WO2009069232A1 - 磁気記録ヘッドの製造方法および磁気記録ヘッドの主磁極の製造方法 - Google Patents

磁気記録ヘッドの製造方法および磁気記録ヘッドの主磁極の製造方法 Download PDF

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Publication number
WO2009069232A1
WO2009069232A1 PCT/JP2007/073225 JP2007073225W WO2009069232A1 WO 2009069232 A1 WO2009069232 A1 WO 2009069232A1 JP 2007073225 W JP2007073225 W JP 2007073225W WO 2009069232 A1 WO2009069232 A1 WO 2009069232A1
Authority
WO
WIPO (PCT)
Prior art keywords
magnetic
manufacturing
magnetic pole
insulating layer
recording head
Prior art date
Application number
PCT/JP2007/073225
Other languages
English (en)
French (fr)
Inventor
Mutsuo Yoshinami
Original Assignee
Fujitsu Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Limited filed Critical Fujitsu Limited
Priority to PCT/JP2007/073225 priority Critical patent/WO2009069232A1/ja
Publication of WO2009069232A1 publication Critical patent/WO2009069232A1/ja

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G11B5/313—Disposition of layers
    • G11B5/3143—Disposition of layers including additional layers for improving the electromagnetic transducing properties of the basic structure, e.g. for flux coupling, guiding or shielding
    • G11B5/3146—Disposition of layers including additional layers for improving the electromagnetic transducing properties of the basic structure, e.g. for flux coupling, guiding or shielding magnetic layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/10—Structure or manufacture of housings or shields for heads
    • G11B5/11—Shielding of head against electric or magnetic fields
    • G11B5/112—Manufacture of shielding device
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/1278—Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G11B5/3116—Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G11B5/313—Disposition of layers
    • G11B5/3143—Disposition of layers including additional layers for improving the electromagnetic transducing properties of the basic structure, e.g. for flux coupling, guiding or shielding
    • G11B5/3146—Disposition of layers including additional layers for improving the electromagnetic transducing properties of the basic structure, e.g. for flux coupling, guiding or shielding magnetic layers
    • G11B5/315—Shield layers on both sides of the main pole, e.g. in perpendicular magnetic heads
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers

Abstract

　磁極の側方に配置するサイドシールドの磁極に対する高さ位置を任意に設定可能として、サイドシールドによる作用を最適化した磁気記録ヘッドを提供可能とする。 　ワークの表面に、第１の非磁性絶縁層３０と、サイドシールドを形成する第１の磁性層３２と、第２の非磁性絶縁層３４とを順次積層する第１の成膜工程と、前記第２の非磁性絶縁層３４上に、前記主磁極となる部位を露出させたマスク３６を形成するマスク形成工程と、前記マスク３６により被覆した状態で、前記第１の磁性層３２の厚さ方向の中途位置、または前記第１の非磁性絶縁層３０の厚さ方向の中途位置までエッチングして溝３８を形成するエッチング工程と、前記第２の非磁性絶縁層３４上および前記溝３８上に、第１の非磁性層と主磁極を形成する第２の磁性層とを順次積層する第２の成膜工程とを備える。
PCT/JP2007/073225 2007-11-30 2007-11-30 磁気記録ヘッドの製造方法および磁気記録ヘッドの主磁極の製造方法 WO2009069232A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/073225 WO2009069232A1 (ja) 2007-11-30 2007-11-30 磁気記録ヘッドの製造方法および磁気記録ヘッドの主磁極の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/073225 WO2009069232A1 (ja) 2007-11-30 2007-11-30 磁気記録ヘッドの製造方法および磁気記録ヘッドの主磁極の製造方法

Publications (1)

Publication Number Publication Date
WO2009069232A1 true WO2009069232A1 (ja) 2009-06-04

Family

ID=40678148

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/073225 WO2009069232A1 (ja) 2007-11-30 2007-11-30 磁気記録ヘッドの製造方法および磁気記録ヘッドの主磁極の製造方法

Country Status (1)

Country Link
WO (1) WO2009069232A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8189293B1 (en) 2011-04-28 2012-05-29 Hitachi Global Storage Technologies Netherlands B.V. Perpendicular magnetic recording head having a grooved wrap around shield and method for manufacturing the same

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003016609A (ja) * 2001-06-29 2003-01-17 Hitachi Ltd 磁気ヘッド及び磁気ディスク装置
JP2006018985A (ja) * 2004-07-01 2006-01-19 Headway Technologies Inc 垂直磁気記録用磁気ヘッドおよびその製造方法
JP2006252753A (ja) * 2005-03-07 2006-09-21 Headway Technologies Inc 垂直磁気記録用磁気ヘッドおよびその製造方法
JP2007207419A (ja) * 2006-02-02 2007-08-16 Headway Technologies Inc 垂直磁気記録ヘッドおよびその製造方法
JP2007294059A (ja) * 2006-04-27 2007-11-08 Hitachi Global Storage Technologies Netherlands Bv 垂直記録磁気ヘッド

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003016609A (ja) * 2001-06-29 2003-01-17 Hitachi Ltd 磁気ヘッド及び磁気ディスク装置
JP2006018985A (ja) * 2004-07-01 2006-01-19 Headway Technologies Inc 垂直磁気記録用磁気ヘッドおよびその製造方法
JP2006252753A (ja) * 2005-03-07 2006-09-21 Headway Technologies Inc 垂直磁気記録用磁気ヘッドおよびその製造方法
JP2007207419A (ja) * 2006-02-02 2007-08-16 Headway Technologies Inc 垂直磁気記録ヘッドおよびその製造方法
JP2007294059A (ja) * 2006-04-27 2007-11-08 Hitachi Global Storage Technologies Netherlands Bv 垂直記録磁気ヘッド

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8189293B1 (en) 2011-04-28 2012-05-29 Hitachi Global Storage Technologies Netherlands B.V. Perpendicular magnetic recording head having a grooved wrap around shield and method for manufacturing the same

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