WO2008120625A1 - 高繰返しパルス電源及びこの高繰返しパルス電源を備えた露光装置 - Google Patents

高繰返しパルス電源及びこの高繰返しパルス電源を備えた露光装置 Download PDF

Info

Publication number
WO2008120625A1
WO2008120625A1 PCT/JP2008/055670 JP2008055670W WO2008120625A1 WO 2008120625 A1 WO2008120625 A1 WO 2008120625A1 JP 2008055670 W JP2008055670 W JP 2008055670W WO 2008120625 A1 WO2008120625 A1 WO 2008120625A1
Authority
WO
WIPO (PCT)
Prior art keywords
power supply
pulse power
pulse
high repetition
initial stage
Prior art date
Application number
PCT/JP2008/055670
Other languages
English (en)
French (fr)
Inventor
Takashi Sakugawa
Hidenori Akiyama
Sunao Katsuki
Original Assignee
National University Corporation Kumamoto University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National University Corporation Kumamoto University filed Critical National University Corporation Kumamoto University
Priority to US12/594,097 priority Critical patent/US20100134776A1/en
Priority to JP2009507477A priority patent/JPWO2008120625A1/ja
Publication of WO2008120625A1 publication Critical patent/WO2008120625A1/ja

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K3/00—Circuits for generating electric pulses; Monostable, bistable or multistable circuits
    • H03K3/02—Generators characterised by the type of circuit or by the means used for producing pulses
    • H03K3/53—Generators characterised by the type of circuit or by the means used for producing pulses by the use of an energy-accumulating element discharged through the load by a switching device controlled by an external signal and not incorporating positive feedback
    • H03K3/57—Generators characterised by the type of circuit or by the means used for producing pulses by the use of an energy-accumulating element discharged through the load by a switching device controlled by an external signal and not incorporating positive feedback the switching device being a semiconductor device
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70025—Production of exposure light, i.e. light sources by lasers

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Lasers (AREA)
  • Generation Of Surge Voltage And Current (AREA)

Abstract

　充電器と、この充電器で充電されるコンデンサを備えた初段コンデンサ部と、この初段コンデンサ部の放電によって生じるパルス電流を磁気パルス圧縮して出力する磁気パルス圧縮回路とを備えたパルス電源のスループットを向上させて、高繰り返し可能としたパルス電源及びこのパルス電源を備えた露光装置を提供する。 　パルス電源は、初段コンデンサ部と磁気パルス圧縮回路の間に、初段コンデンサ部からの放電のタイミングを制御するトランジスタと、初段コンデンサ部のコンデンサとともに共振回路を構成するインダクタと、パルス電流を整流するダイオードとを設けるとともに、パルス電流に逆流方向の電流が生じることを防止する逆流防止手段を設ける。
PCT/JP2008/055670 2007-03-30 2008-03-26 高繰返しパルス電源及びこの高繰返しパルス電源を備えた露光装置 WO2008120625A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US12/594,097 US20100134776A1 (en) 2007-03-30 2008-03-26 High repetition pulse power source and exposure device with high repetition power source
JP2009507477A JPWO2008120625A1 (ja) 2007-03-30 2008-03-26 高繰返しパルス電源及びこの高繰返しパルス電源を備えた露光装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007095653 2007-03-30
JP2007-095653 2007-03-30

Publications (1)

Publication Number Publication Date
WO2008120625A1 true WO2008120625A1 (ja) 2008-10-09

Family

ID=39808207

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/055670 WO2008120625A1 (ja) 2007-03-30 2008-03-26 高繰返しパルス電源及びこの高繰返しパルス電源を備えた露光装置

Country Status (3)

Country Link
US (1) US20100134776A1 (ja)
JP (1) JPWO2008120625A1 (ja)
WO (1) WO2008120625A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109980983A (zh) * 2017-12-27 2019-07-05 核工业西南物理研究院 一种改良型脉冲高压电源的电源模块
CN109980958A (zh) * 2017-12-27 2019-07-05 核工业西南物理研究院 用于高压长脉冲psm电源的子模块

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1197987A (ja) * 1997-09-25 1999-04-09 Meidensha Corp パルス電源のスイッチング素子制御回路
JPH11145794A (ja) * 1997-11-10 1999-05-28 Meidensha Corp パルス電源
JP2001320116A (ja) * 2000-05-09 2001-11-16 Sumitomo Heavy Ind Ltd パルス放電回路

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5434456A (en) * 1993-02-09 1995-07-18 The Regents Of The University Of California Lumped transmission line avalanche pulser
US5914974A (en) * 1997-02-21 1999-06-22 Cymer, Inc. Method and apparatus for eliminating reflected energy due to stage mismatch in nonlinear magnetic compression modules
US6862307B2 (en) * 2000-05-15 2005-03-01 Lambda Physik Ag Electrical excitation circuit for a pulsed gas laser

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1197987A (ja) * 1997-09-25 1999-04-09 Meidensha Corp パルス電源のスイッチング素子制御回路
JPH11145794A (ja) * 1997-11-10 1999-05-28 Meidensha Corp パルス電源
JP2001320116A (ja) * 2000-05-09 2001-11-16 Sumitomo Heavy Ind Ltd パルス放電回路

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109980983A (zh) * 2017-12-27 2019-07-05 核工业西南物理研究院 一种改良型脉冲高压电源的电源模块
CN109980958A (zh) * 2017-12-27 2019-07-05 核工业西南物理研究院 用于高压长脉冲psm电源的子模块

Also Published As

Publication number Publication date
US20100134776A1 (en) 2010-06-03
JPWO2008120625A1 (ja) 2010-07-15

Similar Documents

Publication Publication Date Title
US8576587B2 (en) Predictive synchronous rectification controller, switching power converter with predictive synchronous rectification controller and controlling method thereof
WO2010077759A3 (en) Inductive battery systems and methods of operation
EP2479420A3 (en) Internal combustion engine ignition system
EP2413490A3 (en) System and method for powering a load
WO2009120451A3 (en) Method and apparatus for providing an initial bias and enable signal for a power converter
WO2008102542A1 (ja) 発電装置及びその運転方法
EP1903202A3 (en) Apparatus for driving electromagnetic valves
WO2008002566A3 (en) High voltage power supply
TW200721652A (en) A switching regulator, and a circuit and method for controlling the switching regulator
US20150109831A1 (en) Switching power supply device
WO2008149523A1 (ja) 電力変換器
WO2009138478A3 (en) Switched-mode power supply, led lighting system and driver comprising the same, and method for electrically driving a load
WO2008028049A3 (en) Hybrid power system
PL1868417T3 (pl) Układ indukcyjny, sposób zasilania wzbudnika i płyta grzejna zawierająca taki układ
RU2007141478A (ru) Способ эксплуатации блока питания от сети с рекуперацией энергии рассеяния первичной стороны
WO2008120625A1 (ja) 高繰返しパルス電源及びこの高繰返しパルス電源を備えた露光装置
ZA201004825B (en) Starting device with two input poles
JP2009268323A (ja) 昇圧回路
ATE362304T1 (de) Weidezaungerät
WO2008015626A3 (en) Electrical dc-dc power converter with magnetically coupled switch control circuit
WO2012110709A3 (en) Power supply with interference suppression, and method for operating a power supply
US8907645B2 (en) Safe electric power regulating circuit
WO2014037403A3 (en) Switching a dc-to-dc converter
US8872576B2 (en) Recharging of the gate charge of a transistor
TW200700875A (en) Charging device

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08722835

Country of ref document: EP

Kind code of ref document: A1

DPE1 Request for preliminary examination filed after expiration of 19th month from priority date (pct application filed from 20040101)
ENP Entry into the national phase

Ref document number: 2009507477

Country of ref document: JP

Kind code of ref document: A

WWE Wipo information: entry into national phase

Ref document number: 12594097

Country of ref document: US

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 08722835

Country of ref document: EP

Kind code of ref document: A1