WO2008035438A1

WO2008035438A1 - Device for measuring thickness of rotator and method for measuring thickness of rotator

Info

Publication number: WO2008035438A1
Application number: PCT/JP2006/318867
Authority: WO
Inventors: Michikuni Yamauchi
Original assignee: Marposs Kk
Priority date: 2006-09-22
Filing date: 2006-09-22
Publication date: 2008-03-27

Abstract

[PROBLEMS] To provide a noncontact measuring device and a noncontact measuring method of the thickness of a rotator. [MEANS FOR SOLVING PROBLEMS] A device for measuring the thickness of a rotator comprising a pair of jet nozzles for jetting fluid, a means for driving the pair of jet nozzles in the approaching/separating direction, a means for measuring the distance between nozzles for measuring the distance between the pair of jet nozzles, a back pressure measuring means for measuring the back pressures of the pair of jet nozzles, and a data processing section performing operation based on the measurement data by the means for measuring the distance between nozzles and the measurement data by the back pressure measuring means. The data processing section stores the previously measured correlation between the distance between a stationary sample composed of the same material as that of a measurement object, i.e. a rotator, and the jet nozzle and the back pressure value of the jet nozzle when fluid is jetted from the jet nozzle toward the sample, calculates the distance between each jet nozzle and the rotator which is positioned between the pair of jet nozzles from the correlation and the back pressure of the jet nozzle measured by the back pressure measuring means when fluid is jetted from the jet nozzle toward the rotator, and then calculates the thickness of the rotator from the distance between nozzles measured by the means for measuring the distance between nozzles, and the distance between the rotator and each jet nozzle.

Description

Specification

Rotating body thickness measuring apparatus and rotating body thickness measuring method

Technical field

[0001] The present invention relates to an apparatus and a method for measuring the thickness of a rotating body.

Background art

[0002] A pair of ejection nozzles that eject fluid, an ejection nozzle driving unit that drives the pair of ejection nozzles in an approaching and separating direction, an inter-nozzle distance measuring unit that measures a distance between the pair of ejection nozzles, A back pressure measuring means for measuring the back pressure of the pair of injection nozzles, and a data processing unit for performing a calculation based on the measurement data of the inter-nozzle distance measuring means and the measurement data of the back pressure measuring means, The data processing unit stores a pre-measured correlation between the distance between the stationary sample and the injection nozzle and the back pressure value of the injection nozzle, and based on the back pressure of the injection nozzle measured by the back pressure measuring means and the correlation. The distance between the stationary measurement object positioned between the pair of injection nozzles and each injection nozzle is calculated, and the distance between nozzles measured by the means for measuring the distance between nozzles, the stationary measurement object and each injection nozzle are calculated. Distance Toka et between nozzle, the non-contact thickness measuring apparatus and calculates a stationary thickness to be measured is disclosed in Patent Document 1 les, Ru.

Patent Document 1: JP 2001-221624

Disclosure of the invention

Problems to be solved by the invention

[0003] The correlation between the distance between the stationary sump nore and the injection nozzle and the back pressure value of the injection nozzle is based on the fact that the sump nore with a known thickness is placed on a surface plate and measured with a linear gauge. The distance between the nozzle and the sample calculated from the distance to the platen and the thickness of the sampnore, and the spray nozzle force when spraying the fluid toward the sampnore measured using the back pressure measurement means The relationship with the back pressure of the nozzle is measured by obtaining a large number of samples while varying the distance between the sample and the injection nozzle by moving the injection nozzle facing the sample closer to and away from the sample nozzle.

In order to measure the thickness of the rotating body, the distance between the rotating sample and the injection nozzle, It is considered necessary to measure the correlation with the back pressure of the injection nozzle when the fluid is injected from the injection nozzle toward the rotating sample, and it is considered technically difficult to measure the correlation. Therefore, a non-contact type thickness measuring device for measuring the thickness of the rotating body has not been put into practical use yet.

An object of this invention is to provide the non-contact-type rotary body thickness measuring apparatus which was not provided for practical use conventionally, and the method of measuring the thickness of a rotary body non-contactingly.

Means for solving the problem

In the present invention, in order to solve the above problems, a pair of injection nozzles for injecting fluid, an injection nozzle driving means for driving the pair of injection nozzles in the approaching and separating directions, and a distance between the pair of injection nozzles are set. Calculation based on the distance measurement means for measuring the distance between the nozzles, the back pressure measurement means for measuring the back pressure of the pair of injection nozzles, the measurement data of the distance measurement means between the nozzles, and the measurement data of the back pressure measurement means The data processing unit injects fluid from the injection nozzle toward the distance and the sump nore between the stationary sample and the nozzle that are made of the same material as the rotating object to be measured. The previously measured correlation with the back pressure value of the injection nozzle at the time is stored, and the back pressure of the injection nozzle when the fluid is injected from the injection nozzle toward the rotating body measured by the back pressure measuring means and the phase The distance between the rotary body positioned between the pair of jet nozzles and each jet nozzle is calculated from the distance between the nozzles measured by the internozzle distance measuring means, and the rotary body and each jet nozzle. Provided is a rotating body thickness measuring device that calculates the thickness of a rotating body from the distance between them.

As a result of earnest research, the inventor of the present invention has found that the correlation between the distance between the stationary sample and the injection nozzle and the back pressure value of the injection nozzle when the fluid is injected from the injection nozzle toward the sample is It was found that the relationship was established between the distance between the rotating sample and the injection nozzle and the back pressure value of the injection nozzle when fluid was injected from the injection nozzle toward the sump nore. The present invention has been made on the basis of the above knowledge. If the sample and the rotating body are made of the same material, the distance between the stationary sample and the injection nozzle and the fluid from the injection nozzle toward the sample are injected. Correlation force with the back pressure value of the injection nozzle at the time of rotation The distance between the rotating body and the injection nozzle and the fluid was injected from the injection nozzle toward the rotating body A non-contact type rotating body thickness measuring device is provided by utilizing the fact that it is also established between the back pressure value of the injection nozzle at the time.

In a preferred aspect of the present invention, the data processing unit calculates a distance between the rotating body and each injection nozzle using the linear portion of the correlation.

The correlation between the distance between the stationary sump nore and the injection nozzle and the back pressure value of the injection nozzle when the fluid is injected from the injection nozzle toward the sample is as follows. As the distance increases from zero on the Cartesian coordinates with the horizontal axis as, the curve continuously changes from an upward convex curve to a negative slope → downward convex curve. In the curve portion of the correlation, the distance changes greatly with a slight change in back pressure. Therefore, the curve portion of the correlation is difficult to use for accurately measuring the distance based on the back pressure. By using the linear portion of the correlation, the distance between the rotating body and each injection nozzle can be accurately measured based on the back pressure.

[0006] In a preferred aspect of the present invention, the pair of injection nozzles is fixed to the other end portion of the columnar member having one end extending in parallel and fixed, and the injection nozzle driving means includes the pair of injection nozzles. These columnar members are biased to displace the other ends of the pair of columnar members in the approaching / separating direction.

In the thickness measurement device of Patent Document 1, a ball screw is screwed to a base to which an injection nozzle is attached, and a ball screw is driven by a stepping motor to drive the base in the extending direction of the ball screw, thereby driving the injection nozzle. is doing. The base is considered to be slidably engaged with the guide rail. In the above structure, if there is a failure in the sliding engagement between the guide rail and the base, the smooth movement of the base, and hence the smooth movement of the injection nozzle, will be hindered, making accurate thickness measurement impossible. There is a problem. An injection nozzle is fixed to the other end portion of the pair of columnar members fixed at one end extending in parallel, and the pair of columnar members are urged by using an injection nozzle driving means, and the other of the pair of columnar members By displacing the end portion in the approaching / separating direction, it is possible to move the injection nozzle smoothly.

[0007] In the preferred embodiment and aspect of the present invention, a fragile portion that is deformed in a shearing and elastic manner is disposed at a portion closer to the fixed end than the point of application of the injection nozzle driving means of the columnar member. It is desirable that the injection nozzle is always directed in the direction perpendicular to the surface of the rotating body. If a weakened portion that is shear-elastically deformed is disposed at a position closer to the fixed end than the point of application of the injection-nozzle driving means of the columnar member, the weakened shear-elastically deforms when energized using the injection nozzle driving means. Since the portion closer to the other end portion than the weak portion moves in parallel without being inclined, the injection nozzle can always be directed in the direction orthogonal to the surface of the rotating body.

[0008] In a preferred aspect of the present invention, the spray nozzle driving means mechanically interlocks the pair of columnar members to displace the other end in the approaching / separating direction.

In the thickness measuring apparatus of Patent Document 1, a pair of ball screws are driven to rotate using a stepping motor, and a pair of injection nozzles are driven in the approaching and separating directions, and a pair of injection nozzles are used using a pair of drive sources. Is driving. By mechanically interlocking a pair of columnar members with an injection nozzle attached to the other end, the pair of injection nozzles can be driven using a single driving source, and the thickness measuring apparatus has a configuration. Simplified.

[0009] In a preferred aspect of the present invention, the rotating body thickness measuring device is mounted and fixed on a table of a surface grinder together with the rotating crane inning device adjacent to the rotating crane inking device. The thickness of the rotating grindstone of the surface grinder, which is finished by a crushing device and positioned between the pair of injection nozzles by the movement of the table, is measured.

The rotating body thickness measuring apparatus according to the present invention is placed and fixed on a table of a surface grinder together with the rotating crane lining apparatus adjacent to the rotating vine tooling apparatus, and finished by the rotary vine tooling apparatus. Measure the thickness of the rotating grindstone of the surface grinder immediately after finishing by positioning the rotating grindstone of the surface grinder, which is positioned between the pair of spray nozzles of this device by moving the table. can do.

[0010] In the present invention, the distance between a stationary sample nozzle made of the same material as the rotating body to be measured and the injection nozzle, and the back pressure of the injection nozzle when the fluid is injected from the injection nozzle toward the sample nozzle Measure the correlation with the value in advance, measure the back pressure of the spray nozzle when fluid is sprayed from the spray nozzle toward the rotating body, and position between the pair of spray nozzles based on the back pressure and the correlation Calculate the distance between the rotating body and each injection nozzle Provided is a rotating body thickness measuring method characterized by measuring the separation and calculating the thickness of the rotating body from the distance between the rotating body and each injection nozzle and the distance between the nozzles.

If the sample and the rotating body are the same material, the surface state of the sample and the surface state of the rotating body are the same, the distance between the stationary sample and the injection nozzle, and the nozzle from the injection nozzle toward the sample. Correlation force with the back pressure value of the injection nozzle when the fluid is injected The distance between the rotating body and the injection nozzle, and the back pressure value of the injection nozzle when the fluid is injected from the injection nozzle toward the rotating body Therefore, the distance between the stationary sampler that has the same material force as the rotating body to be measured and the injection nozzle, and the back pressure value of the injection nozzle when fluid is injected from the injection nozzle toward the sample Is measured in advance, the back pressure of the injection nozzle when the fluid is ejected from the ejection nozzle toward the rotating body is measured, and the rotation positioned between the pair of ejection nozzles is determined from the back pressure and the correlation. Body and each jet The thickness of the rotating body is calculated by calculating the distance between the nozzles, measuring the distance between the nozzles, and calculating the thickness of the rotating body from the distance between the rotating body and each injection nozzle and the distance between the nozzles. Can measure force without contact S. The invention's effect

The inventor of the present invention correlates the distance between the stationary sump nore and the injection nozzle and the back pressure value of the injection nozzle when the fluid is injected from the injection nozzle toward the sample. It was found that the relationship between the distance to the injection nozzle and the back pressure value of the injection nozzle when fluid was injected toward the sump nore was also established. If the sample material and the rotating body are the same material, the surface state of the sample and the surface state of the rotating body are the same, so the distance between the stationary sample and the injection nozzle and the fluid from the injection nozzle toward the sample Correlation force between the back pressure value of the injection nozzle when jetting a fluid and the distance between the rotating body and the injection nozzle and the back pressure value of the injection nozzle when fluid is ejected from the injection nozzle toward the rotating body It also holds in between. Therefore, the correlation between the distance between the stationary sample having the same material force as that of the rotating body to be measured and the injection nozzle and the back pressure value of the injection nozzle when the fluid is injected from the injection nozzle toward the sample is obtained in advance. Measure and calculate the distance between each jet nozzle and the rotary body positioned between the pair of jet nozzles from the back pressure of the jet nozzle when fluid is jetted from the jet nozzle toward the rotor and the above correlation And By measuring the distance between the nozzles and calculating the thickness of the rotating body from the distance between the rotating body and each injection nozzle and the distance between the nozzles, the thickness of the rotating body can be measured in a non-contact manner. BEST MODE FOR CARRYING OUT THE INVENTION

An embodiment of the present invention will be described with reference to FIGS.

The rotating body thickness measuring apparatus A includes a base 1 and a pair of columnar members 2 a and 2 b each having one end fixed to the base 1. The columnar members 2a and 2b stand upright from the base 1 and extend parallel to each other. In the vicinity of the fixed ends of the columnar members 2a and 2b, fragile portions 2a ′ and 2b ′ that are sheared and elastically deformed in parallel to the base 1 are disposed as indicated by a dashed line in FIG.

A ball screw 3 is screwed into a portion farther from the base 1 than the weakened portions 2a ′ and 2b ′ of the columnar members 2a and 2b. The ball screw 3 passes through the columnar members 2a and 2b. A handle 4 is fixed to one end of the ball screw 3. The other end of the ball screw 3 is rotatably supported around the central axis of the ball screw 3 by a stopper 6 fixed to the base 1 via a sphere 5 fixed to the other end.

A screw in the opposite direction to the threaded portion 3b of the ball screw 3 with the columnar member 2b is formed in the threaded portion 3a of the ball screw 3 with the columnar member 2a. As a result, when the handle 4 is rotated, the columnar members 2a and 2b receive the urging force from the ball screw 3 and deform in the approaching / separating direction, and the other ends of the columnar members 2a and 2b are displaced in the approaching / separating direction. . At this time, the weakened portions 2a 'and 2b' are elastically deformed in the previous stage, so that the portions of the columnar members 2a and 2b that are farther from the base 1 than the weakened portions 2a 'and 2b' remain upright with respect to the base 1. While moving in parallel.

A pair of panels 7a and 7b for urging the columnar members 2a and 2b toward each other are provided.

[0013] Injection nozzles 8a and 8b are attached to the other ends of the columnar members 2a and 2b that are separated from the base 1. The injection nozzles 8a and 8b are arranged facing each other. The injection nozzles 8a and 8b are connected to compressed air supply sources 9a and 9b for supplying compressed air having a predetermined pressure via pipes 10a and 10b. AE converters l la and l ib for measuring the back pressure of the injection nozzles 8a and 8b are arranged in the middle of the pipes 10a and 10b. The AE converters l la and l ib are devices that convert the back pressure of the injection nozzles 8a and 8b into the displacement of the diaphragm, and convert the displacement of the diaphragm into an electrical signal using a differential transformer, and are commercially available. AE converter l la, l ib output The signal is input to the data processor 12.

Linear gauges 13a and 13b for measuring the amount of movement of the injection nozzles 8a and 8b are fixed to the other ends of the columnar members 2a and 2b via arm members. The output signals of the linear gauges 13a and 13b are also input to the data processing device 12.

The rotating body thickness measuring device A is mounted and fixed on the table C of the surface grinding machine together with the rotating tooling device B adjacent to the rotating tooling device B.

The rotary crane 1 / fung device B is a device that finish-cuts the peripheral edge portion 101 of the rotating grindstone 100 of the surface grinder to a predetermined thickness by using two rotary grinding disks B1, B2.

By moving the table C in the direction of the white arrow in Fig. 1, the peripheral edge 101 of the rotating grindstone 100 is positioned or rotated between the rotating grinding disks Bl and B2 of the rotary claw unit B. Positioning can be performed between the pair of spray nozzles 8a and 8b of the body thickness measuring apparatus A.

[0015] The operation of the rotating body thickness measuring apparatus A will be described.

The data processing unit 12 injects compressed air from the injection nozzles 8a and 8b toward the sample, and the distance between the stationary sample nozzle having the same material force as the rotating grindstone 100 to be measured and the injection nozzles 8a and 8b. The previously measured correlations α and i3 with the back pressure values of the injection nozzles 8a and 8b are stored.

Correlation α, is the assembly of the injection nozzle 8a, compressed air supply source 9a, piping 10a, AE converter 1 1a, and data processor 12 before being incorporated into the rotating body thickness measuring device A, and incorporated into the rotating body thickness measuring device A. Measured using assembly of previous injection nozzle 8b, compressed air supply source 9b, piping 10b, AE converter l ib and data processor 12.

Correlation α is calculated by placing the sample of the same material as the rotating whetstone 100 on the surface plate and measuring the distance between the injection nozzle 8a and the surface plate measured using a reduction gauge, the thickness and force of the sample. The relationship between the distance between the injection nozzle 8a and the sample and the back pressure of the injection nozzle 8a when compressed air is injected from the injection nozzle 8a toward the sump nore measured using the AE converter 1 1a. Measurement is performed by obtaining a large number of spray nozzles 8a opposed to the sample by moving them closer to and away from the sample and changing the distance between the sample nozzle and the spray nozzle 8a in various ways.

As shown in FIG. 3, the correlation α is an orthogonal coordinate with the back pressure on the vertical axis and the distance on the horizontal axis. On the top, as the distance increases from zero, it continuously changes from an upward convex curve to a negative slope straight line to a downward convex curve. In the correlation curve portion, the distance changes greatly with a slight change in back pressure. Therefore, it is difficult to use the correlation curve portion to accurately measure the distance based on the back pressure. By using the linear portion of the correlation, the distance between the rotating body and each injection nozzle can be accurately measured based on the back pressure. Therefore, the data processor 12 stores the linear portion of the correlation string. The minimum back pressure value pi and the maximum back pressure p2 of the linear portion of the correlation string are displayed on the display unit of the data processing device 12.

Correlation / 3 is also measured in the same way as a correlation person. The data processor 12 stores the linear portion of correlation / 3. The minimum back pressure value and the maximum back pressure value of the linear portion of the correlation β are displayed on the display unit of the data processing device 12.

[0016] The data processing device 12 stores the output values of the linear gauges 13a and 13b when the injection nozzles 8a and 8b come close to each other and come into contact with each other.

[0017] An operator moves the table C and moves the outer peripheral edge 101 of the rotating grindstone 100 during rotation of the surface grinder to the two rotary grinding disks B l and B2 of the rotary clawing device B. Positioning between them, the rotary grinding disks B1 and B2 are rotated, and the peripheral edge 101 of the rotary grindstone 100 is finished to a substantially predetermined thickness.

The worker moves the table C, and as shown in FIG. 2, the outer peripheral edge 101 of the rotating grindstone 100 during rotation of the surface grinder is placed between the injection nozzles 8a and 8b of the rotating body thickness measuring apparatus A. Position.

The worker turns the handle 4 to make the injection nozzles 8a and 8b asymptotic to the outer peripheral edge 101 of the rotating grindstone 100 while injecting compressed air from the injection nozzles 8a and 8b. The back pressure of the injection nozzles 8a and 8b measured by the AE converters 11a and ib is displayed on the display unit of the data processing device 12. The worker is responsible for the minimum back pressure value and the maximum back pressure value of the linear portion of the correlation and β displayed on the display unit of the data processing device 12, and the injection nozzles 8a and 8b measured by the converters lla and l ib. Compared with the back pressure, the back pressure of the injection nozzle 8a measured by the AE converter 1 1a is between the minimum back pressure value and the maximum back pressure value of the linear part of the correlation a, and the AE converter l ib measured The back pressure of the injection nozzle 8b correlates between the minimum back pressure value and the maximum back pressure value of the linear part When it is, stop rotating the handle 4 and press the thickness measurement start button on the data processor 12.

[0018] The data processing device 12 uses a linear portion of the correlation α and the back pressure value of the injection nozzle 8a measured by the power converter 1 1a to determine the distance between the injection nozzle 8a and the outer peripheral edge 101 of the rotating grindstone 100. The distance is calculated, and the distance between the injection nozzle 8b and the outer peripheral edge 101 of the rotating grindstone 100 is calculated from the linear part of the correlation β and the back pressure value of the injection nozzle 8b measured by the ΑΕ converter l ib.

The data processing device 12 uses the output values of the linear gauges 13a and 13b when the pre-stored injection nozzles 8a and 8b come close to each other and the current output values of the linear gauges 13a and 13b. The distance between the injection nozzles 8a and 8b is calculated.

The data processing device 12 determines the distance between the injection nozzle 8a and the outer peripheral edge 101 of the rotating grindstone 100, the injection nozzle 8b and the outer peripheral edge 101 of the rotating grindstone 100 from the distance between the injection nozzles 8a and 8b. The thickness of the outer peripheral edge 101 of the rotating grindstone 100 is calculated by subtracting the sum of the distances between them and displayed on the display.

The thickness force of the outer peripheral edge 101 of the rotating grindstone 100 immediately after finishing by the rotary clawing device B in the above procedure is measured with the rotating grindstone 100 rotated. If the measured value is larger than the desired value, move the table C and position the outer peripheral edge 101 of the rotating grindstone 100 between the two rotating grinding disks B 1 and B2 of the rotary clawing device B. And rotate the rotating grinding disks B1, B2 to further finish the peripheral edge 101 of the rotating grindstone 100.

By repeating the finishing and thickness measurement, the outer peripheral edge 101 of the rotating grindstone 100 is finished to a desired thickness.

[0019] A rotating grindstone 100 having a thickness of 0.3 mm is attached to a surface grinder, and using the rotary clawing device B, the peripheral edge 101 of the rotating grindstone 100 is shaved to a thickness of about 0.1 mm, Using the rotating body thickness measuring device A, the distance between the injection nozzles 8a, 8b and the rotating grindstone 100 is fixed to a predetermined point in the linear part of the correlations a, β, and a plurality of Orpm and Orpm to 3000 rpm are set. The thickness of the peripheral portion 101 of the rotating grindstone 100 was measured by the number of rotations. The above measurement was performed at a plurality of predetermined points in the linear part of the correlation β. The measured value was a force with a variation of about 0.5 zm. From this, the distance between the stationary sumnore and the injection nozzle and the sample Nozzle force toward the nozzle Correlation with the back pressure value of the injection nozzle when compressed air is injected is determined by the distance between the rotating sample and the injection nozzle and the compressed air from the injection nozzle toward the sampler. It was proved that it was also established between the back pressure value of the injection nozzle when the fuel was injected.

The thickness of the peripheral edge 101 of the rotary whetstone 100 finished by the rotary clawing device B is about 100 am at the minimum, and the rotation speed of the rotary whetstone 100 when the surface inspection grinder is in operation is about 1500 rpm. The rotating body thickness measuring apparatus A capable of measuring the thickness of the peripheral portion 101 of about 0.1 mm with an error of about 0.5 zm in the range of Orpm to 3000 rpm can be sufficiently put into practical use.

[0020] If the material of the sample is changed, the surface condition of the sample will also change and the correlation and / 3 will also change. Therefore, the sample used when measuring the correlation / 3 in advance is the rotation target for thickness measurement. It is considered necessary to use the same material as the grinding wheel 100.

[0021] In the rotating body thickness measuring apparatus A, the injection nozzles 8a and 8b are fixed to the other ends of the columnar members 2a and 2b with one end extending in parallel, and the pair of columnar members 2a and 2b are fixed. 2b is urged by using the ball screw 3 and the other ends of the pair of columnar members 2a, 2b are displaced in the approaching / separating direction, so that the injection nozzles 8a, 8b can be moved smoothly and accurately. Instead of the ball screw, ordinary screws may be used to urge the columnar members 2a and 2b in the approaching / separating direction.

The springs 7a and 7b urge the columnar members 2a and 2b toward each other so that there is no backlash when the ball screw 3 rotates, and the movement of the injection nozzles 8a and 8b becomes smoother.

[0022] It is desirable that the injection nozzles 8a and 8b are always directed in a direction orthogonal to the surface of the rotating grindstone. If the weakened parts 2a 'and 2b' that are cut elastically deformed are located closer to the fixed end than the force applied to the ball screw 3 of the columnar members 2a and 2b, the ball screw 3 is rotated to urge the columnar members 2a and 2b. In this case, the fragile portions 2a 'and 2b' are sheared and elastically deformed as indicated by the alternate long and short dashed lines in FIG. 2, and the portions of the columnar members 2a and 2b closer to the other end than the fragile portions 2a 'and 2b' are inclined. Therefore, the spray nozzles 8a and 8b can always be directed perpendicularly to the surface of the rotating grindstone 100. [0023] In the rotating body thickness measuring apparatus A, the pair of columnar members 2a and 2b having the injection nozzles 8a and 8b attached to the other end are mechanically interlocked using a ball screw 3, thereby A pair of injection nozzles 8a and 8b can be driven using a single driving source that rotates. As a result, the configuration of the thickness measuring apparatus A is simplified.

FIG. 4 shows a rotating body thickness measuring apparatus A ′ according to another embodiment of the present invention.

In the rotating body thickness measuring device A ′, instead of mechanically interlocking the pair of columnar members 2a and 2b, each having an injection nozzle 8a and 8b attached to the other end, using a ball screw 3, a spring 14 is provided. Using the urging of the columnar members 2a, 2b in a direction approaching each other, rotating the cam 15 that engages the portion closer to the other end than the fragile portions 2a ', 2b' of the columnar members 2a, 2b, The columnar members 2a and 2b are mechanically linked to drive the injection nozzles 8a and 8b in the approaching and separating directions.

[0025] Instead of compressed air, compressed gas or liquid may be ejected from the ejection nozzles 8a and 8b.

Industrial applicability

The present invention can be widely used for measuring the thickness of a rotating body.

Brief Description of Drawings

FIG. 1 is a top view of a rotating body thickness measuring device and a rotating crane laying device according to an embodiment of the present invention mounted and fixed on a table of a surface grinding machine.

FIG. 2 is a view taken along the line II-II in FIG.

FIG. 3 is a diagram showing a correlation between a distance between a stationary sample and an injection nozzle and a back pressure value of the injection nozzle when compressed air is injected from the injection nozzle toward the sample.

FIG. 4 is a partial structural diagram of a rotating body thickness measuring apparatus according to another embodiment of the present invention.

Claims

The scope of the claims

[1] A pair of injection nozzles for injecting fluid, an injection nozzle driving means for driving the pair of injection nozzles in an approaching / separating direction, an inter-nozzle distance measuring means for measuring a distance between the pair of injection nozzles, A back pressure measuring means for measuring the back pressure of the pair of injection nozzles, and a data processing unit for performing a calculation based on the measurement data of the inter-nozzle distance measuring means and the measurement data of the back pressure measuring means, The data processing unit determines the distance between the stationary sump nore that has the same material force as the rotating body to be measured and the injection nozzle, and the back pressure value of the injection nose when the fluid is injected from the injection nozzle toward the sample. Is stored between the pair of injection nozzles based on the back pressure of the injection nozzle when the fluid is injected from the injection nozzle toward the rotating body measured by the back pressure measuring means and the correlation. The The distance between the rotating body and each injection nozzle is calculated, and the thickness of the rotating body is calculated from the distance between nozzles measured by the distance measuring means and the distance between the rotating body and each injection nozzle. Rotating body thickness measuring device characterized by that.

[2] The rotating body thickness measuring apparatus according to [1], wherein the data processing unit calculates a distance between the rotating body and each injection nozzle using the linear portion of the correlation.

[3] The pair of injection nozzles is fixed to the other end of a pair of columnar members having one end extending in parallel, and the injection nozzle driving means urges the pair of columnar members to 3. The rotating body thickness measuring apparatus according to claim 1, wherein the other end portions of the pair of columnar members are displaced in the approaching / separating direction.

[4] The rotating body thickness measurement according to [3], wherein a fragile portion that undergoes shear elastic deformation is disposed in a portion of the columnar member closer to the fixed end than the point of application of the spray nozzle driving means. apparatus.

[5] The rotating body thickness according to claim 3 or 4, wherein the injection nozzle driving means mechanically interlocks the pair of columnar members to displace the other end in the approaching / separating direction. measuring device.

[6] Adjacent to the rotary clawing device and mounted on the table of the surface grinder together with the rotary clawing device, finished by the rotary clawing device, and moved by the table Of the surface grinder positioned between the pair of injection nozzles The rotating body thickness measuring device according to any one of claims 1 to 5, wherein the thickness of the rotating grindstone is measured.

Preliminarily measure the correlation between the distance between the stationary sample and the injection nozzle that has the same material force as the rotating body to be measured and the back pressure value of the injection nozzle when the fluid is injected from the injection nozzle toward the sample. The back pressure of the injection nozzle when fluid is ejected from the injection nozzle toward the rotating body is measured, and the rotating body positioned between the pair of injection nozzles and each injection nozzle are determined from the back pressure and the correlation. Rotating body thickness measurement, characterized by calculating the distance between the nozzles, measuring the distance between nozzles, and calculating the thickness of the rotating body from the distance between the rotating body and each injection nozzle and the distance between nozzles. Method.