JP5294949B2 - Measuring device for rotating body thickness etc. - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an apparatus for measuring the wall thickness and others of a rotating body which can simply and accurately measure the wall thickness, uneven thickness, a state of eccentricity and others even when the rotating body is shaped like a tube of which the dimensions of outer and inner diameters differ according to the position in the axial direction. <P>SOLUTION: This apparatus for measuring the wall thickness and others includes a horizontally moving table mechanism 10 which has a horizontally moving table 11 being movable in the direction intersecting perpendicularly the center axis O of a measured object W supported by a measured object support base device 1, and a measuring table mechanism 20, which has a probe support 22 so provided on the horizontally moving table 11 as to be movable in the same direction as this table. A probe 30 which detects the contact of a measuring terminal with the inner and outer peripheral surfaces of the measured object W is provided on the probe support 22. The forward-backward movement position of the horizontally moving table 11 is detected by a horizontal position detecting means 40, while the amount of displacement of the probe support 22 in relation to the horizontally moving table 11 is detected by a displacement amount detecting means 50. The wall thickness of the measured object W is computed from a detected value of the displacement amount of the displacement amount detecting means 50 and a detected value of the position of the horizontal position detecting means 40 which are obtained when the measuring terminal is brought into contact with the inner peripheral surface of the measured object and the outer peripheral surface at the position opposite thereto. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  The present invention relates to an apparatus for measuring the thickness of a rotating body that measures uneven thickness and the like caused by a deviation between an inner peripheral surface central axis and an outer peripheral surface central axis in a cylindrical rotating body-shaped object to be measured.

Conventionally, the following structures (for example, patent document 1) are known as a technique which measures the thickness variation state of a cylindrical body.
In this measurement technique, a first straight line passing through an arbitrary one point on the outer circumference circle and a virtual center point of the outer diameter is assumed for a cylindrical body whose outer diameter and inner diameter are known in advance. The coordinates of four points, which are the points where the first straight line intersects the outer and inner circles of the cylindrical body, are measured by a position detection means such as a potentiometer. Alternatively, the position detecting means further assumes a second straight line orthogonal to the first straight line at a virtual center point, and the second straight line intersects with the outer circumference circle and the inner circumference circle of the cylindrical body. The coordinates of the four points are measured. Based on the coordinate data of 4 or 8 points measured in this way and the known outer diameter and inner diameter dimensions, the deviation (eccentricity) between the center point of the outer diameter and the center point of the inner diameter, The thickness unevenness state of the cylindrical body is measured by calculating the thickness dimension, the minimum wall thickness dimension, and the maximum wall thickness deviation, which is the difference between the maximum wall thickness dimension and the minimum wall thickness dimension, by an arithmetic unit.

JP 7-318301 A

  However, in the above-described conventional cylindrical body thickness measurement technology, it is necessary to separately measure the outer diameter and inner diameter of the cylindrical body to be measured in advance using a measuring instrument, which is troublesome. In the thickness measurement technique, if the outer diameter or inner diameter of the object to be measured is not constant in the axial direction, the position of the outer diameter, the position of the inner diameter in the axial direction of the object to be measured, and position detection means It is necessary to make the measurement positions coincide with each other. In the case of the thickness measurement technique, since a cylindrical object to be measured is a measurement object, there is no means for matching the measurement position in the axial direction, and it is difficult to measure thickness deviation and eccentricity.

  The object of the present invention is not limited to the case where the object to be measured is cylindrical, and even if it is a cylindrical rotating body whose outer diameter and inner diameter are different depending on the position in the axial direction, its eccentricity, eccentricity, and outer peripheral surface Another object of the present invention is to provide an apparatus for measuring the thickness of a rotating body, which can easily and accurately measure the shape of the inner peripheral surface.

The measuring apparatus for measuring the thickness of a rotating body of the present invention includes a measured object support base apparatus 1 that supports a cylindrical rotating body-shaped object to be measured W, and a measured object supported by the measured object support base apparatus 1. A horizontal moving table 11 having a horizontal moving table 11 that can move forward and backward in a direction orthogonal to the central axis O of the object W, a horizontal drive mechanism 12 that drives the horizontal moving table 11 to move forward and backward, and the horizontal moving table 11. Further, a measurement table mechanism 20 in which a probe support 22 is installed so as to be movable back and forth in the same direction as the horizontal movement table 11 can be moved forward and backward, and a base end is attached to the probe support 22 so that the object W to be measured is attached to the tip. A probe 30 that has measurement terminals 31 and 32 that can contact the inner and outer peripheral surfaces and generates a detection signal when the measurement terminals 31 and 32 come in contact with each other, and a horizontal that detects the advancing / retreating position of the horizontal moving table 11. Position detection means 4 And a displacement amount detecting means 50 for detecting the displacement amount of the probe support 22 with respect to the horizontal moving table 11, and the horizontal moving table 11 is moved by the horizontal driving mechanism 12 to measure the measurement terminals 31 and 32 of the probe 30. Of the displacement amount detecting means 50 when the measuring terminals 31 and 32 are brought into contact with the outer peripheral surface of the workpiece W facing the contact position. And a thickness calculating means 74 for calculating the thickness of the workpiece W from the displacement detection value and the position detection value of the horizontal position detecting means 40. The rotating body refers to a locus of a figure when a figure in the plane is rotated around a straight line in the plane, and the shape of the rotating body refers to the shape of such a rotating body.
According to this configuration, after moving the horizontal moving table 11 forward and backward to position the probe 30 at the measurement preparation position, the probe 30 is moved forward and backward in the horizontal direction together with the probe support 22 installed on the horizontal moving table 11. The 30 measurement terminals 31 and 32 are brought into contact with the inner and outer peripheral surfaces of the object W to be measured. The thickness of the object W to be measured is calculated by the thickness calculation means 74 using the position detection value of the advance / retreat position of the horizontal moving table 11 and the detected value of the displacement amount of the probe support 22 with respect to the horizontal moving table 11 at the time of contact. Calculate. Therefore, even if the diameter of the horizontal cross-sectional circle of the inner and outer peripheral surfaces is not measured in advance by another method for each object to be measured W, it is possible to easily measure the thickness of the object W at a predetermined height. it can.

In the present invention, the measurement terminals 31 and 32 are brought into contact with four intersections that are intersections of a straight line orthogonal to the central axis O of the object to be measured W and the inner and outer peripheral surfaces of the object to be measured W. Then, the thickness of the two parts of the workpiece W is calculated from the displacement detection value of the displacement detector 50 and the position detection value of the horizontal position detector 40, and the thicknesses of these two parts are calculated. You may provide the thickness variation calculating means 75 which calculates the thickness variation from the difference of a calculated value.
In the case of this configuration, the amount of uneven thickness of the workpiece W can be easily measured.

The measurement table mechanism 20 has a probe support base 21 installed on the horizontal moving table 11 so as to be movable forward and backward in the same direction as the horizontal moving table 11. 22 is a two-tiered structure in which the probe 22 is moved in the same direction as the horizontal movement table 11 so as to be movable back and forth. A first spring member 25 that urges the probe to a position that can be stopped by a stopper 23 provided on the horizontal moving table 11, and the probe support 22 in the other direction in which the probe support base 21 can move forward and backward. A second spring member 26 is urged to a position stopped by a stopper 24 provided on the support base 21, and the probe 30 includes the measurement terminal 31, 2, facing in opposite directions with respect to the advancing / retreating direction of the probe support 22, the displacement amount detecting means 50 is adapted to advance / retreat the probe support 22 which is the center line of the measurement terminals 31, 32. A displacement on a straight line along the direction is detected .
In the case of this configuration, even if the horizontal movement table 11 overruns and stops after the measurement terminals 31 and 32 contact the object to be measured W, the position where the measurement terminals 31 and 32 contact the object to be measured W is accurately determined. It can be measured well.

In the present invention, the horizontal movement table mechanism 10 can be moved up and down in the vertical direction, which is parallel to the central axis O of the workpiece W supported by the workpiece support base device 1 with respect to the base 6. There may be provided a vertical moving table mechanism 60 having a vertical moving table 61 installed on the vertical moving mechanism 61 and a vertical driving mechanism 62 for driving the vertical moving table 61 up and down.
In the case of this configuration, the measurement height position of the workpiece W with which the measurement terminals 31 and 32 of the probe 30 are brought into contact can be easily variably set.

In the present invention, the object support base device 1 includes a turntable 3 on which the object W is mounted and can be gripped by the chuck 2, and a rotation that can be stopped and positioned at an arbitrary angle by rotating the turntable 3. The horizontal movement table mechanism 10 includes a drive mechanism 4 and a rotation angle detection unit 5 that detects a rotation angle of the turntable 3. The horizontal movement table mechanism 10 includes a probe 30 on a straight line perpendicular to the center line O of the turntable 3. May be movably provided on both front and rear sides of the center line O.
In the case of this configuration, the workpiece W can be easily stopped and positioned at an arbitrary rotation angle, and the probe 30 can be easily moved horizontally inside and outside the workpiece W.

In the present invention, the object support base device 1 includes a turntable 3 on which the object W is mounted and can be gripped by the chuck 2, and a rotation that can be stopped and positioned at an arbitrary angle by rotating the turntable 3. The horizontal movement table mechanism 10 includes a driving mechanism 4 and a rotation angle detection unit 5 that detects a rotation angle of the turntable 3. The horizontal movement table mechanism 10 includes a probe 30 on a straight line perpendicular to the center line O of the turntable 2. Is movably provided on both front and rear sides of the center line O,
In addition, a mechanical operation control means 71 for controlling the horizontal drive mechanism 12 and the rotary drive mechanism 4, a signal capturing means 72 for capturing a detection signal of the probe 30, a thickness calculating means 74, and an uneven thickness calculating means. A control device 70 including a computing unit 73 having 75 is provided;
The mechanical operation control means 71 performs index rotation of the turntable 3 at every predetermined angle, and the horizontal movement table mechanism 10 causes the measurement terminals 31 and 32 to be predetermined on the inner peripheral surface or outer peripheral surface of the object W to be measured. The signal capturing means 72 is moved to and brought into contact with the measurement position, and when the measurement terminals 31 and 32 are brought into contact with the object to be measured, the advance / retreat position detected by the horizontal position detection means 40, and the displacement The amount of displacement detected by the amount detection means 50 and the rotation angle detected by the rotation angle detection means 5 are fetched into the computing unit 73, and the computing unit 73 is measured from each information fetched by the signal fetching means 72. It is good also as what calculates the thickness between the inner peripheral surface of the thing W and an outer peripheral surface, the amount of thickness deviation, eccentricity, and the diameter of an inner peripheral surface and an outer peripheral surface.
In the case of this configuration, the thickness, uneven thickness, diameter of the inner peripheral surface and outer peripheral surface of the workpiece W can be easily measured.

In the present invention, the horizontal movement table mechanism 10 can be moved up and down in the vertical direction, which is parallel to the central axis O of the workpiece W supported by the workpiece support base device 1 with respect to the base 6. A vertical movement table mechanism 60 having a vertical movement table 61 installed in the vertical movement mechanism 61 and a vertical drive mechanism 62 that drives the vertical movement table 61 up and down,
The mechanical operation control means 71 moves the horizontal movement table mechanism 10 to a lift position where the measurement terminals 31 and 32 come into contact with the set height of the object W to be measured, and the measurement terminals 31, It is good also as what moves 32 to the predetermined | prescribed measurement position in the inner peripheral surface or outer peripheral surface of the to-be-measured object W, and contacts.
In the case of this configuration, it is possible to more easily measure the thickness of the workpiece W, the amount of uneven thickness, and the diameters of the inner and outer peripheral surfaces.

In the present invention, the horizontal movement table mechanism 10 can be moved up and down in the vertical direction, which is parallel to the central axis O of the workpiece W supported by the workpiece support table device 1 with respect to the base 1. And a vertical movement table mechanism 60 having a vertical drive mechanism 62 having a vertical drive mechanism 62 for moving the vertical movement table 61 up and down, and a vertical position detection means 63 for detecting the height position of the vertical movement table 61. The vertical movement table mechanism 60 is used to move the measurement terminals 31 and 32 in the height direction of the object W to be measured, so that the measurement terminals 31 and 32 are positioned on the outer peripheral surface or inner peripheral surface of the object W at each height position. From the detected values of the horizontal position detecting means 40, the displacement detecting means 50, and the vertical position detecting means 63, the shape of the vertical cross section of the outer peripheral surface or inner peripheral surface of the workpiece W is calculated. Hanging It may be provided a cross-sectional shape calculation unit 78.
In the case of this configuration, the vertical sectional shape of the workpiece W can be easily measured.

In the present invention, the object support base device 1 includes a turntable 3 on which the object W is mounted and can be gripped by the chuck 2, and a rotation that can be stopped and positioned at an arbitrary angle by rotating the turntable 3. A driving mechanism 4 and a rotation angle detecting means 5 for detecting the rotation angle of the turntable 3 are provided. The rotation drive mechanism 4 is rotated together with the turntable 3 of the object W to be measured, and the measurement terminal 31 is rotated at each rotation angle. , 32 are brought into contact with the object W to be measured, from the detected values of the horizontal position detecting means 40, the displacement amount detecting means 50 and the rotation angle detecting means 5, the outer peripheral surface or the inner peripheral surface of the object W to be measured. Horizontal section shape calculating means 79 for calculating the shape of the horizontal section may be provided.
In the case of this configuration, the horizontal cross-sectional shape of the workpiece W can be easily measured.

The measuring apparatus for measuring the thickness of the rotating body of the present invention includes a measuring object support base device that supports a cylindrical measuring object having a rotating body shape, and a center of the measuring object supported by the measuring object support base device. A horizontal movement table that has a horizontal movement table that is movable back and forth in a direction perpendicular to the axis, and a horizontal drive mechanism that drives the horizontal movement table to advance and retreat; and a direction in which the horizontal movement table can move forward and backward A measurement table mechanism in which a probe support is installed so as to be movable back and forth in the same direction, and a measurement terminal having a base end attached to the probe support and capable of contacting the inner and outer peripheral surfaces of the object to be measured at the tip. A probe that generates a detection signal by contact with the measurement terminal, a horizontal position detection unit that detects an advance / retreat position of the horizontal moving table, and a displacement amount detection that detects a displacement amount of the probe support relative to the horizontal moving table. Means and When the horizontal moving mechanism is moved by the horizontal drive mechanism to bring the measurement terminal of the probe into contact with the inner peripheral surface of the object to be measured, and the measurement terminal is placed on the outer peripheral surface of the object to be measured opposite to the contact position. when contacted, the example Bei a thickness calculating means for calculating the thickness of the displacement amount detection value and the object to be measured from the position detection value of the horizontal position detecting means of the displacement amount detecting means, the measuring table mechanism The probe support base is installed on the horizontal moving table in the same direction as the horizontal moving table so that the horizontal moving table can move forward and backward, and the probe supporting body is moved to the probe supporting base in the direction in which the horizontal moving table can move forward and backward. The probe support base is stopped by a stopper provided on the horizontal moving table in one of the movable directions with respect to the horizontal moving table. A first spring member for urging to a position where the probe is supported, and urging to a position where the probe support is stopped by a stopper provided on the probe support base in the other direction in which the probe support can be advanced and retracted. The probe has two measurement terminals facing away from each other with respect to the advancing and retreating direction of the probe support, and the displacement detection means is a center of the measurement terminal. Since it detects a displacement on a straight line along the advancing and retreating direction of the probe support, which is a line, not only when the object to be measured is cylindrical, but a cylinder whose outer diameter and inner diameter are different depending on the axial position. Even in the case of a rotating body, it is possible to easily and accurately measure the thickness deviation, the eccentric state, and the shapes of the outer peripheral surface and the inner peripheral surface.

1 is a schematic view of a measuring apparatus for measuring the thickness of a rotating body according to an embodiment of the present invention. It is a partial top view in the same thickness etc. measuring apparatus. It is a partial front view in the same thickness etc. measuring apparatus. It is a block diagram which shows schematic structure of the control apparatus in the same thickness measurement apparatus. It is explanatory drawing of the measurement position of the to-be-measured object by the same thickness etc. measuring apparatuses. It is explanatory drawing of an example of the measurement operation | movement by the same thickness etc. measuring apparatus. It is explanatory drawing of another example of the measurement operation | movement by the same thickness etc. measuring apparatus.

  An embodiment of the present invention will be described with reference to FIGS. This rotating body thickness measuring device is a device for measuring the thickness, the amount of eccentricity, the amount of eccentricity, etc. of a measurement object W having a cylindrical rotating body shape as shown in FIG. As shown in FIG. 1, this rotating body thickness measuring apparatus includes a measured object support base apparatus 1 that supports the measured object W, a horizontal movement table mechanism 10, a measurement table mechanism 20, and a probe 30. A horizontal position detecting means 40, a displacement amount detecting means 50, a vertical movement table mechanism 60, and a control device 70.

  The measured object support base device 1 includes a rotating table 3 on which the measured object W is mounted and can be gripped by the chuck 2, and a rotation drive mechanism 4 that can rotate and position the rotating table 3 at an arbitrary rotation angle. And rotation angle detection means 5 for detecting the rotation angle of the turntable 3. The object support table device 1 is installed on the base 6 so that the center line O of the rotating table 3 is oriented in the vertical direction (Z-axis direction). The rotation angle detection means 5 is composed of a rotary encoder having a resolution of 0.01 °, for example. The device under test W can position the device under test W at an arbitrary rotation angle. Here, the chuck 2 grips the workpiece W on the inner peripheral surface side and mounts the workpiece W on the rotary table 3 so that the central axis of the inner peripheral surface coincides with the center line O of the rotary table 3. In the following description, the central axis of the workpiece W refers to the central axis of the inner peripheral surface of the workpiece W. In addition, since the center axis of the workpiece W coincides with the center line O of the turntable 3, the center axis of the workpiece W is indicated by the same symbol O as the center line O of the turntable 3.

  The horizontal movement table mechanism 10 includes a horizontal movement table 11 that is movable back and forth in a direction (X-axis direction) orthogonal to the central axis O of the measurement object W supported by the measurement object support table device 1. And a horizontal drive mechanism 12 that drives the horizontal moving table 11 forward and backward. The horizontal drive mechanism 12 includes a ball screw (not shown) and a horizontal drive motor 13 that drives the ball screw.

  The vertical movement table mechanism 60 includes a vertical movement table 61, a vertical drive mechanism 62 that drives the vertical movement table 61 up and down in the vertical direction (Z-axis direction), and a vertical position detection that detects the height position of the vertical movement table 61. Means 63. The vertical drive mechanism 62 includes a ball screw (not shown) and a vertical drive motor 64 that drives the ball screw. The vertical moving table 61 is provided with the horizontal moving table mechanism 10. The vertical drive mechanism 62 is installed on the base 6 in a vertical posture. Thereby, the horizontal movement table mechanism 10 can be moved up and down in a direction parallel to the central axis (the center line O of the turntable 3) of the object to be measured W supported by the object support base device 1. It is driven up and down by a vertical drive mechanism 62 via a moving table 61. The vertical position detecting means 63 is composed of, for example, a linear encoder with a resolution of 0.1 μm. With this vertical movement table mechanism 60, the horizontal movement table mechanism 10 can be positioned at a predetermined vertical position.

As shown in the plan view and the front view in FIGS. 2 and 3, the measurement table mechanism 20 includes a probe support base 21 and a probe support 22 that is installed on the probe support base 21 in a two-stage stack. Structure mechanism. The probe support base 21 is installed on the horizontal moving table 11 in the horizontal moving table mechanism 10 so as to be movable forward and backward in the same direction as the horizontal moving table 11 can be advanced and retracted. The probe support 22 is installed on the probe support base 21 so as to be able to advance and retract in the same direction as the direction in which the horizontal moving table 11 can advance and retract. As shown schematically in FIGS. 6 and 7, the probe support base 21 is moved in one of the directions in which it can move forward and backward with respect to the horizontal moving table 11 by the stopper 23 provided on the horizontal moving table 11 (to the object W to be measured). Stop on the opposite side. In addition, between the probe support base 21 and the horizontal movement table 11, the probe support base 21 is urged to the position where it can be stopped by the stopper 23 in one of the advanceable and retreatable directions with respect to the horizontal movement table 11. 1 spring member 25 is connected. Further, the probe support 22 is stopped by the stopper 24 provided on the probe support base 21 on the other side of the probe support base 21 in the advanceable / retractable direction (the side opposite to the side facing the object W to be measured). . Further, between the probe support base 21 and the probe support 22, the probe support 22 is urged to the other position in the advanceable / retractable direction with respect to the probe support base 21 to a position where it can be stopped by the stopper 24. Two spring members 26 are connected.

  The probe 30 is attached to one end side of the probe support 22 facing the object W to be measured. As shown in FIG. 3, the probe 30 has an inverted U-shape in which the probe main body 30 a opens downward, and the base end of the probe main body 30 a is attached to one end of the probe support 22. The probe 30 has two measurement terminals 31 and 32 that can contact the inner peripheral surface and the outer peripheral surface of the object W to be measured at the tip of the probe main body 30a. When the measurement terminals 31 and 32 come into contact with each other, the detection signal is detected. Is generated. The two measurement terminals 31 and 32 are arranged facing opposite to each other with respect to the advancing / retreating direction of the probe support 22. In order to ensure the operational stability of the measurement table mechanism 20, the stoppers 23, 24 and the spring members 25, 26 are equally spaced above and below the straight line L that is the center line of the measurement terminals 31, 32. Each pair is provided.

  In FIG. 1, the horizontal position detecting means 40 is a sensor that detects the advance / retreat position of the horizontal moving table 11 in the horizontal moving table mechanism 10. The horizontal position detecting means 40 is composed of, for example, a linear encoder with a resolution of 0.1 μm. The displacement amount detection means 50 is a sensor that detects the displacement amount of the probe support 22 in the measurement table mechanism 20 with respect to the horizontal moving table 11. Specifically, the displacement amount detection means 50 detects the displacement on the straight line L along the advancing / retreating direction of the probe support 22 that is the center line of the measurement terminals 31 and 32 in the probe 30. The detector 50a of the displacement amount detector 50 is arranged on the same straight line L as the center line of the measurement terminals 31 and 32 as shown in FIG. 3 in consideration of Abbe's principle, thereby minimizing the measurement error. It is illustrated.

  In the schematic diagrams shown in FIGS. 6 and 7, in order to simplify the explanation of the operation of the displacement amount detection unit 50, the displacement amount detection unit 50 is in a state where the measurement terminals 31 and 32 are not in contact with the object W to be measured. The displacement amount detecting means 50 is arranged at a position where the detection unit 50a is separated from one end of the probe support 22 by a predetermined interval G0. However, in the actual configuration, as shown in FIG. 3, the detection unit 50 a of the displacement amount detection unit 50 is provided so as to be able to advance and retract in the same direction as the probe support 22 with respect to the base of the displacement amount detection unit 50. It is pressed against one end of the probe support 22 by a biasing force of a spring (not shown).

  In FIG. 1, a control device 70 controls the whole measuring operation of the measuring device for measuring the thickness of the rotating body, and includes a computer such as a microcomputer, a program executed on the computer, an electronic circuit, and the like. Accordingly, a mechanical operation control means 71, a signal capturing means 72, and a calculator 73 are provided. The mechanical operation control means 71 is a control means for controlling the horizontal drive mechanism 12 in the horizontal movement table mechanism 10 and the rotation drive mechanism 5 in the measured object support base device 1. The signal capturing means 72 captures the detection signal from the probe 30.

  Specifically, the mechanical operation control means 71 rotates the turntable 3 in the object support table device 1 by an index at every predetermined angle, and the horizontal movement table mechanism 10 moves the measurement terminals 31 and 32 of the probe 30. The object to be measured W is moved to a predetermined measurement position on the inner circumferential surface or outer circumferential surface of the workpiece W and brought into contact therewith. Further, the mechanical operation control means 71 moves the horizontal movement table mechanism 10 up and down to the up / down position where the measurement terminals 31 and 32 of the probe 30 are in contact with the set height of the workpiece W, and measures at the set height. The terminals 31 and 32 are moved to a predetermined measurement position on the inner peripheral surface or outer peripheral surface of the workpiece W and brought into contact with each other.

  The signal capturing means 72 is an advancing / retreating position detected by the horizontal position detecting means 40 and a displacement detected by the displacement detecting means 50 when the measurement terminals 31 and 32 of the probe 30 are brought into contact with the object W to be measured. , And the rotation angle detected by the rotation angle detection means 5 and the height position detected by the vertical position detection means 63 are taken into the calculator 73.

  The computing unit 73 calculates the thickness between the inner peripheral surface and the outer peripheral surface of the workpiece W, the amount of eccentricity, the amount of eccentricity, and the horizontal sectional circles of the inner peripheral surface and the outer peripheral surface from each piece of information acquired by the signal acquisition means 72. Calculate the diameter, etc. Specifically, as shown in FIG. 4, the calculator 73 includes a thickness calculator 74, an eccentric amount calculator 75, an eccentric amount calculator 76, a diameter calculator 77, a vertical sectional shape calculator 78, and a horizontal section. Shape calculation means 79 is provided.

  The thickness calculating means 74 is opposed to the contact position when the horizontal moving base 11 is moved by the horizontal moving mechanism 12 to bring the measurement terminals 31 and 32 of the probe 30 into contact with the inner peripheral surface of the object W to be measured. The thickness of the workpiece W is determined from the displacement detection value of the displacement detector 50 and the position detection value of the horizontal position detector 40 when the measurement terminals 31 and 32 are brought into contact with the outer peripheral surface of the workpiece W to be measured. It is a means for calculating.

  As shown in FIG. 5, the thickness deviation calculating means 75 includes a straight line L orthogonal to the central axis (center axis of the inner peripheral surface) O of the object to be measured W, and the inner and outer peripheral surfaces of the object W to be measured. The displacement amount detection value of the displacement amount detection means 50 and the horizontal position detection means 40 when the measurement terminals 31, 32 of the probe 30 are brought into contact with the four intersection points A, B, C, D, which are intersection points with the horizontal position detection means 40. From the position detection value, the thickness of two parts of the workpiece W (the thick part between the intersections A and B and the thick part between the intersections C and D) is calculated, and the thicknesses of these two parts are calculated. It is a means for calculating the thickness deviation from the value difference. In this case, the calculated value of the wall thickness may be obtained by using the calculation result of the wall thickness calculating unit 74, or separately from the wall thickness calculating unit 74, It is good also as what has a thickness calculating part as a part.

  The vertical sectional shape calculating means 78 moves the measurement terminals 31 and 32 of the probe 30 in the height direction of the object W to be measured by the vertical moving table mechanism 60 so that the measurement terminals 31 and 32 are measured at each height position. From the detected values of the horizontal position detecting means 40, the displacement amount detecting means 50, and the vertical position detecting means 63 when being brought into contact with the outer peripheral surface or inner peripheral surface of the outer peripheral surface or inner peripheral surface of the workpiece W Is a means for calculating the shape of the vertical cross section.

  The horizontal cross-sectional shape calculation means 79 rotates the measurement object W together with the rotation table 3 by the rotation drive mechanism 4 in the measurement object support table device 1 to bring the measurement terminals 31 and 32 into contact with the measurement object W at each rotation angle. Means for calculating the shape of the horizontal cross section of the outer peripheral surface or inner peripheral surface of the workpiece W from the detected values of the horizontal position detecting means 40, the displacement detecting means 50, and the rotation angle detecting means 5 is there.

Next, an operation for measuring the thickness or the like of the workpiece W by the thickness measuring apparatus for the rotating body will be described.
First, the vertical moving table 61 of the vertical moving table mechanism 60 is moved up and down by the vertical drive mechanism 62, and the vertical moving table 61 is positioned at a predetermined lift position. Thereby, the horizontal movement table mechanism 10 is positioned at a predetermined height position. On the other hand, in the measured object support base device 1, the rotary table 3 is rotated at an arbitrary rotation angle by the rotation drive mechanism 4, and thereby the measured object W mounted on the rotary table 3 is positioned at an arbitrary rotation angle. . At this time, the straight line L that is the center line of the measurement terminals 31 and 32 of the probe 30 is orthogonal to the center axis of the workpiece W (center line O of the turntable 3) as shown in FIG.

In the horizontal movement table mechanism 10 installed on the up-and-down movement table 61, the horizontal movement table 11 is stopped at a predetermined reference position in the forward / backward direction. From this state, the horizontal moving table 11 on which the measurement table mechanism 20 is mounted is moved horizontally toward the object to be measured W by driving the horizontal driving mechanism 12. The operation of the measurement table mechanism 20 at this time is shown in FIG. At the start of the movement of the horizontal moving base 11, the probe support base 21 is stopped by a stopper 23 and the probe support 22 is stopped by a stopper 24 as shown in FIG. When the measurement terminal 22 facing the workpiece W of the probe 30 comes into contact with the outer peripheral surface of the workpiece W, the probe 30 generates a detection signal, and the signal capture means 72 in the control device 70 captures this detection signal. When the measurement terminal 22 comes into contact with the workpiece W, a stop command is given to the horizontal drive motor 13 of the horizontal movement table mechanism 10 from the mechanical operation control means 71 of the control device 70, and the horizontal movement table 11 stops. The stop position of the measurement terminal 31 at this time is the position of point A in FIG. At this time, as shown in FIG. 6B, the horizontal moving base 11 stops beyond the position when the measurement terminal 31 comes into contact with the workpiece W. At this time, the probe support base 21 is displaced from the stopper 23 by a predetermined amount ΔX1 against the urging force of the first spring member 25. In other words, the probe support 22 is displaced by a predetermined amount ΔX1 with respect to the horizontal moving table 11. The displacement amount detection means 50 detects this displacement amount ΔX1. Further, the horizontal position detection means 40 detects the forward / backward movement position of the horizontal movement table 11 at this time. The signal capturing means 72 captures the detected values of the displacement amount detecting means 50 and the horizontal position detecting means 40.
The thickness calculation means 74 of the calculator 73 in the control device 70 subtracts the displacement amount ΔX1 detected by the displacement amount detection means 50 from the detection position by the horizontal position detection means 40 to determine the position of the point A in the advance / retreat direction.

Next, the vertical movement table mechanism 60 raises the vertical movement table 61 by a predetermined amount, and raises the horizontal movement table mechanism 10 to a height at which the probe 30 does not interfere with the workpiece W. Next, the horizontal movement table mechanism 10 horizontally moves the horizontal movement table 11 to an advance / retreat position where the tip of the probe 30 faces the inside of the object to be measured W. Next, the vertical movement table mechanism 60 lowers the vertical movement table 61 by a predetermined amount so that the measurement terminal 32 of the probe 30 faces the point B on the inner peripheral surface of the object W to be measured. FIG. 7A shows the state of the measurement table mechanism 20 at this time. From this state, the horizontal moving mechanism 11 on which the measurement table mechanism 20 is mounted is horizontally moved toward the direction away from the object W by driving the horizontal driving mechanism 12. At the start of the movement of the horizontal moving base 11, the probe support base 21 is stopped by a stopper 23 and the probe support 22 is stopped by a stopper 24 as shown in FIG. When the measurement terminal 32 facing the inner peripheral surface of the object to be measured W of the probe 30 contacts the inner peripheral surface of the object to be measured W, the probe 30 generates a detection signal. Capture. When the measurement terminal 32 comes into contact with the workpiece W, a stop command is given to the horizontal drive motor 13 of the horizontal movement table mechanism 10 from the mechanical operation control means 71 of the control device 70, and the horizontal movement table 11 stops. The stop position of the measurement terminal 32 at this time is the position of point B in FIG. At this time, as shown in FIG. 7B, the horizontal movement table 11 stops beyond the position when the measurement terminal 32 contacts the workpiece W. At this time, the probe support 22 is displaced from the stopper 24 by a predetermined amount ΔX2 against the urging force of the second spring member 26. In other words, the probe support 22 is displaced by a predetermined amount ΔX2 with respect to the horizontal moving table 11. The displacement amount detection means 50 detects this displacement amount ΔX2. Further, the horizontal position detection means 40 detects the forward / backward movement position of the horizontal movement table 11 at this time. The signal capturing means 72 captures the detected values of the displacement amount detecting means 50 and the horizontal position detecting means 40.
The thickness calculating means 74 of the calculator 73 in the control device 70 subtracts the displacement amount ΔX2 detected by the displacement amount detecting means 50 from the position detected by the horizontal position detecting means 40 to determine the position of the B point in the advance / retreat direction. Further, the thickness between AB is calculated from the two forward and backward positions of point A and point B.

  5 can be determined by bringing the measurement terminal 31 of the probe 30 into contact with the inner peripheral surface of the workpiece W in the same manner as when the position of the point A is determined. 5 can also be determined by bringing the measurement terminal 32 of the probe 30 into contact with the outer peripheral surface of the object W to be measured, as in the case of determining the position of the point B. Further, the wall thickness calculating means 74 calculates the wall thickness between the CDs from the two forward and backward positions of the C point and the D point. In addition, the thickness deviation calculating means 75 of the calculator 73 in the control device 70 calculates the thickness deviation from the difference between the calculated values of the two thicknesses.

  Thus, after measuring the thickness and the amount of uneven thickness from the four positions A, B, C, and D of the workpiece W, the workpiece support table device 1 uses the rotary drive mechanism 4 to turn the rotating table 3. Is rotated by an arbitrary rotation angle. Thereby, the workpiece W mounted on the turntable 3 is positioned at a position rotated by the rotation angle of the turntable 3 from the previous measurement. In this positioning state, the positions of the four points A, B, C, and D in the advancing and retreating direction of the workpiece W are determined in the same procedure as in the previous measurement, and the thickness and thickness deviation are calculated from the position information. . By performing such measurement a plurality of times while changing the rotation angle of the workpiece W, the position, thickness, and uneven thickness of the four points at each rotation angle are measured.

  The process of sequentially changing the rotation angle of the turntable 3 is performed by causing the turntable 3 to be index-rotated at every predetermined angle by a command given from the mechanical operation control means 71 in the control device 70 to the rotation drive mechanism 4. .

  In the eccentricity calculation means 75 in the calculator 73 of the control device 70, the position information of the inner peripheral surface and the outer peripheral surface of the object W to be measured is obtained from the positional information of the four points A, B, C, D obtained for each rotation angle. The horizontal cross-sectional circle is calculated, and the amount of eccentricity between both horizontal cross-sectional circles is calculated from the calculated value. The diameter calculating means 77 calculates the diameters from the calculated both horizontal sectional circles. The calculation of the horizontal cross-sectional circles of the inner peripheral surface and the outer peripheral surface can be performed by processing the position information of A, B, C, and D obtained for each rotation angle by the least square method. In the horizontal cross section shape calculation 79 in the calculator 73, the horizontal cross section shape of the workpiece W at the height position at this time is calculated from the horizontal cross section circles on the inner and outer peripheral surfaces.

  In addition, the vertical movement table 61 of the vertical movement table mechanism 60 is moved up and down sequentially to a plurality of height positions in a state where the rotation table 3 of the measurement object support table device 1 is positioned at a predetermined rotation angle. Every time, the position of each of the intersections A, B, C, and D in the measured object W is measured by the above-described procedure, and the measured object is obtained by the vertical cross-sectional shape calculating means 78 in the calculator 73 based on the positional information. The vertical cross-sectional shape of W can be calculated. Further, by performing this measurement process by sequentially changing the rotation angle of the turntable 3, the vertical cross-sectional shape at each rotation angle can be calculated.

  In the adjustment of the measuring device such as the thickness of the rotating body, the position of the intersections A, B, C, and D described above is measured using an exemplary workpiece W whose exact outer diameter or inner diameter is known. Do the same. At this time, the diameter of the horizontal cross-sectional circle of the outer peripheral surface obtained as the distance between the intersections A and D is compared with the known outer diameter value of the model object W or as the distance between the intersections B and C. The correction value can be obtained by comparing the diameter of the horizontal section circle of the inner peripheral surface to be obtained with the known inner diameter value of the model object W to be measured. The correction value obtained in this way is written in a memory (not shown) of the computing unit 73 as data used for computations in the computing units 74 to 79 in the computing unit 73.

  As described above, the measuring apparatus for measuring the thickness of the rotating body moves the horizontal moving table 11 forward and backward to position the probe 30 at the measurement preparation position, and then moves the probe together with the probe support 30 installed on the horizontal moving table 11. The measurement terminals 31 and 32 of the probe 30 are brought into contact with the inner and outer peripheral surfaces of the workpiece W by moving the probe 30 back and forth in the horizontal direction. The thickness of the object W to be measured is calculated by the thickness calculating means 75 using the position detection value of the advancing / retreating position of the horizontal moving table 11 and the detected value of the displacement amount of the probe support 22 with respect to the horizontal moving table 11 at the time of contact. Calculate. Therefore, even if the diameter of the horizontal cross-sectional circle of the inner and outer peripheral surfaces is not measured in advance by another method for each object to be measured W, it is possible to easily measure the thickness of the object W at a predetermined height. it can.

  In this embodiment, measurement terminals are provided at four intersections A, B, C, and D, which are intersections of a straight line L orthogonal to the central axis O of the workpiece W and the inner and outer peripheral surfaces of the workpiece W. From the displacement detection value of the displacement detection means 50 and the position detection value of the horizontal position detection means 40 when the 31 and 32 are brought into contact with each other, the thicknesses of two parts of the workpiece W are calculated, and these Since the uneven thickness amount is calculated by the uneven thickness amount calculating means 75 from the difference between the calculated thickness values at the two locations, the uneven thickness amount of the workpiece W can be easily measured.

  In addition, the measurement table mechanism 20 is urged to a position where it is stopped by stoppers 23 and 24 by spring members 25 and 26, respectively, as a two-stage stacked structure of a probe support base 21 and a probe support 22; The probe 30 has two measurement terminals 31 and 32 facing opposite to each other with respect to the advancing / retreating direction of the probe support 22. Further, the displacement amount detection means 50 detects the displacement on the straight line L along the advancing / retreating direction of the probe support 22 which is the center line of the measurement terminals 31 and 32. For this reason, even if the horizontal moving table 11 overruns and stops after the measurement terminals 31 and 32 contact the object to be measured W, the positions where the measurement terminals 31 and 32 contact the object to be measured W are accurately measured. can do.

  Further, the horizontal movement table mechanism 10 is installed so as to be movable up and down in the vertical direction, which is parallel to the central axis O of the measurement object W supported by the measurement object support table device 1 with respect to the base 6. Since the vertical movement table 61 and the vertical movement table mechanism 60 having the vertical drive mechanism 62 that drives the vertical movement table 61 up and down are provided, the measurement of the object W to be measured with which the measurement terminals 31 and 32 of the probe 30 are brought into contact with each other. The height position can be easily variably set.

  The object-to-be-measured support device 1 includes a turntable 3 on which the object to be measured W is mounted and can be held by the chuck 2, and a rotation drive mechanism 4 that can rotate and stop the turntable 3 at an arbitrary angle. Rotation angle detection means 5 for detecting the rotation angle of the turntable 3, and the horizontal movement table mechanism 10 is arranged on the straight line L where the probe 30 is perpendicular to the center line O of the turntable 3. Since it is provided so as to be movable on both the front and rear sides of the center line O, the workpiece W can be easily stopped and positioned at an arbitrary rotation angle, and the probe 30 can be easily moved horizontally inside and outside the workpiece W. .

  Further, a mechanical operation control means 71 for controlling the horizontal drive mechanism 12 and the rotary drive mechanism 4, a signal fetch means 72 for fetching a detection signal of the probe 30, a thickness calculating means 74 and a deviation thickness calculation. A measurement control device 70 including a computing unit 73 having a means 75 is provided, and the mechanical operation control means 71 rotates the turntable 3 by an index every predetermined angle, and the horizontal movement table mechanism 10 causes the measurement terminal 31 to rotate. , 32 are moved to a predetermined measurement position on the inner peripheral surface or outer peripheral surface of the object W to be measured and brought into contact with each other, and the signal capturing means 72 is used when the measurement terminals 31 and 32 are brought into contact with the object W to be measured. The advancing / retreating position detected by the horizontal position detecting means 40, the displacement detected by the displacement detecting means 50, and the rotation angle detecting means 5 The calculation unit 73 captures the rotation angle to be measured, and the calculation unit 73 calculates the thickness, amount of eccentricity, and amount of eccentricity between the inner peripheral surface and the outer peripheral surface of the workpiece W from each information acquired by the signal acquisition unit 72. Since the diameters of the inner peripheral surface and the outer peripheral surface are calculated, the thickness of the workpiece W, the thickness deviation, and the diameters of the inner peripheral surface and the outer peripheral surface can be easily measured.

  The mechanical operation control means 60 moves the horizontal movement table mechanism 10 to a lift position where the measurement terminal comes into contact with the set height of the workpiece W, and the measurement terminals 31 and 32 are moved at the set height. Since the measurement object W is moved to a predetermined measurement position on the inner peripheral surface or outer peripheral surface of the measurement object W and brought into contact with the measurement object W, the thickness of the measurement object W, the amount of uneven thickness, the diameters of the inner peripheral surface and the outer peripheral surface can be more easily determined. Can be measured.

  Further, the vertical movement table mechanism 60 is provided with vertical position detection means 63 for detecting the height position of the vertical movement table 61, and the vertical movement table mechanism 60 moves the measurement terminals 31 and 32 in the height direction of the object W to be measured. The horizontal position detecting means 40, the displacement amount detecting means 50, and the vertical position when the measuring terminals 31, 32 are brought into contact with the outer peripheral surface or inner peripheral surface of the workpiece W at each height position. Since the vertical sectional shape calculating means 78 for calculating the shape of the vertical cross section of the outer peripheral surface or the inner peripheral surface of the workpiece W is provided from the detection value of the detecting means 63, the vertical sectional shape of the workpiece W can be easily obtained. Can be measured.

  Further, when the object to be measured W is rotated together with the turntable 3 by the rotation drive mechanism 4 of the object to be measured support table device 1 and the measurement terminals 31 and 32 are brought into contact with the object to be measured W at each rotation angle, A horizontal cross section shape calculating means 79 for calculating the shape of the horizontal cross section of the outer peripheral surface or the inner peripheral surface of the workpiece W from the detection values of the horizontal position detecting means 40, the displacement amount detecting means 50, and the rotation angle detecting means 5. Since it is provided, the horizontal sectional shape of the workpiece W can be easily measured.

  In this embodiment, the case where the object to be measured W is mounted on the turntable 3 of the object support base device so that the center axis of the inner peripheral surface thereof coincides with the center line O of the turntable 3 has been described. . However, the present invention is not limited to this, and the workpiece W may be mounted on the turntable 3 such that the center axis of the outer peripheral surface thereof coincides with the center line O of the turntable 3. Thickness, thickness deviation, eccentricity, etc. can be measured with high accuracy and ease as well.

DESCRIPTION OF SYMBOLS 1 ... Measuring object support stand apparatus 2 ... Chuck 3 ... Rotation stand 4 ... Rotation drive mechanism 5 ... Rotation angle detection means 6 ... Base 10 ... Horizontal movement table mechanism 11 ... Horizontal movement table 12 ... Horizontal drive mechanism 20 ... Measurement table Mechanism 21 ... probe support base 22 ... probe support 23, 24 ... stopper 25 ... first spring member 26 ... second spring member 30 ... probe 31,32 ... measurement terminal 40 ... horizontal position detecting means 50 ... displacement amount Detection means 60 ... vertical movement table mechanism 61 ... vertical movement table 62 ... vertical drive mechanism 63 ... vertical position detection means 70 ... control device 71 ... mechanical operation control means 72 ... signal capture means 73 ... calculator 74 ... thickness calculation means 75 ... Eccentricity amount calculating means 76 ... Eccentric amount calculating means 77 ... Diameter calculating means 78 ... Vertical sectional shape calculating means 79 ... Horizontal sectional shape calculating means O ... Center line of the turntable (in the object to be measured Axis)
W: Object to be measured

Claims (8)

A measured object support base device for supporting a cylindrical rotating body-shaped measured object;
Horizontal moving table mechanism having a horizontal moving table that is movable back and forth in a direction orthogonal to the central axis of the measured object supported by the measured object supporting table device, and a horizontal drive mechanism that drives the horizontal moving table to move forward and backward When,
A measurement table mechanism in which a probe support is installed on the horizontal moving table so as to be movable back and forth in the same direction as the horizontal moving table.
A probe that has a base end attached to the probe support and has a measurement terminal that can contact the inner peripheral surface and the outer peripheral surface of the object to be measured at the distal end, and generates a detection signal when the measurement terminal comes in contact;
Horizontal position detecting means for detecting the advancing / retreating position of the horizontal moving table;
A displacement amount detecting means for detecting a displacement amount of the probe support relative to the horizontal moving table;
When the horizontal moving mechanism is moved by the horizontal drive mechanism to bring the measurement terminal of the probe into contact with the inner peripheral surface of the object to be measured, and the measurement terminal is placed on the outer peripheral surface of the object to be measured opposite to the contact position. when contacted, e Bei a thickness calculating means for calculating the thickness of the object to be measured from the position detection value of the displacement amount detection value and the horizontal position detecting means of the displacement amount detecting means,
The measurement table mechanism is configured such that a probe support base is installed on the horizontal moving table so as to be movable forward and backward in the same direction as the horizontal moving table, and the probe support is mounted on the probe moving base. The probe support base is placed in one of the movable directions with respect to the horizontal moving table, and is provided with a stopper provided on the horizontal moving table. A first spring member that urges the probe support to the position where it is stopped, and the probe support is attached to the other end of the probe support base in a direction in which the probe support can be advanced and retracted to a position where it is stopped by a stopper provided on the probe support base. A second spring member for biasing, and the probe has two measuring terminals facing away from each other with respect to the advancing / retreating direction of the probe support, It means the center line to become the probe support rotator thickness such measuring device comprising a call and detects the straight line of the displacement along the moving direction of the measuring terminals.   The measurement terminal according to claim 1, wherein the measurement terminal is brought into contact with four intersections that are intersections of a straight line orthogonal to the central axis of the object to be measured and an inner peripheral surface and an outer peripheral surface of the object to be measured. Based on the displacement detection value of the displacement detection means and the position detection value of the horizontal position detection means, the thickness of two locations of the object to be measured is calculated, and the thickness deviation is calculated from the difference between the calculated values of the thicknesses of these two locations. An apparatus for measuring the thickness of a rotating body provided with an uneven thickness calculating means for calculating 3. The horizontal movement table mechanism according to claim 1 or 2 , wherein the horizontal movement table mechanism can be moved up and down in a vertical direction that is parallel to a central axis of the measurement object supported by the measurement object support table device. A measuring apparatus for measuring the thickness of a rotating body provided with a vertical movement table mechanism having a vertical movement table installed in the vertical movement table and a vertical drive mechanism for driving the vertical movement table up and down. In any one of claims 1 to 3, wherein the measurement object support table apparatus, the rotary table can be gripped by the chuck equipped with a measured object, at any angle by rotating the turntable A rotation drive mechanism capable of stopping and positioning; and a rotation angle detection means for detecting a rotation angle of the turntable, wherein the horizontal movement table mechanism is configured such that the probe is on a straight line perpendicular to the center line of the turntable, An apparatus for measuring the thickness of a rotating body provided to be movable on both front and rear sides of the center line. The measurement object support base device according to claim 2, wherein the measurement object support table device includes a rotation table that mounts the measurement object and can be gripped by a chuck, and a rotation drive mechanism that can rotate and stop and position the rotation table at an arbitrary angle. A rotation angle detecting means for detecting a rotation angle of the turntable, and the horizontal movement table mechanism allows the probe to move on a straight line perpendicular to the centerline of the turntable to both sides before and after the centerline. Provided in
And a mechanical operation control means for controlling the horizontal drive mechanism and the rotary drive mechanism, a signal fetching means for fetching the detection signal of the probe, and a computing unit having the thickness computing means and the deviation amount computing means. A control device,
The mechanical operation control means rotates the turntable by index every predetermined angle, and moves the measurement terminal to a predetermined measurement position on the inner peripheral surface or outer peripheral surface of the object to be measured by the horizontal movement table mechanism. The signal capturing means is brought into contact with the measurement terminal when the measurement terminal is brought into contact with the object to be measured, the advance / retreat position detected by the horizontal position detection means, the displacement amount detected by the displacement amount detection means, and the The rotation angle detected by the rotation angle detection means is captured in a calculator, and the calculator calculates the thickness between the inner peripheral surface and the outer peripheral surface of the object to be measured, the amount of uneven thickness, from each information acquired by the signal capture means, An apparatus for measuring the thickness of a rotating body, which calculates the amount of eccentricity and the diameters of the inner and outer peripheral surfaces. 6. The horizontal movement table mechanism according to claim 5 , wherein the horizontal movement table mechanism is installed so as to be movable up and down in a vertical direction that is parallel to a central axis of the measurement object supported by the measurement object support table device. A vertical moving table, and a vertical moving table mechanism having a vertical driving mechanism for driving the vertical moving table up and down;
The mechanical operation control means moves the horizontal movement table mechanism to a lift position where the measurement terminal contacts the set height of the object to be measured, and moves the measurement terminal to the inner peripheral surface of the object to be measured at the set height. Alternatively, a measuring device for measuring the thickness of a rotating body, which is moved to a predetermined measurement position on the outer peripheral surface and brought into contact with it. In any one of claims 1 to 6, the horizontal moving table mechanism relative to the base, wherein a central axis parallel to the direction of the workpiece supported on the measured object supporting base device vertically And a vertical movement table mechanism having a vertical movement table installed so as to be movable up and down in a direction, and a vertical drive mechanism for driving the vertical movement table up and down, and a vertical position detection means for detecting a height position of the vertical movement table. The horizontal position detection when the measurement terminal is moved in the height direction of the object to be measured by the vertical moving table mechanism and the measurement terminal is brought into contact with the outer peripheral surface or the inner peripheral surface of the object to be measured at each height position. Measuring the thickness of a rotating body provided with a vertical cross-sectional shape calculating means for calculating the shape of the vertical cross section of the outer peripheral surface or inner peripheral surface of the object to be measured from the detected values of the means, the displacement detecting means, and the vertical position detecting means apparatus. The measurement object support base device according to any one of claims 1 to 7 , wherein the measurement object support table device includes a rotation table that mounts the measurement object and can be gripped by a chuck, and rotates the rotation table at an arbitrary angle. A rotation drive mechanism capable of stopping and positioning; and a rotation angle detecting means for detecting a rotation angle of the turntable. The rotation drive mechanism is rotated together with the turntable of the object to be measured, and the measurement terminal is covered at each rotation angle. A horizontal cross section that calculates the shape of the horizontal cross section of the outer peripheral surface or inner peripheral surface of the object to be measured from the detection values of the horizontal position detecting means, the displacement amount detecting means, and the rotation angle detecting means when brought into contact with the measurement object An apparatus for measuring the thickness of a rotating body provided with shape calculation means.

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