WO2008088465A1 - Wear resistant materials in the direct process - Google Patents
Wear resistant materials in the direct process Download PDFInfo
- Publication number
- WO2008088465A1 WO2008088465A1 PCT/US2007/024591 US2007024591W WO2008088465A1 WO 2008088465 A1 WO2008088465 A1 WO 2008088465A1 US 2007024591 W US2007024591 W US 2007024591W WO 2008088465 A1 WO2008088465 A1 WO 2008088465A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- heat exchange
- exchange element
- wear resistant
- coating
- direct process
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D13/00—Heat-exchange apparatus using a fluidised bed
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/02—Apparatus characterised by being constructed of material selected for its chemically-resistant properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J8/00—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
- B01J8/18—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles
- B01J8/1836—Heating and cooling the reactor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F19/00—Preventing the formation of deposits or corrosion, e.g. by using filters or scrapers
- F28F19/02—Preventing the formation of deposits or corrosion, e.g. by using filters or scrapers by using coatings, e.g. vitreous or enamel coatings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F19/00—Preventing the formation of deposits or corrosion, e.g. by using filters or scrapers
- F28F19/02—Preventing the formation of deposits or corrosion, e.g. by using filters or scrapers by using coatings, e.g. vitreous or enamel coatings
- F28F19/06—Preventing the formation of deposits or corrosion, e.g. by using filters or scrapers by using coatings, e.g. vitreous or enamel coatings of metal
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2208/00—Processes carried out in the presence of solid particles; Reactors therefor
- B01J2208/00008—Controlling the process
- B01J2208/00017—Controlling the temperature
- B01J2208/00106—Controlling the temperature by indirect heat exchange
- B01J2208/00115—Controlling the temperature by indirect heat exchange with heat exchange elements inside the bed of solid particles
- B01J2208/00132—Tubes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/02—Apparatus characterised by their chemically-resistant properties
- B01J2219/0204—Apparatus characterised by their chemically-resistant properties comprising coatings on the surfaces in direct contact with the reactive components
- B01J2219/0236—Metal based
Definitions
- the present invention relates to a heat exchange element for use in the direct process.
- the heat exchange element comprises a heat exchange element with a wear resistant coating on the surface of at least a portion of its surface.
- the wear resistant coating forms strong bonds to the heat exchange element and has a hardness greater than 50 Rockwell C. Such a coating can survive the physical and chemical environment present in the direct process.
- the production of halosilanes typically involves the reaction of silicon powder with a reactant gas, typically either methyl chloride or hydrogen chloride (often called the "direct process"). This reaction is exothermic and usually requires the removal of heat that is generated.
- the heat is typically removed using heat transfer fluid flowing through heat transfer tubes that are in direct contact with the silicon powder and reaction gases at high temperature.
- the heat transfer elements used in the direct process are typically made of carbon steel. Because of the above cited environmental factors, these carbon steel heat transfer elements have a limited life. As such, the direct process reaction needs to be shut down for the replacement of the heat transfer elements, thus, there is significant down time and expense.
- the present invention relates to a heat exchange element for use in the direct process.
- the heat exchange element comprises a heat exchange element with a wear resistant coating on the surface of at least a portion of its surface.
- the wear resistant coating forms strong metallurgical bonds to the heat exchange element and has a hardness greater than 50
- Figure 1 is a schematic representation of a fluidized bed reactor incorporating the heat exchange elements of the present invention
- the present invention is an improvement to a fluidized-bed reactor for reacting silicon metal powder with an organic halide or a hydrogen halide to produce halosilanes.
- This reactor typically comprises a reaction chamber and, within the reaction chamber, at least one heat exchange element for conveying a heat transfer medium.
- the present invention is characterized in that a coating having a high hardness and high bond strength is formed on at least a portion of the heat exchange element to survive the physical and chemical environment of the direct process.
- the fluidized-bed reactor comprises shell 1, having organic or halogen halide inlet 2 , particulate silicon inlet 3, nitrogen gas inlet 4 and spent-bed outlet 5. Inlets 2-4 and outlet 5 are separated from the reaction chamber of the reactor by distributor plate 6. Products, by-products and unreacted gases are removed from this reactor through product outlet 7. Positioned within shell 1 is heat exchange element 8. Connected to heat exchange element 8 is heat exchange fluid inlet 9 and heat exchange fluid outlet 10. The lower section of heat exchange element 8 has applied to it a coating according to the present invention 11.
- the fluidized-bed reactor itself can be of made of standard materials for fabricating reactors suitable for contacting particulate silicon with a halogen halide. The reactor can be fabricated, for example, from carbon steel or stainless steel.
- Halosilanes are typically produced in the reactor by reacting silicon powder with a reactant gas, typically either an organic halide or a hydrogen halide.
- a reactant gas typically either an organic halide or a hydrogen halide.
- the particulate silicon can be an essentially pure silicon such as metallurgical grade silicon or it can be silicon alloyed with another metal such as copper, phosphorous, iron and the like.
- the organic halide can be essentially any organic group substituted with a halogen atom.
- the organic group typically contains 1-20 carbon atoms and can be, for example, alkyl groups, aryl groups, alkenyl groups and the like, alternatively 1-6 carbon atoms and alternatively lor 2 carbon atoms.
- the halide substituent can be a bromide, chloride, fluoride or iodide.
- the hydrogen halide can be hydrogen bromide, hydrogen chloride, hydrogen fluoride or hydrogen iodide.
- the fluidized-bed reactor is used to react metallurgical grade silicon with methyl chloride or hydrogen chloride.
- metallurgical grade silicon it is meant a composition comprising at least 95 weight percent silicon. Such compositions are well known to those skilled in the art.
- heat exchange elements 8 Positioned within the fluidized-bed reactor is one or more heat exchange elements 8 having a coating of the invention on at least a portion of the external surface of the heat exchange element that contacts the particulate silicon and organic or hydrogen halide 11. The design, number and position of the heat exchange elements are not critical to the functioning of the present invention.
- An example of a useful, but not essential, design for heat exchange elements 8 is a "U" shaped tube.
- the reactor can contain one or more such "U" shaped tubes as heat exchange elements. These are shown, for example, in EP684070 and EP776692.
- Another example of a useful design for the heat exchange element comprises one or more heat transfer coils which are positioned in or near the reaction medium.
- Yet another design for the heat exchange element is that described in US Patent No. 4,176,710, which is incorporated herein by reference.
- heat transfer pipe is immersed in the fluidized bed in which the end facing against the primary direction of the gas flow has a conical restriction.
- heat exchange elements can be formed from standard materials suitable for use in fluidized-bed reactors for contacting particulate silicon with an organic or halogen halide. For example, carbon steel or stainless steel can be utilized.
- the present inventors have discovered that to be effective, at least a portion of heat exchange element must be coated with a coating of the present invention.
- the coating composition used herein must meet several criteria. First, the coating must be hard enough to withstand the continuous impingement of silicon particles that the heat exchange element will encounter in the reactor. This impingement is caused by the extremely turbulent flow necessary for the direct process to be efficient. Typically, this flow is caused by various means used to agitate the ingredients. Typically, the coating must have a hardness greater than 50 Rockwell C to survive in this environment. Alternatively, the coating can have a hardness greater than 55 Rockwell C and alternatively the coating can have a hardness greater than 60 Rockwell C.
- the coating must have sufficient bond strength to remain adhered to the heat exchange element. This is especially difficult because of the frequent thermal cycling which causes stresses due to the different coefficients of thermal expansion of the heat exchange element and the coating. When there is insufficient adhesion, the coating can delaminate resulting in the heat exchange element itself being exposed to the harsh environment. Alternatively, the coating can crack or create voids which allow the harsh environment to degrade the heat exchange element. To prevent this, the inventors have discovered that the coating should be metallurgically bonded to the heat exchange element or bonded in such a manner to achieve equivalent bond strength. Typically, this results in a coating with a bond strength greater than 200 MPa, alternatively greater than 300 MPa and alternatively greater than 400 MPa.
- this type of coating has sufficient chemical resistance to avoid appreciable degradation in the chemical environment of the direct process.
- appreciable degradation it is meant that in the direct process environment comprising HCl, chlorosilanes, silicon powder and H 2 at temperatures in excess of 300 degrees C it will not cause substantial wear to the heat exchange element.
- One type of coating included in this invention consists of hard particles such as tungsten carbide distributed throughout a matrix that is metallurgically bonded to the heat transfer surface. This provides very strong bond and prevents delamination. This is typically at least a 2 step process in which the initial coating application may be applied by one of several methods. These methods can be diverse and include thermal spray, application of a specially formulated cloth, or application of a specially formulated suspension. In these cases a second step is required where the metallurgical bond is formed by fusing the coating to the substrate by a method such as heating in a furnace, heating in a vacuum furnace, heating using induction, heating using high-density infrared heat, or heating using a direct flame.
- a method such as heating in a furnace, heating in a vacuum furnace, heating using induction, heating using high-density infrared heat, or heating using a direct flame.
- Such a coating can also be applied in a single step using a method commonly referred to as laser cladding.
- a method commonly referred to as laser cladding is described in US Patent 3,743,556 which is incorporated herein by reference.
- a film or sheet of a mixture of an organic binder and a filler which is wetted by the metallic matrix in the molten state is placed upon a surface or portion thereof of a substrate.
- a layer of matrix metal having a solidus temperature lower than the substrate and the filler is placed contiguous to the film or sheet of the filler to produce an assembly.
- the assembly is heated to at least the solidus of the matrix metal and below the solidus temperatures of the substrate and filler and above the decomposition temperature of the binder.
- Wear resistant coatings containing tungsten carbide as described above are provided by several suppliers. These include Kennametal (trade name is Conforma Clad), Innobraze GmbH (trade name BrazeCoat), and Gremada Industries (trade name LaserCarb). [0024] Another type of coating according to the present invention is applied by a paint system. This process is described, for example, in US Patent 6,649,682 which is incorporated by reference. In this process, hardfacing particles and braze-alloy particles are made into separate paints. The hardfacing particle layer is first "painted" over the area of metal needing protection.
- a layer of braze is "painted."
- the surface thus coated is heated in a furnace in an inert atmosphere to a temperature that is above the melting (liquidus) temperature of the braze alloy.
- the braze alloy then infiltrates down into the layer of hardfacing particles and brazes (metallurgically bonds) them into a composite of hard particles in a matrix of braze alloy onto the substrate metal.
- a layer of adhesive is applied to a metal substrate, and hardfacing particles are applied to that adhesive layer. After drying, another layer of adhesive is applied over the adhered hard particles.
- Braze powder is then applied to the layer of wet adhesive thus forming a layer of braze particles in juxtaposition to the layer of hard particles.
- Heating in an inert atmosphere then causes metallurgical fusion, which produces a composite of hard particles in a matrix of braze metallurgically bonded to the substrate metal.
- a hardfacing alloy powder containing precipitated intermetallic hard compounds is made into a paint and applied to the surface being protected. After drying, it is then heated in an inert atmosphere to a temperature above the solidus of the hardfacing alloy to form a fully dense coating of the hardfacing alloy metallurgically bonded to the substrate.
- hardfacing particles and a hardfacing braze alloy powder are made into a paint and applied to the surface being protected. It is then dried and heated in an inert atmosphere to a temperature above the solidus of the hardfacing alloy to effect metallurgical bonding of hardfacing particles to the substrate by the hardfacing alloy.
- Another type of coating according to the present invention is that applied by the chemical, electrochemical, CVD, PVD or agglomeration process of a flame spray powder composition comprising a mechanical mixture of hard particles of a specific tungsten carbide alloy material and particles of a matrix-forming self-fluxing alloy selected from the group consisting of Ni-base, Fe-base and Co-base self-fluxing alloys. This process is described, for example, in US Patent 4,507,151 which is incorporated by reference.
- Another type of coating according to the present invention is that applied by the flame spraying and fusion of a mixture comprising a hard component and a refractory alloy. This process is described, for example, in US Patent 4,075,376 which is incorporated by reference.
- a final type of coating according to the invention is a weld overlay using hard materials.
- a layer of a material that meets the above hardness requirements is essentially welded onto the surface of the heat exchange element. This results in a metallurgical bond being formed between the metal being laid and the material forming the heat exchange element.
- this material can be, for example, tungsten carbide or a similar hard material being distributed throughout the material being weld overlaid. This process is well known in the art.
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Combustion & Propulsion (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Physical Vapour Deposition (AREA)
- Coating By Spraying Or Casting (AREA)
- Multiple-Way Valves (AREA)
- Glass Compositions (AREA)
Abstract
Description
Claims
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP07862342A EP2111524B1 (en) | 2007-01-17 | 2007-11-28 | Wear resistant materials in the direct process |
DE602007013469T DE602007013469D1 (en) | 2007-01-17 | 2007-11-28 | WEAR-RESISTANT MATERIALS DIRECTED |
CN200780042481.0A CN101535758B (en) | 2007-01-17 | 2007-11-28 | direct process reactor and direct process for producing halosilane |
US12/517,826 US20100316539A1 (en) | 2007-01-17 | 2007-11-28 | Wear Resistant Materials In The Direct Process |
KR1020097014967A KR101409729B1 (en) | 2007-01-17 | 2007-11-28 | Wear resistant materials in the direct process |
JP2009546362A JP5235019B2 (en) | 2007-01-17 | 2007-11-28 | Wear resistant materials in the direct process |
AT07862342T ATE503164T1 (en) | 2007-01-17 | 2007-11-28 | WEAR-RESISTANT MATERIALS USED BY DIRECT PROCESS |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US88083407P | 2007-01-17 | 2007-01-17 | |
US60/880,834 | 2007-01-17 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2008088465A1 true WO2008088465A1 (en) | 2008-07-24 |
Family
ID=39246850
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2007/024591 WO2008088465A1 (en) | 2007-01-17 | 2007-11-28 | Wear resistant materials in the direct process |
Country Status (8)
Country | Link |
---|---|
US (1) | US20100316539A1 (en) |
EP (1) | EP2111524B1 (en) |
JP (1) | JP5235019B2 (en) |
KR (1) | KR101409729B1 (en) |
CN (1) | CN101535758B (en) |
AT (1) | ATE503164T1 (en) |
DE (1) | DE602007013469D1 (en) |
WO (1) | WO2008088465A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016156047A1 (en) | 2015-03-30 | 2016-10-06 | Wacker Chemie Ag | Fluidized-bed reactor for producing chlorosilanes |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019158166A (en) * | 2018-03-07 | 2019-09-19 | Jfeエンジニアリング株式会社 | Corrosion prevention metho on radiant heat transfer surface of boiler, and boiler |
Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
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US3743556A (en) | 1970-03-30 | 1973-07-03 | Composite Sciences | Coating metallic substrate with powdered filler and molten metal |
FR2307214A1 (en) | 1975-04-11 | 1976-11-05 | Eutectic Corp | COATING OF BOILER TUBES WITH AN ALLOY MATRIX CONTAINING A REFRACTORY CONSTITUENT IN DISPERSION |
FR2379786A1 (en) * | 1977-02-07 | 1978-09-01 | Wacker Chemie Gmbh | HEAT EXCHANGER FOR REACTIONS BETWEEN A GAS AND A SOLID SUBSTANCE, IN PARTICULAR FOR THE PREPARATION OF SILICON HALOGEN COMPOUNDS |
FR2379706A1 (en) | 1977-02-08 | 1978-09-01 | Sibe | IMPROVEMENTS FOR CARBURETORS EQUIPPED WITH A COLD START AND START DEVICE |
DE3230590A1 (en) * | 1981-08-17 | 1983-03-10 | Nippon Aerosil Co., Ltd., Tokyo | METHOD FOR THE PRODUCTION OF TRICHLORSILANE AND SILICIUM TETRACHLORIDE FROM SILICIUM AND HYDROCHLORINE |
JPS6080055A (en) * | 1983-10-06 | 1985-05-07 | Matsushita Electric Ind Co Ltd | Heat exchanger |
JPS61110895A (en) | 1984-11-01 | 1986-05-29 | Mitsubishi Heavy Ind Ltd | Heat transfer tube |
JPS62123011A (en) * | 1985-11-25 | 1987-06-04 | Koujiyundo Silicon Kk | Method for producing trichlorosilane and apparatus therefor |
EP0352482A1 (en) | 1988-07-27 | 1990-01-31 | Deutsche Babcock Energie- und Umwelttechnik Aktiengesellschaft | Steam-generating plant with heat exchanger tubes |
EP0684070A1 (en) | 1994-05-23 | 1995-11-29 | Hemlock Semiconductor Corporation | Fluidized-bed reactor |
EP0776692A1 (en) | 1995-12-01 | 1997-06-04 | Dow Corning Corporation | Fluidized-bed reactor |
WO1999014400A1 (en) * | 1997-09-17 | 1999-03-25 | Gas Research Institute | Corrosion-resistant coatings for steels used in bromide-based absorption cycles |
US6649682B1 (en) | 1998-12-22 | 2003-11-18 | Conforma Clad, Inc | Process for making wear-resistant coatings |
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US3133109A (en) * | 1960-11-28 | 1964-05-12 | Gen Electric | Silicon compound process and apparatus |
CH647818A5 (en) * | 1980-12-05 | 1985-02-15 | Castolin Sa | POWDERED COATING MATERIAL FOR THERMAL COATING OF WORKPIECES. |
DE10016215A1 (en) * | 2000-03-31 | 2001-10-04 | Basf Ag | Process for coating apparatus and apparatus parts for chemical plant construction |
AU2001266673A1 (en) * | 2000-06-02 | 2001-12-17 | Gsi Lumonics Corporation | System of fabricating plane parallel substrates with uniform optical paths |
US7011067B2 (en) * | 2002-08-19 | 2006-03-14 | Trw | Chrome plated engine valve |
JP4273749B2 (en) * | 2002-11-22 | 2009-06-03 | 信越化学工業株式会社 | Method for producing organohalosilane |
EP1880035B1 (en) * | 2005-05-05 | 2021-01-20 | Höganäs Germany GmbH | Method for coating a substrate surface and coated product |
-
2007
- 2007-11-28 EP EP07862342A patent/EP2111524B1/en not_active Not-in-force
- 2007-11-28 KR KR1020097014967A patent/KR101409729B1/en active IP Right Grant
- 2007-11-28 CN CN200780042481.0A patent/CN101535758B/en not_active Expired - Fee Related
- 2007-11-28 AT AT07862342T patent/ATE503164T1/en not_active IP Right Cessation
- 2007-11-28 DE DE602007013469T patent/DE602007013469D1/en active Active
- 2007-11-28 US US12/517,826 patent/US20100316539A1/en not_active Abandoned
- 2007-11-28 WO PCT/US2007/024591 patent/WO2008088465A1/en active Application Filing
- 2007-11-28 JP JP2009546362A patent/JP5235019B2/en active Active
Patent Citations (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3743556A (en) | 1970-03-30 | 1973-07-03 | Composite Sciences | Coating metallic substrate with powdered filler and molten metal |
FR2307214A1 (en) | 1975-04-11 | 1976-11-05 | Eutectic Corp | COATING OF BOILER TUBES WITH AN ALLOY MATRIX CONTAINING A REFRACTORY CONSTITUENT IN DISPERSION |
FR2379786A1 (en) * | 1977-02-07 | 1978-09-01 | Wacker Chemie Gmbh | HEAT EXCHANGER FOR REACTIONS BETWEEN A GAS AND A SOLID SUBSTANCE, IN PARTICULAR FOR THE PREPARATION OF SILICON HALOGEN COMPOUNDS |
US4176710A (en) | 1977-02-07 | 1979-12-04 | Wacker-Chemie Gmbh | Fluidized bed reactor |
FR2379706A1 (en) | 1977-02-08 | 1978-09-01 | Sibe | IMPROVEMENTS FOR CARBURETORS EQUIPPED WITH A COLD START AND START DEVICE |
DE3230590A1 (en) * | 1981-08-17 | 1983-03-10 | Nippon Aerosil Co., Ltd., Tokyo | METHOD FOR THE PRODUCTION OF TRICHLORSILANE AND SILICIUM TETRACHLORIDE FROM SILICIUM AND HYDROCHLORINE |
JPS6080055A (en) * | 1983-10-06 | 1985-05-07 | Matsushita Electric Ind Co Ltd | Heat exchanger |
JPS61110895A (en) | 1984-11-01 | 1986-05-29 | Mitsubishi Heavy Ind Ltd | Heat transfer tube |
JPS62123011A (en) * | 1985-11-25 | 1987-06-04 | Koujiyundo Silicon Kk | Method for producing trichlorosilane and apparatus therefor |
EP0352482A1 (en) | 1988-07-27 | 1990-01-31 | Deutsche Babcock Energie- und Umwelttechnik Aktiengesellschaft | Steam-generating plant with heat exchanger tubes |
EP0684070A1 (en) | 1994-05-23 | 1995-11-29 | Hemlock Semiconductor Corporation | Fluidized-bed reactor |
EP0776692A1 (en) | 1995-12-01 | 1997-06-04 | Dow Corning Corporation | Fluidized-bed reactor |
WO1999014400A1 (en) * | 1997-09-17 | 1999-03-25 | Gas Research Institute | Corrosion-resistant coatings for steels used in bromide-based absorption cycles |
US6649682B1 (en) | 1998-12-22 | 2003-11-18 | Conforma Clad, Inc | Process for making wear-resistant coatings |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016156047A1 (en) | 2015-03-30 | 2016-10-06 | Wacker Chemie Ag | Fluidized-bed reactor for producing chlorosilanes |
DE102015205727A1 (en) | 2015-03-30 | 2016-10-06 | Wacker Chemie Ag | Fluidized bed reactor for the production of chlorosilanes |
US10647583B2 (en) | 2015-03-30 | 2020-05-12 | Wacker Chemie Ag | Fluidized bed reactor for preparing chlorosilanes |
Also Published As
Publication number | Publication date |
---|---|
EP2111524A1 (en) | 2009-10-28 |
DE602007013469D1 (en) | 2011-05-05 |
US20100316539A1 (en) | 2010-12-16 |
KR101409729B1 (en) | 2014-06-19 |
JP5235019B2 (en) | 2013-07-10 |
ATE503164T1 (en) | 2011-04-15 |
EP2111524B1 (en) | 2011-03-23 |
KR20090110311A (en) | 2009-10-21 |
CN101535758B (en) | 2011-12-21 |
CN101535758A (en) | 2009-09-16 |
JP2010516990A (en) | 2010-05-20 |
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