WO2008090828A1 - 有機薄膜トランジスタ、その製造方法及び有機半導体デバイス - Google Patents
有機薄膜トランジスタ、その製造方法及び有機半導体デバイス Download PDFInfo
- Publication number
- WO2008090828A1 WO2008090828A1 PCT/JP2008/050649 JP2008050649W WO2008090828A1 WO 2008090828 A1 WO2008090828 A1 WO 2008090828A1 JP 2008050649 W JP2008050649 W JP 2008050649W WO 2008090828 A1 WO2008090828 A1 WO 2008090828A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- thin film
- film transistor
- organic
- organic thin
- manufacturing
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 3
- 239000010409 thin film Substances 0.000 title abstract 3
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000010408 film Substances 0.000 abstract 5
- 239000006087 Silane Coupling Agent Substances 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 238000003980 solgel method Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
- H10K10/468—Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics
- H10K10/474—Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics the gate dielectric comprising a multilayered structure
- H10K10/476—Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics the gate dielectric comprising a multilayered structure comprising at least one organic layer and at least one inorganic layer
Landscapes
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Thin Film Transistor (AREA)
- Formation Of Insulating Films (AREA)
Abstract
簡便なウェットプロセスでゲート絶縁膜を形成することができ、トランジスタ特性に優れ、密着性が良好で、耐久性に優れた有機薄膜トランジスタの製造方法であって、少なくとも有機半導体膜及びゲート絶縁膜を有する有機薄膜トランジスタの製造方法において、該ゲート絶縁膜の形成の一部又は全部がゾル-ゲル法を用いて形成され、かつゲート絶縁膜形成材料にシランカップリング剤を含むことを特徴とする。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008555040A JPWO2008090828A1 (ja) | 2007-01-22 | 2008-01-19 | 有機薄膜トランジスタ、その製造方法及び有機半導体デバイス |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007-011183 | 2007-01-22 | ||
JP2007011183 | 2007-01-22 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2008090828A1 true WO2008090828A1 (ja) | 2008-07-31 |
Family
ID=39644405
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/050649 WO2008090828A1 (ja) | 2007-01-22 | 2008-01-19 | 有機薄膜トランジスタ、その製造方法及び有機半導体デバイス |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPWO2008090828A1 (ja) |
WO (1) | WO2008090828A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012121279A1 (ja) * | 2011-03-07 | 2012-09-13 | 国立大学法人東京大学 | 有機半導体層の製造方法、有機トランジスタの製造方法、有機トランジスタ、及び表示装置 |
US10529937B2 (en) | 2016-06-27 | 2020-01-07 | Foundation Of Soongsil University-Industry Cooperation | Method of manufacturing organic semiconductor device |
US10991894B2 (en) | 2015-03-19 | 2021-04-27 | Foundation Of Soongsil University-Industry Cooperation | Compound of organic semiconductor and organic semiconductor device using the same |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001024467A (ja) * | 1999-07-07 | 2001-01-26 | Toyo Commun Equip Co Ltd | 高周波圧電デバイスの構造および製造方法 |
JP2005191437A (ja) * | 2003-12-26 | 2005-07-14 | Ricoh Co Ltd | 半導体装置、その製造方法、および表示装置 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001244467A (ja) * | 2000-02-28 | 2001-09-07 | Hitachi Ltd | コプラナー型半導体装置とそれを用いた表示装置および製法 |
-
2008
- 2008-01-19 WO PCT/JP2008/050649 patent/WO2008090828A1/ja active Application Filing
- 2008-01-19 JP JP2008555040A patent/JPWO2008090828A1/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001024467A (ja) * | 1999-07-07 | 2001-01-26 | Toyo Commun Equip Co Ltd | 高周波圧電デバイスの構造および製造方法 |
JP2005191437A (ja) * | 2003-12-26 | 2005-07-14 | Ricoh Co Ltd | 半導体装置、その製造方法、および表示装置 |
Non-Patent Citations (1)
Title |
---|
PAYNE M.M.: "Organic Field-Effect Transistors from Solution-Deposited Functionalized Acenes with Mobilities as High as 1 cm2/V.s", JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, vol. 127, no. 14, 19 March 2005 (2005-03-19), pages 4986 - 4987, XP008066061, DOI: doi:10.1021/ja042353u * |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012121279A1 (ja) * | 2011-03-07 | 2012-09-13 | 国立大学法人東京大学 | 有機半導体層の製造方法、有機トランジスタの製造方法、有機トランジスタ、及び表示装置 |
US10991894B2 (en) | 2015-03-19 | 2021-04-27 | Foundation Of Soongsil University-Industry Cooperation | Compound of organic semiconductor and organic semiconductor device using the same |
US10529937B2 (en) | 2016-06-27 | 2020-01-07 | Foundation Of Soongsil University-Industry Cooperation | Method of manufacturing organic semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
JPWO2008090828A1 (ja) | 2010-05-20 |
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