WO2008108246A1 - 基板洗浄装置 - Google Patents

基板洗浄装置 Download PDF

Info

Publication number
WO2008108246A1
WO2008108246A1 PCT/JP2008/053408 JP2008053408W WO2008108246A1 WO 2008108246 A1 WO2008108246 A1 WO 2008108246A1 JP 2008053408 W JP2008053408 W JP 2008053408W WO 2008108246 A1 WO2008108246 A1 WO 2008108246A1
Authority
WO
WIPO (PCT)
Prior art keywords
chemical solution
cartridge
solution cartridge
remaining quantity
supplying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/053408
Other languages
English (en)
French (fr)
Inventor
Norikazu Hoshi
Masato Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Sharp Corp
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp, Dainippon Screen Manufacturing Co Ltd filed Critical Sharp Corp
Priority to US12/529,875 priority Critical patent/US20100108106A1/en
Priority to CN2008800068469A priority patent/CN101622696B/zh
Publication of WO2008108246A1 publication Critical patent/WO2008108246A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/048—Overflow-type cleaning, e.g. tanks in which the liquid flows over the tank in which the articles are placed
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/133302—Rigid substrates, e.g. inorganic substrates

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Pipeline Systems (AREA)

Abstract

　薬液カートリッジ（２９）から薬液供給部（２７）を介して純水に薬液を混合させて処理液を生成させ、供給管を介して処理槽に処理液を供給させる。薬液カートリッジ（２９）には、補充ラインなどから薬液が補充されることがなく、薬液が汚染されることがないので、薬液の清浄度を高く維持することができる。したがって、清浄度高く基板を洗浄することができる。また、薬液カートリッジ（２９）は、残量表示部（３９）を備えているので、薬液カートリッジ（２９）内の薬液残量を容易に知ることができ、薬液カートリ ッジ（２９）の定期的な交換時期を容易に知ることができる。また、薬液カートリッジ（２９）は、ノズル部（４７）により流量を調整可能に構成されているので、薬液カートリッジ（２９）を供給配管に直接取り付けることができ、構造を簡易化することができる。したがって、装置コストを低減することができる。
PCT/JP2008/053408 2007-03-05 2008-02-27 基板洗浄装置 Ceased WO2008108246A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US12/529,875 US20100108106A1 (en) 2007-03-05 2008-02-27 Substrate cleaning apparatus
CN2008800068469A CN101622696B (zh) 2007-03-05 2008-02-27 基板清洗装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-053984 2007-03-05
JP2007053984A JP4630881B2 (ja) 2007-03-05 2007-03-05 基板洗浄装置

Publications (1)

Publication Number Publication Date
WO2008108246A1 true WO2008108246A1 (ja) 2008-09-12

Family

ID=39738130

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/053408 Ceased WO2008108246A1 (ja) 2007-03-05 2008-02-27 基板洗浄装置

Country Status (4)

Country Link
US (1) US20100108106A1 (ja)
JP (1) JP4630881B2 (ja)
CN (1) CN101622696B (ja)
WO (1) WO2008108246A1 (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5492068B2 (ja) * 2010-12-21 2014-05-14 パナソニック株式会社 洗浄水吐出装置
JP6740072B2 (ja) * 2016-09-27 2020-08-12 株式会社Ｓｃｒｅｅｎホールディングス 洗浄液カートリッジおよび該洗浄液カートリッジを用いた洗浄方法
IT201800006844A1 (it) * 2018-07-02 2020-01-02 Sistema di riscaldamento controllato a pressione e flusso costante per acqua idoneo per sistemi di dosaggio solidi e liquidi
KR102591074B1 (ko) * 2022-05-12 2023-10-19 에이펫(주) 반도체 기판 처리용 유체 공급 노즐 및 이를 포함하는 반도체 기판 처리 장치
CN117316812B (zh) * 2023-08-14 2024-11-26 深圳远荣半导体设备有限公司 一种晶圆清洗机及晶圆搬运的方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1167707A (ja) * 1997-08-14 1999-03-09 Dainippon Screen Mfg Co Ltd 基板処理装置
JP2000058492A (ja) * 1993-08-06 2000-02-25 Dainippon Screen Mfg Co Ltd 基板の浸漬処理装置
JP2005057181A (ja) * 2003-08-07 2005-03-03 Matsushita Electric Ind Co Ltd 薬液供給装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1359116A (en) * 1919-12-19 1920-11-16 Bernard H Skelly Force-feed lubricator
US4662387A (en) * 1985-10-03 1987-05-05 King Lloyd H Sr Inline dispersal valve
US6068204A (en) * 1999-03-04 2000-05-30 Alexander; Marcus Hose end dispenser
WO2002015241A1 (en) * 2000-08-17 2002-02-21 Mattson Technology Ip Systems and methods for forming processing streams
US6926929B2 (en) * 2002-07-09 2005-08-09 Molecular Imprints, Inc. System and method for dispensing liquids
US7398787B2 (en) * 2004-10-18 2008-07-15 Unilever Home & Personal Care Usa Division Of Conopco, Inc. Automatic dispensing device for laundry care composition
US8015984B2 (en) * 2005-06-22 2011-09-13 Tokyo Electron Limited Substrate processing apparatus including a drying mechanism using a fluid mixture of purified water and a volatile organic solvent
JP2007012859A (ja) * 2005-06-30 2007-01-18 Dainippon Screen Mfg Co Ltd 基板処理装置および基板処理方法
JP4672464B2 (ja) * 2005-06-30 2011-04-20 東京エレクトロン株式会社 洗浄装置および洗浄方法、ならびにコンピュータにより読取可能な記憶媒体

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000058492A (ja) * 1993-08-06 2000-02-25 Dainippon Screen Mfg Co Ltd 基板の浸漬処理装置
JPH1167707A (ja) * 1997-08-14 1999-03-09 Dainippon Screen Mfg Co Ltd 基板処理装置
JP2005057181A (ja) * 2003-08-07 2005-03-03 Matsushita Electric Ind Co Ltd 薬液供給装置

Also Published As

Publication number Publication date
CN101622696B (zh) 2012-01-25
US20100108106A1 (en) 2010-05-06
JP2008218701A (ja) 2008-09-18
CN101622696A (zh) 2010-01-06
JP4630881B2 (ja) 2011-02-09

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