WO2008052515A3 - Puce microfluidique en verre avec un émetteur à électronébulisation monolithique pour le couplage de la puce avec un spectromètre de masse - Google Patents

Puce microfluidique en verre avec un émetteur à électronébulisation monolithique pour le couplage de la puce avec un spectromètre de masse Download PDF

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Publication number
WO2008052515A3
WO2008052515A3 PCT/DE2007/001919 DE2007001919W WO2008052515A3 WO 2008052515 A3 WO2008052515 A3 WO 2008052515A3 DE 2007001919 W DE2007001919 W DE 2007001919W WO 2008052515 A3 WO2008052515 A3 WO 2008052515A3
Authority
WO
WIPO (PCT)
Prior art keywords
chip
coupling
glass chips
electrospray emitter
monolithic
Prior art date
Application number
PCT/DE2007/001919
Other languages
German (de)
English (en)
Other versions
WO2008052515A2 (fr
Inventor
Detlev Belder
Ulrich Haeusig
Philipp Schulze
Peter Hoffmann
Original Assignee
Studiengesellschaft Kohle Mbh
Detlev Belder
Ulrich Haeusig
Philipp Schulze
Peter Hoffmann
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Studiengesellschaft Kohle Mbh, Detlev Belder, Ulrich Haeusig, Philipp Schulze, Peter Hoffmann filed Critical Studiengesellschaft Kohle Mbh
Publication of WO2008052515A2 publication Critical patent/WO2008052515A2/fr
Publication of WO2008052515A3 publication Critical patent/WO2008052515A3/fr

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502715—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by interfacing components, e.g. fluidic, electrical, optical or mechanical interfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C19/00—Surface treatment of glass, not in the form of fibres or filaments, by mechanical means
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/007—Other surface treatment of glass not in the form of fibres or filaments by thermal treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/0013—Miniaturised spectrometers, e.g. having smaller than usual scale, integrated conventional components
    • H01J49/0018—Microminiaturised spectrometers, e.g. chip-integrated devices, Micro-Electro-Mechanical Systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/16—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission
    • H01J49/165—Electrospray ionisation
    • H01J49/167—Capillaries and nozzles specially adapted therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/12—Specific details about manufacturing devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/14—Process control and prevention of errors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0809—Geometry, shape and general structure rectangular shaped
    • B01L2300/0816—Cards, e.g. flat sample carriers usually with flow in two horizontal directions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/12—Specific details about materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/02—Burettes; Pipettes
    • B01L3/0241—Drop counters; Drop formers
    • B01L3/0268—Drop counters; Drop formers using pulse dispensing or spraying, eg. inkjet type, piezo actuated ejection of droplets from capillaries

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Materials Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Organic Chemistry (AREA)
  • Geochemistry & Mineralogy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Clinical Laboratory Science (AREA)
  • Dispersion Chemistry (AREA)
  • Hematology (AREA)
  • Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Thermal Sciences (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Micromachines (AREA)

Abstract

L'invention concerne un procédé de fabrication d'une puce microfluidique à partir d'un matériau en verre. Ledit procédé consiste à retirer le matériau d'une arête d'un support de matériau en verre avec des arêtes essentiellement droites, de sorte que cette arête présente une saillie et que cette saillie est ensuite taillée en pointe. Le procédé décrit permet de fabriquer des puces en verre d'un seul tenant avec une pointe finement taillée, intégrée de manière monolithique.
PCT/DE2007/001919 2006-10-31 2007-10-24 Puce microfluidique en verre avec un émetteur à électronébulisation monolithique pour le couplage de la puce avec un spectromètre de masse WO2008052515A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102006051877.2 2006-10-31
DE200610051877 DE102006051877A1 (de) 2006-10-31 2006-10-31 Mikrofluidische Glas-Chips mit monolithischem Elektrospray-Emitter für die Chip-MS Kopplung

Publications (2)

Publication Number Publication Date
WO2008052515A2 WO2008052515A2 (fr) 2008-05-08
WO2008052515A3 true WO2008052515A3 (fr) 2008-07-03

Family

ID=39276169

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2007/001919 WO2008052515A2 (fr) 2006-10-31 2007-10-24 Puce microfluidique en verre avec un émetteur à électronébulisation monolithique pour le couplage de la puce avec un spectromètre de masse

Country Status (2)

Country Link
DE (1) DE102006051877A1 (fr)
WO (1) WO2008052515A2 (fr)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020003209A1 (en) * 2000-01-05 2002-01-10 Wood Troy D. Conductive polymer coated nano-electrospray emitter
US20020158195A1 (en) * 2001-03-19 2002-10-31 Per Andersson Microfluidic system (MS)
DE10321472A1 (de) * 2003-05-13 2004-12-16 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Fluidik-Modul und Verfahren zu seiner Herstellung
EP1544160A2 (fr) * 2003-12-19 2005-06-22 Agilent Technologies, Inc. Micro-composant avex source electrospray et son procédé de fabrication
DE202005019822U1 (de) * 2005-12-20 2006-03-09 Agilent Technologies, Inc. (n.d.Ges.d.Staates Delaware), Palo Alto Fluidikvorvorrichtung für optische Anwendungen in Fluiden
US20070145263A1 (en) * 2005-12-23 2007-06-28 Industrial Technology Research Institute Microfluidic device and manufacturing method thereof

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5788166A (en) * 1996-08-27 1998-08-04 Cornell Research Foundation, Inc. Electrospray ionization source and method of using the same
WO1998035376A1 (fr) * 1997-01-27 1998-08-13 California Institute Of Technology Tuyere d'electropulverisation de systeme micro electromecanique pour spectroscopie de masse
DE19947496C2 (de) * 1999-10-01 2003-05-22 Agilent Technologies Inc Mikrofluidischer Mikrochip
US7007710B2 (en) * 2003-04-21 2006-03-07 Predicant Biosciences, Inc. Microfluidic devices and methods
FR2862006B1 (fr) * 2003-11-12 2006-01-27 Univ Lille Sciences Tech Sources d'electronebulisation planaires sur le modele d'une plume de calligraphie et leur fabrication.

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020003209A1 (en) * 2000-01-05 2002-01-10 Wood Troy D. Conductive polymer coated nano-electrospray emitter
US20020158195A1 (en) * 2001-03-19 2002-10-31 Per Andersson Microfluidic system (MS)
DE10321472A1 (de) * 2003-05-13 2004-12-16 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Fluidik-Modul und Verfahren zu seiner Herstellung
EP1544160A2 (fr) * 2003-12-19 2005-06-22 Agilent Technologies, Inc. Micro-composant avex source electrospray et son procédé de fabrication
DE202005019822U1 (de) * 2005-12-20 2006-03-09 Agilent Technologies, Inc. (n.d.Ges.d.Staates Delaware), Palo Alto Fluidikvorvorrichtung für optische Anwendungen in Fluiden
US20070145263A1 (en) * 2005-12-23 2007-06-28 Industrial Technology Research Institute Microfluidic device and manufacturing method thereof

Also Published As

Publication number Publication date
DE102006051877A1 (de) 2008-05-29
WO2008052515A2 (fr) 2008-05-08

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