WO2009113003A2 - Composant luminescent et procédé de fabrication - Google Patents

Composant luminescent et procédé de fabrication Download PDF

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Publication number
WO2009113003A2
WO2009113003A2 PCT/IB2009/050963 IB2009050963W WO2009113003A2 WO 2009113003 A2 WO2009113003 A2 WO 2009113003A2 IB 2009050963 W IB2009050963 W IB 2009050963W WO 2009113003 A2 WO2009113003 A2 WO 2009113003A2
Authority
WO
WIPO (PCT)
Prior art keywords
luminescent
conduit
substrate
solution
bonding
Prior art date
Application number
PCT/IB2009/050963
Other languages
English (en)
Other versions
WO2009113003A3 (fr
Inventor
Viet Nguyen Hoang
Radu Surdeanu
Benoit Bataillou
Original Assignee
Nxp B.V.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nxp B.V. filed Critical Nxp B.V.
Priority to US12/922,127 priority Critical patent/US8376801B2/en
Priority to EP09719995A priority patent/EP2272304A2/fr
Publication of WO2009113003A2 publication Critical patent/WO2009113003A2/fr
Publication of WO2009113003A3 publication Critical patent/WO2009113003A3/fr

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24273—Structurally defined web or sheet [e.g., overall dimension, etc.] including aperture
    • Y10T428/24298—Noncircular aperture [e.g., slit, diamond, rectangular, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24273—Structurally defined web or sheet [e.g., overall dimension, etc.] including aperture
    • Y10T428/24322—Composite web or sheet
    • Y10T428/24331—Composite web or sheet including nonapertured component

Definitions

  • Optical elements for emitting light in a first spectral range in response to a light stimulus in a further spectral range i.e. luminescent optical components
  • Such optical elements may effectively be used as color filters or light sources in their own right.
  • semiconductor quantum dot based optical elements have attracted considerable attention because the confinement structure of the quantum dots facilitates the generation of light in a well-defined spectral range. This is because the confinement structure limits the band gap of the particle such that the quantized nature of the particle excitation energies becomes more pronounced.
  • US patent application No. 2007/0057274 A1 discloses a luminescent component comprising silicon quantum dots, which is capable of generating white light.
  • the quantum dots are embedded in a silicon nitride film, which is deposited over the surface of a transparent substrate.
  • a light emitting device is deposited over the silicon nitride film.
  • US patent application No. 2005/0082554 A1 discloses a direct wafer- bonded light emitting semiconductor device including an array of indirect band gap material quantum dots. The quantum dots are sandwiched between an n- type semiconductor cladding layer and a p-type semiconductor cladding layer.
  • European patent application No. 1 798 783 A2 discloses three- dimensional light emitting device comprising a substrate having a three- dimensional recess, wherein the surface of the recess is coated with a dispersion of nanoparticles and subsequently dried. The nanoparticles are adsorbed to the recess surface by charging the surface of the recess and charging the nanoparticles with an opposite charge.
  • J. Pagan et al. in 'Colloidal quantum dot active layers for light emitting diodes', IEEE Semiconductor Device Research Symposium, 2005 December 7-9, pages 93-94 disclose that size control of a quantum dot facilitates tuning the emission wavelength range of the quantum dot.
  • a light emitting diode comprising a colloidal quantum dot layer embedded in a GaN heterostructure.
  • the colloidal quantum dot layer is deposited in solution over an n-type GaN layer and subsequently capped at low temperature with an intrinsic GaN layer to protect the quantum dots from the subsequent high temperature p-type GaN layer growing step.
  • the quantum dots are embedded in poly-vinylcarbazole.
  • the present invention seeks to provide an improved method of manufacturing a luminescent optical element.
  • the present invention further seeks to provide an improved luminescent optical element.
  • a method of manufacturing a luminescent optical component comprising providing a substrate, forming a conduit through the substrate, bonding a first surface of the substrate to a transparent carrier, filling the conduit with a luminescent solution and bonding a further surface of the substrate to a further transparent carrier, said further surface being opposite to the first surface.
  • a luminescent element that comprises luminescent material in solution, e.g. a colloidal solution of semiconductor quantum dots, thus avoiding the need to isolate the luminescent material and deposit the material onto a layer of the luminescent element, thereby reducing the number of process steps and the risk of exposure of the luminescent material to adverse process conditions such as extreme temperatures.
  • the method provides to provide an optical component for a solvent-based luminescent material such as colloidal quantum dots, which means that the luminescent material may be more easily obtained, i.e. no further processing steps are required to isolate the luminescent material.
  • the transparent carriers are direct bonded to the substrate.
  • the contact surfaces of the transparent carriers and the surface should be sufficiently smooth to allow an intimate contact between the contact surfaces.
  • the surfaces are subsequently exposed to an elevated temperature to promote the formation of bonds between the contact surfaces, thereby directly bonding the two surfaces as for instance is explained in US patent application No. 2005/0082554 A1 .
  • Care is taken that the direct bonding of the further surface of the substrate to the further transparent carrier is performed at an elevated temperature that is low enough to avoid significant deterioration of the luminescent solution.
  • the step of forming a conduit comprises forming a cavity in the first surface, bonding the first surface to the transparent carrier and exposing the cavity by treating the further surface, said treatment comprising partial removal of the substrate.
  • the treatment step may comprise thinning the substrate at the further surface, e.g. by polishing or milling.
  • the method may further comprise depositing a liner in the conduit for increasing the attractive interaction between the solution and the conduit walls prior to filling the conduit with the luminescent solution.
  • This has the advantage that spreading of the solution is reduced, which facilitates an improved bonding between the further surface and the further transparent carrier.
  • This is particularly advantageous when the further surface is direct bonded to the further transparent carrier at a relatively low temperature to protect the luminescent solution because the liner ensures that the risk of spreading of the solution over the further surface is reduced, thus increasing the quality of the bonding between the further surface and the further transparent carrier.
  • the step of filling the cavity with the luminescent solution may comprise retaining a head space over the luminescent solution. Not only does this allowing thermal expansion of the luminescent solution, e.g. during the subsequent bonding step of the further surface and the further transparent carrier, but is also further reduces the risk of the solution spreading over the further surface.
  • the conduit comprises a stepped profile. This has the advantage that if the luminescent component is placed in an orientation such that the light path through the conduit is horizontal, any gaseous fluid in the conduit such as air will be trapped in an upper step of the step profile, outside the optical path. This is particularly advantageous when the conduit is filled with the luminescent solution such that a head space is retained, because the head space will be confined to the upper step in his case.
  • a luminescent component comprising a first transparent carrier, a second transparent carrier, a substrate sandwiched between said transparent carriers, the substrate comprising a conduit from the first transparent layer to the second transparent carrier, the conduit being filled with a luminescent solution.
  • a luminescent component can be easily integrated in a luminescent device such as a solid state lighting device or a display device, and may benefit from an improved quality of active luminescent component, e.g. a colloidal solution of quantum dots.
  • FIG. 1A-F schematically depicts an embodiment of the method of the present invention
  • FIG. 2 schematically depicts an embodiment of a luminescent device of the present invention
  • FIG. 3 schematically depicts an alternative embodiment of a luminescent device of the present invention
  • FIG. 4A-E schematically depicts an alternative embodiment of the method of the present invention.
  • FIG. 1A depicts a cross-section of a substrate 10 having a first surface 12 and an opposite surface 14.
  • the substrate may be a silicon wafer or any other suitable substrate.
  • a cavity 16 is formed in the first surface 12 of the substrate 10.
  • the cavity 16 may be formed by any suitable process, e.g. milling, dry etching, wet etching and so on.
  • the cavity 16 may have any suitable shape, e.g. a cylindrical shape or a cube shape.
  • at least one side wall of the cavity 16 comprises a stepped profile.
  • a first transparent carrier 18 is bonded to the first surface 12, thereby sealing the cavity 16.
  • the first transparent carrier 18 may be a glass wafer or another suitable carrier.
  • This conditioning step may include cleaning the surfaces with a cleaning fluid, i.e. a wet chemical treatment, chemically or mechanically polishing the surfaces, as
  • the first surface 12 is directly bonded to the first transparent carrier 18, e.g. using direct wafer bonding techniques.
  • the first surface 12 is brought into intimate contact with the first transparent carrier 18, after which the substrate stack is exposed to an elevated temperature to bind the first surface 12 to the first transparent carrier 18.
  • a direct bonding step migration of atoms, ions or molecules across the interface between the first surface 12 is and the first transparent carrier 18 cause the formation of bonds across the interface, which for instance may be Van Der Waals-type or electrostatic bonds.
  • Direct bonding is also known as anodic bonding. Direct bonding is preferred because it can be readily applied to perforated substrates, whereas other bonding techniques, e.g. adhesive bonding are more involved because the application of an adhesive is not straightforward. Spillage of the adhesive into the cavities of the substrate 10 must for instance be avoided. However, it is pointed out that other bonding techniques such as adhesive bonding may be considered as an alternative to direct bonding.
  • the opposite surface 16 of the substrate 10 is subjected to a thinning step in order to expose the cavity 16.
  • a thinning step may be performed in any suitable way, e.g. etching, milling or chemical polishing or mechanical polishing.
  • the exposure of the cavity 16 creates a conduit through the substrate 10, which may be utilized as an optical path, i.e. light path, as will be explained in more detail later.
  • the opposite surface 14 Prior to filling the cavity 16 with a luminescent solution, the opposite surface 14 is also conditioned to facilitate an intimate contact with a conditioned I surface of a further transparent layer.
  • the cavity 16 may also be lined with a liner, to increase the attractive interaction between the luminescent solution and the walls of the cavity 16.
  • suitable liners include silicon oxides, silicon nitrides and silicones.
  • FIG. 1 E depicts how the cavity 16 is subsequently filled with a luminescent solution 20.
  • the luminescent solution 20 is a colloidal solution of semiconductor quantum dots such as Cd/Se quantum dots, because such solutions have particularly promising luminescent properties.
  • the quality of the quantum dots can be sensitive to further processing steps in the manufacture of a luminescent component, as previously explained, which is why the present invention is particularly advantageous to quantum dot based solutions.
  • the present invention is not necessarily limited to solutions comprising Cd/Se quantum dots. Solutions comprising other types of luminescent quantum dots are equally feasible. Solutions comprising other types of luminescent components may also be used.
  • the cavity 16 is filled with the luminescent solution 20 such that a head space 22 remains over the luminescent solution 20. Not only does this reduce the risk of accidental spilling of the luminescent solution 20 over the further surface 14, but it also provides a thermal expansion volume for the luminescent solution 20 when the optical component is exposed to an elevated temperature, e.g. during a subsequent direct bonding step, as will be explained in more detail later.
  • a stepped profile on the walls of the cavity 16 is advantageous because it facilitates the formation of a head space having a relatively small volume in the narrow part of the cavity 16. It is important that the luminescent solution 20 does not spread over the further surface 14, because this can have a detrimental impact on the subsequent bonding of the further surface 14 to a further transparent carrier. Such spreading, or smearing, may for instance occur when a further transparent carrier is moved across the further surface 14 in a sliding fashion, thereby touching the meniscus of the luminescent solution 20. As previously explained, this risk may be reduced by lining the walls of cavity 16 with a liner, e.g. a lining film, which increases the attractive forces between the luminescent solution 20 and the walls of the cavity 16, such that the luminescent solution resists smearing over the further surface 14.
  • a liner e.g. a lining film
  • the method is completed by covering the further surface 14 of the substrate 10 with a further transparent carrier 24, e.g. a glass wafer, and bonding the further transparent carrier 24 to the further surface 14, thereby yielding the luminescent component 30.
  • these surfaces are directly bonded by exposing the substrate stack to an elevated temperature.
  • the elevated temperature of this direct bonding step is lower than the elevated temperature of the direct bonding step binding the first surface 12 and the first transparent carrier 18.
  • the direct bonding step may be executed between 0 -100 ° C.
  • Fo rm atte . su pe r sc r ipt Preferably, this temperature is chosen between 20 -85 ° C to further reduce the risk of such degradation and ensure a sufficiently strong direct bonding between the contact surfaces.
  • the further surface 14 and the further transparent carrier 24 are conditioned by means of a plasma treatment, because it has been found that such a treatment ensures that the surfaces are sufficiently strongly bonded even at room temperature (i.e. 20 ° C).
  • the luminescent module 30 may be integrated in a luminescent device 50, as shown in FIG.2.
  • the luminescent device 50 comprises a light source 52, which may be any suitable light source, e.g. a solid state light source such as a light emitting diode based light source.
  • the light source 52 is arranged to irradiate the luminescent solution 20 with light of a predefined wavelength, e.g. ultraviolet (UV) light, which brings the luminescent material, e.g.
  • a predefined wavelength e.g. ultraviolet (UV) light
  • the quantum dots in an excited state, causing the material to emit light 54.
  • the light 54 typically has a spectral range governed by the properties of the luminescent material, e.g. the dimensions and the materials of the quantum dots.
  • any gaseous fluid in the cavity 16 such as head space 22 will be confined to one of the steps of the stepped profile when the conduit of the luminescent component 30 is oriented horizontally, thereby ensuring that the head space 22 does not interfere with the optical path through the conduit.
  • any cavity wall profile facilitating the location of the head space 22 outside a horizontally oriented optical path may be chosen instead of a stepped profile.
  • the luminescent device 50 may comprise a luminescent module 30 comprising multiple conduits, e.g. an array or matrix of luminescent module 30.
  • a luminescent device is shown in FIG. 3, which comprises three light sources 52, 52' and 52", and three conduits filled with three luminescent solutions 20, 20' and 20".
  • the luminescent solutions 20, 20' and 20" may be the same solutions or may be different solutions, e.g. solutions comprising differently sized quantum dots, in which case the luminescent solutions 20, 20' and 20" respectively emit light 54, 54' and 54" having different spectral ranges.
  • a single luminescent module 30 comprising multiple conduits is shown. It will be appreciated that as an alternative, multiple luminescent modules 30 having a single conduit may also be used.
  • the luminescent device 50 may be a solid state lighting device, a display device or any other device for emitting light in a predefined spectral range.
  • the method for manufacturing an luminescent component 30 as shown in FIG. 1A-F is particularly advantageous because the two-step manufacturing process of the conduit by first forming a cavity 16 in the first surface 12 and subsequently exposing the cavity 16 through treating the opposite surface 14 reduces the risk of accidental damage to the substrate 10.
  • the method may be simplified at the cost of a potential increase in the risk of damage to the substrate 10.
  • FIG. 4A-E This simplified method is shown in FIG. 4A-E.
  • a substrate such as a silicon wafer is provided.
  • the cavity 16 is formed in the first surface 12 of the substrate 10, but this cavity 16 is formed through the full thickness of the substrate 10.
  • the conduit is immediately formed.
  • the first transparent carrier 18 is bonded to the first surface 12, e.g.
  • the cavity 16 is filled with the luminescent solution 20, optionally leaving a head space 22.
  • the cavity 16 may be lined with a liner prior to filling the cavity 16, as previously explained.
  • the luminescent component 30 is completed by bonding the further transparent carrier 24 to the opposite surface 14, e.g. by direct bonding, as previously explained.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Led Devices (AREA)
  • Led Device Packages (AREA)
  • Luminescent Compositions (AREA)

Abstract

La présente invention concerne un composant luminescent (30) et son procédé de fabrication. Le composant luminescent (30) comprend un premier porteur de charge transparent (18), un second porteur de charge transparent (24), un substrat (10) intercalé entre lesdits porteurs de charge transparents (18; 24), le substrat (10) comprenant un conduit depuis la première couche transparente (18) vers le second porteur de charge transparent (24), le conduit étant rempli d'une solution luminescente (20). Cela facilite l'utilisation de solutions colloïdales de points quantiques dans un tel composant luminescent (30). De préférence, le substrat (10) est fixé directement aux porteurs de charge transparents (18; 24) au moyen de techniques de lien de plaquette direct.
PCT/IB2009/050963 2008-03-13 2009-03-09 Composant luminescent et procédé de fabrication WO2009113003A2 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US12/922,127 US8376801B2 (en) 2008-03-13 2009-03-09 Luminescent component and manufacturing method
EP09719995A EP2272304A2 (fr) 2008-03-13 2009-03-09 Composant luminescent et procédé de fabrication

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP08102588.4 2008-03-13
EP08102588 2008-03-13

Publications (2)

Publication Number Publication Date
WO2009113003A2 true WO2009113003A2 (fr) 2009-09-17
WO2009113003A3 WO2009113003A3 (fr) 2009-11-05

Family

ID=40933203

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2009/050963 WO2009113003A2 (fr) 2008-03-13 2009-03-09 Composant luminescent et procédé de fabrication

Country Status (3)

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US (1) US8376801B2 (fr)
EP (1) EP2272304A2 (fr)
WO (1) WO2009113003A2 (fr)

Families Citing this family (1)

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Publication number Priority date Publication date Assignee Title
US11439018B2 (en) * 2020-12-29 2022-09-06 At&S Austria Technologie & Systemtechnik Aktiengesellschaft Component carrier and method of manufacturing the same

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EP0606093A2 (fr) * 1993-01-07 1994-07-13 Nec Corporation Circuit semi-conducteur optique, intégré, et méthode de fabrication
WO1996041501A1 (fr) * 1995-06-07 1996-12-19 American International Pacific Industries Corp. Procede de fabrication de systemes de lampes electroluminescentes
EP0767599A2 (fr) * 1995-10-06 1997-04-09 Pioneer Electronic Corporation Panneau d'affichage électroluminescent en matière organique et procédé pour sa fabrication
US6221194B1 (en) * 1998-03-30 2001-04-24 Denso Corporation Manufacturing method of electroluminescent display panel
WO2005038882A2 (fr) * 2003-10-15 2005-04-28 Koninklijke Philips Electronics N.V. Dispositif electronique et son procede de fabrication
WO2007012992A1 (fr) * 2005-07-28 2007-02-01 Nxp B.V. Emballage et procede de fabrication pour un composant microelectronique

Also Published As

Publication number Publication date
US20110103039A1 (en) 2011-05-05
EP2272304A2 (fr) 2011-01-12
WO2009113003A3 (fr) 2009-11-05
US8376801B2 (en) 2013-02-19

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