WO2009114217A1 - Method of electrolytically dissolving nickel into electroless nickel plating solutions - Google Patents
Method of electrolytically dissolving nickel into electroless nickel plating solutions Download PDFInfo
- Publication number
- WO2009114217A1 WO2009114217A1 PCT/US2009/032547 US2009032547W WO2009114217A1 WO 2009114217 A1 WO2009114217 A1 WO 2009114217A1 US 2009032547 W US2009032547 W US 2009032547W WO 2009114217 A1 WO2009114217 A1 WO 2009114217A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- nickel
- plating bath
- bath
- electroless
- electroless nickel
- Prior art date
Links
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 title claims abstract description 179
- 229910052759 nickel Inorganic materials 0.000 title claims abstract description 86
- 238000007747 plating Methods 0.000 title claims abstract description 34
- 238000000034 method Methods 0.000 title claims abstract description 29
- 229910001453 nickel ion Inorganic materials 0.000 claims abstract description 12
- 239000000758 substrate Substances 0.000 claims abstract description 12
- 238000000151 deposition Methods 0.000 claims abstract description 11
- VEQPNABPJHWNSG-UHFFFAOYSA-N Nickel(2+) Chemical compound [Ni+2] VEQPNABPJHWNSG-UHFFFAOYSA-N 0.000 claims abstract description 10
- -1 hypophosphite ions Chemical class 0.000 claims abstract description 9
- 239000002253 acid Substances 0.000 claims abstract description 8
- 239000003014 ion exchange membrane Substances 0.000 claims abstract description 8
- 150000003839 salts Chemical class 0.000 claims abstract description 7
- 229910052751 metal Inorganic materials 0.000 claims description 13
- 239000002184 metal Substances 0.000 claims description 13
- 239000012528 membrane Substances 0.000 claims description 9
- 238000007772 electroless plating Methods 0.000 claims description 8
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 7
- 229910052719 titanium Inorganic materials 0.000 claims description 7
- 239000010936 titanium Substances 0.000 claims description 7
- 238000005341 cation exchange Methods 0.000 claims description 6
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 5
- LGQLOGILCSXPEA-UHFFFAOYSA-L nickel sulfate Chemical compound [Ni+2].[O-]S([O-])(=O)=O LGQLOGILCSXPEA-UHFFFAOYSA-L 0.000 claims description 5
- 229910000363 nickel(II) sulfate Inorganic materials 0.000 claims description 5
- 229910052698 phosphorus Inorganic materials 0.000 claims description 5
- 239000011574 phosphorus Substances 0.000 claims description 5
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 claims description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 4
- ACVYVLVWPXVTIT-UHFFFAOYSA-N phosphinic acid Chemical compound O[PH2]=O ACVYVLVWPXVTIT-UHFFFAOYSA-N 0.000 claims description 4
- 239000007864 aqueous solution Substances 0.000 claims description 3
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 claims description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 2
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims description 2
- 229910000147 aluminium phosphate Inorganic materials 0.000 claims description 2
- 229910052799 carbon Inorganic materials 0.000 claims description 2
- 229910052741 iridium Inorganic materials 0.000 claims description 2
- 239000001117 sulphuric acid Substances 0.000 claims description 2
- 235000011149 sulphuric acid Nutrition 0.000 claims description 2
- 229910052715 tantalum Inorganic materials 0.000 claims description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 2
- ISIJQEHRDSCQIU-UHFFFAOYSA-N tert-butyl 2,7-diazaspiro[4.5]decane-7-carboxylate Chemical compound C1N(C(=O)OC(C)(C)C)CCCC11CNCC1 ISIJQEHRDSCQIU-UHFFFAOYSA-N 0.000 claims description 2
- 229910052717 sulfur Inorganic materials 0.000 claims 1
- 239000011593 sulfur Substances 0.000 claims 1
- 238000007792 addition Methods 0.000 abstract description 9
- 150000001450 anions Chemical class 0.000 abstract description 8
- 230000008569 process Effects 0.000 abstract description 8
- 239000001257 hydrogen Substances 0.000 abstract description 6
- 229910052739 hydrogen Inorganic materials 0.000 abstract description 6
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 abstract description 3
- 239000000654 additive Substances 0.000 abstract description 3
- 239000003638 chemical reducing agent Substances 0.000 description 15
- 239000000243 solution Substances 0.000 description 14
- 230000008021 deposition Effects 0.000 description 8
- 229910021645 metal ion Inorganic materials 0.000 description 7
- 230000008901 benefit Effects 0.000 description 5
- 238000004090 dissolution Methods 0.000 description 5
- ACVYVLVWPXVTIT-UHFFFAOYSA-M phosphinate Chemical compound [O-][PH2]=O ACVYVLVWPXVTIT-UHFFFAOYSA-M 0.000 description 5
- XXSPKSHUSWQAIZ-UHFFFAOYSA-L 36026-88-7 Chemical compound [Ni+2].[O-]P=O.[O-]P=O XXSPKSHUSWQAIZ-UHFFFAOYSA-L 0.000 description 4
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 4
- 239000008139 complexing agent Substances 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- OFNHPGDEEMZPFG-UHFFFAOYSA-N phosphanylidynenickel Chemical compound [P].[Ni] OFNHPGDEEMZPFG-UHFFFAOYSA-N 0.000 description 4
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 229910000990 Ni alloy Inorganic materials 0.000 description 3
- 229910001096 P alloy Inorganic materials 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- QDWJUBJKEHXSMT-UHFFFAOYSA-N boranylidynenickel Chemical compound [Ni]#B QDWJUBJKEHXSMT-UHFFFAOYSA-N 0.000 description 3
- 230000003197 catalytic effect Effects 0.000 description 3
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 2
- 239000000908 ammonium hydroxide Substances 0.000 description 2
- 239000002585 base Substances 0.000 description 2
- UORVGPXVDQYIDP-UHFFFAOYSA-N borane Chemical compound B UORVGPXVDQYIDP-UHFFFAOYSA-N 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000002848 electrochemical method Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 150000002815 nickel Chemical class 0.000 description 2
- 229910000027 potassium carbonate Inorganic materials 0.000 description 2
- KWYUFKZDYYNOTN-UHFFFAOYSA-M potassium hydroxide Inorganic materials [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 2
- 238000006479 redox reaction Methods 0.000 description 2
- 238000006722 reduction reaction Methods 0.000 description 2
- 230000002269 spontaneous effect Effects 0.000 description 2
- 239000003381 stabilizer Substances 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- KWSLGOVYXMQPPX-UHFFFAOYSA-N 5-[3-(trifluoromethyl)phenyl]-2h-tetrazole Chemical compound FC(F)(F)C1=CC=CC(C2=NNN=N2)=C1 KWSLGOVYXMQPPX-UHFFFAOYSA-N 0.000 description 1
- 229910000521 B alloy Inorganic materials 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229920000557 Nafion® Polymers 0.000 description 1
- 229910021586 Nickel(II) chloride Inorganic materials 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 1
- 239000005864 Sulphur Substances 0.000 description 1
- MQRWBMAEBQOWAF-UHFFFAOYSA-N acetic acid;nickel Chemical compound [Ni].CC(O)=O.CC(O)=O MQRWBMAEBQOWAF-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 229910000085 borane Inorganic materials 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- RJTANRZEWTUVMA-UHFFFAOYSA-N boron;n-methylmethanamine Chemical compound [B].CNC RJTANRZEWTUVMA-UHFFFAOYSA-N 0.000 description 1
- 239000003060 catalysis inhibitor Substances 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000010960 commercial process Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 229910000457 iridium oxide Inorganic materials 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229940078494 nickel acetate Drugs 0.000 description 1
- QMMRZOWCJAIUJA-UHFFFAOYSA-L nickel dichloride Chemical compound Cl[Ni]Cl QMMRZOWCJAIUJA-UHFFFAOYSA-L 0.000 description 1
- 229910000008 nickel(II) carbonate Inorganic materials 0.000 description 1
- ZULUUIKRFGGGTL-UHFFFAOYSA-L nickel(ii) carbonate Chemical compound [Ni+2].[O-]C([O-])=O ZULUUIKRFGGGTL-UHFFFAOYSA-L 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000012279 sodium borohydride Substances 0.000 description 1
- 229910000033 sodium borohydride Inorganic materials 0.000 description 1
- MKWYFZFMAMBPQK-UHFFFAOYSA-J sodium feredetate Chemical compound [Na+].[Fe+3].[O-]C(=O)CN(CC([O-])=O)CCN(CC([O-])=O)CC([O-])=O MKWYFZFMAMBPQK-UHFFFAOYSA-J 0.000 description 1
- 229910001379 sodium hypophosphite Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1617—Purification and regeneration of coating baths
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1675—Process conditions
- C23C18/1676—Heating of the solution
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/32—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron
- C23C18/34—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron using reducing agents
- C23C18/36—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron using reducing agents using hypophosphites
Definitions
- the present invention relates to an improved method of replenishing the nickel concentration of an electroless nickel plating bath to avoid the introduction of unwanted anions to the system.
- Electroless plating refers to the autocatalytic or chemical reduction of metal ions in an aqueous solution to a metal which is deposited on a substrate.
- Typical electroless plating baths include electroless nickel and electroless copper, by way of example and not limitation.
- Components of the electroless plating bath include an aqueous solution of metal ions, reducing agents, complexing agents, bath stabilizers and a catalytic agent that operates at a specific metal ion concentration and within the specific temperature and pH range of the system.
- the base substrate, upon which the metal is plated, is usually catalytic in nature.
- the preferred preparation yields a substrate having a catalyzed surface and once the substrate is introduced into the electroless solution, uniform deposition begins.
- the deposition is autocatalytic. Electroless deposition continues, provided that the metal ion and the reducing agent are replenished and the proper pH of the bath is maintained.
- Electroless nickel plating generally deposits a nickel alloy onto a substrate which is capable of catalyzing the deposition of this alloy from a process solution containing nickel ions and a suitable chemical reducing agent which is capable of reducing nickel ions in solution to metallic nickel.
- These reducing agents typically include borohydride and hypophosphite ions.
- electroless nickel plating is carried out utilizing hypophosphite ions as the reducing agent.
- hypophosphite reduces the nickel at the catalytic surface, some phosphorus is co-deposited with the nickel yielding a nickel/phosphorus alloy containing between about 1 and 13% phosphorus.
- This alloy has unique properties in terms of corrosion resistance and (after heat treatment) hardness and wear resistance.
- electroless nickel plating include electronics, computers, valves, aircraft parts, and copier and typewriter parts, by way of example and not limitation.
- using a chemical rather than an electrochemical method to produce these alloys has advantages in terms of deposit thickness distribution, giving a very uniform coating when compared to coatings produced by electrochemical methods.
- metal ions are reduced to metal by the action of chemical reducing agents.
- the reducing agents are oxidized in the process.
- the catalyst may be the substrate or metallic surface on the substrate, which allows the reduction-oxidation reactions to occur with the ultimate deposition of metal on the substrate.
- the metal ion and reducer concentrations must be monitored and closely controlled in order to maintain proper ratios and to maintain the overall chemical balance within the plating bath.
- the electroless plating deposition rate is controlled by selecting the proper temperature, pH and metal ion/reducer concentrations.
- Complexing agents may be used as catalyst inhibitors to reduce the potential for spontaneous decomposition of the electroless bath.
- the chemical reducing agent most commonly used in electroless plating is sodium hypophosphite, resulting in the generation of nickel phosphorus alloys.
- Others include sodium borohydride, dimethylamine borane, and N-diethylamine borane, which give nickel boron alloys and hydrazine and hydrogen, which give pure nickel alloys.
- Electroless nickel plating baths are generally of four types: (1) alkaline nickel phosphorus; (2) acid nickel phosphorus; (3) alkaline nickel boron; and (4) acid nickel boron.
- hypophosphite, borane and hydrazine reducing baths There are many potential and actual formulations for hypophosphite, borane and hydrazine reducing baths. However, in all cases the nickel ion is reduced to nickel metal and the reducing agent is mostly oxidized but, to a lesser extent, may also become part of the nickel deposit.
- Nickel is maintained in the solution by the addition of a soluble nickel salt, which is typically nickel sulfate, nickel chloride, nickel acetate, nickel hypophosphite or combinations of one or more of the foregoing.
- a soluble nickel salt typically nickel sulfate, nickel chloride, nickel acetate, nickel hypophosphite or combinations of one or more of the foregoing.
- the anion builds up and limits the life of the solution, along with the oxidation product from the reducing agent, which is typically orthophosphite. In a conventional system, this means that only about 60 g/L of nickel can be deposited before the concentration of salts reaches the solubility limits.
- the source of nickel is nickel sulfate so the process solution also builds up in sulfate ion.
- the pH tends to fall due to the generation of hydrogen atoms, which must be neutralized by the addition of an alkali such as ammonia, sodium hydroxide or potassium carbonate solutions. Again, these ions build up in concentration during bath operation. Eventually, the bath reaches saturation (or before this the rate of metal deposition becomes too slow for commercial operation) and has to be replaced.
- an alkali such as ammonia, sodium hydroxide or potassium carbonate solutions.
- nickel hypophosphite rather than nickel sulfate. It can be manufactured by dissolution of nickel carbonate into hypophosphorous acid.
- nickel hypophosphite is a relatively expensive material and has limited solubility which gives rise to problems with bath maintenance.
- any electroless bath an oxidation-reduction reaction occurs which results in oxidation products and metallic nickel.
- the pH decreases with removal of metal cations leaving anions of the nickel salt or complexing agent and the oxidation products of the reducing agents; i.e., hypophosphite to orthophosphite.
- the nickel ion and the reducing agent concentrations decrease with deposition. It is essential that the complexing agents, bath stabilizers and other additives remain in the bath at acceptable concentrations as the nickel is being deposited to prevent spontaneous decomposition of the bath and to minimize the number of chemicals that must be monitored and controlled. Thus it can be seen that currently used electroless nickel baths have a limited life.
- the pH of the bath must be constantly adjusted with either an acid, usually sulfuric acid, or a base, usually ammonium hydroxide.
- the combination of hypophosphite oxidation producing orthophosphite and the reduction of nickel ions to metallic nickel usually results in excess acidity, which requires the addition of ammonium hydroxide to obtain the required pH.
- the inventors of the present invention have discovered that by immersing a nickel anode either directly or indirectly using a selective ion membrane into the electroless nickel bath and passing an electric current through the bath, preferably using a divided cell arrangement with a perfluorinated cation exchange membrane to separate anolyte and catholyte, the nickel content of the plating bath can be maintained without the introduction of undesirable anions. This enables the bath to be used for more metal turnovers than a conventionally maintained bath which minimizes waste generation and improves consistency of plating rate.
- the pH of the bath is far more stable.
- the pH of the bath falls during operation and additions of ammonia or potassium carbonate or hydroxide are required, which can sometimes generate localized instability of the bath.
- the bath is maintained by electrolytic dissolution of nickel and the pH remains relatively constant because the ionic balance of the solution is maintained by transport of hydrogen ions through the cation exchange membrane to the catholyte (to replace the hydrogen ions discharged at the cathode as hydrogen). This also contributes to increased bath life and stability.
- the present invention relates generally to the use of an electrolytic cell to dissolve nickel into an electroless nickel plating solution.
- the present invention also relates generally to the use of a separate cell for both the cathode, with a membrane to prevent passage of a nickel to the cathode so that no nickel is plated out and the anode so that the other constituents of the bath are not oxidised during the nickel dissolution.
- the present invention relates to a method of maintaining the concentration of nickel ions in a working electroless nickel bath by means of electrolytic dissolution of nickel from a nickel anode immersed in the bath, current being supplied to the anode via a counter electrode consisting of a lead, platinized titanium or iridium/tantalum oxide coated cathode, said cathode being separated from the working bath using a (perfluorinated) ion exchange membrane and utilising a catholyte consisting of sulphuric, phosphoric, phosphorous or hypophosphorous acids or salts.
- the present invention relates to a method of replenishing the nickel content of electroless nickel plating baths by electrolytic dissolution of nickel in the plating bath.
- the present invention relates to a method of replenishing nickel concentration in an electroless nickel plating bath comprising the steps of: a) depositing electroless nickel from an electroless nickel plating bath onto a substrate; b) immersing a nickel anode in the plating bath; c) completing the circuit by utilizing a cathode separated from the nickel bath by an ion exchange membrane and using a catholyte comprising an acid or a salt thereof; and d) passing a current through the bath, whereby nickel is dissolved into the plating bath to maintain the nickel concentration of the bath and hydrogen is discharged from the cathode.
- the nickel plating bath comprises a source of nickel ions and a source of hypophosphite ions.
- the source of nickel ions can be any suitable source of nickel ions, including for example nickel hypophosphite, but is preferably nickel sulfate.
- the catholyte typically comprises an acid selected from the group consisting of sulphuric acid, phosphoric acid, phosphorous acid, hypophosphorous acid and soluble salts.
- the nickel anode is typically selected from the group consisting of nickel metal and nickel metal containing additional elements selected from the group consisting of sulphur, phosphorus and carbon.
- the nickel anode comprises Nickel S-rounds in titanium basket, and the anode current density is preferably about 30-
- the ion exchange membrane is a cation exchange membrane.
- the cation exchange membrane is a perfluorinated cation exchange membrane, such as Nafion ® ion exchange membranes (available from DuPont de Nemours) or IONAC MC 3470 (manufactured by Sybron Chemicals, Inc. Birmingham,
- the cathode is typically selected from the group consisting of platinized titanium, iridium/tantalum coated titanium and lead. Other suitable cathodes would also be usable in the process of the invention.
- the electroless plating bath is typically operated at a temperature in the range of between about 75 and about 95°C.
- the cathode current density is typically maintained at about 20-30 Amps/sq. ft.
- the nickel is replenished by a conventional nickel anode, which can be used directly in the tank with the anodic current on, or separated from the solution with a membrane.
- the ability to replenish the nickel electrolytically can give many advantages, including (1) reducing the cost to the user; (2) as there are no anions introduced with the nickel, the bath life is increased by a factor of
- the cell can be adapted for use with all commonly used tanks, including for example stainless steel, polypropylene and titanium.
- the phosphorus in the deposit can vary between about 1-13 percent by weight and/or the boron in the deposit can vary between about 0.1-5 percent by weight.
- the deposit produced can be bright to dull depending on customer requirements.
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemically Coating (AREA)
Abstract
A method of extending the lifetime of an electroless nickel plating bath by avoiding the addition of unwanted anions to the process and of improving the pH stability of the bath and minimizing additions of pH correcting additives. The method includes the steps of (a) depositing electroless nickel from an electroless nickel plating bath onto a substrate, wherein the electroless nickel plating bath preferably contains a source of nickel ions and a source of hypophosphite ions; (2) immersing a nickel anode in the plating bath; (3) completing the circuit by utilizing a cathode separated from the nickel bath by an ion exchange membrane and using a catholyte comprising an acid or a salt thereof; and (4) passing a current through the bath. Nickel is dissolved into the plating bath to maintain the nickel concentration and hydrogen is discharged from the cathode.
Description
METHOD OF ELECTROLYTICALLY DISSOLVING NICKEL INTO ELECTROLESS NICKEL PLATING SOLUTIONS
FIELD OF THE INVENTION
The present invention relates to an improved method of replenishing the nickel concentration of an electroless nickel plating bath to avoid the introduction of unwanted anions to the system.
BACKGROUND OF THE INVENTION
Electroless plating refers to the autocatalytic or chemical reduction of metal ions in an aqueous solution to a metal which is deposited on a substrate. Typical electroless plating baths include electroless nickel and electroless copper, by way of example and not limitation. Components of the electroless plating bath include an aqueous solution of metal ions, reducing agents, complexing agents, bath stabilizers and a catalytic agent that operates at a specific metal ion concentration and within the specific temperature and pH range of the system. The base substrate, upon which the metal is plated, is usually catalytic in nature. Thus, the preferred preparation yields a substrate having a catalyzed surface and once the substrate is introduced into the electroless solution, uniform deposition begins. Minute amounts of the metal to be deposited on the substrate, i.e., nickel, further catalyze the reaction. After the original surfaces are coated with metal, the deposition is autocatalytic. Electroless deposition continues, provided that the metal ion and the reducing agent are replenished and the proper pH of the bath is maintained.
Electroless nickel plating generally deposits a nickel alloy onto a substrate which is capable of catalyzing the deposition of this alloy from a process solution containing nickel ions and a suitable chemical reducing agent which is capable of reducing nickel ions in solution to metallic nickel. These reducing agents typically include borohydride and hypophosphite ions. Typically, electroless nickel plating is carried out utilizing hypophosphite ions as the reducing agent. As the hypophosphite reduces the nickel at the catalytic surface, some phosphorus is co-deposited with the nickel yielding a
nickel/phosphorus alloy containing between about 1 and 13% phosphorus. This alloy has unique properties in terms of corrosion resistance and (after heat treatment) hardness and wear resistance. Common applications of electroless nickel plating include electronics, computers, valves, aircraft parts, and copier and typewriter parts, by way of example and not limitation. In addition to the unique properties of nickel phosphorus alloys, using a chemical rather than an electrochemical method to produce these alloys has advantages in terms of deposit thickness distribution, giving a very uniform coating when compared to coatings produced by electrochemical methods.
In electroless plating, metal ions are reduced to metal by the action of chemical reducing agents. The reducing agents are oxidized in the process. The catalyst may be the substrate or metallic surface on the substrate, which allows the reduction-oxidation reactions to occur with the ultimate deposition of metal on the substrate.
The metal ion and reducer concentrations must be monitored and closely controlled in order to maintain proper ratios and to maintain the overall chemical balance within the plating bath. The electroless plating deposition rate is controlled by selecting the proper temperature, pH and metal ion/reducer concentrations. Complexing agents may be used as catalyst inhibitors to reduce the potential for spontaneous decomposition of the electroless bath.
The chemical reducing agent most commonly used in electroless plating is sodium hypophosphite, resulting in the generation of nickel phosphorus alloys. Others include sodium borohydride, dimethylamine borane, and N-diethylamine borane, which give nickel boron alloys and hydrazine and hydrogen, which give pure nickel alloys. Electroless nickel plating baths are generally of four types: (1) alkaline nickel phosphorus; (2) acid nickel phosphorus; (3) alkaline nickel boron; and (4) acid nickel boron. There are many potential and actual formulations for hypophosphite, borane and hydrazine reducing baths. However, in all cases the nickel ion is reduced to nickel metal and the reducing agent is mostly oxidized but, to a lesser extent, may also become part of the nickel deposit.
In spite of the many advantages of electroless nickel deposits from an engineering point of view, the deposition of electroless nickel generates significant waste, As the solution ages, it also becomes more viscous and so the plating speed and brightness of the
deposit can be reduced. Most of the hypophosphite used to reduce the nickel becomes oxidized to orthophosphite which remains in the process solution and builds up in concentration until the bath must be replaced.
Nickel is maintained in the solution by the addition of a soluble nickel salt, which is typically nickel sulfate, nickel chloride, nickel acetate, nickel hypophosphite or combinations of one or more of the foregoing. The anion builds up and limits the life of the solution, along with the oxidation product from the reducing agent, which is typically orthophosphite. In a conventional system, this means that only about 60 g/L of nickel can be deposited before the concentration of salts reaches the solubility limits. In most commercial processes, the source of nickel is nickel sulfate so the process solution also builds up in sulfate ion. During operation of the bath, the pH tends to fall due to the generation of hydrogen atoms, which must be neutralized by the addition of an alkali such as ammonia, sodium hydroxide or potassium carbonate solutions. Again, these ions build up in concentration during bath operation. Eventually, the bath reaches saturation (or before this the rate of metal deposition becomes too slow for commercial operation) and has to be replaced.
One method of extending bath life is to add nickel to the bath as nickel hypophosphite rather than nickel sulfate. It can be manufactured by dissolution of nickel carbonate into hypophosphorous acid. However, nickel hypophosphite is a relatively expensive material and has limited solubility which gives rise to problems with bath maintenance.
In any electroless bath, an oxidation-reduction reaction occurs which results in oxidation products and metallic nickel. The pH decreases with removal of metal cations leaving anions of the nickel salt or complexing agent and the oxidation products of the reducing agents; i.e., hypophosphite to orthophosphite. The nickel ion and the reducing agent concentrations decrease with deposition. It is essential that the complexing agents, bath stabilizers and other additives remain in the bath at acceptable concentrations as the nickel is being deposited to prevent spontaneous decomposition of the bath and to minimize the number of chemicals that must be monitored and controlled. Thus it can be seen that currently used electroless nickel baths have a limited life.
The pH of the bath must be constantly adjusted with either an acid, usually sulfuric acid,
or a base, usually ammonium hydroxide. The combination of hypophosphite oxidation producing orthophosphite and the reduction of nickel ions to metallic nickel usually results in excess acidity, which requires the addition of ammonium hydroxide to obtain the required pH. The inventors of the present invention have discovered that by immersing a nickel anode either directly or indirectly using a selective ion membrane into the electroless nickel bath and passing an electric current through the bath, preferably using a divided cell arrangement with a perfluorinated cation exchange membrane to separate anolyte and catholyte, the nickel content of the plating bath can be maintained without the introduction of undesirable anions. This enables the bath to be used for more metal turnovers than a conventionally maintained bath which minimizes waste generation and improves consistency of plating rate.
Another unexpected benefit of using the process of the present invention for maintaining the nickel content of the electroless nickel bath is that the pH of the bath is far more stable. With a conventionally maintained electroless nickel bath, the pH of the bath falls during operation and additions of ammonia or potassium carbonate or hydroxide are required, which can sometimes generate localized instability of the bath. In the present invention, the bath is maintained by electrolytic dissolution of nickel and the pH remains relatively constant because the ionic balance of the solution is maintained by transport of hydrogen ions through the cation exchange membrane to the catholyte (to replace the hydrogen ions discharged at the cathode as hydrogen). This also contributes to increased bath life and stability.
SUMMARY OF THE INVENTION
It is an object of the present invention to provide an improved nickel plating bath solution.
It is another object of the present invention to extend the lifetime of an electroless nickel plating bath by avoiding the addition of unwanted anions to the process. It is still another object of the present invention to improve the pH stability of the bath and minimize additions of pH correcting additives.
To that end, the present invention relates generally to the use of an electrolytic cell to dissolve nickel into an electroless nickel plating solution. The present invention also relates generally to the use of a separate cell for both the cathode, with a membrane to prevent passage of a nickel to the cathode so that no nickel is plated out and the anode so that the other constituents of the bath are not oxidised during the nickel dissolution.
In one embodiment, the present invention relates to a method of maintaining the concentration of nickel ions in a working electroless nickel bath by means of electrolytic dissolution of nickel from a nickel anode immersed in the bath, current being supplied to the anode via a counter electrode consisting of a lead, platinized titanium or iridium/tantalum oxide coated cathode, said cathode being separated from the working bath using a (perfluorinated) ion exchange membrane and utilising a catholyte consisting of sulphuric, phosphoric, phosphorous or hypophosphorous acids or salts.
DESCRIPTION OF THE PREFERRED EMBODIMENTS
The present invention relates to a method of replenishing the nickel content of electroless nickel plating baths by electrolytic dissolution of nickel in the plating bath.
In order to maximize the efficiency of electroless nickel plating baths, it is necessary to minimize additions of unwanted anions. In one embodiment, the present invention relates to a method of replenishing nickel concentration in an electroless nickel plating bath comprising the steps of: a) depositing electroless nickel from an electroless nickel plating bath onto a substrate; b) immersing a nickel anode in the plating bath; c) completing the circuit by utilizing a cathode separated from the nickel bath by an ion exchange membrane and using a catholyte comprising an acid or a salt thereof; and d) passing a current through the bath, whereby nickel is dissolved into the plating bath to maintain the nickel concentration of the bath and hydrogen is discharged from the cathode.
In one embodiment, the nickel plating bath comprises a source of nickel ions and a source of hypophosphite ions. The source of nickel ions can be any suitable source of nickel ions, including for example nickel hypophosphite, but is preferably nickel sulfate.
The catholyte typically comprises an acid selected from the group consisting of sulphuric acid, phosphoric acid, phosphorous acid, hypophosphorous acid and soluble salts.
The nickel anode is typically selected from the group consisting of nickel metal and nickel metal containing additional elements selected from the group consisting of sulphur, phosphorus and carbon. In a preferred embodiment, the nickel anode comprises Nickel S-rounds in titanium basket, and the anode current density is preferably about 30-
40 Amps/sq. ft.
The ion exchange membrane is a cation exchange membrane. In a preferred embodiment, the cation exchange membrane is a perfluorinated cation exchange membrane, such as Nafion® ion exchange membranes (available from DuPont de Nemours) or IONAC MC 3470 (manufactured by Sybron Chemicals, Inc. Birmingham,
NJ, USA).
The cathode is typically selected from the group consisting of platinized titanium, iridium/tantalum coated titanium and lead. Other suitable cathodes would also be usable in the process of the invention. The electroless plating bath is typically operated at a temperature in the range of between about 75 and about 95°C. In addition, the cathode current density is typically maintained at about 20-30 Amps/sq. ft.
One of the benefits of the present invention is that the nickel is replenished by a conventional nickel anode, which can be used directly in the tank with the anodic current on, or separated from the solution with a membrane. The ability to replenish the nickel electrolytically can give many advantages, including (1) reducing the cost to the user; (2) as there are no anions introduced with the nickel, the bath life is increased by a factor of
2-3 times; and (3) as the nickel is dissolved electrolytically, the pH in the bath increases which reduces the need for pH correction and reduces the need for the introduction of potentially harmful alkalis.
The cell can be adapted for use with all commonly used tanks, including for example stainless steel, polypropylene and titanium. In addition, the phosphorus in the deposit can vary between about 1-13 percent by weight and/or the boron in the deposit can vary between about 0.1-5 percent by weight. Furthermore, the deposit produced can be bright to dull depending on customer requirements.
While the invention has been described above with reference to specific embodiments thereof, it is apparent that many changes, modifications, and variations can be made without departing from the inventive concept disclosed here. Accordingly, it is intended to embrace all such changes, modifications, and variations that fall within the spirit and broad scope of the appended claims. All patent applications, patents, and other publications cited herein are incorporated by reference in their entirety.
Claims
1. A method of replenishing nickel concentration in an electroless nickel plating bath, the method comprising the steps of: a) depositing electroless nickel from an electroless nickel plating bath onto a substrate; b) immersing an anode comprising nickel in the plating bath; c) completing the circuit by utilizing a cathode separated from the electroless nickel plating bath by an ion exchange membrane and using a catholyte comprising an aqueous solution of an acid or a salt; and d) passing a current through the bath, whereby nickel is dissolved into the electroless nickel plating bath.
2. The method according to claim I3 wherein the electroless nickel plating bath comprises a source of nickel ions and a source of hypophosphite ions
3. The method according to claim 1, wherein the catholyte comprises of an acid selected from the group consisting of sulphuric acid, phosphoric acid, phosphorous acid, hypophosphorous acid and soluble salts.
4. The method according to claim 2, wherein the source of nickel ions is nickel sulfate.
5. The method according to claim 1, wherein the nickel anode is selected from the group consisting of nickel metal and nickel metal containing additional elements selected from the group consisting of sulfur, phosphorus and carbon.
6. The method according to claim 5, wherein the nickel anode comprises: Nickel S- rounds.
7. The method according to claim 1, wherein the ion exchange membrane comprises a perfluorinated cation exchange membrane.
8. The method according to claim 1, wherein the cathode is selected from the group consisting of platinized titanium, iridium/tantalum coated titanium and lead.
9. The method according to claim 1, wherein the electroless plating bath is operated at a temperature of between about 75 and about 95 0C.
10. The method according to claim 1, wherein cathode current density is maintained at about 20-30A Amps/sq. ft.
11. The method of claim 1, wherein the anode is separated from the electroless nickel plating bath by a second ion exchange membrane.
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PL09720501T PL2242871T3 (en) | 2008-03-12 | 2009-01-30 | Method of electrolytically dissolving nickel into electroless nickel plating solutions |
EP09720501.7A EP2242871B1 (en) | 2008-03-12 | 2009-01-30 | Method of electrolytically dissolving nickel into electroless nickel plating solutions |
CN2009801078424A CN101960046A (en) | 2008-03-12 | 2009-01-30 | In electrolytic mode nickel is dissolved in method in the chemical nickel-plating liquid |
JP2010550712A JP2011514936A (en) | 2008-03-12 | 2009-01-30 | Method of electrolytically dissolving nickel in electroless nickel plating solution |
ES09720501.7T ES2661519T3 (en) | 2008-03-12 | 2009-01-30 | Method for dissolving nickel electrolytically in non-electrolytic nickel plating solutions |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/046,864 US8177956B2 (en) | 2008-03-12 | 2008-03-12 | Method of electrolytically dissolving nickel into electroless nickel plating solutions |
US12/046,864 | 2008-03-12 |
Publications (2)
Publication Number | Publication Date |
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WO2009114217A1 true WO2009114217A1 (en) | 2009-09-17 |
WO2009114217A8 WO2009114217A8 (en) | 2009-11-19 |
Family
ID=41063336
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Application Number | Title | Priority Date | Filing Date |
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PCT/US2009/032547 WO2009114217A1 (en) | 2008-03-12 | 2009-01-30 | Method of electrolytically dissolving nickel into electroless nickel plating solutions |
Country Status (8)
Country | Link |
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US (1) | US8177956B2 (en) |
EP (1) | EP2242871B1 (en) |
JP (1) | JP2011514936A (en) |
CN (1) | CN101960046A (en) |
ES (1) | ES2661519T3 (en) |
PL (1) | PL2242871T3 (en) |
TW (1) | TWI385275B (en) |
WO (1) | WO2009114217A1 (en) |
Families Citing this family (7)
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US20050289672A1 (en) * | 2004-06-28 | 2005-12-29 | Cambia | Biological gene transfer system for eukaryotic cells |
US10006126B2 (en) * | 2014-10-27 | 2018-06-26 | Surface Technology, Inc. | Plating bath solutions |
JP6344269B2 (en) * | 2015-03-06 | 2018-06-20 | 豊田合成株式会社 | Plating method |
CN106048638B (en) * | 2016-06-23 | 2018-05-04 | 广东佳纳能源科技有限公司 | A kind of method of the molten metallic nickel liquid making of small cathode deposition period reverse current electricity |
CN107675199A (en) * | 2017-11-20 | 2018-02-09 | 中国科学院兰州化学物理研究所 | The technique that a kind of electrolysis prepares nickel sulfate |
JP6984540B2 (en) * | 2018-05-23 | 2021-12-22 | トヨタ自動車株式会社 | Metal film film formation method |
EP4263726A1 (en) * | 2020-12-17 | 2023-10-25 | Coventya Inc. | Multilayer corrosion system |
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US5944879A (en) * | 1997-02-19 | 1999-08-31 | Elf Atochem North America, Inc. | Nickel hypophosphite solutions containing increased nickel concentration |
US6406611B1 (en) * | 1999-12-08 | 2002-06-18 | University Of Alabama In Huntsville | Nickel cobalt phosphorous low stress electroplating |
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US3303111A (en) * | 1963-08-12 | 1967-02-07 | Arthur L Peach | Electro-electroless plating method |
JPS5893864A (en) * | 1981-11-30 | 1983-06-03 | Nakamura Minoru | Electroless plating method |
JPS58157959A (en) * | 1982-03-13 | 1983-09-20 | Kanto Kasei Kogyo Kk | Method and apparatus for regenerating electroless plating bath |
JPH01119679A (en) * | 1987-11-02 | 1989-05-11 | Nec Corp | Method for administrating chemical copper plating liquid |
JPH01119678A (en) * | 1987-11-02 | 1989-05-11 | Nec Corp | Apparatus for administrating chemical copper plating liquid |
US5419821A (en) | 1993-06-04 | 1995-05-30 | Vaughan; Daniel J. | Process and equipment for reforming and maintaining electroless metal baths |
JPH0741957A (en) * | 1993-07-27 | 1995-02-10 | Taiyo Kagaku Kogyo Kk | Method for regenerating electroless copper plating solution |
US5522972A (en) * | 1994-07-19 | 1996-06-04 | Learonal, Inc. | Nickel hypophosphite manufacture |
GB9722028D0 (en) | 1997-10-17 | 1997-12-17 | Shipley Company Ll C | Plating of polymers |
DE19849278C1 (en) | 1998-10-15 | 2000-07-06 | Atotech Deutschland Gmbh | Method and device for the electrodialytic regeneration of an electroless plating bath |
JP3455709B2 (en) | 1999-04-06 | 2003-10-14 | 株式会社大和化成研究所 | Plating method and plating solution precursor used for it |
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2008
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-
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- 2009-01-30 WO PCT/US2009/032547 patent/WO2009114217A1/en active Application Filing
- 2009-01-30 PL PL09720501T patent/PL2242871T3/en unknown
- 2009-01-30 EP EP09720501.7A patent/EP2242871B1/en active Active
- 2009-01-30 CN CN2009801078424A patent/CN101960046A/en active Pending
- 2009-01-30 ES ES09720501.7T patent/ES2661519T3/en active Active
- 2009-01-30 JP JP2010550712A patent/JP2011514936A/en active Pending
- 2009-03-10 TW TW098107649A patent/TWI385275B/en not_active IP Right Cessation
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US6406611B1 (en) * | 1999-12-08 | 2002-06-18 | University Of Alabama In Huntsville | Nickel cobalt phosphorous low stress electroplating |
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See also references of EP2242871A4 |
Also Published As
Publication number | Publication date |
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EP2242871A4 (en) | 2016-11-16 |
JP2011514936A (en) | 2011-05-12 |
CN101960046A (en) | 2011-01-26 |
PL2242871T3 (en) | 2018-06-29 |
US8177956B2 (en) | 2012-05-15 |
ES2661519T3 (en) | 2018-04-02 |
TWI385275B (en) | 2013-02-11 |
US20090232999A1 (en) | 2009-09-17 |
TW201002860A (en) | 2010-01-16 |
WO2009114217A8 (en) | 2009-11-19 |
EP2242871A1 (en) | 2010-10-27 |
EP2242871B1 (en) | 2017-12-27 |
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