WO2009115071A2 - Moteur à plat - Google Patents

Moteur à plat Download PDF

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Publication number
WO2009115071A2
WO2009115071A2 PCT/DE2009/000286 DE2009000286W WO2009115071A2 WO 2009115071 A2 WO2009115071 A2 WO 2009115071A2 DE 2009000286 W DE2009000286 W DE 2009000286W WO 2009115071 A2 WO2009115071 A2 WO 2009115071A2
Authority
WO
WIPO (PCT)
Prior art keywords
coil
coil system
windings
yoke
primary part
Prior art date
Application number
PCT/DE2009/000286
Other languages
German (de)
English (en)
Other versions
WO2009115071A3 (fr
Inventor
Berend Denkena
Peter Hesse
Original Assignee
Gottfried Wilhelm Leibniz Universität Hannover
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gottfried Wilhelm Leibniz Universität Hannover filed Critical Gottfried Wilhelm Leibniz Universität Hannover
Priority to EP09723262A priority Critical patent/EP2260569A2/fr
Publication of WO2009115071A2 publication Critical patent/WO2009115071A2/fr
Publication of WO2009115071A3 publication Critical patent/WO2009115071A3/fr

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K3/00—Details of windings
    • H02K3/04—Windings characterised by the conductor shape, form or construction, e.g. with bar conductors
    • H02K3/28—Layout of windings or of connections between windings

Definitions

  • the invention relates to a surface engine according to the preamble of
  • a generic surface engine is known from US 2006/004 96 99 A1.
  • a disadvantage of the surface engine described there is that he builds very wide. This is particularly disadvantageous when a particularly high positioning accuracy is required.
  • the invention has for its object to provide a multi-coordinate motor, which is able to generate large forces and can position the primary part with a high positional accuracy.
  • the invention solves the problem by a generic surface engine with the features of claim 1.
  • the x-coil arrangement and the y-coil arrangement are constructed from at least one, but preferably a plurality of coil systems, which in turn each have three independently energizable first coil system windings.
  • a second coil system also has three independently energizable secondary coil system windings.
  • Each of the windings may in turn have a plurality of turns, for example 25 or more turns. The turns are the number of wraps of the respective yoke elements.
  • An advantage of the surface engine according to the invention is that it can apply high forces, can be positioned with high accuracy and at the same time builds compact. These properties make it possible for the first time to use the multi-coordinate motor according to the invention also in machine tools, where high forces and simultaneously high positioning accuracies are a mandatory prerequisite.
  • a yoke element is to be understood as meaning, in particular, a ferromagnetic element which is penetrated by at least one winding in order to convey the magnetic field. reinforce netic field.
  • the yoke may be made of a block (iron block) in which mutually parallel grooves are arranged so that the individual yoke elements protrude in a comb-like manner and in pairs parallel to each other from a base body.
  • first x-coil system and the first y-coil system encompass at least one common yoke element, it is to be understood that a yoke element exists both inside an x-first coil system winding and inside a y-first coil system Winding is arranged.
  • the x-coil arrangement has a second x-coil system, which is arranged in the x-direction behind the first x-coil system. It is possible that there are more than two, for example three, four, five or more x-coil arrangements.
  • the y-coil arrangement has a second y-coil system, which is arranged in the y-direction behind the first y-coil system. Again, there may be more than two y-coil arrangements, for example three, four or more. It is possible, but not necessary, to have as many x-coil arrangements as y-coil arrangements. As a result, particularly large forces can be applied with the multi-coordinate motor.
  • Each x-coil system preferably surrounds at least one common yoke element with at least one y-coil system. If the yoke elements are arranged in a rectangular manner, it can preferably be provided that all yoke elements which are not located at one edge of the yoke are each surrounded by at least one x-coil arrangement and one y-coil arrangement. In other words, the yoke elements may not be on the edge of the yoke, but rather in an interior of the yoke, are magnetized by energizing both from an x-first coil system winding and by energizing a y-first coil system winding.
  • each x-winding divides at least one yoke element with at least one y-winding.
  • each x-winding divides exactly one yoke element with a y-winding, and conversely that each y-winding has exactly one yoke element with an x-winding.
  • the multi-coordinate motor is an area motor, wherein the secondary magnets of the secondary part are arranged in one plane and the x-coil arrangement and the y-axis
  • Coil arrangement are arranged so that the primary part is movable relative to the secondary part by successively energizing windings of the coil systems in two dimensions.
  • the secondary magnets are arranged in a fourfold arrangement, in particular checkerboard-like or diamond-like. This results in a particularly easy to control surface engine.
  • the multi-coordinate motor is particularly compact because the secondary magnets adjoin one another in pairs, forming a closed checkerboard pattern.
  • a particularly compact construction results when the x-first coil system windings and / or the y-first coil system windings have a toothed winding. In this way, results in a particularly compact multi-coordinate motor, which also allows the application of high forces.
  • a mechanically particularly stable multi-coordinate motor is hold when the yoke is integrally formed.
  • the yoke elements are created from a basic body by separating out material.
  • the primary part is guided in a two-dimensionally movable manner on a plate having a recess and engages through the recess.
  • the primary part may have two parallel sliding plates, between which the guide plate is arranged, so that the sliding plates and the guide plate form a sliding guide.
  • the advantage of this is that the guide is structurally simple.
  • the material of the sliding plates and the guide plate is chosen so that there is a sliding pair.
  • the multi-coordinate motor In order to rotate the primary part relative to the secondary part, the multi-coordinate motor according to a preferred embodiment comprises a rotary device which is designed to rotate the primary part when it is in the de-energized state.
  • This rotary device can be mechanically or magnetically coupled to the primary part.
  • Secondary magnets form a working area with a working area longitudinal and a working area transverse extent and a transfer area with a transfer area transverse extent, wherein the transfer area is connected to the work area and the transfer area transverse extent is small compared to the work area longitudinal and
  • the multi-coordinate motor can also be favorably used in a machine tool.
  • the machine tool is a turning, milling or grinding machine.
  • the surface motor according to the invention can also be used in a handling machine.
  • FIG. 1 shows a perspective view of a surface engine according to the invention
  • FIG. 2 shows a simplified schematic view of a coil arrangement as a tooth winding of an embodiment of a primary part
  • FIG. 3 shows a schematic view of a primary part for a multi-coordinate motor according to the invention, in which the yoke is not drawn,
  • FIG. 4 shows a schematic view of a primary part with tooth winding for a multi-coordinate motor according to the invention, in which the yoke is not drawn,
  • FIG. 5 shows a schematic perspective view of a primary part for a multi-coordinate motor according to the invention with a yoke
  • FIG. 6 shows a second embodiment of a primary part for a multi-coordinate motor according to the invention
  • FIG. 7 shows a third embodiment of a primary part for a multi-coordinate motor according to the invention
  • FIG. 8 shows a fourth embodiment of a primary part for a multi-coordinate motor according to the invention
  • FIG. 9 shows a schematic perspective view of a multi-coordinate motor with a working and a transfer region, as it can be used in a machine tool according to the invention.
  • FIG. 1 shows a yoke 10 of a multi-coordinate motor 12 according to the invention, the yoke 10 being part of a primary part 14 and cooperating with permanent magnets 16.1, 16.2,... And 18.1, 18.2,... Together forming a planar secondary part 20.
  • the permanent magnets 16 turn the yoke 10 its north pole, the permanent magnets 18 their
  • the secondary part 20 is attached to a machine frame 22, which is part of a machine tool according to the invention.
  • the primary part 14 comprises a first sliding plate 24 and a second sliding plate 26, between which a guide plate 28 is slidably disposed.
  • the guide plate 28 is fixed to the machine frame 22.
  • the sliding plates 24, 26 and the guide plate 28 together form a sliding guide for the primary part 14 and are arranged on both sides of a recess 29 in the guide plate 28.
  • FIG. 2 schematically shows an x-coil arrangement 30, which comprises a first x-coil system 32 and a second x-coil system 34, which adjoin one another along the dashed line.
  • the first x-coil system 32 has three independently energisable x-
  • First coil system windings LI 32 , L232 and L3 32 each grounded through a ground terminal 36.
  • the second x-coil system 34 has three independently energizable x-secondary coil system windings LI 34 , L2 3 4 and L3 34 . All windings are arranged on the yoke 10, which is not shown in all details for the sake of clarity. On both sides of the yoke 10 are winding heads 38.1., 38.2, ..., 38.6. As shown in FIG. 2, the first x-coil system 32 and the second x-coil system 34 have a toothed winding.
  • FIG. 3 shows the primary part 14, which in addition to the first x-coil system with its x-first coil system windings LI32, L.232, L3 32 and the x-second coil system windings LI 34 , L2 34 , L3 34
  • Windings of a y-coil assembly 40 comprises.
  • first y-coil system 42 includes a first y-coil system 42 and a second y-coil system
  • first y-coil system comprises 42 y-first coil system windings LI 42 , L2 42 , L3 42
  • second y-coil system 44 includes y-
  • Second coil system windings LI 44 , L2 44 , L3 44 includes.
  • the y-windings that is, the y-first coil system windings and the y-second coil system windings, form a conventional servo winding, whereas, as described above, the x-windings have a tooth winding.
  • FIG. 4 shows a second embodiment of a primary part 14 in which both the x-windings LI 32 , L2 32 and L3 32, LI 34 , L2 34 and L3 34 and the y-windings LI 42 , L2 42 and L3 42 , LI 44 , L2 44 and L3 44 each have tooth windings.
  • FIG. 5 shows an exploded view of the primary part 14 with the yoke 10, which has individual yoke elements 46.
  • the yoke elements 46 are arranged and carry in vertically extending columns and rows
  • Counting suffixes for the individual rows or columns.
  • the individual windings are arranged so that each yoke element, which is not at the edge, is wrapped by at least two windings.
  • the yoke element 46.4.3 is looped around by the y-first coil system windings L2 32 and L3 32 as well as by the y-first coil system windings L2 42 and L2 42 .
  • the magnetic field that forms in the yoke element 46.4.3 results as Superposition of the magnetic fields generated by these windings.
  • FIG. 6 and FIG. 7 show alternative winding forms for the primary part 14. These alternative winding forms differ in the order of the coil systems.
  • FIG. 7 shows the highest integration stage of the coil systems.
  • FIG. 8 shows a further embodiment for the primary part 14, in which the windings are wound in the form of a toothed winding with respect to one another.
  • Figure 9 shows a multi-coordinate motor 12 in which the secondary magnets forming the secondary part 20 form a working area 48 and a transfer area 50 which are connected to each other.
  • the work area has a work area longitudinal extent AL and a work area transverse extent AQ.
  • the transfer area 50 has a transfer area transverse extent TQ which is less than 1/5 of the working area.
  • the transfer area 50 On its end remote from the working area 48, the transfer area 50 has a rotating device 52. In order to rotate the primary part 14, for example by 90 °, it is first moved from the working area 48 into the
  • Transfer area 50 is moved and positioned in front of the rotating device 52. Subsequently, the rotary device 52 engages with pins in corresponding recesses in the primary part 14 and rotates this example by 90 °. Subsequently, the primary part 14 is moved from the transfer area 50 back into the work area 48.
  • a processing unit such as a milling head or a grinding wheel can be arranged. Alternatively, a workpiece holder is arranged there, so that a workpiece can be positioned freely in the working area 48 with the multi-coordinate motor 12.
  • LI42, L242 and L3 42 y first coil system winding LLII 4 4 4 4 ,, LL22 4 4 4 4 and LL33 4 4 4 4 y secondary coil system winding

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Linear Motors (AREA)

Abstract

La présente invention concerne un moteur à plat comprenant (g) une partie secondaire plane (20) qui présente plusieurs aimants permanents (16, 18) répartis de façon uniforme, et (h) une partie primaire (14) qui comporte (i) une culasse (10) comprenant plusieurs élément de culasse (46), (ii) un dispositif de bobines en direction x (30) qui comprend au moins un premier système de bobines en direction x (32) comportant trois enroulements de système de premières bobines en direction x (L132, L232 et L332) qui peuvent être mis sous tension de façon indépendante, et (iii) un dispositif de bobines en direction y (40) qui comprend au moins un premier système de bobines en direction y (42) comportant trois enroulements de système de premières bobines en direction y (L142, L242 et L342) qui peuvent être mis sous tension de façon indépendante. Selon l'invention, (i) le premier système de bobines en direction x (32) et le premier système de bobines en direction y (42) entourent au moins un élément de culasse commun (46), (j) les aimants permanents (16, 18) se trouvent dans un plan et le dispositif de bobines en direction x (30) et le dispositif de bobines en direction y (40) sont placés de telle façon que la partie primaire (14) peut se déplacer dans deux dimensions par rapport à la partie secondaire (20) par le biais d'une mise sous tension successive d'enroulements des systèmes de bobines (32, 42), (k) le premier système de bobines en direction x (32) et le premier système de bobines en direction y (42) entourent au moins un élément de culasse commun (46), (l) les aimants permanents (16, 18) se trouvent dans un plan et le dispositif de bobines en direction x (30) et le dispositif de bobines en direction y (40) sont placés de telle façon que la partie primaire (14) peut se déplacer dans deux dimensions par rapport à la partie secondaire (20) par le biais d'une mise sous tension successive d'enroulements des systèmes de bobines (32, 42), (m) les enroulements de système de premières bobines en direction x (L132, L232 et L332) présentent un enroulement denté et (n) les aimants secondaires (16, 18) sont disposés par quatre de manière que les aimants permanents (16, 18) soient directement adjacents les uns aux autres par paires.
PCT/DE2009/000286 2008-03-20 2009-03-03 Moteur à plat WO2009115071A2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP09723262A EP2260569A2 (fr) 2008-03-20 2009-03-03 Moteur à plat

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102008015384A DE102008015384A1 (de) 2008-03-20 2008-03-20 Mehrkoordinatenmotor
DE102008015384.2 2008-03-20

Publications (2)

Publication Number Publication Date
WO2009115071A2 true WO2009115071A2 (fr) 2009-09-24
WO2009115071A3 WO2009115071A3 (fr) 2010-01-21

Family

ID=41010994

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2009/000286 WO2009115071A2 (fr) 2008-03-20 2009-03-03 Moteur à plat

Country Status (3)

Country Link
EP (1) EP2260569A2 (fr)
DE (1) DE102008015384A1 (fr)
WO (1) WO2009115071A2 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015216199A1 (de) 2015-08-25 2017-03-02 Physik Instrumente (Pi) Gmbh & Co. Kg Planar-Positioniervorrichtung und Positioniertisch
DE102015222482A1 (de) 2015-11-13 2017-05-18 Physik Instrumente (Pi) Gmbh & Co. Kg Planar-Positioniervorrichtung und Positioniertisch

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012002141A1 (de) 2012-01-26 2013-08-01 Gottfried Wilhelm Leibniz Universität Hannover Flächenmotor

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4626749A (en) 1982-09-22 1986-12-02 Tokyo Electron Limited Two-dimensional positioning device
DE19531520A1 (de) 1995-07-20 1997-01-23 Heisel Uwe Prof Dr Ing Dr H C Vorrichtung zum Positionieren und Fixieren von Körpern
DE19722814A1 (de) 1997-05-30 1998-12-03 Dirk Dipl Ing Prust Mehrachsiger Antrieb mit variabler Polung
US20060049699A1 (en) 2004-08-20 2006-03-09 Tsinghua University Synchronous permanent magnet planar motor
US7336006B2 (en) 2002-09-19 2008-02-26 Fuji Xerox Co., Ltd. Magnetic actuator with reduced magnetic flux leakage and haptic sense presenting device

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2945269A1 (de) * 1979-11-09 1981-05-21 Teldix Gmbh, 6900 Heidelberg Positionierungseinrichtung fuer einen koerper
DE19530341A1 (de) * 1995-08-18 1997-02-20 Markus Vos Elektrodynamischer Zweikoordinatenantrieb
US6452292B1 (en) * 2000-06-26 2002-09-17 Nikon Corporation Planar motor with linear coil arrays

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4626749A (en) 1982-09-22 1986-12-02 Tokyo Electron Limited Two-dimensional positioning device
DE19531520A1 (de) 1995-07-20 1997-01-23 Heisel Uwe Prof Dr Ing Dr H C Vorrichtung zum Positionieren und Fixieren von Körpern
DE19722814A1 (de) 1997-05-30 1998-12-03 Dirk Dipl Ing Prust Mehrachsiger Antrieb mit variabler Polung
US7336006B2 (en) 2002-09-19 2008-02-26 Fuji Xerox Co., Ltd. Magnetic actuator with reduced magnetic flux leakage and haptic sense presenting device
US20060049699A1 (en) 2004-08-20 2006-03-09 Tsinghua University Synchronous permanent magnet planar motor

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015216199A1 (de) 2015-08-25 2017-03-02 Physik Instrumente (Pi) Gmbh & Co. Kg Planar-Positioniervorrichtung und Positioniertisch
WO2017032738A1 (fr) 2015-08-25 2017-03-02 Physik Instrumente (Pi) Gmbh & Co. Kg Dispositif de positionnement plan et table de positionnement
US10608517B2 (en) 2015-08-25 2020-03-31 Physik Instrumente (Pi) Gmbh & Co. Kg Planar positioning apparatus and positioning table
DE102015222482A1 (de) 2015-11-13 2017-05-18 Physik Instrumente (Pi) Gmbh & Co. Kg Planar-Positioniervorrichtung und Positioniertisch
US10461612B2 (en) 2015-11-13 2019-10-29 Physik Instrumente (Pi) Gmbh & Co. Kg Planar positioning apparatus and positioning table

Also Published As

Publication number Publication date
DE102008015384A1 (de) 2009-10-01
EP2260569A2 (fr) 2010-12-15
WO2009115071A3 (fr) 2010-01-21

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