WO2009096750A3 - 광결맞음 단층 영상기술을 이용하여 가공 상태를 모니터링 하는 레이저 가공장치 - Google Patents

광결맞음 단층 영상기술을 이용하여 가공 상태를 모니터링 하는 레이저 가공장치 Download PDF

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Publication number
WO2009096750A3
WO2009096750A3 PCT/KR2009/000484 KR2009000484W WO2009096750A3 WO 2009096750 A3 WO2009096750 A3 WO 2009096750A3 KR 2009000484 W KR2009000484 W KR 2009000484W WO 2009096750 A3 WO2009096750 A3 WO 2009096750A3
Authority
WO
WIPO (PCT)
Prior art keywords
processing apparatus
laser processing
state
optical coherence
coherence tomography
Prior art date
Application number
PCT/KR2009/000484
Other languages
English (en)
French (fr)
Other versions
WO2009096750A2 (ko
Inventor
엄태중
손익부
노영철
이종민
Original Assignee
광주과학기술원
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 광주과학기술원 filed Critical 광주과학기술원
Publication of WO2009096750A2 publication Critical patent/WO2009096750A2/ko
Publication of WO2009096750A3 publication Critical patent/WO2009096750A3/ko

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/04—Purification or separation of nitrogen
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Laser Beam Processing (AREA)
  • Lasers (AREA)

Abstract

광결맞음 단층 영상기술을 이용하여 가공 상태를 모니터링 하는 레이저 가공장치가 개시된다. 레이저 가공장치는 펨토초 레이저를 이용하여 가공물의 분자결합을 파괴하여 가공하는 가공부, 가공물의 입체 상태를 모니터링 하는 단층 모니터링부 및 3차원 단층영상을 이용하여 펨토초 레이저의 출력을 제어하는 제어부로 구성된다. 여기에 가공물의 표면 상태를 모니터링 하는 표면 모니터링부를 더 가지는 구성도 가능하다. 가공 상태에 대한 실시간 모니터링이 가능하므로 공정 전반에 대한 능동적 제어가 가능하다.
PCT/KR2009/000484 2008-01-31 2009-02-02 광결맞음 단층 영상기술을 이용하여 가공 상태를 모니터링 하는 레이저 가공장치 WO2009096750A2 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2008-0010136 2008-01-31
KR1020080010136A KR101088479B1 (ko) 2008-01-31 2008-01-31 광결맞음 단층 영상기술을 이용하여 가공 상태를 모니터링하는 레이저 가공장치

Publications (2)

Publication Number Publication Date
WO2009096750A2 WO2009096750A2 (ko) 2009-08-06
WO2009096750A3 true WO2009096750A3 (ko) 2009-11-05

Family

ID=40913434

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2009/000484 WO2009096750A2 (ko) 2008-01-31 2009-02-02 광결맞음 단층 영상기술을 이용하여 가공 상태를 모니터링 하는 레이저 가공장치

Country Status (2)

Country Link
KR (1) KR101088479B1 (ko)
WO (1) WO2009096750A2 (ko)

Families Citing this family (19)

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Publication number Priority date Publication date Assignee Title
WO2014119945A1 (ko) * 2013-02-01 2014-08-07 경북대학교 산학협력단 다중 이미징 장치
US9399256B2 (en) 2014-06-20 2016-07-26 Velo3D, Inc. Apparatuses, systems and methods for three-dimensional printing
US10065270B2 (en) 2015-11-06 2018-09-04 Velo3D, Inc. Three-dimensional printing in real time
US10286603B2 (en) 2015-12-10 2019-05-14 Velo3D, Inc. Skillful three-dimensional printing
WO2017143077A1 (en) 2016-02-18 2017-08-24 Velo3D, Inc. Accurate three-dimensional printing
US11691343B2 (en) 2016-06-29 2023-07-04 Velo3D, Inc. Three-dimensional printing and three-dimensional printers
EP3263316B1 (en) 2016-06-29 2019-02-13 VELO3D, Inc. Three-dimensional printing and three-dimensional printers
US20180093418A1 (en) 2016-09-30 2018-04-05 Velo3D, Inc. Three-dimensional objects and their formation
US20180126462A1 (en) 2016-11-07 2018-05-10 Velo3D, Inc. Gas flow in three-dimensional printing
US20180186080A1 (en) 2017-01-05 2018-07-05 Velo3D, Inc. Optics in three-dimensional printing
KR102476246B1 (ko) 2017-01-18 2022-12-08 아이피지 포토닉스 코포레이션 재료의 수정을 위한 가간섭적 촬영 및 피드백 제어를 위한 방법 및 시스템
US20180250744A1 (en) 2017-03-02 2018-09-06 Velo3D, Inc. Three-dimensional printing of three-dimensional objects
US20180281284A1 (en) 2017-03-28 2018-10-04 Velo3D, Inc. Material manipulation in three-dimensional printing
US10272525B1 (en) 2017-12-27 2019-04-30 Velo3D, Inc. Three-dimensional printing systems and methods of their use
US10144176B1 (en) 2018-01-15 2018-12-04 Velo3D, Inc. Three-dimensional printing systems and methods of their use
CA3148849A1 (en) 2019-07-26 2021-02-04 Velo3D, Inc. Quality assurance in formation of three-dimensional objects
KR102306876B1 (ko) * 2020-01-21 2021-09-29 한국기계연구원 유리 용접 시스템
CN114178680B (zh) * 2021-11-03 2024-01-26 西安石油大学 飞秒激光微加工的同步监测装置
KR102507019B1 (ko) * 2022-10-05 2023-03-07 주식회사 아이티아이 레이저 가공 및 에칭 장치 및 방법

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07124764A (ja) * 1993-10-28 1995-05-16 Nec Corp レーザ加工装置
KR20030084117A (ko) * 2002-04-25 2003-11-01 이헌주 광학적 단층촬영 시스템 및 방법
KR20050030006A (ko) * 2003-09-24 2005-03-29 한국기계연구원 펨토초 레이저를 사용하는 정밀 가공장치 및 가공방법
JP2006198634A (ja) * 2005-01-18 2006-08-03 National Institute Of Information & Communication Technology レーザー加工装置、この装置を用いて製造した光デバイス

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07124764A (ja) * 1993-10-28 1995-05-16 Nec Corp レーザ加工装置
KR20030084117A (ko) * 2002-04-25 2003-11-01 이헌주 광학적 단층촬영 시스템 및 방법
KR20050030006A (ko) * 2003-09-24 2005-03-29 한국기계연구원 펨토초 레이저를 사용하는 정밀 가공장치 및 가공방법
JP2006198634A (ja) * 2005-01-18 2006-08-03 National Institute Of Information & Communication Technology レーザー加工装置、この装置を用いて製造した光デバイス

Also Published As

Publication number Publication date
KR101088479B1 (ko) 2011-11-30
KR20090084136A (ko) 2009-08-05
WO2009096750A2 (ko) 2009-08-06

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