WO2008108768A1 - Appareil de commande électronique d'hologrammes - Google Patents

Appareil de commande électronique d'hologrammes Download PDF

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Publication number
WO2008108768A1
WO2008108768A1 PCT/US2007/005861 US2007005861W WO2008108768A1 WO 2008108768 A1 WO2008108768 A1 WO 2008108768A1 US 2007005861 W US2007005861 W US 2007005861W WO 2008108768 A1 WO2008108768 A1 WO 2008108768A1
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WO
WIPO (PCT)
Prior art keywords
interspersed
light beams
light
phases
patterned layer
Prior art date
Application number
PCT/US2007/005861
Other languages
English (en)
Inventor
Jeremy Branson
Richard Garwin
Original Assignee
Jeremy Branson
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeremy Branson filed Critical Jeremy Branson
Priority to PCT/US2007/005861 priority Critical patent/WO2008108768A1/fr
Publication of WO2008108768A1 publication Critical patent/WO2008108768A1/fr

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Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03HHOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/02Details of features involved during the holographic process; Replication of holograms without interference recording
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/06Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03HHOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/22Processes or apparatus for obtaining an optical image from holograms
    • G03H1/2294Addressing the hologram to an active spatial light modulator
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03HHOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/22Processes or apparatus for obtaining an optical image from holograms
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03HHOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/02Details of features involved during the holographic process; Replication of holograms without interference recording
    • G03H2001/0208Individual components other than the hologram
    • G03H2001/0224Active addressable light modulator, i.e. Spatial Light Modulator [SLM]
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03HHOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04Processes or apparatus for producing holograms
    • G03H1/08Synthesising holograms, i.e. holograms synthesized from objects or objects from holograms
    • G03H1/0841Encoding method mapping the synthesized field into a restricted set of values representative of the modulator parameters, e.g. detour phase coding
    • G03H2001/0858Cell encoding wherein each computed values is represented by at least two pixels of the modulator, e.g. detour phase coding
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03HHOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H2223/00Optical components
    • G03H2223/13Phase mask
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03HHOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H2225/00Active addressable light modulator
    • G03H2225/20Nature, e.g. e-beam addressed
    • G03H2225/22Electrically addressed SLM [EA-SLM]
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03HHOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H2225/00Active addressable light modulator
    • G03H2225/20Nature, e.g. e-beam addressed
    • G03H2225/24Having movable pixels, e.g. microelectromechanical systems [MEMS]
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03HHOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H2225/00Active addressable light modulator
    • G03H2225/30Modulation
    • G03H2225/33Complex modulation
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03HHOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H2225/00Active addressable light modulator
    • G03H2225/55Having optical element registered to each pixel

Definitions

  • This invention relates generally to the fields of complex Spatial Light Modulators (SLM's) and optical computing; more particularly it relates to the field of complex transform generation using reflective or transmissive spatial light modulation.
  • SLM's Spatial Light Modulators
  • optical computing more particularly it relates to the field of complex transform generation using reflective or transmissive spatial light modulation.
  • SLM Spatial light modulators
  • SLM's have many uses including but not limited to projection, holography, optical switching, and optical computing.
  • SLM's may be static or temporal. SLM's come in a wide variety of types including film based , liquid crystal device (LCD ) based, and micro-electro-mechanical (MEM's) based.
  • a diffraction grating is a simple example of a static SLM; a holographic lens or hologram is a less simple example.
  • Fig. 1 shows a sketch of a plane wave light beam (or parallel light beam) 10 having flat planes of equal phase shown by lines 12 incident on a transmission diffraction grating 14. Light is diffracted from diffraction grating 14, and two orders of diffraction 16 and 18 are shown.
  • the parallel light beam 10 can be considered a beam of light uniform in space and in time having only one of the two parts which make up a more complex beam.
  • the two parts of the light beam the "real" and the "imaginary” part, since in the mathematical representation of the light fields the two parts are described by a real number and an imaginary number, and in graphical representations the light field is represented by a vector in the two dimensional complex plane which has a "real" axis and an "imaginary” axis.
  • the vector has two components, a "real" component and an "imaginary” component.
  • the amplitude of the electric field vector of the light wave is given by the length of the vector, and the phase of the light field by the angle which the vector makes with, by convention, the "real axis".
  • the phase of the light field is given in degrees (from 0 to 360 degrees) or by radians (from 0 to 2 ⁇ radians).
  • the real component' is spatially modulated by letting only certain spatial components through the transmission grating, and the spatial modulation of the real part of the light beam 10 produces diffracted light in various orders, of which only two are shown.
  • Fig. 2 shows a more complicated thick film hologram 24 where most of the incoming light 10 is thrown in one diffraction order 28.
  • the surfaces of equal phase are shown as more complicated surfaces than planes, and the information contained in the thick film hologram is carried in the . outgoing wave.
  • the hologram 24 produces an output wave 28 which has both real and imaginary parts, and both the real and imaginary parts may have spatial modulation.
  • the production of such holograms 24 is well known to one of skill in the holographic art, and the resultant holographic reconstructions of the- original complicated optical signal have been on view since the 1960's.
  • FIG. 1 can be thought of as a simple hologram, where a light wave having only a real component incident generates a light wave also having only a real. component.
  • the reconstructed light wave signals shown in Figs. 1 and 2, however, are static and do not change in time.
  • Transmissive SLM's. are exemplified by Liquid Crystal Display (LCD) SLM's such as are found in the screens of most laptop computers.
  • LCD SLM's can be filled with various liquid crystal types and topologies to spatially and temporally modulate amplitude of a light beam. These types of devices carry with them the drawbacks of state of the art LCD's including limited .contrast ratios and limited switching speeds.
  • Reflective SLM's are exemplified by arrays of micromirrors.
  • micromirror SLM An example of a micromirror SLM is made by Texas Instruments.
  • the micromirrors can be made to adjust their positions and/or angles to modulate the amplitude of portions of a light beam.
  • LCD's can be operated in a reflective mode where the light passes twice through the liquid crystal material.
  • Such LCD SLM's are exemplified by liquid crystal on silicon (LCOS) devices used in front and back projection systems.
  • LCOS liquid crystal on silicon
  • a micromirror array can be as simple as a prior art array of static mirrors fabricated on an absorbing substrate using standard MEMs techniques.
  • a hologram can be displayed, for example, by an array having pattern of missing mirrors. Such holograms are equivalent to the diffraction grating of Fig. 1 which modulate only one component of the light beam, and which are called "thin film holograms"
  • the mirrors can be made to turn on and off to modify the light beam temporally.
  • One way to do this is to tilt the mirrors of the array.
  • In the "on” state mirrors reflect light into the target or a lens to be projected on to a target.
  • the “off' state mirrors are tilted to throw away light into a direction other than the target, generally to an absorber to absorb the light and prevent stray light.
  • An example of the technology is the Texas Instruments Digital Light Processor (DLP) micro mirror Array.
  • DLP Digital Light Processor
  • One of their very successful products employs square mirrors of 16 microns on a side, spaced 17 microns apart. During the last year, the standard mirror size has been reduced to 14 microns, indicating that the industry is continuing to shrink mirror size and continue general developmental progress. The type of contribution made by the light reflected by an individual mirror can depend on the application.
  • each mirror When used in a lensed projection system, for example, each mirror will reflect a small amount of light that corresponds to a single pixel in the spatial domain in the same way that a single light valve corresponds to a single pixel in a LCD display.
  • a mirror In the "on" state, a mirror reflects lieht into the projection screen.
  • the mirror In the “off' state, the mirror is tilted to throw away its light into a direction other than the projection screen. This can be considered a form of magnitude-only amplitude modulation in the spatial domain.
  • Real and imaginary parts of a. light beam are produced by spatially separating the light beam into a large plurality of interspersed light beams, wherein each of the interspersed light beams has one of at least two phases fixed with respect to the phases of each of the other interspersed light beams, and the amplitude of the real and imaginary parts of the light beam are controlled in a spatially and time resolved manner over the cross section of the light beam by controlling the amplitude of each of the large plurality of interspersed light beams.
  • Fig. 1 shows a sketch of use of a prior art transrnissior
  • Fig. 2 shows a sketch of a use of prior art hologram.
  • Fig. 3 shows a sketch of an embodiment of the invention.
  • Fig. 4 shows a sketch of an embodiment of the invention.
  • Fig. 5 shows a sketch of an embodiment of the invention.
  • Fig. 6 shows a sketch of a device for separation of phases.
  • Fig. 7 shows a sketch of an embodiment of the invention.
  • Fig. 8 shows a sketch of a prior art micromirror device.
  • Fig. 9 shows a sketch of an embodiment of the invention.
  • Fig. 10 shows a sketch of an embodiment of the invention.
  • Fig. 1 1 shows a sketch of an embodiment of the invention.
  • Fig. 1 shows a sketch of an embodiment of the invention.
  • Fig. 12 shows a sketch of the most preferred embodiment of the invention.
  • Fig. 13 shows a sketch of a stage of manufacture of the most preferred embodiment of the invention.
  • Fig. 14 shows a sketch of an embodiment of the invention.
  • Fig. 15 shows a sketch of a random or pseudo random arrangement of phase delays.
  • Fig. 16 shows a sketch of an arrangement of phase delays.
  • the inventors have realized that it is very much easier to temporally modulate the magnitude of a light field with fixed phase than to temporally modulate the phase of a light field with fixed amplitude.
  • a large plurality of light beams is defined as more than 100 light beams. More preferably, a large plurality of light beams is defined as more than 1000 light beams. Most preferably, a large plurality of light beams is defined as more than 100,000 light beams.
  • two phases are chosen for the different phases, but three or more phases are more preferable. Most preferably , 4 phases are chosen for the number of fixed phases of the interspersed light beams.
  • interspersed light beams now have their amplitudes modulated.
  • the light field resulting from the combination of the modulated interspersed light beams is now a light field modulated in both amplitude and phase.
  • a large number of such groups of interspersed light beams is used to project a holographic image or for other applications as will be obvious to one of skill in the art of manipulation of light.
  • FIG. 3 shows an embodiment of an apparatus of the invention.
  • a light beam 10 having wavelength ⁇ is shown impinging on a prior art LCD device 30. Again, by convention, we say that light beam 10 has only a real component.
  • a polarizer 31 lets light of one polarization through a transparent support structure 32.
  • a layer 33 has transparent electrodes 38, each of which is separately addressable to impress an electric field across a liquid crystal material 34.
  • a transparent electrode 35 cooperates with electrodes 38 in impressing the spatially resolved electric field across the liquid crystal material 34.
  • Support structure 36 and polarizer 37 complete the prior art device. Not shown are other layers which are well known to those skilled in the art of LCD devices, and which are involved in structuring the liquid crystal material. If light beam 10 is polarized correctly, polarizing layer 31 is optional.
  • the present invention is exemplified by the addition of phase retarding materials 39, which are registered and aliened with respect to some of the electrodes 38. If all the t phase retarding material 39 breaks the light beam 10 into a large plurality of light beams, each of which has one of two phases with respect to the other light beams of the large plurality. Most preferably, the two phase differences are 0 and approximately 90 degrees. If the index of refraction of the materials 39 is. « for a given wavelength , the height h should be equal to ⁇ / 4( n - l). The index of refraction n varies slightly with wavelength, but the height h of the materials 39 determines the retardation to first order.
  • the apparatus of Fig. 3 thus produces a large plurality of interspersed light beams, each of which is either real or imaginary, and each of which can be amplitude modulated by controlling voltages across the liquid crystal material 34.
  • both imaginary and real components of the resultant beam can be controlled by appropriate control of the electrodes 38.
  • the design wavelength ⁇ is used, so that the interspersed light beams have phases of 0 degrees and 90 degrees, and-a resultant beam with phase 45degrees is required, the amplitude of the 0 degree beams and the 90 degree beams will be set equal.
  • the 0 degree beam will be attenuated more by a calculated amount than the 80 degree beam to bring the resultant phase angle to 45 degrees and the amplitude of the electric field to the required amplitude.
  • the apparatus of Fig. 3 is thus suitable for controllins lieht havine wavelenpth significantly different from the design wavelength ⁇ , and can indeed be used to provide temporally and spatially varying color holograms by providing sequential color inputs and sequentially changing amplitudes for each of the interspersed beams.
  • Fig. 3 shows a preferred device for temporally and spatially controlling both real and imaginary components of a light beam.
  • better control the light beam can be achieved by using more phases of the light beam, especially if the control is a dieital control with individual K ⁇ ht beams either on or off.
  • Fig. 4 shows a more preferal heights of material such as material 39 are used to retard various portions of light beam 10.
  • a thickness h of material 42 is used to retard one set of light beams 43 by 90 degrees
  • further thicknesses 2 h at 44 and 3 h at 46 of the material are used to give retardations of 180 and 270 degrees for light beams 45 and 47 with respect to light beams 41 exiting through positions 40 which have no phase shifting material added.
  • three phases of light are more preferable than two, 4 phases are even more preferred, and are available with only one more lithography step (for lithographically produced height variations) than used for the two phase set up of Fig. 3.
  • Fig. 5 shows a device using an LCD in a reflection mode.
  • Light beam 10 now makes two passes through the LC material and the phase retarding material 59 which is covered over with reflecting material 52, which is now required to be only half as thick as the material of Fig. 3 for the same phase retardation.
  • Changes to the LCD device 50 to make it work as a reflection device are well known to those of skill in the art of LCD devices.
  • a more preferred reflection LCD device has three different thicknesses of phase retarding material in analogy with Fig. 4, which gives interspersed beams having 4 different phases.
  • Figs. 3 through 5 show embodiments of the invention where the phase changing elements of the invention are attached to the amplitude modulating elements of the invention.
  • the inventors anticipate that these elements may be separated in space as using an element as shown in Fi ⁇ 6
  • Fig. 6 shows a substrate 60 having a reflecting surface 62.
  • One dimensional grooves 64 are shown formed in surface 62, where the grooves have depth of ⁇ / 8 ,
  • a light wave 10 having wavelength ⁇ incident on surface 62 will produce a large plurality of light beams 66 ahd 68, each of which has a fixed phase difference with respect to each other light beam, where the phase difference will be 90 degrees or zero.
  • the device of fig. 6 will move the resultant light beam in one dimension and may be used, for example, as an optical router.
  • the element of Fig. 6 is then used in an optical systei incident on element 60 and the reflected light beams 66 and 68 are collected by lens 70 and sent to a standard SLM 72... in the case shown a reflecting SLM.
  • the grooves 64 are imaged on corresponding pixels of the SLM 72, which amplitude modulates the interspersed light beams 66 and 68 focused on the pixel controllers of SLM 72, and produce a light beam 74 where the real and imaginary parts of light beam 74 are separately amplitude modulated.
  • the reflective device of Fig. 6 could equally well be a transmissive device where phase shifting is accomplished using different paths lengths in a material of index of refraction greater than 1.
  • Fig. 7 used to break the light beam 10 into a large plurality of light beams having different phases is also anticipated to have a two dimensional pattern which is matched optically to a two dimensional pattern of SLM 72.
  • Fig. 8 shows a prior art SLM micromirror device 80.
  • Micromirrors 82 and 84 are shown tilted at different angles to throw light 10 incident on the SLM micromirror device 80 into one of two directions 86 and 88.
  • each mirror 82 and 84 When used in a lensless holographic display, for example, each mirror 82 and 84 reflects small amount of light in the same way that an area in a film hologram which is unexposed, developed, and fixed transmits a small amount of coherent light in a film hologram.
  • a mirror In the "on" state, a mirror reflects light into the target.
  • the mirror In the “off state, the mirror is tilted to throw awav its lipht into a direction other than the target in the same way that the exposed, developed, and fixed film ⁇ absorbs the light.
  • This special case can also be considered a form of real-only amplitude modulation.
  • the collection of mirrors necessarily forms at least two images, one of the plus 1 order and one of the minus 1 order Unlike standard holograms, however, the mirrors can turn on and off to form moving and changing images.
  • Fig. 9 shows a sketch of a preferred embodiment of the invention in a cross sectional view of device 80 having a transparent cover 90 with attache respect to the underlying micromirrors 82 and 84.
  • Light beam 10 incident on the material 99 will be transmitted through material 99 and the cover plate 90 to strike an underlying mirror, and will be reflected back through material 99 to form a light beam interspersed with light beams reflected without passing through material 99. If the thickness of material 99 is correctly chosen, the reflected light beam will have a phase shift of approximately 90 degrees with respect to its neighboring light beams which did not pass through the material 99, in analogy with the sketch of Fig. 5.
  • Fig. 10 shows a preferred embodiment of the invention, where three thicknesses of transparent material matched to the underlying micromirrors is arranged to give 4 phases of interspersed light beams. Each of the interspersed light beams are amplitude modulated by switching the mirrors to throw light into 102 or away 104 from an optical system (not shown).
  • Fig. 11 shows a preferred embodiment of the invention, where some of the micromirrors have material 1 10 having a reflecting surface coated on the micromirrors.
  • a thickness ⁇ / 8 of material 110 is sufficient to introduce a phase delay of 90 degrees between the light beams reflected from the coated and uncoated mirrors ' .
  • FIG. 12 shows the most preferred embodiment of the invention.
  • a micromirror device has 1 mirrors 120 with no coating, mirrors 122 with a layer ⁇ / 8 of reflecting coating material
  • phase difference approximately 0, 90, 180, or 270 degrees from each of the other light beams.
  • Each of the light beams are modulated (in this case, turned on or off) by tilting the mirrors one
  • Fig. 13 shows the micromirror device in a construction phase, wherein the mirrors are formed on
  • FIG. 10 structure of Fig. 13 is formed from a standard micromirror part with two lithography steps, and a
  • the mirrors lie in one of 4 planes, each plane separated from the next by ⁇ / 8 .
  • Fig. 14 shows a sketch of 4 micromirrors, each having a different "plane" of reflectivity.
  • 20 layer may be identical, for example'aluminum, and so the mirrors would appear to.be uniform but
  • Fig. 15 depicts a layout of a two phase array where the phases are arranged in a random or
  • Fig. 16 shows an arrangement for a four phase array, where the phase differences are arranged in alternating left and right hand spirals.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)

Abstract

L'invention concerne un dispositif à micromiroir ou à réseau LCD complexe exécutant des transformées optiques ou électro-optiques complexes. Les parties réelles et imaginaires d'un faisceau de lumière sont modulées en amplitude pour obtenir un faisceau modulé d'un point de vue spatiotemporel.
PCT/US2007/005861 2007-03-06 2007-03-06 Appareil de commande électronique d'hologrammes WO2008108768A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/US2007/005861 WO2008108768A1 (fr) 2007-03-06 2007-03-06 Appareil de commande électronique d'hologrammes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US2007/005861 WO2008108768A1 (fr) 2007-03-06 2007-03-06 Appareil de commande électronique d'hologrammes

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Publication Number Publication Date
WO2008108768A1 true WO2008108768A1 (fr) 2008-09-12

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016120131A1 (fr) * 2015-01-28 2016-08-04 Seereal Technologies S.A. Dispositif de modulation de lumière

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5225920A (en) * 1990-04-06 1993-07-06 Matsushita Electric Industrial Co., Ltd. Liquid crystal modulator including a diffuser with plural phase shifting regions
US5311360A (en) * 1992-04-28 1994-05-10 The Board Of Trustees Of The Leland Stanford, Junior University Method and apparatus for modulating a light beam
US6829092B2 (en) * 2001-08-15 2004-12-07 Silicon Light Machines, Inc. Blazed grating light valve
US6846082B2 (en) * 2000-01-21 2005-01-25 Dicon A/S Rear-projecting device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5225920A (en) * 1990-04-06 1993-07-06 Matsushita Electric Industrial Co., Ltd. Liquid crystal modulator including a diffuser with plural phase shifting regions
US5311360A (en) * 1992-04-28 1994-05-10 The Board Of Trustees Of The Leland Stanford, Junior University Method and apparatus for modulating a light beam
US6846082B2 (en) * 2000-01-21 2005-01-25 Dicon A/S Rear-projecting device
US6829092B2 (en) * 2001-08-15 2004-12-07 Silicon Light Machines, Inc. Blazed grating light valve

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016120131A1 (fr) * 2015-01-28 2016-08-04 Seereal Technologies S.A. Dispositif de modulation de lumière
CN107371380A (zh) * 2015-01-28 2017-11-21 视瑞尔技术公司 光调制装置
CN107371380B (zh) * 2015-01-28 2020-10-02 视瑞尔技术公司 光调制装置

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