WO2009040986A1 - プローブ針素材とそれを用いたプローブ針およびプローブカード、ならびに検査方法 - Google Patents

プローブ針素材とそれを用いたプローブ針およびプローブカード、ならびに検査方法 Download PDF

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Publication number
WO2009040986A1
WO2009040986A1 PCT/JP2008/002365 JP2008002365W WO2009040986A1 WO 2009040986 A1 WO2009040986 A1 WO 2009040986A1 JP 2008002365 W JP2008002365 W JP 2008002365W WO 2009040986 A1 WO2009040986 A1 WO 2009040986A1
Authority
WO
WIPO (PCT)
Prior art keywords
probe needle
boride
carbide
probe
needle material
Prior art date
Application number
PCT/JP2008/002365
Other languages
English (en)
French (fr)
Inventor
Takayuki Wajata
Original Assignee
Kabushiki Kaisha Toshiba
Toshiba Materials Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kabushiki Kaisha Toshiba, Toshiba Materials Co., Ltd. filed Critical Kabushiki Kaisha Toshiba
Priority to US12/680,124 priority Critical patent/US8324918B2/en
Priority to JP2009534157A priority patent/JP5364581B2/ja
Publication of WO2009040986A1 publication Critical patent/WO2009040986A1/ja

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G01R1/06738—Geometry aspects related to tip portion
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C32/00—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ
    • C22C32/0047—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ with carbides, nitrides, borides or silicides as the main non-metallic constituents
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Geometry (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Powder Metallurgy (AREA)

Abstract

　検査対象物の電気的特性を検査するために、前記検査対象物に接触させて用いられるプローブ針の製造に用いられるプローブ針素材であって、ほう化チタン、ほう化ジルコニウム、ほう化ハフニウム、ほう化ニオブ、ほう化タンタル、ほう化クロム、炭化チタン、炭化ジルコニウム、炭化ハフニウム、炭化バナジウム、炭化ニオブ、炭化タンタル、酸化ジルコニウム、酸化ハフニウム、および酸化クロムから選ばれる少なくとも１種の化合物を０．１体積％以上３．５体積％以下含有し、残部が主としてタングステンからなるタングステン合金からなるもの。
PCT/JP2008/002365 2007-09-27 2008-08-29 プローブ針素材とそれを用いたプローブ針およびプローブカード、ならびに検査方法 WO2009040986A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US12/680,124 US8324918B2 (en) 2007-09-27 2008-08-29 Probe needle material, probe needle and probe card each using the same, and inspection process
JP2009534157A JP5364581B2 (ja) 2007-09-27 2008-08-29 プローブ針素材とそれを用いたプローブ針およびプローブカード、ならびに検査方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007251670 2007-09-27
JP2007-251670 2007-09-27

Publications (1)

Publication Number Publication Date
WO2009040986A1 true WO2009040986A1 (ja) 2009-04-02

Family

ID=40510897

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/002365 WO2009040986A1 (ja) 2007-09-27 2008-08-29 プローブ針素材とそれを用いたプローブ針およびプローブカード、ならびに検査方法

Country Status (3)

Country Link
US (1) US8324918B2 (ja)
JP (1) JP5364581B2 (ja)
WO (1) WO2009040986A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016085133A (ja) * 2014-10-27 2016-05-19 富士通セミコンダクター株式会社 プローブ針、プローブカード、プローブ針の製造方法及びプローブ針の再生方法
CN105695838A (zh) * 2016-02-17 2016-06-22 张霞 一种耐腐蚀手术刀刀柄及其制备方法
CN110373589A (zh) * 2019-07-08 2019-10-25 中国科学院物理研究所 W-Cr合金和包含W-Cr合金的纯自旋流器件

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2796576B1 (en) * 2011-12-20 2021-10-06 Kabushiki Kaisha Toshiba Tungsten alloy sintered body, tungsten alloy part, discharge lamp, transmitting tube, and magnetron
JP5868239B2 (ja) * 2012-03-27 2016-02-24 株式会社日本マイクロニクス プローブ及びプローブカード
CN106783459B (zh) * 2012-05-29 2019-02-26 株式会社东芝 钨合金部件、以及使用该钨合金部件的放电灯、发射管和磁控管
EP2871666B1 (en) * 2012-07-03 2022-09-07 Kabushiki Kaisha Toshiba Tungsten alloy part, and discharge lamp using the same
US9766269B2 (en) * 2012-12-29 2017-09-19 Power Probe TEK, LLC Conductive test probe
CN106086506A (zh) * 2016-05-18 2016-11-09 来安县赛华管业有限公司 一种具有抑菌功效的饮用水管
US10705121B2 (en) * 2018-02-06 2020-07-07 Globalfoundries Inc. Probe card continuity testing and cleaning fixture comprising highly purified tungsten
EP3680102A1 (de) 2019-01-11 2020-07-15 Heraeus Deutschland GmbH & Co KG Geschichtete ag/refraktärmetall-folie und verfahren zu deren herstellung
EP3680101B1 (de) 2019-01-11 2022-03-02 Heraeus Deutschland GmbH & Co. KG Geschichtete cu/refraktärmetall-folie und verfahren zu deren herstellung
EP3862759B1 (de) 2020-02-04 2022-05-11 Heraeus Deutschland GmbH & Co. KG Manteldraht und verfahren zur herstellung von manteldrähten
EP3878986A1 (de) 2020-03-12 2021-09-15 Heraeus Deutschland GmbH & Co KG Draht und band mit bornitrid-nanoröhren für elektrische kontaktierungen
EP3960890A1 (de) 2020-09-01 2022-03-02 Heraeus Deutschland GmbH & Co. KG Palladium-kupfer-silber-ruthenium-legierung

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002005958A (ja) * 2000-06-26 2002-01-09 Tokyo Cathode Laboratory Co Ltd プローブカード用測定針、プローブカード及び測定針形成方法
JP2002356732A (ja) * 2001-05-29 2002-12-13 Toshiba Corp レニウムタングステン線、プローブピンおよびそれを具備する検査装置
JP2003023050A (ja) * 2001-07-06 2003-01-24 Mitsubishi Electric Corp ウエハプローバー及び半導体装置のテスト方法
JP2005106690A (ja) * 2003-09-30 2005-04-21 National Institute For Materials Science 電気特性測定用接合型プローブとその製造方法
JP2006102775A (ja) * 2004-10-05 2006-04-20 Nippon Tungsten Co Ltd スポット溶接用電極

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0511062U (ja) * 1991-07-23 1993-02-12 セイコー電子部品株式会社 プローブ針
US5867032A (en) * 1995-11-30 1999-02-02 Motorola, Inc. Process for testing a semiconductor device
JP2000119837A (ja) * 1998-10-19 2000-04-25 Toshiba Corp 高強度タングステン系ピン

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002005958A (ja) * 2000-06-26 2002-01-09 Tokyo Cathode Laboratory Co Ltd プローブカード用測定針、プローブカード及び測定針形成方法
JP2002356732A (ja) * 2001-05-29 2002-12-13 Toshiba Corp レニウムタングステン線、プローブピンおよびそれを具備する検査装置
JP2003023050A (ja) * 2001-07-06 2003-01-24 Mitsubishi Electric Corp ウエハプローバー及び半導体装置のテスト方法
JP2005106690A (ja) * 2003-09-30 2005-04-21 National Institute For Materials Science 電気特性測定用接合型プローブとその製造方法
JP2006102775A (ja) * 2004-10-05 2006-04-20 Nippon Tungsten Co Ltd スポット溶接用電極

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016085133A (ja) * 2014-10-27 2016-05-19 富士通セミコンダクター株式会社 プローブ針、プローブカード、プローブ針の製造方法及びプローブ針の再生方法
CN105695838A (zh) * 2016-02-17 2016-06-22 张霞 一种耐腐蚀手术刀刀柄及其制备方法
CN110373589A (zh) * 2019-07-08 2019-10-25 中国科学院物理研究所 W-Cr合金和包含W-Cr合金的纯自旋流器件
CN110373589B (zh) * 2019-07-08 2021-06-15 中国科学院物理研究所 W-Cr合金和包含W-Cr合金的纯自旋流器件

Also Published As

Publication number Publication date
US8324918B2 (en) 2012-12-04
JPWO2009040986A1 (ja) 2011-01-13
JP5364581B2 (ja) 2013-12-11
US20100194415A1 (en) 2010-08-05

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