WO2008099717A1 - スクラップウエハ再利用方法および太陽電池用シリコン基板の製造方法 - Google Patents

スクラップウエハ再利用方法および太陽電池用シリコン基板の製造方法 Download PDF

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Publication number
WO2008099717A1
WO2008099717A1 PCT/JP2008/051877 JP2008051877W WO2008099717A1 WO 2008099717 A1 WO2008099717 A1 WO 2008099717A1 JP 2008051877 W JP2008051877 W JP 2008051877W WO 2008099717 A1 WO2008099717 A1 WO 2008099717A1
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WO
WIPO (PCT)
Prior art keywords
scrap
wafers
recycling
silicon
silicon substrate
Prior art date
Application number
PCT/JP2008/051877
Other languages
English (en)
French (fr)
Inventor
Tetsuo Suzuki
Takayuki Hirano
Jun Miyazaki
Yoshihiko Onishi
Hidetoshi Inoue
Original Assignee
Kabushiki Kaisha Kobe Seiko Sho
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kabushiki Kaisha Kobe Seiko Sho filed Critical Kabushiki Kaisha Kobe Seiko Sho
Priority claimed from JP2008025251A external-priority patent/JP2008218993A/ja
Publication of WO2008099717A1 publication Critical patent/WO2008099717A1/ja

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/60—Preparation of carbonates or bicarbonates in general
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B09—DISPOSAL OF SOLID WASTE; RECLAMATION OF CONTAMINATED SOIL
    • B09B—DISPOSAL OF SOLID WASTE
    • B09B3/00—Destroying solid waste or transforming solid waste into something useful or harmless
    • B09B3/20—Agglomeration, binding or encapsulation of solid waste
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02W—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO WASTEWATER TREATMENT OR WASTE MANAGEMENT
    • Y02W30/00—Technologies for solid waste management
    • Y02W30/20—Waste processing or separation

Abstract

　再利用する際に資源の無駄を少なくし、シリコンウエハを溶解することなく再生インゴットにすることで、単結晶に近い状態で再利用できるスクラップウエハ再利用方法および太陽電池用シリコン基板の製造方法を提供することを課題とする。 　スクラップウエハ再利用方法は、スクラップウエハＷに形成された膜を除去する膜除去工程Ｓ３と、スクラップウエハの膜を除去した表裏面を鏡面に研磨する鏡面研磨工程Ｓ５と、鏡面に研磨されたスクラップウエハの結晶方位を揃えて重ね合わせ、円柱状に整列させる整列工程Ｓ８と、円柱状に整列させた前記スクラップウエハを加熱炉に入れて４００°C～１３５０°Cの範囲で加熱することで前記スクラップウエハ同士を拡散接合させ再生インゴットＩＧを製造する加熱工程Ｓ９と、を含む手順とした。
PCT/JP2008/051877 2007-02-09 2008-02-05 スクラップウエハ再利用方法および太陽電池用シリコン基板の製造方法 WO2008099717A1 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2007030750 2007-02-09
JP2007-030750 2007-11-07
JP2008-025251 2008-02-05
JP2008025251A JP2008218993A (ja) 2007-02-09 2008-02-05 スクラップウエハ再利用方法および太陽電池用シリコン基板の製造方法

Publications (1)

Publication Number Publication Date
WO2008099717A1 true WO2008099717A1 (ja) 2008-08-21

Family

ID=39689961

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/051877 WO2008099717A1 (ja) 2007-02-09 2008-02-05 スクラップウエハ再利用方法および太陽電池用シリコン基板の製造方法

Country Status (1)

Country Link
WO (1) WO2008099717A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130153018A1 (en) * 2011-12-16 2013-06-20 Lg Electronics Inc. Solar cell and method for manufacturing the same
CN113471067A (zh) * 2021-07-28 2021-10-01 上海申和热磁电子有限公司 一种废晶圆表面膜剥离再生处理工艺及其装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05270814A (ja) * 1992-03-23 1993-10-19 Kawasaki Steel Corp 太陽電池用シリコンの製造方法
JP2000174295A (ja) * 1998-12-04 2000-06-23 Mitsubishi Electric Corp 太陽電池用シリコン結晶の製造方法
JP2005123541A (ja) * 2003-10-20 2005-05-12 Teikoku Ion Kk 使用済シリコン単結晶基板の再生方法
JP2005343781A (ja) * 2004-06-03 2005-12-15 Iis Materials:Kk 電子ビームを用いたスクラップシリコンの精錬方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05270814A (ja) * 1992-03-23 1993-10-19 Kawasaki Steel Corp 太陽電池用シリコンの製造方法
JP2000174295A (ja) * 1998-12-04 2000-06-23 Mitsubishi Electric Corp 太陽電池用シリコン結晶の製造方法
JP2005123541A (ja) * 2003-10-20 2005-05-12 Teikoku Ion Kk 使用済シリコン単結晶基板の再生方法
JP2005343781A (ja) * 2004-06-03 2005-12-15 Iis Materials:Kk 電子ビームを用いたスクラップシリコンの精錬方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130153018A1 (en) * 2011-12-16 2013-06-20 Lg Electronics Inc. Solar cell and method for manufacturing the same
US8969125B2 (en) * 2011-12-16 2015-03-03 Lg Electronics Inc. Solar cell and method for manufacturing the same
US9634160B2 (en) 2011-12-16 2017-04-25 Lg Electronics Inc. Solar cell and method for manufacturing the same
CN113471067A (zh) * 2021-07-28 2021-10-01 上海申和热磁电子有限公司 一种废晶圆表面膜剥离再生处理工艺及其装置
CN113471067B (zh) * 2021-07-28 2022-11-29 上海申和投资有限公司 一种废晶圆表面膜剥离再生处理工艺及其装置

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