WO2008018352A1 - Photosensitive polyimide composition, positive photosensitive resin composition, and fpc - Google Patents

Photosensitive polyimide composition, positive photosensitive resin composition, and fpc Download PDF

Info

Publication number
WO2008018352A1
WO2008018352A1 PCT/JP2007/065135 JP2007065135W WO2008018352A1 WO 2008018352 A1 WO2008018352 A1 WO 2008018352A1 JP 2007065135 W JP2007065135 W JP 2007065135W WO 2008018352 A1 WO2008018352 A1 WO 2008018352A1
Authority
WO
WIPO (PCT)
Prior art keywords
diamine
photosensitive
solvent
resin
soluble
Prior art date
Application number
PCT/JP2007/065135
Other languages
French (fr)
Japanese (ja)
Inventor
Masaya Kakimoto
Shuhei Maeda
Akira Mizoguchi
Original Assignee
Sumitomo Electric Industries, Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2006216281A external-priority patent/JP2008040273A/en
Priority claimed from JP2007033070A external-priority patent/JP2008197418A/en
Priority claimed from JP2007034945A external-priority patent/JP2008195892A/en
Priority claimed from JP2007191035A external-priority patent/JP2009025725A/en
Application filed by Sumitomo Electric Industries, Ltd. filed Critical Sumitomo Electric Industries, Ltd.
Publication of WO2008018352A1 publication Critical patent/WO2008018352A1/en

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/1057Polyimides containing other atoms than carbon, hydrogen, nitrogen or oxygen in the main chain
    • C08G73/106Polyimides containing other atoms than carbon, hydrogen, nitrogen or oxygen in the main chain containing silicon
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/1003Preparatory processes
    • C08G73/1007Preparatory processes from tetracarboxylic acids or derivatives and diamines
    • C08G73/1025Preparatory processes from tetracarboxylic acids or derivatives and diamines polymerised by radiations
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/022Quinonediazides
    • G03F7/023Macromolecular quinonediazides; Macromolecular additives, e.g. binders
    • G03F7/0233Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/075Silicon-containing compounds
    • G03F7/0757Macromolecular compounds containing Si-O, Si-C or Si-N bonds
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0393Flexible materials
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/28Applying non-metallic protective coatings
    • H05K3/285Permanent coating compositions
    • H05K3/287Photosensitive compositions

Definitions

  • Photosensitive polyimide composition positive photosensitive resin composition
  • the present invention relates to a photosensitive polyimide composition and a positive photosensitive resin composition used for forming a protective film or the like of an FPC (flexible printed wiring board).
  • the present invention also relates to a method for producing the photosensitive polyimide composition and a method for producing a soluble polyimide resin used as a component of the photosensitive polyimide composition.
  • the present invention further relates to a protective film that is formed of the photosensitive polyimide composition and functions as a cover lay of FPC, and an FPC having the protective film.
  • the present invention further relates to a photosensitive resin film obtained from the positive photosensitive resin composition, an FPC production method using the positive photosensitive resin composition, and an FPC obtained by the production method.
  • FPCs are provided with a protective film (coverlay) on the outer surface to protect the wiring.
  • This protective film covers the wiring, the element portion, and the like, but on the other hand, it is necessary to expose the pad portion and the connection portion.
  • FPC insulating protective film hereinafter simply referred to as “protective film”. A method using a conductive resin composition has been adopted.
  • a negative photosensitive resin composition called a solder resist (for example, acrylic epoxy type) is widely used.
  • solder resist for example, acrylic epoxy type
  • these have the disadvantage that the remaining film portion after development is crosslinked and cured, so that it has the disadvantage that it is hard and brittle and does not have sufficient flexibility. It is used. Therefore, recently, as an alternative, a flexible protective film having excellent heat resistance has been desired. From a resin (solvent soluble heat resistant resin) that has excellent heat resistance and solvent solubility (solvent soluble heat resistant resin) and a positive photosensitive agent. A method using a photosensitive resin composition is proposed. It has been proposed.
  • a soluble polyimide resin using a hydroxyl-containing diamine is disclosed in Japanese Patent No. 2935994 (Patent Document 1) and Japanese Patent Application Laid-Open No. 10-224017 (Patent Document 2). Etc. are proposed.
  • the polyimide resin is provided with solubility and alkali developability by using a monomer component which is inherently insoluble in a solvent and containing a certain proportion of diamine having a hydroxyl group.
  • Examples of the diamine having a hydroxyl group include a compound S represented by the following structural formula.
  • the soluble polyimide resin is obtained by condensing a diamine containing a diamine having a hydroxyl group as described above and an aromatic tetracarboxylic dianhydride in a molar ratio of approximately 1: 1.
  • pyridine is used as a catalyst for promoting the reaction.
  • Patent Document 3 771 Publication, Patent Document 3
  • Patent Document 1 Japanese Patent No. 2935994
  • Patent Document 2 Japanese Patent Laid-Open No. 10-224017
  • Patent Document 3 WO 99/19771
  • the photosensitive polyimide composition for forming a protective film has a characteristic that, in addition to the flexibility and heat resistance, development residue (remaining omission during development) hardly occurs in the exposed area ( Developability) and a force S that requires non-exposed portions (that is, portions that serve as a protective film) to be less susceptible to deterioration due to the meshing performed for the formation of connection portions, etc.
  • developability the exposed area
  • a force S that requires non-exposed portions (that is, portions that serve as a protective film) to be less susceptible to deterioration due to the meshing performed for the formation of connection portions, etc.
  • the unexposed area is likely to deteriorate during development, leading to whitening of the surface. Deteriorated by the pre-treatment liquid of the cookie. This phenomenon is greatly deteriorated in the force S generated by both electrolytic gold plating and electroless gold plating, particularly in the electroless gold plating process.
  • the protective film is required to improve the adhesive strength, particularly the adhesive strength with copper, but the conventional protective film is bonded to the copper foil constituting the FPC. There is also a problem that the force is not yet sufficient, and the developing solution may penetrate into the opening to cause deterioration of the film.
  • the first problem of the present invention is a photosensitive polyimide composition containing a soluble polyimide resin, which deteriorates even in the gold plating process ⁇ , particularly, it is difficult to cause spot defects (that is, by exposure and development). (When patterning, there is little occurrence of spot discoloration on the coating surface), and furthermore, a protective film having sufficient adhesion to copper foil can be formed, and the same as conventional photosensitive polyimide compositions. It is to provide a photosensitive polyimide composition that maintains developability and hardly causes problems such as residue warpage.
  • the present invention further provides a method for producing this photosensitive polyimide composition, a force formed by this photosensitive polyimide composition, which hardly resists deterioration in the gold plating process, and a sufficient adhesive strength to copper foil. It is providing the protective film of FPC which has these, and FPC which has this protective film.
  • This problem can be prevented by introducing a rigid component into the soluble polyimide resin to improve the softening temperature.
  • a rigid component into the soluble polyimide resin to improve the softening temperature.
  • warpage is increased and peeling is likely to occur in a crosscut test due to a decrease in adhesion.
  • the second problem of the present invention is to provide a positive-type photosensitive resin composition that does not cause such a problem of the prior art.
  • the present inventor has also shown that the soluble polyimide resin used as the base resin of the conventional photosensitive polyimide composition has a wide molecular weight distribution (dispersion) and two peaks in the low molecular weight region and the high molecular weight region. It was found to have a mountain distribution and a high content of low molecular weight components. And since the high molecular weight component is difficult to dissolve in the solvent, the low molecular weight component is easy to dissolve. Therefore, a residue (residual portion) is generated on the exposed portion of the FPC substrate. As a result of diligent investigation, the surface of the polyimide resin is considered to be easily degraded. I found out that they can be compatible.
  • the inventor further provides a method for synthesizing a soluble polyimide resin by condensation of an aromatic tetracarboxylic dianhydride and diamine! /, And the aromatic tetracarboxylic dianhydride and the above-mentioned Polymerization (condensation) is started in a state where a part of silicone diamine is insoluble and suspended in the reaction solvent, and these molecular weight ranges and molecular weight distributions are reduced by dissolving them as the polymerization proceeds. It has been found that a soluble polyimide resin can be easily synthesized. In the conventional synthesis method, the molecular weight and molecular weight distribution are easily changed for each synthesis (polymerization) lot.
  • the present inventor further added a crosslinkable melamine as a thermosetting agent to a positive photosensitive resin composition
  • a positive photosensitive resin composition comprising a solvent-soluble heat-resistant resin, for example, the above-described soluble polyimide resin, and a positive photosensitive agent.
  • a compound is added, a positive photosensitive patterning is possible in the same way as when it is not added, and when this melamine compound is added, a positive pattern is formed by an afterbeta after development. It is possible to crosslink the resin to increase the softening temperature and improve the high temperature elasticity.
  • spot discoloration is formed by the following mechanism. That is, at the time of development, the developing solution soaks into a defective portion on the coating film to form a minute crack or hole, and soaking further progresses between the coating film and the substrate. Conductor (copper, etc.) oxidation occurs at the part where the penetration occurred after baking after development. As a result, the conductor is colored and observed as spot discoloration.
  • the polymer constituting the coating film may interact with the pyridine to increase the affinity of the coating film for the developer, which may promote the penetration of the developer. I thought there was.
  • the first aspect of the present invention is:
  • the diamine containing S, silicone diamine, and diamine having a hydroxyl group, and the diamine having a hydroxyl group is 6FAP.
  • the photosensitive polyimide composition is characterized in that the content of 6FAP is 1 to 50 mol% with respect to the total diamine (Claim 1).
  • the photosensitive polyimide composition according to the first aspect contains a soluble polyimide resin, which is a condensate of aromatic tetracarboxylic dianhydride and diamine, as a base polymer.
  • the condensate of aromatic tetracarboxylic dianhydride and diamine means a reaction product obtained by condensing aromatic tetracarboxylic dianhydride and diamine in an equimolar amount of about 1: 1.
  • the diamine used for the synthesis of the soluble polyimide resin is a mixture of a silicone diamine and a diamine having a hydroxyl group, and other diamines added if necessary. The developability is obtained by the hydroxyl group of the diamine having a hydroxyl group.
  • Jiamin having a hydroxyl group is a 6FAP, and characterized in that the content of 6FAP is 1 to 50 mol 0/0 for all Jiamin To do.
  • the diamine having a hydroxyl group is 6FAP, developability is further improved.
  • the developability, heat resistance, and resistance to plating can be improved. Therefore, it is possible to obtain excellent developability, heat resistance, and meticulous resistance with the photosensitive polyimide composition of the first embodiment having both of the characteristics.
  • the soluble polyimide resin constituting the photosensitive polyimide composition of the first aspect comprises an aromatic tetracarboxylic dianhydride, silicone diamine, 6FAP, and other diamine added as necessary, as a solvent. It can be produced by dissolving and heating to cause a condensation reaction. If the same solvent as the solvent of the photosensitive polyimide composition is used as the solvent, it is preferable because a solvent replacement operation is not necessary in the production of the photosensitive polyimide composition. Accordingly, examples of the solvent include those described later as the solvent for the photosensitive polyimide composition.
  • the invention according to claim 2 is a preferred embodiment of the photosensitive polyimide composition of the first embodiment, and the weight average molecular weight of the soluble polyimide resin that is the base polymer of the photosensitive polyimide composition is 20000 to 50000 2.
  • the soluble polymer having such an average molecular weight and molecular weight distribution.
  • a mid resin as a base polymer, it is difficult for the development residue to be generated during development, and the insulating film pattern obtained from the parenthesis composition has excellent heat resistance, solvent resistance, and mechanical strength. Insulating film patterns satisfying the required characteristics can be obtained.
  • the molecular weight distribution force distribution is small and the dispersion is small, the effect of hardly causing the development residue and excellent heat resistance, solvent resistance, and mechanical strength becomes remarkable.
  • the single peak distribution means that the molecular weight distribution curve has substantially one peak.
  • the dispersion represents the extent of the molecular weight distribution, and specifically is a value of (weight average molecular weight / number average molecular weight).
  • the weight average molecular weight, number average molecular weight, and molecular weight distribution curve are values measured by GPC and calculated using standard polystyrene (TSK standard polystyrene).
  • TSK standard polystyrene standard polystyrene
  • a soluble polyimide resin having such an average molecular weight and molecular weight distribution can be produced by the method described in claim 18 described later.
  • the second aspect of the present invention provides:
  • the soluble polyimide resin contains the diamine power S, silicone diamine and diamine having a hydroxyl group, and the soluble polyimide resin has a weight average molecular weight of 20000 to 50,000, a molecular weight distribution of one peak distribution, and a dispersion of 2.0 or less. It is a photosensitive polyimide composition characterized in that (Claim 3).
  • the photosensitive polyimide composition of the second aspect also contains a soluble polyimide resin that is a condensate of aromatic tetracarboxylic dianhydride and diamine as a base polymer, and the diamine includes silicone diamine and hydroxyl group. Containing diamine.
  • a soluble polyimide resin that is a condensate of aromatic tetracarboxylic dianhydride and diamine as a base polymer, and the diamine includes silicone diamine and hydroxyl group. Containing diamine.
  • the meaning and action of the condensate of aromatic tetracarboxylic dianhydride and diamine are the same as in the first embodiment.
  • the soluble polyimide resin as the base polymer has a weight average molecular weight in the range of 20000 to 50000, a molecular weight distribution of one peak distribution, and a dispersion of 2. It is 0 or less.
  • the photosensitive polyimide composition of the second aspect is N-(2-aminoethyl)-2-aminoethyl-N-(2-aminoethyl)-2-aminoethyl-N-(2-aminoethyl)-2-aminoethyl-N-(2-aminoethyl)-2-aminoethyl-N-(2-aminoethyl)
  • the aromatic tetracarboxylic dianhydride and the silicone diamine are condensed in a solvent that dissolves only a part of the aromatic tetracarboxylic dianhydride and the silicone diamine. And then, it is produced by a method for producing a soluble polyimide resin, characterized in that it is carried out by dissolving aromatic tetra force rubonic acid dianhydride and silicone diamine in the solvent while raising the temperature. Yes (claim 18).
  • This soluble polyimide resin production method is the same as the conventional polyimide resin production method in that it has a condensation reaction step of condensing aromatic tetracarboxylic dianhydride and diamine.
  • the aromatic tetracarboxylic dianhydride and diamine are condensed in a solvent that dissolves only a part of the aromatic tetracarboxylic dianhydride and silicone diamine.
  • condensation is started in a state where the aromatic tetracarboxylic dianhydride and the silicone diamine are suspended, and then the aromatic tetracarboxylic acid 2 anhydrous and the silicone diamine are used in the solvent while raising the temperature. It is characterized in that it is dissolved and further condensed.
  • Examples of the solvent that dissolves only a part of the aromatic tetracarboxylic dianhydride and the silicone diamine include ⁇ -petit-mouth rataton.
  • the invention according to claim 19 is a preferred embodiment of the method for producing the soluble polyimide resin, wherein the aromatic tetracarboxylic acid 2 anhydrous is 4,4′-oxydiphthalic acid dianhydride ( 19.
  • Silicone diamine and OPDA react gradually and dissolve in y-petit mouth ratatones as the temperature rises.
  • the reaction is performed at that temperature for a predetermined time. After that, stop heating and let it cool naturally to near room temperature.
  • the fourth aspect of the present invention is as follows.
  • a photosensitive polyimide composition containing a soluble polyimide resin, a positive photosensitive agent and a solvent for dissolving them,
  • the soluble polyimide resin is a condensate of aromatic tetracarboxylic dianhydride and diamine
  • the diamine contains a diamine having a hydroxyl group.
  • a photosensitive polyimide composition (claim 9), wherein the content power of pyridine contained in the photosensitive polyimide composition is 0.05% by weight or less.
  • the photosensitive polyimide composition of the fourth embodiment contains a soluble polyimide resin that is a condensate of aromatic tetracarboxylic dianhydride and diamine, and the diamine contains diamine having a hydroxyl group.
  • aromatic tetracarboxylic dianhydride and diamine condensate and its The action and the like are the same as in the first embodiment.
  • the photosensitive polyimide composition according to the fourth aspect is characterized in that the content of pyridine contained therein is 0.05% by weight or less. Pyridine is used as a catalyst for the condensation reaction of aromatic tetracarboxylic acid dihydrate and diamine. As a result, the conventional photosensitive polyimide composition contains pyridine. It was found that the problem of spot discoloration can be greatly reduced by removing from the photosensitive polyimide composition and making its content 0.05% by weight or less based on the total weight of the photosensitive polyimide composition.
  • pyridine removal step for removing pyridine from the reaction system until the content is 0.05% by weight or less
  • It can be produced by a production method (Claim 17) comprising a step of mixing the soluble polyimide resin, a positive photosensitive agent and a solvent.
  • a condensation reaction step of condensing an aromatic tetracarboxylic dianhydride and diamine to obtain a soluble polyimide resin, and mixing the obtained soluble polyimide resin and a positive photosensitive agent are performed.
  • the point which has a process is the same as the manufacturing method of the conventional photosensitive polyimide composition.
  • the production method of the present invention is characterized by having a pyridine removal step of removing pyridine from the reaction system after the condensation step until the content thereof is 0.05% by weight or less.
  • the method for removing pyridine is not particularly limited.
  • the condensation of aromatic tetracarboxylic dianhydride and diamine is usually carried out using a solvent, and after completion of the reaction, the solvent S is removed to remove pyridine and adjust the concentration.
  • the amount of pyridine in the system can be reduced, and the content can be reduced to 0.05% by weight or less by adjusting the conditions.
  • pyridine can also be removed by a method of reprecipitation and purification using a solvent insoluble in the resin such as methanol and again dissolving in a solvent such as ⁇ -petit-mouth rataton.
  • the invention according to claim 10 is a preferred embodiment of the photosensitive polyimide composition of the fourth embodiment.
  • the weight average molecular weight of the soluble polyimide resin that is a base polymer of the photosensitive polyimide composition is 20000 to 50000.
  • the weight average molecular weight of the soluble polyimide resin that is a base polymer is 20000 to 50000.
  • the weight average molecular weight is in the range of 25000-45000.
  • the copolymerization ratio of the diamine having a hydroxyl group used in the production of the photosensitive polyimide composition that is, the hydroxyl group in the total diamine used in the condensation.
  • the ratio of diamine having a dimer is preferably in the range of 1 to 50 mol%.
  • the developing property of the film pattern is low, and a concentrated alkaline solution or an organic solvent is required as a developer, while copolymerization of a diamine having a hydroxyl group.
  • the range of 1 to 50 mol% is preferable from the viewpoints of image resistance, matt resistance and the like.
  • the invention according to claim 12 is characterized in that the diamine having a hydroxyl group is 6FAP, or the photosensitive polyimide according to any one of claims 9 to 11 It is a composition.
  • the diamine having a hydroxyl group used in the production of the photosensitive polyimide composition is the one used in the conventional photosensitive polyimide composition, that is, the above-described examples.
  • 6FAP is preferable in order to obtain excellent developability. By using 6FAP, film deterioration and film loss during development can be reduced.
  • the diamine component used for the synthesis of the soluble polyimide resin of the fourth aspect can further contain a silicone diamine, and is synthesized using the diamine component containing both the diamine having a hydroxyl group and the silicone diamine.
  • the soluble polyimide resin is preferably used.
  • the silicone component contains silicone diamine. By containing silicone diamine, it is possible to improve the flame retardance of the protective film, the adhesion to copper constituting the wiring, the flexibility, etc. with the force S.
  • the silicone diamine is a compound having a siloxane group in the skeleton and two primary amino groups at its ends and the like, for example, represented by the following structural formula (III) Is widely adopted.
  • a represents a number of 1 to about 10,000.
  • those represented by the following structural formulas are also exemplified.
  • a + b (a if not including formula force 3 ⁇ 4) is a number from 1 to about 10,000.
  • silicone diamines include: Toray Dow Cowing. Silicone BY16 — 853U, BY16-853C, Shin-Etsu Chemical X—22—1660B—3, KF—8010, X—22—161A X-22-161B and the like.
  • the invention according to claim 13 is a preferred embodiment of the photosensitive polyimide composition of the first, second and fourth aspects, wherein the diaminergic silicone diamine is all diamine.
  • the content of the silicone diamine is preferably 5 to 60 mol% with respect to the total diamine.
  • the molecular weight of silicone diamine is about 500 to about 1000, it is preferably 10 to 60 mol% with respect to the total diamine! /. If it exceeds 60 mol%, the glass transition temperature of the film decreases and heat resistance decreases, whereas if it exceeds 5 mol%, the warpage of the film tends to increase. The More preferably, it is the range of 30-50 mol%. However, heat resistance and film warpage are also affected by the structure and content of other diamines.
  • the above-mentioned diamine power silicone diamine is used in an amount of 5 to 60 And containing 1 to 50 mol% of diamine having a hydroxyl group based on the total diamine.
  • the invention of claim 14 is a preferred embodiment of the photosensitive polyimide composition of the first, second and fourth embodiments, wherein the silicone diamine has a weight average molecular weight.
  • the diamine that can be used in the production of the photosensitive polyimide composition has the above-mentioned hydroxyl group.
  • other diamines can be included within the scope not departing from the gist of the present invention.
  • diamines include, for example, bis (3aminopropyl) ether ethane, 3,3, -diamino-4,4'dihydroxydiphenylsulfone, 4,4'diamino3,3'dihydroxybiphenyl, 2,2bis.
  • 1,3-bis (3-aminophenoxy) benzene (hereinafter referred to as “1,3-APB”) represented by the following structural formula (IV) is a viewpoint of transparency and flexibility. More preferably used.
  • BAPSM bis [4- (3aminophenoxy) phenyl] sulfone
  • 1, 4 APB 1,4-bis (3-aminophenoxy) benzene
  • BAPSM bis [4- (3aminophenoxy) phenyl] sulfone
  • 1, 4 APB 1,4-bis (3-aminophenoxy) benzene
  • 1,3-APB and diammine represented by the following structural formula can also be used.
  • the invention according to claim 15 is a preferred embodiment of the photosensitive polyimide composition according to the first, second and fourth embodiments, wherein the aromatic tetracarboxylic dianhydride is 4,
  • the aromatic tetracarboxylic dianhydride constituting the soluble polyimide compound is 3, 3 ', 4, 4' biphenyltetracarboxylic dianhydride, 3, 3 ', 4, 4'-benzophenone tetracarboxylic dianhydride, 4, 4'-oxydiphthalic dianhydride, 3, 3' , 4, 4'-diphenylsulfone tetracarboxylic dianhydride, bicyclo (2, 2, 2) -otato 7-ene 2, 3, 5, 6 tetracarboxylic dianhydride, 1, 2, 4, 5 Cyclohexanetetracarboxylic dianhydride, pyromellitic dianhydride, 2,2 bis (3,4 dicarboxylicoxyphenyl) hexafluoropropane dianhydride, 5 (2,5 dixotetrahydro) Furyl)
  • OPDA force represented by the following structural formula (V) is preferable from the viewpoint of transparency and flexibility, and therefore, an aromatic tetracarboxylic dianhydride containing OPDA is preferably used.
  • the soluble polyimide resin used in the photosensitive polyimide composition of the present invention has already been imidized at the stage of synthesis. Therefore, heating for forming an imide ring is unnecessary, and a heat treatment step may be performed if necessary after pattern formation. This is done to evaporate residual solvent contained in the pattern. Therefore, heating at a high temperature necessary to form an imide ring is not necessary.
  • the photosensitive polyimide composition of the present invention contains a positive-type photosensitive agent and a solvent that dissolves the soluble polyimide resin and the positive-type photosensitive agent together with the soluble polyimide resin.
  • di-type photosensitizers include naphthoquinone diazide compounds, and particularly preferred are naphthoquinone diazide sulfonyl esters of aromatic polyhydroxy compounds.
  • aromatic polyhydroxy compounds examples include 2, 3, 4-trihydroxybenzophenone, 2, 3, 4, monotrihydroxybenzophenone, 2, 4, 6 trihydroxybenzophenone, 2, 3 , 4, 4, —tetrahydroxybenzophenone, nopolac resin and the like.
  • the naphthoquinone diazide sulfonyl compounds that form esters with aromatic polyhydroxy compounds include 1,2-naphthoquinone-1,2 diazide-1,5 sulfonic acid, 1,2 naphthoquinone-1,2 diazido-1,4-sulfonic acid, 6-diazodihydro 5-oxo1 naphthalene Examples include sulfonic acid. Specific product names include PC-5, NT-200, 4N T-300 manufactured by Toyo Gosei Co., Ltd., DTEP-300, DTEP-350 manufactured by Daito Chemix.
  • the amount of the positive photosensitive agent needs to be adjusted depending on the film thickness of the coating film, the type of the photosensitive agent, etc., but it is 5 to 30 parts by weight based on 100 parts by weight of the soluble polyimide resin. It is preferable to do this. If the amount is less than 5 parts by weight, sufficient sensitivity may not be obtained and a residue may be generated. If the amount exceeds 30 parts by weight, the heat resistance and solvent resistance of the resin film formed by curing of the composition will decrease. There is a case. 10 to 20 parts by weight is more preferable.
  • the photosensitive polyimide composition of the present invention can be obtained by mixing the soluble polyimide resin thus produced and a positive photosensitive agent. This mixing step can be performed in the same manner as in the case of a conventional photosensitive polyimide composition, for example, by dissolving the soluble polyimide resin and the positive photosensitive agent in a solvent.
  • N-methyl-2-pyrrolidone N, N'-dimethylacetamide, dimethylformamide, dimethyl sulfoxide, acetonitrile, diglyme, ⁇ butyrolataton , ⁇ - valerolataton, phenol , toluene, dioxane, tetrahydrofuran, Examples include sulfolane and hexamethylphosphoramide. Among these, 7 petit-mouth rataton is preferably used from the viewpoint of high volatility and odor. The amount used is preferably 1 to 20 times (weight ratio) of the soluble polyimide resin.
  • Soluble polyimide resin as solvent It is preferable to use the same solvent as that used for the synthesis because the solvent replacement operation is not necessary in the production of the photosensitive polyimide composition. Therefore, like the case where the soluble polyimide resin is synthesized by the method of claim 19, ⁇ - if petit port la out emissions is used in the synthesis, also ⁇ - Petit port as a solvent of a photosensitive polyimide composition Rataton Is preferred.
  • the photosensitive polyimide composition of the present invention obtained as described above can be used for forming a protective film of FPC.
  • the present invention further provides a protective film for covering the wiring of the FPC, the curing of the photosensitive polyimide composition according to any one of claims 1 to 3 or claim 9 to claim 16.
  • a protective film (claim 20) characterized by comprising a material.
  • This protective film is provided on the outer surface of the FPC and covers them in order to protect the wiring, the element portion, and the like.
  • the photosensitive polyimide composition is applied to the entire surface of the FPC, and if necessary, the solvent is removed by heating (prebaking) to remove the solvent.
  • prebaking heating
  • a pattern is formed (patterned) through an exposure process in which only a predetermined portion is irradiated with an actinic ray such as ultraviolet rays through a mask or the like, and a development process in which development is performed with an alkaline developer. It is formed by the method of removing.
  • alkali developer examples include sodium hydroxide, potassium hydroxide, ammonium hydroxide, sodium carbonate, potassium carbonate, ammonium carbonate, sodium hydrogen carbonate, potassium hydrogen carbonate, ammonium hydrogen carbonate, tetramethyl ammonium hydroxy.
  • a basic solution in which a salt ( ⁇ ) or the like is dissolved in water or alcohol, or a solution in which a basic compound is increased by further adding an amine compound to this solution is used.
  • the development time is suitably about 4 to 30 minutes. In less than 4 minutes, it is difficult to obtain good development results. On the other hand, if it exceeds 30 minutes, pattern peeling or the like tends to occur.
  • the power that can further reduce the occurrence of spot discoloration by setting the development time within 30 minutes When the photosensitive polyimide composition of the fourth aspect is used, even if the development time exceeds 30 minutes. The occurrence of spot discoloration can be reduced to a practical level.
  • the present invention further provides FPC (Claim 21) having the protective film according to Claim 20.
  • FPC Fraim 21
  • the third aspect of the present invention provides:
  • a positive photosensitive resin composition comprising a solvent-soluble heat-resistant resin, a positive photosensitive agent, a thermosetting agent, and a solvent,
  • thermosetting agent is a melamine-based curing agent
  • the solvent-soluble heat-resistant resin is a positive photosensitive resin composition characterized in that it is a polyimide resin or a polyamide-imide resin containing diamine having a hydroxyl group as a structural unit (claim 4).
  • the positive-type photosensitive resin composition of the third aspect includes a thermosetting agent that causes a crosslinking reaction by heating to cure the resin.
  • a thermosetting agent that causes a crosslinking reaction by heating to cure the resin.
  • patterning is performed by exposure and development. Heat curing can be performed later.
  • a protective film that is resistant to thermal deformation can be obtained, and when a reinforcing plate is pressed after the protective film is formed (for example, adhesion is performed under conditions of about 180 ° C ⁇ 30 minutes),
  • adhesion is performed under conditions of about 180 ° C ⁇ 30 minutes
  • the positive photosensitive resin composition of the third aspect is characterized by using a melamine curing agent as the thermosetting agent.
  • Other possible thermo-curing agents include epoxy-based curing agents and isocyanate-based curing agents.
  • epoxy-based curing agents development that shortens the life of the positive photosensitive resin composition.
  • problems such as possible deterioration due to alkali at the time.
  • an isocyanate curing agent there are problems such as poor storage stability.
  • a melamine curing agent it is preferable because it has characteristics such as excellent storage stability of the positive photosensitive resin composition!
  • the invention according to claim 6 is the positive photosensitive resin composition according to the third aspect, wherein the melamine-based curing agent power is a methylolmelamine-based compound represented by the following structural formula (I). It is characterized by this.
  • W represents —NY Y, Y and Y are each independently hydrogen, —CH— ⁇ .
  • ⁇ to ⁇ each independently represent hydrogen or —CH ⁇
  • represents hydrogen or an alkyl group having 6 to 6 carbon atoms.
  • the methylol melamine-based compound represented by the above formula is particularly excellent in storage stability, excellent developability, and resistance to mesh as compared with an epoxy-based curing agent and an isocyanate-based curing agent. This is preferable.
  • Examples of the methylone melamine compound represented by the above formula include hexamethylol melamine, alkylated hexamethylol melamine, partially methylolated melamine and its alkylated product, tetramethylol benzoguanamine, alkylated tetramethylol benzoguanamine, It is possible to list partially methylolated benzoguanamine and its alkylated compounds.
  • thermosetting agents such as an epoxy-based curing agent and an isocyanate-based curing agent may be used in combination as long as the gist of the present invention is not impaired.
  • the solvent-soluble heat-resistant resin constituting the positive photosensitive resin composition of the present invention is soluble in an alkaline aqueous solution used as an organic solvent developer and has excellent heat resistance. Specifically, it is a soluble polyimide resin or a soluble polyamideimide resin containing diamine having a hydroxyl group in its constituent unit.
  • the soluble polyimide resin comprises an aromatic tetracarboxylic dianhydride and a diamine containing a diamine having a hydroxyl group. It can be obtained by condensation in equimolar amounts.
  • the acid anhydride as a raw material of the soluble polyamideimide generally used is an aromatic tricarboxylic rubonic acid anhydride as described below, with an aromatic tetracarboxylic dianhydride added.
  • the invention of claim 5 is the positive photosensitive resin composition according to the third aspect, wherein the polyimide resin or polyamideimide resin strength S, the aromatic tetracarboxylic dianhydride, or the aromatic tricarboxylic anhydride.
  • the present invention provides a positive photosensitive resin composition characterized by being a condensed product of an acid anhydride obtained by adding aromatic tetracarboxylic dianhydride to diamine and diamine.
  • Examples of the diamine having a hydroxyl group include compounds represented by the following structural formulas as in the first, second and fourth embodiments (claim 7).
  • the copolymerization ratio of the diamine having a hydroxyl group that is, the ratio of the diamine having a hydroxyl group in the total diamine used for the condensation is also the same as in the first, second and fourth embodiments; A range of 50 mono% is preferable, and the reason is the same.
  • the diamine constituting the soluble polyimide resin or the soluble polyamideimide resin may contain a silicone diamine. Examples of the silicone diamine that are similar to each other include the silicone diamines exemplified above, and the effects of the blending are also the same.
  • the diamine may contain other diamines in addition to the diammine having a hydroxyl group and the silicone diamine, as long as the gist of the present invention is not impaired.
  • the diamine exemplified in the case of the fourth embodiment can be used in the same manner.
  • the solvent-soluble heat-resistant resin is a soluble polyamideimide resin
  • examples of the aromatic tricarboxylic acid anhydride that is a raw material of the soluble polyamideimide resin include trimellitic anhydride (TMA), 2- (3 , 4 dicarboxyphenyl) -2- (3 carboxyphenyl) propan anhydride, (3, 4-dicarboxyphenyl) (3-carboxyphenyl) methane anhydride, (3,4-dicarboxy) Phenyl) (3-carboxyphenyl) ether anhydride, 3, 3,, 4 tricarboxybenzophenone anhydride, 1,2,4-butanetricarboxylic acid anhydride, 2,3,5-naphthalenetricarboxylic acid anhydride 2, 3, 6-naphthalene tricarboxylic acid anhydride, 1, 2, 4 naphthalene tricarboxylic acid anhydride, 2, 2 ', 3 biphenyl tricarboxy
  • the weight average molecular weight by GPC measurement of the soluble polyimide and / or soluble polyamideimide constituting the positive photosensitive resin composition of the third aspect is preferably in the range of 20000 to 50000.
  • the weight average molecular weight exceeds this range, the printability of the composition may be deteriorated, or the remaining portion may be lost during development.
  • the weight average molecular weight is less than this range, problems such as film deterioration during development and insufficient mechanical strength of the film may occur.
  • the soluble polyimide resin-soluble polyamideimide constituting the positive photosensitive resin composition of the third aspect includes an acid component such as aromatic tetracarboxylic acid dianhydride and aromatic tricarboxylic acid anhydride exemplified above. It is possible to obtain diamine by condensing it in a reaction solvent. This condensation reaction is carried out under the same conditions as in the synthesis of conventional polyimide-polyamideimide.
  • a reaction solvent methyl benzoate, ethyl benzoate, methyl ethyl ketone
  • MEK MEK
  • acetone ⁇ -butyrolatatane
  • ⁇ -methylpyrrolidone ⁇ , ⁇ ⁇ ⁇ ⁇ -dimethylacetamide, toluene, xylene and the like.
  • the solvent-soluble heat-resistant resin and the positive photosensitive agent produced as described above are mixed in a solvent constituting the positive photosensitive resin composition. It is obtained by doing.
  • the invention according to claim 8 is characterized in that the positive photosensitive agent is a quinonediazide compound. It is a photosensitive resin composition.
  • a quinonediazide compound is used as a positive photosensitive agent, even if a melamine curing agent is included in the composition, patterning is possible with the same sensitivity and developability as in the case where the melamine curing agent is not included.
  • Preferred examples of the quinonediazide compound used as the positive photosensitive agent include naphthoquinonediazide compounds exemplified in the case of the first, second and fourth embodiments, particularly naphthoquinonediazidesulfonyl esters of aromatic polyhydroxy compounds.
  • the same solvents as those exemplified in the case of the first, second and fourth aspects are preferably exemplified. It is preferable to use the same solvent as the solvent used for the synthesis of the solvent-soluble heat-resistant resin as the solvent does not require a solvent replacement operation in the production of the positive photosensitive resin composition.
  • the content of the thermosetting agent in the positive photosensitive resin composition is preferably in the range of 1 part by weight to 50 parts by weight with respect to 100 parts by weight of the solvent-soluble heat-resistant resin. 2 to 20 parts by weight. If the thermosetting agent is less than 1 part by weight, curing will be insufficient, and it will be easy to cause scratches during pressing (adhesion) of the reinforcing plate and damage to the protective film during solder reflow. On the other hand, if it exceeds 50 parts by weight, the shrinkage due to curing increases, and the substrate tends to warp.
  • the positive photosensitive agent is preferably in the range of 5 to 50 parts by weight, more preferably 10 to 40 parts by weight with respect to 100 parts by weight of the solvent-soluble heat-resistant resin. If it is less than 5 parts by weight or more than 50 parts by weight, patterning may be difficult.
  • the concentration of the solids such as a solvent-soluble heat-resistant resin, positive photosensitive agent and thermosetting agent is 10 to 50% by weight, and the amount of the solvent is within this range. It is determined.
  • the positive photosensitive resin composition obtained in this way has developability comparable to that of conventional positive photosensitive resin compositions and is less likely to cause problems such as residues. It is. On the other hand, it is also excellent in resistance to scratches, and it is difficult for deterioration and defects to occur in the plating process.
  • the invention described in claim 22 is obtained by forming the positive photosensitive resin composition of the third aspect and heating the resulting film to remove the solvent. This is a photosensitive resin film.
  • the positive photosensitive resin composition of the third aspect can be used for forming a protective film of FPC and also for forming a photosensitive resin film.
  • This photosensitive resin film is formed by depositing a positive photosensitive resin composition by, for example, a method such as coating on a PET film which has been subjected to an appropriate release treatment, and the resulting film is then heated to 90 ° C. It is possible to manufacture by removing the solvent in the composition by heating to the extent.
  • This photosensitive resin film can be used as a photosensitive dry film resist.
  • a method for producing an FPC protective film (coverlay) using the positive-type photosensitive resin composition of the third aspect comprises applying this composition onto an FPC substrate on which wiring is formed. After film formation, the obtained film is heated to remove the solvent, then exposed through a mask and further developed to obtain a positive pattern, and then heated to a temperature higher than the curing temperature of the melamine curing agent, Solvent soluble It is carried out by crosslinking a heat resistant resin.
  • the invention of claim 23 provides the positive photosensitive resin composition of the third aspect, that is, the positive photosensitive resin composition of claim 4 to claim 8, or the wiring of the positive photosensitive resin composition of any one of claims 4 to 8.
  • a step of coating on an FPC substrate formed with a film, a step of heating the obtained film to remove the solvent, and exposing the positive photosensitive resin composition from which the solvent has been removed through a mask A method for producing an FPC comprising: a step, a step of developing after exposure, and a step of heating after development to a temperature equal to or higher than a curing temperature of the melamine curing agent.
  • the method of applying the positive photosensitive resin composition onto the FPC substrate is not particularly limited, and can be performed, for example, by screen printing. Besides, spin coating, spray coating, die coating, doctor Examples include knife coating and flexographic printing.
  • the step of heating the obtained film to remove the solvent (so-called pre-beta), the step of exposing the positive photosensitive resin composition from which the solvent has been removed through a mask, and the step of developing after exposure are generally followed. This can be done under the same conditions as when manufacturing protective films for FPC using conventional positive photosensitive resin compositions.
  • Developers and the like are the same alkaline developers as conventional ones, for example, inorganic alkalis such as sodium hydroxide, potassium hydroxide, sodium carbonate, sodium silicate, sodium metasilicate, and ammonia water, ethylamine, n-propylamine and the like.
  • 1st amine such as dimethylamine, triethanolamine, 3rd amine such as triethylamine, triethanolamine, tetramethylammonium hydroxide, tetraethyl
  • Aqueous solutions of ammonium hydroxide and corin can be used.
  • This FPC manufacturing method has a step of heating a film remaining after development to a temperature higher than the curing temperature of the melamine curing agent. By this heating, the solvent-soluble heat-resistant resin forming this film is cross-linked with a melamine curing agent, the softening temperature and the high temperature elastic modulus are improved, and the excellent effects as described above are obtained.
  • the heating temperature is equal to or higher than the temperature at which crosslinking with the melamine curing agent is performed, and is usually in the range of about 130 to 200 ° C. This temperature range is almost the same as the after-beta temperature when an FPC protective film is produced using a conventional positive photosensitive resin composition.
  • the resin constituting the positive photosensitive resin composition of the present invention is a soluble polyimide
  • the soluble polyimide is often already imidized at the stage of synthesis. Therefore, heating at a high temperature necessary for imide ring formation is unnecessary.
  • the present invention further provides, as claim 24, an FPC manufactured by the method for manufacturing an FPC according to claim 23.
  • This FPC has a protective film with an improved softening temperature and high-temperature elastic modulus. It can be used to generate scratches during pressing (adhesion) of the reinforcing plate, as well as during protective reflow or manual soldering. Damage is suppressed.
  • the invention's effect is suppressed.
  • the photosensitive polyimide composition of the first aspect When used for forming a protective film of FPC, etc., it has developability comparable to that of conventional photosensitive polyimide compositions, and is not warped. It is difficult to cause problems. In addition, the protective film formed using the photosensitive polyimide composition of the first aspect hardly deteriorates even in the gold plating process and has a sufficient adhesive force to the copper foil. [0115]
  • the photosensitive polyimide composition of the second embodiment is used for forming a protective film of FPC, etc., and in the process of forming the protective film of FPC, the development is comparable to the conventional photosensitive polyimide composition. It is difficult for problems such as residues to occur.
  • an FPC protective film with excellent adhesion resistance, resistance to deterioration even in the gold plating process, especially resistance to spot discoloration, and sufficient adhesion to copper foil. Can do.
  • the photosensitive polyimide composition of the second embodiment makes it possible to achieve both excellent developability and matt resistance.
  • the photosensitive polyimide composition of the second aspect can be easily produced by the method for producing a photosensitive polyimide composition according to claims 18 and 19.
  • the positive-type photosensitive resin composition of the third aspect has developability comparable to that of conventional positive-type photosensitive resin compositions and is less likely to cause problems such as residues. It is also excellent in the plating property, and it is difficult for deterioration and defects to occur in the plating process. Furthermore, by applying this positive photosensitive resin composition onto a substrate and crosslinking the resin by heating, a protective film having a high softening temperature and a high high temperature elastic modulus can be formed. It is possible to suppress problems such as the occurrence of wrinkles during pressing (adhesion) of the reinforcing plate, damage to the protective film during solder reflow or correction by hand solder.
  • the use of the photosensitive polyimide composition of the fourth aspect reduces the occurrence of spot discoloration on the coating surface when patterning is performed by exposure and development to form a protective film for FPC.
  • the power to lose S Further, the photosensitive polyimide composition of the fourth aspect can be easily produced by the method for producing a photosensitive polyimide composition according to claim 17.
  • FIG. 1 is a GPC chart of a varnish obtained in Example 2 or Comparative Example 5.
  • the present invention is not limited to this example.
  • the concentration of pyridine in the varnish was determined using GC-MS (apparatus: Shimadzu GC17A, column: UA-1 (inner diameter 0.25 mm, film thickness 0.25 ⁇ 111, length 30 m), injection temperature: 250. C, injection amount: 2 Quantitative determination by 1) was 0. 02% by weight based on the total amount of varnish 1. Furthermore, varnishes 2 to 5 were produced in the same manner except that the pressure reducing time was changed. Similarly, the pyridine concentration was quantitatively determined as follows.
  • Varnish 4 0. 10 weight 0/0
  • Varnish 5 2.90 Weight 0/0
  • 1, 2 naphthoquinone-2 diazido 5 sulfone as a photosensitizer Ester (Daito - Chemix Ltd., DTEP- 300) was added and mixed 15 weight 0/0 (15 phr) with respect to the resin solid content, a photosensitive polyimide composition (photosensitive ink 1-5) were formulated.
  • the photosensitive polyimide composition was applied onto a copper foil having a thickness of 18 m by screen printing, and then pre-betaged at 90 ° C. for 30 minutes to obtain a film having a thickness of 12 to 15 m. This film was exposed to 800 mj / cm 2 of ultraviolet rays through a predetermined mask.
  • the sample subjected to patterning was subjected to a general electrolytic gold plating treatment. That is, the steps shown below were performed in the order shown below, and the samples were sequentially stacked in the tank of each step and then dried.
  • Each of the photosensitive inks 1 to 5 is applied onto a copper foil having a thickness of 18 111, 4 cm X 1.5 cm, and dried to form a coating film having a thickness of 12 to; After irradiating with light through a mask, development was performed with the developer described above, and the state after gold plating was observed by the above-described method to determine the number of spots per sample. In practice, 40 samples were evaluated and the average number of spots per piece was calculated. The results and evaluations based on the following criteria are shown in Table 1.
  • Spot power observed, less than 0.5 per sample.
  • The number of observed spots is 0.5 to 1.0 per sample piece.
  • X The number of spots observed is greater than 1.0 per sample piece.
  • Example 1 Varnish 1 0. 02 0. 017 0. 2 ⁇ Comparative Example 1 Varnish 2 0. 06 0. 052 0. 9 ⁇ Comparative Example 2 Varnish 3 0. 08 0. 07 2. 8 X Comparative Example 3 Varnish 4 0. 10 0. 09 1. 1 X Comparative Example 4 Varnish 5 2. 90 2. 52 12.9 X
  • the spot discoloration numbers shown in Table 1 are the results when gold plating is further performed after development. In consideration of the fact that spot discoloration is newly formed by the gold plating process and that the spot discoloration does not disappear due to the gold plating process, the number of spot discoloration generated by development is a smaller value than that shown in Table 1. Become. As shown in Table 1, when the residual pyridine concentration is 0.02% by weight with respect to the varnish, the number of spot discoloration is low and practical use is possible, while the residual pyridine concentration is 0.06% by weight with respect to the varnish. In the case of 0.08% by weight, 0.10% by weight, and 2.90% by weight, the number of spot discoloration is large and cannot be used practically.
  • the dispersion (Mw / Mn), which is the ratio between the weight average molecular weight (Mw) and the number average molecular weight (Mn), of the obtained varnish was measured by GPC (HLC-8220GPC, manufactured by Tosoh Corporation). TSKgel GMHHR-H manufactured by Tosoh Corporation was used as the column, and the carrier solvent was LiMP dissolved in NMP at a concentration of 0.1 N.
  • the molecular weight is a converted value calculated using standard polystyrene (TSK standard polystyrene).
  • Figure 1 shows the GPC chart of the varnish obtained.
  • the resulting varnish was mixed with 15 phr of 1,2-naphthoquinone-2-diazido 5-sulfonic acid ester (manufactured by Toyo Gosei Co., Ltd., hereinafter referred to as PC 5) as a photosensitizer, and mixed with a photosensitive polyimide composition ( Photosensitive ink) was prepared.
  • the photosensitive ink was applied on a copper foil having a thickness of l S ⁇ m by screen printing and then pre-betaged to obtain a coating having a thickness of 12 to 15 m.
  • the film was exposed to 1000 mj / cm 2 of mercury lamp light through a predetermined mask.
  • It is possible to clearly pattern up to L / S of ⁇ ⁇ m or less, and there is no deterioration of the film or penetration into the interface.
  • Force that can be put in the patterning area The power at which residues can be seen in the exposed area and the deterioration of the film can be seen.
  • Each photosensitive ink is applied onto a copper foil having a thickness of 18 m, dried to form a resist film having a thickness of 12 to 15 m, and irradiated with light through a predetermined mask. After developing on the development line, electroless gold plating is applied. The condition after the plating was observed and evaluated according to the following criteria. The results are shown in Table 2.
  • Spot power S observed, 0.3 or less per sample piece.
  • The number of spots observed is greater than 0.3 and less than 1.0 per sample.
  • X The number of spots observed is greater than 1.0 per sample piece.
  • a varnish was prepared in the same manner as in Example 2 except that a mixed solvent in which 40 g of methyl benzoate was mixed with 100 g of ⁇ -butyral rataton instead of 140 g of ⁇ -butyrolatatone as a solvent was used.
  • the silicone diamine and OPDA were completely dissolved from the beginning of the reaction, and the suspended portion was not strong.
  • the varnish of Comparative Example 5 thus obtained was measured in the same manner as the varnish of Example 2. The results are also shown in Table 2.
  • Figure 1 shows the GPC chart of the varnish obtained.
  • the reaction was the same as in Example 2 except that instead of 140 g of the solvent ⁇ -butyroratatone 140 g, a mixed solvent of 100 g of ⁇ -butyrolactaton mixed with 40 g of methyl benzoate was used, and ABPS was used instead of 6FAP. To produce a varnish. Also in this reaction, the silicone diamine and OPDA were completely dissolved from the beginning of the reaction, and the suspended portion was not strong.
  • Example 4 As shown in Table 2, according to the photosensitive polyimide compositions of Examples 2 and 3 which are the products of the present invention, it is possible to achieve both excellent developability and scratch resistance. With a photosensitive polyimide composition, it is difficult to achieve both excellent developability and resistance to plating. In particular, in the case where 6FAP is not used and in Comparative Example 6, the resistance to the plating is inferior. [0146] Example 4
  • tan ⁇ is measured in an air atmosphere at a heating rate of 10 ° C / min, and the temperature at the maximum value of tan ⁇ is measured.
  • the lath transition temperature (Tg) was used.
  • TG DTA differential heat .simultaneous thermogravimetric measuring device: Seiko Instruments Inc., TG / DT
  • A220 a temperature that reduces 5% weight (Td) at a heating rate of 10 ° C / min in an air atmosphere.
  • Example 3 Based on the formulation shown in Table 3, the varnishes of Examples 5 to 12 and Comparative Examples 7 to 15 were obtained in the same manner as Example 4, and the same measurements as those of Example 4 were performed. The results are also shown in Table 4.
  • SiOn represents silicone diamine
  • the molar ratio is the molar ratio of each component in the diamine
  • mol% is the molar ratio expressed in%.
  • the total number of moles of diamine is the same as that of OPDA.
  • Example 4 4 7 1 33 58 8 Comparative example 8 4 7 (1) 33 58 8 Example 5 2 3 1 33 50 17 Comparative example 9 2 3 (1) 33 50 17 Example 6 1 1 1 33 33 33 33 Comparison Example 10 1 1 (1) 33 33 33 Comparative example 11 1 1 50 50
  • Example 10 8 3 1 67 25 8
  • Example IV 4 I 1 67 17 17
  • Example IV 2 8 1 3 j 67 8 25
  • the results in Table 4 show that the warpage and glass transition temperature are greatly influenced by the amount of silicone diamine.
  • the amount of silicone diamine is small, the warpage increases. However, even in the case of about 33 mol% with respect to the total diamine (Examples 4 to 6), the warpage is not significant, and it can be used for applications such as a protective film.
  • the amount of silicone diamine is large, the glass transition temperature is lowered. In the case of about 67 mol% with respect to the total diamine (Examples 10 to 12), the glass transition temperature is about 45 ° C. A certain force that can be used In order to obtain better heat resistance, a higher glass transition temperature is desired.
  • the results in Table 4 indicate that about 60 mol% or less is preferable based on the total diamine.
  • Example 5 Based on the formulation shown in Table 5, the varnishes of Examples 13 to 19 and Comparative Examples 16 to 17 were obtained in the same manner as in Example 4 (as shown in Table 5, some examples and comparisons).
  • APB was replaced with BA PSM
  • OPDA was replaced with benzophenone tetracarboxylic acid (BTDA)
  • 6FAP was replaced with ABPS.
  • a photosensitive polyimide composition photosensitive ink
  • screen printing, pre-beta, exposure, and development developer: 3% NaOH + 3% ethanolamine aqueous solution
  • FPC for evaluation was obtained.
  • Example 1 8 1 (25) 1 (25) OPDA replaced with BTDA
  • Example 1 9 2 (50) 1 (25) 1 (25)
  • Each of the photosensitive inks was applied onto a migration evaluation double-sided plate having a copper foil pattern of 18 m in thickness, and dried to form an insulating film having a thickness of 12 to 15 ⁇
  • development with a developer was performed to create an FPC for evaluation. This was placed under a high temperature and high humidity of 85 ° C and relative humidity of 85% RH, a 50V DC voltage was applied between the conductors for 1000 hours, the state of the resist film was observed, and the following criteria were evaluated. The results are shown in Table 6.
  • Each photosensitive ink is applied onto a copper foil having a thickness of 18 m, dried to form a resist film having a thickness of 12 to 15 m, irradiated with light through a predetermined mask, and then developed. After developing with the solution, (a) electroless gold plating, (b) electrolytic gold plating. Observe the post-mesh condition and Evaluation was based on the criteria shown. The results are shown in Table 6.
  • silicone diamine KF8010 is 33.20 g (0.04 mol)
  • the amount of 1,3—APB is 11.69 g (0.04 mol)
  • the solvent added to adjust the solid content concentration ⁇ butyrolatatone amount is 50 g
  • Each positive photosensitive resin composition obtained in this way was applied on a 38 m thick copper foil by screen printing, and then pre-beta (90 ° C x 30 minutes). The solvent was removed to obtain a film having a thickness of 12 to 15 m. This film was exposed to 1000 mj / cm 2 of mercury lamp light through a predetermined mask. Then, develop for 7 minutes at room temperature using a developer that is 2.3% NaOH + 0.5% ethanolamine aqueous solution (40 ° C), rinse with pure water, and dry. The developability was evaluated.
  • ⁇ ⁇ Can pattern up to 50 m or less L / S, and no deterioration of film or penetration into the interface.
  • The power that can be applied to L / S patterning of about 100 m Deterioration of the film is observed.
  • Each of the positive photosensitive resin compositions obtained in the above was applied on a copper foil having a thickness of 38, im by screen printing, and then pre-beta (90 ° CX 30 minutes), the solvent in the composition was removed, and a film having a thickness of about 25 ⁇ 111 was obtained.
  • This film was immersed in a developing solution of 2.3% NaOH + 0.5% ethanolamine aqueous solution (40 ° C.) at room temperature for 7 minutes. After washing with pure water, after-beta was performed at 120 ° C for 1 hour + 220 ° C for 30 minutes, and the copper foil was dissolved with an acid to obtain a film having a thickness of about 25 m.
  • the resulting film was subjected to dynamic viscosity measurement, and the softening temperature, the elastic modulus at 180 ° C. ( ⁇ ′ @ 180 ° C.), and the tan ⁇ peak temperature were measured by the following methods. These results are shown in Table 8.
  • the temperature at which the elastic modulus begins to decrease was defined as the softening temperature, and the elastic modulus at 180 ° C was defined as E '@ 180 ° C.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
  • Materials For Photolithography (AREA)

Abstract

A photosensitive polyimide composition comprising a soluble polyimide resin which is a condensate of an aromatic tetracarboxylic dianhydride with diamines, a positive-acting photosensitizer, and a solvent in which the resin and photosensitizer are dissolved, the photosensitive polyimide composition having a pyridine content of 0.05 wt.% or lower. The photosensitive polyimide composition may be one in which the diamines comprise a siliconediamine and a hydroxylated diamine and the soluble polyimide resin has a weight-average molecular weight of 20,000-50,000 and a molecular-weight distribution which has one peak and a dispersity ratio of 2.0 or less. The positive photosensitive resin composition comprises a solvent-soluble heat-resistant resin which is a soluble polyimide resin or soluble polyamide-imide resin, a positive-acting photosensitizer, a heat-curing agent, and a solvent, and is characterized in that the heat-curing agent is a melamine-type curing agent.

Description

明 細 書  Specification
感光性ポリイミド組成物及びポジ型感光性樹脂組成物、並びに FPC 技術分野  Photosensitive polyimide composition, positive photosensitive resin composition, and FPC technical field
[0001] 本発明は、 FPC (フレキシブルプリント配線板)の保護膜等の形成に用いられる感 光性ポリイミド組成物やポジ型感光性樹脂組成物に関する。本発明は、又、前記感 光性ポリイミド組成物の製造方法、及びこの感光性ポリイミド組成物の成分として用い られる可溶性ポリイミド樹脂の製造方法に関する。本発明は、さらに、前記感光性ポリ イミド組成物により形成され、 FPCのカバーレイとして機能する保護膜、及び該保護 膜を有する FPCに関する。本発明は、さらに又、前記ポジ型感光性樹脂組成物より 得られる感光性樹脂フィルム、前記ポジ型感光性樹脂組成物を用いる FPCの製造 方法及びこの製造方法により得られる FPCに関するものである。  The present invention relates to a photosensitive polyimide composition and a positive photosensitive resin composition used for forming a protective film or the like of an FPC (flexible printed wiring board). The present invention also relates to a method for producing the photosensitive polyimide composition and a method for producing a soluble polyimide resin used as a component of the photosensitive polyimide composition. The present invention further relates to a protective film that is formed of the photosensitive polyimide composition and functions as a cover lay of FPC, and an FPC having the protective film. The present invention further relates to a photosensitive resin film obtained from the positive photosensitive resin composition, an FPC production method using the positive photosensitive resin composition, and an FPC obtained by the production method.
背景技術  Background art
[0002] FPCは、その外表面に、配線を保護するための保護膜 (カバーレイ)を設ける場合 が多い。この保護膜は、配線や素子部等を被覆するものであるが、一方パッド部や接 続部等を露出させる必要がある。近年、電子機器の小型化、軽量化に伴い、デバイ スゃ配線の微細化が進行しており、 FPCの絶縁性保護膜 (以下、単に「保護膜」と言 う。)の形成に、感光性樹脂組成物を用いる方法が採用されてきている。この方法は 、配線等が形成された FPCの基板上に感光性樹脂組成物の塗膜を形成した後、所 定部分のみ露光し、現像して、パッド部や接続部等の部分の塗膜を除去する方法で あり、保護膜の微細な加工を可能にする。  [0002] In many cases, FPCs are provided with a protective film (coverlay) on the outer surface to protect the wiring. This protective film covers the wiring, the element portion, and the like, but on the other hand, it is necessary to expose the pad portion and the connection portion. In recent years, with the miniaturization and weight reduction of electronic devices, device wiring has been miniaturized, and the formation of an FPC insulating protective film (hereinafter simply referred to as “protective film”) is a sensitive process. A method using a conductive resin composition has been adopted. In this method, after forming a coating film of a photosensitive resin composition on an FPC substrate on which wiring or the like is formed, only a predetermined part is exposed and developed, and a coating film on a part such as a pad part or a connection part. This is a method for removing the protective film and enables fine processing of the protective film.
[0003] このような感光性樹脂組成物としては、ソルダーレジストと呼ばれるネガ型感光性樹 脂組成物(例えばアクリル エポキシ系等)が広く用いられている。しかし、これらは 現像後の残膜部が架橋硬化した構造となっているため、硬くもろくなり十分な柔軟性 がないという欠点を有するので、従来のカバーレイと併用して微細パターン部分にの み用いられている。そこで、最近ではその代替として、フレキシブルで耐熱性に優れ た保護膜が望まれており、耐熱性に優れるとともに溶媒可溶性が付与された樹脂 (溶 媒可溶耐熱性樹脂)とポジ型感光剤からなる感光性樹脂組成物を用いる方法が提 案されている。 As such a photosensitive resin composition, a negative photosensitive resin composition called a solder resist (for example, acrylic epoxy type) is widely used. However, these have the disadvantage that the remaining film portion after development is crosslinked and cured, so that it has the disadvantage that it is hard and brittle and does not have sufficient flexibility. It is used. Therefore, recently, as an alternative, a flexible protective film having excellent heat resistance has been desired. From a resin (solvent soluble heat resistant resin) that has excellent heat resistance and solvent solubility (solvent soluble heat resistant resin) and a positive photosensitive agent. A method using a photosensitive resin composition is proposed. It has been proposed.
[0004] ここで溶媒可溶耐熱性樹脂としては、水酸基を有するジァミンを用いた可溶性ポリ イミド樹脂が、特許 2935994号公報 (特許文献 1)、特開平 10— 224017号公報 (特 許文献 2)等で提案されている。ポリイミド樹脂は、本来は溶剤に不溶性である力 柔 軟なモノマー成分を用い、水酸基を有するジァミンを一定割合以上含ませることによ り可溶性及びアルカリ現像性が付与される。  Here, as a solvent-soluble heat-resistant resin, a soluble polyimide resin using a hydroxyl-containing diamine is disclosed in Japanese Patent No. 2935994 (Patent Document 1) and Japanese Patent Application Laid-Open No. 10-224017 (Patent Document 2). Etc. are proposed. The polyimide resin is provided with solubility and alkali developability by using a monomer component which is inherently insoluble in a solvent and containing a certain proportion of diamine having a hydroxyl group.
[0005] この水酸基を有するジァミンとしては、例えば、下記構造式で表される化合物を挙 げること力 Sでさる。  [0005] Examples of the diamine having a hydroxyl group include a compound S represented by the following structural formula.
[0006] [化 11  [0006] [Chemical 11
Figure imgf000004_0001
Figure imgf000004_0001
[0007] 可溶性ポリイミド樹脂は、前記のような水酸基を有するジァミンを含有したジァミンと 芳香族テトラカルボン酸 2無水物を、略 1: 1のモル比で縮合することにより得られるが 、この縮合反応を促進するための触媒として、例えばピリジンが用いられている。 [0007] The soluble polyimide resin is obtained by condensing a diamine containing a diamine having a hydroxyl group as described above and an aromatic tetracarboxylic dianhydride in a molar ratio of approximately 1: 1. For example, pyridine is used as a catalyst for promoting the reaction.
[0008] 又、可溶性ポリイミド樹脂の合成に用いるジァミン成分に、さらにシリコーンジァミン を含有させることにより、保護膜の難燃性、配線を構成する銅との接着性、柔軟性等 を向上させること力 Sできる。そこで、水酸基を有するジァミン及びシリコーンジァミンを ともに含有するジァミン成分を用いて合成した可溶性ポリイミド樹脂とポジ型感光剤力、 らなる感光性樹脂組成物(感光性ポリイミド組成物)が提案されて!、る。 (W099/19[0008] Further, by adding a silicone diamine to the diamine component used for the synthesis of the soluble polyimide resin, the flame retardance of the protective film, the adhesion to the copper constituting the wiring, the flexibility, etc. are improved. That power S. Therefore, a soluble polyimide resin synthesized using a diamine component containing both a diamine having a hydroxyl group and a silicone diamine, and a positive photosensitive agent, A photosensitive resin composition (photosensitive polyimide composition) is proposed! (W099 / 19
771号公報、特許文献 3) 771 Publication, Patent Document 3)
特許文献 1:特許 2935994号公報  Patent Document 1: Japanese Patent No. 2935994
特許文献 2 :特開平 10— 224017号公報  Patent Document 2: Japanese Patent Laid-Open No. 10-224017
特許文献 3 : WO 99/19771号公報  Patent Document 3: WO 99/19771
発明の開示  Disclosure of the invention
発明が解決しょうとする課題  Problems to be solved by the invention
[0009] 可溶性ポリイミド樹脂を含む感光性ポリイミド組成物を用いて FPCの保護膜を形成 すると、接着剤が不要なため、膜の厚みが低減することで FPCの剛性が低くなり、低 弾性率が可能になり、より高い折りたたみ性が得られる。また製造プロセスが少なくな る等の優れた効果が得られる。 [0009] When an FPC protective film is formed using a photosensitive polyimide composition containing a soluble polyimide resin, an adhesive is not required. Therefore, the thickness of the film is reduced, thereby reducing the rigidity of the FPC and reducing the low elastic modulus. It becomes possible and higher foldability is obtained. In addition, excellent effects such as fewer manufacturing processes can be obtained.
[0010] しかし、保護膜形成用の感光性ポリイミド組成物には、前記の柔軟性や耐熱性に加 えて、露光部に現像残渣 (現像の際の抜け残り)が発生しにくいとの特性 (現像性)、 及び、非露光部(即ち保護膜となる部分)が、接続部の形成等のために行われるメッ キエ程により劣化しにくいとの特性(耐メツキ性)が求められる力 S、従来の感光性ポリイ ミド組成物を用いて FPCの保護膜を形成する場合、現像性と耐メツキ性の両立が難 しいとの問題があった。 [0010] However, the photosensitive polyimide composition for forming a protective film has a characteristic that, in addition to the flexibility and heat resistance, development residue (remaining omission during development) hardly occurs in the exposed area ( Developability) and a force S that requires non-exposed portions (that is, portions that serve as a protective film) to be less susceptible to deterioration due to the meshing performed for the formation of connection portions, etc. When an FPC protective film is formed using a conventional photosensitive polyimide composition, there is a problem that it is difficult to achieve both developability and resistance to plating.
[0011] 即ち、露光部に残渣 (抜け残り)が発生した場合はパッド部や接続部等が露出不良 となり外部との電気的接続不良の原因となるので、現像時間を長くする等により、露 光部の塗膜を完全に除去するように現像する必要がある。しかし、この場合は、未露 光部の塗膜 (保護膜)の表面が、現像液や、接続部等の形成のために行われる金メ ツキの工程で劣化しやすぐ新たな不良が発生しやすい。  [0011] That is, if a residue (remaining omission) occurs in the exposed portion, the pad portion and the connecting portion become poorly exposed and cause a poor electrical connection with the outside. It is necessary to develop so as to completely remove the coating film on the light part. However, in this case, the surface of the coating film (protective film) in the unexposed area deteriorates in the gold plating process for forming the developer and the connection part, and a new defect is immediately generated. It's easy to do.
[0012] 例えば、露光、現像によりパターユングを行う際に、塗膜表面上に斑点変色が生じ やすいとの問題がある。この斑点変色は、保護膜の特性を低下させる可能性がある。 又、 FPCの製造においては、接続部等の形成のため金メッキが必要な場合があるが 、従来の感光性ポリイミド組成物を用いて形成された保護膜は、金メッキの工程で劣 化しやすい。  [0012] For example, when performing patterning by exposure and development, there is a problem that spot discoloration tends to occur on the surface of the coating film. This spot discoloration may deteriorate the characteristics of the protective film. Further, in the manufacture of FPC, gold plating may be necessary for forming connection portions and the like, but a protective film formed using a conventional photosensitive polyimide composition is easily deteriorated in the gold plating process.
[0013] より具体的には、未露光部が、現像時に劣化しやすく表面の白化を招き、この箇所 カ^ッキ前処理液ゃメツキ液により劣化する。この現象は、電解金メッキ、無電解金メ ツキのいずれでも生じる力 S、特に、無電解金メッキのプロセスで劣化が大きい。 [0013] More specifically, the unexposed area is likely to deteriorate during development, leading to whitening of the surface. Deteriorated by the pre-treatment liquid of the cookie. This phenomenon is greatly deteriorated in the force S generated by both electrolytic gold plating and electroless gold plating, particularly in the electroless gold plating process.
[0014] さらに、耐メツキ性を上げるために、保護膜には、接着力、特に銅との接着力の向 上が求められるが、従来の保護膜は、 FPCを構成する銅箔との接着力が未だ十分で はなく、開口部から、現像液ゃメツキ液等が浸み込み、膜の劣化を引きおこすおそれ があるとの問題もある。 [0014] Furthermore, in order to increase the resistance to scratching, the protective film is required to improve the adhesive strength, particularly the adhesive strength with copper, but the conventional protective film is bonded to the copper foil constituting the FPC. There is also a problem that the force is not yet sufficient, and the developing solution may penetrate into the opening to cause deterioration of the film.
[0015] 本発明の第 1の課題は、可溶性ポリイミド樹脂を含む感光性ポリイミド組成物であつ て、金メッキのプロセスにおいても劣化しに《、特に斑点不良を生じにくく(即ち、露 光、現像によりパターユングを行う際に塗膜表面上の斑点変色の発生が少なく)、さら に、銅箔に対し十分な接着力を有する保護膜を形成できるとともに、従来の感光性ポ リイミド組成物と同様の現像性を維持し、残渣ゃ反り等の問題を発生しにくい感光性 ポリイミド組成物を提供することである。本発明は、さらに又、この感光性ポリイミド組 成物の製造方法、この感光性ポリイミド組成物により形成され、金メッキのプロセスに おいても劣化しにくぐ力、つ銅箔に対し十分な接着力を有する FPCの保護膜、及び 該保護膜を有する FPCを提供することである。  [0015] The first problem of the present invention is a photosensitive polyimide composition containing a soluble polyimide resin, which deteriorates even in the gold plating process <<, particularly, it is difficult to cause spot defects (that is, by exposure and development). (When patterning, there is little occurrence of spot discoloration on the coating surface), and furthermore, a protective film having sufficient adhesion to copper foil can be formed, and the same as conventional photosensitive polyimide compositions. It is to provide a photosensitive polyimide composition that maintains developability and hardly causes problems such as residue warpage. The present invention further provides a method for producing this photosensitive polyimide composition, a force formed by this photosensitive polyimide composition, which hardly resists deterioration in the gold plating process, and a sufficient adhesive strength to copper foil. It is providing the protective film of FPC which has these, and FPC which has this protective film.
[0016] 従来の感光性樹脂組成物の中でも、軟化温度が低い保護膜を形成するものを用 いれば、優れた現像性を与え、かつ良好な接着力を与える場合もある。し力、しこの場 合は、保護膜の軟化温度が低いため、  [0016] Among conventional photosensitive resin compositions, if a protective film having a low softening temperature is used, excellent developability may be imparted and good adhesive force may be imparted. In this case, since the softening temperature of the protective film is low,
保護膜形成後に行われる補強板のプレス (接着)時にシヮが発生する、 ハンダリフロー時や手ハンダによる修正時に保護膜が損傷する、  When the reinforcing plate is pressed (adhered) after the protective film is formed, wrinkles occur. The protective film is damaged during solder reflow or manual soldering.
等の問題があった。  There was a problem such as.
[0017] この問題は、剛直成分を可溶性ポリイミド樹脂に導入して、軟化温度を向上させるこ とにより防ぐこと力 Sできる。しかしこの場合は、反りが大きくなる、密着力の低下のため クロスカット試験などでハガレが生じやすい等の問題がある。本発明の第 2の課題は 、従来技術のこのような問題を生じなレ、ポジ型感光性樹脂組成物を提供することであ 課題を解決するための手段  [0017] This problem can be prevented by introducing a rigid component into the soluble polyimide resin to improve the softening temperature. However, in this case, there is a problem that warpage is increased and peeling is likely to occur in a crosscut test due to a decrease in adhesion. The second problem of the present invention is to provide a positive-type photosensitive resin composition that does not cause such a problem of the prior art. Means for solving the problem
[0018] 本発明者は、鋭意検討の結果、可溶性ポリイミド樹脂に可溶性を付与するための水 酸基を有するジァミンとして、下記の構造式 (Π)で表される 2, 2—ビス(3—アミノー 4 ーヒドロキシフエ二ノレ)へキサフルォロプロパン(以下 6FAPと言う。)を用い、 6FAPの 共重合比を所定の範囲とすることにより、金メッキのプロセスにおいてもより劣化しにく ぐ力、つ銅箔に対しさらに優れた接着力を有する保護膜を形成できるとともに、従来 の感光性ポリイミド組成物と同様の現像性を維持し、反り等の問題を発生しにくいこと を見出した。後述の本発明の第 1の態様は、この知見に基づき完成されたものである[0018] As a result of intensive studies, the present inventor has found water for imparting solubility to a soluble polyimide resin. As the diamine having an acid group, 2,2-bis (3-amino-4-hydroxyphenol) hexafluoropropane (hereinafter referred to as 6FAP) represented by the following structural formula (式) is used. By setting the copolymerization ratio within a predetermined range, it is possible to form a protective film having a power that hardly deteriorates even in the gold plating process and an even better adhesion to copper foil, and a conventional photosensitive polyimide composition. It has been found that the same developability as that of the product is maintained and problems such as warpage are unlikely to occur. The first aspect of the present invention, which will be described later, has been completed based on this finding.
Yes
[0019] [化 2]  [0019] [Chemical 2]
Figure imgf000007_0001
Figure imgf000007_0001
[0020] 本発明者は、又、従来の感光性ポリイミド組成物のベース樹脂となる可溶性ポリイミ ド樹脂は、分子量分布(分散)が広ぐまた低分子量領域と高分子量領域にそれぞれ 山を有する二山分布であり、さらに低分子量成分を多く含むものであることを見出し た。そして、高分子量成分は溶剤に溶けにくぐ低分子量成分は溶けやすいことから 、 FPCの基板上の露光部に残渣 (抜け残り)が発生しやすぐ現像液ゃメツキ液により 未露光部の塗膜表面が劣化しやすいと考え、鋭意検討の結果、ポリイミド樹脂の分 子量を特定の範囲とするとともに、分子量分布を、 1山分布としかつ狭くすることにより 、優れた現像性と耐メツキ性を両立できることを見出した。 [0020] The present inventor has also shown that the soluble polyimide resin used as the base resin of the conventional photosensitive polyimide composition has a wide molecular weight distribution (dispersion) and two peaks in the low molecular weight region and the high molecular weight region. It was found to have a mountain distribution and a high content of low molecular weight components. And since the high molecular weight component is difficult to dissolve in the solvent, the low molecular weight component is easy to dissolve. Therefore, a residue (residual portion) is generated on the exposed portion of the FPC substrate. As a result of diligent investigation, the surface of the polyimide resin is considered to be easily degraded. I found out that they can be compatible.
[0021] 本発明者は、さらに、芳香族テトラカルボン酸 2無水物とジァミンの縮合により可溶 性ポリイミド樹脂を合成する方法にお!/、て、芳香族テトラカルボン酸 2無水物及び前 記シリコーンジァミンの一部が反応溶媒に不溶で懸濁された状態で重合 (縮合)を開 始し、重合の進行にともないこれらを溶解する方法により、このような分子量の範囲や 分子量分布を有する可溶性ポリイミド樹脂を容易に合成できることを見出した。従来 の合成法では、合成(重合)ロットごとに分子量及び分子量分布が変化し易ぐその 結果現像性ゃ耐メツキ性の低下の原因ともなっていたが、この方法によりこの問題も 解決される。後述の本発明の第 2の態様の感光性ポリイミド組成物やその製造方法 は、これらの知見に基づき完成されたものである。 [0021] The inventor further provides a method for synthesizing a soluble polyimide resin by condensation of an aromatic tetracarboxylic dianhydride and diamine! /, And the aromatic tetracarboxylic dianhydride and the above-mentioned Polymerization (condensation) is started in a state where a part of silicone diamine is insoluble and suspended in the reaction solvent, and these molecular weight ranges and molecular weight distributions are reduced by dissolving them as the polymerization proceeds. It has been found that a soluble polyimide resin can be easily synthesized. In the conventional synthesis method, the molecular weight and molecular weight distribution are easily changed for each synthesis (polymerization) lot. As a result, developability has also been a cause of lowering of resistance to scratches, but this problem can also be solved by this method. The photosensitive polyimide composition and the production method thereof according to the second aspect of the present invention to be described later have been completed based on these findings.
[0022] 本発明者は、さらに又、溶媒可溶耐熱性樹脂、例えば前記の可溶性ポリイミド樹脂 等、及びポジ型感光剤からなるポジ型感光性樹脂組成物に、熱硬化剤として架橋性 のメラミン系化合物を配合しても未配合時と同様にポジ型の感光パターユングが可能 であること、及び、このメラミン系化合物を配合した場合は、現像後のアフターベータ 等によって、ポジパターンを構成する樹脂を架橋させ、軟化温度の上昇及び高温弾 性率の向上が可能であり、その結果、保護膜形成後に行われる補強板のプレス (接 着)時のシヮの発生、ハンダリフロー時や手ハンダによる修正時に保護膜が損傷する 問題、反りやクロスカット試験などでのハガレ等の問題が解決できることを見出した。 後述の本発明の第 3の態様は、この知見に基づき完成されたものである。  [0022] The present inventor further added a crosslinkable melamine as a thermosetting agent to a positive photosensitive resin composition comprising a solvent-soluble heat-resistant resin, for example, the above-described soluble polyimide resin, and a positive photosensitive agent. Even if a compound is added, a positive photosensitive patterning is possible in the same way as when it is not added, and when this melamine compound is added, a positive pattern is formed by an afterbeta after development. It is possible to crosslink the resin to increase the softening temperature and improve the high temperature elasticity. As a result, it is possible to generate creases when pressing the reinforcing plate after the protective film is formed, during solder reflow, It was found that problems such as damage to the protective film during correction by solder, problems such as warping and peeling in the cross-cut test can be solved. A third aspect of the present invention, which will be described later, has been completed based on this finding.
[0023] 本発明者は、さらに又、斑点変色は、次のメカニズムで形成されると考えた。即ち、 現像の際、塗膜上の欠陥部分に現像液が染み込んで微小の亀裂または穴が生じ、 そこからさらに塗膜と基板の間へ染み込みが進行する。現像後に行うベーキングで 染み込みの起きた部分で導体 (銅等)酸化が起き、その結果、導体は着色し、斑点変 色として観察される。又、縮合反応の触媒として使用されたピリジンが存在すると、塗 膜を構成するポリマーとピリジンが相互作用して塗膜の現像液に対する親和性を高 め、現像液の染み込みが促進される可能性があると考えた。従って、斑点変色出現 の要因は過現像とピリジンであり、感光性ポリイミド組成物中のピリジン量を減少させ ることにより、斑点変色が出現しにくくなることを見出した。後述の本発明の第 4の態 様は、この知見に基づき完成されたものである。  [0023] The present inventor further thought that spot discoloration is formed by the following mechanism. That is, at the time of development, the developing solution soaks into a defective portion on the coating film to form a minute crack or hole, and soaking further progresses between the coating film and the substrate. Conductor (copper, etc.) oxidation occurs at the part where the penetration occurred after baking after development. As a result, the conductor is colored and observed as spot discoloration. In addition, if pyridine used as a catalyst for the condensation reaction is present, the polymer constituting the coating film may interact with the pyridine to increase the affinity of the coating film for the developer, which may promote the penetration of the developer. I thought there was. Therefore, the cause of spot discoloration appears to be over-development and pyridine, and it was found that spot discoloration is less likely to occur by reducing the amount of pyridine in the photosensitive polyimide composition. The fourth aspect of the present invention, which will be described later, has been completed based on this finding.
[0024] 本発明の第 1の態様は、  [0024] The first aspect of the present invention is:
可溶性ポリイミド樹脂及びポジ型感光剤を含有する感光性樹脂組成物であって、 前記可溶性ポリイミド樹脂が、芳香族テトラカルボン酸 2無水物とジァミンの縮合物 であり、  A photosensitive resin composition containing a soluble polyimide resin and a positive photosensitive agent, wherein the soluble polyimide resin is a condensate of aromatic tetracarboxylic dianhydride and diamine,
前記ジァミン力 S、シリコーンジァミン及び水酸基を有するジァミンを含有し 前記水酸基を有するジァミンが、 6FAPであり 6FAPの含有量が、全ジァミンに対して 1〜50モル%であることを特徴とする感光 性ポリイミド組成物である(請求項 1)。 The diamine containing S, silicone diamine, and diamine having a hydroxyl group, and the diamine having a hydroxyl group is 6FAP. The photosensitive polyimide composition is characterized in that the content of 6FAP is 1 to 50 mol% with respect to the total diamine (Claim 1).
[0025] 第 1の態様の感光性ポリイミド組成物は、芳香族テトラカルボン酸 2無水物とジァミン の縮合物である可溶性ポリイミド樹脂をベースポリマーとして含有する。芳香族テトラ カルボン酸 2無水物とジァミンの縮合物とは、芳香族テトラカルボン酸 2無水物及びジ アミンを、略 1: 1の等モル量で縮合させて得られる反応物を意味する。前記可溶性ポ リイミド樹脂の合成に使用するジァミンは、シリコーンジァミン及び水酸基を有するジ ァミン、さらに必要により加えられる他のジァミンの混合物である。水酸基を有するジ ァミンの水酸基により現像性が得られる。  [0025] The photosensitive polyimide composition according to the first aspect contains a soluble polyimide resin, which is a condensate of aromatic tetracarboxylic dianhydride and diamine, as a base polymer. The condensate of aromatic tetracarboxylic dianhydride and diamine means a reaction product obtained by condensing aromatic tetracarboxylic dianhydride and diamine in an equimolar amount of about 1: 1. The diamine used for the synthesis of the soluble polyimide resin is a mixture of a silicone diamine and a diamine having a hydroxyl group, and other diamines added if necessary. The developability is obtained by the hydroxyl group of the diamine having a hydroxyl group.
[0026] 第 1の態様の感光性ポリイミド組成物においては、前記水酸基を有するジァミンが、 6FAPであり、 6FAPの含有量が全ジァミンに対して 1〜50モル0 /0であることを特徴と する。水酸基を有するジァミンを 6FAPとすることにより、現像性がより向上する。又全 ジァミンに対する、水酸基を有するジァミンの含有量を 1〜 50モル%とすることにより 、現像性、耐熱性、耐メツキ性を優れたものとすることができる。従って、その両方の 特徴を具備する第 1の態様の感光性ポリイミド組成物により、優れた現像性、耐熱性 、耐メツキ十生を得ること力 Sできる。 [0026] In the photosensitive polyimide composition of the first aspect, Jiamin having a hydroxyl group is a 6FAP, and characterized in that the content of 6FAP is 1 to 50 mol 0/0 for all Jiamin To do. When the diamine having a hydroxyl group is 6FAP, developability is further improved. Further, by making the content of the hydroxyl group-containing diamine to 1 to 50 mol% with respect to the total diamine, the developability, heat resistance, and resistance to plating can be improved. Therefore, it is possible to obtain excellent developability, heat resistance, and meticulous resistance with the photosensitive polyimide composition of the first embodiment having both of the characteristics.
[0027] 第 1の態様の感光性ポリイミド組成物を構成する可溶性ポリイミド樹脂は、芳香族テ トラカルボン酸 2無水物と、シリコーンジァミン、 6FAP及び必要により加えられる他の ジァミンを、溶媒に溶解し、加熱して縮合反応させることにより製造することができる。 溶媒として、感光性ポリイミド組成物の溶媒と同じものを用いると、感光性ポリイミド組 成物の製造の際に溶媒の置換操作が不要となるので、好ましい。従って、この溶媒と しては、感光性ポリイミド組成物の溶媒として、後記されるものが、好ましく例示される [0027] The soluble polyimide resin constituting the photosensitive polyimide composition of the first aspect comprises an aromatic tetracarboxylic dianhydride, silicone diamine, 6FAP, and other diamine added as necessary, as a solvent. It can be produced by dissolving and heating to cause a condensation reaction. If the same solvent as the solvent of the photosensitive polyimide composition is used as the solvent, it is preferable because a solvent replacement operation is not necessary in the production of the photosensitive polyimide composition. Accordingly, examples of the solvent include those described later as the solvent for the photosensitive polyimide composition.
Yes
[0028] 請求項 2に記載の発明は、第 1の態様の感光性ポリイミド組成物の好ましい態様で あって、感光性ポリイミド組成物のベースポリマーである可溶性ポリイミド樹脂の重量 平均分子量が 20000〜50000の範囲であり、かつその分子量分布が 1山分布であ ることを特徴とする請求項 1に記載の感光性ポリイミド組成物である。  [0028] The invention according to claim 2 is a preferred embodiment of the photosensitive polyimide composition of the first embodiment, and the weight average molecular weight of the soluble polyimide resin that is the base polymer of the photosensitive polyimide composition is 20000 to 50000 2. The photosensitive polyimide composition according to claim 1, wherein the molecular weight distribution is a single peak distribution.
[0029] 第 1の態様において、このような平均分子量及び分子量分布を有する可溶性ポリイ ミド樹脂を、ベースポリマーとして使用することにより、現像時に現像残りが出にくくな り、かっこの組成物より得られる絶縁膜パターンの耐熱性、耐溶剤性、機械的強度が 優れたものとし、容易に要求特性を満たす絶縁膜パターンが得られるようになる。特 に、分子量分布力 山分布であるとともに、その分散も小さい場合は、現像残りが出 にくい、耐熱性、耐溶剤性、機械的強度が優れるとの効果が顕著になる。 [0029] In the first embodiment, the soluble polymer having such an average molecular weight and molecular weight distribution. By using a mid resin as a base polymer, it is difficult for the development residue to be generated during development, and the insulating film pattern obtained from the parenthesis composition has excellent heat resistance, solvent resistance, and mechanical strength. Insulating film patterns satisfying the required characteristics can be obtained. In particular, when the molecular weight distribution force distribution is small and the dispersion is small, the effect of hardly causing the development residue and excellent heat resistance, solvent resistance, and mechanical strength becomes remarkable.
[0030] なお、 1山分布とは、分子量の分布曲線のピークが実質的に 1つであることを言う。  [0030] The single peak distribution means that the molecular weight distribution curve has substantially one peak.
又、分散とは、分子量の分布の広がり程度を表し、具体的には、(重量平均分子量/ 数平均分子量)の値である。又、重量平均分子量、数平均分子量、分子量の分布曲 線は、 GPCにより測定し、標準ポリスチレン (TSK標準ポリスチレン)を用いて計算に より求めた値である。又、このような平均分子量及び分子量分布を有する可溶性ポリ イミド樹脂は、後述の請求項 18に記載の方法により製造することができる。  The dispersion represents the extent of the molecular weight distribution, and specifically is a value of (weight average molecular weight / number average molecular weight). The weight average molecular weight, number average molecular weight, and molecular weight distribution curve are values measured by GPC and calculated using standard polystyrene (TSK standard polystyrene). In addition, a soluble polyimide resin having such an average molecular weight and molecular weight distribution can be produced by the method described in claim 18 described later.
[0031] 本発明の第 2の態様は、  [0031] The second aspect of the present invention provides:
可溶性ポリイミド樹脂及びポジ型感光剤を含有する感光性樹脂組成物であって、 前記可溶性ポリイミド樹脂が、芳香族テトラカルボン酸 2無水物とジァミンの縮合物 であり、  A photosensitive resin composition containing a soluble polyimide resin and a positive photosensitive agent, wherein the soluble polyimide resin is a condensate of aromatic tetracarboxylic dianhydride and diamine,
前記ジァミン力 S、シリコーンジァミン及び水酸基を有するジァミンを含有し 前記可溶性ポリイミド樹脂の重量平均分子量が、 20000〜 50000であり、かつ分 子量分布が 1山分布で、分散が 2. 0以下であることを特徴とする感光性ポリイミド組 成物である(請求項 3)。  It contains the diamine power S, silicone diamine and diamine having a hydroxyl group, and the soluble polyimide resin has a weight average molecular weight of 20000 to 50,000, a molecular weight distribution of one peak distribution, and a dispersion of 2.0 or less. It is a photosensitive polyimide composition characterized in that (Claim 3).
[0032] 第 2の態様の感光性ポリイミド組成物も、芳香族テトラカルボン酸 2無水物とジァミン の縮合物である可溶性ポリイミド樹脂をベースポリマーとして含有し、前記ジァミンは 、シリコーンジァミン及び水酸基を有するジァミンを含有する。芳香族テトラカルボン 酸 2無水物とジァミンの縮合物の意味及びその作用等は、第 1の態様の場合と同じで ある。  [0032] The photosensitive polyimide composition of the second aspect also contains a soluble polyimide resin that is a condensate of aromatic tetracarboxylic dianhydride and diamine as a base polymer, and the diamine includes silicone diamine and hydroxyl group. Containing diamine. The meaning and action of the condensate of aromatic tetracarboxylic dianhydride and diamine are the same as in the first embodiment.
[0033] 第 2の態様の感光性ポリイミド組成物は、そのベースポリマーである可溶性ポリイミド 樹脂の重量平均分子量が 20000〜50000の範囲であり、かつその分子量分布が 1 山分布で、分散が 2. 0以下であることを特徴とする。このような平均分子量、分子量 分布、及び分散を有する可溶性ポリイミド樹脂に、感光剤等を加えることにより、感光 性ポリイミド組成物として高感光度と現像性が得られ、現像時に現像残渣が生じにく くなり、かっこの組成物より得られる塗膜の耐熱性、耐溶剤性、耐メツキ性が優れたも のとなり、容易に要求特性を満たす保護膜が得られる。中でも、重量平均分子量が 2 5000〜45000の範囲であれば、より一層特性の優れた保護膜が得られる。 [0033] In the photosensitive polyimide composition of the second aspect, the soluble polyimide resin as the base polymer has a weight average molecular weight in the range of 20000 to 50000, a molecular weight distribution of one peak distribution, and a dispersion of 2. It is 0 or less. By adding a photosensitizer to a soluble polyimide resin having such an average molecular weight, molecular weight distribution, and dispersion, As a photosensitive polyimide composition, high photosensitivity and developability are obtained, and development residues are less likely to occur during development, and the coating film obtained from the parenthesis composition has excellent heat resistance, solvent resistance, and resistance to plating. Thus, a protective film satisfying the required characteristics can be easily obtained. In particular, when the weight average molecular weight is in the range of 25,000 to 45000, a protective film having further excellent characteristics can be obtained.
[0034] 第 2の態様の感光性ポリイミド組成物は、  [0034] The photosensitive polyimide composition of the second aspect is
芳香族テトラカルボン酸 2無水物と、シリコーンジァミン及び水酸基を有するジァミン を含有するジァミンを縮合する縮合反応工程を有し、  A condensation reaction step of condensing an aromatic tetracarboxylic dianhydride with a diamine containing a silicone diamine and a diamine having a hydroxyl group;
前記縮合反応工程が、前記芳香族テトラカルボン酸 2無水物及び前記シリコーンジ ァミンの一部のみを溶解する溶媒中に、芳香族テトラカルボン酸 2無水物及びシリコ 一ンジァミンが懸濁した状態で縮合を開始し、その後、昇温しながら、芳香族テトラ力 ルボン酸 2無水物及びシリコーンジァミンを前記溶媒に溶解させて行うことを特徴とす る可溶性ポリイミド樹脂の製造方法により製造することができる (請求項 18)。  In the condensation reaction step, the aromatic tetracarboxylic dianhydride and the silicone diamine are condensed in a solvent that dissolves only a part of the aromatic tetracarboxylic dianhydride and the silicone diamine. And then, it is produced by a method for producing a soluble polyimide resin, characterized in that it is carried out by dissolving aromatic tetra force rubonic acid dianhydride and silicone diamine in the solvent while raising the temperature. Yes (claim 18).
[0035] この可溶性ポリイミド樹脂の製造方法は、芳香族テトラカルボン酸 2無水物とジアミ ンを縮合する縮合反応工程を有する点は、従来のポリイミド樹脂の製造方法と同様で ある。し力、しこの製造方法では、この芳香族テトラカルボン酸 2無水物とジァミンの縮 合反応において、芳香族テトラカルボン酸 2無水物及びシリコーンジァミンの一部の みを溶解する溶媒中に、芳香族テトラカルボン酸 2無水物及びシリコーンジァミンを 懸濁させた状態で縮合を開始し、その後、昇温しながら芳香族テトラカルボン酸 2無 水物及びシリコーンジァミンを前記溶媒に溶解させてさらに縮合を行うことを特徴とす  [0035] This soluble polyimide resin production method is the same as the conventional polyimide resin production method in that it has a condensation reaction step of condensing aromatic tetracarboxylic dianhydride and diamine. In this process, the aromatic tetracarboxylic dianhydride and diamine are condensed in a solvent that dissolves only a part of the aromatic tetracarboxylic dianhydride and silicone diamine. Then, condensation is started in a state where the aromatic tetracarboxylic dianhydride and the silicone diamine are suspended, and then the aromatic tetracarboxylic acid 2 anhydrous and the silicone diamine are used in the solvent while raising the temperature. It is characterized in that it is dissolved and further condensed.
[0036] 芳香族テトラカルボン酸 2無水物及びシリコーンジァミンの一部のみを溶解する溶 媒としては、 γ—プチ口ラタトンが挙げられる。請求項 19に記載の発明は、前記可溶 性ポリイミド樹脂の製造方法の好まし!/、態様であり、前記芳香族テトラカルボン酸 2無 水物が、 4, 4'ーォキシジフタル酸 2無水物(OPDA)を含有するものであり、前記水 酸基を有するジァミン力 6FAPであり、かつ、前記溶媒が、 γ —ブチロラタトンである ことを特徴とする請求項 18に記載の製造方法である。なお、 OPDAの詳細な説明は 後述する。 [0036] Examples of the solvent that dissolves only a part of the aromatic tetracarboxylic dianhydride and the silicone diamine include γ-petit-mouth rataton. The invention according to claim 19 is a preferred embodiment of the method for producing the soluble polyimide resin, wherein the aromatic tetracarboxylic acid 2 anhydrous is 4,4′-oxydiphthalic acid dianhydride ( 19. The production method according to claim 18, characterized in that it comprises OPDA), is a diamine force 6FAP having a hydroxyl group, and the solvent is γ-butyroratatone. Detailed explanation of OPDA will be described later.
[0037] 請求項 19の方法では、先ず、シリコーンジァミンが溶媒である γ —ブチロラタトンに 加えられ、次に、芳香族テトラカルボン酸 2無水物の OPDAが徐々に加えられた後、 所定時間撹拌され、重合を開始させる。又は、先ず、芳香族テトラカルボン酸 2無水 物が溶媒である γ —ブチロラタトンに加えられ、次に、シリコーンジァミンを徐々に加 えて、重合を開始させてもよい。このとき、室温であるため、シリコーンジァミンや芳香 族テトラカルボン酸 2無水物の OPDAは溶解し難ぐ一部が溶解し残りは懸濁する。 その後、反応系は加熱され昇温される。シリコーンジァミンと OPDAは、徐々に反応 するとともに、昇温にともなって、 y—プチ口ラタトンに溶解する。所定の温度まで昇 温すると、その温度で所定時間反応させる。その後、加熱を止め室温付近まで自然 冷却する。 [0037] In the method of claim 19, first, γ-butyrolatatone in which silicone diamine is a solvent is used. The aromatic tetracarboxylic dianhydride OPDA is then added gradually and then stirred for a predetermined time to initiate the polymerization. Alternatively, the aromatic tetracarboxylic dianhydride may be first added to the solvent γ-butyrolatatone, and then the silicone diamine may be gradually added to initiate the polymerization. At this time, because it is room temperature, a part of the silicone diamine and aromatic tetracarboxylic dianhydride OPDA that is difficult to dissolve dissolves and the rest suspends. Thereafter, the reaction system is heated and heated. Silicone diamine and OPDA react gradually and dissolve in y-petit mouth ratatones as the temperature rises. When the temperature is raised to a predetermined temperature, the reaction is performed at that temperature for a predetermined time. After that, stop heating and let it cool naturally to near room temperature.
[0038] これにより、重量平均分子量が 20000〜50000の範囲であり、かつその分子量分 布が 1山分布で、分散が 2. 0以下である可溶性ポリイミド樹脂(ポリイミドシリコーン)を 容易に得ることカでさる。  [0038] Thereby, it is possible to easily obtain a soluble polyimide resin (polyimide silicone) having a weight average molecular weight in the range of 20000 to 50,000, a molecular weight distribution of one peak distribution, and a dispersion of 2.0 or less. I'll do it.
[0039] 溶媒として γ —プチ口ラタトン単独の代わりに、 γ —プチ口ラタトンに安息香酸メチ ノレ、安息香酸ェチル、メチルェチルケトン (ΜΕΚ)、アセトン等を混合した混合溶媒を 用い、シリコーンジァミン及び OPDAの全量を反応当初より溶解し、均一系で反応を 進行させると、高分子量側にもうひとつの山がある 2山分布の分子量分布となる。そ の結果、現像性が低下し、露光部に残渣が残りやすくなる。  [0039] Instead of γ-petit-mouth rataton alone, a solvent mixture of γ-petit-mouth rataton with methinole benzoate, ethyl benzoate, methyl ethyl ketone (ΜΕΚ), acetone, etc. was used as the solvent. If all of the amine and OPDA are dissolved from the beginning of the reaction and the reaction proceeds in a homogeneous system, the molecular weight distribution becomes a two-peak distribution with another peak on the high molecular weight side. As a result, developability deteriorates and a residue tends to remain in the exposed area.
[0040] 本発明の第 4の態様は、  [0040] The fourth aspect of the present invention is as follows.
可溶性ポリイミド樹脂、ポジ型感光剤及びこれらを溶解する溶媒を含有する感光性 ポリイミド組成物であって、  A photosensitive polyimide composition containing a soluble polyimide resin, a positive photosensitive agent and a solvent for dissolving them,
前記可溶性ポリイミド樹脂が、芳香族テトラカルボン酸 2無水物とジァミンの縮合物 であり、  The soluble polyimide resin is a condensate of aromatic tetracarboxylic dianhydride and diamine,
前記ジァミンが、水酸基を有するジァミンを含有し  The diamine contains a diamine having a hydroxyl group.
前記感光性ポリイミド組成物中に含まれるピリジンの含有量力 0. 05重量%以下 であることを特徴とする感光性ポリイミド組成物(請求項 9)である。  A photosensitive polyimide composition (claim 9), wherein the content power of pyridine contained in the photosensitive polyimide composition is 0.05% by weight or less.
[0041] 第 4の態様の感光性ポリイミド組成物は、芳香族テトラカルボン酸 2無水物とジァミン の縮合物である可溶性ポリイミド樹脂を含有し、前記ジァミンは水酸基を有するジアミ ンを含有する。芳香族テトラカルボン酸 2無水物とジァミンの縮合物の意味及びその 作用等は、第 1の態様の場合と同じである。 [0041] The photosensitive polyimide composition of the fourth embodiment contains a soluble polyimide resin that is a condensate of aromatic tetracarboxylic dianhydride and diamine, and the diamine contains diamine having a hydroxyl group. The meaning of aromatic tetracarboxylic dianhydride and diamine condensate and its The action and the like are the same as in the first embodiment.
[0042] 第 4の態様の感光性ポリイミド組成物は、又、その中に含まれるピリジンの含有量が 、 0. 05重量%以下であることを特徴とする。ピリジンは、芳香族テトラカルボン酸 2無 水物とジァミンの縮合反応の触媒として使用され、その結果、従来の感光性ポリイミド 組成物はピリジンを含有するものであった力 本発明者は、このピリジンを感光性ポリ イミド組成物より除去し、その含有量を感光性ポリイミド組成物の全重量に対し、 0. 0 5重量%以下とすることにより、斑点変色の問題を大きく低減できることを見出した。  [0042] The photosensitive polyimide composition according to the fourth aspect is characterized in that the content of pyridine contained therein is 0.05% by weight or less. Pyridine is used as a catalyst for the condensation reaction of aromatic tetracarboxylic acid dihydrate and diamine. As a result, the conventional photosensitive polyimide composition contains pyridine. It was found that the problem of spot discoloration can be greatly reduced by removing from the photosensitive polyimide composition and making its content 0.05% by weight or less based on the total weight of the photosensitive polyimide composition.
[0043] 第 4の態様の感光性ポリイミド組成物は、  [0043] The photosensitive polyimide composition of the fourth aspect,
芳香族テトラカルボン酸 2無水物とジァミンをピリジンの存在下で縮合して可溶性ポ リイミド樹脂を合成する縮合工程、  A condensation step of condensing aromatic tetracarboxylic dianhydride and diamine in the presence of pyridine to synthesize a soluble polyimide resin;
該縮合工程後、反応系からピリジンを、その含有量が 0. 05重量%以下となるまで 除去するピリジン除去工程、及び  After the condensation step, pyridine removal step for removing pyridine from the reaction system until the content is 0.05% by weight or less, and
前記可溶性ポリイミド樹脂と、ポジ型感光剤及び溶媒を混合する工程、 を有することを特徴とする製造方法 (請求項 17)により製造することができる。  It can be produced by a production method (Claim 17) comprising a step of mixing the soluble polyimide resin, a positive photosensitive agent and a solvent.
[0044] この製造方法は、芳香族テトラカルボン酸 2無水物とジァミンを縮合して、可溶性ポ リイミド樹脂を得る縮合反応工程、並びに、得られた可溶性ポリイミド樹脂とポジ型感 光剤を混合する工程を有する点は、従来の感光性ポリイミド組成物の製造方法と同 様である。しかし、本発明の製造方法では、該縮合工程後、反応系からピリジンを、 その含有量が 0. 05重量%以下となるまで除去するピリジン除去工程を有することを 特徴とする。  [0044] In this production method, a condensation reaction step of condensing an aromatic tetracarboxylic dianhydride and diamine to obtain a soluble polyimide resin, and mixing the obtained soluble polyimide resin and a positive photosensitive agent are performed. The point which has a process is the same as the manufacturing method of the conventional photosensitive polyimide composition. However, the production method of the present invention is characterized by having a pyridine removal step of removing pyridine from the reaction system after the condensation step until the content thereof is 0.05% by weight or less.
[0045] ピリジンを除去する方法は、特に限定されない。例えば、芳香族テトラカルボン酸 2 無水物とジァミンの縮合は通常溶媒を用いて行われ、反応終了後、ピリジン等の除 去や濃度の調整のために溶媒の留去がされる力 S、この溶媒の留去をより長時間行う ことにより、系中のピリジン量を減少させることができ、その条件の調整により含有量を 0. 05重量%以下とすることができる。又、反応終了後、メタノール等、樹脂が不溶で ある溶媒を用いて再沈、精製を行い、再度 γ —プチ口ラタトン等の溶媒に溶解させる 方法によってもピリジンを除去することができる。  [0045] The method for removing pyridine is not particularly limited. For example, the condensation of aromatic tetracarboxylic dianhydride and diamine is usually carried out using a solvent, and after completion of the reaction, the solvent S is removed to remove pyridine and adjust the concentration. By evaporating the solvent for a longer time, the amount of pyridine in the system can be reduced, and the content can be reduced to 0.05% by weight or less by adjusting the conditions. After the reaction is completed, pyridine can also be removed by a method of reprecipitation and purification using a solvent insoluble in the resin such as methanol and again dissolving in a solvent such as γ-petit-mouth rataton.
[0046] 請求項 10に記載の発明は、第 4の態様の感光性ポリイミド組成物の好ましい態様 であって、感光性ポリイミド組成物のベースポリマーである可溶性ポリイミド樹脂の重 量平均分子量が、 20000〜50000であることを特徴とする請求項 9に記載の感光性 ポリイミド組成物である。このような平均分子量を有する可溶性ポリイミド樹脂を、ベー スポリマーとして使用することにより、現像時に現像残りが出にくくなり、かっこの組成 物より得られる絶縁膜パターンの耐熱性、耐溶剤性、機械的強度が優れたものとし、 容易に要求特性を満たす絶縁膜パターンが得られるようになる。より好ましくは、重量 平均分子量が 25000〜45000の範囲である。 [0046] The invention according to claim 10 is a preferred embodiment of the photosensitive polyimide composition of the fourth embodiment. 10. The photosensitive polyimide composition according to claim 9, wherein the weight average molecular weight of the soluble polyimide resin that is a base polymer of the photosensitive polyimide composition is 20000 to 50000. By using a soluble polyimide resin having such an average molecular weight as a base polymer, it is difficult for development residue to occur during development, and the heat resistance, solvent resistance, and mechanical strength of the insulating film pattern obtained from the parenthesis composition are reduced. Therefore, an insulating film pattern that easily satisfies the required characteristics can be obtained. More preferably, the weight average molecular weight is in the range of 25000-45000.
[0047] 第 2の態様、第 4の態様のいずれにおいても、感光性ポリイミド組成物の製造に用 いられる水酸基を有するジァミンの共重合比、即ち、前記縮合に用いられる全ジアミ ン中の水酸基を有するジァミンの割合は、 1〜50モル%の範囲が好ましい(請求項 1 D o水酸基を有するジァミンの共重合比が小さいほど、得られた感光性ポリイミド組 成物を用いて保護膜 (塗膜のパターン)を形成する際の現像性が低くなり、十分な現 像を達成するためには、現像液として濃いアルカリ溶液や有機溶媒が必要となる。一 方、水酸基を有するジァミンの共重合比が大きいほど、該組成物を基板等に塗布し 硬化して形成される塗膜の耐熱性が低下するとともに、塗膜の耐メツキ性が低下し、 保護膜形成後に金メッキ等を施す際に、保護膜の劣化が生じやすくなる。そこで、現 像性、耐メツキ性等の観点からは 1〜50モル%の範囲が好ましい。  [0047] In both the second aspect and the fourth aspect, the copolymerization ratio of the diamine having a hydroxyl group used in the production of the photosensitive polyimide composition, that is, the hydroxyl group in the total diamine used in the condensation. The ratio of diamine having a dimer is preferably in the range of 1 to 50 mol%. (Claim 1 The smaller the copolymerization ratio of diamine having a hydroxyl group, the smaller the copolymerization ratio of the obtained photosensitive polyimide composition is used. In order to achieve a sufficient image, the developing property of the film pattern is low, and a concentrated alkaline solution or an organic solvent is required as a developer, while copolymerization of a diamine having a hydroxyl group. The higher the ratio, the lower the heat resistance of the coating film formed by applying the composition to a substrate or the like and curing it, and the lower the coating resistance of the coating film. Deterioration of the protective film is likely to occur Therefore, the range of 1 to 50 mol% is preferable from the viewpoints of image resistance, matt resistance and the like.
[0048] 請求項 12に記載の発明は、前記水酸基を有するジァミンが、 6FAPであることを特 徴とする請求項 3、又は請求項 9ないし請求項 11のいずれかに記載の感光性ポリイミ ド組成物である。第 2の態様、第 4の態様のいずれにおいても、感光性ポリイミド組成 物の製造に用いられる水酸基を有するジァミンとしては、従来の感光性ポリイミド組成 物に用いられるもの、即ち、前記の例示された化合物等を挙げることもできるが、優れ た現像性を得るためには、 6FAPが好ましい。 6FAPを用いることにより、現像時の膜 劣化、及び膜減りを少なくすることができる  [0048] The invention according to claim 12 is characterized in that the diamine having a hydroxyl group is 6FAP, or the photosensitive polyimide according to any one of claims 9 to 11 It is a composition. In either of the second aspect and the fourth aspect, the diamine having a hydroxyl group used in the production of the photosensitive polyimide composition is the one used in the conventional photosensitive polyimide composition, that is, the above-described examples. Although compounds can be mentioned, 6FAP is preferable in order to obtain excellent developability. By using 6FAP, film deterioration and film loss during development can be reduced.
[0049] 第 4の態様の可溶性ポリイミド樹脂の合成に用いるジァミン成分には、さらにシリコ 一ンジァミンを含有させることができ、水酸基を有するジァミン及びシリコーンジァミン をともに含有するジァミン成分を用いて合成した可溶性ポリイミド樹脂が好ましく使用 される。又、第 1の態様及び第 2の態様の可溶性ポリイミド樹脂の合成に用いるジアミ ン成分は、シリコーンジァミンを含有することを特徴とする。シリコーンジァミンを含有 させることにより、保護膜の難燃性、配線を構成する銅との接着性、柔軟性等を向上 させること力 Sでさる。 [0049] The diamine component used for the synthesis of the soluble polyimide resin of the fourth aspect can further contain a silicone diamine, and is synthesized using the diamine component containing both the diamine having a hydroxyl group and the silicone diamine. The soluble polyimide resin is preferably used. In addition, the diamond used for the synthesis of the soluble polyimide resin of the first and second embodiments. The silicone component contains silicone diamine. By containing silicone diamine, it is possible to improve the flame retardance of the protective film, the adhesion to copper constituting the wiring, the flexibility, etc. with the force S.
[0050] ここで、シリコーンジァミンとは、骨格にシロキサン基を有し、その末端等に一級アミ ノ基を 2つ有する化合物であり、例えば、下記構造式 (III)で表されるものが広く採用 されている。  [0050] Here, the silicone diamine is a compound having a siloxane group in the skeleton and two primary amino groups at its ends and the like, for example, represented by the following structural formula (III) Is widely adopted.
[0051] [化 3]  [0051] [Chemical 3]
H2N—
Figure imgf000015_0001
式中、 aは 1〜; 10000程度の数を表す。上記の他に、下記構造式で表されるものも 例示される。
H 2 N—
Figure imgf000015_0001
In the formula, a represents a number of 1 to about 10,000. In addition to the above, those represented by the following structural formulas are also exemplified.
[0052] [化 4] [0052] [Chemical 4]
(CH2)3— NH2
Figure imgf000016_0001
(CH 2 ) 3 — NH 2
Figure imgf000016_0001
Figure imgf000016_0002
式中、 a + b (式力 ¾を含まない場合は a)は 1〜; 10000程度の数を表す。
Figure imgf000016_0002
In the formula, a + b (a if not including formula force ¾) is a number from 1 to about 10,000.
[0053] シリコーンジァミンとして、具体的には、東レ.ダウコーユング.シリコーン製の BY16 — 853U、 BY16 - 853C,信越化学工業製 X— 22— 1660B— 3、 KF— 8010、 X — 22— 161A、 X— 22— 161B等を挙げることができる。 [0053] Specific examples of silicone diamines include: Toray Dow Cowing. Silicone BY16 — 853U, BY16-853C, Shin-Etsu Chemical X—22—1660B—3, KF—8010, X—22—161A X-22-161B and the like.
[0054] 請求項 13に記載の発明は、第 1の態様、第 2の態様及び第 4の態様の感光性ポリ イミド組成物の好ましい態様であって、前記ジァミン力 シリコーンジァミンを全ジアミ ンに対して 5〜60モル%含有することを特徴とする請求項 1ないし請求項 3のいずれ 力、、又は請求項 9ないし請求項 12のいずれかに記載の感光性ポリイミド組成物であ [0054] The invention according to claim 13 is a preferred embodiment of the photosensitive polyimide composition of the first, second and fourth aspects, wherein the diaminergic silicone diamine is all diamine. The photosensitive polyimide composition according to any one of claims 1 to 3, or the photosensitive polyimide composition according to any one of claims 9 to 12, wherein the photosensitive polyimide composition is contained in an amount of 5 to 60 mol% based on
[0055] 第 1の態様、第 2の態様及び第 4の態様のいずれにおいても、シリコーンジァミンの 含有量は、全ジァミンに対して 5〜60モル%であることが好ましい。特に、シリコーン ジァミンの分子量が 500〜; 1000程度である場合は、全ジァミンに対して 10〜60モ ル%であることが好まし!/、。 60モル%を越える場合は膜のガラス転移温度が低下し て耐熱性が低下し、一方、 5モル%未満の場合はこの膜の反りが増大する傾向があ る。より好ましくは、 30〜50モル%の範囲である。ただし、耐熱性や膜の反りは、他の ジァミンの構造や含有量にも影響される。 [0055] In any of the first aspect, the second aspect, and the fourth aspect, the content of the silicone diamine is preferably 5 to 60 mol% with respect to the total diamine. In particular, when the molecular weight of silicone diamine is about 500 to about 1000, it is preferably 10 to 60 mol% with respect to the total diamine! /. If it exceeds 60 mol%, the glass transition temperature of the film decreases and heat resistance decreases, whereas if it exceeds 5 mol%, the warpage of the film tends to increase. The More preferably, it is the range of 30-50 mol%. However, heat resistance and film warpage are also affected by the structure and content of other diamines.
[0056] 即ち、第 1の態様、第 2の態様及び第 4の態様のいずれにおいても、感光性ポリイミ ド組成物としては、前記ジァミン力 シリコーンジァミンを全ジァミンに対して 5〜60モ ル%含有し、かつ水酸基を有するジァミンを全ジァミンに対して 1〜50モル%含有す るものが好ましい。 That is, in any of the first aspect, the second aspect, and the fourth aspect, as the photosensitive polyimide composition, the above-mentioned diamine power silicone diamine is used in an amount of 5 to 60 And containing 1 to 50 mol% of diamine having a hydroxyl group based on the total diamine.
[0057] 請求項 14に記載の発明は、第 1の態様、第 2の態様及び第 4の態様の感光性ポリ イミド組成物の好ましい態様であって、前記シリコーンジァミンの重量平均分子量が、 1000以下であることを特徴とする請求項 13に記載の感光性ポリイミド組成物である。 シリコーンジァミンの重量平均分子量が 1000を越えると、銅箔等との接着力が低下 する傾向にあるので、 1000以下であることが好ましい。このとき、構造式(III)の aは、 8〜 9程度以下である。  [0057] The invention of claim 14 is a preferred embodiment of the photosensitive polyimide composition of the first, second and fourth embodiments, wherein the silicone diamine has a weight average molecular weight. 14. The photosensitive polyimide composition according to claim 13, wherein the photosensitive polyimide composition is 1000 or less. If the weight average molecular weight of the silicone diamine exceeds 1000, the adhesive strength with copper foil or the like tends to decrease, so it is preferably 1000 or less. At this time, a in the structural formula (III) is about 8 to 9 or less.
[0058] 第 1の態様、第 2の態様及び第 4の態様の!/、ずれにお!/、ても、感光性ポリイミド組成 物の製造に用いることができるジァミンには、前記の水酸基を有するジァミン及びシリ コーンジァミン以外にも、本発明の趣旨に反しない範囲で他のジァミンを含むことが できる。  [0058] In the first aspect, the second aspect, and the fourth aspect,! /, In the deviation! /, The diamine that can be used in the production of the photosensitive polyimide composition has the above-mentioned hydroxyl group. In addition to the diammine and silicon diamine which are included, other diamines can be included within the scope not departing from the gist of the present invention.
[0059] この他のジァミンとしては、例えば、ビス(3 ァミノプロピル)エーテルエタン、 3, 3, ージアミノー 4, 4'ジヒドロキシジフエニルスルホン、 4, 4'ジァミノー 3, 3'ジヒドロキシ ビフエニル、 2, 2 ビス〔4— (4 アミノフエノキシ)フエ二ノレ〕へキサフルォロプロパン 、シロキサンジァミン、ビス(3—ァミノプロピノレ)エーテルエタン、 N, N ビス(3—アミ ノプロピル)エーテル、 1 , 4 ビス(3—ァミノプロピル)ピぺラジン、イソホロンジァミン 、 1 , 3' ビス(アミノメチル)シクロへキサン、 3, 3' ジメチルー 4, 4'ージアミノジシ クロへキシルメタン、 4, 4'ーメチレンビス(シクロへキシルァミン)、 4, 4'ージアミノジ フエニルエーテル、 3, 4'—ジアミノジフエニルエーテル、 3, 3'ージアミノジフエ二ノレ エーテル、 4, 4'ージアミノージフエニルスルホン、 3, 4'—ジアミノージフエニルスノレ ホン、 3, 3'ージアミノージフエニルスルホン、 2, 4'—ジアミノジフエニルエーテル、 1 , 3—ビス(4—アミノフエノキシ)ベンゼン、 1 , 3—ビス(3—アミノフエノキシ)ベンゼン 、 2, 2 ビス〔4一(4一アミノフエノキシ)フエ二ノレ〕プロパン、 2, 2 ビス〔4一(4一アミ ノフエノキシ)フエ二ノレ〕へキサフルォロプロパン、ビス〔4— (4—アミノフエノキシ)フエ 二ノレ〕スルホン、ビス〔4一(3—アミノフエノキシ)フエ二ノレ〕スルホン、 4, 4'ビス(4ーァ ミノフエノキシ)ビフエニル、 1 , 4—ビス(4—アミノフエノキシ)ベンゼン、 4, 4'—ジアミ ノジフエニルスルフイド、 3, 4'—ジアミノジフエニルスルフイド、 3, 3'ージアミノジフエ ニルスルフイド、 3, 3'ジァミノー 4, 4'ジヒドロキシジフエニルスルホン、 2, 4 ジアミ ノトルエン、 2, 5 ジァミノトルエン, 3, 5 ジァミノ安息香酸、 2, 6 ジァミノピリジン 、 4, 4'ジァミノー 3, 3'ジメトキシビフエニル、 4, 4,ジァミノー 3, 3'ジメチノレビフエ二 ル、 9, 9,一ビス(4ーァミノフエニル)フルオレン等が挙げられる。 [0059] Other diamines include, for example, bis (3aminopropyl) ether ethane, 3,3, -diamino-4,4'dihydroxydiphenylsulfone, 4,4'diamino3,3'dihydroxybiphenyl, 2,2bis. [4- (4 aminophenoxy) fenenole] hexafluoropropane, siloxane diamine, bis (3-aminopropinole) ether ethane, N, N bis (3-aminopropyl) ether, 1, 4 bis (3 —Aminopropyl) piperazine, isophorone diamine, 1,3 ′ bis (aminomethyl) cyclohexane, 3,3 ′ dimethyl-4,4′-diaminodicyclohexylmethane, 4,4′-methylene bis (cyclohexylamine), 4,4'-diaminodiphenyl ether, 3,4'-diaminodiphenyl ether, 3,3'-diaminodiphenyl ether, 4,4'-diamino -Diphenyl sulfone, 3,4'-diamino-diphenyl sulphone, 3,3'-diamino-diphenyl sulfone, 2,4'-diaminodiphenyl ether, 1,3-bis (4-aminophenoxy) benzene, 1,3-bis (3-aminophenoxy) benzene, 2,2 bis [4 (4-aminophenoxy) phenol] propane, 2,2 bis [4-1 (4-1 Nophenoxy) fenenole] hexafluoropropane, bis [4- (4-aminophenoxy) phenol binole] sulfone, bis [4 (3-aminophenoxy) phenenole] sulfone, 4, 4′bis (4 -Aminophenoxy) biphenyl, 1,4-bis (4-aminophenoxy) benzene, 4,4'-diaminodiphenylsulfide, 3,4'-diaminodiphenylsulfide, 3,3'-diaminodiphenylsulfide, 3 , 3 'diamine, 4, 4' dihydroxydiphenyl sulfone, 2,4 diaminotoluene, 2,5 diaminotoluene, 3,5 diamineaminobenzoic acid, 2,6 diamineaminopyridine, 4, 4 'diamine, 3, 3' dimethoxybiphenyl, 4 , 4, diamine, 3, 3 'dimethylenobiphenyl, 9, 9, and bis (4-aminophenyl) fluorene.
[0060] 中でも、下記構造式(IV)で表される 1 , 3—ビス(3—アミノフエノキシ)ベンゼン(以 下、「1 , 3— APB」と言う。)が、透明性及び柔軟性の観点より、好ましく使用される。  [0060] Among them, 1,3-bis (3-aminophenoxy) benzene (hereinafter referred to as “1,3-APB”) represented by the following structural formula (IV) is a viewpoint of transparency and flexibility. More preferably used.
[0061] [化 5]  [0061] [Chemical 5]
Figure imgf000018_0001
Figure imgf000018_0001
[0062] また、ビス〔4— (3 アミノフエノキシ)フエニル〕スルホン(以下、「: BAPSM」と言う。 ) や、 1 , 4—ビス(3—アミノフエノキシ)ベンゼン(以下、「1 , 4 APB」と言う。)の使用 も好ましい。さらに、 1 , 3— APBや下記構造式で表されるジァミン等も使用することが できる。 [0062] In addition, bis [4- (3aminophenoxy) phenyl] sulfone (hereinafter referred to as “: BAPSM”) and 1,4-bis (3-aminophenoxy) benzene (hereinafter referred to as “1, 4 APB”). The use of) is also preferred. In addition, 1,3-APB and diammine represented by the following structural formula can also be used.
[0063] [化 6]  [0063] [Chemical 6]
Figure imgf000018_0002
請求項 15に記載の発明は、第 1の態様、第 2の態様及び第 4の態様の感光性ポリ イミド組成物の好ましい態様であって、前記芳香族テトラカルボン酸 2無水物が、 4, 4 ォキシジフタル酸 2無水物を含有することを特徴とする請求項 1ないし請求項 3の V、ずれか、又は請求項 9な!/、し請求項 14の!/、ずれかに記載の感光性ポリイミド組成 物である。
Figure imgf000018_0002
The invention according to claim 15 is a preferred embodiment of the photosensitive polyimide composition according to the first, second and fourth embodiments, wherein the aromatic tetracarboxylic dianhydride is 4, Four The photosensitive polyimide according to claim 1, characterized in that it contains oxydiphthalic acid dianhydride, V, deviation, or claim 9! It is a composition.
[0065] 第 1の態様、第 2の態様及び第 4の態様の!/、ずれにお!/、ても、可溶性ポリイミド化合 物を構成する芳香族テトラカルボン酸 2無水物としては、 3, 3' , 4, 4' ビフヱニルテ トラカルボン酸 2無水物、 3, 3' , 4, 4'—べンゾフエノンテトラカルボン酸 2無水物、 4 , 4'ーォキシジフタル酸 2無水物、 3, 3' , 4, 4'—ジフエニルスルホンテトラカルボン 酸 2無水物、ビシクロ(2, 2, 2)—オタトー 7 ェン 2, 3, 5, 6 テトラカルボン酸 2 無水物、 1 , 2, 4, 5 シクロへキサンテトラカルボン酸 2無水物、ピロメリット酸 2無水 物、 2, 2 ビス(3, 4 ジカルボンキシフエニル)へキサフルォロプロパン 2無水物、 5 一(2, 5 ジォキソテトラヒドロフリル)ー3 メチルー 3 シクロへキセン一 1 , 2 ジカ ルボン酸 2無水物等が例示される。  [0065] In the first aspect, the second aspect, and the fourth aspect,! /, In fact, the aromatic tetracarboxylic dianhydride constituting the soluble polyimide compound is 3, 3 ', 4, 4' biphenyltetracarboxylic dianhydride, 3, 3 ', 4, 4'-benzophenone tetracarboxylic dianhydride, 4, 4'-oxydiphthalic dianhydride, 3, 3' , 4, 4'-diphenylsulfone tetracarboxylic dianhydride, bicyclo (2, 2, 2) -otato 7-ene 2, 3, 5, 6 tetracarboxylic dianhydride, 1, 2, 4, 5 Cyclohexanetetracarboxylic dianhydride, pyromellitic dianhydride, 2,2 bis (3,4 dicarboxylicoxyphenyl) hexafluoropropane dianhydride, 5 (2,5 dixotetrahydro) Furyl) -3 methyl-3 cyclohexene mono 1,2 dicarboxylic acid dianhydride and the like.
[0066] 中でも、下記構造式 (V)で表される OPDA力 透明性及び柔軟性の観点より好ま しぐ従って OPDAを含有する芳香族テトラカルボン酸 2無水物が好ましく用いられる  [0066] Among them, OPDA force represented by the following structural formula (V) is preferable from the viewpoint of transparency and flexibility, and therefore, an aromatic tetracarboxylic dianhydride containing OPDA is preferably used.
[0067] [化 7] [0067] [Chemical 7]
Figure imgf000019_0001
Figure imgf000019_0001
[0068] なお本発明の感光性ポリイミド組成物に用いられる可溶性ポリイミド樹脂は、合成の 段階ですでにイミド化している場合が多い。従って、イミド環形成のための加熱は不 要であり、パターン形成後に必要により熱処理工程が行われることがある力 これは、 ノ ターン中に含まれている残留溶媒を蒸発させる等のために行われるものであり、ィ ミド環形成のために必要な高温での加熱は不要である。 [0068] In many cases, the soluble polyimide resin used in the photosensitive polyimide composition of the present invention has already been imidized at the stage of synthesis. Therefore, heating for forming an imide ring is unnecessary, and a heat treatment step may be performed if necessary after pattern formation. This is done to evaporate residual solvent contained in the pattern. Therefore, heating at a high temperature necessary to form an imide ring is not necessary.
[0069] 本発明の感光性ポリイミド組成物は、前記の可溶性ポリイミド樹脂とともにポジ型感 光剤、並びに可溶性ポリイミド樹脂及びポジ型感光剤を溶解する溶媒を含有する。ポ ジ型感光剤としては、ナフトキノンジアジド化合物が例示され、特に、芳香族ポリヒドロ キシ化合物のナフトキノンジアジドスルホニルエステルが好ましく例示される(請求項[0069] The photosensitive polyimide composition of the present invention contains a positive-type photosensitive agent and a solvent that dissolves the soluble polyimide resin and the positive-type photosensitive agent together with the soluble polyimide resin. Po Examples of di-type photosensitizers include naphthoquinone diazide compounds, and particularly preferred are naphthoquinone diazide sulfonyl esters of aromatic polyhydroxy compounds.
16)。 16).
[0070] 芳香族ポリヒドロキシ化合物としては、 2, 3, 4—トリヒドロキシベンゾフエノン、 2, 3, 4, 一トリヒドロキシベンゾフエノン、 2, 4、 6 トリヒドロキシベンゾフエノン、 2, 3, 4, 4, —テトラヒドロキシベンゾフエノン、ノポラック樹脂等が挙げられる。芳香族ポリヒドロキ シ化合物とエステルを形成するナフトキノンジアジドスルホニル化合物としては、 1 , 2 —ナフトキノン一 2 ジアジド一 5 スルホン酸、 1 , 2 ナフトキノン一 2 ジアジド一 4ースルホン酸、 6—ジァゾージヒドロ 5—ォキソ 1 ナフタレンスルホン酸等が挙 げられる。具体的な商品名としては、東洋合成工業社製の PC— 5、 NT— 200、 4N T— 300やダイトーケミックス社製の DTEP— 300、 DTEP— 350等を挙げることがで きる。  [0070] Examples of aromatic polyhydroxy compounds include 2, 3, 4-trihydroxybenzophenone, 2, 3, 4, monotrihydroxybenzophenone, 2, 4, 6 trihydroxybenzophenone, 2, 3 , 4, 4, —tetrahydroxybenzophenone, nopolac resin and the like. The naphthoquinone diazide sulfonyl compounds that form esters with aromatic polyhydroxy compounds include 1,2-naphthoquinone-1,2 diazide-1,5 sulfonic acid, 1,2 naphthoquinone-1,2 diazido-1,4-sulfonic acid, 6-diazodihydro 5-oxo1 naphthalene Examples include sulfonic acid. Specific product names include PC-5, NT-200, 4N T-300 manufactured by Toyo Gosei Co., Ltd., DTEP-300, DTEP-350 manufactured by Daito Chemix.
[0071] ポジ型感光剤は、塗布膜の膜厚や感光剤の種類等に応じて配合量を調整する必 要であるが、可溶性ポリイミド樹脂 100重量部に対して、 5〜30重量部配合すること が好ましい。 5重量部未満であると、十分な感度が得られず残渣が生じる場合があり 、 30重量部を超えると、この組成物の硬化により形成される樹脂皮膜の耐熱性ゃ耐 溶剤性が低下する場合がある。 10〜20重量部であるとより好ましい。  [0071] The amount of the positive photosensitive agent needs to be adjusted depending on the film thickness of the coating film, the type of the photosensitive agent, etc., but it is 5 to 30 parts by weight based on 100 parts by weight of the soluble polyimide resin. It is preferable to do this. If the amount is less than 5 parts by weight, sufficient sensitivity may not be obtained and a residue may be generated. If the amount exceeds 30 parts by weight, the heat resistance and solvent resistance of the resin film formed by curing of the composition will decrease. There is a case. 10 to 20 parts by weight is more preferable.
[0072] 本発明の感光性ポリイミド組成物は、このようにして製造された可溶性ポリイミド樹脂 とポジ型感光剤を混合することにより得られる。この混合の工程も従来の感光性ポリイ ミド組成物の場合と同様に行うことができ、例えば前記可溶性ポリイミド樹脂及びポジ 型感光剤を溶媒に溶解することにより行われる。  [0072] The photosensitive polyimide composition of the present invention can be obtained by mixing the soluble polyimide resin thus produced and a positive photosensitive agent. This mixing step can be performed in the same manner as in the case of a conventional photosensitive polyimide composition, for example, by dissolving the soluble polyimide resin and the positive photosensitive agent in a solvent.
[0073] 可溶性ポリイミド樹脂及びポジ型感光剤を溶解する溶媒としては、  [0073] As a solvent for dissolving the soluble polyimide resin and the positive photosensitive agent,
非プロトン性極性溶媒が好ましぐ N メチル—2—ピロリドン、 N, N'—ジメチルァセ トアミド、ジメチルホルムアミド、ジメチルスルホキシド、ァセトニトリル、ジグライム、 Ί ブチロラタトン、 Ύ—バレロラタトン、フエノール、トルエン、ジォキサン、テトラヒドロフラ ン、スルホラン、へキサメチルホスホルアミド等が例示される。この中で高揮発性や臭 気等の観点より、 7 プチ口ラタトンが好ましく使用される。使用量は、可溶性ポリイミ ド樹脂の 1〜20倍 (重量比)とすることが好ましい。溶媒として、可溶性ポリイミド樹脂 の合成に用いる溶媒と同じものを用いると、感光性ポリイミド組成物の製造の際に溶 媒の置換操作が不要となるので好ましい。従って、請求項 19に記載の方法により可 溶性ポリイミド樹脂が合成される場合等、 Ί—プチ口ラ外ンが合成に用いられる場合 は、感光性ポリイミド組成物の溶媒としても γ—プチ口ラタトンが好ましい。 N-methyl-2-pyrrolidone, N, N'-dimethylacetamide, dimethylformamide, dimethyl sulfoxide, acetonitrile, diglyme, Ίbutyrolataton , Ύ- valerolataton, phenol , toluene, dioxane, tetrahydrofuran, Examples include sulfolane and hexamethylphosphoramide. Among these, 7 petit-mouth rataton is preferably used from the viewpoint of high volatility and odor. The amount used is preferably 1 to 20 times (weight ratio) of the soluble polyimide resin. Soluble polyimide resin as solvent It is preferable to use the same solvent as that used for the synthesis because the solvent replacement operation is not necessary in the production of the photosensitive polyimide composition. Therefore, like the case where the soluble polyimide resin is synthesized by the method of claim 19, Ί - if petit port la out emissions is used in the synthesis, also γ- Petit port as a solvent of a photosensitive polyimide composition Rataton Is preferred.
[0074] 前記のようにして得られた本発明の感光性ポリイミド組成物は、 FPCの保護膜の形 成等に用いることができる。本発明は、さらに、 FPCの配線を被覆する保護膜であつ て、請求項 1ないし請求項 3のいずれか、又は請求項 9ないし請求項 16のいずれか に記載の感光性ポリイミド組成物の硬化物よりなることを特徴とする保護膜 (請求項 2 0)を提供する。 [0074] The photosensitive polyimide composition of the present invention obtained as described above can be used for forming a protective film of FPC. The present invention further provides a protective film for covering the wiring of the FPC, the curing of the photosensitive polyimide composition according to any one of claims 1 to 3 or claim 9 to claim 16. There is provided a protective film (claim 20) characterized by comprising a material.
[0075] この保護膜は、 FPCの外表面に設けられ、配線や素子部等を保護するためにこれ らを被覆するものである。一方、接続部やパッド部等を露出させる必要があるので、 先ず、 FPCの表面全体に感光性ポリイミド組成物を塗布し、必要により加熱 (プリべ ーク)して溶媒を除去して塗膜を形成した後、マスク等を通して所定部分のみ紫外線 等の活性光線を照射する露光工程、アルカリ現像液により現像する現像工程を経て パターンを形成 (パターユング)して、露出するべき部分にある塗膜を除去する方法 により形成される。  [0075] This protective film is provided on the outer surface of the FPC and covers them in order to protect the wiring, the element portion, and the like. On the other hand, since it is necessary to expose the connection part, the pad part, etc., first, the photosensitive polyimide composition is applied to the entire surface of the FPC, and if necessary, the solvent is removed by heating (prebaking) to remove the solvent. After the film is formed, a pattern is formed (patterned) through an exposure process in which only a predetermined portion is irradiated with an actinic ray such as ultraviolet rays through a mask or the like, and a development process in which development is performed with an alkaline developer. It is formed by the method of removing.
[0076] アルカリ現像液としては、水酸化ナトリウム、水酸化カリウム、水酸化アンモニゥム、 炭酸ナトリウム、炭酸カリウム、炭酸アンモニゥム、炭酸水素ナトリウム、炭酸水素カリ ゥム、炭酸水素アンモニゥム、テトラメチルアンモニゥムヒドロキシド(ΤΜΑΗ)等を水 もしくはアルコール等に溶解した塩基性の溶液、又はこの溶液にさらにァミン化合物 を加えて塩基性を増大したもの等が用いられる。  [0076] Examples of the alkali developer include sodium hydroxide, potassium hydroxide, ammonium hydroxide, sodium carbonate, potassium carbonate, ammonium carbonate, sodium hydrogen carbonate, potassium hydrogen carbonate, ammonium hydrogen carbonate, tetramethyl ammonium hydroxy. A basic solution in which a salt (ΤΜΑΗ) or the like is dissolved in water or alcohol, or a solution in which a basic compound is increased by further adding an amine compound to this solution is used.
[0077] 現像が室温で行われる場合、現像時間は 4〜30分程度が適当である。 4分未満で は、良好な現像結果が得られにくい。一方、 30分を超えると、パターンのはがれ等が 生じやすくなる。なお、現像時間を 30分以内とすることにより、斑点変色の発生をより 低減することができる力 第 4の態様の感光性ポリイミド組成物を用いた場合は、現像 時間が 30分を超えても、斑点変色の発生を実用レベルまで低減することができる。  [0077] When the development is performed at room temperature, the development time is suitably about 4 to 30 minutes. In less than 4 minutes, it is difficult to obtain good development results. On the other hand, if it exceeds 30 minutes, pattern peeling or the like tends to occur. In addition, the power that can further reduce the occurrence of spot discoloration by setting the development time within 30 minutes When the photosensitive polyimide composition of the fourth aspect is used, even if the development time exceeds 30 minutes. The occurrence of spot discoloration can be reduced to a practical level.
[0078] 本発明は、さらに又、前記請求項 20に記載の保護膜を有することを特徴とする FP C (請求項 21)を提供する。 [0079] 本発明の第 3の態様は、 The present invention further provides FPC (Claim 21) having the protective film according to Claim 20. [0079] The third aspect of the present invention provides:
溶媒可溶耐熱性樹脂、ポジ型感光剤、熱硬化剤及び溶媒を含有するポジ型感光 性樹脂組成物であって、  A positive photosensitive resin composition comprising a solvent-soluble heat-resistant resin, a positive photosensitive agent, a thermosetting agent, and a solvent,
前記熱硬化剤が、メラミン系硬化剤であり、  The thermosetting agent is a melamine-based curing agent,
前記溶媒可溶耐熱性樹脂が、水酸基を有するジァミンをその構成単位に含有するポ リイミド樹脂又はポリアミドイミド樹脂であることを特徴とするポジ型感光性樹脂組成物 である(請求項 4)。  The solvent-soluble heat-resistant resin is a positive photosensitive resin composition characterized in that it is a polyimide resin or a polyamide-imide resin containing diamine having a hydroxyl group as a structural unit (claim 4).
[0080] 第 3の態様のポジ型感光性樹脂組成物は、加熱により架橋反応を引き起こして樹 脂を硬化させる熱硬化剤を含むので、これを使用した場合、露光、現像によりパター ユングをした後に熱硬化を行うことができる。その結果、熱変形に強い保護膜とするこ とができ、保護膜形成後に行われる補強板のプレス時 (例えば 180°C X 30分程度の 条件で接着がされる。)におけるシヮの発生や、ハンダリフロー時や手ハンダによる修 正時における保護膜の損傷を抑制することができる。  [0080] The positive-type photosensitive resin composition of the third aspect includes a thermosetting agent that causes a crosslinking reaction by heating to cure the resin. When this is used, patterning is performed by exposure and development. Heat curing can be performed later. As a result, a protective film that is resistant to thermal deformation can be obtained, and when a reinforcing plate is pressed after the protective film is formed (for example, adhesion is performed under conditions of about 180 ° C × 30 minutes), In addition, it is possible to suppress damage to the protective film during solder reflow or during manual solder correction.
[0081] 第 3の態様のポジ型感光性樹脂組成物は、この熱硬化剤としてメラミン系硬化剤を 用いることを特徴とする。熱硬化剤としては、他にもエポキシ系硬化剤、イソシアナ一 ト系硬化剤等が考えられる力 エポキシ系硬化剤を用いた場合は、ポジ型感光性樹 脂組成物の寿命を短くする、現像時のアルカリによる劣化が考えられる等の問題があ る。又、イソシアナート系硬化剤を用いた場合も、保存安定性が悪い等の問題がある 。一方、メラミン系硬化剤を使用した場合は、ポジ型感光性樹脂組成物の保存安定 性に優れる等の特徴があり好まし!/、。  [0081] The positive photosensitive resin composition of the third aspect is characterized by using a melamine curing agent as the thermosetting agent. Other possible thermo-curing agents include epoxy-based curing agents and isocyanate-based curing agents. When epoxy-based curing agents are used, development that shortens the life of the positive photosensitive resin composition. There are problems such as possible deterioration due to alkali at the time. Also, when an isocyanate curing agent is used, there are problems such as poor storage stability. On the other hand, when a melamine curing agent is used, it is preferable because it has characteristics such as excellent storage stability of the positive photosensitive resin composition!
[0082] 請求項 6に記載の発明は、第 3の態様のポジ型感光性樹脂組成物であって、前記 メラミン系硬化剤力 下記構造式 (I)で表されるメチロールメラミン系化合物であること を特徴とする。  [0082] The invention according to claim 6 is the positive photosensitive resin composition according to the third aspect, wherein the melamine-based curing agent power is a methylolmelamine-based compound represented by the following structural formula (I). It is characterized by this.
[0083] [化 8]
Figure imgf000023_0001
[0083] [Chemical 8]
Figure imgf000023_0001
N丫 N  N 丫 N
W  W
[0084] [式中、 Wは— NY Yを表し、 Y及び Yは、それぞれ独立して、水素、—CH—ΟΖ [Wherein, W represents —NY Y, Y and Y are each independently hydrogen, —CH—ΟΖ.
5 6 5 6 2 又はフエ二ル基を表し、 Υ 〜Υは、それぞれ独立して、水素又は— CH ΟΖを表し、  5 6 5 6 2 or a phenyl group, and Υ to 独立 each independently represent hydrogen or —CH 、,
1 4 2  1 4 2
Ζは、水素又は炭素数;!〜 6のアルキル基を表す。 )  Ζ represents hydrogen or an alkyl group having 6 to 6 carbon atoms. )
[0085] 前記式で表されるメチロールメラミン系化合物は、エポキシ系硬化剤やイソシアナ ート系硬化剤と比較して、特に、保存安定性に優れるとともに、優れた現像性、耐メッ キ性を与えるので好ましい。前記式で表されるメチローノレメラミン系化合物としては、 へキサメチロールメラミン、アルキル化へキサメチロールメラミン、部分メチロール化メ ラミン及びそのアルキル化体、テトラメチロールべンゾグアナミン、アルキル化テトラメ チロールべンゾグアナミン、部分メチロール化べンゾグアナミン及びそのアルキル化 体等を挙げること力 Sできる。 [0085] The methylol melamine-based compound represented by the above formula is particularly excellent in storage stability, excellent developability, and resistance to mesh as compared with an epoxy-based curing agent and an isocyanate-based curing agent. This is preferable. Examples of the methylone melamine compound represented by the above formula include hexamethylol melamine, alkylated hexamethylol melamine, partially methylolated melamine and its alkylated product, tetramethylol benzoguanamine, alkylated tetramethylol benzoguanamine, It is possible to list partially methylolated benzoguanamine and its alkylated compounds.
[0086] これらの化合物は単独で用いてもよぐまた 2種以上を組合せて用いてもよい。さら に、本発明の趣旨を損ねない範囲で、エポキシ系硬化剤やイソシアナート系硬化剤 等の他の熱硬化剤を併用しても良い。  [0086] These compounds may be used alone or in combination of two or more. Furthermore, other thermosetting agents such as an epoxy-based curing agent and an isocyanate-based curing agent may be used in combination as long as the gist of the present invention is not impaired.
[0087] 本発明のポジ型感光性樹脂組成物を構成する溶媒可溶耐熱性樹脂とは、有機溶 媒ゃ現像液として用いられるアルカリ水溶液に可溶であって、かつ優れた耐熱性を 有する樹脂であり、具体的には、水酸基を有するジァミンをその構成単位に含有する 可溶性ポリイミド樹脂又は可溶性ポリアミドイミド樹脂である。  [0087] The solvent-soluble heat-resistant resin constituting the positive photosensitive resin composition of the present invention is soluble in an alkaline aqueous solution used as an organic solvent developer and has excellent heat resistance. Specifically, it is a soluble polyimide resin or a soluble polyamideimide resin containing diamine having a hydroxyl group in its constituent unit.
[0088] 前記可溶性ポリイミド樹脂は、第 1、第 2及び第 4の態様の場合と同様に、芳香族テ トラカルボン酸 2無水物と、水酸基を有するジァミンを含有するジァミンを、略 1 : 1の 等モル量で縮合させて得ることができる。可溶性ポリアミドイミド樹脂は、芳香族テトラ カルボン酸 2無水物に加えて芳香族トリカルボン酸無水物と、水酸基を有するジアミ ンを含有するジァミンを、酸無水物:ジァミン =略 1: 1の等モル量で縮合させて得るこ とができ、分子内にイミド結合とアミド結合を有する樹脂である。 [0088] As in the case of the first, second and fourth embodiments, the soluble polyimide resin comprises an aromatic tetracarboxylic dianhydride and a diamine containing a diamine having a hydroxyl group. It can be obtained by condensation in equimolar amounts. Soluble polyamideimide resin consists of aromatic tetracarboxylic dianhydride plus aromatic tricarboxylic anhydride and diamine containing hydroxyl-containing diamine, acid anhydride: diamin = approximately 1: 1 equimolar amount Obtained by condensation with It is a resin having an imide bond and an amide bond in the molecule.
[0089] 可溶性ポリアミドイミドの原料の酸無水物としては、通常、後述のような芳香族トリ力 ルボン酸無水物に、芳香族テトラカルボン酸 2無水物を加えたものが用いられる。請 求項 5の発明は、第 3の態様のポジ型感光性樹脂組成物であって、ポリイミド樹脂又 はポリアミドイミド樹脂力 S、芳香族テトラカルボン酸 2無水物、又は芳香族トリカルボン 酸無水物に芳香族テトラカルボン酸 2無水物を加えてなる酸無水物と、ジァミンの縮 合物であることを特徴とするポジ型感光性樹脂組成物を提供するものである。 [0089] As the acid anhydride as a raw material of the soluble polyamideimide, generally used is an aromatic tricarboxylic rubonic acid anhydride as described below, with an aromatic tetracarboxylic dianhydride added. The invention of claim 5 is the positive photosensitive resin composition according to the third aspect, wherein the polyimide resin or polyamideimide resin strength S, the aromatic tetracarboxylic dianhydride, or the aromatic tricarboxylic anhydride. The present invention provides a positive photosensitive resin composition characterized by being a condensed product of an acid anhydride obtained by adding aromatic tetracarboxylic dianhydride to diamine and diamine.
[0090] ここで水酸基を有するジァミンとしては、第 1、第 2及び第 4の態様の場合と同様に、 下記構造式で表される化合物を例示することができる(請求項 7)。 [0090] Examples of the diamine having a hydroxyl group include compounds represented by the following structural formulas as in the first, second and fourth embodiments (claim 7).
[0091] [化 9Ί [0091] [Chemical 9
Figure imgf000024_0001
Figure imgf000024_0001
[0092] 中でも、 6FAPを用いることにより、現像時の膜劣化をより小さくすることができるの で、好ましい。 [0092] Among these, the use of 6FAP is preferable because film deterioration during development can be further reduced.
[0093] 水酸基を有するジァミンの共重合比、即ち、前記縮合に用いられる全ジァミン中の 水酸基を有するジァミンの割合も、第 1、第 2及び第 4の態様の場合と同様に、;!〜 50 モノレ%の範囲が好ましく、その理由も同様である。 [0094] 第 1、第 2及び第 4の態様の場合と同様に、第 3の態様において、可溶性ポリイミド 樹脂又は可溶性ポリアミドイミド樹脂を構成するジァミンには、シリコーンジァミンが含 まれていてもよぐ同様なこのシリコーンジァミンとしては、前記で例示されたシリコー ンジァミンを挙げることができ、その配合による効果も同様である。さらに、ジァミンに は、水酸基を有するジァミン及びシリコーンジァミンの他に、本発明の趣旨を損なわ ない範囲で他のジァミンを含むことができ、この他のジァミンとしても、第 1、第 2及び 第 4の態様の場合で例示されたジァミンを同様に用いることができる。 [0093] The copolymerization ratio of the diamine having a hydroxyl group, that is, the ratio of the diamine having a hydroxyl group in the total diamine used for the condensation is also the same as in the first, second and fourth embodiments; A range of 50 mono% is preferable, and the reason is the same. [0094] As in the first, second, and fourth aspects, in the third aspect, the diamine constituting the soluble polyimide resin or the soluble polyamideimide resin may contain a silicone diamine. Examples of the silicone diamine that are similar to each other include the silicone diamines exemplified above, and the effects of the blending are also the same. Furthermore, the diamine may contain other diamines in addition to the diammine having a hydroxyl group and the silicone diamine, as long as the gist of the present invention is not impaired. The diamine exemplified in the case of the fourth embodiment can be used in the same manner.
[0095] 溶媒可溶耐熱性樹脂が可溶性ポリアミドイミド樹脂の場合、該可溶性ポリアミドイミド 樹脂の原料である芳香族トリカルボン酸無水物としては、例えば、トリメリット酸無水物 (TMA)、 2—(3, 4 ジカルボキシフエニル)ー2—(3 カルボキシフエ二ノレ)プロパ ン無水物、(3, 4—ジカルボキシフエニル)(3—カルボキシフエニル)メタン無水物、( 3, 4—ジカルボキシフエニル)(3—カルボキシフエニル)エーテル無水物、 3, 3,, 4 トリカルボキシベンゾフエノン無水物、 1 , 2 , 4—ブタントリカルボン酸無水物、 2, 3 , 5—ナフタレントリカルボン酸無水物、 2, 3, 6—ナフタレントリカルボン酸無水物、 1 , 2, 4 ナフタレントリカルボン酸無水物、 2, 2 ' , 3 ビフエニルトリカルボン酸無水 物等から選ばれる少なくとも 1種を挙げることができる。耐熱性、コストの観点から、 T MAを用いることが好まし!/、。  [0095] When the solvent-soluble heat-resistant resin is a soluble polyamideimide resin, examples of the aromatic tricarboxylic acid anhydride that is a raw material of the soluble polyamideimide resin include trimellitic anhydride (TMA), 2- (3 , 4 dicarboxyphenyl) -2- (3 carboxyphenyl) propan anhydride, (3, 4-dicarboxyphenyl) (3-carboxyphenyl) methane anhydride, (3,4-dicarboxy) Phenyl) (3-carboxyphenyl) ether anhydride, 3, 3,, 4 tricarboxybenzophenone anhydride, 1,2,4-butanetricarboxylic acid anhydride, 2,3,5-naphthalenetricarboxylic acid anhydride 2, 3, 6-naphthalene tricarboxylic acid anhydride, 1, 2, 4 naphthalene tricarboxylic acid anhydride, 2, 2 ', 3 biphenyl tricarboxylic acid anhydride, etc. That. It is preferable to use TMA from the viewpoint of heat resistance and cost!
[0096] 第 3の態様のポジ型感光性樹脂組成物を構成する可溶性ポリイミド及び/又は可 溶性ポリアミドイミドの GPC測定による重量平均分子量は、 20000〜50000の範囲 が好ましい。重量平均分子量がこの範囲を越える場合は、組成物の印刷性の低下、 現像時の抜け残り、等を発生しやすくなる。一方、重量平均分子量がこの範囲未満 の場合は、現像時に膜劣化が生じる、皮膜の機械強度が不十分になる、等の問題を 生じる場合がある。  [0096] The weight average molecular weight by GPC measurement of the soluble polyimide and / or soluble polyamideimide constituting the positive photosensitive resin composition of the third aspect is preferably in the range of 20000 to 50000. When the weight average molecular weight exceeds this range, the printability of the composition may be deteriorated, or the remaining portion may be lost during development. On the other hand, if the weight average molecular weight is less than this range, problems such as film deterioration during development and insufficient mechanical strength of the film may occur.
[0097] 第 3の態様のポジ型感光性樹脂組成物を構成する可溶性ポリイミドゃ可溶性ポリア ミドイミドは、前記で例示した芳香族テトラカルボン酸 2無水物、芳香族トリカルボン酸 無水物等の酸成分とジァミンを、反応溶媒内で、縮合させることにより得ること力 Sでき る。この縮合反応は、従来のポリイミドゃポリアミドイミドの合成と同様な条件にて行う こと力 Sでさる。 [0098] 例えば、反応溶媒としては、安息香酸メチル、安息香酸ェチル、メチルェチルケトン[0097] The soluble polyimide resin-soluble polyamideimide constituting the positive photosensitive resin composition of the third aspect includes an acid component such as aromatic tetracarboxylic acid dianhydride and aromatic tricarboxylic acid anhydride exemplified above. It is possible to obtain diamine by condensing it in a reaction solvent. This condensation reaction is carried out under the same conditions as in the synthesis of conventional polyimide-polyamideimide. [0098] For example, as a reaction solvent, methyl benzoate, ethyl benzoate, methyl ethyl ketone
(MEK)、アセトン、 γ —ブチロラタトン、 Ν—メチルピロリドン、 Ν, Ν—ジメチルァセト アミド、トルエン、キシレン等が挙げられる。 (MEK), acetone, γ-butyrolatatane, Ν-methylpyrrolidone, Ν, ジ メ チ ル -dimethylacetamide, toluene, xylene and the like.
[0099] 第 3の態様のポジ型感光性樹脂組成物は、このようにして製造された溶媒可溶耐 熱性樹脂とポジ型感光剤を、ポジ型感光性樹脂組成物を構成する溶媒に混合する ことにより得られる。 [0099] In the positive photosensitive resin composition of the third aspect, the solvent-soluble heat-resistant resin and the positive photosensitive agent produced as described above are mixed in a solvent constituting the positive photosensitive resin composition. It is obtained by doing.
[0100] 請求項 8に記載の発明は、ポジ型感光剤が、キノンジアジド化合物であることを特 徴とする請求項 4な!/、し請求項 7の!/、ずれかに記載のポジ型感光性樹脂組成物であ る。ポジ型感光剤として、キノンジアジド化合物を用いると、組成物中にメラミン硬化 剤を含んでいても、これを含まない場合と同様な感度、現像性でパターユングが可能 である。ポジ型感光剤として用いられるキノンジアジド化合物としては、第 1、第 2及び 第 4の態様の場合で例示されたナフトキノンジアジド化合物、特に、芳香族ポリヒドロ キシ化合物のナフトキノンジアジドスルホニルエステルが好ましく例示される。  [0100] The invention according to claim 8 is characterized in that the positive photosensitive agent is a quinonediazide compound. It is a photosensitive resin composition. When a quinonediazide compound is used as a positive photosensitive agent, even if a melamine curing agent is included in the composition, patterning is possible with the same sensitivity and developability as in the case where the melamine curing agent is not included. Preferred examples of the quinonediazide compound used as the positive photosensitive agent include naphthoquinonediazide compounds exemplified in the case of the first, second and fourth embodiments, particularly naphthoquinonediazidesulfonyl esters of aromatic polyhydroxy compounds.
[0101] 第 3の態様のポジ型感光性樹脂組成物を構成する溶媒としても、第 1、第 2及び第 4の態様の場合で例示された溶媒と同じものが好ましく例示される。溶媒として、溶媒 可溶耐熱性樹脂の合成に用いる溶媒と同じものを用いると、ポジ型感光性樹脂組成 物の製造の際に溶媒の置換操作が不要となるので好ましい。  [0101] As the solvent constituting the positive photosensitive resin composition of the third aspect, the same solvents as those exemplified in the case of the first, second and fourth aspects are preferably exemplified. It is preferable to use the same solvent as the solvent used for the synthesis of the solvent-soluble heat-resistant resin as the solvent does not require a solvent replacement operation in the production of the positive photosensitive resin composition.
[0102] ポジ型感光性樹脂組成物中の熱硬化剤の含有量は、溶媒可溶耐熱性樹脂 100重 量部に対して 1重量部〜 50重量部の範囲が好ましぐより好ましくは、 2重量部〜 20 重量部である。熱硬化剤が 1重量部未満であると、硬化が不十分となり、補強板のプ レス (接着)時のシヮが発生や、ハンダリフロー時等での保護膜の損傷が生じやすく なる。一方 50重量部を超えると、硬化による収縮が大きくなり、基板に反りが生じやす くなる。  [0102] The content of the thermosetting agent in the positive photosensitive resin composition is preferably in the range of 1 part by weight to 50 parts by weight with respect to 100 parts by weight of the solvent-soluble heat-resistant resin. 2 to 20 parts by weight. If the thermosetting agent is less than 1 part by weight, curing will be insufficient, and it will be easy to cause scratches during pressing (adhesion) of the reinforcing plate and damage to the protective film during solder reflow. On the other hand, if it exceeds 50 parts by weight, the shrinkage due to curing increases, and the substrate tends to warp.
[0103] ポジ型感光剤は、溶媒可溶耐熱性樹脂 100重量部に対して 5重量部〜 50重量部 の範囲が好ましぐより好ましくは、 10重量部〜 40重量部である。 5重量部未満及び 50重量部を超えた場合は、パターユングが困難になる場合がある。  [0103] The positive photosensitive agent is preferably in the range of 5 to 50 parts by weight, more preferably 10 to 40 parts by weight with respect to 100 parts by weight of the solvent-soluble heat-resistant resin. If it is less than 5 parts by weight or more than 50 parts by weight, patterning may be difficult.
[0104] 溶媒可溶耐熱性樹脂、ポジ型感光剤及び熱硬化剤等の固形分の濃度(固形分濃 度)は、 10〜50重量%が好ましぐこの範囲となるように溶媒量が決定される。 [0105] このようにして得られたポジ型感光性樹脂組成物は、従来のポジ型感光性樹脂組 成物と比べて遜色のない現像性を有し、残渣等の問題を発生しにくいものである。一 方、耐メツキ性にも優れ、メツキの工程での劣化や不良が発生しにくいものである。 [0104] The concentration of the solids such as a solvent-soluble heat-resistant resin, positive photosensitive agent and thermosetting agent (solid content concentration) is 10 to 50% by weight, and the amount of the solvent is within this range. It is determined. [0105] The positive photosensitive resin composition obtained in this way has developability comparable to that of conventional positive photosensitive resin compositions and is less likely to cause problems such as residues. It is. On the other hand, it is also excellent in resistance to scratches, and it is difficult for deterioration and defects to occur in the plating process.
[0106] 請求項 22に記載の発明は、第 3の態様のポジ型感光性樹脂組成物を成膜し、得ら れた膜を加熱して前記溶媒を除去することにより得られることを特徴とする感光性樹 脂フィルムである。  [0106] The invention described in claim 22 is obtained by forming the positive photosensitive resin composition of the third aspect and heating the resulting film to remove the solvent. This is a photosensitive resin film.
[0107] 第 3の態様のポジ型感光性樹脂組成物は、 FPCの保護膜の形成に使用できるとと もに、感光性樹脂フィルムの形成に用いることができる。この感光性樹脂フィルムは、 ポジ型感光性樹脂組成物を、例えば、適当な離型処理を施した PETフィルム上に塗 布する等の方法により成膜した後、得られた膜を 90°C程度で加熱して組成物中の溶 媒を除去することにより、製造すること力 Sできる。この感光性樹脂フィルムは、感光性ド ライフイルムレジストとして使用することができる。  [0107] The positive photosensitive resin composition of the third aspect can be used for forming a protective film of FPC and also for forming a photosensitive resin film. This photosensitive resin film is formed by depositing a positive photosensitive resin composition by, for example, a method such as coating on a PET film which has been subjected to an appropriate release treatment, and the resulting film is then heated to 90 ° C. It is possible to manufacture by removing the solvent in the composition by heating to the extent. This photosensitive resin film can be used as a photosensitive dry film resist.
[0108] 第 3の態様のポジ型感光性樹脂組成物を使用して FPCの保護膜 (カバーレイ)を製 造する方法は、配線が形成された FPC基板上にこの組成物を塗布して成膜した後、 得られた膜を加熱して前記溶媒を除去し、その後、マスクを通して露光、さらに現像し て、ポジ型パターンを得た後、メラミン硬化剤の硬化温度以上に加熱して、溶媒可溶 耐熱性樹脂を架橋することにより行われる。  [0108] A method for producing an FPC protective film (coverlay) using the positive-type photosensitive resin composition of the third aspect comprises applying this composition onto an FPC substrate on which wiring is formed. After film formation, the obtained film is heated to remove the solvent, then exposed through a mask and further developed to obtain a positive pattern, and then heated to a temperature higher than the curing temperature of the melamine curing agent, Solvent soluble It is carried out by crosslinking a heat resistant resin.
[0109] 請求項 23の発明は、第 3の態様のポジ型感光性樹脂組成物、即ち請求項 4ないし 請求項 8の!/、ずれかに記載のポジ型感光性樹脂組成物を、配線が形成された FPC 基板上に塗布して成膜する工程、得られた膜を加熱して前記溶媒を除去する工程、 溶媒が除去された前記ポジ型感光性樹脂組成物を、マスクを通して露光する工程、 露光後現像する工程、及び現像後、前記メラミン硬化剤の硬化温度以上に加熱する 工程、を有することを特徴とする FPCの製造方法である。  [0109] The invention of claim 23 provides the positive photosensitive resin composition of the third aspect, that is, the positive photosensitive resin composition of claim 4 to claim 8, or the wiring of the positive photosensitive resin composition of any one of claims 4 to 8. A step of coating on an FPC substrate formed with a film, a step of heating the obtained film to remove the solvent, and exposing the positive photosensitive resin composition from which the solvent has been removed through a mask A method for producing an FPC comprising: a step, a step of developing after exposure, and a step of heating after development to a temperature equal to or higher than a curing temperature of the melamine curing agent.
[0110] ここで、ポジ型感光性樹脂組成物を FPC基板上へ塗布する方法は特に限定され ず、例えばスクリーン印刷により行うことができ、その他にも、スピンコート、スプレーコ ート、ダイコート、ドクターナイフコート、フレキソ印刷等を挙げることができる。得られ た膜を加熱して前記溶媒を除去する工程 (所謂プリベータ)、溶媒が除去されたポジ 型感光性樹脂組成物を、マスクを通して露光する工程、露光後現像する工程は、従 来のポジ型感光性樹脂組成物を使用して FPCの保護膜を製造する場合と、同様な 条件で行うこと力 Sできる。現像液等も従来と同様なアルカリ現像液、例えば、水酸化 ナトリウム、水酸化カリウム、炭酸ナトリウム、ケィ酸ナトリウム、メタケイ酸ナトリウム、ァ ンモユア水等の無機アルカリ、ェチルァミン、 n—プロピルアミン等の第 1ァミン、ジェ チルァミン、ジー n—ブチルァミン等の第 2ァミン、トリェチルァミン、メチルジェチルァ ミン等の第 3ァミン、ジメチルエタノールァミン、トリエタノールァミン等のアルコールァ ミン、テトラメチルアンモニゥムヒドロキシド、テトラエチルアンモニゥムヒドロキシド、コリ ン等の水溶液を用いることができる。 [0110] Here, the method of applying the positive photosensitive resin composition onto the FPC substrate is not particularly limited, and can be performed, for example, by screen printing. Besides, spin coating, spray coating, die coating, doctor Examples include knife coating and flexographic printing. The step of heating the obtained film to remove the solvent (so-called pre-beta), the step of exposing the positive photosensitive resin composition from which the solvent has been removed through a mask, and the step of developing after exposure are generally followed. This can be done under the same conditions as when manufacturing protective films for FPC using conventional positive photosensitive resin compositions. Developers and the like are the same alkaline developers as conventional ones, for example, inorganic alkalis such as sodium hydroxide, potassium hydroxide, sodium carbonate, sodium silicate, sodium metasilicate, and ammonia water, ethylamine, n-propylamine and the like. 1st amine, such as dimethylamine, triethanolamine, 3rd amine such as triethylamine, triethanolamine, tetramethylammonium hydroxide, tetraethyl Aqueous solutions of ammonium hydroxide and corin can be used.
[0111] この FPCの製造方法は、現像後残存した膜を、前記メラミン硬化剤の硬化温度以 上に加熱する工程を有することを特徴とする。この加熱により、この膜を形成する溶媒 可溶耐熱性樹脂のメラミン硬化剤による架橋が行われ、軟化温度や高温弾性率が向 上して、前記のような優れた効果が得られる。  [0111] This FPC manufacturing method has a step of heating a film remaining after development to a temperature higher than the curing temperature of the melamine curing agent. By this heating, the solvent-soluble heat-resistant resin forming this film is cross-linked with a melamine curing agent, the softening temperature and the high temperature elastic modulus are improved, and the excellent effects as described above are obtained.
[0112] 従って、加熱の温度は、メラミン硬化剤による架橋が行われる温度以上であり、通常 、 130〜200°C程度の範囲である。この温度範囲は、従来のポジ型感光性樹脂組成 物を使用して FPCの保護膜を製造する場合のアフターベータの温度とほぼ同等であ る。なお、本発明のポジ型感光性樹脂組成物を構成する樹脂が可溶性ポリイミドの 場合、この可溶性ポリイミドは、合成の段階ですでにイミド化している場合が多い。従 つて、イミド環形成のために必要な高温での加熱は不要である。  [0112] Therefore, the heating temperature is equal to or higher than the temperature at which crosslinking with the melamine curing agent is performed, and is usually in the range of about 130 to 200 ° C. This temperature range is almost the same as the after-beta temperature when an FPC protective film is produced using a conventional positive photosensitive resin composition. When the resin constituting the positive photosensitive resin composition of the present invention is a soluble polyimide, the soluble polyimide is often already imidized at the stage of synthesis. Therefore, heating at a high temperature necessary for imide ring formation is unnecessary.
[0113] 本発明はさらに、請求項 24として、請求項 23に記載の FPCの製造方法により製造 されたことを特徴とする FPCを提供する。この FPCは、軟化温度や高温弾性率が向 上した保護膜を有するものであり、補強板のプレス (接着)時のシヮの発生や、ハンダ リフロー時や手ハンダによる修正時の保護膜の損傷が抑制されている。 発明の効果  [0113] The present invention further provides, as claim 24, an FPC manufactured by the method for manufacturing an FPC according to claim 23. This FPC has a protective film with an improved softening temperature and high-temperature elastic modulus. It can be used to generate scratches during pressing (adhesion) of the reinforcing plate, as well as during protective reflow or manual soldering. Damage is suppressed. The invention's effect
[0114] 第 1の態様の感光性ポリイミド組成物を FPCの保護膜の形成等に用いた場合は、 従来の感光性ポリイミド組成物と比べて遜色のない現像性を有し、又反り等の問題を 発生しにくいものである。又、この第 1の態様の感光性ポリイミド組成物を用いて形成 される保護膜は、金メッキのプロセスにおいても劣化しにくぐかつ銅箔に対し十分な 接着力を有するものである。 [0115] 第 2の態様の感光性ポリイミド組成物は、 FPCの保護膜の形成等に用いられるが、 この FPCの保護膜の形成過程においても、従来の感光性ポリイミド組成物と遜色の ない現像性を示し、残渣等の問題が発生しにくいものである。一方、耐メツキ性にも 優れ、金メッキのプロセスにおいても劣化しにくぐ特に斑点変色の不良を発生しにく ぐ力、つ銅箔に対し十分な接着力を有する FPCの保護膜を形成することができる。即 ち、第 2の態様の感光性ポリイミド組成物により優れた現像性と耐メツキ性の両立が可 能になる。この第 2の態様の感光性ポリイミド組成物は、請求項 18、 19に記載の感光 性ポリイミド組成物の製造方法により、容易に製造することができる。 [0114] When the photosensitive polyimide composition of the first aspect is used for forming a protective film of FPC, etc., it has developability comparable to that of conventional photosensitive polyimide compositions, and is not warped. It is difficult to cause problems. In addition, the protective film formed using the photosensitive polyimide composition of the first aspect hardly deteriorates even in the gold plating process and has a sufficient adhesive force to the copper foil. [0115] The photosensitive polyimide composition of the second embodiment is used for forming a protective film of FPC, etc., and in the process of forming the protective film of FPC, the development is comparable to the conventional photosensitive polyimide composition. It is difficult for problems such as residues to occur. On the other hand, an FPC protective film with excellent adhesion resistance, resistance to deterioration even in the gold plating process, especially resistance to spot discoloration, and sufficient adhesion to copper foil. Can do. In other words, the photosensitive polyimide composition of the second embodiment makes it possible to achieve both excellent developability and matt resistance. The photosensitive polyimide composition of the second aspect can be easily produced by the method for producing a photosensitive polyimide composition according to claims 18 and 19.
[0116] 第 3の態様のポジ型感光性樹脂組成物は、従来のポジ型感光性樹脂組成物と比 ベて遜色のない現像性を有し残渣等の問題を発生しにくぐ一方、耐メツキ性にも優 れメツキの工程での劣化や不良が発生しにくいものである。さらに、このポジ型感光 性樹脂組成物を基板上に塗布し、加熱により樹脂の架橋を行うことにより、高い軟化 温度と高温弾性率が高い保護膜を形成することができ、 FPCの製造における、補強 板のプレス(接着)時にシヮが発生する、ハンダリフロー時や手ハンダによる修正時に 保護膜が損傷する、等の問題を抑制することができる。  [0116] The positive-type photosensitive resin composition of the third aspect has developability comparable to that of conventional positive-type photosensitive resin compositions and is less likely to cause problems such as residues. It is also excellent in the plating property, and it is difficult for deterioration and defects to occur in the plating process. Furthermore, by applying this positive photosensitive resin composition onto a substrate and crosslinking the resin by heating, a protective film having a high softening temperature and a high high temperature elastic modulus can be formed. It is possible to suppress problems such as the occurrence of wrinkles during pressing (adhesion) of the reinforcing plate, damage to the protective film during solder reflow or correction by hand solder.
[0117] 第 4の態様の感光性ポリイミド組成物を用いることにより、 FPCの保護膜の形成のた めに露光、現像によりパターユングを行う際に、塗膜表面上の斑点変色の発生を少 なくすること力 Sできる。また、請求項 17に記載の感光性ポリイミド組成物の製造方法 により、この第 4の態様の感光性ポリイミド組成物を容易に製造することができる。 図面の簡単な説明  [0117] The use of the photosensitive polyimide composition of the fourth aspect reduces the occurrence of spot discoloration on the coating surface when patterning is performed by exposure and development to form a protective film for FPC. The power to lose S Further, the photosensitive polyimide composition of the fourth aspect can be easily produced by the method for producing a photosensitive polyimide composition according to claim 17. Brief Description of Drawings
[0118] [図 1]実施例 2又は比較例 5で得られたワニスの GPCチャートである。  FIG. 1 is a GPC chart of a varnish obtained in Example 2 or Comparative Example 5.
発明を実施するための最良の形態  BEST MODE FOR CARRYING OUT THE INVENTION
[0119] 次に、本発明を実施するための最良の形態につき、以下に実施例により説明する  [0119] Next, the best mode for carrying out the present invention will be described with reference to the following examples.
1S 本発明は、この実施例のみに限定されるものではない。  1S The present invention is not limited to this example.
実施例  Example
[0120] 実施例 1、比較例 1、 2、 3、 4  [0120] Example 1, Comparative Examples 1, 2, 3, 4
(可溶性ポリイミド樹脂の合成)  (Synthesis of soluble polyimide resin)
1.冷却器、機械式撹拌装置、及び窒素導入管を取り付けた 1Lセパラプルフラスコ 中に、窒素雰囲気下で、溶媒である Ί ブチロラタトン 210gに、シリコーンジァミン( 信越シリコーン社製 KF8010、分子量: 830、ァミン当量: 415) 49. 80g (0. 06mol )を加え、さらに、触媒としてピリジン 2· 0g、及び共沸溶媒としてのトルエン 100gを加 X·る。 1. 1L separate flask equipped with a cooler, mechanical stirrer, and nitrogen inlet tube In a nitrogen atmosphere, add silicone diamine (Shin-Etsu Silicone KF8010, molecular weight: 830, amine equivalent: 415) 49.80 g (0.06 mol) to 210 g butyrolatatatone, a solvent, in addition to a catalyst. Add 2.0 g of pyridine and 100 g of toluene as an azeotropic solvent.
[0121] 2.芳香族テトラカルボン酸 2無水物として、 OPDA (分子量: 310· 2) 37. 22g (0. 1 2mol)を徐々に加え全量投入する。 15分間撹拌し、さらに、トルエンを環流させなが ら、マントルヒーターで 160°Cまで加熱し 1時間反応させる。その後、加熱を止め室温 付近(50°C以下)まで自然冷却する。  [0121] 2. Gradually add 37.22 g (0.12 mol) of OPDA (molecular weight: 310 · 2) as the aromatic tetracarboxylic dianhydride and add to the total amount. Stir for 15 minutes, and then heat to 160 ° C with a mantle heater while allowing toluene to circulate and react for 1 hour. After that, stop heating and let it naturally cool to around room temperature (50 ° C or less).
[0122] 3.次に、ジァミンとして、 1 , 3— APB (分子量: 292. 3) 5. 85g (0. 02mol)及び 6F AP (分子量: 366) 14. 64g (0. 04mol)をカロえ、さらに、約 40%の固形分となるよう 、溶媒 γ—プチ口ラタトン 48gを追加する。投入後 15分間撹拝し、その後、オイルバ スで 160°Cまで加熱し 3時間反応させ、反応液を得る。得られた反応液を、約 100m mHgの減圧下、 40〜50分間、約 70°Cに加熱して、この反応液よりトルエンとピリジ ンを除去し、ワニス 1を得た。  [0122] 3. Next, 1,3—APB (molecular weight: 292.3) 5. 85 g (0.02 mol) and 6F AP (molecular weight: 366) 14. 64 g (0.04 mol) as the diamine Furthermore, 48 g of solvent γ-petit mouth rataton is added so that the solid content is about 40%. Stir for 15 minutes after charging, then heat to 160 ° C in an oil bath and react for 3 hours to obtain a reaction solution. The resulting reaction solution was heated to about 70 ° C. under reduced pressure of about 100 mMHg for 40 to 50 minutes to remove toluene and pyridine from this reaction solution, and varnish 1 was obtained.
[0123] このワニス中のピリジン濃度を、 GC— MS (使用装置:島津 GC17A、カラム: UA— 1 (内径 0. 25mm,膜厚 0. 25 ^ 111,長さ 30m)、 injection温度: 250。C、注入量: 2 1)で定量したところ、ワニス 1の全量に対し 0· 02重量%であった。さらに、前記の減 圧の時間を変更した以外は同様にして、ワニス 2〜5を作製した。同様にしてピリジン 濃度を定量したところ、以下の通りであった。  [0123] The concentration of pyridine in the varnish was determined using GC-MS (apparatus: Shimadzu GC17A, column: UA-1 (inner diameter 0.25 mm, film thickness 0.25 ^ 111, length 30 m), injection temperature: 250. C, injection amount: 2 Quantitative determination by 1) was 0. 02% by weight based on the total amount of varnish 1. Furthermore, varnishes 2 to 5 were produced in the same manner except that the pressure reducing time was changed. Similarly, the pyridine concentration was quantitatively determined as follows.
ワニス 2 : 0. 06重量0 /0 Varnish 2: 0.06 Weight 0/0
ワニス 3 : 0. 08重量0 /0 Varnish 3: 0.08 Weight 0/0
ワニス 4 : 0. 10重量0 /0 Varnish 4: 0. 10 weight 0/0
ワニス 5 : 2. 90重量0 /0 Varnish 5: 2.90 Weight 0/0
(いずれも、ワニスの全量に対する割合。 )  (All are percentages of the total amount of varnish.)
[0124] このようにして得られたワニスについて以下に示す測定を行った。その結果を表 1に 示す。  [0124] The varnish thus obtained was subjected to the following measurements. The results are shown in Table 1.
[0125] (感光現像性の評価 1)  [0125] (Evaluation of Photosensitivity 1)
得られたワニスに、感光剤として、 1、 2 ナフトキノンー2 ジアジドー 5 スルホン 酸エステル (ダイト―ケミックス製、 DTEP— 300)を樹脂固形分に対して 15重量0 /0 ( 15phr)添加して混合し、感光性ポリイミド組成物(感光性インク 1〜5)を調合した。厚 さ 18 mの銅箔上に、該感光性ポリイミド組成物をスクリーン印刷にて塗布した後、 9 0°Cで 30分プリベータして厚さ 12〜; 15 mの皮膜を得た。この皮膜に、所定のマス クを介して紫外線を 800mj/cm2露光した。 To the resulting varnish, 1, 2 naphthoquinone-2 diazido 5 sulfone as a photosensitizer Ester (Daito - Chemix Ltd., DTEP- 300) was added and mixed 15 weight 0/0 (15 phr) with respect to the resin solid content, a photosensitive polyimide composition (photosensitive ink 1-5) were formulated. The photosensitive polyimide composition was applied onto a copper foil having a thickness of 18 m by screen printing, and then pre-betaged at 90 ° C. for 30 minutes to obtain a film having a thickness of 12 to 15 m. This film was exposed to 800 mj / cm 2 of ultraviolet rays through a predetermined mask.
[0126] 続いて、 2. 3%NaOH+ l . 0%エタノールァミンの現像液を深さが lcm程度にな るようにステンレスパッドに入れた。そこへ露光したサンプルを浸漬し、現像液中でゆ つくり揺らしながら 3分間現像を行った。現像後、サンプルを純水で十分にリンスし、 1 80°Cで 30分アフターベータした。乾燥後の膜の状態を目視にて観察したところ、 50 H m以下の L/Sまではっきりパターユングできて!/、た。  [0126] Subsequently, a developer solution of 2.3% NaOH + 1.0% ethanolamine was placed in a stainless steel pad so that the depth was about 1 cm. The exposed sample was immersed in it and developed for 3 minutes while shaking gently in the developer. After development, the sample was thoroughly rinsed with pure water and afterbetad at 180 ° C for 30 minutes. When the condition of the dried film was visually observed, it was possible to clearly pattern up to L / S of 50 Hm or less! /.
[0127] パターユングを行ったサンプルについて、一般的な電解金メッキ処理を行った。即 ち、以下に示す工程を以下に示す順序で行ない、サンプルを各工程の槽に順次積 層した後、乾燥した。  [0127] The sample subjected to patterning was subjected to a general electrolytic gold plating treatment. That is, the steps shown below were performed in the order shown below, and the samples were sequentially stacked in the tank of each step and then dried.
脱脂処理、水洗、ソフトエッチング、水洗、デスミア処理、水洗、ニッケルメツキ、水 洗、ストライク金メッキ、水洗、金メッキ、水洗  Degreasing, water washing, soft etching, water washing, desmear treatment, water washing, nickel plating, water washing, strike gold plating, water washing, gold plating, water washing
[0128] (斑点変色の評価 1) [0128] (Evaluation of spot discoloration 1)
前記各感光性インク 1〜5を、厚さ 18 111、 4cm X l . 5cmの銅箔上に塗布し、乾 燥して、厚さ 12〜; ί δ ΐηの塗膜を形成し、所定のマスクを介して光を照射した後、前 記の現像液で現像を行レ、、さらに前記の方法で金メッキ処理した後の状態を観察し、 1サンプル当たりの斑点の数を求めた。実際には、 40個のサンプルで評価し、平均し て 1個片当たりの斑点の数を計算した。その結果及び以下の基準での評価を表 1に 示す。  Each of the photosensitive inks 1 to 5 is applied onto a copper foil having a thickness of 18 111, 4 cm X 1.5 cm, and dried to form a coating film having a thickness of 12 to; After irradiating with light through a mask, development was performed with the developer described above, and the state after gold plating was observed by the above-described method to determine the number of spots per sample. In practice, 40 samples were evaluated and the average number of spots per piece was calculated. The results and evaluations based on the following criteria are shown in Table 1.
[0129] 〇: 観察される斑点数力、サンプル 1個片当たり、 0. 5未満。  [0129] ○: Spot power observed, less than 0.5 per sample.
Δ : 観察される斑点数が、サンプル 1個片当たり、 0. 5〜; 1. 0。  Δ: The number of observed spots is 0.5 to 1.0 per sample piece.
X: 観察される斑点数が、サンプル 1個片当たり、 1. 0より大きい。  X: The number of spots observed is greater than 1.0 per sample piece.
[0130] [表 1] ワニスの 残存ピリジン濃度 (重量 ¾ 斑点変色数 評価 [0130] [Table 1] Residual pyridine concentration in varnish (weight ¾ spot color change number evaluation
ワニスを基準に 組成物全体を基  Based on the entire composition based on varnish
した濃度 準にした濃度  Concentrated concentration Standardized concentration
実施例 1 ワニス 1 0. 02 0. 017 0. 2 〇 比較例 1 ワニス 2 0. 06 0. 052 0. 9 Δ 比較例 2 ワニス 3 0. 08 0. 07 2. 8 X 比較例 3 ワニス 4 0. 10 0. 09 1. 1 X 比較例 4 ワニス 5 2. 90 2. 52 12. 9 X  Example 1 Varnish 1 0. 02 0. 017 0. 2 〇 Comparative Example 1 Varnish 2 0. 06 0. 052 0. 9 Δ Comparative Example 2 Varnish 3 0. 08 0. 07 2. 8 X Comparative Example 3 Varnish 4 0. 10 0. 09 1. 1 X Comparative Example 4 Varnish 5 2. 90 2. 52 12.9 X
[0131] 表 1に記載の斑点変色数は、現像後にさらに金メッキ処理を行った場合の結果であ る。金メッキ処理により新たに斑点変色が形成される点、及び金メッキ処理により斑点 変色が消滅することはない点を考慮すると、現像により生じる斑点変色数は表 1に記 載のものよりもさらに小さい値となる。表 1に示されるように、残存ピリジン濃度がワニス に対して 0.02重量%の場合は、斑点変色数が少なく実用的に使用できるのに対し 、残存ピリジン濃度がワニスに対して、 0.06重量%、 0.08重量%、 0. 10重量%、 2 .90重量%の場合は、斑点変色数が多ぐ実用的に使用できない。 [0131] The spot discoloration numbers shown in Table 1 are the results when gold plating is further performed after development. In consideration of the fact that spot discoloration is newly formed by the gold plating process and that the spot discoloration does not disappear due to the gold plating process, the number of spot discoloration generated by development is a smaller value than that shown in Table 1. Become. As shown in Table 1, when the residual pyridine concentration is 0.02% by weight with respect to the varnish, the number of spot discoloration is low and practical use is possible, while the residual pyridine concentration is 0.06% by weight with respect to the varnish. In the case of 0.08% by weight, 0.10% by weight, and 2.90% by weight, the number of spot discoloration is large and cannot be used practically.
[0132] 実施例 2  [0132] Example 2
(可溶性ポリイミド樹脂の合成)  (Synthesis of soluble polyimide resin)
1.冷却器、機械式撹拌装置、及び窒素導入管を取り付けた 1Lセパラプルフラスコ 中に、窒素雰囲気下で、溶媒である Ί ブチロラタトン 140gに、シリコーンジァミン( 信越シリコーン社製 KF8010)49.80g(0. O6mol)を加えて一部を溶解させるととも に、残りを懸濁させる。さらに、触媒としてピリジン 2.0g、及び共沸溶媒としてのトル ェン 100gをカロえる。  1. In a 1L separate flask equipped with a condenser, mechanical stirrer, and nitrogen inlet tube, in a nitrogen atmosphere, the solvent Ί Butyrolatathon 140g, Silicone diamine (Ketsugo Silicone KF8010) 49.80g Add (0. O6mol) to dissolve a portion and suspend the rest. Furthermore, 2.0 g of pyridine as a catalyst and 100 g of toluene as an azeotropic solvent are prepared.
[0133] 2.芳香族テトラカルボン酸 2無水物として、 OPDA (分子量: 310· 2)37.22g(0.1 2mol)を徐々に加え全量投入する。このとき、 OPDAは一部が溶解し、残りは懸濁し ている。 15分間撹拌し、さらに、トルエンを環流させながら、マントルヒーターで 160 °Cまで加熱し 1時間反応させる。この間、シリコーンジァミンと OPDAは、徐々に溶解 するとともに縮合が行われる。その後、加熱を止め室温付近(50°C以下)まで自然冷 却する。 [0133] 2. Gradually add 37.22 g (0.1 2 mol) of OPDA (molecular weight: 310 · 2) as an aromatic tetracarboxylic dianhydride, and add the entire amount. At this time, a part of OPDA is dissolved and the rest is suspended. Stir for 15 minutes, then heat to 160 ° C with a mantle heater while refluxing toluene, and react for 1 hour. During this time, silicone diamine and OPDA are gradually dissolved and condensed. After that, stop heating and let it cool naturally to around room temperature (50 ° C or less) Reject.
[0134] 3.次に、ジァミンとして、 1 , 3— APB (分子量: 292. 3) 5. 85g (0. 02mol)及び 6F AP (分子量: 366) 14. 64g (0. 04mol)をカロえ、さらに、約 40 %の固形分となるよう 、溶媒 γ—プチ口ラタトン 1 5gを追加する。投入後 1 5分間撹拌し、その後、オイルバ スで 1 60°Cまで加熱し 3時間反応させ、反応液を得る。その後、減圧してこの反応液 よりトルエンとピリジンを除去し、ヮュスを得た。  [0134] 3. Next, 1, 3— APB (molecular weight: 292.3) 5. 85 g (0.02 mol) and 6F AP (molecular weight: 366) 14. 64 g (0.04 mol) as diamine Furthermore, 15 g of solvent γ-petit mouth rataton is added so that the solid content is about 40%. Stir for 15 minutes after charging, then heat to 160 ° C with an oil bath and react for 3 hours to obtain a reaction solution. Thereafter, the pressure was reduced and toluene and pyridine were removed from the reaction solution to obtain tuss.
このようにして得られたワニスについて以下に示す測定を行った。その結果を表 2に 示す。  The varnish thus obtained was subjected to the following measurements. The results are shown in Table 2.
[0135] (分子量測定)  [0135] (Molecular weight measurement)
GPC (東ソ一社製、 HLC— 8220GPC)により、得られたワニスの重量平均分子量 (Mw)と、数平均分子量 (Mn)との比である分散(Mw/Mn)とを測定した。カラムと して東ソ一社製 TSKgel GMHHR— Hを使用し、キャリア溶媒としては、 NMPに Li Brを 0. I Nの濃度で溶解したものを使用した。分子量は、標準ポリスチレン (TSK標 準ポリスチレン)を用いて計算した、換算値である。得られたワニスの GPCチャートを 図 1に示す。  The dispersion (Mw / Mn), which is the ratio between the weight average molecular weight (Mw) and the number average molecular weight (Mn), of the obtained varnish was measured by GPC (HLC-8220GPC, manufactured by Tosoh Corporation). TSKgel GMHHR-H manufactured by Tosoh Corporation was used as the column, and the carrier solvent was LiMP dissolved in NMP at a concentration of 0.1 N. The molecular weight is a converted value calculated using standard polystyrene (TSK standard polystyrene). Figure 1 shows the GPC chart of the varnish obtained.
[0136] (感光現像性の評価 2)  [0136] (Evaluation of photosensitive developability 2)
得られたワニスに、感光剤として、 1、 2—ナフトキノンー2—ジアジドー 5—スルホン 酸エステル (東洋合成工業社製、以下 PC 5という)を 1 5phr添加して混合し、感光性 ポリイミド組成物 (感光性インク)を調合した。厚さ l S ^ mの銅箔上に、該感光性イン クをスクリーン印刷にて塗布した後プリベータして、厚さ 12〜; 1 5 mの皮膜を得た。 この皮膜に所定のマスクを介して水銀ランプの光を 1000mj/cm2露光した。 The resulting varnish was mixed with 15 phr of 1,2-naphthoquinone-2-diazido 5-sulfonic acid ester (manufactured by Toyo Gosei Co., Ltd., hereinafter referred to as PC 5) as a photosensitizer, and mixed with a photosensitive polyimide composition ( Photosensitive ink) was prepared. The photosensitive ink was applied on a copper foil having a thickness of l S ^ m by screen printing and then pre-betaged to obtain a coating having a thickness of 12 to 15 m. The film was exposed to 1000 mj / cm 2 of mercury lamp light through a predetermined mask.
[0137] コンベア型の現像ラインを用いて現像液をシャワーして現像を行った。用いた現像 液は、 2 · 3 %NaOH + 0. 5 %エタノールァミン水溶液(40°C)である。 2mの現像部 分について、純粋でのリンスを行い、その後 80°Cにて乾燥される。乾燥後の膜の状 態を目視にて観察し、以下に示す基準で評価した。その結果を表 2に示す。  Development was carried out by showering the developer using a conveyor type development line. The developer used was 2 · 3% NaOH + 0.5% ethanolamine aqueous solution (40 ° C). The 2m development is rinsed pure and then dried at 80 ° C. The state of the dried film was visually observed and evaluated according to the following criteria. The results are shown in Table 2.
[0138] © : δΟ μ m以下の L/Sまではっきりパターユングでき、皮膜の劣化や界面へのしみ 込みが見られない。  [0138] ©: It is possible to clearly pattern up to L / S of δΟ μm or less, and there is no deterioration of the film or penetration into the interface.
〇: 50 m程度の L/Sまでパターユングでき、残渣もない。皮膜の劣化は見みられ ないが、一部界面へのしみ込みが見られる場合がある。 ◯: Patterning up to 50 m L / S, no residue. Deterioration of the film is seen There is a case where some penetration into the interface is observed.
△:大概パターユングできている力 露光部に残渣が見られる力、、皮膜の劣化が見ら れる。  Δ: Force that can be put in the patterning area The power at which residues can be seen in the exposed area and the deterioration of the film can be seen.
X:パターユングできないか、劣化が著しい。  X: The pattern cannot be put on or the deterioration is remarkable.
[0139] (耐メツキ性の評価:斑点変色の評価 2) [0139] (Evaluation of resistance to scratching: Evaluation of spot discoloration 2)
前記各感光性インクを、厚さ 18 mの銅箔上に塗布し、乾燥して、厚さ 12〜; 15 mのレジスト膜を形成し、所定のマスクを介して光を照射した後、前記の現像ラインで 現像した後、無電解金メッキを施す。メツキ後の状態を観察し、以下に示す基準で評 価した。その結果を表 2に示す。  Each photosensitive ink is applied onto a copper foil having a thickness of 18 m, dried to form a resist film having a thickness of 12 to 15 m, and irradiated with light through a predetermined mask. After developing on the development line, electroless gold plating is applied. The condition after the plating was observed and evaluated according to the following criteria. The results are shown in Table 2.
[0140] 〇: 観察される斑点数力 S、サンプル 1個片当たり、 0. 3以下。 [0140] ○: Spot power S observed, 0.3 or less per sample piece.
Δ : 観察される斑点数が、サンプル 1個片当たり、 0. 3より大きく 1. 0以下。  Δ: The number of spots observed is greater than 0.3 and less than 1.0 per sample.
X: 観察される斑点数が、サンプル 1個片当たり、 1. 0より大きい。  X: The number of spots observed is greater than 1.0 per sample piece.
[0141] 実施例 3 [0141] Example 3
6FAPの代わりに ABPSを用いた以外は、実施例 2と同様の反応を行い、ワニスを 製造し、同様な測定をした。  Except that ABPS was used instead of 6FAP, the same reaction as in Example 2 was performed to produce a varnish, and the same measurement was performed.
[0142] 比較例 5 [0142] Comparative Example 5
溶媒の γ —ブチロラタトン 140gの代わりに、 γ—ブチ口ラタトン 100gに安息香酸メ チル 40gを混合した混合溶媒を用いた以外は、実施例 2と同様の反応を行いワニス を製造した。この反応においては、シリコーンジァミン及び OPDAは、反応の当初より 全量が溶解し、懸濁する部分はな力、つた。こうして得られた比較例 5のワニスを、実施 例 2のワニスと同様な測定をした。それらの結果も表 2に示す。又、得られたワニスの GPCチャートを図 1に示す。  A varnish was prepared in the same manner as in Example 2 except that a mixed solvent in which 40 g of methyl benzoate was mixed with 100 g of γ-butyral rataton instead of 140 g of γ-butyrolatatone as a solvent was used. In this reaction, the silicone diamine and OPDA were completely dissolved from the beginning of the reaction, and the suspended portion was not strong. The varnish of Comparative Example 5 thus obtained was measured in the same manner as the varnish of Example 2. The results are also shown in Table 2. Figure 1 shows the GPC chart of the varnish obtained.
[0143] 比較例 6 [0143] Comparative Example 6
溶媒の γ —ブチロラタトン 140gの代わりに、 γ—ブチ口ラタトン 100gに安息香酸メ チル 40gを混合した混合溶媒を用い、 6FAPの代わりに ABPSを用いた以外は、実 施例 2と同様の反応を行い、ワニスを製造した。この反応においても、シリコーンジァ ミン及び OPDAは反応の当初より全量が溶解し、懸濁する部分はな力、つた。  The reaction was the same as in Example 2 except that instead of 140 g of the solvent γ-butyroratatone 140 g, a mixed solvent of 100 g of γ-butyrolactaton mixed with 40 g of methyl benzoate was used, and ABPS was used instead of 6FAP. To produce a varnish. Also in this reaction, the silicone diamine and OPDA were completely dissolved from the beginning of the reaction, and the suspended portion was not strong.
[0144] [表 2] 難ラインスピード 現像性 耐メツキ性 [0144] [Table 2] Difficult line speed Developability Meat resistance
Mw 分散  Mw distribution
斑点数/  Number of spots /
<m /分、 評価 評価  <m / min, evaluation evaluation
個片  Piece
1. 1 X 0. 1 〇  1. 1 X 0. 1 〇
0. 9 △ 0. 2 〇  0. 9 △ 0. 2 〇
実施例  Example
38, 000 1. 8 0. 7 ◎ 0. 2 o  38, 000 1. 8 0. 7 ◎ 0. 2 o
2  2
0. 5 ◎ 0. 3 〇  0.5 ◎ 0.3 〇
0. 3 〇 0. 4 Δ  0. 3 ○ 0. 4 Δ
1. 1 X 0. 2 O  1. 1 X 0. 2 O
0. 9 Δ 0. 5 Δ  0. 9 Δ 0.5 Δ
実施例  Example
40, 000 1. 8 0. 7 〇 1. 0 △  40, 000 1. 8 0. 7 〇 1. 0 △
3  Three
0. 5 O 4. 0 X  0. 5 O 4.0 X
0. 3 Δ 10. 0 X  0. 3 Δ 10. 0 X
1. 1 X 0. 5 Δ  1. 1 X 0. 5 Δ
0. 9 Δ 1. 0 △  0. 9 Δ 1. 0 △
比較例  Comparative example
78, 000 2. 5 0. 7 △ 2. 0 X  78, 000 2. 5 0. 7 △ 2. 0 X
5  Five
0. 5 〇 4. 0 X  0.5 〇 4.0 0 X
0. 3 O 4. 0 X  0. 3 O 4.0 X
1. 1 X 4. 0 X  1. 1 X 4.0 X
0. 9 X 8. 0 X  0. 9 X 8. 0 X
比較例  Comparative example
69, 000 2. 4 0. 7 X 10. 0 X  69, 000 2. 4 0. 7 X 10. 0 X
6  6
0. 5 Δ 1 5. 0 X  0. 5 Δ 1 5. 0 X
0. 3 〇 1 5. 0 X  0. 3 〇 1 5. 0 X
表 2に示されるように、本発明品である実施例 2、 3の感光性ポリイミド組成物によれ ば、優れた現像性と耐メツキ性の両立が可能であるのに対し、比較例 5の感光性ポリ イミド組成物では、優れた現像性と耐メツキ性の両立は困難である。特に、 6FAPを 用いなレ、比較例 6では、耐メツキ性が劣る。 [0146] 実施例 4 As shown in Table 2, according to the photosensitive polyimide compositions of Examples 2 and 3 which are the products of the present invention, it is possible to achieve both excellent developability and scratch resistance. With a photosensitive polyimide composition, it is difficult to achieve both excellent developability and resistance to plating. In particular, in the case where 6FAP is not used and in Comparative Example 6, the resistance to the plating is inferior. [0146] Example 4
(可溶性ポリイミド樹脂の合成)  (Synthesis of soluble polyimide resin)
1.冷却器、機械式撹拌装置、及び窒素導入管を取り付けた 1Lセパラプルフラスコ 中に、窒素雰囲気下で、溶媒である Ί ブチロラタトン 140gに、シリコーンジァミン( 信越シリコーン社製 KF8010、分子量: 830、ァミン当量: 415) 33. 20g (0. 04mol )を加えて溶解させる。さらに、触媒としてピリジン 2· 0g、及び共沸溶媒としてのトル ェン 100gをカロえる。  1. In a 1L separate flask equipped with a condenser, mechanical stirrer, and nitrogen inlet tube, in a nitrogen atmosphere, the solvent 溶媒 Butyroratatone 140g, Silicone diamine (KF8010, Shin-Etsu Silicone Co., Ltd., molecular weight: 830, Amine equivalent: 415) 33. 20 g (0.04 mol) is added and dissolved. Furthermore, 2.0 g of pyridine as a catalyst and 100 g of toluene as an azeotropic solvent are calorieated.
[0147] 2.酸 2無水物として、 OPDA (分子量: 310. 2) 37. 22g (0. 12mol)を徐々に加え 、全量投入後、 15分間撹拝し、その後、マントルヒーターで 160°Cまで加熱し 1時間 反応させる。この間、冷却水を流しておきトルエンを環流させる。その後、加熱を止め 室温付近(50°C以下)まで自然冷却する。  [0147] 2. Slowly add OPDA (molecular weight: 310.2) 37.22g (0.12mol) as acid dianhydride, stir for 15 minutes after adding the whole amount, and then 160 ° C with mantle heater Heat to react for 1 hour. During this time, the cooling water is poured and toluene is circulated. Then stop heating and let it cool naturally to near room temperature (50 ° C or less).
[0148] 3.次に、ジァミンとして、 1 , 3— APB (分子量: 292. 3) 20. 46g (0. 07mol)及び 6 FAP (分子量: 366) 3· 66g (0. Olmol)を加え、さらに、約 32%の固形分となるよう 、溶媒 γ プチ口ラタトン 51gを追加する。投入後 15分間撹拝し、その後、オイルバ スで 160°Cまで加熱し 3時間反応させ、反応液を得る。その後、減圧してこの反応液 よりトルエンとピリジンを除去し、ヮュスを得た。  [0148] 3. Next, 1, 3— APB (molecular weight: 292.3) 20.46 g (0.07 mol) and 6 FAP (molecular weight: 366) 3.66 g (0. Olmol) were added as diamines. In addition, 51 g of solvent γ petit rataton is added so that the solid content is about 32%. Stir for 15 minutes after charging, then heat to 160 ° C in an oil bath and react for 3 hours to obtain a reaction solution. Thereafter, the pressure was reduced and toluene and pyridine were removed from the reaction solution to obtain tuss.
[0149] このようにして得られたワニスについて、前記と同様にして分子量測定を行い、さら に  [0149] The molecular weight of the varnish thus obtained was measured in the same manner as described above.
以下に示す測定を行った。その結果を表 4に示す。  The following measurements were performed. The results are shown in Table 4.
[0150] (ガラス転移温度測定) [0150] (Glass transition temperature measurement)
動的粘弾性測定装置 (セイコーインスツルメンッ製、 DMS6100)を用いて、空気雰 囲気中、昇温速度 10°C/分で、 tan δを測定し、 tan δの最大値における温度をガ ラス転移温度 (Tg)とした。  Using a dynamic viscoelasticity measuring device (DMS6100, manufactured by Seiko Instruments Inc.), tan δ is measured in an air atmosphere at a heating rate of 10 ° C / min, and the temperature at the maximum value of tan δ is measured. The lath transition temperature (Tg) was used.
[0151] (熱重量分析) [0151] (Thermogravimetric analysis)
TG DTA (示差熱 .熱重量同時測定装置:セィコ一インスツルメンッ製、 TG/DT TG DTA (differential heat .simultaneous thermogravimetric measuring device: Seiko Instruments Inc., TG / DT
A220)を用いて、空気雰囲気中、昇温速度 10°C/分で、 5%重量減となる温度 (TdA220), a temperature that reduces 5% weight (Td) at a heating rate of 10 ° C / min in an air atmosphere.
5)を測定した。 5) was measured.
[0152] (反り測定) 厚さ 18 mの銅箔上に得られたワニスを塗布し、乾燥して、厚さ 20 mの膜を形成 させた後、この複合材を 100mm角に切断し、これを水平面においたときの 4点の反り の高さを測定し、平均を求めた。 [0152] (Warpage measurement) After applying the varnish obtained on 18 m thick copper foil and drying to form a 20 m thick film, this composite was cut into 100 mm squares and placed on a horizontal surface. The height of the warp at 4 points was measured and the average was obtained.
[0153] (感光現像性の評価 3)  [0153] (Evaluation of photosensitive developability 3)
得られたワニスに、感光剤として、 1、 2—ナフトキノンー2—ジアジドー 5—スルホン 酸エステル (東洋合成工業製、 PC5)を 15phr添加して混合し、感光性ポリイミド組成 物 (感光性インク)を調合した。厚さ 18 mの銅箔上に、該感光性インクをスクリーン 印刷にて塗布した後、プリベータして、厚さ 12〜; 15 mの皮膜を得た。この皮膜に、 所定のマスクを介して紫外線を 800mj/cm2露光した。 To the obtained varnish, 15 phr of 1,2-naphthoquinone-2-diazido 5-sulfonic acid ester (Toyo Gosei Co., Ltd., PC5) was added and mixed as a photosensitizer, and a photosensitive polyimide composition (photosensitive ink) was added. Prepared. The photosensitive ink was applied on a copper foil having a thickness of 18 m by screen printing and then pre-betated to obtain a film having a thickness of 12 to 15 m. This film was exposed to 800 mj / cm 2 of ultraviolet rays through a predetermined mask.
[0154] 現像液を用いて室温で 7分間現像を行い、純水でリンスした後乾燥した。用いた現 像液は、(a) 3%NaOH+ 3%エタノールァミン、 (b) 3%NaOH + 0. 5%エタノール ァミン、(c) 3%NaOHの 3種類である。乾燥後の膜の状態を目視にて観察し、感光 現像性の評価 2と同じ基準で評価した。その結果を表 4に示す。  [0154] Development was performed at room temperature for 7 minutes using a developer, rinsed with pure water, and then dried. Three types of imaging solutions were used: (a) 3% NaOH + 3% ethanolamine, (b) 3% NaOH + 0.5% ethanolamine, and (c) 3% NaOH. The state of the dried film was visually observed and evaluated according to the same criteria as in Photosensitive Development Evaluation 2. The results are shown in Table 4.
[0155] 実施例 5〜; 12、比較例 7〜; 15  [0155] Examples 5 to; 12, Comparative Examples 7 to 15;
表 3に示す配合処方に基づき、実施例 4と同様にして、実施例 5〜; 12、及び比較例 7〜; 15のワニスを得、実施例 4のワニスと同様な測定をした。それらの結果も表 4に示 す。なお、表 3において、 SiOnとはシリコーンジァミンを示し、モル比とは、ジァミン内 の各成分のモル比であり、モル%とはモル比を%表示したものである。ジァミンの合 計モル数は、 OPDAのモル数と同じである。  Based on the formulation shown in Table 3, the varnishes of Examples 5 to 12 and Comparative Examples 7 to 15 were obtained in the same manner as Example 4, and the same measurements as those of Example 4 were performed. The results are also shown in Table 4. In Table 3, SiOn represents silicone diamine, the molar ratio is the molar ratio of each component in the diamine, and mol% is the molar ratio expressed in%. The total number of moles of diamine is the same as that of OPDA.
[0156] [表 3] [0156] [Table 3]
モル比 モル% (対全ジァミン)Molar ratio mol% (vs total diamine)
S i On APB 6FAP又 BPS* S i On APB 6 FAP又 BPS 比較例 7 1 2 33 67 S i On APB 6FAP or BPS * S i On APB 6 FAP or BPS Comparative example 7 1 2 33 67
実施例 4 4 7 1 33 58 8 比較例 8 4 7 (1) 33 58 8 実施例 5 2 3 1 33 50 17 比較例 9 2 3 (1) 33 50 17 実施例 6 1 1 1 33 33 33 比較例 10 1 1 (1) 33 33 33 比較例 11 1 1 50 50  Example 4 4 7 1 33 58 8 Comparative example 8 4 7 (1) 33 58 8 Example 5 2 3 1 33 50 17 Comparative example 9 2 3 (1) 33 50 17 Example 6 1 1 1 33 33 33 Comparison Example 10 1 1 (1) 33 33 33 Comparative example 11 1 1 50 50
実施例 7 6 5 1 50 42 8 較例 12 6 5 (1) 50 42 S 実施例 8 3 2 1 50 33 17 比較例 13 3 2 (1) 50 33 1 7 実施例 9 3 I 2 50 17 33 比較例 i41 3 1 (2) 50 17 33 比較例 15 2 1 67 33  Example 7 6 5 1 50 42 8 Comparative example 12 6 5 (1) 50 42 S Example 8 3 2 1 50 33 17 Comparative example 13 3 2 (1) 50 33 1 7 Example 9 3 I 2 50 17 33 Comparative example i41 3 1 (2) 50 17 33 Comparative example 15 2 1 67 33
実施例 10 8 3 1 67 25 8 実施例〗〗 4 I 1 67 17 17 実施例〗 2 8 1 3 j 67 8 25 Example 10 8 3 1 67 25 8 Example IV 4 I 1 67 17 17 Example IV 2 8 1 3 j 67 8 25
* 「6 FAP又は ABP S」 において、 0 内で示す場合は、 ABPSを用いたことを示 し、 他は 6 FAPを用いている。 * In “6 FAP or ABP S”, when it is shown within 0, it indicates that ABPS was used, and in other cases, 6 FAP was used.
4] Tg Td 5 反り 現像性 Four] Tg Td 5 Warpage Development
Mw Mw/Mn  Mw Mw / Mn
(°C) C ) (mm) (a) (b) (c) 比較例 7 33000 1. 8 97 4 1 5 13. 2 X X X 実施例 4 41000 2. 1 104 391 12. 5 X X X 比較例 8 54100 1. 9 1 1 1 14. 2 X X X 実施例 5 35000 2. 0 1 15 386 13. 5 O Δ X 比較例 9 43300 1. 9 1 14 14. 1 O △ X 実施例 6 34000 2. 0 137 365 1 1. 5 O 〇 比較例 10 41000 1. 9 144 14. 0 Δ △ Δ 比較例 11 33900 2. 0 47 425 2. 1 X X X 実施例 7 39200 2. 1 58 379 1. 9 O △ X 比較例 12 53000 1. 5 67 3. 5 O O X 実施例 8 33100 2. 1 76 387 2. 5 ◎ 〇 X 比較例 13 22400 1. 7 56 4. 7 〇 〇 . X 実施例 9 28000 1. 9 96 347 1. 8 〇 ◎ o 比較例 14 42800 2. 2 98 4. 2 △ Δ Δ 比較例 15 35800 2. 0 43 425 0. 0 X X X 実施例 10 39800 2. 9 45 362 0. 4 X X X 実施例 11 32800 1. 9 46 351 0. 4 〇 O X 実施例 12 27300 1. 9 45 338 0. 6 O O Δ 表 4の結果は、 6FAPを用いた場合(実施例)は、 ABPSを用いた場合(比較例)と ほぼ同様の反り及びガラス転移温度が得られることを示している。なお、表 4の結果よ り、反り及びガラス転移温度は、シリコーンジァミンの量に大きく影響されていることが 分かる。シリコーンジァミンの量が少ない場合には、反りが増大している。ただし、全 ジァミンに対し 33モル%程度の場合 (実施例 4〜6)でも、反りは顕著でなぐ保護膜 等の用途に使用可能な範囲である。一方、シリコーンジァミンの量が多い場合には、 ガラス転移温度が低下している。全ジァミンに対し 67モル%程度の場合(実施例 10 〜12)の場合は、ガラス転移温度は 45°C程度でありこの場合でも保護膜等の用途に 使用可能ではある力 より優れた耐熱性を得るためにはガラス転移温度がより高いこ とが望まれる。表 4の結果は、全ジァミンに対し 60モル%程度以下が好ましいことを 示している。 (° C) C) (mm) (a) (b) (c) Comparative example 7 33000 1. 8 97 4 1 5 13. 2 XXX Example 4 41000 2. 1 104 391 12.5 XXX Comparative example 8 54 100 1. 9 1 1 1 14.2 XXX Example 5 35000 2. 0 1 15 386 13.5 O Δ X Comparative example 9 43300 1. 9 1 14 14.1 O △ X Example 6 34000 2. 0 137 365 1 1.5 O O Comparative Example 10 41000 1. 9 144 14.0 Δ △ Δ Comparative Example 11 33900 2. 0 47 425 2. 1 XXX Example 7 39200 2. 1 58 379 1.9 O △ X Comparative Example 12 53000 1. 5 67 3.5 OOX Example 8 33 100 2. 1 76 387 2. 5 ◎ ○ X Comparative Example 13 22400 1. 7 56 4. 7 ○ ○ .X Example 9 28000 1. 9 96 347 1 8 ○ ◎ o Comparative Example 14 42 800 2. 2 98 4. 2 △ Δ Δ Comparative Example 15 35 800 2. 0 43 425 0. 0 XXX Example 10 39 800 2. 9 45 362 0. 4 XXX Example 11 32 800 1 9 46 351 0. 4 〇 OX Example 12 27300 1. 9 45 338 0. 6 OO Δ The results in Table 4 show that when 6FAP is used (Example), ABPS is used (Comparative Example). It shows that almost the same warp and glass transition temperature can be obtained. The results in Table 4 show that the warpage and glass transition temperature are greatly influenced by the amount of silicone diamine. When the amount of silicone diamine is small, the warpage increases. However, even in the case of about 33 mol% with respect to the total diamine (Examples 4 to 6), the warpage is not significant, and it can be used for applications such as a protective film. On the other hand, when the amount of silicone diamine is large, the glass transition temperature is lowered. In the case of about 67 mol% with respect to the total diamine (Examples 10 to 12), the glass transition temperature is about 45 ° C. A certain force that can be used In order to obtain better heat resistance, a higher glass transition temperature is desired. The results in Table 4 indicate that about 60 mol% or less is preferable based on the total diamine.
[0159] 表 4の結果は、 6FAPを用いた場合(実施例)は、 ABPSを用いた場合(比較例)と ほぼ同様の現像性が得られることを示している。ただし、 ABPSの量が多いものでは 、膜減りが発生しており劣化しやすい傾向がある。又、感光現像性は、 6FAP (OH基 )の量に大きく影響されている。感光現像性は、現像液の濃度にも大きく依存するが 、 3%NaOH + 3%エタノールアミンゃ 3%NaOH + 0. 5%エタノールァミンに近い 組成の現像液を用いる場合には、 6FAPの量は全ジァミンに対し 10〜40モル%の 範囲(実施例 5、 6、 8、 9、 11、 12が該当)が好ましいことが示されている。  [0159] The results in Table 4 indicate that when 6FAP is used (Example), almost the same developability is obtained as when ABPS is used (Comparative Example). However, when the amount of ABPS is large, film loss occurs and tends to deteriorate. Photosensitive developability is greatly influenced by the amount of 6FAP (OH group). Photosensitivity depends largely on the concentration of the developer, but 3% NaOH + 3% ethanolamine or 3% NaOH + 0.5% ethanolamine. It is indicated that the amount is preferably in the range of 10 to 40 mol% (corresponding to Examples 5, 6, 8, 9, 11, 12) with respect to the total diamine.
[0160] 実施例 13〜; 19、比較例 16〜; 17  [0160] Examples 13 to; 19, Comparative Examples 16 to 17;
表 5に示す配合処方に基づき、実施例 4と同様にして、実施例 13〜; 19、及び比較 例 16〜; 17のワニスを得(表 5に示すように、一部の実施例、比較例では、 APBを BA PSMに、 OPDAをべンゾフエノンテトラカルボン酸(BTDA)に、 6FAPを ABPSに置 き換えて反応を行った。)、前記実施例 4における感光現像性の評価の場合と同様に して、感光性ポリイミド組成物 (感光性インク)を調合した。さらに、同様にして、該感 光性インクのスクリーン印刷、プリベータ、露光、現像(現像液: 3%NaOH + 3%エタ ノールァミン水溶液)を行い、その後アフターベータ(160°C、 30分)して、評価用の F PCを得た。  Based on the formulation shown in Table 5, the varnishes of Examples 13 to 19 and Comparative Examples 16 to 17 were obtained in the same manner as in Example 4 (as shown in Table 5, some examples and comparisons). In the example, APB was replaced with BA PSM, OPDA was replaced with benzophenone tetracarboxylic acid (BTDA), and 6FAP was replaced with ABPS. In the same manner, a photosensitive polyimide composition (photosensitive ink) was prepared. Further, in the same manner, screen printing, pre-beta, exposure, and development (developer: 3% NaOH + 3% ethanolamine aqueous solution) of the photosensitive ink are performed, and then after-beta (160 ° C, 30 minutes) is performed. FPC for evaluation was obtained.
[0161] 上記の評価用 FPCを用いて、以下に示す方法で耐マイグレーション性及び耐メッ キ性を評価した。それらの結果を表 6に示す。表 5において、 SiOnとはシリコーンジァ ミンを示し、モル比とは、ジァミン内の各成分のモル比であり、モル%とはモル比を% 表示したものである。ジァミンの合計モル数は、 OPDA又は BTDAのモル数と同じで ある。  [0161] Using the above FPC for evaluation, migration resistance and mesh resistance were evaluated by the following methods. Table 6 shows the results. In Table 5, SiOn represents silicone diamine, the molar ratio is the molar ratio of each component in the diamine, and mol% is the molar ratio expressed in%. The total number of moles of diamine is the same as the number of moles of OPDA or BTDA.
[0162] [表 5] モル比 (モル%) [0162] [Table 5] Molar ratio (mol%)
APB又は 6 FAP 特記事項 *  APB or 6 FAP notes *
S i On  S i On
BAP SM 又は AB P S  BAP SM or AB P S
実施例 1 3 2 (50) 1 (25) 1 (25) AP Bを BAP SMに代替 実施例 14 6 (5 。, 0) 5 (42) 1 (8)  Example 1 3 2 (50) 1 (25) 1 (25) AP B is replaced with BAP SM Example 14 6 (5, 0) 5 (42) 1 (8)
実施例 1 5 3 (50) 2 (33) 1 (1 7)  Example 1 5 3 (50) 2 (33) 1 (1 7)
実施例 1 6 3 (50) 1 (1 7) 2 (33)  Example 1 6 3 (50) 1 (1 7) 2 (33)
実施例 1 7 2 (33) 3 (50) 1 (1 7)  Example 1 7 2 (33) 3 (50) 1 (1 7)
実施例 1 8 1 (25) 1 (25) OPDAを BTDAに代替 実施例 1 9 2 (50) 1 (25) 1 (25)  Example 1 8 1 (25) 1 (25) OPDA replaced with BTDA Example 1 9 2 (50) 1 (25) 1 (25)
比較例 1. 6 22 (44) 1 1 (22) 1 7 (34) 6 FAPを ABP Sに代替 比較例 1 7 3 (50) 2 (33) 1 (1 7) 6 FAPを ABP Sに代替 Comparative example 1. 6 22 (44) 1 1 (22) 1 7 (34) 6 FAP replaced with ABP S Comparative example 1 7 3 (50) 2 (33) 1 (1 7) 6 FAP replaced with ABP S
*特記事項に記載がない場合は、 APB、 OPDA, 6 FAPを使用。 * APB, OPDA, 6 FAP are used unless otherwise specified.
[0163] (耐マイグレーション性の評価) [0163] (Evaluation of migration resistance)
前記各感光性インクを、厚さ 18 mの銅箔パターユングをしたマイグレーション評 価用の両面板上に塗布し、乾燥して、厚さ 12〜; 15 πιの絶縁皮膜を形成し、所定 のマスクを介して光を照射した後、現像液で現像して評価用の FPCを作成した。これ を温度 85°C、相対湿度 85%RHの高温高湿下に置き、導体間に 50Vの直流電圧を 1000時間印加して、レジスト膜の状態を観察し、以下に示す基準で評価した。その 結果を表 6に示す。  Each of the photosensitive inks was applied onto a migration evaluation double-sided plate having a copper foil pattern of 18 m in thickness, and dried to form an insulating film having a thickness of 12 to 15 πι After irradiating with light through a mask, development with a developer was performed to create an FPC for evaluation. This was placed under a high temperature and high humidity of 85 ° C and relative humidity of 85% RH, a 50V DC voltage was applied between the conductors for 1000 hours, the state of the resist film was observed, and the following criteria were evaluated. The results are shown in Table 6.
[0164] 〇: 全く異常なし。 [0164] ○: No abnormality at all.
Δ: 電流値に異常は見られないが、微小なデンドライト形成が見られた。  Δ: No abnormality was observed in the current value, but minute dendrite formation was observed.
X: 電流 に異常は見られないが、大きなデンドライト形成が見られた。  X: There was no abnormality in the current, but a large dendrite formation was observed.
X X:全面にデンドライト形成が見られ、電流値に異常が発生した。  X X: Dendrite formation was observed on the entire surface, and an abnormality occurred in the current value.
[0165] (耐メツキ性の評価) [0165] (Evaluation of anti-sticking property)
前記各感光性インクを、厚さ 18 mの銅箔上に塗布し、乾燥して、厚さ 12〜; 15 mのレジスト膜を形成し、所定のマスクを介して光を照射した後、現像液で現像した 後、(a)無電解金メッキ、(b)電解金メッキを施す。メツキ後の状態を観察し、以下に 示す基準で評価した。その結果を表 6に示す。 Each photosensitive ink is applied onto a copper foil having a thickness of 18 m, dried to form a resist film having a thickness of 12 to 15 m, irradiated with light through a predetermined mask, and then developed. After developing with the solution, (a) electroless gold plating, (b) electrolytic gold plating. Observe the post-mesh condition and Evaluation was based on the criteria shown. The results are shown in Table 6.
[0166] 〇: 異常なし。 [0166] ○: No abnormality.
Δ : 皮膜表面に、軽微なあれ、又は端子部の少ないしみこみが見られた。  Δ: Slight or slight penetration of the terminal portion was observed on the film surface.
X: 皮膜表面が劣化し、端子部のしみこみが見られた。  X: The surface of the film was deteriorated, and soaking of the terminals was observed.
X X:皮膜に割れ、はがれが生じ、絶縁部も一部メツキされた。  X X: The film was cracked and peeled, and the insulation part was also partially scratched.
[0167] なお、(耐マイグレーション性の評価)、(耐メツキ性の評価)で使用した現像液を以 下に示す。 [0167] The developers used in (Evaluation of migration resistance) and (Evaluation of scratch resistance) are shown below.
実施例 13、 14、 15及び 17 : 3%NaOH+ 3%エタノールァミン  Examples 13, 14, 15 and 17: 3% NaOH + 3% ethanolamine
実施例 16、 18及び 19並びに比較例: 3%NaOH + 0. 5%エタノールァミン  Examples 16, 18 and 19 and comparative example: 3% NaOH + 0.5% ethanolamine
[0168] [表 6] [0168] [Table 6]
Figure imgf000042_0001
Figure imgf000042_0001
[0169] 表 6の結果に示されるように、ジァミンの成分として 6FAPを用いその含有量が 1〜 [0169] As shown in the results of Table 6, 6FAP was used as a component of diamine, and its content was 1 to
50モル%の範囲内である場合(実施例)は、耐マイグレーション性、耐メツキ性に優 れている。特に、 APBと OPDAを用い、 6FAPの含有量が 20モル%以下であり、 Si On含有量が 50モル%である実施例 14、 15では、無電解金メッキの場合でも優れた 耐メツキ性を示す。一方、ジァミンの成分として ABPSを用いた場合(比較例)は、耐 マイグレーション性、耐メツキ性ともに実施例(6FAPを用いた場合)よりはるかに劣る [0170] (合成例 1) When it is in the range of 50 mol% (Example), it is excellent in migration resistance and matt resistance. In particular, Examples 14 and 15 in which APB and OPDA are used, the content of 6FAP is 20 mol% or less, and the content of Si On is 50 mol%, show excellent resistance to plating even in the case of electroless gold plating. . On the other hand, when ABPS is used as the component of diamine (comparative example), both migration resistance and galling resistance are far inferior to those of the example (using 6FAP). [Synthesis Example 1]
冷却器、機械式撹拌装置、及び窒素導入管を取り付けた 1Lセパラプルフラスコ中 に、窒素雰囲気下で、溶媒である Ί ブチロラタトン 140gに、シリコーンジァミン(前 記構造式 (III)で表される化合物、信越シリコーン社製 KF8010、分子量: 830、アミ ン当量: 415)49.80g(0.06mol)を加えて一部を溶解させるとともに、残りを懸濁さ せる。さらに、触媒としてピリジン 0· 5g、及び共沸溶媒としてのトルエン 50gを加える In a 1 L separate flask equipped with a cooler, mechanical stirrer, and nitrogen inlet tube, in a nitrogen atmosphere, 140 g of butyrolatatane, a solvent, is represented by silicone diamine (formula (III) above). Compound, KF8010 manufactured by Shin-Etsu Silicone Co., Ltd., molecular weight: 830, amine equivalent: 415) 49.80 g (0.06 mol) is added to dissolve part, and the rest is suspended. Add 0.5 g of pyridine as catalyst and 50 g of toluene as azeotropic solvent.
Yes
[0171] 芳香族テトラカルボン酸 2無水物として、 OPDA (分子量: 310· 2)37.22g(0.12 mol)を徐々に加え全量投入する。このとき、 OPDAは一部が溶解し、残りは懸濁し ている。 15分間撹拌し、さらに、トルエンを環流させながら、マントルヒーターで 160 °Cまで加熱し 1時間反応させる。その後、加熱を止め室温付近(50°C以下)まで自然 冷却する。  [0171] As an aromatic tetracarboxylic dianhydride, 37.22 g (0.12 mol) of OPDA (molecular weight: 310 · 2) is gradually added, and the whole amount is charged. At this time, a part of OPDA is dissolved and the rest is suspended. Stir for 15 minutes, then heat to 160 ° C with a mantle heater while refluxing toluene, and react for 1 hour. Then, stop heating and let it cool naturally to near room temperature (50 ° C or less).
[0172] 次に、ジァミンとして、 1, 3— APB (分子量: 292.3)5.85g(0.02mol)及び 6FA P (分子量: 366) 14.64g(0.04mol)をカロえ、さらに、約 40%の固形分となるよう、 溶媒 γ—プチ口ラタトン 15gを追加する。投入後 15分間撹拌し、その後、オイルバス で 160°Cまで加熱し 3時間反応させ、反応液を得る。その後、減圧してこの反応液よ りトルエンとピリジンを除去し、淡黄色透明のワニス(OPDA:シリコーンジァミン: 1, 3 -APB: 6FAP = 6:3:1:2)を得た。  [0172] Next, 1,3—APB (molecular weight: 292.3) 5.85 g (0.02 mol) and 6FA P (molecular weight: 366) 14.64 g (0.04 mol) were mixed as diamine, and about 40% solids. Add 15 g of solvent γ-petit-mouthed rataton to make a minute. Stir for 15 minutes after charging, then heat to 160 ° C in an oil bath and react for 3 hours to obtain a reaction solution. Thereafter, the pressure was reduced and toluene and pyridine were removed from the reaction solution to obtain a pale yellow transparent varnish (OPDA: silicone diamine: 1,3-APB: 6FAP = 6: 3: 1: 2).
[0173] (合成例 2)  [Synthesis Example 2]
シリコーンジァミン KF8010の量を 33.20g(0.04mol)、 1, 3— APBの量を 11.6 9g(0.04mol)、固形分濃度調整のために追加される溶媒 γ ブチロラタトンの量を 50g、固形分濃度を約 35%に変えた以外は、合成例 1と同様な条件にて、淡黄色透 明のワニス(OPDA:シリコーンジァミン: 1 , 3— APB: 6FAP = 6:2:2:2)を得た。  The amount of silicone diamine KF8010 is 33.20 g (0.04 mol), the amount of 1,3—APB is 11.69 g (0.04 mol), the solvent added to adjust the solid content concentration γ butyrolatatone amount is 50 g, solid content A pale yellow transparent varnish (OPDA: silicone diamine: 1, 3—APB: 6FAP = 6: 2: 2: 2 under the same conditions as in Synthesis Example 1 except that the concentration was changed to about 35%. )
[0174] (合成例 3) [0174] (Synthesis Example 3)
芳香族テトラカルボン酸 2無水物として、 OPDA37.22g(0.12mol)の代わりに、 OPDAを 18.61g(0.06mol)及び DSDA(3, 3,, 4, 4,ージフエニノレスノレホンテト ラカルボン酸 2無水物)を 21· 50g(0.06mol)用いた以外は、合成例 2と同様な条 件にて、褐色透明のワニス(OPDA:DSDA:シリコーンジァミン: 1, 3— APB:6FA ? = 3:3:2:2:2)を得た。 As aromatic tetracarboxylic dianhydride, instead of OPDA37.22g (0.12mol), OPDA is 18.61g (0.06mol) and DSDA (3, 3, 4, 4, 4, dipheninores norephone tetracarboxylic acid 2 anhydride) was used in the same conditions as in Synthesis Example 2 except that 21 · 50 g (0.06 mol) was used. As a result, a brown transparent varnish (OPDA: DSDA: silicone diamine: 1, 3—APB: 6FA? = 3: 3: 2: 2: 2) was obtained.
[0175] (合成例 4) [0175] (Synthesis Example 4)
冷却器、機械式撹拌装置、及び窒素導入管を取り付けた 1Lセパラプルフラスコ中 に、窒素雰囲気下で、 γ—ブチロラタトン 300gに、シリコーンジァミン(KF8010)99 .60g(0.12mol)を加えて一部を溶解させるとともに、残りを懸濁させる。さらに、触 媒としてピリジン 0.5g、及び共沸溶媒としてのトルエン 50gを加える。  Add 99.60 g (0.12 mol) of silicone diamine (KF8010) to 300 g of γ-butyrolatatone under a nitrogen atmosphere in a 1 L separatory flask equipped with a condenser, mechanical stirrer, and nitrogen inlet tube. Dissolve a portion and suspend the rest. Add 0.5 g of pyridine as a catalyst and 50 g of toluene as an azeotropic solvent.
[0176] 芳香族テトラカルボン酸 2無水物として、 OPDA (分子量: 310.2)46.53g(0.15 mol)及び DSDA(3, 3', 4, 4'—ジフエニルスルホンテトラカルボン酸 2無水物) 53 .74g(0.15mol)を徐々に加え全量投入する。このとき、 OPDAは一部が溶解し、 残りは懸濁している。 15分間撹拌し、さらに、トルエンを環流させながら、マントルヒー ターで 160°Cまで加熱し 1時間反応させる。その後、加熱を止め室温付近(50°C以 下)まで自然冷却する。 [0176] As aromatic tetracarboxylic dianhydride, OPDA (molecular weight: 310.2) 46.53 g (0.15 mol) and DSDA (3, 3 ', 4, 4'-diphenylsulfone tetracarboxylic dianhydride) 53. Add 74g (0.15mol) gradually, and add the whole amount. At this time, part of OPDA is dissolved and the rest is suspended. Stir for 15 minutes, then heat to 160 ° C with a mantle heater while refluxing toluene, and react for 1 hour. Then stop heating and let it naturally cool to around room temperature (below 50 ° C).
[0177] 次に、ジァミンとして、 1, 3— APB (分子量: 292.3)17.54g(0.06mol)、 TPE —R (分子量: 292.3)5.85g(0.02mol)及び 6FAP36.60g(0. lOmol)をカロえ、 さらに、約 35%の固形分となるよう、溶媒 γ—プチ口ラタトン 160gを追加する。投入 後 15分間撹拌し、その後、オイルバスで 160°Cまで加熱し 3時間反応させ、反応液を 得る。その後、減圧してこの反応液よりトルエンとピリジンを除去し、褐色透明のワニス (OPDA:DSDA:シリコーンジァミン: 1, 3-APB :TPE-R: 6FAP = 15: 15: 12: 6:2: 10)を得た。  [0177] Next, as diamine, 1,3-APB (molecular weight: 292.3) 17.54 g (0.06 mol), TPE —R (molecular weight: 292.3) 5.85 g (0.02 mol) and 6FAP36.60 g (0. lOmol) Add 160g of solvent γ-petit mouth rataton to a solid content of about 35%. After the addition, stir for 15 minutes, then heat to 160 ° C in an oil bath and react for 3 hours to obtain a reaction solution. Then, the pressure is reduced to remove toluene and pyridine from the reaction solution, and a brown transparent varnish (OPDA: DSDA: silicone diamine: 1,3-APB: TPE-R: 6FAP = 15: 15: 12: 6: 2: I got 10).
[0178] (分子量測定、粘度測定)  [0178] (Molecular weight measurement, viscosity measurement)
分子量測定を前記と同様にして行った。又、このようにして得られたワニスの 25°C に於ける粘度を B型粘度計により測定した。これらの結果を表 7に示す。  Molecular weight measurement was performed as described above. The viscosity of the varnish thus obtained at 25 ° C was measured with a B-type viscometer. These results are shown in Table 7.
[0179] [表 7] 固形分 、%、 Mw Mw/M n 粘度 (P a ' s) 合成例 1 4 0 3 8 , 0 0 0 1 . 8 2 1 0 [0179] [Table 7] Solid content,%, Mw Mw / M n Viscosity (P a 's) Synthesis example 1 4 0 3 8, 0 0 0 1. 8 2 1 0
合成伊 J 2 3 5 3 6 , 0 0 0 1 . 9 3 2 0  Synthesis Italy J 2 3 5 3 6, 0 0 0 1 .9 3 2 0
合成例 3 3 5 3 3 , 5 0 0 1 . 8 1 8 0  Synthesis example 3 3 5 3 3, 5 0 0 1 .8 1 8 0
合成例 4 3 5 3 4 , 1 0 0 1 . 8 1 2 4  Synthesis example 4 3 5 3 4, 1 0 0 1 .8 1 2 4
[0180] 実施例 20〜34、比較例 18〜21 [0180] Examples 20 to 34, Comparative Examples 18 to 21
(ポジ型感光性樹脂組成物の製造)  (Manufacture of positive photosensitive resin composition)
合成例 1〜4で得られた各ワニス(ベースワニス)に、感光剤として、ナフトキノンジァ ジドスルホン酸エステル(ダイトーケミックス社製、 DTEP— 300)をポリマー固形分に 対して 15wt%と、硬化剤としてメラミン樹脂(三井サイテック社製の低分子量メトキシ メラミン樹脂、商品名:サイメル 303)をポリマー固形分に対して、表 8に示す通りに配 合し混合して感光性ポリイミド組成物 (感光性インク)を調合した。なお、消泡剤をポリ マー固形分に対して約 lwt%添加しており、最終的な攪拌混合の後、真空下で脱泡 を行い、ポジ型感光性樹脂組成物を得た。  In each of the varnishes (base varnishes) obtained in Synthesis Examples 1 to 4, naphthoquinone diazide sulfonic acid ester (manufactured by Daito Chemix, DTEP-300) as a photosensitizer is 15 wt% based on the polymer solid content, Melamine resin (low molecular weight methoxy melamine resin, product name: Cymel 303, manufactured by Mitsui Cytec Co., Ltd.) is mixed and mixed as shown in Table 8 with respect to the polymer solid content, and photosensitive polyimide composition (photosensitive ink). Was formulated. An antifoaming agent was added in an amount of about 1 wt% based on the solid content of the polymer. After the final stirring and mixing, defoaming was performed under vacuum to obtain a positive photosensitive resin composition.
[0181] (現像性評価:感光現像実験)  [0181] (Developability evaluation: photosensitive development experiment)
このようにして得られた各ポジ型感光性樹脂組成物を、厚さ 38 mの銅箔上に、ス クリーン印刷にて塗布した後、プリベータ(90°C X 30分)して組成物中の溶媒を除去 し、厚さ 12〜; 15 mの皮膜を得た。この皮膜に所定のマスクを介して水銀ランプの 光を 1000mj/cm2露光した。その後、 2· 3%NaOH + 0. 5%エタノールアミン水溶 液 (40°C)である現像液を用いて、室温で 7分現像を行い、純水でリンスした後乾燥し 、下記の基準にて現像性を評価した。 Each positive photosensitive resin composition obtained in this way was applied on a 38 m thick copper foil by screen printing, and then pre-beta (90 ° C x 30 minutes). The solvent was removed to obtain a film having a thickness of 12 to 15 m. This film was exposed to 1000 mj / cm 2 of mercury lamp light through a predetermined mask. Then, develop for 7 minutes at room temperature using a developer that is 2.3% NaOH + 0.5% ethanolamine aqueous solution (40 ° C), rinse with pure water, and dry. The developability was evaluated.
[0182] © ·· 50 m以下の L/Sまでパターユングでき、皮膜の劣化や界面へのしみ込みが 見られない。  [0182] © · Can pattern up to 50 m or less L / S, and no deterioration of film or penetration into the interface.
〇: 100 m程度の L/Sまでパターユングでき、残渣もない。皮膜の劣化は見られ ない。  ◯: Patterning up to L / S of about 100 m with no residue There is no deterioration of the film.
Δ : 100 m程度の L/Sのパターユングはできる力 露光部に残渣が見られる力、、 皮膜の劣化が見られる。 Δ: The power that can be applied to L / S patterning of about 100 m Deterioration of the film is observed.
X: ノ ターユングができないか、皮膜の劣化が著しい。  X: No notching is possible, or the film is significantly deteriorated.
[0183] (フィルム物性測定)  [0183] (Measurement of film properties)
厚さ 38 ,i mの銅箔上に、前記の(ポジ型感光性樹脂組成物の製造)で得られた各 ポジ型感光性樹脂組成物をスクリーン印刷にて塗布した後、プリベータ(90°C X 30 分)して組成物中の溶媒を除去し、厚さ約 25 ^ 111の皮膜を得た。この皮膜を、 2. 3% NaOH + 0. 5%エタノールァミン水溶液(40°C)である現像液に、室温で 7分浸漬し た。純水で水洗後、 120°C X 1時間 + 220°C X 30分のアフターベータを行い、さらに 銅箔を酸で溶解して、厚さ約 25 mのフィルムを得た。得られたフィルムの動的粘弹 性測定を行い、軟化温度、 180°Cでの弾性率(Ε' @ 180°C)、 tan δピーク温度を、 以下に示す方法で測定した。これらの結果を表 8に示す。  Each of the positive photosensitive resin compositions obtained in the above (Preparation of positive photosensitive resin composition) was applied on a copper foil having a thickness of 38, im by screen printing, and then pre-beta (90 ° CX 30 minutes), the solvent in the composition was removed, and a film having a thickness of about 25 ^ 111 was obtained. This film was immersed in a developing solution of 2.3% NaOH + 0.5% ethanolamine aqueous solution (40 ° C.) at room temperature for 7 minutes. After washing with pure water, after-beta was performed at 120 ° C for 1 hour + 220 ° C for 30 minutes, and the copper foil was dissolved with an acid to obtain a film having a thickness of about 25 m. The resulting film was subjected to dynamic viscosity measurement, and the softening temperature, the elastic modulus at 180 ° C. (Ε ′ @ 180 ° C.), and the tan δ peak temperature were measured by the following methods. These results are shown in Table 8.
[0184] (軟化温度) (Ε' @ 180°C) (tan δピーク温度)  [0184] (Softening temperature) (Ε '@ 180 ° C) (tan δ peak temperature)
動的粘弾性の測定結果から求めた。弾性率が低下しはじめる温度を軟化温度とし 、 180°Cでの弾性率を E' @ 180°Cとした。  It calculated | required from the measurement result of dynamic viscoelasticity. The temperature at which the elastic modulus begins to decrease was defined as the softening temperature, and the elastic modulus at 180 ° C was defined as E '@ 180 ° C.
[0185] (反り)  [0185] (Warpage)
厚さ 38 a mの銅箔上に、各ポジ型感光性樹脂組成物をスクリーン印刷にて塗布し た後、プリベータ(90°C X 30分)して組成物中の溶媒を除去し、厚さ約 12〜; 15 111 の皮膜を得た。この皮膜を、 2· 3%NaOH + 0. 5%エタノールァミン水溶液(40°C) である現像液に室温で 7分浸漬して現像処理を行い、そのまま、 120°C X 1時間 + 2 20°C X 30分のアフターベータを行った。このサンプルを 100mm X 100mmの正方 形にカットしてその反りを測定した。反りは、正方形の 4つの角の底面からの高さを測 定し平均して求めた。これらの結果を表 8に示す。  After coating each positive photosensitive resin composition on a copper foil with a thickness of 38 am by screen printing, pre-beta (90 ° CX 30 minutes) was used to remove the solvent in the composition, and the thickness was about 12 ~; 15 111 films were obtained. This film was immersed in a developer solution of 2.3% NaOH + 0.5% ethanolamine aqueous solution (40 ° C) for 7 minutes at room temperature, and developed as it was. 120 ° CX for 1 hour + 220 ° CX 30 minutes after beta. This sample was cut into a 100 mm × 100 mm square and its warpage was measured. The warpage was obtained by measuring and averaging the height from the bottom of the four corners of the square. These results are shown in Table 8.
[0186] [表 8] ベ一ス メラミ «& 軟化 t ani5 [0186] [Table 8] Base Melami «& Soften t ani5
E@180t  E @ 180t
温度 ピーク 反り *  Temperature peak warping *
ワニス ί娜分 (MP a) (mm) 現像性  Varnish ί 娜 分 (MP a) (mm) Developability
wt CC) C)  wt CC) C)
t翻 18 合成例 1 なし 99 16 133 3 ©  tTranslation 18 Composition Example 1 None 99 16 133 3 ©
合成例 1 6 100 71 164 3 l¾W21 合成例 1 12. 5 102 180 193 4 ◎  Synthesis example 1 6 100 71 164 3 l¾W21 Synthesis example 1 12. 5 102 180 193 4 ◎
赚 ί22 合成例 1 25 -105 330 203 5 o  赚 ί22 Synthesis example 1 25 -105 330 203 5 o
娜23 合成例 1 50 ~ 110 530 なし 7 Δ  娜 23 Synthesis example 1 50 to 110 530 None 7 Δ
赚 !U 9 合成伊 J 2 なし 130 15 154 12 O  U! U 9 Composite Italy J 2 None 130 15 154 12 O
¾»!|24 合成例 2 2. 5 1 30 34 173 - 〇  ¾ »! | 24 Synthesis example 2 2. 5 1 30 34 173-〇
合成锊 2 5 〜 135 90 180 - 〇  Composite 锊 2 5 to 135 90 180-〇
合成例 2 12. 5 〜 13 5 200 207 14 o  Synthesis example 2 12.5 to 13 5 200 207 14 o
t翻 20 合成例 3 なし 1 58 100 184 20 o  t Translator 20 Composition example 3 None 1 58 100 184 20 o
- i27 合成例 3 2. 5 160 120 186 o  -i27 Synthesis example 3 2. 5 160 120 186 o
合成例 3 5 1 57 200 191 14 o  Synthesis example 3 5 1 57 200 191 14 o
霞 9 合成例 3 7. 5 -160 280 200 ― o  霞 9 Synthesis example 3 7.5 -160 280 200 ― o
¾»ί|30 合成例 3 10 〜 160 500 239 1 5 〇  ¾ »ί | 30 Synthesis example 3 10 to 160 500 239 1 5 〇
卿 1 合成例 4 なし 143 60 176 1 1 ◎  卿 1 Synthesis example 4 None 143 60 176 1 1 ◎
¾SPJ31 合成例 4 2. 5 145 70 188 - ◎  ¾SPJ31 Synthesis example 4 2. 5 145 70 188-◎
雾删 32 合成例 4 5 148 90 190 13 ◎ 雾 删 32 Synthesis example 4 5 148 90 190 13 ◎
33 合成例 4 7. 5 -150 150 197 一 0 合成例 4 10 〜 150 400 233 13 〇  33 Synthesis example 4 7.5 -150 150 197 1 0 Synthesis example 4 10 to 150 400 233 13 〇
[0187] 表 8の結果より、メラミン系硬化剤を添加した実施例では、軟化温度、高温での弾性 率、 tan δピーク温度が上昇しており、このポジ型感光性樹脂組成物を使用すれば、 FPCの製造における補強板のプレス(接着)時のシヮの発生や、ハンダリフロー時や 手ハンダによる修正時の損傷が抑制された保護膜を形成できることが示されている。 又、メラミン系硬化剤を添加しても、反りや現像性の大きな低下がないことが示されて いる。 [0187] From the results in Table 8, in the examples where the melamine-based curing agent was added, the softening temperature, the elastic modulus at high temperature, and the tan δ peak temperature increased, and this positive photosensitive resin composition was used. For example, it has been shown that it is possible to form a protective film that suppresses the occurrence of cracks during pressing (adhesion) of the reinforcing plate in FPC manufacturing, and damage during solder reflow or manual soldering. Further, it has been shown that even when a melamine curing agent is added, there is no significant reduction in warpage or developability.
[0188] (FPC作製)  [0188] (FPC production)
実施例 21、 27、 32、 34及び比較例 18、 19、 20、 21のポジ型感光性樹脂組成物 を、 FPC基板上に、感光性カバーレイとしてスクリーン印刷後、プリベータし、その後 順次、露光、現像、乾燥、アフターベータ(180°CX30分)の工程を行い、さらにその 後、電解金メッキを施す保護膜付き FPCを作製した。このようにして得られた FPCに 、後工程の補強板接着模擬プレス試験を行ったところ、比較例 18、 19、 21において は、補強板周辺部分での保護膜にシヮ発生が見られた力 実施例 21、 27、 32、 34 及び比較例 20においては、補強板周辺部分でもシヮ発生は見られなかった。また各 FPC保護膜の高温フラックス耐性を比較したところ、実施例 21 , 27, 32, 34は比較 例 18〜 21と比べて良好な耐フラックス性を示した。 The positive photosensitive resin compositions of Examples 21, 27, 32, and 34 and Comparative Examples 18, 19, 20, and 21 were screen-printed as photosensitive coverlays on the FPC substrate, pre-beta, and then sequentially exposed. Development, drying, and after-beta (180 ° CX30min) were performed, and then an FPC with a protective film for electrolytic gold plating was produced. When the FPC obtained in this way was subjected to a reinforcing plate adhesion simulation press test in the subsequent process, in Comparative Examples 18, 19, and 21, a wrinkle was observed in the protective film around the reinforcing plate. Force In Examples 21, 27, 32, and 34 and Comparative Example 20, no wrinkles were observed in the periphery of the reinforcing plate. Also each When the high-temperature flux resistance of the FPC protective film was compared, Examples 21, 27, 32, and 34 showed better flux resistance than Comparative Examples 18-21.

Claims

請求の範囲 The scope of the claims
[1] 可溶性ポリイミド樹脂及びポジ型感光剤を含有する感光性樹脂組成物であって、 前記可溶性ポリイミド樹脂が、芳香族テトラカルボン酸 2無水物とジァミンの縮合物 であり、  [1] A photosensitive resin composition containing a soluble polyimide resin and a positive photosensitive agent, wherein the soluble polyimide resin is a condensate of aromatic tetracarboxylic dianhydride and diamine,
前記ジァミン力 S、シリコーンジァミン及び水酸基を有するジァミンを含有し 前記水酸基を有するジァミンが、へキサフルォロ 2 2 ビス(3 アミノー 4ーヒドロ キシフエ二ノレ)プロパンであり  The diamine containing S, silicone diamine, and diamine having a hydroxyl group, and the diamine having a hydroxyl group is hexafluoro 2 2 bis (3 amino-4-hydroxyphenylenole) propane.
へキサフルォロ 2,2 ビス(3 アミノー 4—ヒドロキシフエ二ノレ)プロパンの含有量 力 S、全ジァミンに対して 1 50モル%であることを特徴とする感光性ポリイミド組成物  Hexafluoro 2,2 bis (3 amino-4-hydroxyphenenole) propane content force S, 150 mol% with respect to all diamines, photosensitive polyimide composition
[2] 前記可溶性ポリイミド樹脂の重量平均分子量が、 20000 50000の範囲であり、 かつその分子量分布が 1山分布であることを特徴とする請求項 1に記載の感光性ポリ イミド組成物 [2] The photosensitive polyimide composition according to claim 1, wherein the soluble polyimide resin has a weight average molecular weight in the range of 20000 50000 and a molecular weight distribution of a single peak distribution.
[3] 可溶性ポリイミド樹脂及びポジ型感光剤を含有する感光性樹脂組成物であって、 前記可溶性ポリイミド樹脂が、芳香族テトラカルボン酸 2無水物とジァミンの縮合物 であり、  [3] A photosensitive resin composition containing a soluble polyimide resin and a positive photosensitive agent, wherein the soluble polyimide resin is a condensate of aromatic tetracarboxylic dianhydride and diamine,
前記ジァミン力 S、シリコーンジァミン及び水酸基を有するジァミンを含有し 前記可溶性ポリイミド樹脂の重量平均分子量が、 20000 50000であり、かつ分 子量分布が 1山分布で、分散が 2. 0以下であることを特徴とする感光性ポリイミド組 成物。  The soluble amine resin contains diamine power S, silicone diamine and hydroxyl group-containing diamine, the weight-average molecular weight is 20000 50000, the molecular weight distribution is a single peak distribution, and the dispersion is 2.0 or less. A photosensitive polyimide composition characterized by comprising:
[4] 溶媒可溶耐熱性樹脂、ポジ型感光剤、熱硬化剤及び溶媒を含有するポジ型感光 性樹脂組成物であって、  [4] A positive photosensitive resin composition comprising a solvent-soluble heat-resistant resin, a positive photosensitive agent, a thermosetting agent, and a solvent,
前記熱硬化剤が、メラミン系硬化剤であり、  The thermosetting agent is a melamine-based curing agent,
前記溶媒可溶耐熱性樹脂が、水酸基を有するジァミンをその構成単位に含有するポ リイミド樹脂又はポリアミドイミド樹脂であることを特徴とするポジ型感光性樹脂組成物  The positive-type photosensitive resin composition, wherein the solvent-soluble heat-resistant resin is a polyimide resin or a polyamide-imide resin containing diamine having a hydroxyl group as a structural unit
[5] 前記ポリイミド樹脂又はポリアミドイミド樹脂が、芳香族テトラカルボン酸 2無水物、又 は芳香族トリカルボン酸無水物に芳香族テトラカルボン酸 2無水物を加えてなる酸無 水物と、ジァミンの縮合物であることを特徴とする請求項 4に記載のポジ型感光性樹 脂組成物。 [5] The polyimide resin or the polyamideimide resin is an acid-free product obtained by adding an aromatic tetracarboxylic dianhydride to an aromatic tetracarboxylic dianhydride or an aromatic tricarboxylic anhydride. 5. The positive photosensitive resin composition according to claim 4, wherein the positive photosensitive resin composition is a condensate of water and diamine.
前記メラミン系硬化剤が、下記構造式 (I)で表されるメチロールメラミン系化合物で あることを特徴とする請求項 4又は請求項 5に記載のポジ型感光性樹脂組成物。  6. The positive photosensitive resin composition according to claim 4, wherein the melamine curing agent is a methylol melamine compound represented by the following structural formula (I).
[化 1]  [Chemical 1]
Figure imgf000050_0001
Figure imgf000050_0001
[式中、 Wは— NY Yを表し、 Y及び Yは、それぞれ独立して、水素、—CH -OZ In the formula, W represents —NY Y, Y and Y are each independently hydrogen, —CH 2 —OZ
5 6 5 6 2 又はフエ二ル基を表し、 Y〜Yは、それぞれ独立して、水素又は— CH ΟΖを表し、  5 6 5 6 2 or a phenyl group, Y to Y each independently represent hydrogen or —CH 2,
1 4 2  1 4 2
Ζは、水素又は炭素数;!〜 6のアルキル基を表す。 )  Ζ represents hydrogen or an alkyl group having 6 to 6 carbon atoms. )
[7] 前記水酸基を有するジァミンが、次の構造式: [7] The diamine having a hydroxyl group has the following structural formula:
[化 2] [Chemical 2]
Figure imgf000051_0001
Figure imgf000051_0001
で表される化合物群から選ばれることを特徴とする請求項 4な!/、し請求項 6の!/、ずれ かに記載のポジ型感光性樹脂組成物。 7. The positive photosensitive resin composition according to claim 4, wherein the positive photosensitive resin composition is selected from the group of compounds represented by:
[8] 前記ポジ型感光剤が、キノンジアジド化合物であることを特徴とする請求項 4ないし 請求項 7のいずれかに記載のポジ型感光性樹脂組成物。 [8] The positive photosensitive resin composition according to any one of [4] to [7], wherein the positive photosensitive agent is a quinonediazide compound.
[9] 可溶性ポリイミド樹脂、ポジ型感光剤及びこれらを溶解する溶媒を含有する感光性 ポリイミド組成物であって、 [9] A photosensitive polyimide composition containing a soluble polyimide resin, a positive photosensitive agent and a solvent for dissolving them,
前記可溶性ポリイミド樹脂が、芳香族テトラカルボン酸 2無水物とジァミンの縮合物 であり、  The soluble polyimide resin is a condensate of aromatic tetracarboxylic dianhydride and diamine,
前記ジァミンが、水酸基を有するジァミンを含有し  The diamine contains a diamine having a hydroxyl group.
前記感光性ポリイミド組成物中に含まれるピリジンの含有量力 0. 05重量%以下 であることを特徴とする感光性ポリイミド組成物。  The photosensitive polyimide composition, wherein the content power of pyridine contained in the photosensitive polyimide composition is 0.05% by weight or less.
[10] 前記可溶性ポリイミド樹脂の重量平均分子量が、 20000〜50000であることを特 徴とする請求項 9に記載の感光性ポリイミド組成物。 10. The photosensitive polyimide composition according to claim 9, wherein the soluble polyimide resin has a weight average molecular weight of 20000 to 50000.
[11] 水酸基を有するジァミンを、全ジァミンに対して 1〜50モル%含有することを特徴と する請求項 3、請求項 9又は請求項 10に記載の感光性ポリイミド組成物。 [11] The photosensitive polyimide composition according to [3], [9] or [10], wherein the diamine having a hydroxyl group is contained in an amount of 1 to 50 mol% based on the total diamine.
[12] 前記水酸基を有するジァミンが、へキサフルオロー 2,2—ビス(3—アミノー 4ーヒドロ キシフエニル)プロパンであることを特徴とする請求項 3又は請求項 9な!/、し請求項 11 の!/、ずれかに記載の感光性ポリイミド組成物。 [12] The diamine having a hydroxyl group is hexafluoro-2,2-bis (3-amino-4-hydroxyphenyl) propane, which is characterized in that the diamine has a hydroxyl group. /, The photosensitive polyimide composition as described in any of the above.
[13] 前記ジァミン力 シリコーンジァミンを全ジァミンに対して 5〜60モル0 /0含有すること を特徴とする請求項 1なレ、し請求項 3の!/、ずれか又は請求項 9な!/、し請求項 12の!/、 ずれかに記載の感光性ポリイミド組成物。 [13] according to claim 1 of Les characterized in that it contains 5 to 60 mole 0/0 the Jiamin force silicone di § Minh for all Jiamin, teeth of claim 3! /, Displacement or claim 9 The photosensitive polyimide composition according to any one of Claims 12 and 12.
[14] 前記シリコーンジァミンの重量平均分子量が、 1000以下であることを特徴とする請 求項 13に記載の感光性ポリイミド組成物。 [14] The photosensitive polyimide composition according to claim 13, wherein the silicone diamine has a weight average molecular weight of 1000 or less.
[15] 前記芳香族テトラカルボン酸 2無水物が、 4, 4 'ーォキシジフタル酸 2無水物を含有 することを特徴とする請求項 1なレ、し請求項 3の!/、ずれか又は請求項 9な!/、し請求項[15] The aromatic tetracarboxylic acid dianhydride contains 4, 4'-oxydiphthalic acid dianhydride, and the! /, Deviation or claim of claim 3 9!
14のいずれかに記載の感光性ポリイミド組成物。 15. The photosensitive polyimide composition according to any one of 14.
[16] ポジ型感光剤が、芳香族ポリヒドロキシ化合物のナフトキノンジアジドスルホニルェ ステルであることを特徴とする請求項 1な!/、し請求項 3の!/、ずれか又は請求項 9な!/、 し請求項 15のいずれかに記載の感光性ポリイミド組成物。 [16] The positive photosensitive agent is naphthoquinone diazide sulfonyl ester of an aromatic polyhydroxy compound, and is! / In claim 3, or in claim 9, or in claim 9. The photosensitive polyimide composition according to claim 15.
[17] 可溶性ポリイミド樹脂、ポジ型感光剤及びこれらを溶解する溶媒を含有する感光性 ポリイミド組成物の製造方法であって、 [17] A method for producing a photosensitive polyimide composition comprising a soluble polyimide resin, a positive photosensitive agent and a solvent for dissolving them,
芳香族テトラカルボン酸 2無水物とジァミンをピリジンの存在下で縮合して可溶性ポ リイミド樹脂を合成する縮合工程、  A condensation step of condensing aromatic tetracarboxylic dianhydride and diamine in the presence of pyridine to synthesize a soluble polyimide resin;
該縮合工程後、反応系からピリジンを、その含有量が 0. 05重量%以下となるまで 除去するピリジン除去工程、及び  After the condensation step, pyridine removal step for removing pyridine from the reaction system until the content is 0.05% by weight or less, and
前記可溶性ポリイミド樹脂と、ポジ型感光剤及び溶媒を混合する工程、 を有することを特徴とする感光性ポリイミド組成物の製造方法。  A method for producing a photosensitive polyimide composition, comprising: mixing the soluble polyimide resin, a positive photosensitive agent and a solvent.
[18] 芳香族テトラカルボン酸 2無水物と、シリコーンジァミン及び水酸基を有するジァミン を含有するジァミンを縮合する縮合反応工程を有し、 [18] a condensation reaction step of condensing an aromatic tetracarboxylic dianhydride with a diamine containing a silicone diamine and a diamine having a hydroxyl group,
前記縮合反応工程が、前記芳香族テトラカルボン酸 2無水物及び前記シリコーンジ ァミンの一部のみを溶解する溶媒中に、芳香族テトラカルボン酸 2無水物及びシリコ 一ンジァミンが懸濁した状態で縮合を開始し、その後、昇温しながら、芳香族テトラ力 ルボン酸 2無水物及びシリコーンジァミンを前記溶媒に溶解させて行うことを特徴とす る可溶性ポリイミド樹脂の製造方法。 In the condensation reaction step, the aromatic tetracarboxylic dianhydride and the silicone diamine are condensed in a solvent that dissolves only a part of the aromatic tetracarboxylic dianhydride and the silicone diamine. Then, the temperature is raised and the aromatic tetra force rubonic acid dianhydride and silicone diamine are dissolved in the solvent. A method for producing a soluble polyimide resin.
[19] 前記芳香族テトラカルボン酸 2無水物が、 4, 4 'ーォキシジフタル酸 2無水物を含有 するものであり、前記水酸基を有するジァミンが、へキサフルオロー 2, 2 ビス(3— アミノー 4ーヒドロキシフエニル)プロパンであり、前記溶媒が、 Ί ブチロラタトンであ ることを特徴とする請求項 18に記載の可溶性ポリイミド樹脂の製造方法。 [19] The aromatic tetracarboxylic dianhydride contains 4,4′-oxydiphthalic dianhydride, and the diamine having a hydroxyl group is hexafluoro-2,2bis (3-amino-4-hydroxy 19. The method for producing a soluble polyimide resin according to claim 18, wherein the solvent is phenyl propane, and the solvent is butyrolatatatone .
[20] フレキシブルプリント配線板の配線を被覆する保護膜であって、請求項 1な!/、し請 求項 3の!/、ずれか又は請求項 9な!/、し請求項 16の!/、ずれかに記載の感光性ポリイミ ド組成物の硬化物よりなることを特徴とする保護膜。  [20] A protective film covering the wiring of the flexible printed circuit board, which is claimed in claim 1! /, Claim 3! /, Or in claim 9! /, And claim 16! A protective film comprising a cured product of the photosensitive polyimide composition described in any one of the above.
[21] 請求項 20に記載の保護膜を有することを特徴とする FPC。  [21] An FPC comprising the protective film according to claim 20.
[22] 請求項 4な!/、し請求項 8の!/、ずれかに記載のポジ型感光性樹脂組成物を成膜し、 得られた膜を加熱して前記溶媒を除去することにより得られることを特徴とする感光 性樹脂フィルム。  [22] By forming the positive photosensitive resin composition according to claim 4! / And claim 8 // according to claim 8, and heating the resulting film to remove the solvent. A photosensitive resin film characterized by being obtained.
[23] 請求項 4な!/、し請求項 8の!/、ずれかに記載のポジ型感光性樹脂組成物を、配線が 形成された FPC基板上に塗布して成膜する工程、得られた膜を加熱して前記溶媒を 除去する工程、溶媒が除去された前記ポジ型感光性樹脂組成物を、マスクを通して 露光する工程、露光後現像する工程、及び現像後、前記メラミン硬化剤の硬化温度 以上に加熱する工程、を有することを特徴とする FPCの製造方法。  [23] A step of applying the positive photosensitive resin composition according to claim 4! /, Or claim 8 of claim 8 on the FPC substrate on which the wiring is formed to form a film. A step of removing the solvent by heating the formed film, a step of exposing the positive photosensitive resin composition from which the solvent has been removed through a mask, a step of developing after exposure, and a development, A method for producing an FPC, comprising a step of heating to a curing temperature or higher.
[24] 請求項 23に記載の FPCの製造方法により製造されたことを特徴とする FPC。  [24] An FPC manufactured by the method for manufacturing an FPC according to claim 23.
PCT/JP2007/065135 2006-08-08 2007-08-02 Photosensitive polyimide composition, positive photosensitive resin composition, and fpc WO2008018352A1 (en)

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
JP2006216281A JP2008040273A (en) 2006-08-08 2006-08-08 Photosensitive polyimide-silicone composition, protective film and flexible printed wiring board
JP2006-216281 2006-08-08
JP2007-033070 2007-02-14
JP2007033070A JP2008197418A (en) 2007-02-14 2007-02-14 Photosensitive polyimide composition and method for preparing the same
JP2007034945A JP2008195892A (en) 2007-02-15 2007-02-15 Photosensitive polyimide composition, preparation method of soluble polyimide resin and preparation method of photosensitive polyimide composition
JP2007-034945 2007-02-15
JP2007191035A JP2009025725A (en) 2007-07-23 2007-07-23 Positive photosensitive resin composition, resin film made from positive photosensitive resin composition thereof, fpc manufacturing method and fpc
JP2007-191035 2007-07-23

Publications (1)

Publication Number Publication Date
WO2008018352A1 true WO2008018352A1 (en) 2008-02-14

Family

ID=39032884

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/065135 WO2008018352A1 (en) 2006-08-08 2007-08-02 Photosensitive polyimide composition, positive photosensitive resin composition, and fpc

Country Status (1)

Country Link
WO (1) WO2008018352A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2009125845A1 (en) * 2008-04-10 2011-08-04 ソニーケミカル&インフォメーションデバイス株式会社 Manufacturing method of flexible wiring board
JP2014062255A (en) * 2013-10-30 2014-04-10 Nippon Kayaku Co Ltd Polyimide resin

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11100501A (en) * 1997-09-29 1999-04-13 Toray Ind Inc Preparation of positive photosensitive resin composition
JP2003337415A (en) * 2002-05-17 2003-11-28 Hitachi Chemical Dupont Microsystems Ltd Photosensitive polymer composition, method for producing relief pattern and electronic parts
JP2004212678A (en) * 2002-12-27 2004-07-29 Kyocera Chemical Corp Photosensitive resin composition and method for forming positive pattern

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11100501A (en) * 1997-09-29 1999-04-13 Toray Ind Inc Preparation of positive photosensitive resin composition
JP2003337415A (en) * 2002-05-17 2003-11-28 Hitachi Chemical Dupont Microsystems Ltd Photosensitive polymer composition, method for producing relief pattern and electronic parts
JP2004212678A (en) * 2002-12-27 2004-07-29 Kyocera Chemical Corp Photosensitive resin composition and method for forming positive pattern

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2009125845A1 (en) * 2008-04-10 2011-08-04 ソニーケミカル&インフォメーションデバイス株式会社 Manufacturing method of flexible wiring board
JP2014062255A (en) * 2013-10-30 2014-04-10 Nippon Kayaku Co Ltd Polyimide resin

Similar Documents

Publication Publication Date Title
JP5603977B2 (en) Polyimide precursor
US8349537B2 (en) Photosensitive ink composition for screen printing and method of forming positive relief pattern with use thereof
US8859170B2 (en) Photosensitive modified polyimide resin composition and use thereof
JP5497312B2 (en) Flexible printed circuit board
JPWO2008126818A1 (en) Photosensitive resin composition
TWI706221B (en) Laminated structure, dry film and flexible printed wiring board
JP6961342B2 (en) Polyimide resin and positive photosensitive resin composition
JP6743692B2 (en) Photosensitive resin composition, photosensitive sheet, semiconductor device, and method for manufacturing semiconductor device
JP2011202059A (en) Resin and positive photosensitive resin composition
JP4771412B2 (en) Photosensitive resin and method for producing the same
JP5381491B2 (en) Resin and positive photosensitive resin composition
JP5196148B2 (en) Photosensitive resin composition, polyimide resin film using the same, and flexible printed wiring board
WO2008018352A1 (en) Photosensitive polyimide composition, positive photosensitive resin composition, and fpc
JP3078175B2 (en) Photosensitive resin composition
JP2008040273A (en) Photosensitive polyimide-silicone composition, protective film and flexible printed wiring board
JP5068629B2 (en) Photosensitive resin composition, photosensitive dry film, photosensitive laminated film, and coverlay using the same
JP2009053646A (en) Photosensitive resin composition and photosensitive film using the same
JP7264688B2 (en) Photosensitive resin composition, dry film, cured product, and electronic component
JP2009025725A (en) Positive photosensitive resin composition, resin film made from positive photosensitive resin composition thereof, fpc manufacturing method and fpc
JP5571431B2 (en) Photosensitive resin composition
JP2010072143A (en) Positive photosensitive resin composition
JP2020094194A (en) Resin composition, resin sheet, cured film, cured film relief pattern manufacturing method, protective film, insulator film, electronic component, and display device
JP2008197418A (en) Photosensitive polyimide composition and method for preparing the same
JP2011209521A (en) Positive photosensitive resin composition
JP2009109592A (en) Photosensitive resin composition, photosensitive dry film, photosensitive laminated film and coverlay using those

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 07791815

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

NENP Non-entry into the national phase

Ref country code: RU

122 Ep: pct application non-entry in european phase

Ref document number: 07791815

Country of ref document: EP

Kind code of ref document: A1