WO2008148377A3 - Verfahren zur selektiven thermischen oberflächenbehandlung eines flächensubstrates - Google Patents
Verfahren zur selektiven thermischen oberflächenbehandlung eines flächensubstrates Download PDFInfo
- Publication number
- WO2008148377A3 WO2008148377A3 PCT/DE2008/000922 DE2008000922W WO2008148377A3 WO 2008148377 A3 WO2008148377 A3 WO 2008148377A3 DE 2008000922 W DE2008000922 W DE 2008000922W WO 2008148377 A3 WO2008148377 A3 WO 2008148377A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- substrate surface
- planar substrate
- spatial axis
- substrate
- thermal treatment
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title abstract 9
- 238000000034 method Methods 0.000 title abstract 3
- 238000007669 thermal treatment Methods 0.000 title abstract 2
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
- H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
- H01L21/02691—Scanning of a beam
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02524—Group 14 semiconducting materials
- H01L21/02532—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
- H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
- H01L21/02675—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth using laser beams
- H01L21/02686—Pulsed laser beam
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/268—Bombardment with radiation with high-energy radiation using electromagnetic radiation, e.g. laser radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
- H01L27/127—Multistep manufacturing methods with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement
- H01L27/1274—Multistep manufacturing methods with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement using crystallisation of amorphous semiconductor or recrystallisation of crystalline semiconductor
- H01L27/1285—Multistep manufacturing methods with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement using crystallisation of amorphous semiconductor or recrystallisation of crystalline semiconductor using control of the annealing or irradiation parameters, e.g. using different scanning direction or intensity for different transistors
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- High Energy & Nuclear Physics (AREA)
- Electromagnetism (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Recrystallisation Techniques (AREA)
Abstract
Beschrieben wird ein Verfahren zur lokalen thermischen Oberflächenbehandlung eines Flächensubstrates, im Weiteren kurz Substratoberfläche genannt, mittels eines Lasers zur Erzeugung eines auf die Substratoberfläche gerichteten, gepulst betriebenen Laserstrahls, der am Ort der Substratoberfläche jeweils einen homogen ausgeleuchteten Laserstahlquerschnitt aufweist, bei dem das Flächensubstrat wenigstens längs einer ersten Raumachse bewegt wird und bei dem der Laserstrahl unabhängig von der Bewegung des Flächensubstrats längs der ersten und längs einer zu der ersten Raumachse orthogonal orientierten zweiten Raumachse, die parallel zur Substratoberfläche ausgerichtet ist, ausgelenkt wird, wobei der Laserstrahl derart relativ zur der sich bewegenden Substratoberfläche ausgelenkt wird, so dass die Laserstrahlquerschnitte von n ≥ 2 Laserpulsen mit einem gegenseitigen Überdeckungsgrad von wenigstens 80% auf einem ersten diskret vorgebbaren lokalen Bereich der Substratoberfläche abgebildet werden.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE200710025942 DE102007025942A1 (de) | 2007-06-04 | 2007-06-04 | Verfahren zur selektiven thermischen Oberflächenbehandlung eines Flächensubstrates |
DE102007025942.7 | 2007-06-04 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2008148377A2 WO2008148377A2 (de) | 2008-12-11 |
WO2008148377A3 true WO2008148377A3 (de) | 2009-03-12 |
Family
ID=39917745
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/DE2008/000922 WO2008148377A2 (de) | 2007-06-04 | 2008-06-03 | Verfahren zur selektiven thermischen oberflächenbehandlung eines flächensubstrates |
Country Status (2)
Country | Link |
---|---|
DE (1) | DE102007025942A1 (de) |
WO (1) | WO2008148377A2 (de) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2497105A4 (de) * | 2009-11-03 | 2013-11-20 | Univ Columbia | Systeme und verfahren für eine teilweise schmelzfilmverarbeitung mit nichtperiodischen impulsen |
US9087696B2 (en) | 2009-11-03 | 2015-07-21 | The Trustees Of Columbia University In The City Of New York | Systems and methods for non-periodic pulse partial melt film processing |
WO2011056787A1 (en) | 2009-11-03 | 2011-05-12 | The Trustees Of Columbia University In The City Of New York | Systems and methods for non-periodic pulse partial melt film processing |
US9646831B2 (en) | 2009-11-03 | 2017-05-09 | The Trustees Of Columbia University In The City Of New York | Advanced excimer laser annealing for thin films |
US8440581B2 (en) | 2009-11-24 | 2013-05-14 | The Trustees Of Columbia University In The City Of New York | Systems and methods for non-periodic pulse sequential lateral solidification |
TWI459444B (zh) | 2009-11-30 | 2014-11-01 | Applied Materials Inc | 在半導體應用上的結晶處理 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5366926A (en) * | 1993-06-07 | 1994-11-22 | Xerox Corporation | Low temperature process for laser dehydrogenation and crystallization of amorphous silicon |
WO2000014784A1 (en) * | 1998-09-04 | 2000-03-16 | Koninklijke Philips Electronics N.V. | Double-pulse laser crystallisation of thin semiconductor films |
US20020068391A1 (en) * | 1999-03-31 | 2002-06-06 | Yunho Jung | Laser annealing system for crystallization of semiconductor layer and method of the same |
WO2006107926A2 (en) * | 2005-04-06 | 2006-10-12 | The Trustees Of Columbia University In The City Of New York | Line scan sequential lateral solidification of thin films |
WO2007022302A2 (en) * | 2005-08-16 | 2007-02-22 | The Trustees Of Columbia University In The City Of New York | High throughput crystallization of thin films |
WO2007022234A1 (en) * | 2005-08-16 | 2007-02-22 | The Trustees Of Columbia University In The City Of New York | Systems and methods for uniform sequential lateral solidification of thin films using high frequency lasers |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4209606B2 (ja) * | 2001-08-17 | 2009-01-14 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
AU2003209628A1 (en) | 2002-02-25 | 2003-09-09 | Orbotech Ltd. | Method for manufacturing flat panel display substrates |
US7521651B2 (en) | 2003-09-12 | 2009-04-21 | Orbotech Ltd | Multiple beam micro-machining system and method |
-
2007
- 2007-06-04 DE DE200710025942 patent/DE102007025942A1/de not_active Withdrawn
-
2008
- 2008-06-03 WO PCT/DE2008/000922 patent/WO2008148377A2/de active Application Filing
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5366926A (en) * | 1993-06-07 | 1994-11-22 | Xerox Corporation | Low temperature process for laser dehydrogenation and crystallization of amorphous silicon |
WO2000014784A1 (en) * | 1998-09-04 | 2000-03-16 | Koninklijke Philips Electronics N.V. | Double-pulse laser crystallisation of thin semiconductor films |
US20020068391A1 (en) * | 1999-03-31 | 2002-06-06 | Yunho Jung | Laser annealing system for crystallization of semiconductor layer and method of the same |
WO2006107926A2 (en) * | 2005-04-06 | 2006-10-12 | The Trustees Of Columbia University In The City Of New York | Line scan sequential lateral solidification of thin films |
WO2007022302A2 (en) * | 2005-08-16 | 2007-02-22 | The Trustees Of Columbia University In The City Of New York | High throughput crystallization of thin films |
WO2007022234A1 (en) * | 2005-08-16 | 2007-02-22 | The Trustees Of Columbia University In The City Of New York | Systems and methods for uniform sequential lateral solidification of thin films using high frequency lasers |
Non-Patent Citations (2)
Title |
---|
C. HILL: "Factors Influencing Applications", LASER ANNEALING OF SEMICONDUCTORS, 1982, pages 499 - 506, XP009109400 * |
ISHIHARA R ET AL: "A NOVEL DOUBLE-PULSE EXCIMER-LASER CRYSTALLIZATION METHOD OF SILICON THIN-FILMS", JAPANESE JOURNAL OF APPLIED PHYSICS, JAPAN SOCIETY OF APPLIED PHYSICS, TOKYO,JP, vol. 34, no. 8A, 1 August 1995 (1995-08-01), pages 3976 - 3981, XP000861506, ISSN: 0021-4922 * |
Also Published As
Publication number | Publication date |
---|---|
DE102007025942A1 (de) | 2008-12-11 |
WO2008148377A2 (de) | 2008-12-11 |
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