WO2008093871A1 - Aluminum nitride sinter and process for producing the same - Google Patents
Aluminum nitride sinter and process for producing the same Download PDFInfo
- Publication number
- WO2008093871A1 WO2008093871A1 PCT/JP2008/051780 JP2008051780W WO2008093871A1 WO 2008093871 A1 WO2008093871 A1 WO 2008093871A1 JP 2008051780 W JP2008051780 W JP 2008051780W WO 2008093871 A1 WO2008093871 A1 WO 2008093871A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- aluminum nitride
- nitride sinter
- producing
- same
- sinter
- Prior art date
Links
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 title abstract 5
- 238000000034 method Methods 0.000 title abstract 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 2
- 229910052760 oxygen Inorganic materials 0.000 abstract 2
- 239000001301 oxygen Substances 0.000 abstract 2
- 239000000843 powder Substances 0.000 abstract 2
- 230000001464 adherent effect Effects 0.000 abstract 1
- 239000002131 composite material Substances 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 238000005245 sintering Methods 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/581—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/62605—Treating the starting powders individually or as mixtures
- C04B35/6261—Milling
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/62605—Treating the starting powders individually or as mixtures
- C04B35/62625—Wet mixtures
- C04B35/6264—Mixing media, e.g. organic solvents
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
- C30B29/403—AIII-nitrides
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3205—Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
- C04B2235/3208—Calcium oxide or oxide-forming salts thereof, e.g. lime
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3217—Aluminum oxide or oxide forming salts thereof, e.g. bauxite, alpha-alumina
- C04B2235/3222—Aluminates other than alumino-silicates, e.g. spinel (MgAl2O4)
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3224—Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
- C04B2235/3225—Yttrium oxide or oxide-forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
- C04B2235/54—Particle size related information
- C04B2235/5409—Particle size related information expressed by specific surface values
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
- C04B2235/652—Reduction treatment
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
- C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
- C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
- C04B2235/6567—Treatment time
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
- C04B2235/658—Atmosphere during thermal treatment
- C04B2235/6587—Influencing the atmosphere by vaporising a solid material, e.g. by using a burying of sacrificial powder
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/72—Products characterised by the absence or the low content of specific components, e.g. alkali metal free alumina ceramics
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/72—Products characterised by the absence or the low content of specific components, e.g. alkali metal free alumina ceramics
- C04B2235/721—Carbon content
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/72—Products characterised by the absence or the low content of specific components, e.g. alkali metal free alumina ceramics
- C04B2235/723—Oxygen content
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Structural Engineering (AREA)
- Inorganic Chemistry (AREA)
- Metallurgy (AREA)
- Crystallography & Structural Chemistry (AREA)
- Ceramic Products (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP08710758A EP2110366A4 (en) | 2007-02-02 | 2008-02-04 | Aluminum nitride sinter and process for producing the same |
JP2008556214A JP5419467B2 (en) | 2007-02-02 | 2008-02-04 | Aluminum nitride sintered body and method for producing the same |
US12/525,224 US8148283B2 (en) | 2007-02-02 | 2008-02-04 | Aluminum nitride sintered body |
KR1020097015954A KR101147029B1 (en) | 2007-02-02 | 2008-02-04 | Aluminum nitride sinter and process for producing the same |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007-024622 | 2007-02-02 | ||
JP2007024622 | 2007-02-02 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2008093871A1 true WO2008093871A1 (en) | 2008-08-07 |
Family
ID=39674171
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/051780 WO2008093871A1 (en) | 2007-02-02 | 2008-02-04 | Aluminum nitride sinter and process for producing the same |
Country Status (6)
Country | Link |
---|---|
US (1) | US8148283B2 (en) |
EP (1) | EP2110366A4 (en) |
JP (1) | JP5419467B2 (en) |
KR (1) | KR101147029B1 (en) |
CN (1) | CN101600671A (en) |
WO (1) | WO2008093871A1 (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010076995A (en) * | 2008-09-29 | 2010-04-08 | Denki Kagaku Kogyo Kk | Susceptor member for apparatus for manufacturing group iii-v compound semiconductor |
JP2010222201A (en) * | 2009-03-25 | 2010-10-07 | Tokuyama Corp | Method for producing aluminum nitride sintered body |
JP2010241679A (en) * | 2009-04-03 | 2010-10-28 | Sicrystal Ag | Method for producing low-oxygen aluminum nitride massive single crystal, and low-oxygen single crystal aluminum nitride substrate |
JP2011121812A (en) * | 2009-12-10 | 2011-06-23 | Tokuyama Corp | Aluminum nitride powder |
WO2020184319A1 (en) * | 2019-03-12 | 2020-09-17 | 三井金属鉱業株式会社 | Sputtering target material and method for producing same |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012056807A1 (en) * | 2010-10-25 | 2012-05-03 | 日本碍子株式会社 | Ceramic material, laminated body, member for semiconductor manufacturing device, and sputtering target member |
TWI450855B (en) * | 2011-08-04 | 2014-09-01 | Method for making a pure aluminum nitride substrate | |
EP3632843A4 (en) * | 2017-05-22 | 2021-03-03 | Toyo Aluminium Kabushiki Kaisha | Aluminum nitride-based powder and method for producing same |
JP6932995B2 (en) * | 2017-05-23 | 2021-09-08 | Tdk株式会社 | Nitride single crystal |
JP6725115B2 (en) | 2017-12-25 | 2020-07-15 | 昭和電工株式会社 | Alumina sintered body, abrasive grains, and grindstone |
KR20200081969A (en) | 2018-12-28 | 2020-07-08 | 한국세라믹기술원 | Composition for Sintering Aluminum Nitride and Aluminum Nitride Sintered Body |
KR102205085B1 (en) | 2018-12-31 | 2021-01-19 | 한국세라믹기술원 | Composition for High Strength Aluminum Nitride Sintering and High Strength Aluminum Nitride Sintered Body |
KR102299212B1 (en) | 2019-10-22 | 2021-09-09 | 한국세라믹기술원 | High Strength Aluminum Nitride Sintered Body |
WO2021210396A1 (en) * | 2020-04-14 | 2021-10-21 | 学校法人関西学院 | Manufacturing method of modified aluminum nitride raw material, modified aluminum nitride raw material, manufacturing method of aluminum nitride crystals, and downfall defect prevention method |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6325278A (en) | 1986-07-18 | 1988-02-02 | 株式会社トクヤマ | Manufacture of aluminum nitride sintered body |
JP2829247B2 (en) | 1994-09-05 | 1998-11-25 | 株式会社東芝 | Method for producing high thermal conductive aluminum nitride sintered body |
JP2856734B2 (en) | 1987-01-13 | 1999-02-10 | 株式会社東芝 | High thermal conductive aluminum nitride sintered body |
JP2005119953A (en) * | 2003-09-25 | 2005-05-12 | Tokuyama Corp | Aluminum nitride sintered compact and method of producing the same |
WO2006013899A1 (en) * | 2004-08-03 | 2006-02-09 | Tokuyama Corporation | Package for storing light emitting element and method for producing package for storing light emitting element |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5242872A (en) * | 1986-07-18 | 1993-09-07 | Tokuyama Soda Kabushiki Kaisha | Process for producing aluminum nitride sintered body |
US4847221A (en) * | 1987-01-13 | 1989-07-11 | Kabushiki Kaisha Toshiba | AlN sintered body having high thermal conductivity and a method of fabricating the same |
JP3461644B2 (en) * | 1995-12-06 | 2003-10-27 | 電気化学工業株式会社 | Aluminum nitride sintered body, its manufacturing method and circuit board |
EP1518843A3 (en) | 2003-09-25 | 2007-05-23 | Tokuyama Corporation | Aluminum nitride sintered body and method of producing the same |
JP2005166454A (en) * | 2003-12-03 | 2005-06-23 | Tokuyama Corp | Cover for light source |
JP4831953B2 (en) * | 2004-10-20 | 2011-12-07 | 住友電気工業株式会社 | Aluminum nitride sintered body |
JP4773744B2 (en) * | 2005-03-30 | 2011-09-14 | 株式会社トクヤマ | Method for producing aluminum nitride sintered body |
WO2007018140A2 (en) * | 2005-08-11 | 2007-02-15 | Tokuyama Corporation | Aluminum nitride sintered body |
-
2008
- 2008-02-04 US US12/525,224 patent/US8148283B2/en not_active Expired - Fee Related
- 2008-02-04 WO PCT/JP2008/051780 patent/WO2008093871A1/en active Application Filing
- 2008-02-04 KR KR1020097015954A patent/KR101147029B1/en not_active IP Right Cessation
- 2008-02-04 JP JP2008556214A patent/JP5419467B2/en not_active Expired - Fee Related
- 2008-02-04 CN CNA2008800037738A patent/CN101600671A/en active Pending
- 2008-02-04 EP EP08710758A patent/EP2110366A4/en not_active Withdrawn
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6325278A (en) | 1986-07-18 | 1988-02-02 | 株式会社トクヤマ | Manufacture of aluminum nitride sintered body |
JP2856734B2 (en) | 1987-01-13 | 1999-02-10 | 株式会社東芝 | High thermal conductive aluminum nitride sintered body |
JP2829247B2 (en) | 1994-09-05 | 1998-11-25 | 株式会社東芝 | Method for producing high thermal conductive aluminum nitride sintered body |
JP2005119953A (en) * | 2003-09-25 | 2005-05-12 | Tokuyama Corp | Aluminum nitride sintered compact and method of producing the same |
WO2006013899A1 (en) * | 2004-08-03 | 2006-02-09 | Tokuyama Corporation | Package for storing light emitting element and method for producing package for storing light emitting element |
Non-Patent Citations (2)
Title |
---|
G. A. SLACK; T. F. MCNELLY: "AlN single crystals", J. CRYST. GROWTH, vol. 34, 1976, pages 263 |
M. MIYANAGA ET AL.: "AlN Single Crystal Growth by Sublimation Method", SEI TECHNICAL REVIEW, no. 168, March 2006 (2006-03-01), pages 103 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010076995A (en) * | 2008-09-29 | 2010-04-08 | Denki Kagaku Kogyo Kk | Susceptor member for apparatus for manufacturing group iii-v compound semiconductor |
JP2010222201A (en) * | 2009-03-25 | 2010-10-07 | Tokuyama Corp | Method for producing aluminum nitride sintered body |
JP2010241679A (en) * | 2009-04-03 | 2010-10-28 | Sicrystal Ag | Method for producing low-oxygen aluminum nitride massive single crystal, and low-oxygen single crystal aluminum nitride substrate |
JP2011121812A (en) * | 2009-12-10 | 2011-06-23 | Tokuyama Corp | Aluminum nitride powder |
WO2020184319A1 (en) * | 2019-03-12 | 2020-09-17 | 三井金属鉱業株式会社 | Sputtering target material and method for producing same |
JPWO2020184319A1 (en) * | 2019-03-12 | 2021-10-14 | 三井金属鉱業株式会社 | Sputtering target material and its manufacturing method |
JP7077474B2 (en) | 2019-03-12 | 2022-05-30 | 三井金属鉱業株式会社 | Sputtering target material and its manufacturing method |
Also Published As
Publication number | Publication date |
---|---|
EP2110366A4 (en) | 2012-05-30 |
JPWO2008093871A1 (en) | 2010-05-20 |
KR20090115931A (en) | 2009-11-10 |
EP2110366A1 (en) | 2009-10-21 |
US8148283B2 (en) | 2012-04-03 |
US20100093514A1 (en) | 2010-04-15 |
JP5419467B2 (en) | 2014-02-19 |
CN101600671A (en) | 2009-12-09 |
KR101147029B1 (en) | 2012-05-17 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2008093871A1 (en) | Aluminum nitride sinter and process for producing the same | |
WO2010043968A3 (en) | Production of molybdenum metal powder | |
WO2011092149A3 (en) | Porous carbon product and method for the production thereof | |
EP2221287A4 (en) | Aluminum titanate based ceramic honeycomb structure, process for production of the same and raw material powder for the production thereof | |
WO2006104925A3 (en) | Metal powders and methods for producing the same | |
WO2012015278A3 (en) | Novel eco-friendly smelting process for reactograde zirconium using raw ore metal reduction and electrolytic refining integrated process | |
WO2011003034A3 (en) | Biological methods for preparing adipic acid | |
EP2492257A4 (en) | Process for production of scandia-stabilized zirconia sheet, scandia-stabilized zirconia sheet obtained by the process, and scandia-stabilised zirconia sintered powder | |
WO2013012214A3 (en) | Production method for high-purity calcite and ammonium sulphate by using gypsum | |
IL200798A0 (en) | Production of high-purity carotenoids by fermenting selected bacterial strains | |
EP2407427A4 (en) | Novel porous metal oxide, process for producing same, and use of same | |
NZ591238A (en) | Method for producing high-purity silicon carbide from hydrocarbons and silicon oxide through calcination | |
HUE037914T2 (en) | Reactor and process for the production of phosgene | |
ZA201202387B (en) | Particulate composition containing anhtdrous crystalline of 2-o-a-d-glucosyl-l-ascorbic acid,process for producing the same, and uses thereof | |
EP2394958A4 (en) | Ddr-type zeolite powder, and process for the production of ddr-type zeolite powder | |
UA100965C2 (en) | Fine-particulate lead zirconium titanates, zirconium titanates, processes for preparation and use of lead zirconium titanates | |
PL2373580T3 (en) | Process for the production and treatment of graphite powders | |
PL2344509T3 (en) | Processes for the production of buprenorphine with reduced impurity formation | |
WO2012053794A3 (en) | Microorganism producing o-phosphoserine and method of producing l-cysteine or derivatives thereof from o-phosphoserine using the same | |
MY162206A (en) | Preparation of a solid containing zinc oxide used for purifying a gas or a liquid | |
MX350003B (en) | Process for the manufacture of dibenzoylmethane derivatives. | |
EP2173658A4 (en) | Process for the production of high purity elemental silicon | |
CA2858551C (en) | Method of maintaining the value of an alkylene oxide production parameter in a process of making an alkylene oxide using a high efficiency catalyst | |
PT2118018T (en) | Method for production of ammonium paratungstate tetrahydrate and highly pure ammonium paratungstate tetrahydrate | |
MX2009007020A (en) | Processes for producing titanium dioxide. |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
WWE | Wipo information: entry into national phase |
Ref document number: 200880003773.8 Country of ref document: CN |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 08710758 Country of ref document: EP Kind code of ref document: A1 |
|
ENP | Entry into the national phase |
Ref document number: 2008556214 Country of ref document: JP Kind code of ref document: A |
|
WWE | Wipo information: entry into national phase |
Ref document number: 1020097015954 Country of ref document: KR |
|
WWE | Wipo information: entry into national phase |
Ref document number: 12525224 Country of ref document: US |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2008710758 Country of ref document: EP |