JP2017075379A5 - - Google Patents
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- JP2017075379A5 JP2017075379A5 JP2015203809A JP2015203809A JP2017075379A5 JP 2017075379 A5 JP2017075379 A5 JP 2017075379A5 JP 2015203809 A JP2015203809 A JP 2015203809A JP 2015203809 A JP2015203809 A JP 2015203809A JP 2017075379 A5 JP2017075379 A5 JP 2017075379A5
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- platinum
- electroless
- plating solution
- platinum plating
- acid
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- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 350
- 229910052697 platinum Inorganic materials 0.000 claims description 177
- 238000007747 plating Methods 0.000 claims description 136
- BDAGIHXWWSANSR-UHFFFAOYSA-N formic acid Chemical compound OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 claims description 35
- 239000003638 reducing agent Substances 0.000 claims description 33
- 150000003058 platinum compounds Chemical class 0.000 claims description 24
- -1 aliphatic hydroxy acids Chemical class 0.000 claims description 16
- 239000008139 complexing agent Substances 0.000 claims description 13
- WQZGKKKJIJFFOK-GASJEMHNSA-N D-Glucose Natural products OC[C@H]1OC(O)[C@H](O)[C@@H](O)[C@@H]1O WQZGKKKJIJFFOK-GASJEMHNSA-N 0.000 claims description 11
- WSFSSNUMVMOOMR-UHFFFAOYSA-N formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 claims description 11
- 235000019253 formic acid Nutrition 0.000 claims description 11
- 239000008103 glucose Substances 0.000 claims description 11
- WQZGKKKJIJFFOK-VFUOTHLCSA-N β-D-glucose Chemical compound OC[C@H]1O[C@@H](O)[C@H](O)[C@@H](O)[C@@H]1O WQZGKKKJIJFFOK-VFUOTHLCSA-N 0.000 claims description 11
- 239000002253 acid Substances 0.000 claims description 8
- 150000007524 organic acids Chemical class 0.000 claims description 8
- 150000001875 compounds Chemical class 0.000 claims description 7
- 229940045985 antineoplastic drugs Platinum compounds Drugs 0.000 claims description 6
- 150000003839 salts Chemical class 0.000 claims description 4
- 239000011780 sodium chloride Substances 0.000 claims description 4
- 239000000243 solution Substances 0.000 description 115
- IKDUDTNKRLTJSI-UHFFFAOYSA-N hydrazine hydrate Chemical compound O.NN IKDUDTNKRLTJSI-UHFFFAOYSA-N 0.000 description 22
- QGZKDVFQNNGYKY-UHFFFAOYSA-N ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 21
- 230000001603 reducing Effects 0.000 description 18
- 238000007772 electroless plating Methods 0.000 description 15
- PIICEJLVQHRZGT-UHFFFAOYSA-N 1,2-ethanediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 14
- 239000000463 material Substances 0.000 description 12
- 239000011248 coating agent Substances 0.000 description 11
- 238000000576 coating method Methods 0.000 description 11
- 230000000052 comparative effect Effects 0.000 description 11
- 230000002829 reduced Effects 0.000 description 11
- YOQDYZUWIQVZSF-UHFFFAOYSA-N sodium borohydride Substances [BH4-].[Na+] YOQDYZUWIQVZSF-UHFFFAOYSA-N 0.000 description 11
- 229910000033 sodium borohydride Inorganic materials 0.000 description 11
- ODGROJYWQXFQOZ-UHFFFAOYSA-N sodium;boron(1-) Chemical compound [B-].[Na+] ODGROJYWQXFQOZ-UHFFFAOYSA-N 0.000 description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 11
- BDAGIHXWWSANSR-UHFFFAOYSA-M methanoate Chemical compound [O-]C=O BDAGIHXWWSANSR-UHFFFAOYSA-M 0.000 description 10
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 10
- 238000000354 decomposition reaction Methods 0.000 description 7
- 150000002500 ions Chemical class 0.000 description 7
- 239000000758 substrate Substances 0.000 description 7
- CLSUSRZJUQMOHH-UHFFFAOYSA-L Platinum(II) chloride Chemical compound Cl[Pt]Cl CLSUSRZJUQMOHH-UHFFFAOYSA-L 0.000 description 6
- HLBBKKJFGFRGMU-UHFFFAOYSA-M Sodium formate Chemical compound [Na+].[O-]C=O HLBBKKJFGFRGMU-UHFFFAOYSA-M 0.000 description 6
- 239000004280 Sodium formate Substances 0.000 description 6
- MCMNRKCIXSYSNV-UHFFFAOYSA-N ZrO2 Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 6
- 229910001385 heavy metal Inorganic materials 0.000 description 6
- 235000019254 sodium formate Nutrition 0.000 description 6
- HEMHJVSKTPXQMS-UHFFFAOYSA-M sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 6
- UFHFLCQGNIYNRP-UHFFFAOYSA-N hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 229910052759 nickel Inorganic materials 0.000 description 5
- 238000006722 reduction reaction Methods 0.000 description 5
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 4
- 239000003795 chemical substances by application Substances 0.000 description 4
- 239000001257 hydrogen Substances 0.000 description 4
- 229910052739 hydrogen Inorganic materials 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000003002 pH adjusting agent Substances 0.000 description 4
- 239000004094 surface-active agent Substances 0.000 description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 3
- 239000001569 carbon dioxide Substances 0.000 description 3
- 229910002092 carbon dioxide Inorganic materials 0.000 description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
- 238000009713 electroplating Methods 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- MUBZPKHOEPUJKR-UHFFFAOYSA-N oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 3
- 150000003057 platinum Chemical class 0.000 description 3
- VZCYOOQTPOCHFL-OWOJBTEDSA-N (E)-but-2-enedioate;hydron Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 2
- RGHNJXZEOKUKBD-SQOUGZDYSA-N Gluconic acid Chemical compound OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C(O)=O RGHNJXZEOKUKBD-SQOUGZDYSA-N 0.000 description 2
- BJEPYKJPYRNKOW-UHFFFAOYSA-N Malic acid Chemical compound OC(=O)C(O)CC(O)=O BJEPYKJPYRNKOW-UHFFFAOYSA-N 0.000 description 2
- 239000002202 Polyethylene glycol Substances 0.000 description 2
- KDYFGRWQOYBRFD-UHFFFAOYSA-N Succinic acid Chemical compound OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 description 2
- IXSUHTFXKKBBJP-UHFFFAOYSA-L azanide;platinum(2+);dinitrite Chemical compound [NH2-].[NH2-].[Pt+2].[O-]N=O.[O-]N=O IXSUHTFXKKBBJP-UHFFFAOYSA-L 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- DHMQDGOQFOQNFH-UHFFFAOYSA-N glycine Chemical compound NCC(O)=O DHMQDGOQFOQNFH-UHFFFAOYSA-N 0.000 description 2
- 239000001630 malic acid Substances 0.000 description 2
- 235000011090 malic acid Nutrition 0.000 description 2
- 229940099690 malic acid Drugs 0.000 description 2
- OFOBLEOULBTSOW-UHFFFAOYSA-N malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N oxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 229920001223 polyethylene glycol Polymers 0.000 description 2
- 238000001878 scanning electron micrograph Methods 0.000 description 2
- 229920003002 synthetic resin Polymers 0.000 description 2
- 239000000057 synthetic resin Substances 0.000 description 2
- FBEIPJNQGITEBL-UHFFFAOYSA-J tetrachloroplatinum Chemical compound Cl[Pt](Cl)(Cl)Cl FBEIPJNQGITEBL-UHFFFAOYSA-J 0.000 description 2
- DLDJFQGPPSQZKI-UHFFFAOYSA-N 1,4-Butynediol Chemical compound OCC#CCO DLDJFQGPPSQZKI-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N AI2O3 Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229920000122 Acrylonitrile butadiene styrene Polymers 0.000 description 1
- VZTDIZULWFCMLS-UHFFFAOYSA-N Ammonium formate Chemical compound [NH4+].[O-]C=O VZTDIZULWFCMLS-UHFFFAOYSA-N 0.000 description 1
- SRSXLGNVWSONIS-UHFFFAOYSA-N Benzenesulfonic acid Chemical compound OS(=O)(=O)C1=CC=CC=C1 SRSXLGNVWSONIS-UHFFFAOYSA-N 0.000 description 1
- 239000004471 Glycine Substances 0.000 description 1
- 229960000448 Lactic acid Drugs 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- WFIZEGIEIOHZCP-UHFFFAOYSA-M Potassium formate Chemical compound [K+].[O-]C=O WFIZEGIEIOHZCP-UHFFFAOYSA-M 0.000 description 1
- CVHZOJJKTDOEJC-UHFFFAOYSA-N Saccharin Chemical compound C1=CC=C2C(=O)NS(=O)(=O)C2=C1 CVHZOJJKTDOEJC-UHFFFAOYSA-N 0.000 description 1
- 229940081974 Saccharin Drugs 0.000 description 1
- HRXKRNGNAMMEHJ-UHFFFAOYSA-K Trisodium citrate Chemical compound [Na+].[Na+].[Na+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O HRXKRNGNAMMEHJ-UHFFFAOYSA-K 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- BWKOZPVPARTQIV-UHFFFAOYSA-N azanium;hydron;2-hydroxypropane-1,2,3-tricarboxylate Chemical compound [NH4+].OC(=O)CC(O)(C(O)=O)CC([O-])=O BWKOZPVPARTQIV-UHFFFAOYSA-N 0.000 description 1
- 229940092714 benzenesulfonic acid Drugs 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229960004106 citric acid Drugs 0.000 description 1
- 235000015165 citric acid Nutrition 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- VZCYOOQTPOCHFL-UHFFFAOYSA-N fumaric acid Chemical compound OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 1
- 239000001530 fumaric acid Substances 0.000 description 1
- 239000000174 gluconic acid Substances 0.000 description 1
- 235000012208 gluconic acid Nutrition 0.000 description 1
- 229950006191 gluconic acid Drugs 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 230000001771 impaired Effects 0.000 description 1
- JVTAAEKCZFNVCJ-UHFFFAOYSA-N lactic acid Chemical compound CC(O)C(O)=O JVTAAEKCZFNVCJ-UHFFFAOYSA-N 0.000 description 1
- 239000004310 lactic acid Substances 0.000 description 1
- 235000014655 lactic acid Nutrition 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000011976 maleic acid Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- YZMHQCWXYHARLS-UHFFFAOYSA-N naphthalene-1,2-disulfonic acid Chemical compound C1=CC=CC2=C(S(O)(=O)=O)C(S(=O)(=O)O)=CC=C21 YZMHQCWXYHARLS-UHFFFAOYSA-N 0.000 description 1
- 235000006408 oxalic acid Nutrition 0.000 description 1
- 238000010979 pH adjustment Methods 0.000 description 1
- 239000006174 pH buffer Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- NDBYXKQCPYUOMI-UHFFFAOYSA-N platinum(4+) Chemical compound [Pt+4] NDBYXKQCPYUOMI-UHFFFAOYSA-N 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 239000011528 polyamide (building material) Substances 0.000 description 1
- 229920005668 polycarbonate resin Polymers 0.000 description 1
- 239000004431 polycarbonate resin Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 235000019204 saccharin Nutrition 0.000 description 1
- 239000000901 saccharin and its Na,K and Ca salt Substances 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 239000001384 succinic acid Substances 0.000 description 1
- 229910052716 thallium Inorganic materials 0.000 description 1
- BKVIYDNLLOSFOA-UHFFFAOYSA-N thallium Chemical compound [Tl] BKVIYDNLLOSFOA-UHFFFAOYSA-N 0.000 description 1
- 239000011778 trisodium citrate Substances 0.000 description 1
- 229940038773 trisodium citrate Drugs 0.000 description 1
- 235000019263 trisodium citrate Nutrition 0.000 description 1
Description
本件発明は、無電解白金めっき液に関する。 The present invention relates to an electroless platinum plating solution.
従来、無電解白金めっき液は、白金塩としてのジニトロジアンミン白金又はジニトロテトラアンミン白金と、錯化剤としてのエチレンジアミン又はアンモニアと、還元剤としてのヒドラジン一水和物又は水素化ホウ素ナトリウムとを含むものが知られている(例えば、特許文献1〜4参照)。 Conventionally, an electroless platinum plating solution, containing a Jinitoroji ammine platinum or dinitro tetraamine platinum as platinum salt, and ethylenediamine or ammonia as a complexing agent and hydrazine monohydrate or sodium borohydride as a reducing agent Is known (see, for example, Patent Documents 1 to 4).
ジニトロジアンミン白金及びジニトロテトラアンミン白金は、水に難溶性である。そこで、錯化剤としてエチレンジアミン又はアンモニアを当該無電解白金めっき液に添加することにより、白金にエチレンジアミン又はアンモニアが配位した白金錯体を形成して水に溶解させている。 Jinitoroji ammine platinum and dinitro tetraamine platinum is poorly soluble in water. Therefore, by adding ethylenediamine or ammonia as a complexing agent to the electroless platinum plating solution, a platinum complex in which ethylenediamine or ammonia is coordinated to platinum is formed and dissolved in water.
一般に、無電解白金めっき液に還元剤を添加することにより、めっき基材の表面で金属イオン又は金属錯体を還元して金属を析出させることができる。白金にエチレンジアミン又はアンモニアが配位した上記白金錯体は還元を受けにくいため、還元剤として、還元作用が強いヒドラジン一水和物又は水酸化ホウ素ナトリウムが当該無電解白金めっき液に添加されている。しかしながら、ヒドラジン一水和物及び水素化ホウ素ナトリウムは、還元力が強すぎるため、上記白金錯体の還元によってめっき液中に白金が析出したり、還元反応に伴って水素が発生するという問題がある。 In general, by adding a reducing agent to the electroless platinum plating solution, metal ions or metal complexes can be reduced on the surface of the plating substrate to deposit a metal. Since the platinum complex in which ethylenediamine or ammonia is coordinated to platinum is not easily reduced, hydrazine monohydrate or sodium borohydride having a strong reducing action is added to the electroless platinum plating solution as a reducing agent. However, since hydrazine monohydrate and sodium borohydride have too much reducing power, there is a problem that platinum is precipitated in the plating solution due to the reduction of the platinum complex and hydrogen is generated in accordance with the reduction reaction. .
そこで、上記問題を解決するために、上記無電解白金めっき液では、鉛、タリウム等の重金属イオンやチオール化合物を安定剤として添加することにより、溶液の安定性を向上させている。 Therefore, in order to solve the above problems, in the electroless platinum plating solution, the stability of the solution is improved by adding heavy metal ions such as lead and thallium and thiol compounds as stabilizers.
しかしながら、上記重金属イオンやチオール化合物の濃度管理が必要となるため、めっき液の操作が複雑になる。また、上記重金属イオンは人体に有害である上に、析出した白金皮膜に共析して皮膜純度を低下させることがある。また、使用に伴ってめっき液からアンモニアガスが発生するため、アンモニアガスの発生に伴う臭気によって作業環境が低下する。 However, since the concentration management of the heavy metal ions and thiol compounds is necessary, the operation of the plating solution is complicated. In addition, the heavy metal ions are harmful to the human body and may be co-deposited on the deposited platinum film to lower the film purity. Moreover, since ammonia gas is generated from the plating solution with use, the working environment is lowered by the odor accompanying the generation of ammonia gas.
そこで、本件発明の課題は、重金属イオンやチオール化合物を使用しなくても優れた溶液安定性を得ることができ、且つ、アンモニアガスの発生を防止することができる無電解白金めっき液を提供することにある。 Accordingly, an object of the present invention is to provide an electroless platinum plating solution that can obtain excellent solution stability without using heavy metal ions or thiol compounds and can prevent generation of ammonia gas. There is.
本件発明者等は、鋭意検討を行った結果、従来の無電解白金めっき液では、以下の理由によって溶液の安定性が低下することを見出した。すなわち、従来の無電解白金めっき液では、錯化剤として用いるエチレンジアミン又はアンモニアが白金イオンに配位することにより白金錯体が形成される。エチレンジアミン又はアンモニアは白金イオンと強く錯体形成するため、当該白金錯体を還元してめっき基材の表面に析出させるためには、還元作用の強い還元剤が必要となる。この結果、還元作用の強い還元剤の還元力によって、当該無電解白金めっき液が還元されて分解されてしまう。
そこで、本件発明者等は、以下の無電解白金めっき液を採用することで上記課題を達成するに至った。
As a result of intensive studies, the inventors of the present invention have found that the conventional electroless platinum plating solution decreases the stability of the solution for the following reason. That is, in a conventional electroless platinum plating solution, a platinum complex is formed by coordination of ethylenediamine or ammonia used as a complexing agent to platinum ions. Since ethylenediamine or ammonia forms a strong complex with platinum ions, a reducing agent with a strong reducing action is required to reduce the platinum complex and deposit it on the surface of the plating substrate. As a result, the electroless platinum plating solution is reduced and decomposed by the reducing power of the reducing agent having a strong reducing action.
Therefore, the present inventors have achieved the above problem by employing the following electroless platinum plating solution.
本件発明の無電解白金めっき液は、水溶性白金化合物と、ホルマリン、グルコース、ギ酸、ギ酸塩からなる群から選択される1種以上の還元剤とを含み、前記水溶性白金化合物は、ヘキサヒドロキソ白金(IV)酸、ヘキサヒドロキソ白金(IV)酸塩、ジクロロテトラアンミン白金(II)からなる群から選択される1種以上の水溶性白金化合物であることを特徴とする。 Electroless platinum plating solution of the present invention, a water-soluble platinum compounds, formalin, glucose, formic acid, see contains the one or more reducing agents selected from the group consisting of formic acid salt, the water-soluble platinum compounds, hexa It is one or more water-soluble platinum compounds selected from the group consisting of hydroxoplatinum (IV) acid, hexahydroxoplatinum (IV) acid salt, and dichlorotetraammineplatinum (II) .
本件発明に係る無電解白金めっき液において、錯化剤として有機酸を含むことが好ましい。前記有機酸として、分子量が90〜500の脂肪族ヒドロキシ酸から選択される1種以上の化合物が好ましい。 The electroless platinum plating solution according to the present invention preferably contains an organic acid as a complexing agent. The organic acid is preferably one or more compounds selected from aliphatic hydroxy acids having a molecular weight of 90 to 500.
本件発明に係る無電解白金めっき液では、水溶性白金化合物を用いるので、エチレンジアミン、アンモニア等の白金イオンと強く錯体形成するような錯化剤を含まなくても、白金化合物は白金錯体を生成して水に容易に溶解する。水溶性白金化合物から生成される白金錯体は、従来の無電解白金めっき液で生成される白金にエチレンジアミン又はアンモニアが配位した白金錯体と比較して、還元され易い。このため、還元剤として、還元作用が弱いホルマリン、グルコース、ギ酸、ギ酸塩を用いても、白金錯体を還元し易い状態にすることができる。 In the electroless platinum plating solution according to the present invention, since a water-soluble platinum compound is used, the platinum compound generates a platinum complex even if it does not contain a complexing agent that strongly forms a complex with platinum ions such as ethylenediamine and ammonia. Easily dissolved in water. A platinum complex produced from a water-soluble platinum compound is easily reduced as compared with a platinum complex in which ethylenediamine or ammonia is coordinated to platinum produced by a conventional electroless platinum plating solution. For this reason, even if formalin, glucose, formic acid, and formate having a weak reducing action are used as the reducing agent, the platinum complex can be easily reduced.
また、還元剤としてのホルマリン、グルコース、ギ酸、ギ酸塩は、いずれも、ヒドラジン一水和物、水酸化ホウ素ナトリウムと比較して還元作用が弱い。このため、当該無電解白金めっき液は、当該還元剤によって分解されることがない。従って、当該無電解白金めっき液は、重金属イオンやチオール化合物を用いなくても、従来の無電解白金めっき液と比較して、優れた溶液安定性を得ることができる。また、ホルマリン、グルコース、ギ酸、ギ酸塩は、いずれも、従来の還元剤としてのヒドラジン一水和物、水酸化ホウ素ナトリウムと比較して水素発生量が少ないという点でも好適である。 In addition, formalin, glucose, formic acid, and formate as reducing agents all have a weaker reducing action than hydrazine monohydrate and sodium borohydride. For this reason, the electroless platinum plating solution is not decomposed by the reducing agent. Therefore, the electroless platinum plating solution can obtain excellent solution stability as compared with the conventional electroless platinum plating solution without using heavy metal ions or thiol compounds. Also, formalin, glucose, formic acid, and formate are all suitable in that the amount of hydrogen generation is small compared to hydrazine monohydrate and sodium borohydride as conventional reducing agents.
さらに、当該無電解白金めっき液は、エチレンジアミン、アンモニア等のアンモニアガスを発生しうる化合物を含まないため、アンモニアガスの発生を防止することができる。 Furthermore, since the electroless platinum plating solution does not contain a compound capable of generating ammonia gas such as ethylenediamine and ammonia, generation of ammonia gas can be prevented.
以下、本件発明に係る無電解白金めっき液の実施の形態を説明する。 Hereinafter, embodiments of the electroless platinum plating solution according to the present invention will be described.
〔1.無電解白金めっき液〕
本件発明の無電解白金めっき液は、水溶性白金化合物と、ホルマリン、グルコース、ギ酸、ギ酸塩からなる群から選択される1種以上の還元剤とを含む水溶液である。
[1. (Electroless platinum plating solution)
The electroless platinum plating solution of the present invention is an aqueous solution containing a water-soluble platinum compound and one or more reducing agents selected from the group consisting of formalin, glucose, formic acid, and formate.
水溶性白金化合物として、例えば、塩化第一白金(II)、塩化白金(II)酸、塩化白金(II)酸塩、塩化第二白金(IV)、塩化白金(IV)酸、塩化白金(IV)酸塩、ヘキサヒドロキソ白金(IV)酸、ヘキサヒドロキソ白金(IV)酸塩、ジクロロテトラアンミン白金(II)からなる群から選択される1種以上の水溶性白金化合物を挙げることができる。 Examples of the water-soluble platinum compound include platinum (II) chloride, platinum (II) chloride, platinum (II) chloride, platinum (IV) chloride, platinum (IV) acid, and platinum chloride (IV). ) Acid salt, hexahydroxoplatinum (IV) acid, hexahydroxoplatinum (IV) acid salt, one or more water-soluble platinum compounds selected from the group consisting of dichlorotetraammineplatinum (II).
当該無電解白金めっき液は、上記水溶性白金化合物を0.0005mol/L以上0.05mol/L以下の範囲で含有することが好ましく、0.0025mol/L以上0.01mol/L以下の範囲で含有することがさらに好ましい。無電解白金めっき液における水溶性白金化合物の含有量が0.0005mol/L未満であると、白金無電解皮膜の形成が困難となったり、めっき速度の低下が生じることがあり、0.05mol/Lを上回ると、めっき自体は良好に行えるものの経済性が低下する。 The electroless platinum plating solution preferably contains the water-soluble platinum compound in the range of 0.0005 mol / L to 0.05 mol / L, and in the range of 0.0025 mol / L to 0.01 mol / L. It is more preferable to contain. If the content of the water-soluble platinum compound in the electroless platinum plating solution is less than 0.0005 mol / L, it may be difficult to form a platinum electroless coating or the plating rate may be reduced. When L is exceeded, although the plating itself can be performed satisfactorily, the economic efficiency decreases.
塩化白金(IV)は、当該無電解白金めっき液に容易に溶解し、下記の式(1)で表される白金錯体を形成する。 Platinum chloride (IV) is easily dissolved in the electroless platinum plating solution to form a platinum complex represented by the following formula (1).
ジクロロテトラアンミン白金(II)は、当該無電解白金めっき液に容易に溶解し、下記の式(2)で表される白金錯体を形成する。 Dichlorotetraammineplatinum (II) is easily dissolved in the electroless platinum plating solution to form a platinum complex represented by the following formula (2).
上記式(1)及び式(2)で表される白金錯体は、いずれも、従来の無電解白金めっき液で生成される白金にエチレンジアミンが配位した白金錯体と比較して、還元を受け易い。このため、当該無電解白金めっき液は、還元作用が強い還元剤を用いる必要がなく、還元作用が弱い還元剤を用いても、白金錯体を還元し易い状態にすることができる。 The platinum complexes represented by the above formulas (1) and (2) are more susceptible to reduction as compared with platinum complexes in which ethylenediamine is coordinated to platinum produced by a conventional electroless platinum plating solution. . For this reason, the electroless platinum plating solution does not need to use a reducing agent having a strong reducing action, and even if a reducing agent having a weak reducing action is used, the platinum complex can be easily reduced.
ホルマリン、グルコース、ギ酸、ギ酸塩からなる群から選択される1種以上の還元剤は、いずれも、還元作用が小さいが、上記式(1)及び式(2)で表される白金錯体を還元し易い状態にすることができる。上記還元剤は、いずれも、還元反応に伴って生じる分解物が主に二酸化炭素及び水であり、ヒドラジン一水和物又は水酸化ホウ素ナトリウムと比較して水素発生量が少ないという利点がある。また、当該無電解白金めっき液は、後述するようにpH6.5〜12.0の範囲に調整されるが、上記還元剤はこのpH領域全体に亘って使用可能である。 One or more reducing agents selected from the group consisting of formalin, glucose, formic acid, and formate all reduce the platinum complex represented by the above formulas (1) and (2), although the reducing action is small. It is possible to make it easy to do. In any of the above reducing agents, the decomposition products generated in the reduction reaction are mainly carbon dioxide and water, and there is an advantage that the amount of hydrogen generation is small compared to hydrazine monohydrate or sodium borohydride. Moreover, although the said electroless platinum plating solution is adjusted to the range of pH 6.5-12.0 so that it may mention later, the said reducing agent can be used over this whole pH range.
当該無電解白金めっき液は、上記還元剤を0.1mol/L以上1.0mol/L以下の範囲で含有することが好ましく、0.2mol/L以上0.8mol/L以下の範囲で含有することがさらに好ましい。無電解白金めっき液における上記還元剤の含有量が0.1mol/L未満であると、未析出部が生じることがあり、1.0mol/Lを上回ると、上記還元剤の還元作用が過剰となり、溶液安定性を損なうことがある。 The electroless platinum plating solution preferably contains the reducing agent in a range of 0.1 mol / L to 1.0 mol / L, and in a range of 0.2 mol / L to 0.8 mol / L. More preferably. If the content of the reducing agent in the electroless platinum plating solution is less than 0.1 mol / L , an undeposited part may occur. If the content exceeds 1.0 mol / L, the reducing agent has an excessive reducing action. And solution stability may be impaired.
また、ギ酸塩としては、ギ酸ナトリウム、ギ酸カリウム、ギ酸アンモニウムを用いることができる。水易溶性、取り扱い容易性の点で、ギ酸ナトリウムが好適である。 As formate, sodium formate, potassium formate, and ammonium formate can be used. Sodium formate is preferred in terms of easy water solubility and ease of handling.
当該無電解白金めっき液では、水溶性白金化合物を用いるので、白金化合物を水に溶解するために必ずしも錯化剤を必要としない。しかし、錯化剤を添加することにより、当該無電解白金めっき液をさらに安定化させることができる。 Since the electroless platinum plating solution uses a water-soluble platinum compound, a complexing agent is not necessarily required to dissolve the platinum compound in water. However, the electroless platinum plating solution can be further stabilized by adding a complexing agent.
錯化剤として、有機酸を用いることが好ましい。有機酸として、分子量が90〜500の脂肪族ヒドロキシ酸から選択される1種以上の化合物であることが好ましく、例えば、乳酸、リンゴ酸、クエン酸、クエン酸3ナトリウム、クエン酸アンモニウム、グリシン、グルコン酸、マロン酸、シュウ酸、コハク酸、酢酸、マレイン酸、フマル酸からなる群から選択される1種以上の化合物を用いることができる。当該錯化剤は、pH緩衝材としても作用する。 An organic acid is preferably used as the complexing agent. The organic acid is preferably one or more compounds selected from aliphatic hydroxy acids having a molecular weight of 90 to 500, such as lactic acid, malic acid, citric acid, trisodium citrate, ammonium citrate, glycine, One or more compounds selected from the group consisting of gluconic acid, malonic acid, oxalic acid, succinic acid, acetic acid, maleic acid, and fumaric acid can be used. The complexing agent also acts as a pH buffer material.
当該無電解白金めっき液は、上記有機酸を0.01mol/L以上0.5mol/L以下の範囲で含有することが好ましく、0.02mol/L以上0.3mol/L以下の範囲で含有することがさらに好ましい。無電解白金めっき液における上記有機酸の含有量が0.01mol/Lを下回ると、錯化剤として作用しないことがあり、0.5mol/Lを超えると、めっき自体は良好に行えるものの経済性が低下する。 The electroless platinum plating solution preferably contains the organic acid in a range of 0.01 mol / L to 0.5 mol / L, and in a range of 0.02 mol / L to 0.3 mol / L. More preferably. If the content of the organic acid in the electroless platinum plating solution is less than 0.01 mol / L, it may not act as a complexing agent, and if it exceeds 0.5 mol / L, the plating itself can be performed satisfactorily. Decreases.
当該無電解白金めっき液は、さらに、界面活性剤、応力緩和剤、pH調整剤等の各種の成分を含む構成とすることができる。 The electroless platinum plating solution may further include various components such as a surfactant, a stress relaxation agent, and a pH adjuster.
界面活性剤として、ポリエチレングリコールを用いることができる他、従来公知の種々の界面活性剤を用いることができる。界面活性剤としてポリエチレングリコールを用いる場合、めっき基材の表面の濡れ性を向上すると共に、めっき基材の表面で気泡が生じたときに、その気泡をめっき基材の表面から離れ易くすることができる。 As the surfactant, polyethylene glycol can be used, and various conventionally known surfactants can be used. When polyethylene glycol is used as a surfactant, it improves the wettability of the surface of the plating substrate, and when bubbles are generated on the surface of the plating substrate, the bubbles can be easily separated from the surface of the plating substrate. it can.
応力緩和剤として、サッカリン、1,4−ブチンジオール、ベンゼンスルホン酸、ナフタレンジスルホン酸を用いることができる他、従来公知の種々の応力緩和剤を用いることができる。 As a stress relaxation agent, saccharin, 1, 4-butynediol, benzenesulfonic acid, addition can be used naphthalene disulfonic acid, can be used various known stress relaxation agent.
pH調整剤として、水酸化ナトリウム、硫酸等を用いることができる。当該無電解白金めっき液は、pH調整剤の添加によって、pH6.5〜13.0の範囲に調整されることが好ましい。当該無電解白金めっき液におけるpHが6.5未満であると、上記還元剤の還元作用が低下することがある。当該無電解白金めっき液におけるpHが13.0を上回ったとしても特に問題が生じることはないが、pH調整等の作業性や浴管理の点から13.0以下とすることが好ましい。 As a pH adjuster, sodium hydroxide, sulfuric acid, or the like can be used. The electroless platinum plating solution is preferably adjusted to a pH range of 6.5 to 13.0 by adding a pH adjuster. If the pH in the electroless platinum plating solution is less than 6.5, the reducing action of the reducing agent may be reduced. Even if the pH of the electroless platinum plating solution exceeds 13.0, no particular problem occurs, but it is preferably 13.0 or less from the viewpoint of workability such as pH adjustment and bath management.
また、当該無電解白金めっき液は、pHを上記範囲で調整することにより、得られる白金無電解皮膜の外観を変えることができる。例えば、当該無電解白金めっき液のpHが7の場合には、灰色の白金無電解皮膜を得ることができ、pHが12の場合には白色の白金無電解皮膜を得ることができる。 Moreover, the said electroless platinum plating liquid can change the external appearance of the platinum electroless membrane | film | coat obtained by adjusting pH in the said range. For example, when the pH of the electroless platinum plating solution is 7, a gray platinum electroless coating can be obtained, and when the pH is 12, a white platinum electroless coating can be obtained.
本実施形態の無電解白金めっき液によれば、塩化第一白金(II)、塩化第二白金(IV)、ヘキサヒドロキソ白金(IV)酸塩、ジクロロテトラアンミン白金(II)等の水溶性白金化合物を用いるので、錯化剤を含まなくても、この白金化合物は白金錯体を形成して水に容易に溶解することができる。また、上記水溶性白金化合物から生成する白金錯体は、従来の無電解白金めっき液で生成される白金にエチレンジアミンが配位した白金錯体と比較して、還元を受け易い。このため、還元剤として、還元作用が弱いホルマリン、グルコース、ギ酸、ギ酸塩を用いても、白金錯体を還元し易い状態にすることができる。 According to the electroless platinum plating solution of this embodiment, a water-soluble platinum compound such as platinum (II) chloride, platinum (IV) chloride, hexahydroxoplatinum (IV), dichlorotetraammine platinum (II), etc. Therefore, even if it does not contain a complexing agent, this platinum compound forms a platinum complex and can be easily dissolved in water. Moreover, the platinum complex produced | generated from the said water-soluble platinum compound is easy to receive a reduction | restoration compared with the platinum complex which ethylenediamine coordinated to the platinum produced | generated with the conventional electroless platinum plating solution. For this reason, even if formalin, glucose, formic acid, and formate having a weak reducing action are used as the reducing agent, the platinum complex can be easily reduced.
また、還元剤としてのホルマリン、グルコース、ギ酸、ギ酸塩は、いずれも、ヒドラジン一水和物、水酸化ホウ素ナトリウムと比較して還元作用が弱い。このため、当該無電解白金めっき液は、当該還元剤によって分解されることがない。従って、当該無電解白金めっき液は、重金属イオンやチオール化合物を用いなくても、従来の無電解白金めっき液と比較して、優れた溶液安定性を得ることができる。また、ホルマリン、グルコース、ギ酸、ギ酸塩は、いずれも、従来の還元剤としてのヒドラジン一水和物、水酸化ホウ素ナトリウムと比較して水素発生量が少ないという点でも好適である。 In addition, formalin, glucose, formic acid, and formate as reducing agents all have a weaker reducing action than hydrazine monohydrate and sodium borohydride. For this reason, the electroless platinum plating solution is not decomposed by the reducing agent. Therefore, the electroless platinum plating solution can obtain excellent solution stability as compared with the conventional electroless platinum plating solution without using heavy metal ions or thiol compounds. Also, formalin, glucose, formic acid, and formate are all suitable in that the amount of hydrogen generation is small compared to hydrazine monohydrate and sodium borohydride as conventional reducing agents.
さらに、当該無電解白金めっき液は、エチレンジアミン等のアンモニアガスを発生しうる化合物を含まないため、アンモニアガスの発生を防止することができる。 Furthermore, since the electroless platinum plating solution does not contain a compound capable of generating ammonia gas such as ethylenediamine, generation of ammonia gas can be prevented.
〔2.無電解白金めっき液による無電解めっき処理〕
本実施形態の無電解白金めっき液によるめっき方法の一例を以下に説明する。ここでは、被めっき物であるめっき基材として、無電解めっき処理によって、絶縁基材の表面に銅皮膜及びニッケル皮膜を順に形成しためっき基材を用いる場合について説明する。めっき基材は、上記のものに限定されず、従来公知のめっき基材を用いることができる。
[2. (Electroless plating treatment with electroless platinum plating solution)
An example of the plating method using the electroless platinum plating solution of this embodiment will be described below. Here, the case where the plating base material which formed the copper membrane | film | coat and the nickel membrane | film | coat in order on the surface of the insulating base material by the electroless-plating process as a plating base material which is to-be-plated object is demonstrated. A plating base material is not limited to the above-mentioned thing, A conventionally well-known plating base material can be used.
まず、めっき基材に対して電解めっきを行うことにより、ニッケル皮膜の表面に白金皮膜(白金電解皮膜)を形成する。 First, a platinum film (platinum electrolytic film) is formed on the surface of the nickel film by performing electrolytic plating on the plating substrate.
続いて、ニッケル皮膜の表面に白金電解皮膜が形成されためっき基材を、本実施形態の無電解白金めっき液に浸漬することにより、無電解めっき処理を行う。無電解白金めっき液中の白金錯体が、白金電解皮膜の表面で還元されて析出することにより、白金電解皮膜の表面に白金皮膜(白金無電解皮膜)を形成することができる。 Then, the electroless-plating process is performed by immersing the plating base material in which the platinum electrolytic film was formed on the surface of the nickel film in the electroless platinum plating solution of this embodiment. The platinum complex in the electroless platinum plating solution is reduced and deposited on the surface of the platinum electrolytic film, whereby a platinum film (platinum electroless film) can be formed on the surface of the platinum electrolytic film.
本実施形態の無電解白金めっき液を用いる無電解めっき処理は、析出速度が1〜2μm/時間であり、従来のジニトロジアンミン白金又はジニトロテトラアンミン白金を含む無電解白金めっき液と同程度の析出速度を得ることができる。 Electroless plating using an electroless platinum plating solution of this embodiment, the deposition rate is 1 to 2 [mu] m / time, the deposition rate comparable to an electroless platinum plating solution containing conventional Jinitoroji ammine platinum or dinitro tetraamine platinum Can be obtained.
当該無電解白金めっき液の使用温度は、40〜90℃の範囲であることが好ましい。温度が40℃未満であると、めっき速度が遅いことがあり、90℃を上回ると、水分蒸発量が多くなり組成変動が大きくなることがある。 The operating temperature of the electroless platinum plating solution is preferably in the range of 40 to 90 ° C. If the temperature is lower than 40 ° C., the plating rate may be slow, and if it exceeds 90 ° C., the amount of water evaporation increases and the composition variation may increase.
当該無電解白金めっき液によるめっき時間は、形成する白金無電解皮膜の厚さに依存する。例えば、水溶性白金化合物としてジクロロテトラアンミン白金(II)を0.005mol/L含有する無電解白金めっき液(白金換算で1.0g/L)の場合には、めっき時間を30分とすることにより、厚さ0.5μmの白金無電解皮膜を形成することができる。 The plating time with the electroless platinum plating solution depends on the thickness of the platinum electroless film to be formed. For example, in the case of an electroless platinum plating solution containing 1.05 mol / L of dichlorotetraammineplatinum (II) as a water-soluble platinum compound (1.0 g / L in terms of platinum), by setting the plating time to 30 minutes A platinum electroless film having a thickness of 0.5 μm can be formed.
上記還元剤は、還元反応に伴って主に二酸化炭素及び水を生成する。二酸化炭素及び水は当該無電解白金めっき液に蓄積しないため、当該無電解白金めっき液が変質することはなく長期間使用することができる。 The said reducing agent mainly produces | generates a carbon dioxide and water with a reductive reaction. Since carbon dioxide and water do not accumulate in the electroless platinum plating solution, the electroless platinum plating solution is not altered and can be used for a long time.
〔3.無電解白金めっき液の用途〕
本実施形態の無電解白金めっき液は、金属等からなる電子部品、電極材料、ABS樹脂、ポリアミド樹脂、ポリカーボネート樹脂等の合成樹脂、アルミナ、ジルコニア等の導電性を持たないセラミックス等のめっきに好適である。特に、ジルコニア等のセラミックス等からなる酸素センサの電極や、種々の宝飾品等の用途に好適に使用することができる。
[3. (Use of electroless platinum plating solution)
The electroless platinum plating solution of this embodiment is suitable for plating of electronic parts made of metal, electrode materials, synthetic resins such as ABS resin, polyamide resin, polycarbonate resin, non-conductive ceramics such as alumina and zirconia. It is. In particular, it can be suitably used for applications of oxygen sensor electrodes made of ceramics such as zirconia, and various jewelry.
以下では実施例を挙げて、本件発明をより具体的に説明するが、下記実施例に本件発明が限定されるものではないのは勿論である。 Hereinafter, the present invention will be described more specifically with reference to examples. However, it is needless to say that the present invention is not limited to the following examples.
〔めっき基材の作成〕
まず、電解めっき処理によって銅板上に厚さ3μmのニッケル皮膜を形成した。次に、電解めっき処理によってニッケル皮膜の表面に厚さ0.1μmの白金皮膜(白金電解皮膜)を形成することにより、めっき基材を作成した。
[Creation of plating substrate]
First, a nickel film having a thickness of 3 μm was formed on a copper plate by electrolytic plating. Next, a plating base material was prepared by forming a platinum film (platinum electrolytic film) having a thickness of 0.1 μm on the surface of the nickel film by electrolytic plating.
〔無電解白金めっき液の調製〕
本実施例では、水に、水溶性白金化合物としてジクロロテトラアンミン白金(II)0.005mol/L(白金換算で1.0g/L)と、還元剤としてギ酸ナトリウム0.5mol/Lと、錯化剤としてリンゴ酸0.1mol/Lとを溶解して、無電解白金めっき液を調製した。続いて、pH調整剤として水酸化ナトリウム及び硫酸を用いて、無電解白金めっき液のpH(温度25℃)を7.0に調整した。
[Preparation of electroless platinum plating solution]
In this example, dichlorotetraammineplatinum (II) 0.005 mol / L (1.0 g / L in terms of platinum) as a water-soluble platinum compound, sodium formate 0.5 mol / L as a reducing agent, complexed with water, As an agent, 0.1 mol / L of malic acid was dissolved to prepare an electroless platinum plating solution. Subsequently, the pH (temperature: 25 ° C.) of the electroless platinum plating solution was adjusted to 7.0 using sodium hydroxide and sulfuric acid as pH adjusting agents.
〔無電解めっき処理〕
得られた無電解白金めっき液を温度70℃に加温し、白金電解皮膜が形成されためっき基材を当該無電解白金めっき液に浸漬して無電解めっき処理を行うことにより、白金電解皮膜の表面に白金皮膜(白金無電解皮膜)を形成した。
[Electroless plating treatment]
The obtained electroless platinum plating solution is heated to a temperature of 70 ° C., and the plating base material on which the platinum electrolytic film is formed is immersed in the electroless platinum plating solution to perform the electroless plating treatment, thereby obtaining a platinum electrolytic film. A platinum film (platinum electroless film) was formed on the surface.
このとき、浸漬時間が60分に達するまでの間、10分毎に白金無電解皮膜の厚さを測定した。結果を図1に示す。図1から、当該無電解めっき処理における析出速度は、1.0μm/時間であることが確認された。 At this time, the thickness of the platinum electroless coating was measured every 10 minutes until the immersion time reached 60 minutes. The results are shown in FIG. From FIG. 1, it was confirmed that the deposition rate in the electroless plating process was 1.0 μm / hour.
また、60分間無電解めっき処理を行うことにより、厚さ0.5μmの白金無電解皮膜を形成した。得られた白金無電解皮膜は、灰色を呈することが目視で確認された。また、得られた白金無電解皮膜の表面を、走査型電子顕微鏡(SEM)で倍率3万倍で観察したところ、図2に示すように、白金粒子の粒径が大きく、凹凸を有する表面形態であった。 In addition, a platinum electroless coating having a thickness of 0.5 μm was formed by performing electroless plating treatment for 60 minutes. It was visually confirmed that the obtained platinum electroless coating was gray. Further, when the surface of the obtained platinum electroless coating was observed with a scanning electron microscope (SEM) at a magnification of 30,000 times, as shown in FIG. Met.
次に、当該無電解白金めっき液の温度を50℃、60℃、70℃、80℃に変化させて、白金電解皮膜が形成されためっき基材を当該無電解白金めっき液に2時間浸漬して無電解めっき処理を行った。このとき、当該無電解白金めっき液中に白金析出物が生じたか否かを観察することにより、当該無電解白金めっき液の分解の有無を判定した。表1に結果を示す。表1において、×印は当該無電解白金めっき液が1時間以内に分解したことを意味し、△印は2時間以内に分解したことを意味し、○印は2時間経過後も全く分解しなかったことを意味する。 Next, the temperature of the electroless platinum plating solution is changed to 50 ° C., 60 ° C., 70 ° C., and 80 ° C., and the plating base material on which the platinum electrolytic film is formed is immersed in the electroless platinum plating solution for 2 hours. The electroless plating process was performed. At this time, the presence or absence of decomposition | disassembly of the said electroless platinum plating solution was determined by observing whether the platinum deposit produced in the said electroless platinum plating solution. Table 1 shows the results. In Table 1, “X” means that the electroless platinum plating solution was decomposed within 1 hour, “Δ” means that it was decomposed within 2 hours, and “◯” indicates that it was completely decomposed after 2 hours. It means no.
次に、温度50〜80℃に2時間保持された上記無電解白金めっき液を、自然冷却させた後、翌日、同一の温度に再び加温し、めっき基材を2時間浸漬して無電解めっき処理を行った。当該無電解白金めっき液は、いずれの温度に加温されたものでも、無電解めっき処理を正常に行うことができた。このことから、当該無電解白金めっき液は連続使用が可能であることが明らかである。 Next, after the above electroless platinum plating solution kept at a temperature of 50 to 80 ° C. for 2 hours is naturally cooled, it is heated again to the same temperature the next day, and the plating base material is immersed for 2 hours to be electroless. Plating treatment was performed. Even when the electroless platinum plating solution was heated to any temperature, the electroless plating treatment could be normally performed. From this, it is clear that the electroless platinum plating solution can be used continuously.
本実施例では、pH(温度25℃)を11.0に調整した以外は、実施例1と全く同一にして、無電解白金めっき液を調製した。 In this example, an electroless platinum plating solution was prepared in the same manner as in Example 1 except that the pH (temperature 25 ° C.) was adjusted to 11.0.
得られた無電解白金めっき液を温度70℃に加温し、白金電解皮膜が形成されためっき基材を当該無電解白金めっき液に60分間浸漬して無電解めっき処理を行うことにより、白金電解皮膜の表面に厚さ0.5μmの白金無電解皮膜を形成した。得られた白金無電解皮膜は、白色の光沢外観を呈することが目視で確認された。また、得られた白金無電解皮膜の表面を、SEMで倍率3万倍で観察したところ、図3に示すように、白金粒子の粒径が小さく、平滑性を有する表面形態であった。 The obtained electroless platinum plating solution is heated to a temperature of 70 ° C., and the plating base material on which the platinum electrolytic film is formed is immersed in the electroless platinum plating solution for 60 minutes to perform the electroless plating treatment. A platinum electroless film having a thickness of 0.5 μm was formed on the surface of the electrolytic film. It was confirmed visually that the obtained platinum electroless coating had a white glossy appearance. Further, when the surface of the obtained platinum electroless coating was observed with an SEM at a magnification of 30,000, the surface shape of the platinum particles was small and smooth as shown in FIG.
次に、得られた無電解白金めっき液を用いて、実施例1と全く同一にして、当該無電解白金めっき液の分解の有無を判定した。表1に結果を示す。 Next, the presence or absence of decomposition of the electroless platinum plating solution was determined using the obtained electroless platinum plating solution exactly as in Example 1. Table 1 shows the results.
次に、温度50〜80℃に2時間保持された上記無電解白金めっき液を、実施例1と全く同一にして、翌日、無電解めっき処理を行った。当該無電解白金めっき液は、いずれの温度に加温されたものでも、無電解めっき処理を正常に行うことができた。このことから、当該無電解白金めっき液は連続使用が可能であることが明らかである。 Next, the electroless platinum plating solution kept at a temperature of 50 to 80 ° C. for 2 hours was made exactly the same as in Example 1, and an electroless plating treatment was performed the next day. Even when the electroless platinum plating solution was heated to any temperature, the electroless plating treatment could be normally performed. From this, it is clear that the electroless platinum plating solution can be used continuously.
〔比較例1〕
本比較例では、還元剤としてギ酸ナトリウムに代えてヒドラジン一水和物0.5mol/Lを用いたこと以外は、実施例2と全く同一にして、無電解白金めっき液を調製し、続いて、pH(温度25℃)を11.0に調製した。次に、得られた無電解白金めっき液を用いて、実施例1と全く同一にして、当該無電解白金めっき液の分解の有無を判定した。表1に結果を示す。
[Comparative Example 1]
In this comparative example, an electroless platinum plating solution was prepared in exactly the same manner as in Example 2 except that hydrazine monohydrate 0.5 mol / L was used instead of sodium formate as the reducing agent. The pH (temperature 25 ° C.) was adjusted to 11.0. Next, the presence or absence of decomposition of the electroless platinum plating solution was determined using the obtained electroless platinum plating solution exactly as in Example 1. Table 1 shows the results.
〔比較例2〕
本比較例では、還元剤としてギ酸ナトリウムに代えて水酸化ホウ素ナトリウム0.5mol/Lを用いたこと以外は、実施例2と全く同一にして、無電解白金めっき液を調製し、続いて、pH(温度25℃)を11.0に調製した。次に、得られた無電解白金めっき液を用いて、実施例1と全く同一にして、当該無電解白金めっき液の分解の有無を判定した。表1に結果を示す。
[Comparative Example 2]
In this comparative example, an electroless platinum plating solution was prepared in exactly the same manner as in Example 2 except that sodium borohydride 0.5 mol / L was used instead of sodium formate as the reducing agent. The pH (temperature 25 ° C.) was adjusted to 11.0. Next, the presence or absence of decomposition of the electroless platinum plating solution was determined using the obtained electroless platinum plating solution exactly as in Example 1. Table 1 shows the results.
〔比較例3〕
本比較例では、白金化合物としてジクロロテトラアンミン白金(II)に代えてジニトロジアンミン白金(II)0.005mol/L(白金換算で1.0g/L)を用いたこと以外は、比較例1と全く同一にして、無電解白金めっき液を調製し、続いて、pH(温度25℃)を11.0に調製した。次に、得られた無電解白金めっき液を用いて、実施例1と全く同一にして、当該無電解白金めっき液の分解の有無を判定した。表1に結果を示す。
[Comparative Example 3]
In this comparative example, it was completely the same as Comparative Example 1 except that 0.005 mol / L (1.0 g / L in terms of platinum) of dinitrodiammine platinum (II) was used as the platinum compound instead of dichlorotetraammine platinum (II). An electroless platinum plating solution was prepared in the same manner, and then the pH (temperature 25 ° C.) was adjusted to 11.0. Next, the presence or absence of decomposition of the electroless platinum plating solution was determined using the obtained electroless platinum plating solution exactly as in Example 1. Table 1 shows the results.
〔比較例4〕
本比較例では、白金化合物としてジクロロテトラアンミン白金(II)に代えてジニトロジアンミン白金(II)0.005mol/L(白金換算で1.0g/L)を用いたこと以外は、比較例2と全く同一にして、無電解白金めっき液を調製し、続いて、pH(温度25℃)を11.0に調製した。次に、得られた無電解白金めっき液を用いて、実施例1と全く同一にして、当該無電解白金めっき液の分解の有無を判定した。表1に結果を示す。
[Comparative Example 4]
This comparative example is exactly the same as Comparative Example 2 except that 0.005 mol / L of dinitrodiammine platinum (II) (1.0 g / L in terms of platinum) was used as the platinum compound instead of dichlorotetraammine platinum (II). An electroless platinum plating solution was prepared in the same manner, and then the pH (temperature 25 ° C.) was adjusted to 11.0. Next, the presence or absence of decomposition of the electroless platinum plating solution was determined using the obtained electroless platinum plating solution exactly as in Example 1. Table 1 shows the results.
表1に示すように、白金化合物がジクロロテトラアンミン白金(II)であり、還元剤がギ酸ナトリウムである実施例1及び実施例2の無電解白金めっき液は、いずれも、50〜80℃の温度範囲で2時間経過しても分解せず、優れた溶液安定性を備えることが明らかである。一方、還元剤がヒドラジン一水和物又は水素化ホウ素ナトリウムである比較例1〜比較例4の無電解白金めっき液は、いずれも、70〜80℃の温度範囲で1時間以内に分解し、50〜60℃の温度範囲でも2時間以内に分解し、溶液安定性が劣ることが明らかである。 As shown in Table 1, the electroless platinum plating solutions of Example 1 and Example 2 in which the platinum compound is dichlorotetraammineplatinum (II) and the reducing agent is sodium formate are both 50 to 80 ° C. It is clear that it does not decompose even after 2 hours in the range and has excellent solution stability. On the other hand, the electroless platinum plating solutions of Comparative Examples 1 to 4 in which the reducing agent is hydrazine monohydrate or sodium borohydride are all decomposed within one hour in the temperature range of 70 to 80 ° C. It is apparent that the solution decomposes within 2 hours even in the temperature range of 50-60 ° C. and the solution stability is poor.
以上説明したとおり、本件発明の無電解白金めっき液は、優れた溶液安定性を備えるので、長時間の使用に耐えることができる。また、当該無電解白金めっき液は、エチレンジアミン、アンモニア等のアンモニアガスを発生しうる化合物を含まないので、アンモニアガスの発生を防止することができる。このため、アンモニアガスの発生に伴う臭気による作業環境の低下を防ぐことができる。また、当該無電解白金めっき液では、エチレンジアミン、アンモニア等の白金イオンと強く錯体形成するような錯化剤を用いないため、ホルマリン、グルコース、ギ酸、ギ酸塩等の還元作用が弱い還元剤を使用することができる。また、これらの還元剤は、ヒドラジン一水和物、水酸化ホウ素ナトリウムと比較して、水素ガスの発生量を減らすことができる。 As described above, the electroless platinum plating solution of the present invention has excellent solution stability and can withstand long-term use. Further, since the electroless platinum plating solution does not contain a compound capable of generating ammonia gas such as ethylenediamine and ammonia, generation of ammonia gas can be prevented. For this reason, it is possible to prevent the work environment from being deteriorated due to the odor accompanying the generation of ammonia gas. In addition, the electroless platinum plating solution does not use a complexing agent that forms a strong complex with platinum ions such as ethylenediamine and ammonia, so use a reducing agent with a weak reducing action such as formalin, glucose, formic acid, and formate. can do. Moreover, these reducing agents can reduce the generation amount of hydrogen gas compared with hydrazine monohydrate and sodium borohydride.
また、本実施形態の無電解白金めっき液は、金属等からなる電子部品、電極材料、種々の合成樹脂やセラミックス等のめっきに好適である。特に、ジルコニア等のセラミックス等からなる酸素センサの電極や、種々の宝飾品等の用途に好適に使用することができる。
Further, the electroless platinum plating solution of the present embodiment is suitable for plating of electronic parts made of metal or the like, electrode materials, various synthetic resins, ceramics, and the like. In particular, it can be suitably used for applications of oxygen sensor electrodes made of ceramics such as zirconia, and various jewelry.
Claims (3)
前記水溶性白金化合物は、ヘキサヒドロキソ白金(IV)酸、ヘキサヒドロキソ白金(IV)酸塩、ジクロロテトラアンミン白金(II)からなる群から選択される1種以上の水溶性白金化合物であることを特徴とする無電解白金めっき液。 A water-soluble platinum compounds, formalin, glucose, formic acid, and one or more reducing agents selected from the group consisting of formic acid salts seen including,
The water-soluble platinum compound is one or more water-soluble platinum compounds selected from the group consisting of hexahydroxoplatinum (IV) acid, hexahydroxoplatinum (IV) acid salt, and dichlorotetraammineplatinum (II). Electroless platinum plating solution.
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