WO2009022768A1 - Support de filtre - Google Patents

Support de filtre Download PDF

Info

Publication number
WO2009022768A1
WO2009022768A1 PCT/KR2007/006591 KR2007006591W WO2009022768A1 WO 2009022768 A1 WO2009022768 A1 WO 2009022768A1 KR 2007006591 W KR2007006591 W KR 2007006591W WO 2009022768 A1 WO2009022768 A1 WO 2009022768A1
Authority
WO
WIPO (PCT)
Prior art keywords
filter
groove
bracket
adaptor
pin
Prior art date
Application number
PCT/KR2007/006591
Other languages
English (en)
Inventor
Dong Jin Oh
Original Assignee
Mftech Co., Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mftech Co., Ltd filed Critical Mftech Co., Ltd
Publication of WO2009022768A1 publication Critical patent/WO2009022768A1/fr

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D35/00—Filtering devices having features not specifically covered by groups B01D24/00 - B01D33/00, or for applications not specifically covered by groups B01D24/00 - B01D33/00; Auxiliary devices for filtration; Filter housing constructions
    • B01D35/30—Filter housing constructions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D25/00—Filters formed by clamping together several filtering elements or parts of such elements
    • B01D25/12—Filter presses, i.e. of the plate or plate and frame type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2201/00—Details relating to filtering apparatus
    • B01D2201/40—Special measures for connecting different parts of the filter
    • B01D2201/4023—Means for connecting filter housings to supports

Definitions

  • the present invention relates to a filter bracket, and more particularly, to a filter bracket having an improved structure of a fluid purification filter used in a semiconductor process.
  • the present invention provides a filter bracket in which a filter can be easily attached and detached and which prevents a damage of an O-ring that is interposed between the filter and the adaptor.
  • the filter bracket according to the present invention the filter is attached and detached in a straight line sliding manner due to rotation of the handle so that a filter attaching and detaching work can be easily performed, a damage of an O-ring that is interposed between the filter and the adaptor caused by conventional rotation manner combination and sealing deterioration can be prevented.
  • FIG. 1 is a perspective view of a filter bracket according to an embodiment of the present invention, in which a filter is slid to the right and can be attached and detached;
  • FIG. 2 is a perspective view illustrating the state where a filter shown in FIG. 1 is slid to the left by rotation of a handle and is fixed;
  • FIG. 3 is a perspective view of a filter housing shown in FIG. 1;
  • FIG. 4 is a perspective view illustrating the state where a filter is seated on a filter housing shown in FIG. 3;
  • FIG. 5 is a front view illustrating a front side of a filter housing shown in FIG 3;
  • FIG. 6 is a perspective view of a guide shown in FIG. 1;
  • FIG. 7 is a perspective view of a handle shown in FIG. 1;
  • FIG. 8 is a perspective view of one side of an adaptor for combining a filter bracket according to the present invention with a conventional pump unit;
  • FIG. 9 is a perspective view of an opposite side of an adaptor shown in FIG. 8;
  • FIG. 10 is a front view of the adaptor shown in FIG. 9.
  • FIG. 11 is a side view of the adaptor shown in FIG. 8.
  • FIG. 1 is a perspective view of a filter bracket according to an embodiment of the present invention, in which a filter is slid to the right and can be attached and detached
  • FIG. 2 is a perspective view illustrating the state where a filter shown in FIG. 1 is slid to the left by rotation of a handle and is fixed
  • FIG. 3 is a perspective view of a filter housing shown in FIG. 1
  • FIG. 4 is a perspective view illustrating the state where a filter is seated on a filter housing shown in FIG. 3
  • FIG. 5 is a front view illustrating a front side of a filter housing shown in FIG 3
  • FIG. 6 is a perspective view of a guide shown in FIG. 1
  • FIG. 7 is a perspective view of a handle shown in FIG. 1.
  • a filter bracket 100 includes a filter 110 in which IN 111, OUT 112, and VENT 113 that constitute a fluid inlet/outlet 115 in which an O-ring is inserted protrude in a forward direction and in which a handle 116 is attached to an upper side of the filter 110, a hemispherical filter housing 120 on which the filter 110 is seated and in which each protrusion pin 121 is formed at both sides of an outer circumferential surface of the filter housing 120, a guide 130 in which each straight line-shaped slide groove 131 in which the protrusion pin 121 is perforated is formed in a lengthwise direction, and which includes a pair of arms 135 each having a rotating shaft 132 disposed outside of the arms 135 and a plate 138 in which the pair of arms 135 are fixed and a perforation groove 136 that contacts each fluid inlet/outlet 111, 112, 113 of the filter 110 is formed, and a " 1 ⁇
  • the fluid inlet/outlet 115 is disposed in a vertical direction and is formed in an annular shape, as shown in FIG. 4.
  • the present invention is not limited to this and may be replaced with well-known various shapes.
  • a protrusion 117 is provided at an opposite side of the fluid inlet/outlet 115 to be pressed and fixed in a groove 122 formed in one side of the filter housing 120.
  • At least one pressing protrusion 123 is formed inside of the filter housing 120 so that the filter 110 can be seated on an inside of the pressing protrusion 123 in a pressing manner.
  • the arms 135 of the guide 130 include a hemispherical protrusion portion 135a at upper and lower portions of the slide groove 131 so that the sliding state of the filter housing 120 can be selectively fixed.
  • the filter housing 120 includes a hanging pin 124 that protrudes from both sides of its outer circumferential surface and a recess 124a that is formed in the hanging pin 124 in a shape corresponding to the hemispherical protrusion portion 135a so that the hemispherical protrusion portion 135a can be selectively seated on the recess 124a.
  • the curve guide groove 142 of the handle 140 may have a maximum radius from the rotating shaft hole 141 so that its radius increases as it is closer to the right end from the left end of FIG. 1.
  • the filter bracket 100 having the above structure is combined with a well-known pump unit (not shown) when an adaptor 200 (see FIG. 8) and a plate 138 of the guide 130 are unified by pin (not shown) combination.
  • An engaging groove 210 is disposed in a vertical direction in one side 200a of the adaptor 200 which corresponds to the fluid inlet/outlet 115 of the filter 110, and a combination groove 220 in which a flow path 230 that will be described later is inserted and is combined with each port (not shown) of the pump unit is disposed in a horizontal direction in an opposite side 200b (see FIG. 9) of the adaptor 200.
  • the engaging groove 210 corresponding to IN 111 of the filter 110 directly communicates with an IN port combining groove 221 of the combining groove 220.
  • an OUT port combining groove 222 and a VENT port combining groove 223 of the engaging groove 210 and the combining groove 220 each corresponding to OUT 112 and VENT 113 of the filter 110 communicate with each other through a flow path 230, as shown in FIG. 10.
  • the flow path 230 may be inclined at about 5.31° and a bending portion formed on the rear end of the flow path 230 may be rounded (R), as shown in FIG. 11, so that fluids are not accumulated on front and rear ends of the flow path 230.
  • Unexplained reference numeral 205 denotes a pin hole.
  • the filter bracket 100 having the above structure according to the present invention operates as follows.
  • the protrusion pin 121 of the filter housing 120 perforates the slide groove 131 of the arms 135 and simultaneously is perforated and supported at the maximum radius of the curve guide groove 142 of the handle 140 and thus is spaced apart from the plate 138 of the guide 130 by a predetermined distance.
  • the combination state of the filter 110 and the adaptor 200 is firmly maintained in such a way that the hemispherical protrusion portion 135a of the arms 135 is hung in the recess 124a of the hanging pin 124 of the filter housing 120.

Abstract

L'invention concerne un support de filtre. Le support de filtre comprend : un filtre ; un boîtier de filtre hémisphérique ; un guide ; et une poignée en forme de '?'. Le filtre est fixé et détaché d'une manière coulissante en ligne droite du fait de la rotation de la poignée de sorte qu'un travail de fixation et de détachement de filtre peut être facilement effectué, la détérioration du joint torique, qui est interposé entre le filtre et l'adaptateur, provoquée par la combinaison habituelle de rotation et la détérioration de l'étanchéité peuvent être évitées.
PCT/KR2007/006591 2007-08-14 2007-12-17 Support de filtre WO2009022768A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020070081794A KR100788485B1 (ko) 2007-08-14 2007-08-14 필터 브라켓
KR10-2007-0081794 2007-08-14

Publications (1)

Publication Number Publication Date
WO2009022768A1 true WO2009022768A1 (fr) 2009-02-19

Family

ID=39147942

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2007/006591 WO2009022768A1 (fr) 2007-08-14 2007-12-17 Support de filtre

Country Status (3)

Country Link
KR (1) KR100788485B1 (fr)
TW (1) TW200915385A (fr)
WO (1) WO2009022768A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013052091A1 (fr) * 2011-10-03 2013-04-11 Entegris, Inc. Système de filtration modulaire
US9468872B2 (en) 2012-10-01 2016-10-18 Entegris, Inc. Purification system with manifold assembly and removable filter cassette

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101533888B1 (ko) * 2013-11-14 2015-07-03 도레이케미칼 주식회사 지지부를 갖는 필터 섬프 장착용 캐리지 및 이를 이용한 필터조립체

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0957014A (ja) * 1995-08-30 1997-03-04 Kurita Mach Mfg Co Ltd フィルタプレスの可動板
JP2004230305A (ja) * 2003-01-31 2004-08-19 Mitsuboshi Belting Ltd ストレーナ用の筒状スクリーン
US20070108117A1 (en) * 2005-08-31 2007-05-17 Wim Callaert Fluid filter

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR200211515Y1 (ko) 2000-08-23 2001-01-15 코아텍주식회사 유체 배관용 필터

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0957014A (ja) * 1995-08-30 1997-03-04 Kurita Mach Mfg Co Ltd フィルタプレスの可動板
JP2004230305A (ja) * 2003-01-31 2004-08-19 Mitsuboshi Belting Ltd ストレーナ用の筒状スクリーン
US20070108117A1 (en) * 2005-08-31 2007-05-17 Wim Callaert Fluid filter

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013052091A1 (fr) * 2011-10-03 2013-04-11 Entegris, Inc. Système de filtration modulaire
JP2014531316A (ja) * 2011-10-03 2014-11-27 インテグリス・インコーポレーテッド モジュール式濾過システム
US9943789B2 (en) 2011-10-03 2018-04-17 Entegris, Inc. Modular filter cassette
US9468872B2 (en) 2012-10-01 2016-10-18 Entegris, Inc. Purification system with manifold assembly and removable filter cassette
US9802142B2 (en) 2012-10-01 2017-10-31 Entegris, Inc. Purifier cassette

Also Published As

Publication number Publication date
KR100788485B1 (ko) 2007-12-24
TW200915385A (en) 2009-04-01

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