WO2009105072A1 - Cermet formant un diélectrique dans un dispositif de décharge à barrière diélectrique - Google Patents

Cermet formant un diélectrique dans un dispositif de décharge à barrière diélectrique Download PDF

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Publication number
WO2009105072A1
WO2009105072A1 PCT/US2008/002373 US2008002373W WO2009105072A1 WO 2009105072 A1 WO2009105072 A1 WO 2009105072A1 US 2008002373 W US2008002373 W US 2008002373W WO 2009105072 A1 WO2009105072 A1 WO 2009105072A1
Authority
WO
WIPO (PCT)
Prior art keywords
electrode
cermet
dielectric
dielectric layer
electrodes
Prior art date
Application number
PCT/US2008/002373
Other languages
English (en)
Inventor
Heidi H. Hollick
Original Assignee
Carrier Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carrier Corporation filed Critical Carrier Corporation
Priority to PCT/US2008/002373 priority Critical patent/WO2009105072A1/fr
Publication of WO2009105072A1 publication Critical patent/WO2009105072A1/fr

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2437—Multilayer systems
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2441—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes characterised by the physical-chemical properties of the dielectric, e.g. porous dielectric
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2245/00—Applications of plasma devices
    • H05H2245/30—Medical applications
    • H05H2245/36—Sterilisation of objects, liquids, volumes or surfaces

Definitions

  • FIG. 3 is a schematic of a DBD device of the present invention, which uses a cermet as the dielectric material.
  • FIG. 4 is a plot of current as a function of time comparing the DBD devices of FIGS. 2 and 3.
  • FIG. 5 is an exploded view of a portion of the DBD device of FIG. 3.
  • the cermet composition is below the percolation threshold, the metal particles in the ceramic are non-contiguous and the only conduction process in the cermet is electron tunneling. In contrast, if the cermet had enough metal such that continuous conduction channels did exist, then the cermet would essentially operate as a conductor. For effectiveness as a dielectric, the cermet should have some conductivity, while maintaining some resistivity.
  • FIG. 6A is a schematic of dielectric barrier discharge device 100 of the present invention which includes multiple pairs 102 of electrodes stacked on top of one another. Individual electrodes and dielectric layers are not shown in FIG. 6A. However, FIG. 6B shows the components or layers that are contained within each electrode pair 102.
  • Device 100 is configured for use in an air handling system and includes dielectrics formed from a cermet, as described above. In the exemplary embodiment shown in FIG. 6A, device 100 includes six pairs 102a- 102f of electrodes. It is recognized that more than six or less than six pairs of electrodes may be used. The number of pairs of electrodes may be determined, in part, based on, a volume of air passing through device 100 and/or an expected contamination level of the air.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)

Abstract

Un dispositif de génération de plasma comprend une première électrode et une seconde électrode conçues pour recevoir du courant à partir d’une alimentation en énergie. Les première et seconde électrodes se font mutuellement face et sont séparées par un interstice (G). Une couche diélectrique en cermet est fixée à la première électrode et/ou à la seconde électrode. Les couches diélectriques en cermet peuvent comprendre du cuivre et/ou de l’aluminium et/ou du nickel et/ou du molybdène. Dans des modes de réalisation préférés, une teneur en métal du cermet se trouve en dessous d’un seuil de percolation du cermet. Dans certains modes de réalisation, le dispositif de génération de plasma est un dispositif de décharge à barrière diélectrique (DBD). Dans un exemple de mode de réalisation, le dispositif DBD est utilisé dans un système de purification d’air pour éliminer les contaminants d’un courant d’air. Dans certains modes de réalisation, une ou plusieurs paires d’électrodes supplémentaires, présentant des couches diélectriques en cermet, peuvent être empilées sur les première et seconde électrodes pour accueillir de plus grands volumes d’écoulement d’air à travers le dispositif de génération de plasma.
PCT/US2008/002373 2008-02-22 2008-02-22 Cermet formant un diélectrique dans un dispositif de décharge à barrière diélectrique WO2009105072A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/US2008/002373 WO2009105072A1 (fr) 2008-02-22 2008-02-22 Cermet formant un diélectrique dans un dispositif de décharge à barrière diélectrique

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US2008/002373 WO2009105072A1 (fr) 2008-02-22 2008-02-22 Cermet formant un diélectrique dans un dispositif de décharge à barrière diélectrique

Publications (1)

Publication Number Publication Date
WO2009105072A1 true WO2009105072A1 (fr) 2009-08-27

Family

ID=40985799

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2008/002373 WO2009105072A1 (fr) 2008-02-22 2008-02-22 Cermet formant un diélectrique dans un dispositif de décharge à barrière diélectrique

Country Status (1)

Country Link
WO (1) WO2009105072A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100037937A1 (en) * 2008-08-15 2010-02-18 Sater Bernard L Photovoltaic cell with patterned contacts
WO2024068668A1 (fr) * 2022-09-28 2024-04-04 Prodea Depolluting Dispositif de traitement d'une phase gazeuse par plasma et procédé associé

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5124173A (en) * 1990-07-17 1992-06-23 E. C. Chemical Co., Ltd. Atmospheric pressure plasma surface treatment process
US6441554B1 (en) * 2000-11-28 2002-08-27 Se Plasma Inc. Apparatus for generating low temperature plasma at atmospheric pressure
US20070182327A1 (en) * 2005-08-22 2007-08-09 K.C. Tech Co., Ltd. Manufacturing method of electrode for atmospheric pressure plasma, electrode structure, and atmospheric pressure plasma apparatus using the same

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5124173A (en) * 1990-07-17 1992-06-23 E. C. Chemical Co., Ltd. Atmospheric pressure plasma surface treatment process
US6441554B1 (en) * 2000-11-28 2002-08-27 Se Plasma Inc. Apparatus for generating low temperature plasma at atmospheric pressure
US20070182327A1 (en) * 2005-08-22 2007-08-09 K.C. Tech Co., Ltd. Manufacturing method of electrode for atmospheric pressure plasma, electrode structure, and atmospheric pressure plasma apparatus using the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100037937A1 (en) * 2008-08-15 2010-02-18 Sater Bernard L Photovoltaic cell with patterned contacts
WO2024068668A1 (fr) * 2022-09-28 2024-04-04 Prodea Depolluting Dispositif de traitement d'une phase gazeuse par plasma et procédé associé

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