WO2008069284A1 - Capteur et procédé de fabrication de celui-ci - Google Patents

Capteur et procédé de fabrication de celui-ci Download PDF

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Publication number
WO2008069284A1
WO2008069284A1 PCT/JP2007/073617 JP2007073617W WO2008069284A1 WO 2008069284 A1 WO2008069284 A1 WO 2008069284A1 JP 2007073617 W JP2007073617 W JP 2007073617W WO 2008069284 A1 WO2008069284 A1 WO 2008069284A1
Authority
WO
WIPO (PCT)
Prior art keywords
movable element
substrate
sensor
region
impurity
Prior art date
Application number
PCT/JP2007/073617
Other languages
English (en)
Inventor
Atsushi Kandori
Masao Majima
Kenichi Nagae
Yasuyoshi Takai
Original Assignee
Canon Kabushiki Kaisha
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2007267308A external-priority patent/JP5376790B2/ja
Application filed by Canon Kabushiki Kaisha filed Critical Canon Kabushiki Kaisha
Priority to US12/516,007 priority Critical patent/US8336381B2/en
Publication of WO2008069284A1 publication Critical patent/WO2008069284A1/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • G01P15/124—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by semiconductor devices comprising at least one PN junction, e.g. transistors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0228—Inertial sensors
    • B81B2201/025—Inertial sensors not provided for in B81B2201/0235 - B81B2201/0242
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0264—Pressure sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Pressure Sensors (AREA)

Abstract

La présente invention concerne un capteur comprenant un élément mobile supporté de manière mobile et un élément opposé. Le capteur détecte une relation de position relative entre l'élément mobile et l'élément opposé entre lesquels est prévu un espacement. L'élément opposé a une portion dopée par des impuretés qui est prévue sur une portion opposée qui est opposée à l'élément mobile ou sur une portion contiguë qui est voisine de la portion opposée. Au moins une partie de la portion dopée par des impuretés est formée sur une surface opposée, opposée à une surface qui est opposée à l'élément mobile, surface opposée à partir de laquelle on fait sortir un câblage électrique.
PCT/JP2007/073617 2006-12-04 2007-11-29 Capteur et procédé de fabrication de celui-ci WO2008069284A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US12/516,007 US8336381B2 (en) 2006-12-04 2007-11-29 Sensor and method of manufacturing the same

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2006-326401 2006-12-04
JP2006326401 2006-12-04
JP2007-267308 2007-10-15
JP2007267308A JP5376790B2 (ja) 2006-12-04 2007-10-15 センサ、及びその製造方法

Publications (1)

Publication Number Publication Date
WO2008069284A1 true WO2008069284A1 (fr) 2008-06-12

Family

ID=39156316

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/073617 WO2008069284A1 (fr) 2006-12-04 2007-11-29 Capteur et procédé de fabrication de celui-ci

Country Status (1)

Country Link
WO (1) WO2008069284A1 (fr)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4812888A (en) * 1984-11-11 1989-03-14 Cornell Research Foundation, Inc. Suspended gate field effect semiconductor pressure transducer device
US4873868A (en) * 1986-06-10 1989-10-17 Metravib R.D.S. Force measurement sensor integrated on silicon, and a method of manufacture
JPH0425764A (ja) * 1990-05-21 1992-01-29 Nec Corp 半導体加速度センサ
JPH0850022A (ja) * 1994-05-30 1996-02-20 Murata Mfg Co Ltd 角速度センサ
US5572057A (en) * 1993-12-21 1996-11-05 Nippondenso Co., Ltd. Semiconductor acceleration sensor with movable electrode
US20050194651A1 (en) * 2004-02-09 2005-09-08 Toshio Ohashi Physical quantity sensor

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4812888A (en) * 1984-11-11 1989-03-14 Cornell Research Foundation, Inc. Suspended gate field effect semiconductor pressure transducer device
US4873868A (en) * 1986-06-10 1989-10-17 Metravib R.D.S. Force measurement sensor integrated on silicon, and a method of manufacture
JPH0425764A (ja) * 1990-05-21 1992-01-29 Nec Corp 半導体加速度センサ
US5572057A (en) * 1993-12-21 1996-11-05 Nippondenso Co., Ltd. Semiconductor acceleration sensor with movable electrode
JPH0850022A (ja) * 1994-05-30 1996-02-20 Murata Mfg Co Ltd 角速度センサ
US20050194651A1 (en) * 2004-02-09 2005-09-08 Toshio Ohashi Physical quantity sensor

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