WO2009022538A1 - 光学式検査装置、ピンホール検査装置、膜厚検査装置、および表面検査装置 - Google Patents

光学式検査装置、ピンホール検査装置、膜厚検査装置、および表面検査装置 Download PDF

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Publication number
WO2009022538A1
WO2009022538A1 PCT/JP2008/063574 JP2008063574W WO2009022538A1 WO 2009022538 A1 WO2009022538 A1 WO 2009022538A1 JP 2008063574 W JP2008063574 W JP 2008063574W WO 2009022538 A1 WO2009022538 A1 WO 2009022538A1
Authority
WO
WIPO (PCT)
Prior art keywords
inspection apparatus
low
film thickness
pinhole
specimen
Prior art date
Application number
PCT/JP2008/063574
Other languages
English (en)
French (fr)
Inventor
Takashi Koike
Original Assignee
Hamamatsu Photonics K.K.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics K.K. filed Critical Hamamatsu Photonics K.K.
Publication of WO2009022538A1 publication Critical patent/WO2009022538A1/ja

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/894—Pinholes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/12—Circuits of general importance; Signal processing

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Textile Engineering (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)

Abstract

　光学式検査装置は、被検査物に光を照射し、該被検査物を通過、透過もしくは反射した被検出光Ｐ２をＰＭＴ３により検出することによって被検査物を検査する装置であって、ＰＭＴ３からの出力電流Ｉを電圧信号Ｖ１に変換するＩ／Ｖ変換回路１１と、電圧信号Ｖ１から所定周波数より小さい低周波成分を抽出するローパスフィルタ回路１３と、ローパスフィルタ回路１３を通過した信号とローパスフィルタ回路１３を通過していない信号との差を出力する演算器１４とを備える。
PCT/JP2008/063574 2007-08-10 2008-07-29 光学式検査装置、ピンホール検査装置、膜厚検査装置、および表面検査装置 WO2009022538A1 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-209546 2007-08-10
JP2007209546A JP5002367B2 (ja) 2007-08-10 2007-08-10 光学式検査装置、ピンホール検査装置、膜厚検査装置、および表面検査装置

Publications (1)

Publication Number Publication Date
WO2009022538A1 true WO2009022538A1 (ja) 2009-02-19

Family

ID=40350593

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/063574 WO2009022538A1 (ja) 2007-08-10 2008-07-29 光学式検査装置、ピンホール検査装置、膜厚検査装置、および表面検査装置

Country Status (2)

Country Link
JP (1) JP5002367B2 (ja)
WO (1) WO2009022538A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016117011A1 (ja) * 2015-01-19 2016-07-28 大和製罐株式会社 ライトテスタ
CN106044109A (zh) * 2016-07-18 2016-10-26 大连理工大学 输送带防撕裂监测系统

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20150036270A (ko) * 2012-07-02 2015-04-07 노바 메주어링 인스트루먼츠 엘티디. 삼-차원 구조물 내의 결함을 검출하기 위한 광학적 방법 및 시스템

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07146250A (ja) * 1993-11-25 1995-06-06 Sony Corp ピンホール検査装置
JPH08145898A (ja) * 1994-11-15 1996-06-07 Topcon Corp 異物検出装置
JP2002340523A (ja) * 2001-05-14 2002-11-27 Optorun Co Ltd 光学モニタ及び薄膜形成装置
JP2004529485A (ja) * 2000-10-06 2004-09-24 アプライド　マテリアルズ　インコーポレイテッド 自動処理検査と階層型基板試験を規定するための方法と装置
JP2007201521A (ja) * 2004-02-16 2007-08-09 Neuro Solution Corp 周波数成分分離フィルタ、方法およびプログラム

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07146250A (ja) * 1993-11-25 1995-06-06 Sony Corp ピンホール検査装置
JPH08145898A (ja) * 1994-11-15 1996-06-07 Topcon Corp 異物検出装置
JP2004529485A (ja) * 2000-10-06 2004-09-24 アプライド　マテリアルズ　インコーポレイテッド 自動処理検査と階層型基板試験を規定するための方法と装置
JP2002340523A (ja) * 2001-05-14 2002-11-27 Optorun Co Ltd 光学モニタ及び薄膜形成装置
JP2007201521A (ja) * 2004-02-16 2007-08-09 Neuro Solution Corp 周波数成分分離フィルタ、方法およびプログラム

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016117011A1 (ja) * 2015-01-19 2016-07-28 大和製罐株式会社 ライトテスタ
JPWO2016117011A1 (ja) * 2015-01-19 2017-10-26 大和製罐株式会社 ライトテスタ
CN106044109A (zh) * 2016-07-18 2016-10-26 大连理工大学 输送带防撕裂监测系统
CN106044109B (zh) * 2016-07-18 2018-08-03 大连理工大学 输送带防撕裂监测系统

Also Published As

Publication number Publication date
JP2009042163A (ja) 2009-02-26
JP5002367B2 (ja) 2012-08-15

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