WO2009091293A1 - Dispositif destiné à la rotation de précision d'éléments optiques - Google Patents

Dispositif destiné à la rotation de précision d'éléments optiques Download PDF

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Publication number
WO2009091293A1
WO2009091293A1 PCT/RU2008/000815 RU2008000815W WO2009091293A1 WO 2009091293 A1 WO2009091293 A1 WO 2009091293A1 RU 2008000815 W RU2008000815 W RU 2008000815W WO 2009091293 A1 WO2009091293 A1 WO 2009091293A1
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WO
WIPO (PCT)
Prior art keywords
axis
elements
holes
platform
ball
Prior art date
Application number
PCT/RU2008/000815
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English (en)
Russian (ru)
Inventor
Aleksey Vladimirovich Kirsanov
Original Assignee
Institute Of Applied Physics Ras
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Institute Of Applied Physics Ras filed Critical Institute Of Applied Physics Ras
Publication of WO2009091293A1 publication Critical patent/WO2009091293A1/fr

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/003—Alignment of optical elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C25/00—Bearings for exclusively rotary movement adjustable for wear or play
    • F16C25/06—Ball or roller bearings

Definitions

  • the technical field The invention relates to optical-mechanical instrumentation, and in particular to adjusting devices for optical elements, specially designed for aligning optical elements during the assembly of optical systems, in particular such systems where it is important to precisely rotate optical elements with minimal deviations of the axis of rotation, for example , for alignment of diffraction gratings in compressor systems of chirped optical pulses.
  • a known device for rotating MA is a polarizing microscope stage (see Fig. 30, p. 508 in the same place).
  • the device comprises a base, a platform for fastening the rotatable elements and a contact unit of the rolling elements in the form of a single-row bulk ball bearing.
  • the contact node of the rolling elements is a closed ball four-point support node (“Details and mechanisms of devices)), reference book, B. M. Uvarov, V. A. Boyko, V. B. Podarevsky, L.I. Vlasenko; Kiev 1987, see table 5.4 on page 146), consisting of three support rings (OK), between which rolling elements (balls) move.
  • the support rings form four coaxial conical surfaces for contact with the balls, located at an angle of 90 ° with respect to each other, while the lines of intersection of these surfaces in the case of perfect manufacturing OK should be circles lying in planes perpendicular to the axis of rotation of the device. But in practice, due to inaccuracies in the manufacture of OK lines of intersection of surfaces for contact have
  • double-row bearings are used in devices for rotating optical elements.
  • Such devices include, for example, the model M-038.DG1, manufactured by the company Physikinstrumente (see www.rhusikiprptepte).
  • the magnitude of the angular deviations of the axis of the platform in this case is not more than 75 mrad or 15.5 arc seconds. Obtaining such a value of angular deviations is achieved due to the complexity of the design, because in this case, it is necessary to manufacture two identical four-point contact support nodes located one above the other and having a common support ring. This leads to a significant increase in the cost of the entire device as a whole. In addition, in the finished device there is no way to correct (reduce) the existing angular deviations.
  • the prototype product contains a base, a platform for fixing the OE on it, a thrust bearing in the form of three support rings (OK) connected to the base and the platform, forming a four-point support contact node of the rolling elements, and control elements for preloading the entire device as a whole.
  • the movement in this device is ensured by rotating the micrometer, the fixed part of which is fixed in the holder located on the base, and the moving part of the micrometer rests on the bracket mounted on the platform.
  • This design is the basis for a whole family of rotation devices manufactured by Standa, which differ in dimensions and drive options.
  • the disadvantage of the prototype is the presence of angular deviations of the axis of rotation of the platform when it moves relative to the axis of the device as a whole, due to inaccuracies in the manufacture of support rings OK.
  • the magnitude of the angular deviations in the prototype is 290 microradians (60 arc seconds) and can not be corrected using the said preload device.
  • This drawback is in one way or another characteristic of all devices for rotating MA.
  • the problem to which the present invention is directed is the development of a more accurate device that allows precision rotation of the OE, having minimal axis deviations during rotation of the platform (no more than two angular seconds), due to the possibility of controlled compensation of manufacturing and assembly inaccuracies of all parts.
  • the proposed device for the precision rotation of optical elements contains a base, a platform for mounting an OE and at least three support rings (OK) connected to the base and platform, installed with a preliminary tightness, which form the inner and outer parts of the support unit, and contain contact surfaces for rolling elements in the support unit.
  • New in the developed device is that the internal and external parts of the support unit are made adjustable due to the introduction of additional adjustment that ensures the movement of the rolling elements in one plane.
  • This design of the device improves the accuracy of rotation of the platform due to the possibility of compensating for inaccuracies in the manufacture and assembly of all parts in the finished and assembled device, which can significantly reduce the angular deviations of the axis of rotation of the platform, and, consequently, the optical element located on it.
  • This result is achieved due to the ability to bend the support rings, using their natural elasticity, to those few micrometers that are laborious and almost impossible to control during the manufacturing of device parts.
  • the supporting elements it is advisable to adjust the supporting elements to move the rolling elements in the same plane, provide the support rings with locking sleeves, and make technological holes located axisymmetrically around the circumferences in the base and platform, the axes of which are oriented parallel to the device’s axis, and equip them with tuning elements.
  • SUBSTITUTE SHEET intersecting perpendicular to each other technological holes arranged axisymmetrically around the circumference in the plane of the base and from its end face, while the axis of the holes of one row should be oriented parallel to the axis of the device, and the axis of the holes of the other row should be oriented perpendicular to the axis of the device, and provide each pair of intersecting holes with a system transferring the horizontal pressure of the trimming elements into a vertical force, for example, using pairs of ball with wedge or ball with ball.
  • the support rings with fixing sleeves to ensure the above adjustment, base the manufacturing holes located axisymmetrically around the circumference, the axes of which are oriented parallel to the axis of the device, and equip them with trimming elements, and make two rows of intersecting technological parts in the platform holes perpendicular to each other, placed axisymmetrically around the circles in the plane of the plateau from the end, in this case, orient the axes of the holes of one row parallel to the axis of the device, and orient the axes of the holes of the other row perpendicular to the axis of the device, and provide each pair of intersecting holes with a system for transmitting the horizontal pressure of the trimming elements to a vertical force, for example, using pairs ball with a wedge or ball with a ball.
  • FIG. 1 is a cross-sectional view of a device for rotating a MA under item 2 f .
  • FIG. 2 is a cross-sectional view of a device for rotating a MA under item 3 f .
  • FIG. 3 is a cross-sectional view of a device for rotating a MA under item 5 f .
  • FIG. 4 shows a photograph of a specific implementation of the claimed device
  • - in FIG. 5 is a schematic representation of an installation explaining the adjustment (compensation of angular deviations) of the claimed device for precision rotation of the MA;
  • FIG. 6 are graphs showing the angular deviations of the platform of a specifically implemented device before and after adjustment.
  • the proposed device for the precision rotation of the OE contains support rings 1, 2 and 3 (see Fig. 1).
  • the support rings 1 and 2 are fixed on the base 4 with the help of the locking sleeves 5 and 6, providing a preload of the entire device.
  • the support ring 3 is attached to the movable platform 7 with the help of the fixing sleeve 8.
  • the support rings 1, 2 and 3 form a closed ball four-point support unit, inside which the rolling elements 9 are located.
  • the rolling elements 9, which are balls, are made, for example, of high-quality hardened become.
  • the rolling elements 9 are additionally fixed from unwanted movements with the help of separators (not shown in FIG. 1) located inside the four-point support unit.
  • technological holes 10 are made, arranged circumferentially axisymmetrically with respect to the axis OO ′ of the device near the edge of the support ring 1 and the axis of the holes 10 are oriented
  • SUBSTITUTE SHEET (RULE 26) parallel to the axis of OO 1 .
  • Technological holes 12 are made in the platform 7, located circumferentially axisymmetrically with respect to the axis OO 'of the device near the edge of the support ring 3, the axis of the holes 12 are parallel to the axis OO'.
  • the support rings 1 and 2 are fixed on the base 4 with the help of fixing bushings 5 and 6.
  • the support ring 3 is fixed on the platform 7 with the fixing sleeve 8.
  • the supporting rings 1, 2 and 3 form a closed four-point ball bearing assembly inside which the rolling elements 9 are located.
  • technological holes 10 are made, placed axisymmetrically around the circumference near the edge of the support ring 1, the axis of the holes 10 are parallel to the axis OO 1 of the device. Perpendicular to each hole 10, crossing it, holes 14 are made from the end face of the base 4, while the axes of the holes 14 are perpendicular to the axis OO ⁇
  • Each pair of intersecting holes 14 and 10 contains a trimmed element 11 and a system 15 for transmitting horizontal pressure to vertical force.
  • the system 15 for transmitting the horizontal pressure of the trimming element 11 to the vertical force can be made in the form of a ball-ball or wedge-ball pair.
  • technological holes 12 are arranged axially symmetrically around the edge of the support ring 3, and the axis of the holes 12 are oriented parallel to the axis OO ⁇ of the device. From the end of the platform 7 perpendicular to the holes 12, crossing them, technological holes 16 are made, their axes being perpendicular to the axis OO ⁇ of the device.
  • each pair of intersecting holes 16 and 12 there are trimming elements 13 and a system 17 for transmitting horizontal pressure to vertical force.
  • a system 17 for transmitting the horizontal pressure of the trimming elements 13 into a vertical force ball-ball or ball-wedge pairs can be used.
  • FIG. 4 An example of a specific implementation of the developed device for the precision rotation of optical elements made in accordance with paragraphs 1 and 3 of the formula is presented in the form of a photograph in FIG. 4.
  • a platform 7 On the base 4 with a diameter of 200 mm is a platform 7 with a diameter of 192 mm.
  • the diameter of the circle along which the centers of the rolling elements 9 move is 140 mm.
  • twelve pairs of intersecting technological holes 14 and 10 are axially symmetrically made, with trimming elements 11 inside and a ball-wedge system 15 for transmitting horizontal pressure to vertical force.
  • twenty-four holes 12 are arranged along two circles with trimming elements 13 in the form of screws (see Fig. 2).
  • the deviation of the platform axis and the optical element located on it after tuning is no more than two angular seconds.
  • Controlled compensation of micro-precision manufacturing of support rings 1,2,3 with the help of additional adjustment, providing movement of the rolling elements in one plane and shown in FIG. 5 are carried out as follows.
  • Previously, on the platform 7 of the device is fixed flat mirror 18 on a conventional optical table 19 with angular adjustment.
  • the mirror 18 rotates with the platform 7 relative to the base 4.
  • the diagnostic radiation of the laser 20, reflected from the translucent mirror 21, hits the mirror 18.
  • In the focal plane of the lens 22 is a CCD camera 23, on the matrix of which is fixed and measured
  • SUBSTITUTE SHEET (RULE 26) the displacement of the center of mass of the beam reflected from the mirror 18.
  • the obtained data are accumulated and processed by computer 24.
  • Such a measurement scheme allows us to distinguish angular deviations at the level of 10 "6 radians (approximately 0.2 arc seconds).
  • the angular deviations of the platform 7 are reduced to several units of arc seconds , which is an order of magnitude less compared to the prototype.
  • the reduction of the deviations of the turntable 7 is carried out by making the support rings 1, 2 and 3 of the device adjustable vertically, which ensures the movement of the rolling elements in the same plane and allows us to solve the problem.
  • FIG. 6 shows the dependences of the deviations of the platform 7 of the device before and after compensation for deviations for the specific implementation of the device shown in FIG. 4.
  • the angle of rotation of the platform is indicated in degrees
  • the deviation of the axis of the platform in microradians (mrad) relative to the position of the axis of the rotation device as a whole.
  • the angular deviations of the axis of the platform 7 were in the worst case 34 mrad or 7 arc seconds (row 1). After compensation in the worst case, the angular deviations were less than 9 mrad or 1.9 arc seconds (row 2), which is 3.5 times less than before adjustment.
  • a feature of the operation of the precision rotation device according to claim 3, 4 and 5 of the formula is the use of a system for transmitting the horizontal pressure force of the trimming elements 11 and / or 13 to the vertical force acting on the support rings 1, 2 and 3. Moreover, access to the trimming elements 11 and 13 is carried out from the side of the base 4 and platform 7, respectively (see. Fig. 2 and 3), which is a more convenient option, because often access to the elements 11 from the lower side of the base 4 and to the elements 13 from the upper side of the platform 7 is difficult or impossible. Such embodiments of the developed device can further improve its consumer properties.
  • the developed device for the precision rotation of optical elements is made on the basis of a modern element base (components).
  • a design based on a standard rotation bearing for example, bearing 116209 GOST P 52859-2007) incorporates a control system to compensate for its micro-deviations.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Rolling Contact Bearings (AREA)

Abstract

Le dispositif destiné à la rotation de précision d'éléments optiques est destiné à l'ajustage d'éléments optiques dans des systèmes dans lesquels il est important de faire tourner les éléments optiques de sorte que la déviation de leur axe de rotation soit minimale. Entre la base (4) et la plate-forme (7) on a placé des bagues d'appui (1, 2, 3) précontraintes qui forment des surfaces de contact pour des éléments de roulement (9) dans un bloc d'appui. On propose de corriger la position des bagues d'appui (1, 2, 3) par l'introduction d'un réglage supplémentaire, ce qui permet d'obtenir le déplacement des éléments de roulement (9) dans un plan unique. L'utilisation de ce type de réglage permet de réduire les déviations angulaires de l'axe de rotation de la plate-forme (7) et, respectivement, de l'axe de l'élément optique disposé sur la plate-forme jusqu'à une valeur inférieure à 2 secondes angulaires.
PCT/RU2008/000815 2008-01-09 2008-12-30 Dispositif destiné à la rotation de précision d'éléments optiques WO2009091293A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
RU2008100334 2008-01-09
RU2008100334/28A RU2365950C1 (ru) 2008-01-09 2008-01-09 Устройство для прецизионного вращения оптических элементов

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WO2009091293A1 true WO2009091293A1 (fr) 2009-07-23

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110568581A (zh) * 2019-09-09 2019-12-13 哈尔滨工业大学 一种高精度电动反射镜架
CN113586871A (zh) * 2021-07-29 2021-11-02 中国科学院长春光学精密机械与物理研究所 二维倾斜调整机构
CN115728891A (zh) * 2022-11-23 2023-03-03 中国科学院西安光学精密机械研究所 一种可精密调节的对准装置及其使用方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4021666A1 (fr) * 2019-08-27 2022-07-06 SLM Solutions Group AG Dispositif et appareil

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01202834A (ja) * 1988-02-09 1989-08-15 Fujitsu Ltd 精密回転テーブル
JPH10123428A (ja) * 1996-10-18 1998-05-15 Hitachi Denshi Ltd 回転ステージ機構

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01202834A (ja) * 1988-02-09 1989-08-15 Fujitsu Ltd 精密回転テーブル
JPH10123428A (ja) * 1996-10-18 1998-05-15 Hitachi Denshi Ltd 回転ステージ機構

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
THE ROTATION STAGE OF BIG PLATFORM 7R170-200., 28 December 2007 (2007-12-28), Retrieved from the Internet <URL:http://www.standa.lt/products/catalog/translati...> [retrieved on 20071026] *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110568581A (zh) * 2019-09-09 2019-12-13 哈尔滨工业大学 一种高精度电动反射镜架
CN113586871A (zh) * 2021-07-29 2021-11-02 中国科学院长春光学精密机械与物理研究所 二维倾斜调整机构
CN113586871B (zh) * 2021-07-29 2022-05-27 中国科学院长春光学精密机械与物理研究所 二维倾斜调整机构
CN115728891A (zh) * 2022-11-23 2023-03-03 中国科学院西安光学精密机械研究所 一种可精密调节的对准装置及其使用方法

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