WO2008011970A2 - Porte-pièce de position variable destiné à une machine et installation d'usinage comprenant un porte-pièce correspondant - Google Patents

Porte-pièce de position variable destiné à une machine et installation d'usinage comprenant un porte-pièce correspondant Download PDF

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Publication number
WO2008011970A2
WO2008011970A2 PCT/EP2007/005992 EP2007005992W WO2008011970A2 WO 2008011970 A2 WO2008011970 A2 WO 2008011970A2 EP 2007005992 W EP2007005992 W EP 2007005992W WO 2008011970 A2 WO2008011970 A2 WO 2008011970A2
Authority
WO
WIPO (PCT)
Prior art keywords
workpiece
support surface
workpiece table
support
parallel
Prior art date
Application number
PCT/EP2007/005992
Other languages
German (de)
English (en)
Other versions
WO2008011970A3 (fr
Inventor
Berthold Matzkovits
Kurt Brenner
Original Assignee
Carl Zeiss Industrielle Messtechnik Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss Industrielle Messtechnik Gmbh filed Critical Carl Zeiss Industrielle Messtechnik Gmbh
Publication of WO2008011970A2 publication Critical patent/WO2008011970A2/fr
Publication of WO2008011970A3 publication Critical patent/WO2008011970A3/fr

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
    • B23Q1/36—Springs
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/04—Ball or roller bearings
    • F16C29/045—Ball or roller bearings having rolling elements journaled in one of the moving parts
    • F16C29/046—Ball or roller bearings having rolling elements journaled in one of the moving parts with balls journaled in pockets
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
    • F16M7/00—Details of attaching or adjusting engine beds, frames, or supporting-legs on foundation or base; Attaching non-moving engine parts, e.g. cylinder blocks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2322/00—Apparatus used in shaping articles
    • F16C2322/39—General build up of machine tools, e.g. spindles, slides, actuators

Definitions

  • the invention relates to a workpiece support, comprising a workpiece table, which comprises a support surface for supporting a workpiece, and at least three bearing elements lying on a base for supporting the workpiece table, wherein at least one of these bearing elements is adjustable in length to the workpiece table by at least one parallel to the support surface tilted aligned axis and / or to change the position of the workpiece table perpendicular to the support surface can.
  • US 4,731,934 shows such a workpiece support in the form of a turntable for a coordinate measuring machine, on which the workpiece to be measured can be stored.
  • the turntable has a base that can be rotated about a vertical axis.
  • the workpiece table, on which the workpiece to be measured can then be attached, is mounted on three balls, the workpiece table having cooperating with the balls inner spherical elements which rest on the balls.
  • Two of the three balls are height adjustable via motor drives, so that the workpiece table can be rotated about each axis parallel to the support surface to thereby align the workpiece axis parallel to the axis of rotation of the turntable can.
  • two more motor drives are available over which the workpiece table can be moved in any direction relative to the base in the plane parallel to the support surface horizontal plane.
  • DE-OS 2 248 535 also shows a workpiece support for a measuring device on which a workpiece to be measured can be stored.
  • a workpiece support for a measuring device on which a workpiece to be measured can be stored.
  • This top plate is in this case supported by three balls on the middle plate, wherein both the top plate, as well as the middle plate for each of the balls have a V-guide, all V-guides have the same orientation, so that the top plate relative to the middle plate in a first horizontal direction can be moved.
  • the middle plate is mounted on the lower plate via three balls, the guide direction of this V-guides this time is perpendicular to the guide direction of the above-mentioned V-guides, so that the middle plate relative to the lower plate in a direction perpendicular to the first direction of movement second horizontal direction of movement is movable.
  • the lower plate thus assumes the function of the base.
  • DE 42 18 984 A1 shows a positioning system for optical testing equipment, in which a work table acting as a support plate on which an optical component to be tested can be arranged over six variable-length columns, relative to a base in all degrees of freedom can be moved.
  • the variable-length supports are hinged to the support plate and attached to the base.
  • transverse forces forces acting parallel to the bearing surface of the workpiece table, so usually in the horizontal direction
  • these are the spheres and the internally spherical elements interacting therewith.
  • transverse forces which are present perpendicular to the guide direction of the V-guides, also taken up by the balls and the V-guides.
  • DE 42 18 984 Al the transverse forces are absorbed by the variable-length columns.
  • the object is therefore to propose a workpiece support of the type mentioned, with the hysteresis can be avoided.
  • a workpiece support with the features of claim 1, wherein the workpiece support according to the invention contains a guide which receives transverse forces parallel to the support surface and thus prevents movement of the workpiece table in directions parallel to the support surface but tilted by at least one parallel to the support surface aligned Axis and / or movement of the entire workpiece table in a direction perpendicular to the support surface allows.
  • a linear guide e.g., a ball rail guide or an air bearing guide
  • a linear guide would be perfectly sufficient to movably support the work table in that direction.
  • the guide can also be designed as an elastic body which is stiff in directions parallel to the support surface and torsions about an axis perpendicular to the support surface and thus prevents movement of the workpiece table in directions parallel to the support surface, but at least by tilting a Axis aligned parallel to the bearing surface is designed to be elastic and / or is designed to be elastic with respect to a movement of the entire workpiece table in a direction perpendicular to the bearing surface.
  • This has the advantage that such a guide is virtually completely hysteresis-free, since this guide has no mutually movable parts.
  • a particularly simple, and thus advantageous embodiment of such an elastic body, which acts as a guide may be a leaf spring.
  • a leaf spring advantageously has an area which is parallel to the bearing surface of the workpiece table. In this way, on the one hand, the lateral forces are received in directions parallel to the support surface, since the leaf spring in these directions is almost stiff, while the leaf spring is flexible with respect to movements of the workpiece table perpendicular to the support surface and also with respect to rotations of the workpiece table about axes parallel to the support surface.
  • the leaf spring may in principle be rigidly connected at one end to the workpiece table, while it is rigidly connected at its other end to the base.
  • the leaf spring may have at least one of the ends of the region parallel to the support surface a second region angled at right angles to this region, which is perpendicular to the support surface.
  • leaf spring and other shaped elastic body can be used, which take over at least parts of the functions of the leaf spring just described.
  • a rigid frame could be used by itself corresponding milled areas become torsionally soft at defined locations.
  • It could also be several leaf springs, for example, a plurality of elastic rods, which are arranged side by side, can be used.
  • bearing elements a variety of bearings may be used, as they were also called input in the prior art.
  • balls could be used which interact with internal spherical elements or V-guides or articulated, variable-length legs.
  • bearing elements which can not absorb any transverse forces, ie forces parallel to the bearing surface.
  • Such a bearing element comprises a running element with a flat surface and a ball which is movably mounted on the flat surface of the running element. It is clear that the running element with the flat surface can of course also be an integral part of the workpiece table or the base, for example by simply incorporating a flat surface in the workpiece table or in the base itself.
  • Such a bearing element could, for example, comprise a ball roller with a ball bearing ball here, which is movably mounted on the flat surface.
  • a bearing element could also comprise a ball, which interacts with two running elements each having planar surfaces, wherein one of the running elements is connected to the workpiece table and the other running element is connected to the base.
  • the flat surface of the running element can also be inclined relative to the support surface by the running element is for example wedge-shaped. This has the particular advantage that a relative movement of the ball relative to the flat surface in a direction parallel to the support surface is converted into a movement perpendicular to the support surface, thereby achieving the change in length of the bearing element.
  • a running element for example in the form of a wedge, which is movably mounted in a direction parallel to the support surface and the flat surface is inclined in the direction of displacement relative to the support surface, so that upon displacement of the running element in the direction of displacement, the ball is moved perpendicular to the support surface and the workpiece table is thereby moved perpendicular to the support surface, that is raised or lowered at a horizontal support surface.
  • a wedge-shaped element with a flat surface which is inclined against the support surface, while the ball on the base in the direction of the support surface on the workpiece table is slidably mounted.
  • At least one spring is provided which at least partially compensates for this force in the direction of displacement.
  • the spring can, depending on the arrangement, be designed either as a tension spring or as a compression spring.
  • the workpiece table has a bearing surface on which a workpiece can be stored.
  • the workpiece can either be stored directly on the workpiece table by the workpiece is attached directly thereto. Alternatively, however, can be mounted on the workpiece table, a further device, such as a turntable or a jig on which in turn the workpiece is attached.
  • the workpieces can be a variety of variants.
  • it may be a wafer that is being machined to make an integrated circuit or a substrate, such as a glass sheet, that is coated on one side with a semiconductor layer.
  • a workpiece that is measured by a measuring device or a workpiece that is processed by a workpiece processing machine.
  • the base can also be designed differently. In the simplest case, this may be the hall floor on which the workpiece table is mounted via the bearing elements. Alternatively, this may be a component of the machine, which is possibly even movably mounted in one or more directions.
  • a further improvement results when the workpiece table is additionally mounted on at least one resilient element relative to the base, which receives at least parts of the weight of the workpiece table.
  • This has the particular advantage that the Bearing elements only need to absorb low weight forces, and thereby can move the possibly heavy workpiece table with relatively small forces.
  • the workpiece support described above can be used in a wide variety of machines.
  • the workpiece support can be used in a processing system with a machining tool for machining a workpiece comprising a semiconductor material to be processed, for example in a system with which the surface of a wafer or of a carrier substrate coated with a semiconductor material is melted by a laser beam Crystal structure of the semiconductor material to change.
  • the processing tool may then be a laser device which fans out a laser beam so that the laser beam impinging on the semiconductor material of the workpiece results in a line.
  • the base of the workpiece support should also be slidably mounted in at least one direction perpendicular to the plane defined by the fanned-out laser beam.
  • the respective position of the support surface of the workpiece table can be accurately determined, at least one bearing element, a distance measuring system is assigned, via which the distance between the base and the workpiece table can be determined. If the workpiece table is mounted on three variable-length bearing elements and each bearing element is associated with a distance measuring system, then the position of the bearing surface in the direction perpendicular to the support surface direction, as well as tilt angle about axes of rotation, which are aligned parallel to the support surface determined from the signals of the Wegmessysteme and be set.
  • the displacement measuring systems can be configured differently, for example with incremental scales, or with an inductive measuring system.
  • Figure 1 A processing plant 1 with a workpiece support 27 according to the invention
  • FIG. 1 Perspective view of the workpiece table 4 in the demounted state seen from the side below;
  • Figure 3 A bearing element 7a of Figure 2 in side view
  • Figure 4 The bearing element 7a of Figure 3 in plan view
  • Figure 5 + 6 schematic representation of the interaction between the carriage 17a and the ball 16a of the ball roller 15a;
  • Figure 7 Perspective view of the ball roller 15a with a cut
  • FIG. 8 Perspective view of the path measuring system 29a from FIG.
  • FIG. 1 shows a processing installation 1 with a workpiece support 27 according to the invention.
  • the processing installation 1 has a laser 2 with which the laser beam required for processing the workpiece, which is not closer here (a glass plate which is coated with a semiconductor layer), is produced.
  • the laser beam is reflected by mirrors into an optical system 3, by means of which the laser beam is fanned out in such a way that the laser beam incident on the semiconductor material gives a line transversely to the direction of movement (see arrow y) of the workpiece support 27.
  • the optical system 3 is in this case mounted on a base frame 6 via a steel construction 23, which in turn is supported by dampers 26 on the underlying floor.
  • the workpiece support 27, on which the workpiece to be machined rests, can only be roughly recognized here in FIG.
  • This workpiece support 27 comprises a base 5 which are movably guided via air bearings 25 in the direction of the arrow y.
  • a channel 24 is incorporated in the base frame 6, via which the workpiece support 27 also guided laterally.
  • the workpiece support 27 is driven by a friction wheel drive, not shown here in detail, wherein the exact position of the workpiece support is determined via a likewise not closer to scale.
  • the workpiece support also includes a workpiece table 4, on the workpiece (a glass plate with a semiconductor layer) rests.
  • the workpiece table 4 has a support surface 28, which is horizontally aligned in the present case.
  • the position of the workpiece table 4 can be moved in the direction indicated by the arrow z perpendicular to its horizontal support surface 28 on which the workpiece rests so that the workpiece so in the vertical direction can be moved up and down a total of the laser beam.
  • the workpiece table 4 can also be tilted about an arbitrary axis parallel to the bearing surface 28, that is to say both about an axis of rotation which is parallel to the arrow designated x, and about an axis of rotation parallel to the arrow y. In this way, the support surface 28 and consequently the surface of the workpiece resting thereon can also be tilted with respect to the laser beam.
  • FIG. 2 shows parts of the workpiece table 4 together with the elements which are necessary for the movement of the workpiece table 4, in the disassembled state in a perspective view from the side below.
  • three bearing elements 7a, 7b, 7c are provided on the workpiece table 4 for mounting the workpiece table 4 on the base 5, which is not visible here.
  • the bearing elements 7a, 7b, 7c are on the one hand on its upper side connected to the workpiece table 4, while its bottom, in the present case, the plates 13a, 13b and 13c rest on the not visible in Figure 2 base 5 and are fixed here.
  • all three bearing elements 7a, 7b, 7c are designed to be adjustable in length in the direction shown by the arrow z, as will be described in more detail below with reference to FIGS. 3 to 8.
  • the workpiece table 4 on the one hand be moved so that the position of the workpiece table 4 is changed perpendicular to the support surface 28.
  • the respective length La (length of the bearing element 7a, see Figure 3), Lb (length of the bearing element 7b) and Lc (length of the bearing element 7c) are extended or shortened by the same amount.
  • the support surface 28 of the workpiece table can also be tilted about a substantially any axis parallel to the bearing surface 28, ie an axis which is parallel to the arrows x or y, by the lengths La, Lb and Lc of the bearing elements 7a, 7b and 7c are changed so that the length differences La-Lb and / or La-Lc and / or La-Lb change.
  • a guide is further provided which receives transverse forces parallel to the support surface 28, ie in the directions indicated by the arrows x and y directions and thus prevents movement of the workpiece table 4 in directions parallel to the support surface 28, but a tilt by at least an aligned parallel to the support surface axis and / or movement of the entire workpiece table 4 perpendicular to the support surface 28 permits.
  • the guide is advantageously designed as an elastic body which is rigid in directions parallel to the support surface 28, ie in directions of the arrows x and y and torsions about an axis perpendicular to the support surface, ie torsions about an axis parallel to the axis z.
  • movements of the workpiece table in directions parallel to the support surface 28 are prevented, so movements in directions x and y and also rotations about a parallel axis z axis of rotation.
  • With respect to tilting about an aligned parallel to the support surface 28 axis of the elastic body is designed to be elastic and with respect to a movement of the entire workpiece table 4 in a direction z perpendicular to the support surface 28th
  • this elastic body through which the guide is realized, realized by a leaf spring 8, which, inter alia, a region 8a which is parallel to the support surface 28 of the workpiece table and at one end of the bearing surface 28 parallel to the area 8a opposite This region has an angularly angled second region 8b, which is perpendicular to the support surface 28.
  • both ends of the leaf spring 8 are rigidly connected to the workpiece table 4, namely once via a terminal block 1 1, and the other via a terminal block 12.
  • the workpiece table 4 is additionally mounted on resilient elements 22a, 22b, 22c which respectively receive parts of the weight force of the workpiece table 4.
  • resilient elements 22a, 22b and 22c are provided on the resilient elements 22a, 22b and 22c, so that the bearing elements 7a, 7b, 7c can move the workpiece table 4 with very small forces.
  • Reference numeral 29c denotes a displacement measuring system with which the respective set length Lc (cf., the length La for the bearing element 7a in FIG. 3) of the associated bearing element 7c can be determined, here the distance between the base 5 and the workpiece table 4 corresponds.
  • the other bearing elements 7a and 7b have corresponding displacement measuring systems, with which the respective set length Lb and Lc can be detected, so that via a corresponding control loop by the control highly accurately a desired position of the workpiece table 4 in the direction of support surface 28 perpendicular direction (see Arrow z) and / or a tilt about an axis parallel to the support surface 28 can be adjusted.
  • FIG. 3 shows the bearing element 7a in the side view and FIG. 4 in the plan view.
  • the bearing element 7a is only partially cut away via a plate 13 at the in FIG attached base 5 attached.
  • this has a linear drive, which is designed for example in the form of a spindle drive.
  • the spindle drive in this case comprises an electromotive drive 20a and a threaded spindle 19a, which is driven via the electromotive drive 20a.
  • the threaded spindle 19a cooperates with an internal thread of a guided on a ball rail guide 35 slide 17a and moves it in the direction indicated by the arrow x direction.
  • the carriage 17a is partially covered by a spring 18a, the exact function will be explained later.
  • the carriage 17a in this case has a plane 32a, which is inclined relative to the horizontal and thus relative to the bearing surface 28, wherein the ball 16a of a ball roller 15a runs on this plane 32a.
  • the ball roller 15a is mounted slightly inclined in a holder 14a, which in turn is fastened to the workpiece table 4, which is shown only partially in section in FIG.
  • FIG. 6 shows purely schematically the carriage 17a from FIG. 3, which is moved by the spindle drive in the direction indicated by the arrow x. Due to the inclined plane 32a of the carriage 17a, the ball 16a of the ball roller 15a is raised in the direction indicated by the arrow z. The hub 14a is transferred to the workpiece table 4 via the holder 14a to be seen in FIG.
  • FIG. 7 shows exactly the reverse process to FIG.
  • the carriage 17a is displaced in the direction indicated by the arrow -x. Due to the inclined plane 32a of the carriage 17a, the ball 16a of the ball roller 15a is lowered in the direction indicated by the arrow -z. By way of the holder 14a to be seen in FIG. 3, the lowering is transmitted to the workpiece table 4.
  • the bearing element 7a shown here comprises a wedge-shaped running element (carriage 17a) which is mounted displaceably parallel to the support surface 28 and which has a flat surface 32a, which is inclined in the displacement direction relative to the support surface 28.
  • the bearing element 7a also comprises a ball-mounted ball 16a in a ball roller 15a, which is movably mounted on the flat surface 32a of the running element (carriage 17a).
  • FIG. 8 shows a perspective view of a displacement measuring system 29a, which is constructed in the same way as the displacement measuring system 29c according to FIG. 2, but which is associated with the bearing element 7a.
  • This is a displacement measuring system in which the distance of a plate 30a from the encapsulated measuring device 31a is measured by means of a corresponding measuring device.
  • the encapsulated measuring device 31 a is in this case attached to the base 5, while the plate 30 a is fixed to the workpiece table 4.
  • the plate 30 is connected via a rod to a reading head located in the interior of the measuring device 31a, which determines the respective position with respect to an incremental scale also located in the interior of the measuring device 31a.
  • the respective position of the plate 30a relative to the measuring device 31a can be determined.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Units (AREA)

Abstract

La présente invention concerne un porte-pièce (27) destiné à une machine, comprenant : une table de réception de pièce (4) présentant une surface d'appui (28) destinée à servir d'appui à une pièce; au moins trois éléments d'appui (7a, 7b, 7c) reposant sur une base (5) et destinés à faire appuyer la table de réception de pièce (4) sur la base (5), au moins l'un de ces éléments d'appui étant réglable en longueur pour permettre à la table de réception de pièce d'être basculée autour d'au moins un axe parallèle à la surface d'appui et/ou pour permettre à la position de la table de réception de pièce d'être modifiée perpendiculairement à la surface d'appui. En outre, afin d'éviter les phénomènes d'hystérésis lors du déplacement de la table de réception de pièce, un système de guidage, par exemple un ressort à lame (8), est utilisé, le système de guidage prenant en charge les forces transversales parallèlement à la surface d'appui, et évitant ainsi le mouvement de la table de réception de pièce dans des directions parallèles à la surface d'appui tout en permettant le basculement autour du/des axe(s) parallèles à la surface d'appui et/ou le mouvement de l'ensemble de la table de réception de pièce perpendiculairement à la surface d'appui.
PCT/EP2007/005992 2006-07-26 2007-07-06 Porte-pièce de position variable destiné à une machine et installation d'usinage comprenant un porte-pièce correspondant WO2008011970A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102006034455.3 2006-07-26
DE102006034455A DE102006034455A1 (de) 2006-07-26 2006-07-26 Lageveränderliche Werkstückauflage für eine Maschine und Bearbeitungsanlage mit einer entsprechenden Werkstückauflage

Publications (2)

Publication Number Publication Date
WO2008011970A2 true WO2008011970A2 (fr) 2008-01-31
WO2008011970A3 WO2008011970A3 (fr) 2008-03-20

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WO (1) WO2008011970A2 (fr)

Cited By (1)

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Publication number Priority date Publication date Assignee Title
US20120053724A1 (en) * 2010-08-31 2012-03-01 Kabushiki Kaisha Yaskawa Denki Robot system

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Publication number Priority date Publication date Assignee Title
DE102011005157A1 (de) * 2011-03-04 2012-09-27 JRT Photovoltaics GmbH & Co. KG Bearbeitungsstation für flächige Substrate, insbesondere Solarzellen
DE102013205024B4 (de) 2013-03-21 2024-07-04 Carl Zeiss Industrielle Messtechnik Gmbh Ausgleichselement, Koordinatenmessgerät sowie Verfahren zur Montage
DE102014225270A1 (de) * 2014-12-09 2016-06-09 Gebr. Schmid Gmbh Kontaktrahmen für elektrochemische Substratbeschichtung
DE102016202603B3 (de) * 2016-02-19 2017-06-22 Carl Zeiss Industrielle Messtechnik Gmbh Ausgleichselement, Koordinatenmessgerät sowie Verfahren zur Montage

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US4770531A (en) * 1986-05-23 1988-09-13 Nippon Kogaku K. K. Stage device with levelling mechanism
EP0503712A1 (fr) * 1991-03-08 1992-09-16 Koninklijke Philips Electronics N.V. Dispositif de soutien avec une table d'objet inclinable, et dispositif de lithographie optique muni de ce dispositif
WO1993022616A1 (fr) * 1992-05-04 1993-11-11 New Focus, Inc. Micropositionneur de precision
US5740699A (en) * 1995-04-06 1998-04-21 Spar Aerospace Limited Wrist joint which is longitudinally extendible
EP1111471A2 (fr) * 1999-12-21 2001-06-27 Asm Lithography B.V. Appareil lithographique muni d'un dispositif de positionnement anti-collision
US6336375B1 (en) * 1994-03-02 2002-01-08 Renishaw, Plc Coordinate positioning machine
EP1276015A2 (fr) * 2001-07-09 2003-01-15 Canon Kabushiki Kaisha Dispositif porte-objet et procédé pour son entraínement

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4770531A (en) * 1986-05-23 1988-09-13 Nippon Kogaku K. K. Stage device with levelling mechanism
EP0503712A1 (fr) * 1991-03-08 1992-09-16 Koninklijke Philips Electronics N.V. Dispositif de soutien avec une table d'objet inclinable, et dispositif de lithographie optique muni de ce dispositif
WO1993022616A1 (fr) * 1992-05-04 1993-11-11 New Focus, Inc. Micropositionneur de precision
US6336375B1 (en) * 1994-03-02 2002-01-08 Renishaw, Plc Coordinate positioning machine
US5740699A (en) * 1995-04-06 1998-04-21 Spar Aerospace Limited Wrist joint which is longitudinally extendible
EP1111471A2 (fr) * 1999-12-21 2001-06-27 Asm Lithography B.V. Appareil lithographique muni d'un dispositif de positionnement anti-collision
EP1276015A2 (fr) * 2001-07-09 2003-01-15 Canon Kabushiki Kaisha Dispositif porte-objet et procédé pour son entraínement

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120053724A1 (en) * 2010-08-31 2012-03-01 Kabushiki Kaisha Yaskawa Denki Robot system
US8954182B2 (en) * 2010-08-31 2015-02-10 Kabushiki Kaisha Yaskawa Denki Robot system

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DE102006034455A1 (de) 2008-01-31
WO2008011970A3 (fr) 2008-03-20

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