WO2009000284A1 - Microvanne - Google Patents

Microvanne Download PDF

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Publication number
WO2009000284A1
WO2009000284A1 PCT/EP2007/005535 EP2007005535W WO2009000284A1 WO 2009000284 A1 WO2009000284 A1 WO 2009000284A1 EP 2007005535 W EP2007005535 W EP 2007005535W WO 2009000284 A1 WO2009000284 A1 WO 2009000284A1
Authority
WO
WIPO (PCT)
Prior art keywords
transducers
flow
channel
microvalve
duct
Prior art date
Application number
PCT/EP2007/005535
Other languages
German (de)
English (en)
Inventor
Kurt Dirk Bettenhausen
Wolfgang Ens
Herbert Grieb
Peter Hauptmann
Original Assignee
Siemens Aktiengesellschaft
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Aktiengesellschaft filed Critical Siemens Aktiengesellschaft
Priority to PCT/EP2007/005535 priority Critical patent/WO2009000284A1/fr
Publication of WO2009000284A1 publication Critical patent/WO2009000284A1/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0048—Electric operating means therefor using piezoelectric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0051—Electric operating means therefor using electrostatic means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0084—Chemistry or biology, e.g. "lab-on-a-chip" technology
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/009—Fluid power devices

Definitions

  • the invention relates to a microvalve for adjusting a volume flow of a fluid through a channel according to the preamble of claim 1.
  • Microvalves can be widely used in pneumatics and fluidics in the control of gas or liquid flows, that is fluid flows.
  • a valve can either have the function of a pilot valve, for example in electropneumatic positioners, or it can directly serve to control a volume flow or pressure in a working piston or the like, or it is used in micro-procedural devices or analyzers.
  • DE 197 35 156 C1 discloses a piezoelectrically actuated microvalve which has the following components: a base body with a passage opening, a plunger, a suspension device, by means of which the plunger can be guided in relation to the base body such that the passage opening passes through the plunger can be closed or released, and a piezoelectric actuator for actuating the plunger whose extension in the longitudinal direction by the application of an electrical voltage is variable.
  • the known microvalve can in principle either be adjusted continuously or subjected to a pulse width modulation.
  • a continuous adjustment has the disadvantage that the valve position, which is required to achieve the desired flow, can change over time. Causes can be deposits on the closing body, an abrasion by the flowing through
  • Medium be on the closing body or a relaxation.
  • the control with PuIs- width modulated signal to fully open and Closing the microvalve occurs, increased wear occurs because the closing body constantly moves against a hard stop. If the moving parts remain in an end position for a longer period of time, it can also happen that they get stuck and thus the valve fails.
  • valves with a ball valve, a slide, a combination of a nozzle and baffle plate in valves with a magnetically actuated actuator, a needle valve, etc.
  • parts for example rubbing together to actuate the closing body
  • stick-slip effect can occur, in which the mutually moving parts exercise a sequence of movements of sticking, bracing, separating and sliding until the next sticking.
  • This effect leads to vibrations and can also adversely affect the accuracy of the setting of the closing body and thus the accuracy of adjustment of the volume flowing through the microvalve.
  • the invention has for its object to provide a micro-valve with which a volume flow is continuously adjustable and which is characterized by good long-term properties.
  • electromechanical transducer active structures are formed in at least one channel wall, through which the free flow cross section is changed in the channel.
  • the targeted alternating excitation of adjacent active elements in push-pull and / or, if more than one active channel wall is present, by alternating excitation of opposing active elements in common mode can create a standing wave be generated in the vicinity of the active structures.
  • adjacent transducers are actuated in push-pull, that is, while a transducer moves in the direction of a cross-sectional constriction, the movement of the adjacent transducer or transducers is exactly opposite, namely in the direction of a cross-sectional widening.
  • the movement of the active structures thus influences the flow resistance in the channel on the one hand with a static component due to the respective change in the flow cross section and on the other hand by a dynamic component due to the increased flow loss due to turbulence in the region of the electromechanical transducer and due to an increase in the flow Eddy viscosity due to the targeted excitation of the electromechanical transducer.
  • the microvalve according to the invention has the advantage that it is characterized by an increased failure safety, since a plurality of electromechanical transducers is provided as variable flow obstacles, which can also be designed partially redundant. Due to the alternating movement of the electromechanical transducers, a self-cleaning effect advantageously occurs, since deposits are formed to a lesser extent on moving parts than on fixed ones. Since a predetermined volume flow can be set very precisely with the microvalve according to the invention, it can be used particularly well for use as an actuator in a control circuit for regulating the volume flow.
  • the transducers are arranged in a substantially rectilinear row, and when the row of transducers is substantially parallel to the direction of flow of the fluid, this has the advantage that the above described movement of the transducers, a standing wave can be generated whose wave height the remaining decreasing free flow cross-section of the channel. In this case, by varying the amplitude of the transducer movements, the wave height and thus the volume flow can be influenced.
  • the frequency of the alternating change in the flow cross section is changed by the drive means.
  • the fluid can be additionally vibrated, which changes the flow resistance.
  • the laminar flow is disturbed and the turbulence viscosity is increased.
  • the frequency increases, the vortex viscosity increases and the volume flow through the channel is reduced.
  • the electromechanical transducers can be designed as capacitive or piezoelectric, micromechanically produced ultrasonic transducers. This has the advantage that it can be used on an already proven technique for the realization of such converter. Such transducers are often referred to as capacitive micromachined ultrasonic transducer (cMUT) and piezoelectric micromachined ultrasonic transducer (pMUT).
  • cMUT capacitive micromachined ultrasonic transducer
  • pMUT piezoelectric micromachined ultrasonic transducer
  • FIG. 1 shows a control circuit with a microvalve for setting a predefinable volumetric flow
  • Figures 2 and 3 are schematic diagrams for explaining the dynamic effects
  • FIGS. 4, 5 and 6 show flow patterns for explaining the turbulence.
  • a microvalve 1 for setting a volume flow of a fluid through a channel 2 whose direction is indicated by an arrow 3 has four electromechanical transducers 5, 6, 7 and 14 arranged on a channel wall 4 in a row running parallel to the flow direction 8, which are connected to a drive device 9. At least one channel wall is formed as described.
  • the electromechanical transducers 5 ... 8 perform a movement perpendicular to the flow direction of the medium, so that the flow cross-section of the channel 2 is variable.
  • the volumetric flow of the fluid can be set to a desired value, which can be predetermined by the control device 9 via an input 10 from outside, for example via a communication connection from a higher-level control.
  • a flow sensor 11 whose measuring signal 12 is likewise guided to the control device 9, the currently prevailing volumetric flow is detected.
  • the current volume flow is compared as an actual value with the predetermined volume flow as the desired value and the control of the converter 5 ... 8 changed in case of any deviations such that the deviations are compensated. Since the microvalve allows precise fine adjustment of the volume flow, the predetermined value of the volume flow can be maintained very accurately.
  • FIGS. Identical parts are provided in both figures with the same reference numerals.
  • Vertical arrows show the respective direction of movement of the transducers 20 ... 27. Since the wall 28 and the fastening of the transducers 20... 27 can in principle be designed in such a way that their effective undersides can execute the movements, the wall 28 in FIGS. 2 and 3 is indicated only by broken lines.
  • the Transducer 20 ... 27 lead by appropriate control with a in Fig. 2 and 3 for clarity not shown driving up and down movements for alternating change of the flow cross-section from.
  • each adjacent transducer is in push-pull.
  • the transducers 20, 22, 24 and 26 are displaced downwardly while the transducers 21, 23, 25 and 27 move upwards.
  • Medium located in front of the underside of the transducers 20, 22, 24 and 26 is displaced during this movement and displaced into the space formed under the transducers 21, 23, 25 and 27.
  • This volume displacement of the fluid is indicated by curved arrows in the channel 29.
  • FIG. 3 shows a movement in exactly the opposite direction. The two FIGS. 2 and 3 make it clear that with alternating movement of the transducers 20...
  • Figures 4 to 6 show flow lines that arise in a horizontally extending channel with a flow of fluid from left to right.
  • An electromechanical transducer 40 penetrates in the flow according to Figure 4 only slightly into the flow channel. A turbulence hardly takes place here and there is a largely laminar flow before. The free flow cross-section of the channel is barely changed.
  • an electromechanical transducer 50 projects statically far into the channel and reduces the free Channel cross section considerably. In the vicinity of the transducer 50 turbulence, wherein in the flow direction behind the transducer 50, a large vortex 51 is formed. The volume flow is limited to a small area above the vortex.
  • the transducer 60 shown in Figure 6 performs an alternating movement in the vertical direction. Although on average it protrudes into the channel to a similar extent as the transducer 50 shown in FIG. 5, the movement according to FIG. 6 results in significantly greater vortex formation. The size of the turbulence leads to a further reduction of the remaining volume flow in the channel. It depends on the one hand on the amplitude of the transducer movements and on the other hand on their frequency.

Abstract

L'invention concerne une microvanne (1) pour l'ajustement du débit volumique d'un fluide à travers un canal (2). Dans une paroi (4) du canal est disposé un champ de convertisseurs électromécaniques adjacents (5 … 8) qui permettent de faire varier la section transversale d'écoulement du canal (2). Un dispositif de commande (9) excite les convertisseurs (5 … 8) selon des mouvements alternatifs, les convertisseurs adjacents se déplaçant en opposition de phase. En l'occurrence, il se produit dans le canal (2) des tourbillons qui augmentent, en fonction de la fréquence de l'excitation, la résistance à l'écoulement dans le canal (2). La nouvelle vanne présente l'avantage de pouvoir être réglée en continu et de présenter de bonnes propriétés à long terme.
PCT/EP2007/005535 2007-06-22 2007-06-22 Microvanne WO2009000284A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/EP2007/005535 WO2009000284A1 (fr) 2007-06-22 2007-06-22 Microvanne

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2007/005535 WO2009000284A1 (fr) 2007-06-22 2007-06-22 Microvanne

Publications (1)

Publication Number Publication Date
WO2009000284A1 true WO2009000284A1 (fr) 2008-12-31

Family

ID=38573454

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2007/005535 WO2009000284A1 (fr) 2007-06-22 2007-06-22 Microvanne

Country Status (1)

Country Link
WO (1) WO2009000284A1 (fr)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19735156C1 (de) * 1996-11-25 1999-04-29 Fraunhofer Ges Forschung Piezoelektrisch betätigtes Mikroventil
EP1215426A2 (fr) * 2000-12-12 2002-06-19 Eastman Kodak Company Soupape électrostrictive pour moduler l'écoulement d'un fluide
US20030215342A1 (en) * 2002-03-27 2003-11-20 Kusunoki Higashino Fluid transferring system and micropump suitable therefor
US20040253123A1 (en) * 2003-01-15 2004-12-16 California Institute Of Technology Integrated electrostatic peristaltic pump method and apparatus
WO2005060593A2 (fr) * 2003-12-10 2005-07-07 Purdue Research Foundation Micro-pompe de refroidissement d'appareils electroniques
US20060145110A1 (en) * 2005-01-06 2006-07-06 Tzu-Yu Wang Microfluidic modulating valve

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19735156C1 (de) * 1996-11-25 1999-04-29 Fraunhofer Ges Forschung Piezoelektrisch betätigtes Mikroventil
EP1215426A2 (fr) * 2000-12-12 2002-06-19 Eastman Kodak Company Soupape électrostrictive pour moduler l'écoulement d'un fluide
US20030215342A1 (en) * 2002-03-27 2003-11-20 Kusunoki Higashino Fluid transferring system and micropump suitable therefor
US20040253123A1 (en) * 2003-01-15 2004-12-16 California Institute Of Technology Integrated electrostatic peristaltic pump method and apparatus
WO2005060593A2 (fr) * 2003-12-10 2005-07-07 Purdue Research Foundation Micro-pompe de refroidissement d'appareils electroniques
US20060145110A1 (en) * 2005-01-06 2006-07-06 Tzu-Yu Wang Microfluidic modulating valve

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