WO2010005263A2

WO2010005263A2 - Sample solution analyzing device

Info

Publication number: WO2010005263A2
Application number: PCT/KR2009/003793
Authority: WO
Inventors: 임흥빈
Original assignee: 단국대학교 산학협력단
Priority date: 2008-07-11
Filing date: 2009-07-10
Publication date: 2010-01-14
Also published as: KR20100007025A; KR100977250B1; WO2010005263A3

Abstract

The present invention relates to a sample solution analyzing device which comprises: a 1st reservoir which supplies a 1st solution, which forms a test solution as a liquid sample and, a 2nd reservoir which supplies a 2nd solution, which generates chemiluminescent reaction with said 1st solution; and a detector which calculates concentration of said liquid sample by measuring the strength of light emitted by said 2nd solution.

Description

Object Analysis Device

The present invention relates to an apparatus for analyzing an object, and more particularly, to an apparatus for quantitatively analyzing the concentration of a pollutant or the like remaining in an object.

Recently, there is a need for an apparatus for maximizing the consumption of a drug including a reagent and a sample, accurately performing the analysis of ppb to ppt units, and minimizing the analysis time. Accordingly, the present inventor invented the 'analytical method and apparatus for sample material' and filed a patent with the Korean Patent Office on August 27, 2002, 10-2002-50704, and registered on March 3, 2005, 10-476340.

However, in the case of the registered patent mentioned above, the measurement of the cleaning solution is performed so that the possibility of contamination can be measured indirectly, and the information of the directly contaminated material such as heavy metal remaining on the solid material (for example, semiconductor wafer) is measured. It is confirmed that the measurement in real time is somewhat limited.

It is an object of the present invention to provide an analysis apparatus capable of performing an analysis of an object in real time.

An analysis apparatus according to an embodiment for achieving the object of the present invention is a first providing unit for providing a first solution for forming an object as a liquid sample to the object, and a second solution for generating a chemiluminescence phenomenon A second providing unit for providing the liquid sample formed by the first solution, and a detector for measuring the intensity of the light emitted by providing the second solution with the liquid sample to obtain a concentration of the liquid sample. .

Specifically, the object may be a semiconductor wafer, the first solution may be a mixture containing hydrofluoric acid to form the liquid sample by etching the object, the second solution may include luminol.

In addition, the first providing unit is preferably driven to enable a scan operation over a partial region or the entire region of the object, the first liquid supplying the liquid sample formed by the first solution by the scanning operation of the first providing unit 1 Can be gathered in one place through the scan operation of the provider.

The detector includes a light collecting unit for collecting light emitted by providing the second solution to the liquid sample, an amplifying unit for amplifying the collected light, and a current change for converting the amplified light into a current. It may include wealth.

An analysis apparatus according to another embodiment for achieving the object of the present invention is located adjacent to the first providing unit and the first providing unit for providing a first solution on the object to form a liquid sample by etching the object A second providing unit for forming a second solution for generating a chemiluminescence phenomenon by providing the first solution to the liquid sample present on the object, and the liquid sample present on the object. And a detector for determining the concentration of the liquid sample by measuring the intensity of light emitted on the object by providing a second solution.

In particular, in the analyzing apparatus according to another embodiment, the detector includes a bundle of optical fibers surrounding the second providing portion, and a light collecting portion for collecting light emitted on the object by providing the second solution with the liquid sample. And an amplifying unit connected to the condenser and amplifying the condensed light, and a current changing unit connected to the amplifying unit and converting the amplified light into a current.

In addition, it may further include a pH adjusting portion formed by providing the first solution to adjust the pH of the liquid sample present on the object, wherein the pH adjusting portion is formed by providing the first solution It is preferable to include a drying unit for drying the liquid sample present on the object, and a third providing unit for providing a third solution containing an acidic aqueous solution or a neutral aqueous solution to the liquid sample dried by the drying unit.

According to another aspect of the present invention, an analysis apparatus includes a first providing unit configured to provide a first solution for forming an object as a liquid sample, and a second solution for generating a chemiluminescence phenomenon. A second providing unit provided to the liquid sample formed by the first solution, a detector for measuring the intensity of the light emitted by providing the second solution to the liquid sample to obtain a concentration of the liquid sample, and the first Located between the providing portion and the second providing portion, and comprises a transfer portion for transferring the liquid sample formed by the first solution to the second providing portion.

In particular, in the analyzing apparatus according to another embodiment, the detector may include a cell accommodating the liquid sample, a light collecting part attached to one surface of the cell, and configured to collect light transmitted from one surface of the cell, It may include an amplifier for amplifying the light, and a current changer for converting the amplified light into a current.

The transfer unit preferably includes a member for transferring the object itself in which the liquid sample exists or a member for sucking and transferring the liquid sample itself from the object.

According to another aspect of the present invention, there is provided an analysis apparatus including a first providing unit configured to provide a first solution for forming an object into a liquid sample, and a chemiluminescence phenomenon. A second providing unit for providing a solution to the liquid sample formed by the first solution, a detector for measuring the intensity of light emitted by providing the second solution to the liquid sample, and obtaining a concentration of the liquid sample; And positioning an end portion of the second providing portion for providing the second solution and an end portion of the detector for measuring the intensity of light adjacent to each other, providing a second solution using the second providing portion, and using the detector to When the intensity is measured, it includes a blocking portion that blocks both the end of the second provision portion and the end of the detector located adjacent to each other from the outside. The.

In the analyzing apparatus according to another embodiment, the object may be a semiconductor wafer, and the first solution may be a mixture including hydrofluoric acid, which forms the liquid sample by etching the object. The solution may comprise luminol.

According to the present invention, it is possible to form a liquid sample in the object itself, and to analyze the concentration of the pollutant and the like using the same, or to analyze the concentration of the pollutant and the like in the real-time using the transfer unit. Do. In addition, when analyzing the concentration of the pollutant and the like on the object in real time, the member for providing a solution for generating chemiluminescence phenomenon and the member for measuring the intensity of light can be blocked from the outside.

Thus, the analysis apparatus of the present invention can not only perform the analysis of ppb to ppt unit in real time, but also prevents the solution generating the chemiluminescence phenomenon from splashing out of the analysis region, and improves the light collection efficiency according to the measurement of the light intensity. Improvement and analysis time can be shortened.

In addition, since the analysis apparatus of the present invention can analyze not only the entire region of the object but also some regions, mapping data according to the analysis can be easily obtained.

1 is a schematic configuration diagram showing an object analyzing apparatus according to Embodiment 1 of the present invention.

FIG. 2 is a cross-sectional view taken along the line II-II of FIG. 1.

3 is a schematic block diagram showing an object analyzing apparatus according to a second embodiment of the present invention.

4 is a schematic diagram illustrating the detector of FIG. 3.

5 is a schematic block diagram showing an object analyzing apparatus according to a third embodiment of the present invention.

6 and 7 are views illustrating a part including the blocking part of FIG. 5.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. As the inventive concept allows for various changes and numerous embodiments, particular embodiments will be illustrated in the drawings and described in detail in the text. However, this is not intended to limit the present invention to a specific disclosed form, it should be understood to include all modifications, equivalents, and substitutes included in the spirit and scope of the present invention. In describing the drawings, similar reference numerals are used for similar elements. In the accompanying drawings, the dimensions of the structures are shown in an enlarged scale than actual for clarity of the invention.

Terms such as first and second may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as the second component, and similarly, the second component may also be referred to as the first component.

The terminology used herein is for the purpose of describing particular example embodiments only and is not intended to be limiting of the present invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In the present application, the term "comprise" or "having" is intended to indicate that there is a feature, number, step, operation, component, part, or combination thereof described in the specification, and that one or more other features It should be understood that it does not exclude in advance the possibility of the presence or addition of numbers, steps, actions, components, parts or combinations thereof.

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art. Terms such as those defined in the commonly used dictionaries should be construed as having meanings consistent with the meanings in the context of the related art and shall not be construed in ideal or excessively formal meanings unless expressly defined in this application. Do not.

Example 1

1 is a schematic configuration diagram showing an object analyzing apparatus according to Embodiment 1 of the present invention, and FIG. 2 is a cross-sectional view taken along the line II-II of FIG. 1.

Referring to FIG. 1, the analyzing apparatus 100 includes a first providing unit 11, a second providing unit 13, a detector 15, a pH adjusting unit 21, and the like.

Specifically, the first providing unit 11 provides the first solution to the object 50. Here, the object 50 is for analyzing the concentration of the contaminant, etc., but is not limited to the type of the object 50, but in the first embodiment of the present invention, the object 50 may be limited to a semiconductor wafer. have. Therefore, in the first embodiment of the present invention, it may be limited to an apparatus for analyzing a pollution source or the like present in the semiconductor wafer.

In addition, the first solution provided to the object 50 by the first providing part 11 should be able to form the object 50 as a liquid sample. That is, the first solution may be limited to a solution capable of etching the object 50 because the object 50 should be able to be formed as a liquid sample. Therefore, in Example 1 of this invention, since the said object 50 is limited to a semiconductor wafer, the mixture containing hydrofluoric acid is mentioned as an example of the said 1st solution.

In addition, the first solution to be provided to the object 50 should be adjusted to be finely provided. Accordingly, the first providing part 11 preferably includes a syringe pump or the like. Specifically, the first providing portion 11 may include a syringe pump or the like whose end is directed to the object 50.

In addition, the first providing unit 11 is driven to enable a scan operation. That is, the end portion of the first providing part 11 facing the object 50 is driven to enable the scan operation. Here, the driving capable of performing the scan operation of the first providing part 11 may be achieved by connecting members capable of driving the x-axis and the y-axis to the ends of the first providing part 11. It will be omitted. As described above, the driving operation of the scan of the first providing part 11 is to expand the provision of the first solution, and to collect the liquid sample formed by the first solution in one place. In this case, the scan operation of the first providing unit 11 may be an entire region of the object 50 or may be a partial region of the object 50. In particular, when a part of the area of the object 50 is targeted, it is possible to analyze each of the partial areas. As described above, when the object 50 is a semiconductor wafer, the mapping data may be easily obtained according to the analysis of the semiconductor wafer.

The second providing part 13 provides a second solution with a liquid sample formed by the first solution. Here, since the analysis device 100 analyzes the concentration of the object 50 using a luminescence reaction, that is, a chemiluminescence phenomenon, the second solution provided by the second providing unit 13 includes luminol. can do. In addition, the provision of the second solution should also be adjusted to provide a fine. Accordingly, the second providing part 13 also preferably includes a syringe pump or the like like the first providing part 11. Specifically, the second providing part 13 may include a syringe pump or the like whose end portion is formed by the first providing part 11 and directed to a liquid sample collected in one place by a scanning operation. In addition, directing the second providing part 13 to the liquid sample collected in one place may be achieved by setting the position of the second providing part 13 in advance, and in addition to the second providing part 13, It can also be achieved by connecting a member capable of driving the second provision part 13. Here, the driving member for driving the scan operation of the first providing unit 11 and the driving member for adjusting the position of the second providing unit 13 may be provided respectively, but in Embodiment 1 of the present invention will be described later As described above, since the second providing part 13 is installed adjacent to the first providing part 11, the first providing part 11 and the second driving part 13 are connected with the same driving member to drive the drive. Do it.

In particular, in the first embodiment of the present invention, the second providing part 13 is installed adjacent to the first providing part 11. That is, the end portion of the first providing portion 11 and the end portion of the second providing portion 13 facing the object 50 are provided to be adjacent to each other. As such, the first solution and the second solution may be provided in real time by installing the end of the first providing part 11 and the end of the second providing part 13 next to each other. That is, the second solution may be directly provided to the liquid sample formed by providing the first solution and existing on the object 50. In other words, the first solution and the second solution are provided in real time on the object 50 to be analyzed.

And the detector 15 measures the intensity of the light emitted by providing the second solution to the liquid sample to obtain the concentration of the liquid sample. That is, the detector 15 calculates the concentration of the liquid sample by measuring the intensity of light emitted by providing a second solution for generating a chemiluminescence phenomenon in the liquid sample.

Therefore, the detector 15 includes a condenser 15a, an amplifier 15b, a current converter 15c, and the like. Specifically, the light collecting part 15a collects light emitted by providing the second solution to the liquid sample. The amplifier 15b amplifies the light collected by the condenser 15a. In addition, the current converter 15c converts the amplified light into a current. Accordingly, the detector 15 condenses and amplifies the light emitted by providing the second solution to the liquid sample, converts the current into a current, and consequently, a source of contamination present in the object 50. The concentration of the back is obtained.

In particular, in the first embodiment of the present invention, as shown in FIG. 2, the light collecting portion 15a is provided as an optical fiber bundle capable of collecting light emitted by providing the second solution to the liquid sample. This may be installed to surround the second providing part 13. That is, the light collecting part 15a including the optical fiber bundle is installed to surround the area including the end portion of the second providing part 13 facing the object 50. As such, by collecting the light collecting part 15a of the detector 15 to surround the second providing part 13, the light emitted by providing the second solution may be collected on the object 50 in real time. It is possible.

Therefore, the analysis apparatus 100 according to the first embodiment of the present invention may analyze the concentration of the pollutant and the like included in the object 50 in real time on the object 50. That is, the liquid sample is formed on the object 50 using the first providing unit 11, and the second solution is provided to the liquid sample formed in this manner in real time using the second providing unit 13. A chemiluminescence phenomenon may be generated on the object 50, and the intensity of the light emitted from the object 50 may be measured and analyzed using the detector 15.

And the pH adjusting unit 21 is formed by providing the first solution to adjust the pH of the liquid sample present on the object 50. That is, by providing the pH adjusting unit 21, the analysis of the concentration of the object using the analysis device 100 can be performed under the optimal conditions. Here, the pH adjusting unit 21 includes a drying unit 19 formed by providing the first solution to dry the liquid sample present on the object 50. In particular, the drying unit 19 may include an infrared (IR) lamp. In addition, the pH adjusting part 21 includes a third providing part 17 which provides a third solution to the liquid sample dried by the drying part 19. Here, the third solution includes an acidic aqueous solution, a neutral aqueous solution, and the like as a solution for adjusting pH. In addition, since the third providing part 17 provides the third solution with the dried liquid sample present on the object 50, the third providing part 17 places the end portion toward the object 50.

In addition, the analysis device 100 further includes a display unit 23 connected to the detector 15. As such, the analysis device 100 may further include the display unit 23 to monitor the analysis result performed in real time.

Looking at the method for the analysis of the pollutant and the like present in the object using the analysis device 100 as described above are as follows.

First, an object 50 for analysis such as a semiconductor wafer is prepared. The first solution may be provided to provide a first solution such as a hydrofluoric acid mixture on the object 50. Then, scan driving using the first providing unit 11 is performed. In this case, the scan driving may be limited to an entire area or a partial area of the object 11. As described above, after the first solution is provided, the semiconductor wafer, which is the object 50, is etched by performing a scan driving, and as a result, a liquid sample is formed on the object 50. At this time, the pollutant and the like present in the object 50 is etched together.

Subsequently, the pH of the liquid sample is adjusted using the pH adjusting unit 21. Here, adjusting the pH of the liquid sample may be omitted to optimize the conditions according to the analysis of the object.

After the liquid sample is collected in one place by the scan driving of the first providing unit 11, the liquid sample is heated and dried by using electric energy or light energy as needed, and the second providing unit 13 is used to As a liquid sample, a second solution containing luminol is provided. Then, the liquid sample generates a chemiluminescence phenomenon by providing the second solution, and as a result, emits light.

Accordingly, the light collecting unit 15a of the detector 15 collects the light emitted and uses the amplifying unit 15b and the current converting unit 15c to measure the light intensity. Convert The concentration of the object 50, that is, the liquid sample, is analyzed using data capable of measuring the light intensity. In this way, by analyzing the concentration of the liquid sample it is possible to analyze the contamination source and the like present in the object (50).

As mentioned, using the analysis apparatus 100 of the present invention, it is possible to analyze the concentration of the object 50 in real time (for example, presence or absence of a contaminant, etc.), and in particular, a part of the region continuously. In case of analysis, mapping data can be obtained.

In addition, in the case of the chemical reaction in the analytical method using the analysis apparatus 100 mentioned above, the present invention is filed in detail by the present applicant, filed with the Republic of Korea Patent Office and registered Patent No. 10-476340, so the detailed description thereof will be omitted. do.

As such, the analysis apparatus 100 of the present invention may accurately analyze ppb to ppt units and perform the analysis in real time. Therefore, the analysis apparatus 100 of the present invention can be more actively used in the field requiring the action according to the analysis in real time. Therefore, the analysis apparatus 100 of the present invention can be more actively used for semiconductor manufacturing lines that need to be more sensitively controlled and managed fine pollutants.

Example 2

FIG. 3 is a schematic diagram illustrating an apparatus for analyzing an object according to Embodiment 2 of the present invention, and FIG. 4 is a schematic diagram illustrating the detector of FIG. 3.

First, since the object 50, the first solution provided through the first providing part 31, the solution provided through the second providing part 35, and the like are the same as those of the first embodiment mentioned above, Description is omitted.

Referring to FIG. 3, the analyzing apparatus 300 includes a first providing unit 31, a second providing unit 35, a detector 37, a transfer unit 33, and the like.

Specifically, the first providing part 31 provides a first solution to the object 50, and includes a syringe pump or the like as the providing part 11 of FIG. 1, and enables a scan operation. do. However, as shown in the second embodiment of the present invention, the number of the first providing units 31 is provided to show the entire area, not the partial area. Accordingly, when the number of the first providing units 31 is limited to one to two, it can be appreciated that some regions of the object 50 may be analyzed.

The second providing part 35 provides a second solution to the liquid sample formed by providing the first solution, and unlike the second providing part 13 of FIG. 1, the first providing part 31 is provided. ) In a somewhat spaced apart location.

In the second embodiment of the present invention, the transfer part 33 is provided between the first providing part 31 and the second providing part 35. Here, the transfer part 33 may include a member for transferring the liquid sample itself existing on the object 50 or a member for transferring the object 50 itself in which the liquid sample exists. Accordingly, when the transfer part 33 is a member for transferring the liquid sample itself existing on the object 50, the transfer part 33 may be provided as a suction member capable of sucking the liquid sample. When 33 is a member for transferring the object itself in which the liquid sample is present, the transfer part 33 may be provided as a member such as a robot arm that can handle the object 50.

The detector 37 measures the intensity of light emitted by providing the second solution to the liquid sample to analyze the concentration of the liquid sample, that is, the source of contamination of the object.

Wherein the detector 37, as shown in Figure 4, includes a cell (37a) for receiving the liquid sample. In this case, when the transfer part 33 is a member that sucks only the liquid sample itself, as described above, the cell 37a may be provided to be somewhat smaller, but as described above, the transfer part 33 transfers the object 50 itself. In the case of a member to be formed, the cell 37a should be provided to a size that can accommodate the object 50. In addition, the cell 37a is preferably provided with a window that one surface thereof can transmit the light emitted by the provision of the second solution. The detector 37 is attached to one surface of the cell, that is, one surface through which the light is transmitted, and includes a condenser 37b for condensing light transmitted from one surface of the cell 37a, and amplifies the collected light. An amplifier 37c and a current converter 37d for converting the amplified light into a current.

In addition, the analysis device 300 may further include a display unit 39 connected to the detector 37 to monitor the analysis data using the analysis device 300 in real time.

As described above, in the analysis apparatus 300 according to the second exemplary embodiment of the present invention, the liquid sample formed on the object 50 by the first solution may be reacted with the second solution by using the transfer part 33. By moving to a location, it is possible to analyze the source of contamination of the object in real time.

In addition, in the case of the chemical reaction in the analytical method using the analytical device 300 mentioned above, the present inventors invented and filed in the Republic of Korea Patent Office and registered in detail Patent No. 10-476340, so the detailed description thereof is omitted Shall be.

Example 3

First, the object 50, the first providing unit 111, the second providing unit 113, the detector 115, the pH adjusting unit 121, the display unit 123, the first solution, the second solution, and the like are mentioned above. Since it is the same as that of one Embodiment 1, the detailed description is abbreviate | omitted below.

Referring to FIG. 5, the analysis device 400 may include a first providing unit 111, a second providing unit 113, a detector 115, a pH adjusting unit 121, a display unit 123, and a blocking unit 130. Etc.).

In detail, the first providing part 111 provides a first solution to the object 50, and includes a syringe pump or the like, similarly to the providing part 111 of FIG. 1, and enables a scan operation. do. The second providing unit 113 is to provide a second solution to the liquid sample formed by the provision of the first solution. As an example, the second providing portion 113 of the embodiment may have a structure of a double tube whose end has an inner tube and an outer tube.

The detector 115 analyzes the concentration of the liquid sample, that is, the source of contamination of the object, by measuring the intensity of light emitted by providing the second solution to the liquid sample. The detector 115 of the present embodiment includes a condenser located at the end, an amplifier 115b, a signal converter 115c, and the like. The signal converter 115c is connected to the amplifier 115b and converts the light amplified by the amplifier 115b into a current.

The blocking unit 130 blocks both the end of the second providing unit 113 and the end of the detector 115 from the outside. That is, the blocking unit 130 provides the second solution using the second providing unit 113 and measures the intensity of the light using the detector 115. It is to block both the end and the end of the detector 115 from the outside. In particular, the light collecting part is located at the end of the detector 115 so that the light collecting part of the detector 115 is blocked from the outside by the blocking unit 130.

As such, the blocking unit 130 may include a solution that generates a chemiluminescence phenomenon in real time by performing the analysis of the unit of ppp to ppt by using the analysis device 400. This is to improve the light collecting efficiency by splashing outside the analysis area or by measuring light intensity.

Hereinafter, an arrangement relationship between an end of the second providing unit 113 and an end of the detector 115 which are blocked from the outside by the blocking unit 30 and the blocking unit 130 will be described.

6 and 7 are views illustrating a part including the blocking part of FIG. 5.

6 and 7, the blocking unit 130 has a cup structure having a spout 131a and an internal space 31b. Thus, both the end portion of the second providing portion 113 and the end portion of the detector 115 are accommodated in the internal space 131b of the blocking portion 130. Therefore, it is preferable that the end portion of the second providing portion 113 and the light collecting portion 115a which is the end portion of the detector 115 are located adjacent to each other. That is, the end of the second providing unit 113 for providing the second solution and the end of the detector 115 for measuring the light intensity are located next to each other, and the second providing unit ( Both the end of the 113 and the end of the detector 115 to block the outside using the blocking unit 130.

Providing the blocking unit 130, and using the blocking unit 130 to block the end of the second providing unit 113 and the end of the detector 115 from the outside as mentioned above By providing the second solution using the providing unit 113 and the second solution provided through the second providing unit 113 when the intensity of the light is measured using the detector 115, by jumping out to the outside In order to prevent the concentration of chemiluminescence phenomena and to reduce the concentration of the chemiluminescence phenomenon, the light collection efficiency is reduced by the external environment when the light emitted by the chemiluminescence phenomenon is collected using the light collecting portion 115a of the detector 115. To prevent it.

When the end portion of the second providing portion 113 and the end portion of the detector 115 are located adjacent to each other, the end portion of the detector 115 may be disposed to surround the end portion of the second providing portion 113. . That is, the light collecting part 15a, which is an end of the detector 115, is disposed to surround the end of the second providing part 113. Thus, the light collecting part 115a, which is an end of the detector 15 positioned adjacent to the end of the second providing part 113, may include an optical fiber bundle. Therefore, the light collecting unit 115a collects the light emitted by providing the second solution to the liquid sample through the second providing unit 113, thereby measuring the intensity of the light using the light collecting unit 115a, and as a result, the liquid sample. The concentration of can be obtained. In particular, in the case of the analysis device 400, the light collecting part 115a of the detector 115 is disposed to surround the end of the second providing part 13 to provide light emitted by providing the second solution. Condensation may be performed on the object 50 in real time, and thus the object 50 may analyze the concentration of a pollutant or the like in real time.

In addition, in the case of the second providing part 113 mentioned above, the end may be provided in a double tube structure having an inner tube 113a and an outer tube 113b. In this case, the inner tube 113a is provided to be inserted into the outer tube 113b so as to be flowable, and in particular, to provide the second solution through the inner tube 113a. That is, in one embodiment of the present invention, the end of the second providing portion 113 is inserted into the outer tube 113b and the outer tube 113b so as to be flowable, and the inner tube providing the second solution ( It is provided to consist of a double tube structure having a 113a). In addition, when the end portion of the second providing portion 113 is provided in a double tube structure, the light collecting portion 115a, which is an end portion of the detector 115, is positioned to surround the outer tube.

As such, providing the second providing portion 113 in a double tube structure having an inner tube 113a and an outer tube 13b facilitates replacement of an end of the second providing portion 113, and This is to safely provide the second solution to the liquid sample through the second providing part 113 by adjusting the height of the inner tube 113a. That is, by adjusting the height of the inner tube 113a of the second providing part 113 properly, it may occur due to the shock of the second solution provided through the inner tube 113a of the second providing part 113. Analysis degradation factors can be prevented in advance, and since only the inner tube 113a can be handled separately, maintenance of the second provision unit 113 can be performed only by handling the inner tube 113a. It is.

In addition, by providing an end portion of the second providing portion 113 in a double tube structure having an inner tube 13a capable of height adjustment, the second providing portion 113 by adjusting the height of the inner tube 113a. The end of may be prevented from contacting the detector 115 and the end. That is, when the end of the second providing part 113 is positioned at the same or similar height as the end of the detector 115, the end of the second providing part 113 is the end of the detector 115. This is because a situation may occur in contact with the light collecting unit 115a and may affect light when the light is collected using the light collecting unit 15a of the detector 15. Thus, as mentioned above, the second providing part 13 is provided in a double tube structure, and the second providing part (by adjusting the height of the inner tube 113a that provides the second solution in the double tube structure appropriately) By preventing the end portion 113 from contacting the end portion of the detector 115, the analysis efficiency using the analysis apparatus 100 may be improved.

In the case of the blocking part 130 having a cup structure having the spout 131a and the inner space 131b, both the end portion of the second providing portion 113 and the end portion of the detector 115 are disposed in the inner space ( 131b) and the spout of the blocking portion 130 when measuring the intensity of light using the detector 15 while providing the second solution using the second providing

portion

113, 131a) is interviewed with the object. Thus, the second solution may be provided using the second providing unit 113 in a state of being blocked from the outside by the blocking unit 130, that is, not being disturbed by external environmental factors. The light emitted by providing the second solution may be collected by using the light collecting unit 115a of the detector 115.

In the analysis of the object 50 using the analysis device 400, the spout 131a of the blocking unit 130 is interviewed with the object 50 so that the end of the second providing part 113 and the detector are exposed. It has a configuration to block all of the ends of the 115 from the outside. Thus, the object may be damaged due to the spout 131a of the blocking unit 130. Therefore, the blocking unit 130 is preferably provided with a material that hardly damages the object (50).

Thus, in one embodiment of the present invention further includes a sealing unit 140 surrounding the spout 131a to be protruded from the spout 131a of the blocking unit 130, the sealing unit 140 is the object Interview at 50. In this case, since the sealing part 140 is provided in a structure completely surrounding the spout 131a, the sealing part 140 may be provided as an O-ring. As such, the sealing part 140 is provided and the sealing part 140 is interviewed with the object 50 so that the sealing part 140 is made of a material that hardly damages the object 150. do. Here, examples of the material of the sealing part 140 may include rubber, Teflon, and the like. In addition, it is more appropriate to provide and use the sealing part 140 in a black series as a part to more effectively block the outside through the blocking part 130. That is, when the sealing unit 140 is provided in a black series, the end of the second providing unit 113 and the end of the detector 115 can be blocked more efficiently from the outside.

As mentioned above, the analysis device 100 uses the blocking unit 130 to analyze the concentration of the contaminant or the like on the object 150 in real time and the detector and the end of the second providing unit 113. Since the end portion of 115 can be blocked from the outside, it is possible not only to analyze ppb to ppt in real time, but also to prevent the solution causing chemiluminescence from splashing out of the analysis region and to measure light intensity. It is possible to improve the light collection efficiency. Therefore, not only the analysis of the concentration of the pollutant and the like remaining in the object 50 using the analysis device 400 may be performed in real time, but also the improvement of the reliability of the data according to the analysis may be expected.

In addition, in the case of the chemical reaction in the analytical method using the analytical device 400 mentioned above, the present invention has been filed in detail by the present applicant, filed with the Korean Patent Office, and registered patent No. 10-476340, so that the detailed description thereof will be omitted. do.

The analysis apparatus according to the present invention forms a liquid sample in the object itself, and analyzes the concentration of the pollutant and the like using the same, or analyzes the concentration of the pollutant and the like for the object by performing the transfer in real time using a transfer unit or the like. It is possible to do

In addition, when analyzing the concentration of the pollutant and the like on the object in real time, the member for providing a solution for generating chemiluminescence phenomenon and the member for measuring the intensity of light can be blocked from the outside.

As a result, the analysis apparatus of the present invention not only can perform ppb to ppt analysis in real time, but also prevents the solution generating the chemiluminescence phenomenon from splashing out of the analysis region, and at the same time, the light collection efficiency according to the measurement of the light intensity. Can improve and shorten analysis time. Therefore, the analysis apparatus of the present invention can be more actively used in the field requiring the action according to the analysis in real time.

Claims

A first providing unit providing a first solution for forming an object as a liquid sample to the object;

A second providing unit providing a second solution for generating a chemiluminescence phenomenon to the liquid sample formed by the first solution; And

And a detector for determining the concentration of the liquid sample by measuring the intensity of light emitted by providing the second solution to the liquid sample.
The method of claim 1, wherein the object is a semiconductor wafer, the first solution is a mixture containing hydrofluoric acid to etch the object to form a liquid sample, the second solution comprises luminol Analysis device.
The liquid crystal display of claim 1, wherein the first providing unit is configured to enable a scan operation over a portion or an entire region of the object, and the liquid sample formed by the first solution is scanned by the scanning operation of the first providing unit. An analysis apparatus, characterized in that collected in one place through a scan operation of the first providing unit.
The method of claim 1, wherein the detector,

A light concentrating portion positioned at an end thereof adjacent to an end portion of the second providing portion and configured to emit light emitted by providing the second solution to the liquid sample;

An amplifier connected to the condenser and amplifying the light condensed by the condenser; And

And a signal converter connected to the amplifier and converting the amplified light into an electrical signal.
The analyzing apparatus according to claim 4, wherein the light collecting part adjacent to the end of the second providing part comprises an optical fiber bundle positioned to surround the end of the second providing part.
The analysis apparatus of claim 1, further comprising a pH adjusting unit formed by providing the first solution to adjust pH of the liquid sample present on the object.
The method of claim 6, wherein the pH adjusting unit,

A drying unit formed by providing the first solution to dry the liquid sample present on the object; And

And a third providing part for providing a third solution containing an acidic aqueous solution or a neutral aqueous solution to the liquid sample dried by the drying part.
A first providing unit for providing a first solution on the target to form a liquid sample by etching the target;

A second providing unit located adjacent to the first providing unit and providing a second solution for generating a chemiluminescence phenomenon to the liquid sample formed by providing the first solution and present on the object; And

And a detector for determining the concentration of the liquid sample by measuring the intensity of light emitted on the object by providing the second solution to the liquid sample present on the object.
The analysis apparatus of claim 8, further comprising a pH adjusting unit formed by providing the first solution to adjust the pH of the liquid sample present on the object.
The method of claim 8, wherein the detector,

A light concentrating part including an optical fiber bundle surrounding the second providing part and condensing light emitted on the object by providing the second solution with the liquid sample;

An amplifier connected to the condenser and configured to amplify the condensed light; And

And a current changer connected to the amplifier and converting the amplified light into a current.
A first providing unit providing a first solution for forming an object as a liquid sample to the object;

A second providing unit providing a second solution for generating a chemiluminescence phenomenon to the liquid sample formed by the first solution;

A detector for obtaining a concentration of the liquid sample by measuring the intensity of light emitted by providing the second solution to the liquid sample; And

And a transfer unit positioned between the first providing unit and the second providing unit and transferring the liquid sample formed by the first solution to the second providing unit.
The method of claim 11, wherein the detector,

A cell containing the liquid sample;

A light collecting unit attached to one surface of the cell and configured to collect light transmitted from one surface of the cell;

An amplifier for amplifying the focused light; And

And a current changer configured to convert the amplified light into a current.
The method of claim 11, wherein the transfer unit,

And a member for transferring the object itself in which the liquid sample exists or a member for sucking and transporting the liquid sample itself from the object.
A first providing unit providing a first solution for forming an object as a liquid sample to the object;

A second providing unit providing a second solution for generating a chemiluminescence phenomenon to the liquid sample formed by the first solution;

A detector for obtaining a concentration of the liquid sample by measuring the intensity of light emitted by providing the second solution to the liquid sample; And

Position the end of the second providing portion for providing the second solution and the end of the detector for measuring the intensity of the light next to each other, providing the second solution using the second providing portion and using the detector as well. And a blocking portion for blocking both an end portion of the second providing portion and an end portion of the detector, which are located adjacent to each other when measuring.
15. The apparatus of claim 14, wherein the blocking portion has a cup structure having a spout and an inner space, wherein both the end portion of the second providing portion and the end portion of the detector are adjacent to each other in the inner space, and the second providing portion is used. By providing a second solution and by using the detector to measure the intensity of light by interviewing the spout of the blocking portion to the object to block both the end of the second providing portion and the end of the detector from the outside. Analysis device.
16. The method of claim 15, further comprising a sealing portion made of rubber, teflon, or a mixture thereof, the sealing portion surrounding the spout so as to protrude from the spout of the blocking portion, wherein the second providing portion is used to provide a second solution. And analyzing the sealing portion of the blocking portion to the object when measuring the intensity of light using a detector.
The analysis device according to claim 14, wherein an end portion of the second providing portion has a double tube structure having an outer tube and an inner tube fluidly inserted in the outer tube and providing the second solution. .
15. The method of claim 14, further comprising a pH adjusting portion formed by providing the first solution to adjust the pH of the liquid sample present on the object,

The pH adjusting unit is formed by providing the first solution, the drying unit for drying the liquid sample present on the object, and the liquid sample dried by the drying unit comprising an acidic aqueous solution or a neutral aqueous solution And a third providing part for providing a solution.