WO2008096881A1 - プラズマ生成用Pt・Rh系電極、プラズマ生成装置及びプラズマ処理装置 - Google Patents
プラズマ生成用Pt・Rh系電極、プラズマ生成装置及びプラズマ処理装置 Download PDFInfo
- Publication number
- WO2008096881A1 WO2008096881A1 PCT/JP2008/052202 JP2008052202W WO2008096881A1 WO 2008096881 A1 WO2008096881 A1 WO 2008096881A1 JP 2008052202 W JP2008052202 W JP 2008052202W WO 2008096881 A1 WO2008096881 A1 WO 2008096881A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- plasma
- producing
- electrode
- processing apparatus
- plasma producing
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/32—Plasma torches using an arc
- H05H1/34—Details, e.g. electrodes, nozzles
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/28—Cooling arrangements
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Plasma Technology (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
本発明の目的は、放電によりプラズマを発生させた場合に損耗材料粒子の放出が大幅に低減化され、電極損耗が極めて少なく、長寿命のプラズマ生成用電極、プラズマ生成装置及びプラズマ処理装置を提供することである。 本発明は、放電によって供給ガスのプラズマPを発生させるプラズマ生成装置7のプラズマ生成用電極であって、このプラズマ生成用電極の少なくとも放電表面がPt1-YRhY(0<Y<1)で表されるPt・Rh系金属の電極材料から形成されるプラズマ生成用電極、このプラズマ生成用電極を用いてプラズマを生成するプラズマ生成装置7及びこのプラズマ生成装置により被処理物表面をプラズマ処理するプラズマ処理装置2である。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008557185A JP5368114B2 (ja) | 2007-02-09 | 2008-02-08 | プラズマ生成用Pt・Rh系電極、プラズマ生成装置及びプラズマ処理装置 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPPCT/JP2007/052803 | 2007-02-09 | ||
PCT/JP2007/052803 WO2008096454A1 (ja) | 2007-02-09 | 2007-02-09 | プラズマ生成用Pt・Rh系電極、プラズマ生成装置及びプラズマ処理装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2008096881A1 true WO2008096881A1 (ja) | 2008-08-14 |
Family
ID=39681373
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2007/052803 WO2008096454A1 (ja) | 2007-02-09 | 2007-02-09 | プラズマ生成用Pt・Rh系電極、プラズマ生成装置及びプラズマ処理装置 |
PCT/JP2008/052202 WO2008096881A1 (ja) | 2007-02-09 | 2008-02-08 | プラズマ生成用Pt・Rh系電極、プラズマ生成装置及びプラズマ処理装置 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2007/052803 WO2008096454A1 (ja) | 2007-02-09 | 2007-02-09 | プラズマ生成用Pt・Rh系電極、プラズマ生成装置及びプラズマ処理装置 |
Country Status (1)
Country | Link |
---|---|
WO (2) | WO2008096454A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011049103A (ja) * | 2009-08-28 | 2011-03-10 | Nissan Motor Co Ltd | プラズマ発生方法 |
JP2011060688A (ja) * | 2009-09-14 | 2011-03-24 | Kasuga Electric Works Ltd | プラズマ表面処理装置 |
KR20190067885A (ko) * | 2016-11-30 | 2019-06-17 | 지앙수 페이보레드 나노테크놀로지 컴퍼니., 리미티드 | 플라즈마 중합 코팅 장치 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013538288A (ja) * | 2010-07-21 | 2013-10-10 | ダウ コーニング フランス | 基板のプラズマ処理 |
MX2014009032A (es) * | 2012-01-27 | 2014-10-17 | Sulzer Metco Inc | Enfriamiento de circuito cerrado de una pistola de plasma para mejorar la vida de sus componentes. |
EP3043628B1 (en) * | 2015-01-08 | 2021-03-10 | Tantec A/S | Automatic gas control system for plasma treatment |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03225727A (ja) * | 1990-01-17 | 1991-10-04 | Esab Welding Prod Inc | プラズマアークトーチ用電極 |
JPH0780724A (ja) * | 1993-09-14 | 1995-03-28 | Fuji Xerox Co Ltd | 非導電性材料の放電加工装置 |
JPH07282953A (ja) * | 1994-04-07 | 1995-10-27 | Toshiba Corp | コロナ放電用電極および静電気除去装置 |
JPH08250056A (ja) * | 1995-03-07 | 1996-09-27 | Himu Electro Kk | イオン発生装置およびこのイオン発生装置を用いた洗浄装置 |
JP2002343535A (ja) * | 2001-05-21 | 2002-11-29 | Daikin Ind Ltd | ガス処理装置 |
-
2007
- 2007-02-09 WO PCT/JP2007/052803 patent/WO2008096454A1/ja active Application Filing
-
2008
- 2008-02-08 WO PCT/JP2008/052202 patent/WO2008096881A1/ja active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03225727A (ja) * | 1990-01-17 | 1991-10-04 | Esab Welding Prod Inc | プラズマアークトーチ用電極 |
JPH0780724A (ja) * | 1993-09-14 | 1995-03-28 | Fuji Xerox Co Ltd | 非導電性材料の放電加工装置 |
JPH07282953A (ja) * | 1994-04-07 | 1995-10-27 | Toshiba Corp | コロナ放電用電極および静電気除去装置 |
JPH08250056A (ja) * | 1995-03-07 | 1996-09-27 | Himu Electro Kk | イオン発生装置およびこのイオン発生装置を用いた洗浄装置 |
JP2002343535A (ja) * | 2001-05-21 | 2002-11-29 | Daikin Ind Ltd | ガス処理装置 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011049103A (ja) * | 2009-08-28 | 2011-03-10 | Nissan Motor Co Ltd | プラズマ発生方法 |
JP2011060688A (ja) * | 2009-09-14 | 2011-03-24 | Kasuga Electric Works Ltd | プラズマ表面処理装置 |
KR20190067885A (ko) * | 2016-11-30 | 2019-06-17 | 지앙수 페이보레드 나노테크놀로지 컴퍼니., 리미티드 | 플라즈마 중합 코팅 장치 |
KR102175721B1 (ko) * | 2016-11-30 | 2020-11-06 | 지앙수 페이보레드 나노테크놀로지 컴퍼니., 리미티드 | 플라즈마 중합 코팅 장치 |
Also Published As
Publication number | Publication date |
---|---|
WO2008096454A1 (ja) | 2008-08-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2008096881A1 (ja) | プラズマ生成用Pt・Rh系電極、プラズマ生成装置及びプラズマ処理装置 | |
WO2013173201A3 (en) | Method and apparatus for improved cutting life of a plasma arc torch | |
MX2010002441A (es) | Sistema de procesamiento de materiales autonomos y portatiles. | |
WO2009126204A8 (en) | High aspect ratio openings | |
IN2014CN02974A (ja) | ||
WO2008087843A1 (ja) | プラズマ処理装置、プラズマ処理方法及び記憶媒体 | |
WO2010114961A3 (en) | Plasma processing apparatus | |
FI20106395A0 (fi) | Laitteisto | |
WO2008005756A3 (en) | Apparatus for substrate processing and methods therefor | |
WO2011005807A3 (en) | Process to make electrochemically active/ inactive nanocomposite material | |
EP1986254A3 (en) | Composite particles for an electrode, production process thereof and electrochemical device | |
MY154372A (en) | Methodology for recycling ru and ru-alloy deposition targets & targets made of recycled ru and ru-based alloy powders | |
ZA200810525B (en) | Preheating of electrolytic cell | |
EP1449605A4 (en) | METHOD AND DEVICE FOR PRODUCING METAL POWDER | |
WO2008138945A3 (en) | Electrode for membrane electrolysis cells | |
TW200630505A (en) | Apparatus for producing carbon film and production method therefor | |
WO2009008474A1 (ja) | プラズマ処理方法およびプラズマ処理装置 | |
MX2009004065A (es) | Metodo y aparato para fabricacion de sustratos limpiados o sustratos limpios que son procesados adicionalmente. | |
MX2014006252A (es) | Celda de plasma no termica. | |
WO2008149741A1 (ja) | プラズマ処理装置のドライクリーニング方法 | |
IN2014KN00867A (ja) | ||
EP1921657A3 (en) | System and Method for Generating Ions and Radicals | |
TW201129499A (en) | Method for manufacturing carbide fine particles | |
WO2011118931A3 (ko) | 폐 루테늄(Ru) 타겟을 이용한 고순도화 및 미세화된 루테늄(Ru)분말 제조법 | |
RU2008151794A (ru) | Способ модификации поверхности материала |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 08711081 Country of ref document: EP Kind code of ref document: A1 |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2008557185 Country of ref document: JP |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 08711081 Country of ref document: EP Kind code of ref document: A1 |