FIG. 2c, finally closed.

By a corresponding metering of the applied amount of the silicone mixture 33 as a function of the viscosity of the silicone mixture 33 and the travel speed and subsequent curing of the silicone mixture 33, a substantially flat membrane 37 in the membrane holder opening 15 can be produced with this method.

The diaphragm 37 has on its diaphragm underside a diameter D _u corresponding to the diameter D _{u of} the diaphragm holder opening 15 on the diaphragm holder underside 21. Analogously, the membrane 37 on its upper side of the membrane has a diameter D ₀ corresponding to the diameter D _{0 of} the membrane holder opening 15 on the membrane holder top 17.

To avoid contamination of the membrane holder advantageously neither a cover 25 nor a template 29 are necessary. The contamination is instead reliably prevented by precise control of the travel path of the dispenser tip 35.

As shown in FIGS. 2d and 2e, an actuation element 19 with an actuator 39 is subsequently arranged and fastened to the membrane holder 13.

The actuation element 19 used in the embodiment shown comprises an electric, in particular a piezoelectric, actuator 39. The actuator 39 and its electrical leads 61 are arranged within an actuation channel layer 43 on the membrane 37.

The Aktuationskanalschicht 43 is bonded to the membrane holder top 17 of the membrane holder 13. Subsequently, a cover layer 45 is connected to the Aktuationskanalschicht 43. The cover layer 45 is preferably substantially rigid to form an abutment for the actuator 39.

The combination of cover layer 45, Aktuationskanalschicht 43 and membrane holder 13 is preferably carried out by gluing, as described for Figures 1 e and 1f.

As shown in FIG. 2f, in the next step, a flow element 23 with at least one flow channel 47 is provided. The flow element 23 is integrally formed, wherein the flow channel 47 is formed by removing material in the flow element 23. The cross section of the flow channel 47 is in particular trapezoidal or channel-shaped or circular arc-shaped. The corners of the flow channel 47 may in particular already be round, so that a subsequent rounding is not necessary.

As shown in Figure 2g, the flow member 23 is connected to the membrane holder bottom 21 of the membrane holder 13, so that the

Membrane 37 is at least partially disposed on the flow channel 47.

The wall of the flow channel 47 is then mechanically contacted by the actuatable membrane 37 in the valve seat 55. Connecting the

Flow channel 47 is made by gluing, in particular by means of an adhesive with the flow member 23 or the membrane holder bottom

21 is coated. Preferably, the adhesive is a hot melt adhesive so that bonding can be accomplished by lamination.

FIG. 2 g shows the microvalve 1 in the rest position, in which the membrane

37 in particular does not project into the flow channel 47, wherein the flow channel 47 along the longitudinal direction L ₁ , ie substantially in y

Direction extends. The membrane 37 is characterized by a force K, which of the electric actuator 39 is applied, along the actuating direction B, ie in particular substantially against the z-direction, deflected. This force K can be generated by the actuator 39 is extended along the direction of actuation B. In particular, the actuator 39 may be a piezoelectric crystal, which expands upon application of a voltage of the actuating direction B due to the piezoelectric effect. Alternatively, the actuator 39 could include a coil and a magnet which move against each other when a current flows through the coil, so that the longitudinal extent of the actuator 39 along the direction of actuation B is increased. In particular, the actuating direction B and the longitudinal direction Li are substantially perpendicular to each other.

FIG. 2h shows the microvalve 1 in the actuation position. The diaphragm 37 is acted upon by an enlargement of the actuator 39 with a force K along the direction of actuation B and deflected. The membrane is deformed so that it contacts the wall of the flow channel 47 in the region of the valve seat 55 substantially completely mechanically and the flow channel 47 substantially completely closes. When the actuator 39 returns to its rest position, the resilient diaphragm 37 also returns to the rest position. Since the membrane holder 13 and the actuator 19 are rigid relative to the membrane 37, the membrane holder 13 and the actuator 19 are substantially not displaced or deformed as compared to the rest position.

FIGS. 3a-d show the individual steps of a further alternative preferred production method of a microvalve 1. As shown in FIG. 3a, in a first step, a membrane holder 13 is provided, which may preferably be a one-piece metal plate, in particular an approximately 1 mm thick steel plate. At least one membrane holder opening 15 is formed in the membrane holder 13. Without limiting the generality, only the case of a membrane holder opening 15 will be considered below. The membrane holder opening 15 has a diameter D _u on the membrane holder bottom 21 and has a diameter D ₀ on the membrane holder top 17. In particular, the diameter D _{0 is} greater than the diameter D ₁₁ , preferably by a factor greater than 1.5. In other words, that is Membrane holder opening 15 conical, preferably with a point angle of the corresponding truncated cone of about 90 ° to about 120 ° degree.

Further preferably, the membrane holder opening 15 is formed by machining or machining by means of a laser beam. In particular, the conical membrane holder opening 15 can be produced by drilling and subsequent reworking or in one operation by means of a countersinking drill.

The membrane holder 13 is arranged on a spacer such that the membrane holder opening 15 is not closed by a working surface. A liquid silicone mixture 33 is dispensed into downwardly open membrane holder opening 15. In this case, a sufficient amount of the liquid silicone mixture 33 for closing the membrane holder opening 33 is expelled from a dispensing tip 35, wherein the dispensing tip is positioned at a sufficient distance from the membrane holder opening 15 to be closed, so that the liquid silicone mixture 33 initially does not come into contact with the membrane holder 13 , Due to its surface tension, the liquid silicone mixture 33 initially remains in the form of a drop at the dispensing tip 35.

After a predetermined amount of the liquid silicone mixture 33 has exited the dispensing tip 35, the dispensing tip is displaced in the direction of the membrane holder opening 15. In this case, the drop is arranged on the membrane holder opening 15, so that it is closed. After curing of the liquid silicone mixture 33, the membrane 37 is formed. In order to make the membrane 37 flush with the membrane holder 13 flush, additional liquid silicone mixture 33 can be additionally dispensed along the edge of the membrane holder opening, whereby the membrane holder opening 15 is substantially completely closed.

As shown in Figure 3b, the amount of the einispensierten silicone mixture 33 may be dimensioned so small that in the membrane holder opening 15 a menisci membrane 37 is formed. The networking or curing of the

Silicone mixture to an elastic membrane is preferably carried out at a Temperature of about 80 ⁰ C to 100 ° C.

As shown in Figure 3c, in the next step, a flow element 23 with at least one flow channel 47 is provided. The flow element 23 is integrally formed, wherein the flow channel 47 is formed by removing material in the flow element 23. The cross section of the flow channel 47 is executed in this embodiment substantially rectangular with rounded corners. Alternatively, the cross section may in particular also be trapezoidal or channel-shaped, each with or without rounded corners, or circular arc-shaped. Since the corners of the flow channel 47 are already round in this embodiment, a subsequent rounding is not necessary.

As shown in Figure 3d, the flow element 23 is connected to the membrane holder bottom 21 of the membrane holder 13, so that the membrane 37 is at least partially disposed on the flow channel 47. The wall of the flow channel 47 is then mechanically contacted by the actuatable membrane 37 in the valve seat 55. The connecting of the flow channel 47 is effected by gluing, in particular by means of an adhesive with which the flow element 23 or the membrane holder bottom 21 is coated. Preferably, the adhesive is a hot melt adhesive so that bonding can be accomplished by lamination.

In this embodiment, on the side of the diaphragm 37 facing away from the flow channel 47, an actuation element 19 (not shown in more detail) with a plunger 39 or plunger 39 as a preferred actuator 39 is arranged on the membrane holder 13. The figure 3d shows the microvalve 1 in the rest position, in which the membrane 37 in particular does not project into the flow channel 47, wherein the flow channel 47 along the longitudinal direction L ₁ , that extends substantially in the y-direction. The plunger 39 can actuate the diaphragm 37 by applying a force K along the actuation direction B, ie in particular deflecting it substantially counter to the z-direction. In this case, the movement of the plunger 39 and thereby applied to the membrane 37 force K can be controlled or controlled by other means of the Aktuationselementes 19 mechanically, electro-mechanically, hydraulically and / or pneumatically. As an alternative to the plunger 39, the actuator 39 may in particular also be a piezoelectric crystal (as shown in FIGS. 2g and 2h), which expands due to the piezoelectric effect when a voltage of the actuating direction B is applied. Alternatively, the actuator 39 could include a coil and a magnet which move against each other when a current flows through the coil, so that the longitudinal extent of the actuator 39 along the direction of actuation B is increased.

Since the connection of the individual components or layers of a microvalve 1 as described in FIGS. 1 to 3 preferably takes place by gluing or laminating, the components to be joined must be exposed to elevated temperatures and pressures during the bonding step. In order to fix the components during the bonding or laminating, so that the relative position in the x- / y-direction substantially does not change, the individual components may be provided with registration holes. In these holes engage corresponding registration pins, which are introduced along the z-direction in the registration holes, so that a relative displacement is prevented from each other. The registration pins can in particular be arranged on a mounting plate, wherein this mounting plate can serve as an abutment during lamination.

FIG. 4 shows a section through a micropump 63 with three microvalves 1, 1 ', 1 ", which are designed to close the flow channel 47 in each case in the region of the valve seats 55, 55', 55". Each microvalve has its own actuation channel 41, 41 ', 41 "for the pneumatic actuation of the diaphragms 37, 37', 37" along the actuation direction B. The necessary pneumatic pressure in the actuation channels 41, 41 ', 41 "is provided by a device, not shown provided and controlled.

In order to achieve the conveyance of a fluid in a flow direction F substantially perpendicular to the actuation direction B, the at least three microvalves 1, 1 ', 1 "must be actuated in a suitable sequence "flow through in this order, ie from the first micro-valve 1 (inlet valve) through the second micro-valve 1 '(displacer) to the third micro-valve 1" (exhaust valve), so the micro-valves 1, 1', 1 " for example, in the sequence shown in Table 1 are operated. The sequence of steps 1 to 5 can be cyclic and unlimited.

Table 1: A sequence of actuation of the microvalves for fluid delivery

4 shows the micropump 63 in a state between steps 3 and 4. Due to this exemplary sequence of microvalve actuation, the fluid can only escape from the micropump 63 in the direction of the outlet valve 1 "during steps 1 to 3. Before the membrane of the Displacer 1 'is relieved again and returns to the rest position and thus creates a negative pressure, which can suck the fluid, the exhaust valve 1 "must be closed and the inlet valve 1 is open (step 4). During pressure equalization, the fluid flows through the inlet valve 1 in the direction of the displacer 1 '. After pressure equalization, the inlet valve 1 is closed (step 5). Thereafter, steps 1 to 5 are repeated periodically or cyclically.

FIG. 5 shows a schematic plan view of an embodiment of a microfluidic system 73. This exemplary microfluidic system 73 is designed to supply a fluid to a microbiological cell culture (not shown) in a cell culture chamber 79 by means of a flow channel 47 and to monitor the fluid ,

The microfluidic system 73 comprises a micropump 63 according to the invention, which in turn has three microvalves 1, 1 'and 1 "to supply the fluid via the flow channel 47 to the cell culture chamber 79. Within the flow channel, the fluid flows along the flow direction F. Located upstream of the cell culture chamber 79, the flow channel 47 includes a dialysis section 75 and a gas exchange section 77 to facilitate mass transfer between the fluid and the exterior.

Following the cell culture chamber 79, the flow channel 47 leads back to the micropump 63, so that the microfluidic system is closed. To one

To enable exchange of fluid, the microfluidic system 73 comprises a

The outlet 97 can preferably be blocked by a microvalve 1 "'according to the invention, but it is also possible for the inlet 97 to be blockable

Inlet 97 is formed such that the blocking takes place by means of a valve outside the microfluidic system 73. The valve 1 '"in the inlet 97 is preferably upstream of a filter 81 in the inflow direction f, in order to prevent the penetration of unwanted particles into the microfluidic system 73.

The drain 95 is preferably also lockable analogous to the inlet 97. In this embodiment, the valve (not shown) is widely spaced (as compared to the removal of the valve 1 '') from the flow passage 47. Advantageously, thereby the fluid contained in the drain 95 can be used to compensate for fluid fluctuations in the flow channel 47 Volume in the drain 95 are provided as a compensation volume.

Downstream of the cell culture chamber 79 corresponding sensors are arranged in the flow channel 47 for detecting chemical or biochemical or physical quantities. Specifically, these are a pH sensor 83, an oxygen sensor 85, a glucose sensor 87, a lactate sensor 89, a pressure sensor 91, and a flow rate sensor 93.

The present invention is not limited to the above embodiments described by way of example. Rather, individual elements and / or

Features of each described aspect and / or each described embodiment with individual elements and / or features of the further aspects and / or further embodiments are combined in any way with each other and thus further aspects and / or embodiments are formed.

In particular, the various process steps for the production of the Membrane 37 without restriction with the various embodiments of the membrane holder 13 (in one piece, made of layers, with conical or straight membrane holder opening 15) are performed. Furthermore, the various embodiments shown of the Aktuationselementes 19 (one-piece, multi-part, with Aktuationskanal 41, with piezoelectric actuation or mechanical actuation by plunger) and the various embodiments of the Durchflußelementes shown 23 (one-piece, multi-piece, with straight or rounded or conical or circular flow channel 47) in any combination with the illustrated embodiments of the membrane holder 13, including the various configurations of a membrane 37 are combined.

Furthermore, the individual process steps can be performed in a different order. In particular, the order with respect to the arrangement of the flow element and the Aktuationselementes to the membrane holder is arbitrary.

LIST OF REFERENCE NUMBERS

I microvalve

3 lower membrane carrier layer

5 lower membrane carrier opening 7 upper membrane carrier layer

9 upper membrane carrier opening

I 1 hot melt adhesive 13 membrane holder

15 membrane holder opening 17 membrane holder top

19 Actuation element

21 membrane holder base

23 flow element

25 cover 27 water-soluble coating

29 template

31 Template opening 33 silicone mixture

34 squeegee

35 Dispenser tip

37 membrane

39 actuator

41 actuation channel

43 Actuation channel layer

45 topcoat

47 flow channel

49 basis

51 flow channel layer

53 recess

55 valve seat

57 edge

59 wetting filler

61 electrical supply line

63 micropump

65 form

67 recess in the mold 65

69 supply line in the form 65

71 derivative in the form 65

73 Microfluidic system

75 dialysis area

77 gas exchange area

79 cell culture chamber

81 filters

83 pH sensor

85 oxygen sensor

87 glucose sensor

89 lactate sensor

91 pressure sensor

93 flow rate sensor

95 process

97 inlet B actuating direction D ₀ diameter

You diameter

F Flow direction f Flow direction in the inlet 97 f Flow direction in the outlet 95

K force

L ₁ first longitudinal direction

L ₂ second longitudinal direction

M ₀ central axis

M _u central axis

P pressure

Claims

claims

A method of making a microfluidic component, comprising the steps of:

- Providing a membrane holder (13) with - a membrane holder top (17) which is designed with a

Actuation element (19), a membrane holder bottom side (21) which is adapted to be connected to a flow element (23) and at least one membrane holder opening (15) which on the membrane holder top (17) each have a diameter D ₀ and at the membrane holder bottom (21) each having a diameter D _u ;

Forming at least one resilient membrane (37) in the membrane holder opening (15); - Providing an actuator element (19) with at least one

Actuator (39);

- Connecting the at least one Aktuationselementes (19) with the membrane holder top side (17) of the membrane holder (13), so that the membrane (37) at least partially on at least one actuator (39) is arranged, so that the membrane (37) through the actuator (39) can be actuated;

- Providing a flow element (23) with at least one Durchflußkana! (47);

Connecting the flow element (23) to the membrane holder underside (21) of the membrane holder (3) so that the at least one membrane (37) is arranged at least partially on at least one flow channel (47), so that the wall of the flow channel (47) through the actuatable membrane (37) in a valve seat (55) is mechanically contacted.

2. The method of claim 1, wherein the diameter D _{0 is} greater than the diameter D _u .

The method of claim 1 or 2, further comprising the steps of: providing a lower membrane support layer (3); Providing an upper membrane carrier layer (7);

- Forming at least one lower membrane carrier opening (5) in the lower membrane carrier layer (3), each having a central axis M _u and each having a diameter D _u ;

- Forming at least one upper membrane carrier opening (9) in the upper membrane carrier layer (7), each having a central axis M ₀ and each having a diameter D ₀ ;

- Connecting the upper membrane carrier layer (7) with the lower membrane carrier layer (3) to form the membrane holder (13), so that the central axes M _u and M ₀ substantially coincide, so that the lower membrane carrier opening (5) and the upper membrane carrier opening (9 ) form the membrane holder opening (15).

4. The method according to claim 3, wherein the lower membrane carrier layer (3) and / or the upper membrane carrier layer (7) is coated on at least one side with an adhesive and connecting the upper membrane carrier layer (7) with the lower membrane carrier layer (3) by gluing ,

5. The method according to any one of the preceding claims, further comprising the steps:

- placing a cover (25) against the membrane holder (13) to unilaterally seal the membrane holder opening (15); Placing a template (29) on the unlocked side of the

A membrane holder opening (15), wherein the template (29) has a template opening (31) which is substantially congruent with the at least one membrane holder opening (15), so that the membrane holder (13) outside the membrane holder opening (15) in FIG substantially completely covered.

6. The method of claim 5, further comprising the step of: doctoring a resilient substance to form the membrane (37).

7. The method according to any one of claims 1 to 4, further comprising the steps:

- placing a cover (25) on the membrane holder (13) to close the membrane holder opening (15) on one side; - placing a mold (65) on the membrane holder (13), wherein the shape

(65) to each membrane holder opening (15) on the membrane holder top (17) each have a substantially congruent to this recess (67) and in each case at least one inlet and outlet (69, 71) which the recess (67) with the exterior of Connect form (65) has;

Feeding a liquid elastic solidifying substance (33) into the cavity formed by the membrane holder (13), the cover (25) and the mold (65); Solidifying the liquid substance (33) to form the membrane (37).

8. The method according to any one of claims 5 to 7, wherein the cover 25 is soluble by a solvent and / or substantially force-free detachable by a solvent.

9. The method according to any one of claims 1 to 4, further comprising the step of: dispensing a liquid elastically solidifying substance from the edge of the membrane holder opening (15) towards the center, so that the membrane holder opening (15) is closed.

10. The method according to any one of claims 1 to 4, further comprising the steps:

- Forming a drop of a liquid elastically solidifying substance at a Dispensierspitze (35), wherein the drop has a diameter which is greater than or equal to the diameter D _u the membrane holder opening (15) is on the membrane holder lower side (21);

- Arranging the drop to the membrane holder opening (15), so that the membrane holder opening (15) is closed.

11. The method according to any one of the preceding claims, wherein the elastically solidifying substance for forming the membrane (37) is a polymer.

12. The method according to any one of the preceding claims, wherein the elastically solidifying substance for forming the membrane (37) is silicone.

13. The method according to any one of the preceding claims, further comprising the steps:

Providing a base (49); - Providing a Durchflußkanalschicht (51) with at least one

Recess (53);

- Connecting the flow channel layer (51) to the base (49), whereby the flow element (23) with the flow channel (47) is formed.

14. The method according to any one of claims 1 to 12, further comprising the steps of forming the flow element (23):

Providing a flow channel layer (51) forming at least one flow channel (47) by material removal processing.

15. The method according to any one of the preceding claims, further comprising the steps:

- Applying a wetting filler (59) on the valve seat (55), so that the free surface of the wetting filler (59) assumes a steadily curved shape due to the surface tension; Curing the Wetting Filler (59).

16. The method of claim 15, wherein the wetting filler (59) is a UV curing adhesive and the curing is carried out by irradiation with ultraviolet light.

17. The method according to any one of the preceding claims, wherein the Aktuationselement (19) is formed by the following steps:

- Providing an Aktuationskanalschicht (43), further comprising at least one Aktuationskanal (41) as an actuator (39);

- Connecting the Aktuationskanalschicht (43) with the membrane holder top (17) of the membrane holder (13), so that the membrane (37) at least partially disposed on at least one Aktuationskanal (41).

18. The method of claim 17, wherein the at least one flow channel (47) is arranged extending substantially along a first longitudinal direction Li and the at least one Aktuationskanal (41) is arranged extending substantially along a second longitudinal direction L ₂ , wherein between the longitudinal directions L1 and L2 included angle θ is different from zero.

19. A microvalve for controlling the flow of fluids, comprising:

an actuation element (19) with at least one actuator (39),

a flow element (23) with at least one flow channel (47),

- A membrane holder (13) with - a membrane holder top (17) which is connected to the Aktuationselement (19), a membrane holder bottom (21) which is connected to the flow element (23), at least one membrane holder opening (15) and - at least one actuatable, resilient membrane (37), which is arranged in the at least one membrane holder opening (15), wherein the at least one membrane (37) with a diaphragm bottom with the diameter D _u at least partially on the at least a flow channel (47) is arranged, wherein the at least one membrane (37) is arranged with a membrane top with the diameter D ₀ at least partially on the at least one actuator (47), wherein the diameter D _{0 is} greater than the diameter D _u and wherein the wall of the at least one flow channel (47) through the at least one actuatable membrane (37) in a valve seat (55) is mechanically contacted, so that the at least one flow channel (47) is substantially completely closed by the membrane (37).

The microvalve of claim 19, wherein the membrane holder (13) further comprises:

- A lower membrane carrier layer (3), in which at least one lower membrane carrier opening (5), each with a central axis M _u and each having a diameter D _{u is} formed and

- An upper membrane carrier layer (7), in which at least one upper membrane carrier opening (9), each having a central axis M ₀ and a diameter D _{0 is} formed, the upper membrane carrier layer (7) with the lower membrane carrier layer (3) so connected in that the central axes M _u and M ₀ substantially coincide so that the lower membrane carrier opening (5) and the upper membrane carrier opening (9) form the membrane holder opening (15).

21. A microvalve according to claim 20, wherein the lower membrane carrier layer (3) and / or the upper

Membrane carrier layer (7) is coated on at least one side with an adhesive and the upper membrane carrier layer (7) is glued to the lower membrane carrier layer (3) by means of the adhesive.

22. A microvalve according to claim 21, wherein the adhesive is a hot melt adhesive.

23. A microvalve according to any one of claims 19 to 22, wherein the membrane (37) consists of a polymer.

24. A microvalve according to any one of claims 19 to 23, wherein the membrane (37) consists of a silicone.

25. A microvalve according to any of claims 19 to 24, wherein the flow member (23) comprises: a base (49) and a flow channel layer (51) having at least one recess (53), the flow channel layer (51) being connected to the base (49) connected is.

26. A microvalve according to any one of claims 19 to 24, wherein the flow element (23) with the at least one flow channel (47) is integrally formed.

27. Microvalve according to one of claims 19 to 26, wherein the at least one flow channel (47) is formed at least partially with a continuously curved cross-section.

28. A microvalve according to any one of claims 19 to 27, wherein the valve seat (55) is formed by a cured filler (59) at least partially continuously curved.

29. A microvalve according to claim 28, wherein the cured filler (59) is a UV-curing adhesive.

30. A microvalve according to any one of claims 19 to 29, wherein the actuation element (19) further comprises:

- An Aktuationskanalschicht (43) with at least one Aktuationskanal

(41) and - a cover layer (45), wherein the Aktuationskanalschicht (43) with the membrane holder top (17) of the membrane holder (13) is connected and wherein the cover layer (45) is connected to the Aktuationskanalschicht (43).

31. A microvalve according to claim 30, wherein the cover layer (45) and / or the Aktuationskanalschicht (43) is coated at least on one side with an adhesive and the cover layer (45) is glued to the Aktuationskanalschicht (43) by means of the adhesive.

32. A microvalve according to claim 30 or 31, wherein the at least one flow channel (47) extends substantially along a first longitudinal direction L ₁ and the at least one Aktuationskanal (41) extends substantially along a second longitudinal direction L ₂ , wherein between the Longitudinal directions L1 and L2 included angle θ is different from zero.

33. A microvalve according to any one of claims 19 to 29, wherein the Aktuations- element (19) to each membrane (37) one of the respective membrane (37) associated ram (39).

34. A microfluidic pump for moving fluids, which has at least three microvalves (1) according to one of claims 19 to 33.

35. The microfluidic pump of claim 34, wherein the microfluidic pump (63) is in one piece.

36. A microfluidic system, comprising: at least one microvalve (1) according to one of claims 19 to 33 and / or at least one microfluidic pump (63) according to claim 34 or 35, at least one flow channel (47) for a fluid, - at least one functional component , which with the fluid in the

Flow channel (47) is contactable.

37. The microfluidic system according to claim 36, wherein the functional component is a sensor for determining physical, chemical and / or biological properties of the fluid.

38. The microfluidic system according to claim 36, wherein the functional component is an electronic component, wherein a fluid for cooling the electronic component can be provided by means of the flow channel (47).