WO2009107940A3 - 신호처리블록을 구비하는 적층형 마이크로폰과 그 제조방법 - Google Patents

신호처리블록을 구비하는 적층형 마이크로폰과 그 제조방법 Download PDF

Info

Publication number
WO2009107940A3
WO2009107940A3 PCT/KR2009/000695 KR2009000695W WO2009107940A3 WO 2009107940 A3 WO2009107940 A3 WO 2009107940A3 KR 2009000695 W KR2009000695 W KR 2009000695W WO 2009107940 A3 WO2009107940 A3 WO 2009107940A3
Authority
WO
WIPO (PCT)
Prior art keywords
microphone
processing block
signal processing
stacked
manufacturing same
Prior art date
Application number
PCT/KR2009/000695
Other languages
English (en)
French (fr)
Other versions
WO2009107940A2 (ko
Inventor
이병수
Original Assignee
(주)실리콘화일
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by (주)실리콘화일 filed Critical (주)실리콘화일
Publication of WO2009107940A2 publication Critical patent/WO2009107940A2/ko
Publication of WO2009107940A3 publication Critical patent/WO2009107940A3/ko

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R1/00—Details of transducers, loudspeakers or microphones
    • H04R1/02—Casings; Cabinets ; Supports therefor; Mountings therein
    • H04R1/04—Structural association of microphone with electric circuitry therefor
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Manufacturing & Machinery (AREA)
  • Pressure Sensors (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)

Abstract

본 발명은 마이크로폰 및 그 제조방법에 관한 것으로, 보다 상세하게는 CMOS 공정에 의해 신호처리블록이 형성된 반도체 기판의 상부에 마이크로폰이 적층되어 있는 신호처리블록을 구비하는 적층형 마이크로폰 및 그 제조 방법에 관한 것이다. 본 발명에 따른 신호처리블록을 구비하는 적층형 마이크로폰 및 그 제조방법에 의하면 진동판의 진동에 의하여 적층형 마이크로폰에서 발생된 신호가 하부에 위치하는 신호처리블록에서 필요한 형태로 가공되어 출력되므로, 마이크로폰과 신호처리장치가 별도로 있는 경우에 비하여 외부의 잡음에 강하며, 별도의 신호처리장치 없이 원하는 형태의 신호로 출력할 수 있으며, 마이크로폰을 제작하는데 있어서 CMOS의 공정을 사용함으로써 제작비용이 낮으며 소형으로 제작이 가능하다는 장점이 있다.
PCT/KR2009/000695 2008-02-28 2009-02-13 신호처리블록을 구비하는 적층형 마이크로폰과 그 제조방법 WO2009107940A2 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2008-0018083 2008-02-28
KR1020080018083A KR100878454B1 (ko) 2008-02-28 2008-02-28 신호처리블록을 구비하는 적층형 마이크로폰과 그 제조방법

Publications (2)

Publication Number Publication Date
WO2009107940A2 WO2009107940A2 (ko) 2009-09-03
WO2009107940A3 true WO2009107940A3 (ko) 2009-11-26

Family

ID=40482589

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2009/000695 WO2009107940A2 (ko) 2008-02-28 2009-02-13 신호처리블록을 구비하는 적층형 마이크로폰과 그 제조방법

Country Status (2)

Country Link
KR (1) KR100878454B1 (ko)
WO (1) WO2009107940A2 (ko)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9499392B2 (en) 2013-02-05 2016-11-22 Butterfly Network, Inc. CMOS ultrasonic transducers and related apparatus and methods
CA2905040C (en) 2013-03-15 2021-10-19 Butterfly Network, Inc. Complementary metal oxide semiconductor (cmos) ultrasonic transducers and methods for forming the same
TWI708368B (zh) 2014-04-18 2020-10-21 美商蝴蝶網路公司 在互補式金屬氧化物半導體晶圓中的超音波轉換器及相關設備和方法
US9067779B1 (en) 2014-07-14 2015-06-30 Butterfly Network, Inc. Microfabricated ultrasonic transducers and related apparatus and methods
US9987661B2 (en) 2015-12-02 2018-06-05 Butterfly Network, Inc. Biasing of capacitive micromachined ultrasonic transducers (CMUTs) and related apparatus and methods
US10196261B2 (en) 2017-03-08 2019-02-05 Butterfly Network, Inc. Microfabricated ultrasonic transducers and related apparatus and methods
CA3064088A1 (en) 2017-06-21 2018-12-27 Butterfly Network, Inc. Microfabricated ultrasonic transducer having individual cells with electrically isolated electrode sections

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5573679A (en) * 1995-06-19 1996-11-12 Alberta Microelectronic Centre Fabrication of a surface micromachined capacitive microphone using a dry-etch process
KR20030004944A (ko) * 2001-07-07 2003-01-15 주식회사 비에스이 칩 마이크로폰
KR20040026756A (ko) * 2002-09-26 2004-04-01 삼성전자주식회사 플렉서블 ｍｅｍｓ 트랜스듀서와 그 제조방법 및 이를채용한 플렉서블 ｍｅｍｓ 무선 마이크로폰
KR20040061586A (ko) * 2002-12-31 2004-07-07 전자부품연구원 음향 감지 소자의 제조방법
KR100765149B1 (ko) * 2005-10-05 2007-10-15 전자부품연구원 초소형 음향 감지 장치 및 그 제조 방법

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100513424B1 (ko) * 2002-11-27 2005-09-09 전자부품연구원 음향 감지 소자의 제조방법
US6943448B2 (en) 2003-01-23 2005-09-13 Akustica, Inc. Multi-metal layer MEMS structure and process for making the same
DE102006001493B4 (de) * 2006-01-11 2007-10-18 Austriamicrosystems Ag MEMS-Sensor und Verfahren zur Herstellung

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5573679A (en) * 1995-06-19 1996-11-12 Alberta Microelectronic Centre Fabrication of a surface micromachined capacitive microphone using a dry-etch process
KR20030004944A (ko) * 2001-07-07 2003-01-15 주식회사 비에스이 칩 마이크로폰
KR20040026756A (ko) * 2002-09-26 2004-04-01 삼성전자주식회사 플렉서블 ｍｅｍｓ 트랜스듀서와 그 제조방법 및 이를채용한 플렉서블 ｍｅｍｓ 무선 마이크로폰
KR20040061586A (ko) * 2002-12-31 2004-07-07 전자부품연구원 음향 감지 소자의 제조방법
KR100765149B1 (ko) * 2005-10-05 2007-10-15 전자부품연구원 초소형 음향 감지 장치 및 그 제조 방법

Also Published As

Publication number Publication date
WO2009107940A2 (ko) 2009-09-03
KR100878454B1 (ko) 2009-01-13

Similar Documents

Publication Publication Date Title
WO2009107940A3 (ko) 신호처리블록을 구비하는 적층형 마이크로폰과 그 제조방법
WO2009022459A1 (ja) マイクロホン装置およびその製造方法
GB201121147D0 (en) Processing audio signals
WO2008034638A3 (de) Verfahren zur metallisierung von halbleiterbauelementen und verwendung
WO2007025224A3 (en) Method and apparatus for improving noise discrimination in multiple sensor pairs
WO2009002660A3 (en) Multi-functional silsesquioxanes for novel coating applications
WO2010037812A3 (de) Sensorelement und trägerelement zur herstellung eines sensors
TW200722446A (en) Process for the production of melt-processable polyurethanes
WO2009108173A3 (en) Methods for formation of substrate elements
EP2105917A3 (en) Headphone device, signal processing device, and signal processing method
WO2013060574A3 (de) Geräuschunterdrückungssystem und verfahren zur geräuschunterdrückung
WO2012023709A3 (ko) 음향 변환 장치
TW200739893A (en) Manufacturing method of solid-state image sensor module
WO2010036321A3 (en) Self-steering directional hearing aid and method of operation thereof
ATE450983T1 (de) Kompensation des echos und der rückkopplung
WO2013011114A3 (de) Bauelement mit einer mikromechanischen mikrofonstruktur
ATE546957T1 (de) Lautsprecher in schallwandebene
WO2011004962A3 (ko) 외래종 유래의 글리세르알데하이드-3-포스페이트 디하이드로지나제의 활성을 획득한 코리네박테리움 속의 ｌ-라이신 생산방법
WO2012157897A3 (ko) 무지향성 스피커
WO2008066784A3 (en) Expression of foxp3 by cancer cells
WO2009127593A3 (de) Verfahren zur herstellung einer wässrigen glukoselösung aus körnern von pflanzen des tribus triticeae
WO2007121121A3 (en) Laminated biosensor and its manufacturing method
HK1158137A1 (en) Method for manufacturing a precursor lens for a rim-shaped lens
WO2010120471A3 (en) Compositions and methods for grain processing without ph adjustment
WO2011105737A3 (ko) 게이트 밸브

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 09714657

Country of ref document: EP

Kind code of ref document: A2

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 09714657

Country of ref document: EP

Kind code of ref document: A2