WO2009109186A3 - Waferbox für den transport von solarzellenwafern - Google Patents

Waferbox für den transport von solarzellenwafern Download PDF

Info

Publication number
WO2009109186A3
WO2009109186A3 PCT/DE2009/000326 DE2009000326W WO2009109186A3 WO 2009109186 A3 WO2009109186 A3 WO 2009109186A3 DE 2009000326 W DE2009000326 W DE 2009000326W WO 2009109186 A3 WO2009109186 A3 WO 2009109186A3
Authority
WO
WIPO (PCT)
Prior art keywords
solar cell
cell wafers
transport
centering webs
wafer box
Prior art date
Application number
PCT/DE2009/000326
Other languages
English (en)
French (fr)
Other versions
WO2009109186A2 (de
Inventor
Matthias Winderlich
Original Assignee
Roth & Rau Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Roth & Rau Ag filed Critical Roth & Rau Ag
Priority to EP09717120A priority Critical patent/EP2250663A2/de
Priority to EA201071022A priority patent/EA201071022A1/ru
Priority to JP2010549013A priority patent/JP2011513978A/ja
Priority to US12/921,328 priority patent/US20110024325A1/en
Priority to CN2009801079094A priority patent/CN101965633A/zh
Publication of WO2009109186A2 publication Critical patent/WO2009109186A2/de
Publication of WO2009109186A3 publication Critical patent/WO2009109186A3/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67386—Closed carriers characterised by the construction of the closed carrier
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67294—Apparatus for monitoring, sorting or marking using identification means, e.g. labels on substrates or labels on containers

Abstract

Die Waferbox für den Transport von Solarzellenwafern besteht aus einem Boden (1) und Führungselementen für die Positionierung der Solarzellenwafer. An der Oberseite des Bodens (1) sind koaxial zu einer zentrischen Achse (3) vier Führungswinkel (8) mit Zentrierstegen (10) vorgesehen, wobei die Stirnseiten der Zentrierstege (10) zu den eingelegten Solarzellenwafern gerichtet sind. Der Abstand der Stirnseiten von zwei gegenüber liegenden Zentrierstegen (10) entspricht der Breite der Solarzellenwafer. An zwei gegenüberliegenden Seiten des Bodens (1) ist je eine Stapelwand (12) mit je einer Grifföffnung (13) vorgesehen und es ist ein Stützboden (14) vorhanden, dessen Außenkonfiguration derart ausgebildet ist, dass der Stützboden (14) mindestens an den Zentrierstegen (10) geführt wird. Der Boden (1) weist in der zentrischen Achse (3) eine Öffnung (4) und auf einem konzentrischen Teilkreis (5) an den Schnittpunkten mit den Diagonalen (7) des Bodens (1) vier Durchbrüche (6) für Hubstößel zum Anheben der auf dem Stützboden (14) liegenden Solarzellenwafer auf.
PCT/DE2009/000326 2008-03-06 2009-03-04 Waferbox für den transport von solarzellenwafern WO2009109186A2 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
EP09717120A EP2250663A2 (de) 2008-03-06 2009-03-04 Waferbox für den transport von solarzellenwafern
EA201071022A EA201071022A1 (ru) 2008-03-06 2009-03-04 Контейнер для транспортировки полупроводниковых пластин солнечных элементов
JP2010549013A JP2011513978A (ja) 2008-03-06 2009-03-04 太陽電池ウェハを搬送するためのウェハボックス
US12/921,328 US20110024325A1 (en) 2008-03-06 2009-03-04 Wafer box for the transport of solar cell wafers
CN2009801079094A CN101965633A (zh) 2008-03-06 2009-03-04 用于运输太阳能电池晶片的晶片盒

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102008012928A DE102008012928B3 (de) 2008-03-06 2008-03-06 Waferbox für den Transport von Solarzellenwafern
DE102008012928.3 2008-03-06

Publications (2)

Publication Number Publication Date
WO2009109186A2 WO2009109186A2 (de) 2009-09-11
WO2009109186A3 true WO2009109186A3 (de) 2009-12-17

Family

ID=40586164

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2009/000326 WO2009109186A2 (de) 2008-03-06 2009-03-04 Waferbox für den transport von solarzellenwafern

Country Status (8)

Country Link
US (1) US20110024325A1 (de)
EP (1) EP2250663A2 (de)
JP (1) JP2011513978A (de)
KR (1) KR20100126348A (de)
CN (1) CN101965633A (de)
DE (1) DE102008012928B3 (de)
EA (1) EA201071022A1 (de)
WO (1) WO2009109186A2 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010005202B4 (de) * 2010-01-21 2020-04-09 Q-Cells Se Magazin für einen photovoltaischen Wafer- und/oder Zellstapel mit einem Magazineinsatz zur Aufnahme desselben
KR200461616Y1 (ko) 2011-06-16 2012-07-30 엘에스산전 주식회사 태양광 모듈 적치용 스페이서
CN104576468B (zh) * 2015-01-28 2018-01-02 上海集成电路研发中心有限公司 一种组合式硅片片盒装置
US10242897B2 (en) 2015-12-14 2019-03-26 Solarcity Corporation Micro-environment container for photovoltaic cells
CN105865402B (zh) * 2016-05-30 2018-04-17 江苏有则科技集团有限公司 硅片盒检测架
DE102016113924A1 (de) * 2016-07-28 2018-02-01 Infineon Technologies Ag Waferbox, Verfahren zum Anordnen von Wafern in einer Waferbox, Wafer-Schutzplatte und Verfahren zum Schützen eines Wafers
CN109229975A (zh) * 2018-07-09 2019-01-18 上海微小卫星工程中心 一种用于容纳太阳能电池阵的容器
US11891236B2 (en) 2020-02-25 2024-02-06 Pvpallet, Inc. Transport container

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01100939A (ja) * 1987-10-14 1989-04-19 Hitachi Ltd 半導体ウェハ搬送用ウェハキャリアとこれを使用する集積回路処理装置用インターフェイス
EP0756314A2 (de) * 1995-07-27 1997-01-29 Nitto Denko Corporation Apparat zum Laden und Abladen einer Halbleiterscheibe und Behältern dafür
US20030010657A1 (en) * 2001-07-14 2003-01-16 Michael Zabka Protective shipper
US20050011808A1 (en) * 2003-07-14 2005-01-20 Pylant James D. Wafer shipper with orientation control
DE202006005284U1 (de) * 2006-04-01 2006-07-13 Manz Automation Ag Solarzellenbehälter
US20070187286A1 (en) * 2006-02-16 2007-08-16 Pylant James D Wafer storage container and apparatus

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5255797A (en) * 1992-02-26 1993-10-26 Fluoroware, Inc. Wafer carrier with wafer retaining cushions
US6886696B2 (en) * 2003-01-15 2005-05-03 Taiwan Semiconductor Manufacturing Co., Ltd Wafer container with removable sidewalls
US7607543B2 (en) * 2005-02-27 2009-10-27 Entegris, Inc. Reticle pod with isolation system

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01100939A (ja) * 1987-10-14 1989-04-19 Hitachi Ltd 半導体ウェハ搬送用ウェハキャリアとこれを使用する集積回路処理装置用インターフェイス
EP0756314A2 (de) * 1995-07-27 1997-01-29 Nitto Denko Corporation Apparat zum Laden und Abladen einer Halbleiterscheibe und Behältern dafür
US20030010657A1 (en) * 2001-07-14 2003-01-16 Michael Zabka Protective shipper
US20050011808A1 (en) * 2003-07-14 2005-01-20 Pylant James D. Wafer shipper with orientation control
US20070187286A1 (en) * 2006-02-16 2007-08-16 Pylant James D Wafer storage container and apparatus
DE202006005284U1 (de) * 2006-04-01 2006-07-13 Manz Automation Ag Solarzellenbehälter

Also Published As

Publication number Publication date
US20110024325A1 (en) 2011-02-03
CN101965633A (zh) 2011-02-02
EP2250663A2 (de) 2010-11-17
DE102008012928B3 (de) 2009-06-04
JP2011513978A (ja) 2011-04-28
WO2009109186A2 (de) 2009-09-11
EA201071022A1 (ru) 2011-04-29
KR20100126348A (ko) 2010-12-01

Similar Documents

Publication Publication Date Title
WO2009109186A3 (de) Waferbox für den transport von solarzellenwafern
WO2009064951A3 (en) Package for containers
USD628868S1 (en) Low profile socket
EP2408030A3 (de) Elektrodenanordnung für eine lichtemittierende Vorrichtung
WO2006119305A3 (en) Ultra and very-high efficiency solar cells
USD666289S1 (en) Unit dose vial
WO2010093695A3 (en) Thin-film photovoltaic power system with integrated low-profile high-efficiency inverter
WO2010120233A3 (en) Multi-junction photovoltaic cell with nanowires
WO2009064625A3 (en) Solar cell package for solar concentrator
USD586124S1 (en) Eight sided container
WO2009089470A3 (en) Photovoltaic devices
WO2009091602A3 (en) Container assembly
WO2011009446A3 (de) Berührungsloser vakuumgreifer
WO2006119221A3 (en) Blow molded universal lid
NZ717976A (en) Compost bin
WO2008113326A3 (de) Gehäuse zum aufnehmen zumindest eines brennstoffzellenstapels
USD636650S1 (en) Low profile socket
WO2008150824A3 (en) Packs and methods of erecting packs
USD636240S1 (en) Low profile socket
CN204957308U (zh) 一种物流器具周转用支撑限位托架
JP2013169999A5 (de)
CN201796874U (zh) 前开式晶片运输盒
USD635597S1 (en) Lift pin
CN203689741U (zh) 用于音乐教学的多功能乐谱架
MX2019002839A (es) Modulos de bateria recargables y modulos de manipulacion del modulo de bateria recargable.

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 200980107909.4

Country of ref document: CN

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 09717120

Country of ref document: EP

Kind code of ref document: A2

WWE Wipo information: entry into national phase

Ref document number: 1841/MUMNP/2010

Country of ref document: IN

ENP Entry into the national phase

Ref document number: 20107019778

Country of ref document: KR

Kind code of ref document: A

WWE Wipo information: entry into national phase

Ref document number: 2010549013

Country of ref document: JP

Ref document number: 2009717120

Country of ref document: EP

WWE Wipo information: entry into national phase

Ref document number: 12921328

Country of ref document: US

WWE Wipo information: entry into national phase

Ref document number: 201071022

Country of ref document: EA