WO2009083889A1 - Contactless lifting of an object by an inverted planar motor - Google Patents

Contactless lifting of an object by an inverted planar motor Download PDF

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Publication number
WO2009083889A1
WO2009083889A1 PCT/IB2008/055484 IB2008055484W WO2009083889A1 WO 2009083889 A1 WO2009083889 A1 WO 2009083889A1 IB 2008055484 W IB2008055484 W IB 2008055484W WO 2009083889 A1 WO2009083889 A1 WO 2009083889A1
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WO
WIPO (PCT)
Prior art keywords
magnetic
coil actuator
support
lift support
planar
Prior art date
Application number
PCT/IB2008/055484
Other languages
French (fr)
Other versions
WO2009083889A9 (en
Inventor
Petrus C. M. Frissen
Johan C. Compter
Original Assignee
Koninklijke Philips Electronics N.V.
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Publication date
Application filed by Koninklijke Philips Electronics N.V. filed Critical Koninklijke Philips Electronics N.V.
Publication of WO2009083889A1 publication Critical patent/WO2009083889A1/en
Publication of WO2009083889A9 publication Critical patent/WO2009083889A9/en

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70758—Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70816—Bearings
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/08—Structural association with bearings
    • H02K7/09—Structural association with bearings with magnetic bearings

Definitions

  • the present invention generally relates to an inverted planar motor of any type.
  • the present invention specifically relates to providing a contactless lifting of an object by an inverted planar motor.
  • FIG. 1 illustrates a generic inverted planar motor as known in the art employing a coil actuator 10 magnetically interactive with a magnetic planar support 20.
  • commutation currents are selectively applied to coil actuator 10 to move magnetic planar support 20 parallel to an XY plane of an XYZ reference frame associated with coil actuator 10 based on a magnetic interaction between coil actuator 10 and magnetic planar support 20.
  • commutation currents can be selectively applied to coil actuator 10 whereby magnetic planar support 20 can be linearly displaced in the X- direction, linearly displaced in the Y-direction and/or rotated in the Rz-direction as shown by the respective bi-directional arrows.
  • the inverted planar motor as shown has proven to be very useful in many applications, such as, for example, a wafer stage or a reticle stage of a photolithography system. Nonetheless, one limitation of the inverted planar motor of FIG. 1 is the inability to appreciably lift an object (e.g., a wafer) being supported by magnetic planar support 20 without an undue expenditure of power. To overcome this limitation, the present invention provides a magnetic lift support integrated with magnetic planar support 20 and likewise movable by coil actuator 10.
  • One form of the present invention is an inverted planar motor comprising a structure which integrates a magnetic planar support and a magnetic lift support, and a coil actuator magnetically interactive with the magnetic supports.
  • the coil actuator In operation, based on a magnetic interaction between the coil actuator and the magnetic planar support, the coil actuator concurrently moves the magnetic supports parallel to an XY plane of an XYZ reference frame associated with the coil actuator (e.g., a linear displacement of the magnetic supports in a X-direction, a linear displacement of the magnetic supports in a Y-direction and/or a rotation of the magnetic supports in a Rz direction).
  • the coil actuator exclusively moves the magnetic lift support orthogonal to the XY plane of the XYZ reference frame associated with the coil actuator (e.g., a linear displacement of the magnetic lift support in the Z-direction).
  • a second form of the present invention is a system comprising an object and the aforementioned inverted planar motor.
  • the object is supported by the magnetic supports whereby the object can be moved parallel to the XY plane of the XYZ reference frame associated with the coil actuator as a function of the magnetic interaction between the coil actuator and the magnetic planar support, and whereby the object can be moved orthogonal to the XY plane of the XYZ reference frame as a function of the magnetic interaction between the coil actuator and the magnetic lift support.
  • a third form of the present invention is a method of operating an inverted planar motor including a method of integrating a magnetic planar support and a magnetic lift support, and a coil actuator magnetically interactive with the magnetic supports.
  • the method comprises magnetically interacting the coil actuator and the magnetic planar support wherein the coil actuator concurrently moves the magnetic supports parallel to an XY plane of an XYZ reference frame associated with the coil actuator, and magnetically interacting the coil actuator and the magnetic lift support wherein the coil actuator exclusively moves the magnetic lift support orthogonal to the XY plane of the XYZ reference frame associated with the coil actuator.
  • FIG. 1 illustrates a perspective top view of a block diagram of a generic inverted planar motor as known in the art.
  • FIG. 2 illustrates a perspective top view of a block diagram of a generic embodiment of an inverted planar motor in accordance with the present invention.
  • FIG. 3 illustrates a perspective top view of a schematic diagram of an exemplary embodiment of a coil actuator and a magnetic planar support in accordance with the present invention;
  • FIG. 4 illustrates a perspective bottom view of a schematic diagram of the magnetic planar support shown in FIG. 3.
  • FIG. 5 illustrates a side view of an exemplary embodiment of a schematic diagram of an inverted planar motor in accordance with the present invention.
  • FIG. 6 illustrates a block diagram of a system employing an inverted planar motor in accordance with the present invention.
  • FIG. 7 illustrates a flowchart representative of a contactless object planar movement method as known in the art.
  • FIG. 8 illustrates a flowchart representative of a contactless object lifting movement method in accordance with the present invention.
  • coil actuator is broadly defined herein as any device structurally configured with coils responsive to commutation currents for generating an actuating magnetic field as known in the art
  • magnetic planar support and “magnetic lift support” are broadly defined herein as any device structurally configured with magnets positioned relative to the coils of the coil actuator to magnetically interact with a generated actuating magnetic field of the coil actuator as known in the art.
  • an integration of a magnetic planar support and a magnetic lift support is broadly defined as any type of combining, unifying, etc. of the magnetic supports as a single entity in a manner that facilitates a concurrent planar movement of both magnetic supports based on a magnetic interaction of the coil actuator and the magnetic planar support, and that additionally facilitates an exclusive lifting movement of the magnetic lift support based on a magnetic interaction between the coil actuator and the magnetic lift support.
  • commutation currents can be selectively applied to coil actuator 10 as known in the art to concurrently move magnetic planar support 20 and magnetic lift support 30 parallel to the XY plane of the XYZ reference frame associated with coil actuator 10.
  • the commutation currents can be selectively applied to coil actuator 10 whereby magnetic planar support 20 and magnetic lift support 30 are concurrently linearly displaced in the X-direction, linearly displaced in the Y-direction and/or rotated in the Rz-direction as shown by the respective bi-directional arrows.
  • the concurrent planar movement of magnetic supports 20 and 30 parallel to the XY plane of the XYZ reference frame encompasses the commutation currents being applied to a predetermined sequence/grouping of coils of coil actuator 10 that generates Lorentz forces based on a magnetic interaction between the coils of coil actuator 10 and the magnets of magnetic planar support 20 to concurrently move magnetic supports 20 and 30 in X- direction, Y-direction and/or R z direction parallel to the XY plane of the XYZ reference frame.
  • These commutation currents may also generate additional Lorentz forces based on a magnetic interaction between the coils of coil actuator 10 and the magnets of magnetic lift support 30.
  • the integration of magnetic supports 20 and 30 can be designed in accordance with the present invention to neutralize any magnetic interaction between the coils of coil actuator 10 and the magnets of magnetic lift support 30 as will be further explained herein.
  • the commutation currents can be selectively applied to coil actuator 10 as known in the art to exclusively move magnetic lift support 30 orthogonal to the XY plane of the XYZ reference frame associated with coil actuator 10.
  • these commutation currents can be selectively applied to coil actuator 10 whereby magnetic lift support 30 is exclusively linearly displaced in the Z- direction as shown by the respective bi-directional arrow.
  • the exclusive lifting movement of magnetic lift support 30 orthogonal to the XY plane of the XYZ reference frame encompasses the commutation currents being applied to a predetermined sequence/grouping of coils of coil actuator 10 that generates Lorentz forces based on a magnetic interaction between the coils of coil actuator 10 and the magnets of magnetic lift support 30 to exclusively magnetic lift support 30 in the Z-direction orthogonal to the XY plane of the XYZ reference frame.
  • These commutation currents may also generate additional Lorentz forces based on a magnetic interaction between the coils of coil actuator 10 and the magnets of magnetic planar support 20.
  • the integration of magnetic supports 20 and 30 can be designed in accordance with the present invention to neutralize any magnetic interaction between the coils of coil actuator 10 and the magnets of magnetic planar support 20 as will be further explained herein.
  • a designed waveform peak-to-peak amplitude, shape and frequency of the commutation currents is dependent upon numerous designed physical parameters of the motor, such as, for example, a number of turns of each coil of coil actuator 10 and the magnetic flux strength of each magnet of magnetic supports 20 and 30.
  • bearings of any type can be used to constrain any rotation of magnetic supports 20 and 30 in a Rx direction and a Ry direction of the XYZ reference frame, and/or any linear displacement of magnetic planar support 20 in the Z direction of the XYZ reference frame.
  • Halbach magnets can be employed by magnetic lift support 30 to provide a bearing function between coil actuator 10 and magnetic planar support 20.
  • an example of coil actuator 10 is a coil actuator 11 that employs a stationary coil block 12 with a coil array 13 affixed by any suitable means to a top exterior of coil block 12 as shown.
  • Coil block 12 can also house various components (not shown) for applying commutation currents to coil array 13, such as, for example, amplifiers and magnetic sensors (e.g., Hall sensors), and cooling channels 14 for providing cooling fluids to such components.
  • components not shown
  • magnetic planar support 20 FIG.
  • FIG. 2 2) is a magnetic planar support 21 that employs a pairing of a magnetically impermeable mirror block 22 and a magnetically permeable carrier 23 with a magnetic array 24 affixed by any means to a bottom exterior of carrier 23 as best shown in FIG. 4.
  • mirror block 22 and carrier 23 are designed with numerous lift channels 25 extending from a top exterior of mirror block 22 to the bottom exterior of carrier 23, and magnetic array 24 is designed with a spacing between the magnets to expose lift channels 25.
  • components of the magnetic lift support (not shown) can be movable inserted through the lift channels 25 to integrate the magnetic lift support with magnetic planar support 21.
  • FIG. 5 illustrates an inverted planar motor employing a coil actuator 40, a magnetic planar support 50 and a magnetic lift support 60.
  • a coil block (not shown) of coil actuator 40 is embedded within a table 80 to thereby remain stationary in operation.
  • Coil actuator 40 has a coil array 41, of which nine (9) coils are shown, each coil having one or more Hall sensors 42 disposed in a middle of the coil.
  • coils 41(1), 41(2), 41(4), 41(6), 41(8) and 41(9) have a single Hall sensor 42 disposed in a middle thereof while coils 41(3), 41(5) and 41(7) have a stacked pair of Hall sensors 42 disposed in a middle thereof.
  • Amplifiers 43 and Hall electrodes 44 are incorporated as would be appreciated by those having ordinary skill in the art.
  • Magnetic planar support 50 has a magnetic plate 51 affixed to a bottom exterior of a carrier 52, of which nine (9) magnets 51 are shown. Atop carrier 52 is a mirror block 53 and a clamp 54. Magnetic lift support 60 is integrated with magnetic planar support 50 via an insertion of lift pins 61, of which three (3) are shown, within lifting channels of magnetic planar support 50 vertically extending through carrier 52, mirror block 53 and clamp 54, and accessible via magnetic plate 51.
  • a pin-magnet 62 is affixed by any means to a bottom edge of a lift pin 61 with each lift pin 61 being biased vertically downward in a Z- direction via a spring 64. Furthermore, each lift pin 61 has a guide 63 to facilitate vertical movement of the lift pin 61 within carrier 52.
  • each lift pin 61 is utilized to support an object 70 (e.g., a wafer) and is controlled by coils 41 and Hall sensors 42 between a biased position and an actuated position.
  • the biased position of magnetic lift support 60 involves object 70 being disposed upon clamp 54 (not shown) as a function of springs 64 forcing lift pins 61 vertically downward in the Z direction.
  • the actuated position of magnetic lift support 60 involves object 70 being disposed upon clamp 54 as shown in FIG.
  • the stacked Hall sensors 42 are sensitive in a direction of the pin- magnets 62 whereby a differential between an output signal of the top Hall sensor 42 and an output of the bottom Hall sensor 42 is insensitive to the respective coil 41 to thereby reflect an accurate position measurement of pin-magnets 62.
  • FIG. 6 illustrates a system 90 (e.g., a photolithography system) incorporating coil actuator 40, magnetic planar support 50 and magnetic lift support 60 as shown in FIG. 5 as a handling stage of an object 70 (e.g., a wafer stage).
  • System 90 further employs a current commutator 91 and an interferometer system 92 to selectively implement a contactless object planar movement method as represented by a flowchart 100 shown in FIG. 7 or a contactless object lifting movement method as represented by a flowchart 110 shown in FIG. 8.
  • flowchart 100 is executed to move object 70 parallel to the XY plane of the XYZ reference plane to any desired position therein.
  • a stage S 102 of flowchart 100 encompasses a determination by system 90 of a position of magnetic supports 50/60 relative to coil actuator 40.
  • interferometer system 52 is utilized to optically communicate with mirror block 53 (FIG. 5) to thereby measure the position of magnetic supports 50 and 60 relative to coil actuator 40 as would be appreciated by those having ordinary skill in the art.
  • a stage S 104 of flowchart 100 encompasses an application of a series commutation currents Ic i (FIG.
  • Hall sensors 42 are used to determine a position of magnets 51 (FIG. 5) relative to coil actuator 40 to thereby apply coil currents Ic i to coils 41 (FIG. 5) magnetically interacting with magnets 51 in a manner that concurrently moves magnetic supports 50 and 60 in a desired direction parallel to the XY plane of the XYZ reference frame.
  • any additional Lorentz forces generated by an interaction of actuated coils 41 and pin-magnets 62 (FIG. 5) are not sufficiently strong to overcome the biased force of springs 64 (FIG. 5) as magnetic supports 50 and 60 are moved in the desired direction.
  • stages S 102 and S 104 are sequentially executed in a repetitive manner as needed until object 70 has been moved to a desired planar position.
  • flowchart 110 is executed to move object 70 between a lifted position (i.e., the actuated position of support 60 as previously described herein) and a clamped position (i.e., the biased position of support 60 as previously described herein).
  • a stage Sl 12 of flowchart 110 encompasses a determination by system 90 of a position of magnetic lift support 60 relative to coil actuator 40.
  • the stacked Hall sensors 42 (FIG. 5) are utilized to magnetically sense the pin-magnets 62 to thereby measure the position of magnetic lift support 60 relative to coil actuator 40.
  • stage Sl 14 of flowchart 110 encompasses an application of a series commutation currents Ic 2 (FIG. 6) by current commutator 91 to coil actuator 40 to exclusively move magnetic lift support 60 orthogonal to the XY plane of the XYZ reference frame.
  • commutation currents Ic 2 are applied to coils 41 (FIG. 5) magnetically interacting with pin-magnets 62 in a manner that overrides the biased strength of springs 64 (FIG. 5) to move magnetic lift support 60 in a desired direction orthogonal to the XY plane of the XYZ reference frame.
  • any additional Lorentz forces generated by a magnetic interaction between coils 41 and magnets 51 are neutralized in view of the fact the overall net force applied to magnetic planar support 50 is zero as a function of the spacing arrangement of pin-magnets 62 relative to magnets 51.
  • stages S 122 and S 124 are sequentially executed in a repetitive manner as needed until object 70 has been moved to either the clamped position or the lifted position as desired.
  • an inverted planar motor of the present invention can be utilized in numerous applications, such as, for example, in semiconductor manufacturing applications (e.g., ASML, LAK-Tencor, AMAT, NXP), sample/substrate positioning in reactive or aggressive applications, high acceleration/velocity applications, vacuum applications, production applications, medial applications (e.g., shutter blades in X-ray devices) and consumer electronic applications (e.g., CD/DVD/Blu-Ray drive systems).
  • semiconductor manufacturing applications e.g., ASML, LAK-Tencor, AMAT, NXP
  • sample/substrate positioning in reactive or aggressive applications
  • high acceleration/velocity applications high acceleration/velocity applications
  • vacuum applications e.g., vacuum applications
  • production applications e.g., production applications
  • medial applications e.g., shutter blades in X-ray devices
  • consumer electronic applications e.g., CD/DVD/Blu-Ray drive systems
  • An inverted planar motor comprising: an integration of a magnetic planar support (20) and a magnetic lift support (30); and a coil actuator (10) magnetically interactive with the magnetic planar support (20) and the magnetic lift support (30), wherein the coil actuator (10) concurrently moves the magnetic planar support (20) and the magnetic lift support (30) parallel to an XY plane of an XYZ reference frame associated with the coil actuator (10) based on a magnetic interaction between the coil actuator (10) and the magnetic planar support (20), and wherein the coil actuator (10) exclusively moves the magnetic lift support (30) orthogonal to the XY plane of the XYZ reference frame associated with the coil actuator (10) based on a magnetic interaction between the coil actuator (10) and the magnetic lift support (30).
  • the magnetic lift support (30) includes: at lease one lifting pin (61) movably inserted through the magnetic planar support (20); and at lease one pin-magnet (62), each pin-magnet (62) being affixed to an individual lifting pin (61).

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Abstract

An inverted planar motor employs an integration of a magnetic planar support (20) and a magnetic lift support (30), and a coil actuator (10) magnetically interactive with the magnetic planar support (20) and the magnetic lift support (30). In operation, coil actuator (10) concurrently moves the magnetic planar support (20) and the magnetic lift support (30) parallel to an XY plane of an XYZ reference frame associated with the coil actuator (10) based on a magnetic interaction between the coil actuator (10) and the magnetic planar support (20), and exclusively moves the magnetic lift support (30) orthogonal to the XY plane of the XYZ reference frame associated with the coil actuator (10) based on a magnetic interaction between the coil actuator (10) and the magnetic lift support (30).

Description

Contactless lifting of an object by an inverted planar motor
FIELD OF THE INVENTION
The present invention generally relates to an inverted planar motor of any type. The present invention specifically relates to providing a contactless lifting of an object by an inverted planar motor.
BACKGROUND OF THE INVENTION
FIG. 1 illustrates a generic inverted planar motor as known in the art employing a coil actuator 10 magnetically interactive with a magnetic planar support 20. In operation, commutation currents are selectively applied to coil actuator 10 to move magnetic planar support 20 parallel to an XY plane of an XYZ reference frame associated with coil actuator 10 based on a magnetic interaction between coil actuator 10 and magnetic planar support 20. Specifically, as known in the art, commutation currents can be selectively applied to coil actuator 10 whereby magnetic planar support 20 can be linearly displaced in the X- direction, linearly displaced in the Y-direction and/or rotated in the Rz-direction as shown by the respective bi-directional arrows. The inverted planar motor as shown has proven to be very useful in many applications, such as, for example, a wafer stage or a reticle stage of a photolithography system. Nonetheless, one limitation of the inverted planar motor of FIG. 1 is the inability to appreciably lift an object (e.g., a wafer) being supported by magnetic planar support 20 without an undue expenditure of power. To overcome this limitation, the present invention provides a magnetic lift support integrated with magnetic planar support 20 and likewise movable by coil actuator 10.
SUMMARY OF THE INVENTION
One form of the present invention is an inverted planar motor comprising a structure which integrates a magnetic planar support and a magnetic lift support, and a coil actuator magnetically interactive with the magnetic supports. In operation, based on a magnetic interaction between the coil actuator and the magnetic planar support, the coil actuator concurrently moves the magnetic supports parallel to an XY plane of an XYZ reference frame associated with the coil actuator (e.g., a linear displacement of the magnetic supports in a X-direction, a linear displacement of the magnetic supports in a Y-direction and/or a rotation of the magnetic supports in a Rz direction). Additionally, based on a magnetic interaction between the coil actuator and the magnetic lift support, the coil actuator exclusively moves the magnetic lift support orthogonal to the XY plane of the XYZ reference frame associated with the coil actuator (e.g., a linear displacement of the magnetic lift support in the Z-direction).
A second form of the present invention is a system comprising an object and the aforementioned inverted planar motor. The object is supported by the magnetic supports whereby the object can be moved parallel to the XY plane of the XYZ reference frame associated with the coil actuator as a function of the magnetic interaction between the coil actuator and the magnetic planar support, and whereby the object can be moved orthogonal to the XY plane of the XYZ reference frame as a function of the magnetic interaction between the coil actuator and the magnetic lift support.
A third form of the present invention is a method of operating an inverted planar motor including a method of integrating a magnetic planar support and a magnetic lift support, and a coil actuator magnetically interactive with the magnetic supports. The method comprises magnetically interacting the coil actuator and the magnetic planar support wherein the coil actuator concurrently moves the magnetic supports parallel to an XY plane of an XYZ reference frame associated with the coil actuator, and magnetically interacting the coil actuator and the magnetic lift support wherein the coil actuator exclusively moves the magnetic lift support orthogonal to the XY plane of the XYZ reference frame associated with the coil actuator.
The foregoing forms and other forms of the present invention as well as various features and advantages of the present invention will become further apparent from the following detailed description of various embodiments of the present invention read in conjunction with the accompanying drawings. The detailed description and drawings are merely illustrative of the present invention rather than limiting, the scope of the present invention being defined by the appended claims and equivalents thereof.
BRIEF DESCRIPTION OF THE EMBODIMENTS
FIG. 1 illustrates a perspective top view of a block diagram of a generic inverted planar motor as known in the art.
FIG. 2 illustrates a perspective top view of a block diagram of a generic embodiment of an inverted planar motor in accordance with the present invention. FIG. 3 illustrates a perspective top view of a schematic diagram of an exemplary embodiment of a coil actuator and a magnetic planar support in accordance with the present invention;
FIG. 4 illustrates a perspective bottom view of a schematic diagram of the magnetic planar support shown in FIG. 3.
FIG. 5 illustrates a side view of an exemplary embodiment of a schematic diagram of an inverted planar motor in accordance with the present invention.
FIG. 6 illustrates a block diagram of a system employing an inverted planar motor in accordance with the present invention. FIG. 7 illustrates a flowchart representative of a contactless object planar movement method as known in the art.
FIG. 8 illustrates a flowchart representative of a contactless object lifting movement method in accordance with the present invention.
DETAILED DESCRIPTION OF THE EMBODIMENTS
Referring to FIG. 2, a generic inverted planar motor of the present invention employing coil actuator 10 and magnetic planar support 20 as previously described herein in connection with FIG. 1, and a magnetic lift support 30 integrated with magnetic planar support 20 is shown. For purposes of the present invention, "coil actuator" is broadly defined herein as any device structurally configured with coils responsive to commutation currents for generating an actuating magnetic field as known in the art, and "magnetic planar support" and "magnetic lift support" are broadly defined herein as any device structurally configured with magnets positioned relative to the coils of the coil actuator to magnetically interact with a generated actuating magnetic field of the coil actuator as known in the art. Furthermore, in accordance with the present invention, "an integration of a magnetic planar support and a magnetic lift support" is broadly defined as any type of combining, unifying, etc. of the magnetic supports as a single entity in a manner that facilitates a concurrent planar movement of both magnetic supports based on a magnetic interaction of the coil actuator and the magnetic planar support, and that additionally facilitates an exclusive lifting movement of the magnetic lift support based on a magnetic interaction between the coil actuator and the magnetic lift support.
Still referring to FIG. 2, in operation, commutation currents can be selectively applied to coil actuator 10 as known in the art to concurrently move magnetic planar support 20 and magnetic lift support 30 parallel to the XY plane of the XYZ reference frame associated with coil actuator 10. Specifically, in view of a designed integration of magnetic supports 20 and 30 in accordance with the present invention, the commutation currents can be selectively applied to coil actuator 10 whereby magnetic planar support 20 and magnetic lift support 30 are concurrently linearly displaced in the X-direction, linearly displaced in the Y-direction and/or rotated in the Rz-direction as shown by the respective bi-directional arrows. More particularly, those having ordinary skill in the art will also appreciate that the concurrent planar movement of magnetic supports 20 and 30 parallel to the XY plane of the XYZ reference frame encompasses the commutation currents being applied to a predetermined sequence/grouping of coils of coil actuator 10 that generates Lorentz forces based on a magnetic interaction between the coils of coil actuator 10 and the magnets of magnetic planar support 20 to concurrently move magnetic supports 20 and 30 in X- direction, Y-direction and/or Rz direction parallel to the XY plane of the XYZ reference frame. These commutation currents may also generate additional Lorentz forces based on a magnetic interaction between the coils of coil actuator 10 and the magnets of magnetic lift support 30. In this case, the integration of magnetic supports 20 and 30 can be designed in accordance with the present invention to neutralize any magnetic interaction between the coils of coil actuator 10 and the magnets of magnetic lift support 30 as will be further explained herein.
Still referring to FIG. 2, the commutation currents can be selectively applied to coil actuator 10 as known in the art to exclusively move magnetic lift support 30 orthogonal to the XY plane of the XYZ reference frame associated with coil actuator 10. Specifically, again in view of the designed integration of the magnetic supports 20 and 30 in accordance with the present invention, these commutation currents can be selectively applied to coil actuator 10 whereby magnetic lift support 30 is exclusively linearly displaced in the Z- direction as shown by the respective bi-directional arrow. More particularly, those having ordinary skill in the art will further appreciate that the exclusive lifting movement of magnetic lift support 30 orthogonal to the XY plane of the XYZ reference frame encompasses the commutation currents being applied to a predetermined sequence/grouping of coils of coil actuator 10 that generates Lorentz forces based on a magnetic interaction between the coils of coil actuator 10 and the magnets of magnetic lift support 30 to exclusively magnetic lift support 30 in the Z-direction orthogonal to the XY plane of the XYZ reference frame. These commutation currents may also generate additional Lorentz forces based on a magnetic interaction between the coils of coil actuator 10 and the magnets of magnetic planar support 20. In this case, the integration of magnetic supports 20 and 30 can be designed in accordance with the present invention to neutralize any magnetic interaction between the coils of coil actuator 10 and the magnets of magnetic planar support 20 as will be further explained herein.
In practice, as would be appreciated by those having ordinary skill in the art, a designed waveform peak-to-peak amplitude, shape and frequency of the commutation currents is dependent upon numerous designed physical parameters of the motor, such as, for example, a number of turns of each coil of coil actuator 10 and the magnetic flux strength of each magnet of magnetic supports 20 and 30.
Also in practice, as would as would be appreciated by those having ordinary skill in the art, bearings of any type (e.g., air) can be used to constrain any rotation of magnetic supports 20 and 30 in a Rx direction and a Ry direction of the XYZ reference frame, and/or any linear displacement of magnetic planar support 20 in the Z direction of the XYZ reference frame. Concurrently or alternatively, Halbach magnets can be employed by magnetic lift support 30 to provide a bearing function between coil actuator 10 and magnetic planar support 20.
Referring to FIG. 3, an example of coil actuator 10 (FIG. 2) is a coil actuator 11 that employs a stationary coil block 12 with a coil array 13 affixed by any suitable means to a top exterior of coil block 12 as shown. Coil block 12 can also house various components (not shown) for applying commutation currents to coil array 13, such as, for example, amplifiers and magnetic sensors (e.g., Hall sensors), and cooling channels 14 for providing cooling fluids to such components. Also, an example of magnetic planar support 20 (FIG. 2) is a magnetic planar support 21 that employs a pairing of a magnetically impermeable mirror block 22 and a magnetically permeable carrier 23 with a magnetic array 24 affixed by any means to a bottom exterior of carrier 23 as best shown in FIG. 4. To support an integration of magnetic planar support 21 with a magnetic lift support (not shown), mirror block 22 and carrier 23 are designed with numerous lift channels 25 extending from a top exterior of mirror block 22 to the bottom exterior of carrier 23, and magnetic array 24 is designed with a spacing between the magnets to expose lift channels 25. In this case, components of the magnetic lift support (not shown) can be movable inserted through the lift channels 25 to integrate the magnetic lift support with magnetic planar support 21.
To further facilitate an understanding of FIGS. 3 and 4, FIG. 5 illustrates an inverted planar motor employing a coil actuator 40, a magnetic planar support 50 and a magnetic lift support 60. A coil block (not shown) of coil actuator 40 is embedded within a table 80 to thereby remain stationary in operation. Coil actuator 40 has a coil array 41, of which nine (9) coils are shown, each coil having one or more Hall sensors 42 disposed in a middle of the coil. Specifically, for this embodiment, coils 41(1), 41(2), 41(4), 41(6), 41(8) and 41(9) have a single Hall sensor 42 disposed in a middle thereof while coils 41(3), 41(5) and 41(7) have a stacked pair of Hall sensors 42 disposed in a middle thereof. Amplifiers 43 and Hall electrodes 44 are incorporated as would be appreciated by those having ordinary skill in the art.
Magnetic planar support 50 has a magnetic plate 51 affixed to a bottom exterior of a carrier 52, of which nine (9) magnets 51 are shown. Atop carrier 52 is a mirror block 53 and a clamp 54. Magnetic lift support 60 is integrated with magnetic planar support 50 via an insertion of lift pins 61, of which three (3) are shown, within lifting channels of magnetic planar support 50 vertically extending through carrier 52, mirror block 53 and clamp 54, and accessible via magnetic plate 51. A pin-magnet 62 is affixed by any means to a bottom edge of a lift pin 61 with each lift pin 61 being biased vertically downward in a Z- direction via a spring 64. Furthermore, each lift pin 61 has a guide 63 to facilitate vertical movement of the lift pin 61 within carrier 52.
A top edge of each lift pin 61 is utilized to support an object 70 (e.g., a wafer) and is controlled by coils 41 and Hall sensors 42 between a biased position and an actuated position. The biased position of magnetic lift support 60 involves object 70 being disposed upon clamp 54 (not shown) as a function of springs 64 forcing lift pins 61 vertically downward in the Z direction. The actuated position of magnetic lift support 60 involves object 70 being disposed upon clamp 54 as shown in FIG. 5 as a function of a magnetic interaction between adjacent coils of coil array 41 (e.g., coils 41(3), 41(5) and 41(7) as shown) with pin-magnets 62 (e.g., pin-magnets 62(l)-62(3) as shown) that is sufficiently strong to overcome the biased force of springs 64 (e.g., springs 64(l)-64(3) as shown). The purpose of stacking a pair of Hall sensors 42 in the middle of coils 41(3), coils 41(5) and coils 41(7) is to facilitate a measurement of a position of pin-magnets 62(1), 62(2) and 62(3), respectively. Specifically, the stacked Hall sensors 42 are sensitive in a direction of the pin- magnets 62 whereby a differential between an output signal of the top Hall sensor 42 and an output of the bottom Hall sensor 42 is insensitive to the respective coil 41 to thereby reflect an accurate position measurement of pin-magnets 62.
FIG. 6 illustrates a system 90 (e.g., a photolithography system) incorporating coil actuator 40, magnetic planar support 50 and magnetic lift support 60 as shown in FIG. 5 as a handling stage of an object 70 (e.g., a wafer stage). System 90 further employs a current commutator 91 and an interferometer system 92 to selectively implement a contactless object planar movement method as represented by a flowchart 100 shown in FIG. 7 or a contactless object lifting movement method as represented by a flowchart 110 shown in FIG. 8.
Referring to FIG. 7, flowchart 100 is executed to move object 70 parallel to the XY plane of the XYZ reference plane to any desired position therein. Specifically, a stage S 102 of flowchart 100 encompasses a determination by system 90 of a position of magnetic supports 50/60 relative to coil actuator 40. In this stage, interferometer system 52 is utilized to optically communicate with mirror block 53 (FIG. 5) to thereby measure the position of magnetic supports 50 and 60 relative to coil actuator 40 as would be appreciated by those having ordinary skill in the art. Thereafter, a stage S 104 of flowchart 100 encompasses an application of a series commutation currents Ic i (FIG. 6) by current commutator 91 to coil actuator 40 to concurrently move magnetic supports 50 and 60 parallel to the XY plane of the XYZ reference frame. Specifically, as known in the art, Hall sensors 42 (FIG. 5) are used to determine a position of magnets 51 (FIG. 5) relative to coil actuator 40 to thereby apply coil currents Ic i to coils 41 (FIG. 5) magnetically interacting with magnets 51 in a manner that concurrently moves magnetic supports 50 and 60 in a desired direction parallel to the XY plane of the XYZ reference frame. Again, any additional Lorentz forces generated by an interaction of actuated coils 41 and pin-magnets 62 (FIG. 5) are not sufficiently strong to overcome the biased force of springs 64 (FIG. 5) as magnetic supports 50 and 60 are moved in the desired direction.
In practice, after the initial execution of the stages, stages S 102 and S 104 are sequentially executed in a repetitive manner as needed until object 70 has been moved to a desired planar position.
Referring to FIG. 8, flowchart 110 is executed to move object 70 between a lifted position (i.e., the actuated position of support 60 as previously described herein) and a clamped position (i.e., the biased position of support 60 as previously described herein). Specifically, a stage Sl 12 of flowchart 110 encompasses a determination by system 90 of a position of magnetic lift support 60 relative to coil actuator 40. In this stage, the stacked Hall sensors 42 (FIG. 5) are utilized to magnetically sense the pin-magnets 62 to thereby measure the position of magnetic lift support 60 relative to coil actuator 40.
Thereafter, stage Sl 14 of flowchart 110 encompasses an application of a series commutation currents Ic2 (FIG. 6) by current commutator 91 to coil actuator 40 to exclusively move magnetic lift support 60 orthogonal to the XY plane of the XYZ reference frame. As previously described herein, commutation currents Ic2 are applied to coils 41 (FIG. 5) magnetically interacting with pin-magnets 62 in a manner that overrides the biased strength of springs 64 (FIG. 5) to move magnetic lift support 60 in a desired direction orthogonal to the XY plane of the XYZ reference frame. In this case, when moving object 70 between the clamp position and the lifted position, any additional Lorentz forces generated by a magnetic interaction between coils 41 and magnets 51 (FIG. 5) are neutralized in view of the fact the overall net force applied to magnetic planar support 50 is zero as a function of the spacing arrangement of pin-magnets 62 relative to magnets 51.
In practice, after the initial execution, stages S 122 and S 124 are sequentially executed in a repetitive manner as needed until object 70 has been moved to either the clamped position or the lifted position as desired.
Referring to FIG. 2-8, those having ordinary skill in the art will appreciate an inverted planar motor of the present invention can be utilized in numerous applications, such as, for example, in semiconductor manufacturing applications (e.g., ASML, LAK-Tencor, AMAT, NXP), sample/substrate positioning in reactive or aggressive applications, high acceleration/velocity applications, vacuum applications, production applications, medial applications (e.g., shutter blades in X-ray devices) and consumer electronic applications (e.g., CD/DVD/Blu-Ray drive systems).
Additionally, in practice, the actual structural configuration and relative dimensioning of each component of an inverted planar motor of the present invention is dependent upon the specifics of an explicit application of the motor. Thus, the present invention does not contemplate any particular type of best structural configuration and relative dimensioning of each component of an inverted planar motor of the present invention among the numerous potential applications.
While the embodiments of the invention disclosed herein are presently considered to be preferred, various changes and modifications can be made without departing from the spirit and scope of the invention. The scope of the invention is indicated in the appended claims, and all changes that come within the meaning and range of equivalents are intended to be embraced therein. CLAIMS:
1. An inverted planar motor, comprising: an integration of a magnetic planar support (20) and a magnetic lift support (30); and a coil actuator (10) magnetically interactive with the magnetic planar support (20) and the magnetic lift support (30), wherein the coil actuator (10) concurrently moves the magnetic planar support (20) and the magnetic lift support (30) parallel to an XY plane of an XYZ reference frame associated with the coil actuator (10) based on a magnetic interaction between the coil actuator (10) and the magnetic planar support (20), and wherein the coil actuator (10) exclusively moves the magnetic lift support (30) orthogonal to the XY plane of the XYZ reference frame associated with the coil actuator (10) based on a magnetic interaction between the coil actuator (10) and the magnetic lift support (30).
2. The inverted planar motor of claim 1, wherein an application of commutation currents to the coil actuator (10) moves the magnetic lift support (30) between a biased position and an actuated position, and neutralizes any movement of the magnetic planar support (20) orthogonal to the XY plane of the XYZ reference frame associated with the coil actuator (10).
3. The inverted planar motor of claim 1, wherein the magnetic lift support (30) includes: at lease one lifting pin (61) movably inserted through the magnetic planar support (20); and at lease one pin-magnet (62), each pin-magnet (62) being affixed to an individual lifting pin (61).
4. The inverted planar motor of claim 3, wherein an application of commutation currents to coil actuator (10) generates a magnetic interaction between the coil actuator (10)

Claims

and the at least one pin-magnet (62) for exclusively moving the magnetic lift support (30) orthogonal to the XY plane of the XYZ reference frame associated with the coil actuator (10).
5. The inverted planar motor of claim 3, wherein the coil actuator (10) includes: a stacked pair of magnetic sensors (42) for each pin-magnet (62) with each stacked pair of magnetic sensors (42) being operable to determine a position of a respective pin-magnet (62) relative to the coil actuator (10).
6. The inverted planar motor of claim 3, wherein the magnetic lift support (30) further includes: at lease one spring (64), each spring (64) applying a biasing force to a respective lifting pin (61) orthogonal to the XY plane of the XYZ reference frame associated with the coil actuator (10).
7. A system, comprising: an inverted planar motor including an integration of a magnetic planar support (20) and a magnetic lift support (30), and a coil actuator (10) magnetically interactive with the magnetic planar support (20) and the magnetic lift support (30), wherein the coil actuator (10) exclusively moves the magnetic planar support (20) and the magnetic lift support (30) parallel to an XY plane of an XYZ reference frame associated with the coil actuator (10) based on a magnetic interaction between the coil actuator (10) and the magnetic planar support (20), and wherein the coil actuator (10) exclusively moves the magnetic lift support (30) orthogonal to the XY plane of the XYZ reference frame associated with the coil actuator (10) based on a magnetic interaction between the coil actuator (10) and the magnetic lift support (30); and an object (70) supportable by the integration of the magnetic planar support
(20) and the magnetic lift support (30).
8. The system of claim 7, wherein an application of commutation currents to the coil actuator (10) moves the magnetic lift support (30) between a biased position and an actuated position and neutralizes any movement of the magnetic planar support (20) orthogonal to the XY plane of the XYZ reference frame associated with the coil actuator (10).
9. The system of claim 7, wherein the magnetic lift support (30) includes: at lease one lifting pin (61) movably inserted through the magnetic planar support (20); and at lease one pin-magnet (62), each pin-magnet (62) being affixed to an individual lifting pin (61).
10. The system of claim 9, wherein an application of commutation currents to coil actuator (10) generates a magnetic interaction between the coil actuator (10) and the at least one pin-magnet (62) for exclusively moving the magnetic lift support (30) orthogonal to the XY plane of the XYZ reference frame associated with the coil actuator (10).
11. The system of claim 9, wherein the coil actuator (10) includes: a stacked pair of magnetic sensors (42) for each pin-magnet (62) with each stacked pair of magnetic sensors (42) being operable to determine a position of a respective pin-magnet (62) relative to the coil actuator (10).
12. The system of claim 9, wherein the magnetic lift support (30) further includes: at lease one spring (64), each spring (64) applying a biasing force to a respective lifting pin (61) orthogonal to the XY plane of the XYZ reference frame associated with the coil actuator (10).
13. The system of claim 7, wherein: the system is a photolithography system (90); and the object (70) is a wafer.
14. A method of operating an inverted planar motor including an integration of a magnetic planar support (20) and a magnetic lift support (30), and a coil actuator (10) magnetically interactive with the magnetic planar support (20) and the magnetic lift support (30), the method comprising: magnetically interacting the coil actuator (10) and the magnetic planar support (20), wherein the coil actuator (10) concurrently moves the magnetic planar support (20) and the magnetic lift support (30) parallel to an XY plane of an XYZ reference frame associated with the coil actuator (10); and magnetically interacting the coil actuator (10) and the magnetic lift support (30), wherein the coil actuator (10) exclusively moves the magnetic lift support (30) orthogonal to the XY plane of the XYZ reference frame associated with the coil actuator (10).
15. The method of claim 14, wherein the magnetic lift support (30) is movable between a biases position and an actuated position.
PCT/IB2008/055484 2007-12-28 2008-12-22 Contactless lifting of an object by an inverted planar motor WO2009083889A1 (en)

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