WO2008087799A1 - マイクロチップ、及びマイクロチップの製造方法 - Google Patents

マイクロチップ、及びマイクロチップの製造方法 Download PDF

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Publication number
WO2008087799A1
WO2008087799A1 PCT/JP2007/072926 JP2007072926W WO2008087799A1 WO 2008087799 A1 WO2008087799 A1 WO 2008087799A1 JP 2007072926 W JP2007072926 W JP 2007072926W WO 2008087799 A1 WO2008087799 A1 WO 2008087799A1
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WO
WIPO (PCT)
Prior art keywords
microchip
substrate
passage
microchip substrate
microflow
Prior art date
Application number
PCT/JP2007/072926
Other languages
English (en)
French (fr)
Inventor
Hiroshi Hirayama
Original Assignee
Konica Minolta Opto, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Konica Minolta Opto, Inc. filed Critical Konica Minolta Opto, Inc.
Priority to JP2008553976A priority Critical patent/JP5239871B2/ja
Publication of WO2008087799A1 publication Critical patent/WO2008087799A1/ja

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00055—Grooves
    • B81C1/00071—Channels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/12—Specific details about manufacturing devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0809—Geometry, shape and general structure rectangular shaped
    • B01L2300/0816—Cards, e.g. flat sample carriers usually with flow in two horizontal directions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0887—Laminated structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/04—Moving fluids with specific forces or mechanical means
    • B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
    • B01L2400/0415—Moving fluids with specific forces or mechanical means specific forces electrical forces, e.g. electrokinetic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/05—Microfluidics
    • B81B2201/058—Microfluidics not provided for in B81B2201/051 - B81B2201/054

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Hematology (AREA)
  • Clinical Laboratory Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Dispersion Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Automatic Analysis And Handling Materials Therefor (AREA)
  • Micromachines (AREA)

Abstract

　微細流路内における液体試料の流速差が小さく、低コストで製造可能なマイクロチップ、及びそのマイクロチップの製造方法を提供する。樹脂製のマイクロチップ基板１０には溝状の微細流路１１が形成されている。その微細流路１１の内面にはＳｉＯ２膜１２が形成されている。樹脂製のマイクロチップ基板１３は平板状の基板であり、その表面は活性化処理が施されている。マイクロチップ基板１０は微細流路１１が形成されている面を内側にし、マイクロチップ基板１３は活性化処理が施されている面を内側にして、マイクロチップ基板１０とマイクロチップ基板１３を接合する。樹脂表面を活性化することで基板同士を良好に接合することができ、ＳｉＯ２膜とのゼータ電位の差が小さくなるため、流路内における液体試料の流速差を小さくすることができる。
PCT/JP2007/072926 2007-01-18 2007-11-28 マイクロチップ、及びマイクロチップの製造方法 WO2008087799A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008553976A JP5239871B2 (ja) 2007-01-18 2007-11-28 マイクロチップ、及びマイクロチップの製造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-008751 2007-01-18
JP2007008751 2007-01-18

Publications (1)

Publication Number Publication Date
WO2008087799A1 true WO2008087799A1 (ja) 2008-07-24

Family

ID=39635805

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/072926 WO2008087799A1 (ja) 2007-01-18 2007-11-28 マイクロチップ、及びマイクロチップの製造方法

Country Status (2)

Country Link
JP (1) JP5239871B2 (ja)
WO (1) WO2008087799A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010071961A (ja) * 2008-09-22 2010-04-02 Chubu Electric Power Co Inc 高分子材料の劣化診断方法
JP2010127931A (ja) * 2008-11-29 2010-06-10 Korea Electronics Telecommun バイオセンサチップ
WO2011148602A1 (ja) * 2010-05-26 2011-12-01 パナソニック株式会社 センサチップおよびそれを用いたセンサデバイス

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002055098A (ja) * 2000-08-11 2002-02-20 Nippon Columbia Co Ltd 液体試料分析素子及び液体試料分析素子の製造方法
JP2003062797A (ja) * 2001-08-23 2003-03-05 Tosoh Corp 微小流路構造体
JP2004202336A (ja) * 2002-12-25 2004-07-22 Fuji Electric Systems Co Ltd マイクロチャンネルチップ
JP2004536168A (ja) * 2001-05-10 2004-12-02 エコール ポリテクニーク フェデラル ドゥ ローザンヌ プラズマ活性化によるポリマー接着
JP2005257283A (ja) * 2004-03-09 2005-09-22 Fluidware Technologies Kk マイクロチップ
US20050239046A1 (en) * 2004-03-05 2005-10-27 The Research Foundation Of State University Of New York Method and apparatus for measuring changes in cell volume
JP2006187730A (ja) * 2005-01-06 2006-07-20 Nippon Filcon Co Ltd 樹脂製微小流路化学デバイスの製造方法並びに該製法により製造された樹脂製微小流路化学デバイス構造体
JP2006266895A (ja) * 2005-03-24 2006-10-05 National Institute Of Advanced Industrial & Technology キャピラリー電気泳動方法並びにそのためのキャピラリー及び電気泳動装置

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002055098A (ja) * 2000-08-11 2002-02-20 Nippon Columbia Co Ltd 液体試料分析素子及び液体試料分析素子の製造方法
JP2004536168A (ja) * 2001-05-10 2004-12-02 エコール ポリテクニーク フェデラル ドゥ ローザンヌ プラズマ活性化によるポリマー接着
JP2003062797A (ja) * 2001-08-23 2003-03-05 Tosoh Corp 微小流路構造体
JP2004202336A (ja) * 2002-12-25 2004-07-22 Fuji Electric Systems Co Ltd マイクロチャンネルチップ
US20050239046A1 (en) * 2004-03-05 2005-10-27 The Research Foundation Of State University Of New York Method and apparatus for measuring changes in cell volume
JP2005257283A (ja) * 2004-03-09 2005-09-22 Fluidware Technologies Kk マイクロチップ
JP2006187730A (ja) * 2005-01-06 2006-07-20 Nippon Filcon Co Ltd 樹脂製微小流路化学デバイスの製造方法並びに該製法により製造された樹脂製微小流路化学デバイス構造体
JP2006266895A (ja) * 2005-03-24 2006-10-05 National Institute Of Advanced Industrial & Technology キャピラリー電気泳動方法並びにそのためのキャピラリー及び電気泳動装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
LING XIE ET AL.: "Disposable Bio-Microfluidic Package with Passive Fluidic Control", 2005 ELECTRONICS PACKAGING TECHNOLOGY CONFERENCE, 2005, pages 93 - 97, XP010905900, DOI: doi:10.1109/EPTC.2005.1614373 *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010071961A (ja) * 2008-09-22 2010-04-02 Chubu Electric Power Co Inc 高分子材料の劣化診断方法
JP2010127931A (ja) * 2008-11-29 2010-06-10 Korea Electronics Telecommun バイオセンサチップ
US8169006B2 (en) 2008-11-29 2012-05-01 Electronics And Telecommunications Research Institute Bio-sensor chip for detecting target material
WO2011148602A1 (ja) * 2010-05-26 2011-12-01 パナソニック株式会社 センサチップおよびそれを用いたセンサデバイス

Also Published As

Publication number Publication date
JP5239871B2 (ja) 2013-07-17
JPWO2008087799A1 (ja) 2010-05-06

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