WO2010030179A1 - Interféromètre à laser - Google Patents

Interféromètre à laser Download PDF

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Publication number
WO2010030179A1
WO2010030179A1 PCT/NL2009/050541 NL2009050541W WO2010030179A1 WO 2010030179 A1 WO2010030179 A1 WO 2010030179A1 NL 2009050541 W NL2009050541 W NL 2009050541W WO 2010030179 A1 WO2010030179 A1 WO 2010030179A1
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WO
WIPO (PCT)
Prior art keywords
beams
reflected
measurement
interferometer
light
Prior art date
Application number
PCT/NL2009/050541
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English (en)
Inventor
Ki-Nam Joo
Jonathan David Ellis
Josephus Wilhelmus Spronck
Original Assignee
Technische Universiteit Delft
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Publication date
Application filed by Technische Universiteit Delft filed Critical Technische Universiteit Delft
Publication of WO2010030179A1 publication Critical patent/WO2010030179A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02003—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using beat frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02027—Two or more interferometric channels or interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/15—Cat eye, i.e. reflection always parallel to incoming beam
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Definitions

  • the invention relates to a laser interferometer comprising at least one laser light source providing at least one light beam at two or more distinct frequencies, a beam splitter for splitting the at least one light beam into reference and measurement beams, a first reflector and a second reflector for reflection of the reference and measurement beams, and at least one detector for detection of an interference signal pertaining to the reflected reference and measurement beams.
  • Such a laser interferometer is known from US-B- 6,847,455.
  • Figure 1 shows a typical setup of a laser interferometer according to the prior art.
  • a beam originating from a laser light source 1 which has light with coaxial, orthogonal polarizations and different optical frequencies, fl and f2, are split by a non-polarizing beam splitter 2 (NPBS) into a reference signal 3 to be detected by a detector 4 and a measurement signal 5 that is transmitted to a polarizing beam splitter 6 (PBS) .
  • NPBS non-polarizing beam splitter 2
  • PBS polarizing beam splitter 6
  • a first light beam 7 having a first polarization and a first frequency fl is transmitted to a reference retroreflector 8 after passing a quarter-wave plate 9.
  • a second light beam 12 having a second polarization and a second frequency f2 is transmitted to a measurement retroreflector 13 after passing a further quarter-wave plate 14. It then also passes after being reflected with the appropriate polarization again the polarizing beam splitter 6 (PBS) and arrives after passing the polarizer 10 also at the measurement photo-detector 11.
  • This prior art heterodyne laser interferometer has been widely used as a precise tool for measuring displacements in the fields of science and industry because of its high dynamic range, and high signal-to-noise ratio.
  • a periodic or nonlinearity error caused by frequency mixing, polarization mixing and ghost reflections lim- its the accuracy of the known interferometer because it deteriorates the purity of the interference signals stemming from the interference of the measurement and reference beams with frequencies f1 and f2.
  • the laser interferometer according to the invention has to this end those features as are enumerated in one or more of the appended claims.
  • the laser interfer- ometer has the feature that the laser light source provides first and second light beams that are spatially separated and wherein the first light beam has a first of two distinct frequencies and the second light beam has a second of said distinct frequencies, and further that the beam splitter splits the first and second light beams into first and second spatially separated reference beams travelling to a first reflector, and into first and second spatially separated measurement beams travelling to a second reflector, and that one of the first and second reflectors is arranged so as to cause that the reflected first meas- urement beam shares at least part of a travelling path with the reflected second reference beam and that the reflected second measurement beam shares at least part of a travelling path with the reflected first reference beam. Due to the complete spatial separation of the first light beam and the second light beam with the distinct frequencies, the problem of leakage of light fractions from one beam into the other beam is effectively avoided, and consequently periodic errors due to frequency and polarization mixing are significantly reduced.
  • the laser interferometer according to the invention provides the benefit that the first and second light beams may have the same polarization.
  • the use of polarization filters is therefore unnecessary.
  • the beam splitter is a non-polarizing beam splitter.
  • the reflected first measurement beam and the reflected second reference beam coincide in a first travelling path ending at a first detector, and that the reflected second measurement beam and the reflected first reference beam coincide in a second travelling path that is spatially separated from the first travelling path and ends at a second detector.
  • the first detector and the second detector are most commonly photo detectors which thus provide two beat signals with a frequency that is the difference of the frequencies of the original first and second light beams.
  • the signals at these two photodetectors have the same amplitude, however have an opposite phase-shift proportional to motions of any one of the reflectors, which provides an increased sensitivity for displacement of the second reflector that reflects the measurement beams.
  • the second reflector is a retroreflector .
  • the first reflector for the first and second reference beams is one selected from the group comprising a prism, and mirrors.
  • FIG. 1 a heterodyne laser interferometer according to the prior art
  • - figure 2 a preferred embodiment of the heterodyne laser interferometer according to the invention
  • - figure 3 an application of the laser interferometer of figure 2, wherein three distinct light frequencies are employed
  • FIG. 4 shows the laser interferometer of figure 2 shown in a two-dimensional schematic drawing; and - figures 5-10 several embodiments of measurement- devices incorporating the laser interferometer of the invention.
  • the heterodyne laser interferometer according to the prior art has been discussed hereinabove with reference to figure 1. Further discussion of this prior art laser interferometer can therefore be dispensed with.
  • Figure 2 shows the preferred embodiment of a basic embodiment of the heterodyne laser interferometer of the invention. There are in this interferometer two parallel light beams 21, 22 from an optical source (not shown), which may have the same polarization and which are embodied with frequencies fO and fO + fS respectively.
  • NPBS non-polarizing beam splitter 23
  • the two reference beams 24', 24" are reflected by 90° to a right angle prism 28 where they are reflected into reflected reference beams 26', 26".
  • the two measurement beams 25', 25" propagate to the retroreflector 29 where they are reflected into reflected measurement beams 27', 27".
  • the retroreflector 29 is arranged such that the first measurement beam 25" and the second measurement beam 25' that originate from the first light beam 21 and the second light beam 22 respectively, cross each other while they are reflected. This causes that the reflected first measurement beam 27' -that originates from the first light beam 21- shares eventually at least part of a travelling path 30 with the reflected second reference beam 26" -that originates from the second light beam 22-, and correspondingly that the reflected second measurement beam 27" -that originates from the second light beam 22- shares eventually at least part of a travelling path 31 with the reflected first reference beam 26' that originates from the first light beam 21.
  • the shared travelling paths 30, 31 of the measurement beams with the reference beams are positioned behind the non- polarizing beam splitter 23 to which the reflected measurement beams 27', 27" return after being reflected by the retroreflec- tor 29.
  • the laser interferometer is provided with appropriate photodetectors 32 and 33 for detection of the beat frequency caused by the sharing of the measurements beams and reference beams at their final approach of said photodetectors 32, 33 along said coinciding travelling paths 30, 31.
  • the reflected measurement beams 27' , 27" are provided with a phase shift caused by a Doppler frequency shift that is measured by the photodetectors 32 and 33.
  • the heterodyne signals from the photodetectors 32, 33 provide the same measurement amplitudes however having opposite signs of the phase shift. This is beneficial for the sensitivity of the displacement measurement of the retroreflector 29.
  • the interferometer of the invention is insensitive to misalingment of the optical components, although attention is required for the initial alignment of the prism 28.
  • This prism 28 can also be replaced by a set of mirrors or any other suitable type of reflection system.
  • the invention will be further elucidated with reference to the figures 3 - 10 relating to several measurement devices that incorporate the laser interferometer of the invention.
  • RAP right angle prism
  • NPBS Non-polarizing beamsplitter
  • PBS Polarizing beamsplitter
  • LDBS Lateral displacement
  • Non-polarizing beamsplitter M mirror
  • RR retroreflector (also known as a corner cube or cats eye) fo: frequency of the input beam f s : frequency offset from the initial input beam's frequency
  • PD r reference photodetector
  • PD m measurement photodetector
  • the frequency differences, (f 2 -fi) , (fo-fi)/ (f2 ⁇ fi) are typically high frequency components larger than a few hundreds of MHz when using 3 longitudinal mode He-Ne lasers or diode lasers. Consequently they can not be measured with slow detectors which have a bandwidth below 10 MHz.
  • the second beat frequency components can be detected with low-bandwidth detectors and they are derived from Eq. (1) and (2) as
  • the basic embodiment shown in figure 2 is again shown in figure 4 in a schematic two- dimensional drawing of the laser interferometer.
  • This interferometer is particularly suited for one-dimensional displacement measurement (Fundamental setup) . It has the following advanta- ges:
  • This interferometer has the resolution of the moving RR enhanced by a factor 2.
  • Single pass interferometers normally have an optical resolution of 2, whereas this interferometer has an optical resolution of 4. 3. Simple configuration.
  • Most heterodyne interferometers comprise more components, particularly the more costly polarizing components. These components contribute to the non-linearity due to imperfections and misalignments. That makes a prior art interferometer costly to develop and meticulous alignment must be performed. The interferometer of the invention does not have to deal with these issues, except for the RAP initial alignment .
  • the interferometer of the invention has no significant periodic errors when compared to systems of the prior art, the displacement information can be obtained directly and much faster than with prior art systems. Those systems require extra initial movement and/or calculation time for determining and correcting the periodic nonlinearities . Because the interferometer of the invention does not require this, it is more suitable for real-time applications.
  • the RAP is not tilt sensitive which means its initial align- ment is critical and the tolerances on the 90 degree angle are quite strict. However, these tolerances are in line with what a prior art interferometer requires.
  • Figure 5 shows a variation to the laser interferometer of figure 2 and figure 4 which can be used to measure the tilt angle between its two movable retroreflectors RR.
  • the retroflec- tors RR are tilt insensitive for alignment purposes. However, if both are attached to the same moving stage, then the in-plane tilt of that stage can be determined. Additionally, if f s is known and measured concurrently, the displacement can also be determined.
  • the dotted beams refer to the beam that is below the solid beam.
  • the two beams traverse to a NPBS at which point they are divided into two groups, one transmitted group and one reflected group.
  • the reflected beam-set travels from NPBS to one of the retroreflectors RR (the top RR) after reflecting from a 90° Right angle prism. After reflecting from the top RR, which is fixed to the moving stage, the beams reflect back from the RAP and go back to the NPBS.
  • the transmitted beam-set goes through the block (B) , which causes the beam positions to be exchanged with each other.
  • the beam-set then goes to the other retrore- flector RR, which is attached to the same moving stage as the top RR. After being reflected at this retroreflector , the beams travel back to the NPBS.
  • the two beam-sets are interfered using the NPBS and each of the beams can be detected by each photodetector (PD 1n and PD r ) .
  • the phase difference between the two signals provides a measure for the tilt angle.
  • This interferometer has no significant periodic errors, due to eliminating the conventionally applied polarizing components. 2. As with the basic embodiment, this interferometer gains an additional optical resolution enhancement by a factor 2.
  • the interferometer of figure 5 requires an extra block (B), which is normally not used in an interferometer. However, manufacturing and alignment of this block is not problematic for the skilled person.
  • Figure 6 shows a further interferometer, which is an extension of the basic angle measurement interferometer of figures 2 and 4.
  • a moving stage needs to be controlled with six degrees of freedom. If the stage has large displacements in all 3 linear degrees of freedom, retroreflec- tors cannot be used because large lateral motions will cause a misalignment. In those cases, a plane mirror is the desired target on the motion stage.
  • two spatially separated, parallel beams are divided into two sets of beams. Each set of beams has a double path between polarizing beam splitter (PBS) , quarter wave plate QWP and moving mirror (M M ) .
  • PBS polarizing beam splitter
  • QWP quarter wave plate
  • M M moving mirror
  • the measurement beams are reflected by the retro-reflector (RR) , which has point symmetry, while the reference beams are reflected by the right angle prism (RAP) , which has line symmetry. Two sets of beams go back to BS and are then recombined to make the heterodyne signals.
  • RR retro-reflector
  • RAP right angle prism
  • the main principle applied in the interferometer of figure ⁇ is the same as in the basic embodiment of the interferometer shown in figures 2 and 4; the measurement and reference phase signals have opposite signs which doubles the resolution when the phase difference is taken. The phase difference between two signals gives the tilt angle.
  • the optical resolution is ⁇ /8 because of the double path inter- ferometer setup and the principle as aforementioned.
  • the interferometer of figure 6 is designed to have minimal periodic er- rors. In the other embodiments no polarizing components were used. However, in this case, two are used (the QWP and the PBS) . If the incoming beams are however completely separated without any mixing, then these components should minimally contribute to periodic errors. 2. The optical resolution of this interferometer is a factor ⁇ /8. This means very precise measurements can be performed.
  • the right angle prism can be exchanged into a retro-reflector and a glass block and vice versa.
  • 2 mirrors can be used.
  • Figure 7 relates to such an interfer- ometer target embodied as a plain mirror, instead of a retrore- flector . Additionally, a PBS, QWP, and RR are used and attached to the NPBS.
  • the beam set transmitted from NPBS pass through the PBS and QWP, where they reflect at the mirror.
  • the beams pass through the QWP which causes them to reflect at the PBS.
  • the beams reflect at the RR and the PBS again, where they pass through the QWP again on their second time travelling to the mirror.
  • the beams pass through the QWP and the PBS, where they interfere with beams from the RAP on the NPBS.
  • the measurement result is insensitive to tilting of the moving mirror and has an optical resolution ⁇ /8.
  • the interferometer of figure 7 is designed to have minimal periodic errors. This is largely due to the decoupled light beams that enter the interferometer, which reduces the periodic errors. 2.
  • This interferometer has an optical resolution of 8, which is twice the normal resolution for a plane mirror interferometer. Also, like the plane mirror interferometer, this interferometer is insensitive to tilting of the moving mirror (for small angles) .
  • the optics are not thermally stable. However, this could be accomplished by adding an extra compensation block in between the RAP and the NPBS.
  • the interferometer shown in figure 8 is exactly the same as the ⁇ Tilt (angle) measurement interferometer with a plane mirror' as shown in figure 6, except that it does not measure the tilt but rather the displacement between two differ- ent mirrors. This is called a differential interferometer.
  • this interferometer is designed to have minimal periodic errors. This is largely due to the decoupled incoming light beams that reduce the chance that periodic errors occur .
  • This interferometer has an optical resolution of 8, which is twice the normal resolution for a differential inter- ferometer .
  • This interferometer is semi-balanced between measure- merit and reference paths which reduces thermal errors.
  • interferometers of the prior art are designed to combine measurements of one or more displacements and/or one or more angles into one configuration. This typically means that initially only the input beams and mirror are aligned and the rest of the alignment is done during the manufacturing process. This makes interferometers adaptable to multi-degree of freedom measurements .
  • the setup of the interferometer shown in figure 9 is the combination of a differential plane mirror interferometer and an angle measurement interferometer.
  • PD R I and PD M ⁇ measure the displacement of the mirror while PD R2 and PD M2 measure the tilt angle of the mirror.
  • the optical resolution is ⁇ /8 because of the double path interferometer setup.
  • this interferometer is designed to have minimal periodic errors due to the decoupled incoming light beams, which reduces periodic errors.
  • This interferometer has an optical resolution of ⁇ /8 for both angular and lateral measurements
  • Figure 10 shows a setup of the laser interferometer of the invention that is usable for straightness measurements.
  • This embodiment is based on the differential plane mirror interferometer of figure 8, but the measurement mirrors are replaced by a prism (P) which can adjust the beam direction, and by a special mirror (M 3 ) .
  • P prism
  • M 3 special mirror
  • this interferometer of figure 10 is designed to have minimal periodic errors due to the decoupled incoming light beams, which reduce periodic errors.
  • This interferometer has an optical resolution of ⁇ /8 for both angular and lateral measurements.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)

Abstract

L’invention concerne un interféromètre à laser comprenant une source de lumière laser fournissant au moins un faisceau lumineux à deux fréquences distinctes, un séparateur de faisceau pour diviser le ou les faisceaux lumineux en des faisceaux de référence et de mesure, un premier réflecteur et un second réflecteur servant à réfléchir les faisceaux de référence et de mesure, et au moins un détecteur servant à détecter le signal d'interférence appartenant auxdits faisceaux. La source de lumière laser fournit des premier et second faisceaux lumineux qui sont séparés dans l’espace et le premier faisceau lumineux a une première fréquence distincte parmi lesdites fréquences et le second faisceau lumineux a une seconde fréquence distincte parmi lesdites fréquences. En outre, le séparateur de faisceau divise les premier et second faisceaux lumineux en des premier et second faisceaux de référence séparés dans l’espace et qui se propagent en direction du premier réflecteur, et en des premier et second faisceaux de mesure séparés dans l'espace et qui se propagent en direction du second réflecteur. Le premier ou le second réflecteur est conçu de manière à amener le premier faisceau de mesure réfléchi à partager au moins une partie d’un trajet de propagation avec le second faisceau de référence réfléchi et à amener le second faisceau de mesure réfléchi à partager au moins une partie d'un trajet de propagation avec le premier faisceau de référence réfléchi.
PCT/NL2009/050541 2008-09-11 2009-09-09 Interféromètre à laser WO2010030179A1 (fr)

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NL2001980 2008-09-11
NL2001980 2008-09-11
NL2003134 2009-07-03
NL2003134A NL2003134C (en) 2008-09-11 2009-07-03 LASER INTERFEROMETER.

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* Cited by examiner, † Cited by third party
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WO2011061514A1 (fr) * 2009-11-23 2011-05-26 The University Of Birmingham Mesure améliorée de mouvement angulaire
CZ304317B6 (cs) * 2012-12-18 2014-02-26 Ústav přístrojové techniky Akademie věd ČR, v.v.i. Interferometrická sestava pro diferenční měření vzdálenosti
CN103743336A (zh) * 2013-12-23 2014-04-23 哈尔滨工业大学 基于直角棱镜的对角入射光激光外差干涉测量方法与装置
CN103743346A (zh) * 2013-12-23 2014-04-23 哈尔滨工业大学 基于角锥棱镜的对角入射光激光外差干涉测量方法与装置
WO2014071806A1 (fr) * 2012-11-09 2014-05-15 清华大学 Système de mesure de déplacement faisant appel à un interféromètre à réseau à double fréquence
CN104634283A (zh) * 2015-02-06 2015-05-20 浙江理工大学 具有六自由度检测的激光外差干涉直线度测量装置及方法
WO2015096279A1 (fr) * 2013-12-23 2015-07-02 Harbin Institute Of Technology Système et procédé interférométriques hétérodynes haute résolution
CN104767112A (zh) * 2015-03-23 2015-07-08 哈尔滨工业大学 基于双偏振分光镜合光的正交双频激光生成方法与装置
WO2016123812A1 (fr) * 2015-02-06 2016-08-11 浙江理工大学 Appareil et procédé de mesure de linéarité d'interférence hétérodyne à laser faisant appel à une détection à six degrés de liberté
DE102017210636A1 (de) 2017-06-23 2017-08-10 Carl Zeiss Smt Gmbh Messvorrichtung zur Vermessung eines lateralen Abbildungsfehlers eines abbildenden optischen Moduls
DE102017210635A1 (de) 2017-06-23 2017-08-17 Carl Zeiss Smt Gmbh Messvorrichtung für ein abbildendes optisches Modul
WO2019210734A1 (fr) * 2018-05-02 2019-11-07 中国计量科学研究院 Dispositif et procédé de mesure d'interférence hétérodyne laser basés sur une réflexion de miroir plan
NL2026398B1 (en) 2020-03-02 2021-10-14 Harbin Inst Technology Heterodyne Laser Interferometer Based on Integrated Secondary Beam Splitting Component
CN116379972A (zh) * 2023-06-06 2023-07-04 上海隐冠半导体技术有限公司 检测余弦误差角及修正误差的方法及系统和测试工装

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CN102853771B (zh) * 2012-09-19 2015-07-29 哈尔滨工业大学 小型化高速超精密激光外差干涉测量方法及装置
CN114739286B (zh) * 2022-04-25 2023-07-04 中国科学院合肥物质科学研究院 一种双波长复合激光干涉仪系统

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US6483593B1 (en) * 1999-08-10 2002-11-19 The Boeing Company Hetrodyne interferometer and associated interferometric method
US20070171426A1 (en) * 2005-04-29 2007-07-26 Agilent Technologies Low non-linear error displacement measuring interferometer

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US20070171426A1 (en) * 2005-04-29 2007-07-26 Agilent Technologies Low non-linear error displacement measuring interferometer

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011061514A1 (fr) * 2009-11-23 2011-05-26 The University Of Birmingham Mesure améliorée de mouvement angulaire
WO2014071806A1 (fr) * 2012-11-09 2014-05-15 清华大学 Système de mesure de déplacement faisant appel à un interféromètre à réseau à double fréquence
US9885556B2 (en) 2012-11-09 2018-02-06 Tsinghua University Dual-frequency grating interferometer displacement measurement system
CZ304317B6 (cs) * 2012-12-18 2014-02-26 Ústav přístrojové techniky Akademie věd ČR, v.v.i. Interferometrická sestava pro diferenční měření vzdálenosti
CN103743336B (zh) * 2013-12-23 2016-04-06 哈尔滨工业大学 基于直角棱镜的对角入射光激光外差干涉测量方法与装置
CN103743336A (zh) * 2013-12-23 2014-04-23 哈尔滨工业大学 基于直角棱镜的对角入射光激光外差干涉测量方法与装置
WO2015096279A1 (fr) * 2013-12-23 2015-07-02 Harbin Institute Of Technology Système et procédé interférométriques hétérodynes haute résolution
CN103743346A (zh) * 2013-12-23 2014-04-23 哈尔滨工业大学 基于角锥棱镜的对角入射光激光外差干涉测量方法与装置
CN103743346B (zh) * 2013-12-23 2016-04-13 哈尔滨工业大学 基于角锥棱镜的对角入射光激光外差干涉测量方法与装置
WO2016123812A1 (fr) * 2015-02-06 2016-08-11 浙江理工大学 Appareil et procédé de mesure de linéarité d'interférence hétérodyne à laser faisant appel à une détection à six degrés de liberté
CN104634283A (zh) * 2015-02-06 2015-05-20 浙江理工大学 具有六自由度检测的激光外差干涉直线度测量装置及方法
CN104767112A (zh) * 2015-03-23 2015-07-08 哈尔滨工业大学 基于双偏振分光镜合光的正交双频激光生成方法与装置
DE102017210636A1 (de) 2017-06-23 2017-08-10 Carl Zeiss Smt Gmbh Messvorrichtung zur Vermessung eines lateralen Abbildungsfehlers eines abbildenden optischen Moduls
DE102017210635A1 (de) 2017-06-23 2017-08-17 Carl Zeiss Smt Gmbh Messvorrichtung für ein abbildendes optisches Modul
WO2019210734A1 (fr) * 2018-05-02 2019-11-07 中国计量科学研究院 Dispositif et procédé de mesure d'interférence hétérodyne laser basés sur une réflexion de miroir plan
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CN116379972A (zh) * 2023-06-06 2023-07-04 上海隐冠半导体技术有限公司 检测余弦误差角及修正误差的方法及系统和测试工装
CN116379972B (zh) * 2023-06-06 2023-08-22 上海隐冠半导体技术有限公司 检测余弦误差角及修正误差的方法及系统和测试工装

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