WO2008080552A3 - Verfahren und vorrichtung zur durchflussmessung - Google Patents

Verfahren und vorrichtung zur durchflussmessung Download PDF

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Publication number
WO2008080552A3
WO2008080552A3 PCT/EP2007/011146 EP2007011146W WO2008080552A3 WO 2008080552 A3 WO2008080552 A3 WO 2008080552A3 EP 2007011146 W EP2007011146 W EP 2007011146W WO 2008080552 A3 WO2008080552 A3 WO 2008080552A3
Authority
WO
WIPO (PCT)
Prior art keywords
measuring
pulsating
membrane
conveying
pressure
Prior art date
Application number
PCT/EP2007/011146
Other languages
English (en)
French (fr)
Other versions
WO2008080552A2 (de
Inventor
Frank Bartels
Markus Rawert
Original Assignee
Bartels Mikrotechnik Gmbh
Frank Bartels
Markus Rawert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bartels Mikrotechnik Gmbh, Frank Bartels, Markus Rawert filed Critical Bartels Mikrotechnik Gmbh
Priority to US12/448,653 priority Critical patent/US20110137580A1/en
Publication of WO2008080552A2 publication Critical patent/WO2008080552A2/de
Publication of WO2008080552A3 publication Critical patent/WO2008080552A3/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/72—Devices for measuring pulsing fluid flows
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F3/00—Measuring the volume flow of fluids or fluent solid material wherein the fluid passes through the meter in successive and more or less isolated quantities, the meter being driven by the flow
    • G01F3/02—Measuring the volume flow of fluids or fluent solid material wherein the fluid passes through the meter in successive and more or less isolated quantities, the meter being driven by the flow with measuring chambers which expand or contract during measurement
    • G01F3/20—Measuring the volume flow of fluids or fluent solid material wherein the fluid passes through the meter in successive and more or less isolated quantities, the meter being driven by the flow with measuring chambers which expand or contract during measurement having flexible movable walls, e.g. diaphragms, bellows
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F3/00—Measuring the volume flow of fluids or fluent solid material wherein the fluid passes through the meter in successive and more or less isolated quantities, the meter being driven by the flow
    • G01F3/02—Measuring the volume flow of fluids or fluent solid material wherein the fluid passes through the meter in successive and more or less isolated quantities, the meter being driven by the flow with measuring chambers which expand or contract during measurement
    • G01F3/20—Measuring the volume flow of fluids or fluent solid material wherein the fluid passes through the meter in successive and more or less isolated quantities, the meter being driven by the flow with measuring chambers which expand or contract during measurement having flexible movable walls, e.g. diaphragms, bellows
    • G01F3/22—Measuring the volume flow of fluids or fluent solid material wherein the fluid passes through the meter in successive and more or less isolated quantities, the meter being driven by the flow with measuring chambers which expand or contract during measurement having flexible movable walls, e.g. diaphragms, bellows for gases
    • G01F3/225—Measuring the volume flow of fluids or fluent solid material wherein the fluid passes through the meter in successive and more or less isolated quantities, the meter being driven by the flow with measuring chambers which expand or contract during measurement having flexible movable walls, e.g. diaphragms, bellows for gases characterised by constructional features of membranes or by means for improving proper functioning of membranes

Abstract

Die vorliegende Erfindung bezieht sich auf eine Vorrichtung und ein Verfahren zur Messung von Volumenströmen vorzugsweise flüssiger, aber auch gasförmiger Fluide. Kern des Messinstrumentes ist eine beweglich gelagerte Membran, welche auf einer Seite fluidisch mit dem Druck des geförderten Mediums kommunizieren kann. Druckänderungen, wie sie insbesondere bei pulsierenden Fördereinrichtungen (z.B. Membranpumpen) auftreten, führen zu zyklischen Druckänderungen in der Messkammer und an der Messmembran. Fehlt die Pulsation durch Verwendung einer nicht-pulsierenden Fördereinrichtung, so kann die Pulsation durch eine zusätzliche Pulsationseinrichtung erzeugt werden. Mittels eines geeigneten Aufnehmers, insbesondere eines piezoaktiven Materials, welches bei Biegung eine Spannung erzeugt, kann die sich zyklisch ändernde Auslenkung der Messmembran erfasst und beispielsweise einer Auswerteelektronik zugeführt werden. In einer besonders vorteilhaften Ausführung bestehen Förder- bzw. Pulsations- und Messeinrichtung aus nahezu den gleichen Elementen und sind in ein gemeinsames Gehäuse integriert.
PCT/EP2007/011146 2006-12-29 2007-12-19 Verfahren und vorrichtung zur durchflussmessung WO2008080552A2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US12/448,653 US20110137580A1 (en) 2006-12-29 2007-12-19 Flow measurement method and device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102006062552A DE102006062552B4 (de) 2006-12-29 2006-12-29 Verfahren und Vorrichtung zur Durchflussmessung
DE102006062552.8 2006-12-29

Publications (2)

Publication Number Publication Date
WO2008080552A2 WO2008080552A2 (de) 2008-07-10
WO2008080552A3 true WO2008080552A3 (de) 2009-08-06

Family

ID=39465804

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2007/011146 WO2008080552A2 (de) 2006-12-29 2007-12-19 Verfahren und vorrichtung zur durchflussmessung

Country Status (4)

Country Link
US (1) US20110137580A1 (de)
DE (1) DE102006062552B4 (de)
TW (1) TW200900665A (de)
WO (1) WO2008080552A2 (de)

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US8124953B2 (en) * 2009-03-12 2012-02-28 Infineon Technologies Ag Sensor device having a porous structure element
US9429548B2 (en) * 2009-12-18 2016-08-30 Waters Technologies Corporation Flow sensors and flow sensing methods with extended linear range
TWI457543B (zh) * 2011-04-21 2014-10-21 Energy Man System Co Ltd Eddy current sensor and its application
JP6363180B2 (ja) 2013-06-07 2018-07-25 インテグリス・インコーポレーテッド 保護層を有するセンサー
TWI500908B (zh) * 2013-06-19 2015-09-21 Ind Tech Res Inst 超音波流量計及超音波流量測量方法
US11033898B2 (en) * 2014-02-01 2021-06-15 Ezmems Ltd. Fluidic microelectromechanical sensors/devices and fabrication methods thereof
DE102015112408A1 (de) * 2015-07-29 2017-02-02 Endress + Hauser Gmbh + Co. Kg Drucksensor und Verfahren zum Überwachen eines Drucksensors
GB2543048B (en) * 2015-10-05 2022-06-08 Equinor Energy As Estimating flow rate at a pump
DE102015121859A1 (de) * 2015-12-15 2017-06-22 Endress+Hauser Gmbh+Co. Kg Drucksensor und Verfahren zum Bedienen eines Drucksensors
US10163660B2 (en) * 2017-05-08 2018-12-25 Tt Electronics Plc Sensor device with media channel between substrates
DE102017213520A1 (de) * 2017-08-03 2019-02-07 Infineon Technologies Ag Referenzkammer für einen Fluidsensor, Fluidsensor, Vorrichtung mit einem Fluidsensor und Verfahren zum Bereitstellen einer Referenzkammer sowie zum Bestimmen einer Atmosphäreneigenschaft in einer Referenzkammer
DE102019201813A1 (de) * 2019-02-12 2020-08-13 Siemens Aktiengesellschaft Durchflussmesser für ein Fluid mit einer pulsierenden Strömung
EP3839467B1 (de) * 2019-12-19 2023-06-14 Paris Sciences et Lettres Mikrofluidischer oder millifluidischer chip mit einem drucksensor unter verwendung von farbveränderlichen hydrogels
CN113049049B (zh) * 2021-03-10 2022-06-28 福水智联技术有限公司 水表防自转检测装置及方法
CN117536839B (zh) * 2024-01-09 2024-04-02 上海隐冠半导体技术有限公司 一种压电泵、控制方法、控制装置及存储介质

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US4463601A (en) * 1983-05-23 1984-08-07 General Motors Corporation Method and apparatus for measuring mass airflow
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EP0763368A2 (de) * 1996-08-26 1997-03-19 Fluidsense Corporation Dynamischer Fluid-Durchflussregler mit veränderbaren Impulsen.
US6813962B2 (en) * 2000-03-07 2004-11-09 Weatherford/Lamb, Inc. Distributed sound speed measurements for multiphase flow measurement

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Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2105850A (en) * 1981-09-10 1983-03-30 Bosch Gmbh Robert Measurement of the mass of a flowing medium
US4463601A (en) * 1983-05-23 1984-08-07 General Motors Corporation Method and apparatus for measuring mass airflow
US5069067A (en) * 1988-06-10 1991-12-03 Select Corporation Fluid flow meter
EP0763368A2 (de) * 1996-08-26 1997-03-19 Fluidsense Corporation Dynamischer Fluid-Durchflussregler mit veränderbaren Impulsen.
US6813962B2 (en) * 2000-03-07 2004-11-09 Weatherford/Lamb, Inc. Distributed sound speed measurements for multiphase flow measurement

Also Published As

Publication number Publication date
DE102006062552B4 (de) 2009-12-24
US20110137580A1 (en) 2011-06-09
TW200900665A (en) 2009-01-01
DE102006062552A1 (de) 2008-07-03
WO2008080552A2 (de) 2008-07-10

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