WO2009015941A1 - Capteur de pression piézoélectrique - Google Patents

Capteur de pression piézoélectrique Download PDF

Info

Publication number
WO2009015941A1
WO2009015941A1 PCT/EP2008/057925 EP2008057925W WO2009015941A1 WO 2009015941 A1 WO2009015941 A1 WO 2009015941A1 EP 2008057925 W EP2008057925 W EP 2008057925W WO 2009015941 A1 WO2009015941 A1 WO 2009015941A1
Authority
WO
WIPO (PCT)
Prior art keywords
membrane
housing
piezoelectric
pressure sensor
measuring elements
Prior art date
Application number
PCT/EP2008/057925
Other languages
German (de)
English (en)
Other versions
WO2009015941A8 (fr
Inventor
Alexander Friedl
Turan Alparslan
Wolfgang Michelitsch
Original Assignee
Piezocryst Advanced Sensorics Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Piezocryst Advanced Sensorics Gmbh filed Critical Piezocryst Advanced Sensorics Gmbh
Priority to US12/452,880 priority Critical patent/US20100263451A1/en
Priority to AT08761293T priority patent/ATE486273T1/de
Priority to DE502008001669T priority patent/DE502008001669D1/de
Priority to DK08761293.3T priority patent/DK2174107T3/da
Priority to EP08761293A priority patent/EP2174107B1/fr
Publication of WO2009015941A1 publication Critical patent/WO2009015941A1/fr
Publication of WO2009015941A8 publication Critical patent/WO2009015941A8/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
    • G01L23/08—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically
    • G01L23/10—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically by pressure-sensitive members of the piezoelectric type

Definitions

  • the invention relates to a piezoelectric pressure sensor with piezoelectric measuring elements inserted in a housing and a diaphragm element arranged on the housing on the pressure side, which has a central diaphragm punch in the center of a thin annular diaphragm, wherein the piezoelectric measuring elements are arranged radially outside a biasing element inserted essentially along the sensor longitudinal axis, which penetrates the housing base, serves for signal derivation and is connected to the diaphragm-side end with a pressure piece.
  • Piezoelectric pressure sensors require a mechanical bias of the piezoelectric measuring elements for a high linearity of the measuring signal.
  • This bias voltage can be applied for example by a so-called Bourdon tube, which comprises the measuring elements, i. essentially in a cylindrical interior.
  • the Bourdon tube serves to press the piezoelectric measuring elements securely against each other, wherein the Bourdon tube is designed as low-mass as possible and elastically as a thin cylinder.
  • the manufacture and installation of a Bourdon tube is complicated, so that improvements were sought.
  • the bias can also be applied by the membrane itself for at least a limited period, which, however, suffers from the temperature loads occurring at high temperature sensors (temperatures above 400 0 C), which leads to a change in the sensor sensitivity and a deterioration of the linearity ,
  • the present invention therefore relates exclusively to pressure sensors with separate biasing element.
  • Such pressure sensors are used, for example, for continuous monitoring of internal combustion engines and have to achieve long service lives of up to or over 20,000 hours in order to guarantee the largest possible service intervals.
  • the internal combustion engines are usually in continuous operation for Power generation, heat generation or for driving motor vehicles in use.
  • the pressure sensors mentioned use flexible membranes on the combustion chamber side, which can break under very unfavorable conditions, wherein parts of the membrane can enter the combustion chamber and a connection between the combustion chamber and the environment can arise. Escaping flames and pressure waves can cause great damage, as well as endanger man and machine.
  • the object of the invention is to improve known pressure sensors with internal preload in such a way that even with membrane rupture from the pressure sensor pose no danger and safe operation of a device equipped with the pressure sensor is ensured.
  • this object is achieved in that the central diaphragm temple is fixed to the pressure piece and that the biasing element is biased with the interposition of a gas-tight insulating element on the housing base.
  • the pressure piece has a sealing shoulder, which bears against a sealing seat in the interior of the housing when the measuring elements break and forms a gas-tight zone.
  • FIG. 1 shows a piezoelectric pressure sensor in an axial section according to the prior art
  • FIG. 2 shows a pressure sensor according to the invention in an axial section with intact membrane element.
  • FIG. 3 shows the pressure sensor according to the invention according to FIG. 1 with a broken membrane;
  • FIG. 4 shows the pressure sensor according to FIG. 1 with a broken membrane and broken measuring elements
  • Fig. 5 shows a detail A of Fig. 4 in an enlarged view.
  • the piezoelectric pressure sensor 1 according to the prior art illustrated in FIG. 1 has piezoelectric measuring elements 3 arranged in a housing 2, which are pretensioned between a membrane element 4 and a housing base 5.
  • the membrane element 4 is welded to the outer membrane flange 14 with the pressure-side end of the housing 2.
  • the membrane element 4 has a central membrane stamp 15 and a thin, circular membrane 16, which merges into the membrane flange 14 in one piece.
  • the piezoelectric measuring elements 3 are radially outside of a substantially along the sensor longitudinal axis 1 'arranged biasing element 8, which biases the piezoelectric measuring elements 3 against the housing base 5.
  • two parallel measuring element plates 3 are arranged, several, for example three measuring element plates in the form of a triangle can also be arranged equidistant from the biasing element 8 (see FIGS. 2 to 4).
  • the housing 2 may be made in several parts and e.g. along the line T have a pitch at which the housing parts are welded together after mounting the measuring elements 3.
  • the piezoelectric measuring elements 3 have at their narrow sides 6 an annular Ableitelektrode 9, and in the direction of the membrane element 4, an electrical insulating element 10, wherein an electrically conductive connection between the biasing member 8 and the Ableitelektrode 9 is made, so that the central biasing member 8 at the same time Signal derivation is used.
  • the measurement is carried out in relation to the housing ground.
  • the biasing member 8 passes through the discharge electrode 9 and the insulating member 10 through each through openings 9 ', 10', wherein the biasing member 8 is anchored with a conical extension 11 in the insulating member 10 and against a further insulating 10 on the housing base 5 opposite side of the sensor housing. 2 is biased.
  • the biasing elements 8 is held by a fixing elements 12 in the prestressed position, wherein the fixing element 12 may be screwed or welded to the central biasing member 8.
  • the piezoelectric pressure sensor 1 according to the invention shown in FIGS. 2 to 5 has the following improvements in order to prevent the consequential damage described above, even in the case of a diaphragm rupture:
  • the central membrane punch 15 is attached to the pressure piece 17, whereby this - can not get into the interior of the combustion chamber of an engine - even with a diaphragm breakage.
  • the biasing member 8 is biased to the housing base 5 with the interposition of a gas-tight insulating member 18. As shown in Fig. 3, in this scenario, the hot exhaust gas (shown as black dots) only reach the insulating member 18, but not leave the pressure sensor. The system thus remains gas-tight even in the event of a diaphragm rupture to the environment.
  • the pressure piece 17 has a sealing shoulder 19 which rests against a sealing seat 20 in the interior of the housing 2 when the diaphragm 16 and the measuring elements 3 (see FIG. 4) break, as soon as the pressure piece 17 moves from the pressure prevailing in the combustion chamber in the direction of the combustion chamber Arrow 21 is moved and forms a gas-tight zone.
  • the situation in the gap 22 between pressure piece 17 and inner wall of the housing 2 is shown in detail in Fig. 5.
  • the surfaces of the sealing shoulder 19 and the sealing seat 20 close to the axis 1 'of the pressure sensor 1 each have an acute angle and are coordinated such that the two Parts 15, 17 - after the destruction of the measuring elements 3 - in a pressure surge from the combustion chamber wedged or tighten.
  • the central membrane stamp 15 may be connected to the pressure piece 17, for example, by welding, gluing, screwing or shrink fit.
  • the pressure piece 17 has a bore 23 which passes through the preload element 8 with play, wherein in a diaphragm-side receptacle 24 of the pressure piece 17, an insulating washer 25 and a fixing member 26 (for example, a nut) are arranged for fixing the biasing member 8.
  • the measuring elements 3 are on the housing base 5 side facing with a thin Ableitelektrode 27 in contact, which contacts the biasing member 8 and is electrically insulated by an insulating 28 to the housing base 5.
  • a cylindrical insulating sleeve 29, for example made of plastic, is arranged, which serves as a centering aid during assembly.
  • the housing 2 which is arranged with play in an outer housing 2 ', has a disk-shaped flange 30, which is welded to the diaphragm flange 14.
  • the individual parts 2, 2 'of the housing are also welded together in the flange area.
  • the pressure sensor 1 can be inserted into a measuring bore (not shown here) or screwed in with the aid of an external thread of the outer housing 2 '.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

L'invention concerne un capteur de pression piézoélectrique (1) avec des éléments de mesure (3) piézoélectriques disposés dans un boîtier (2) et un élément de membrane (4) disposé côté refoulement, qui présente une matrice de membrane (15) centrale au centre d'une membrane (16) fine en forme d'anneau en cercle, les éléments de mesure (3) piézoélectriques se trouvant radialement à l'extérieur d'un élément d'induction (8) placé le long de l'axe longitudinal de capteur (1'), qui traverse la base de boîtier (5), sert au détournement du signal et est lié à l'extrémité de la membrane avec un élément de pression. Selon l'invention, la matrice centrale de membrane (15) est consolidée avec l'élément de pression (17) et l'élément d'induction (8) est attelé à la base de boîtier (5) sous la position intermédiaire d'un élément d'isolation (18) étanche au gaz. L'élément de pression (17) présente également une épaule épaisse (19), qui est adjacente à un siège d'étanchéité (20) à l'intérieur du boitier (2) pour une fraction de l'élément de membrane (3) et qui constitue une zone étanche.
PCT/EP2008/057925 2007-07-27 2008-06-23 Capteur de pression piézoélectrique WO2009015941A1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
US12/452,880 US20100263451A1 (en) 2007-07-27 2008-06-23 Piezoelectric pressure sensor
AT08761293T ATE486273T1 (de) 2007-07-27 2008-06-23 Piezoelektrischer drucksensor
DE502008001669T DE502008001669D1 (de) 2007-07-27 2008-06-23 Piezoelektrischer drucksensor
DK08761293.3T DK2174107T3 (da) 2007-07-27 2008-06-23 Piezoelektrisk tryksensor
EP08761293A EP2174107B1 (fr) 2007-07-27 2008-06-23 Capteur de pression piézoélectrique

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
ATA1187/2007 2007-07-27
AT0118707A AT505015B1 (de) 2007-07-27 2007-07-27 Drucksensor

Publications (2)

Publication Number Publication Date
WO2009015941A1 true WO2009015941A1 (fr) 2009-02-05
WO2009015941A8 WO2009015941A8 (fr) 2010-02-04

Family

ID=39830282

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2008/057925 WO2009015941A1 (fr) 2007-07-27 2008-06-23 Capteur de pression piézoélectrique

Country Status (6)

Country Link
US (1) US20100263451A1 (fr)
EP (1) EP2174107B1 (fr)
AT (2) AT505015B1 (fr)
DE (1) DE502008001669D1 (fr)
DK (1) DK2174107T3 (fr)
WO (1) WO2009015941A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102235932A (zh) * 2010-04-28 2011-11-09 雷彼得 有金属陶瓷电热体的内燃机气缸压力传感器
CH705470A1 (de) * 2011-09-07 2013-03-15 Kistler Holding Ag Durchbruchsicherer Drucksensor.
EP3255401A1 (fr) 2016-06-07 2017-12-13 Piezocryst Advanced Sensorics GmbH Capteur de pression piézoélectrique destiné à la mesure de hautes pressions

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8490497B2 (en) * 2010-03-25 2013-07-23 University Of Southern California Microelectromechanical (MEMS) pressure transducer
AT514607B1 (de) 2013-08-30 2015-02-15 Piezocryst Advanced Sensorics Drucksensor
DK3124944T3 (en) * 2015-07-31 2019-04-23 Kistler Holding Ag PIEZOELECTRIC PRESSURE SENSOR
DK3124943T3 (da) * 2015-07-31 2021-08-30 Kistler Holding Ag Piezoelektrisk tryksensor og fremgangsmåde til fremstilling af den piezoelektriske tryksensor
DK3124945T3 (en) * 2015-07-31 2018-10-22 Kistler Holding Ag PIEZOELECTRIC PRESSURE SENSOR
KR102574986B1 (ko) * 2016-12-16 2023-09-05 에이치에스디엔진 주식회사 압력 센서 모듈

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1031155A (fr) * 1951-01-18 1953-06-22 Perfectionnements apportés aux dispositifs de mesure des pressions
DE3423711A1 (de) * 1983-07-07 1985-01-17 AVL Gesellschaft für Verbrennungskraftmaschinen und Messtechnik mbH, Prof. Dr.Dr.h.c. Hans List, Graz Messwertaufnehmer zur messung heisser medien, sowie verfahren zu seiner montage
US4735091A (en) * 1986-01-22 1988-04-05 Kristal Instrumente Ag High pressure transducer

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH424312A (de) * 1964-08-15 1966-11-15 Kistler Instrumente Ag Beschleunigungskompensierter piezoelektrischer Messwandler
CH582353A5 (fr) * 1974-11-08 1976-11-30 Kistler Instrumente Ag
EP0090872B1 (fr) * 1982-04-06 1986-01-15 Kistler Instrumente AG Détecteur à haute pression
US4567395A (en) * 1984-10-26 1986-01-28 Texas Instruments Incorporated Piezoelectric pressure transmitter for an internal combustion engine
DE8903667U1 (de) * 1989-03-23 1989-05-11 Kistler Instrumente Ag, Winterthur Hochdruckaufnehmer
AT394112B (de) * 1989-03-30 1992-02-10 Avl Verbrennungskraft Messtech Druckaufnehmer
JPH04131722A (ja) * 1990-09-21 1992-05-06 Toyota Motor Corp 圧力センサ及び圧力センサの製造方法
JPH0694561A (ja) * 1992-09-11 1994-04-05 Matsushita Electric Ind Co Ltd 圧電型圧力センサ
EP0637736A3 (fr) * 1993-08-05 1995-05-10 Matsushita Electric Ind Co Ltd Palpeur piézoélectrique de pression et méthode de sa fabrication.
AT401972B (de) * 1995-06-02 1997-01-27 Avl Verbrennungskraft Messtech Ungekühlter drucksensor
AT503664B1 (de) * 2006-04-13 2007-12-15 Piezocryst Advanced Sensorics Piezoelektrischer drucksensor
AT503816B1 (de) * 2006-06-06 2008-01-15 Piezocryst Advanced Sensorics Piezoelektrischer sensor

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1031155A (fr) * 1951-01-18 1953-06-22 Perfectionnements apportés aux dispositifs de mesure des pressions
DE3423711A1 (de) * 1983-07-07 1985-01-17 AVL Gesellschaft für Verbrennungskraftmaschinen und Messtechnik mbH, Prof. Dr.Dr.h.c. Hans List, Graz Messwertaufnehmer zur messung heisser medien, sowie verfahren zu seiner montage
US4735091A (en) * 1986-01-22 1988-04-05 Kristal Instrumente Ag High pressure transducer

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102235932A (zh) * 2010-04-28 2011-11-09 雷彼得 有金属陶瓷电热体的内燃机气缸压力传感器
CH705470A1 (de) * 2011-09-07 2013-03-15 Kistler Holding Ag Durchbruchsicherer Drucksensor.
EP3255401A1 (fr) 2016-06-07 2017-12-13 Piezocryst Advanced Sensorics GmbH Capteur de pression piézoélectrique destiné à la mesure de hautes pressions

Also Published As

Publication number Publication date
EP2174107A1 (fr) 2010-04-14
AT505015A4 (de) 2008-10-15
DK2174107T3 (da) 2011-02-07
DE502008001669D1 (de) 2010-12-09
US20100263451A1 (en) 2010-10-21
EP2174107B1 (fr) 2010-10-27
WO2009015941A8 (fr) 2010-02-04
ATE486273T1 (de) 2010-11-15
AT505015B1 (de) 2008-10-15

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