WO2008126863A1 - Heater for sensor element - Google Patents

Heater for sensor element Download PDF

Info

Publication number
WO2008126863A1
WO2008126863A1 PCT/JP2008/057012 JP2008057012W WO2008126863A1 WO 2008126863 A1 WO2008126863 A1 WO 2008126863A1 JP 2008057012 W JP2008057012 W JP 2008057012W WO 2008126863 A1 WO2008126863 A1 WO 2008126863A1
Authority
WO
WIPO (PCT)
Prior art keywords
thin film
film layer
tantalum
heater
titanium
Prior art date
Application number
PCT/JP2008/057012
Other languages
French (fr)
Japanese (ja)
Inventor
Tetsuji Imamura
Hajime Yamamoto
Takayuki Nakano
Masaru Takebayashi
Daisuke Kuwahara
Original Assignee
Hokuriku Electric Industry Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hokuriku Electric Industry Co., Ltd. filed Critical Hokuriku Electric Industry Co., Ltd.
Priority to JP2009509358A priority Critical patent/JP4964295B2/en
Publication of WO2008126863A1 publication Critical patent/WO2008126863A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
    • G01N27/16—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by burning or catalytic oxidation of surrounding material to be tested, e.g. of gas

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

Provided is a heater for sensor element, which has excellent adhesion to a silicon substrate even when the heater is heated at a prescribed temperature. A base substrate (2) is formed on a silicon substrate (1), a titanium thin film layer (9) is formed on the base substrate (2), a tantalum thin film layer (11) is formed on the thin film layer (9), and a platinum thin film layer (13) is formed on the tantalum thin film layer (11). The thickness of the titanium thin film layer (9) and that of the tantalum thin film layer (11) are those that do not permit titanium and the like in the titanium thin film layer (9) to diffuse in the tantalum thin film layer (11) and tantalum and the like in the tantalum thin film layer (11) do not diffuse in the platinum thin film layer (13) when the heater for the sensor element is used under heat generating conditions at a prescribed temperature.
PCT/JP2008/057012 2007-04-10 2008-04-09 Heater for sensor element WO2008126863A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009509358A JP4964295B2 (en) 2007-04-10 2008-04-09 Sensor element heater

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-103247 2007-04-10
JP2007103247 2007-04-10

Publications (1)

Publication Number Publication Date
WO2008126863A1 true WO2008126863A1 (en) 2008-10-23

Family

ID=39863960

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/057012 WO2008126863A1 (en) 2007-04-10 2008-04-09 Heater for sensor element

Country Status (2)

Country Link
JP (1) JP4964295B2 (en)
WO (1) WO2008126863A1 (en)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06236855A (en) * 1993-02-09 1994-08-23 Kobe Steel Ltd Heat-resistant ohmic electrode on semiconductor diamond layer and manufacture thereof
JPH08188869A (en) * 1994-06-22 1996-07-23 Lg Electron Inc Method of forming thin metallic film of semiconductor element and production of gas sensor
JP2002328108A (en) * 2001-05-02 2002-11-15 Ngk Spark Plug Co Ltd Hydrogen gas detecting element and method of manufacturing the same
JP2004037402A (en) * 2002-07-08 2004-02-05 Fuji Electric Holdings Co Ltd Thin film gas sensor
JP2005030907A (en) * 2003-07-11 2005-02-03 Ngk Spark Plug Co Ltd Gas sensor
JP2005226992A (en) * 2004-02-10 2005-08-25 Fuji Electric Fa Components & Systems Co Ltd Thin film gas sensor manufacturing method

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06236855A (en) * 1993-02-09 1994-08-23 Kobe Steel Ltd Heat-resistant ohmic electrode on semiconductor diamond layer and manufacture thereof
JPH08188869A (en) * 1994-06-22 1996-07-23 Lg Electron Inc Method of forming thin metallic film of semiconductor element and production of gas sensor
JP2002328108A (en) * 2001-05-02 2002-11-15 Ngk Spark Plug Co Ltd Hydrogen gas detecting element and method of manufacturing the same
JP2004037402A (en) * 2002-07-08 2004-02-05 Fuji Electric Holdings Co Ltd Thin film gas sensor
JP2005030907A (en) * 2003-07-11 2005-02-03 Ngk Spark Plug Co Ltd Gas sensor
JP2005226992A (en) * 2004-02-10 2005-08-25 Fuji Electric Fa Components & Systems Co Ltd Thin film gas sensor manufacturing method

Also Published As

Publication number Publication date
JPWO2008126863A1 (en) 2010-07-22
JP4964295B2 (en) 2012-06-27

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